JP2007188936A - 表示装置 - Google Patents
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- JP2007188936A JP2007188936A JP2006003484A JP2006003484A JP2007188936A JP 2007188936 A JP2007188936 A JP 2007188936A JP 2006003484 A JP2006003484 A JP 2006003484A JP 2006003484 A JP2006003484 A JP 2006003484A JP 2007188936 A JP2007188936 A JP 2007188936A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 118
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 239000004973 liquid crystal related substance Substances 0.000 claims description 39
- 239000003990 capacitor Substances 0.000 claims description 29
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 174
- 239000010408 film Substances 0.000 description 73
- 108091006146 Channels Proteins 0.000 description 27
- 239000011229 interlayer Substances 0.000 description 14
- 229910000838 Al alloy Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000005224 laser annealing Methods 0.000 description 2
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/13—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body combined with thin-film or thick-film passive components
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- H01L29/772—Field effect transistors
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- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
Abstract
【解決手段】第1の基板100上に複数の画素を備え、各画素は、ゲート絶縁膜11を介して半導体層10と交差したゲートライン20と、ドレイン領域10dに第1のコンタクトホールC1を介して接続され、交差部から延びた半導体層10の上方を覆うドレインライン17と、ソース領域10sに第2のコンタクトホールC2を介して接続され、交差部から延びた半導体層10の上方を覆って形成されたソース電極10sとを備える。さらに、半導体層10の下方にバッファ膜13を介して形成され、半導体層10への光の入射を遮る遮光層12を備える。
【選択図】 図1
Description
次に、本発明の第1の実施の形態に係る液晶表示装置について図面を参照しながら説明する。この液晶表示装置は、図14に示したものと同様に、n行m列マトリクスに配置された複数の画素を備える。そして、各画素のTFTの上方をドレインライン及びソース電極で遮光するとともに、その下方に遮光層を設けて遮光することにより、液晶表示装置の上方及び下方からの入射光や、それらの反射光がリーク電流の発生源となるTFTの半導体層の空乏層に入射するのを抑止したものである。
次に、本発明の第2の実施の形態に係る液晶表示装置について図面を参照しながら説明する。この液晶表示装置は、図14に示したものと同様に、n行m列マトリクスに配置された複数の画素を備え、各画素のTFTはダブルゲート構造を有する。第1の実施の形態と異なる点は、TFTの能動層がU字形ではなくL字形のパターンで形成されている点と、TFTの上方をドレインラインだけで遮光している点である。その他の特徴は第1の実施形態と全く同じである。
次に、本発明の第3の実施の形態に係る液晶表示装置について図面を参照しながら説明する。この液晶表示装置は、図14に示したものと同様に、n行m列マトリクスに配置された複数の画素を備え、各画素のTFTはシングルゲート構造を有する。第1の実施の形態と異なる点は、TFTが単一のゲートを有したシングルゲート構造である点と、TFTの上方をドレインラインだけで遮光している点である。その他の特徴は第1の実施形態と全く同じである。
第1、第2、第3の実施の形態では、画素のTFTを遮光する構造について説明したが、本実施形態では、水平ドライブ回路の水平スイッチを構成するTFTの遮光構造について説明する。まず、画素と水平ドライブ回路の関係について図8を参照して説明する。
第4の実施の形態では、水平ドライブ回路の水平スイッチに用いられるTFTの遮光構造について説明したが、本実施形態では水平ドライブ回路140A、垂直ドライブ回路130Aのインバータに用いられるTFTの遮光構造について説明する。そのようなTFTについても、バックライト等の外光が入射するとリーク電流が発生し、インバータの誤動作や消費電流の増加を招くため、同様な遮光構造を採用する意義がある。
