JP2006510225A - ウェル注入を用いた集積回路の改変 - Google Patents
ウェル注入を用いた集積回路の改変 Download PDFInfo
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- JP2006510225A JP2006510225A JP2004560826A JP2004560826A JP2006510225A JP 2006510225 A JP2006510225 A JP 2006510225A JP 2004560826 A JP2004560826 A JP 2004560826A JP 2004560826 A JP2004560826 A JP 2004560826A JP 2006510225 A JP2006510225 A JP 2006510225A
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- 238000002513 implantation Methods 0.000 title description 7
- 230000004048 modification Effects 0.000 title description 2
- 238000012986 modification Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 88
- 239000000758 substrate Substances 0.000 claims description 64
- 239000004065 semiconductor Substances 0.000 claims description 42
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 description 45
- -1 Phosphorus ions Chemical class 0.000 description 28
- 239000007943 implant Substances 0.000 description 21
- 229910052698 phosphorus Inorganic materials 0.000 description 20
- 239000011574 phosphorus Substances 0.000 description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 14
- 229920005591 polysilicon Polymers 0.000 description 14
- 229910052796 boron Inorganic materials 0.000 description 11
- 230000006870 function Effects 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000002898 library design Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823892—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Drying Of Semiconductors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (13)
- ゲート領域を有する偽装回路構造であって、
基板と、
前記基板に配置された第1の導電型の第1の活性領域と、
前記基板に配置された第1の導電型の第2の活性領域と、
前記ゲート領域下で前記基板内に配置され、前記第1の活性領域および前記第2の活性領域と物理的に接触している前記第1の導電型の第1のウェルとを含み、
前記第1のウェルが、前記回路に適正な電圧が印加されているか否かにかかわらず、前記第1の活性領域と第2の活性領域との間に電気経路を形成することを特徴とする偽装回路構造。 - 複数の第2の型のウェルをさらに含み、前記複数の第2の型のウェルの少なくとも1つが前記第1の活性領域と物理的に接触している、請求項1に記載の偽装回路構造。
- 前記複数のウェルの少なくとも1つが、第1の導電型と第2の導電型との最小の分離幅で前記第1のウェルから分離されている、請求項2に記載の偽装回路構造。
- 前記第1のウェルが、前記複数の第2の型のウェルよりも深い、請求項2に記載の偽装回路構造。
- 前記第1のウェルが、前記第1および第2の活性領域よりも深い、請求項1から4のいずれか1つに記載の偽装回路構造。
- ゲート領域を有する基板と、
前記基板に配置された複数の第1の導電型の活性領域であって、その少なくとも2つが前記ゲート領域によって互いに分離されているところの活性領域と、
前記ゲート領域下で前記基板に配置されるとともに、前記複数の前記活性領域の前記少なくとも2つと物理的に接触している、前記第1の導電型の第1のウェルと、
前記複数の活性領域の前記少なくとも2つの下で部分的に配置され、前記第1のウェルから分離されている、複数の第2の型のウェルと
を含む半導体回路。 - 第1の導電型の基板に、ゲート領域を有するとともに、少なくとも2つの第2の導電型の活性領域を有するデバイスを調製するステップと、
第2の導電型を有する第1のウェルを前記ゲート領域の下方に挿入するステップと
を含む、回路を偽装する方法であって、
前記ゲート領域の下方における前記第1のウェルが、前記少なくとも2つの活性領域と物理的に接触し、前記ゲート領域の下方における前記第1のウェルが、前記ゲート領域に適正な電圧が印加されているか否かにかかわらず、前記少なくとも2つの活性領域の間に電気経路を形成する
ことを特徴とする方法。 - 第1のウェルを前記ゲート領域の下方に挿入する前記ステップが、前記ゲート領域下の前記ウェルが前記少なくとも2つの活性領域よりも深くなるように、前記ゲート領域の下方に前記第1のウェルを打ち込むことを含む、請求項7に記載の方法。
- 第1の導電型と第2の導電型との最小の分離幅で前記第1のウェルから分離されている、第1の導電型を有する第2のウェルを、前記少なくとも2つの活性領域の少なくとも一部分の下方に挿入するステップをさらに含む、請求項8に記載の方法。
- 前記ゲート領域の下方における前記第1のウェルが前記第2のウェルよりも深い、請求項9に記載の方法。
- 従来のダブルウェル製造プロセスを変更して、従来の第1の導電型のウェルを第2の導電型のウェルで置き換えるステップを含む、CMOS回路を形成する方法。
- CMOSデバイスが複数の活性領域を含み、前記第2の導電型のウェルが前記複数の活性領域よりも深い、請求項11に記載の方法。
- 少なくとも1つの第1の導電型の追加ウェルを形成するステップをさらに含み、前記第2の導電型のウェルが前記少なくとも1つの追加ウェルよりも浅い、請求項11または12のいずれか1つに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43331402P | 2002-12-13 | 2002-12-13 | |
US60/433,314 | 2002-12-13 | ||
PCT/US2003/039594 WO2004055868A2 (en) | 2002-12-13 | 2003-12-10 | Integrated circuit modification using well implants |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006510225A true JP2006510225A (ja) | 2006-03-23 |
JP2006510225A5 JP2006510225A5 (ja) | 2007-01-25 |
JP4846239B2 JP4846239B2 (ja) | 2011-12-28 |
Family
ID=32595156
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004560826A Expired - Fee Related JP4846239B2 (ja) | 2002-12-13 | 2003-12-10 | ウェル注入を用いた集積回路の改変 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7514755B2 (ja) |
JP (1) | JP4846239B2 (ja) |
AU (1) | AU2003293540A1 (ja) |
GB (1) | GB2412240B (ja) |
TW (1) | TWI336507B (ja) |
WO (1) | WO2004055868A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010505279A (ja) * | 2006-09-28 | 2010-02-18 | エイチアールエル ラボラトリーズ,エルエルシー | リバースエンジニアリングに対する改善された抵抗力を有する半導体チップ |
JP2017191926A (ja) * | 2016-04-13 | 2017-10-19 | イーメモリー テクノロジー インコーポレイテッド | 偽装機能を有する半導体装置 |
Families Citing this family (17)
