JP2005531420A - 接触する超小型構造体における凹凸の形成の低減 - Google Patents
接触する超小型構造体における凹凸の形成の低減 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
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Abstract
Description
多数のマイクロマシンは、可動カンチレバー、リボン構造体、又は他の類似の超小型構造体を利用する。一般に、これらの超小型構造体は、極めて薄く、即ち数百または数千オングストロームのオーダであり、リリースエッチングプロセスを通じて形成される。
本発明の実施形態によるデバイスは、基板の上方に浮かされた1つ又は複数の超小型構造体を含む。超小型構造体は、以下に限定しないが、基板に対して移動して基板の一部に接触するように構成されたカンチレバー、リボン、及びくしの構造体とすることができる。好適には、超小型構造体は、約50μm〜約500μmの範囲の長さ、及び約4.0μm〜約40μmの範囲の幅を有するリボンであり、約300nm〜約3000nmの範囲の1つ又は複数の波長を有する光を変調するように構成される。
図1aを参照すると、光学MEMデバイスは、基板102の上方に空間的に配列された複数の可動リボン100を有することができる。リボンの上面に対応する表面104、及びリボン間の基板の領域は、反射性である。表面104は、銀またはアルミニウムのような反射性材料の薄膜を基板102及びリボン100に堆積することにより、反射性にされる。リボン及び基板構造体は、シリコンベースの材料から製作される。基板102の反射表面104とリボン100の反射表面104との間の高さの差103は、リボン100が図1aに示されるように上側位置にある場合にλ/2になるように構成される。波長λの光がリボンと基板の表面104を含む反射表面の補集合に入射する場合、基板102とリボン100の表面104から反射される光は、同相になる。基板102の反射表面104に当たる光は、リボン100の反射表面104に当たる光よりもλ/2だけ更に進む。そして、基板102の反射表面104から反射されて戻る光の部分は、λ/2を加えて合計で1つの完全な波長λを進んで戻る。従って、反射表面104の補集合は、波長λを有する入射光源に対するミラーとして機能する。
Claims (20)
- 基板の上方に浮かされた超小型構造体を含み、前記超小型構造体および前記基板が接触領域と非接触領域を含み、前記超小型構造体が、前記基板の非接触領域と前記超小型構造体との間にバイアス電圧を印加することにより前記基板に対して移動するように構成されると同時に、前記基板の接触領域と前記超小型構造体の接触領域との間に一定の電圧を維持するように構成されている、デバイス。
- 前記基板が、金属層の間に挟まれた絶縁体層を含む、請求項1のデバイス。
- 前記絶縁体層が酸化物からなる、請求項2のデバイス。
- 少なくとも1つの金属層が、窒化チタンからなる、請求項2のデバイス。
- 前記超小型構造体が、金属層の間に挟まれた絶縁体層を含む、請求項1のデバイス。
- 少なくとも1つの金属層が、窒化チタンからなる、請求項5のデバイス。
- 少なくとも1つの金属層が、アルミニウムからなる、請求項5のデバイス。
- 前記超小型構造体がリボン構造体である、請求項1のデバイス。
- 光学MEMデバイスであって、
a.光を変調するための手段であって、金属−絶縁体−金属の基板の上方に浮かされたリボンを含む、手段と、及び
b.第1の組のリボンを第2の組のリボンに対して移動させるための手段であって、前記第1及び第2の組のリボンの一方、並びに基板が、実質的に同じ電位の接触領域を介して接触する、手段とを含む、光学MEMデバイス。 - 前記リボンが、窒化チタン及びアルミニウムの金属層を含む、請求項9の光学MEMデバイス。
- 前記リボンが、窒化チタンの層とアルミニウムの層との間に挟まれた窒化ケイ素の層を含む、請求項10の光学MEMデバイス。
- 前記金属−絶縁体−金属の基板が、窒化チタンの金属層および酸化物の絶縁体層からなる、請求項9の光学MEMデバイス。
- 前記第1の組のリボンを前記第2の組のリボンに対して移動させるための手段が、前記金属−絶縁体−金属の基板の上側金属層と前記第1の組および前記第2の組のリボンの一方との間にバイアス電圧を印加するように構成された回路を含む、請求項9の光学MEMデバイス。
- 前記接触領域が、前記第1の組および前記第2の組のリボンの一方の金属下部層の一部、及び前記金属−絶縁体−金属の基板の下側金属層の一部に対応する、請求項13の光学MEMデバイス。
- 前記接触領域が窒化チタンからなる、請求項14の光学MEMデバイス。
- マイクロデバイスを作成する方法であって、その方法が、
a.上側金属層、接触領域を有する下側金属層、及び前記上側金属層と前記下側金属層との間にある絶縁体層からなる基板を形成するステップであって、前記上側金属層および前記絶縁体層が、前記下側金属層の表面上の基板接触領域を露出するようにパターン形成される、ステップと、及び
b.リボンの接触領域および非接触領域を有する金属下部層を含むリボンを交互に並ぶようにした状態で、リボンを形成するステップとを含む、方法。 - 前記上側金属層と前記金属下部層との間に印加される電位よりも少ない電位状態で、前記交互に並んだリボン及び前記基板が前記基板接触領域および前記リボンの接触領域を介して接触するのに十分な電位を、前記上側金属層と前記金属下部層との間に印加するように構成された電圧源に前記リボンと前記下側金属層を結合することを更に含む、請求項16の方法。
- 前記基板を形成するステップが、
a.前記下側金属層を形成するために、シリコンウェハ上に窒化チタンを堆積し、及び
b.前記絶縁体層および前記上側金属層をそれぞれ形成するために、酸化ケイ素および窒化チタンを選択的に堆積し、前記絶縁体層および前記上側金属層が前記基板接触領域を有するようにパターン形成されることを含む、請求項16の方法。 - 前記リボンを形成するステップが、
a.前記基板上にポリシリコンの層を堆積し、
b.前記金属下部層を含むデバイス層を形成し、
c.前記デバイス層を前記リボンへと切断し、及び
d.前記リボンを解放するために前記ポリシリコンをエッチングすることを含む、請求項18の方法。 - 前記リボンの接触領域が突出するように、前記ポリシリコン層が、前記デバイス層を形成する前にエッチングされ、前記リボンが前記基板に取り付けられる、請求項19の方法。
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US10/187,159 US6813059B2 (en) | 2002-06-28 | 2002-06-28 | Reduced formation of asperities in contact micro-structures |
PCT/US2003/015213 WO2004003620A1 (en) | 2002-06-28 | 2003-05-14 | Reduced formation of asperities in contact micro-structures |
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US (1) | US6813059B2 (ja) |
JP (1) | JP2005531420A (ja) |
AU (1) | AU2003229085A1 (ja) |
WO (1) | WO2004003620A1 (ja) |
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WO2018074084A1 (ja) * | 2016-10-19 | 2018-04-26 | ソニーセミコンダクタソリューションズ株式会社 | 半導体デバイスおよび表示装置ならびに電子機器 |
JPWO2018074084A1 (ja) * | 2016-10-19 | 2019-08-08 | ソニーセミコンダクタソリューションズ株式会社 | 半導体デバイスおよび表示装置ならびに電子機器 |
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AU2003229085A1 (en) | 2004-01-19 |
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