10c,10Ac,10Bc,60c,70c チャネル領域
10d,10Ad,10Bd,60d,70d ドレイン領域
10s,10As,10Bs,60s,70s ソース領域
11 ゲート絶縁膜 12,12A,12B,62,72 遮光層
13 バッファ膜 14,14A,14B 下部電極層
15,15A,15B 保持容量ライン 16 層間絶縁膜
17,17A,17B ドレインライン 18,18A,18B ソース電極
19 パッシベーション膜 20,20A,20B ゲートライン
21 平坦化膜 22 画素電極
50,50A,50B TFT 61,71 ゲート電極
63,73 ドレイン電極 64,74 ソース電極
100 第1の基板 110 薄膜トランジスタ(TFT)
120 ゲートライン 121 ドレインライン
130,130A 垂直ドライブ回路 140,140A 水平ドライブ回路
141 シフトレジスタ 200 第2の基板 210 対向電極
250,LC 液晶 Csc 保持容量
C1,C1A,C1B 第1のコンタクトホール
C2,C2A,C2B 第2のコンタクトホール
C3,C3A,C3B 第3のコンタクトホール
C4,C5,C6,C7,C8 コンタクトホール
HSW1,HSW2,HSW3 水平スイッチ
SP1,SP2,SP3 水平走査信号 Vsig ビデオ信号
Claims (15)
- 第1の基板上に画素を備え、前記画素は、U字形に屈曲した半導体層と、ゲート絶縁膜を介して前記半導体層と第1及び第2の交差部で交差したゲートラインと、前記半導体層のドレイン領域に第1のコンタクトホールを介して接続され、前記第1の交差部から延びた半導体層の上方を覆って形成されたドレインラインと、前記半導体層のソース領域に第2のコンタクトホールを介して接続され、前記第2の交差部から延びた半導体層の上方を覆って形成されたソース電極と、前記第1及び第2の交差部の半導体層の下方にバッファ膜を介して形成され、前記半導体層への光の入射を遮る遮光層と、前記半導体層上に前記ゲート絶縁膜を介して形成された容量ラインと、前記ソース電極に接続された画素電極とを備えることを特徴とする表示装置。
- 第1の基板上に画素を備え、前記画素は、半導体層と、ゲート絶縁膜を介して前記半導体層と第1及び第2の交差部で交差したゲートラインと、前記半導体層のドレイン領域に第1のコンタクトホールを介して接続され、前記第1及び第2の交差部から延びた半導体層の上方を覆って形成されたドレインラインと、前記半導体層のソース領域に第2のコンタクトホールを介して接続されたソース電極と、前記第1及び第2の交差部の半導体層の下方にバッファ膜を介して形成され、前記半導体層への光の入射を遮る遮光層と、前記半導体層上に前記ゲート絶縁膜を介して形成された容量ラインと、前記ソース電極に接続された画素電極とを備えることを特徴とする表示装置。
- 第1の基板上に画素を備え、前記画素は、半導体層と、ゲート絶縁膜を介して前記半導体層と1つの交差部で交差したゲートラインと、前記半導体層のドレイン領域に第1のコンタクトホールを介して接続され、前記交差部から延びた半導体層の上方を覆って形成されたドレインラインと、前記半導体層のソース領域に第2のコンタクトホールを介して接続されたソース電極と、前記交差部の半導体層の下方にバッファ膜を介して形成され、前記半導体層への光の入射を遮る遮光層と、前記半導体層上に前記ゲート絶縁膜を介して形成された容量ラインと、前記ソース電極に接続された画素電極とを備えることを特徴とする表示装置。
- 前記第1の基板に対向して配置された第2の基板と、前記第1の基板と前記第2の基板の間に封入された液晶とを備えることを特徴とする請求項1、2、3に記載の表示装置。
- 前記遮光層の電位と前記ゲートラインの電位とが同一に設定されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記遮光層と前記ゲートラインとは前記画素の形成領域を除いた前記第1の基板上でコンタクトで接続されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記遮光層の電位と前記容量ラインの電位とが同一に設定されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記バッファ膜の膜厚は300nm以上であることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記ソース電極及びドレインラインの端が前記遮光層の端部より外側に拡張されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記遮光層の端部が前記ソース電極及びドレインラインの端より外側に拡張されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記ソース領域及びドレイン領域はそれぞれ低濃度領域と高濃度領域とから構成され、前記遮光層は前記低濃度領域の全体を覆い、さらに前記低濃度領域の端から前記高濃度領域を2μm以上覆って形成されていることを特徴とする請求項1、2、3、4に記載の表示装置。
- 前記遮光層は前記半導体層の端から2μm以上外側に拡張されていることを特徴とする請求項10に記載の表示装置。
- 前記ソース領域及び前記ドレイン領域はそれぞれ低濃度領域と高濃度領域とから構成され、前記ソース電極及び前記ドレインラインは前記低濃度領域の全体を覆い、さらに前記低濃度領域の端から前記高濃度領域を2μm以上覆って形成されていることを特徴とする請求項1に記載の表示装置。