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US7217977B2 (en) * | 2004-04-19 | 2007-05-15 | Hrl Laboratories, Llc | Covert transformation of transistor properties as a circuit protection method |
US7049667B2 (en) | 2002-09-27 | 2006-05-23 | Hrl Laboratories, Llc | Conductive channel pseudo block process and circuit to inhibit reverse engineering |
US6979606B2 (en) | 2002-11-22 | 2005-12-27 | Hrl Laboratories, Llc | Use of silicon block process step to camouflage a false transistor |
AU2003293540A1 (en) * | 2002-12-13 | 2004-07-09 | Raytheon Company | Integrated circuit modification using well implants |
US7242063B1 (en) | 2004-06-29 | 2007-07-10 | Hrl Laboratories, Llc | Symmetric non-intrusive and covert technique to render a transistor permanently non-operable |
DE102005028905A1 (de) * | 2005-06-22 | 2006-12-28 | Infineon Technologies Ag | Transistorbauelement |
US8151235B2 (en) * | 2009-02-24 | 2012-04-03 | Syphermedia International, Inc. | Camouflaging a standard cell based integrated circuit |
US9735781B2 (en) | 2009-02-24 | 2017-08-15 | Syphermedia International, Inc. | Physically unclonable camouflage structure and methods for fabricating same |
US8510700B2 (en) | 2009-02-24 | 2013-08-13 | Syphermedia International, Inc. | Method and apparatus for camouflaging a standard cell based integrated circuit with micro circuits and post processing |
US8418091B2 (en) | 2009-02-24 | 2013-04-09 | Syphermedia International, Inc. | Method and apparatus for camouflaging a standard cell based integrated circuit |
US10691860B2 (en) | 2009-02-24 | 2020-06-23 | Rambus Inc. | Secure logic locking and configuration with camouflaged programmable micro netlists |
US8111089B2 (en) * | 2009-05-28 | 2012-02-07 | Syphermedia International, Inc. | Building block for a secure CMOS logic cell library |
US9479176B1 (en) | 2013-12-09 | 2016-10-25 | Rambus Inc. | Methods and circuits for protecting integrated circuits from reverse engineering |
US9401361B2 (en) * | 2014-02-12 | 2016-07-26 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement having first semiconductor device over first shallow well having first conductivity type and second semiconductor device over second shallow well having second conductivity type and formation thereof |
DE102016124590B4 (de) * | 2016-12-16 | 2023-12-28 | Infineon Technologies Ag | Halbleiterchip |
WO2019212410A1 (en) * | 2018-05-02 | 2019-11-07 | Nanyang Technological University | Integrated circuit layout cell, integrated circuit layout arrangement, and methods of forming the same |
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JPH02237038A (ja) * | 1989-03-09 | 1990-09-19 | Ricoh Co Ltd | 半導体装置 |
JPH06163539A (ja) * | 1992-07-31 | 1994-06-10 | Hughes Aircraft Co | 注入相互連結を使用する集積回路安全システム及び方法 |
JPH1154606A (ja) * | 1997-08-04 | 1999-02-26 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置 |
JP2000040809A (ja) * | 1998-07-23 | 2000-02-08 | Seiko Epson Corp | 半導体装置 |
JP2002539636A (ja) * | 1999-03-18 | 2002-11-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 珪化物使用の透明連結部分を有する半導体デバイスおよびその製法 |
JP2004518273A (ja) * | 2000-10-25 | 2004-06-17 | エイチアールエル ラボラトリーズ,エルエルシー | リバースエンジニアリングを防止するための半導体デバイス中の打込み隠れ相互接続 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010505279A (ja) * | 2006-09-28 | 2010-02-18 | エイチアールエル ラボラトリーズ,エルエルシー | リバースエンジニアリングに対する改善された抵抗力を有する半導体チップ |
JP2017191926A (ja) * | 2016-04-13 | 2017-10-19 | イーメモリー テクノロジー インコーポレイテッド | 偽装機能を有する半導体装置 |
US10090260B2 (en) | 2016-04-13 | 2018-10-02 | Ememory Technology Inc. | Semiconductor apparatus with fake functionality |
Also Published As
Publication number | Publication date |
---|---|
GB2412240B (en) | 2007-05-09 |
WO2004055868A2 (en) | 2004-07-01 |
JP4846239B2 (ja) | 2011-12-28 |
US7514755B2 (en) | 2009-04-07 |
TWI336507B (en) | 2011-01-21 |
GB2412240A (en) | 2005-09-21 |
AU2003293540A1 (en) | 2004-07-09 |
US20040144998A1 (en) | 2004-07-29 |
TW200425410A (en) | 2004-11-16 |
US8524553B2 (en) | 2013-09-03 |
US20090170255A1 (en) | 2009-07-02 |
GB0512203D0 (en) | 2005-07-27 |
WO2004055868A3 (en) | 2004-10-07 |
AU2003293540A8 (en) | 2004-07-09 |
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