- 前記ソース電極及び前記ドレインラインは、前記半導体層の端から2μm以上外側に拡張されていることを特徴とする請求項12に記載の表示装置。
- 前記遮光層は、前記第1及び前記第2のコンタクトホールの下方を除いた領域に形成されていることを特徴とする請求項1、2、3、4に記載の表示装置。
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JP2006003484A JP2007188936A (ja) | 2006-01-11 | 2006-01-11 | 表示装置 |
TW095147847A TWI351568B (en) | 2006-01-11 | 2006-12-20 | Display device |
CN200710001337.4A CN100559596C (zh) | 2006-01-11 | 2007-01-10 | 显示装置 |
US11/651,464 US8174633B2 (en) | 2006-01-11 | 2007-01-10 | Display device |
KR1020070002826A KR100846543B1 (ko) | 2006-01-11 | 2007-01-10 | 표시 장치 |
CN200810185171.0A CN101452174B (zh) | 2006-01-11 | 2007-01-10 | 显示装置 |
KR1020080011904A KR20080015502A (ko) | 2006-01-11 | 2008-02-05 | 표시 장치 |
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WO2012056663A1 (ja) * | 2010-10-28 | 2012-05-03 | シャープ株式会社 | 回路基板及びその製造方法並びに表示装置 |
WO2012144517A1 (ja) * | 2011-04-22 | 2012-10-26 | シャープ株式会社 | 液晶表示パネル |
AU2012246546B2 (en) * | 2011-04-22 | 2014-08-07 | Sharp Kabushiki Kaisha | Liquid crystal display panel |
JP5657784B2 (ja) * | 2011-04-22 | 2015-01-21 | シャープ株式会社 | 液晶表示パネル |
JP2019195064A (ja) * | 2013-04-04 | 2019-11-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US11495626B2 (en) | 2013-04-04 | 2022-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2015130453A (ja) * | 2014-01-09 | 2015-07-16 | 株式会社Joled | 薄膜トランジスタ、表示装置および電子機器 |
JP2016009719A (ja) * | 2014-06-23 | 2016-01-18 | 株式会社ジャパンディスプレイ | 薄膜半導体装置 |
JP2016009791A (ja) * | 2014-06-25 | 2016-01-18 | 株式会社ジャパンディスプレイ | 半導体装置、及びその製造方法 |
KR20170026009A (ko) * | 2015-08-31 | 2017-03-08 | 엘지디스플레이 주식회사 | 유기발광표시장치 |
KR102367215B1 (ko) | 2015-08-31 | 2022-02-24 | 엘지디스플레이 주식회사 | 유기발광표시장치 |
JP2018018082A (ja) * | 2016-07-29 | 2018-02-01 | エルジー ディスプレイ カンパニー リミテッド | 狭ベゼル平板表示装置 |
US10274796B2 (en) | 2016-07-29 | 2019-04-30 | Lg Display Co., Ltd. | Display having narrow bezel |
JP2019117892A (ja) * | 2017-12-27 | 2019-07-18 | 株式会社ジャパンディスプレイ | アレイ基板、アレイ基板の製造方法、表示装置及びスイッチング素子 |
JP7045185B2 (ja) | 2017-12-27 | 2022-03-31 | 株式会社ジャパンディスプレイ | アレイ基板、アレイ基板の製造方法、表示装置及びスイッチング素子 |
Also Published As
Publication number | Publication date |
---|---|
CN100559596C (zh) | 2009-11-11 |
KR100846543B1 (ko) | 2008-07-15 |
US8174633B2 (en) | 2012-05-08 |
TW200730983A (en) | 2007-08-16 |
CN101452174A (zh) | 2009-06-10 |
CN101000914A (zh) | 2007-07-18 |
CN101452174B (zh) | 2012-07-18 |
KR20070075316A (ko) | 2007-07-18 |
KR20080015502A (ko) | 2008-02-19 |
TWI351568B (en) | 2011-11-01 |
US20070159565A1 (en) | 2007-07-12 |
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