JP2003060077A5 - - Google Patents

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Publication number
JP2003060077A5
JP2003060077A5 JP2002017840A JP2002017840A JP2003060077A5 JP 2003060077 A5 JP2003060077 A5 JP 2003060077A5 JP 2002017840 A JP2002017840 A JP 2002017840A JP 2002017840 A JP2002017840 A JP 2002017840A JP 2003060077 A5 JP2003060077 A5 JP 2003060077A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002017840A
Other versions
JP2003060077A (ja
JP4353393B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002017840A priority Critical patent/JP4353393B2/ja
Priority claimed from JP2002017840A external-priority patent/JP4353393B2/ja
Priority to TW091110054A priority patent/TW541668B/zh
Priority to US10/158,903 priority patent/US6885057B2/en
Priority to KR1020020031301A priority patent/KR20030011227A/ko
Publication of JP2003060077A publication Critical patent/JP2003060077A/ja
Priority to US11/104,488 priority patent/US6998674B2/en
Publication of JP2003060077A5 publication Critical patent/JP2003060077A5/ja
Priority to US11/288,287 priority patent/US7087942B2/en
Priority to US11/452,275 priority patent/US7388238B2/en
Priority to US12/078,992 priority patent/US7569881B2/en
Priority to KR1020080048868A priority patent/KR20080053450A/ko
Priority to US12/457,917 priority patent/US7964484B2/en
Publication of JP4353393B2 publication Critical patent/JP4353393B2/ja
Application granted granted Critical
Priority to KR1020100027411A priority patent/KR20100049517A/ko
Priority to KR1020100078270A priority patent/KR20100095416A/ko
Priority to KR1020100105198A priority patent/KR20100132937A/ko
Priority to US13/067,177 priority patent/US8125017B2/en
Priority to KR1020110140997A priority patent/KR101252997B1/ko
Priority to KR1020110141006A priority patent/KR101260194B1/ko
Priority to KR1020110141001A priority patent/KR20120022687A/ko
Priority to KR1020110145764A priority patent/KR20120005427A/ko
Priority to US13/352,142 priority patent/US8232589B2/en
Priority to US13/528,025 priority patent/US8437179B2/en
Priority to US13/865,279 priority patent/US8797791B2/en
Priority to US14/323,064 priority patent/US9111636B2/en
Priority to US14/826,911 priority patent/US9530485B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002017840A 2001-06-05 2002-01-28 半導体集積回路装置 Expired - Lifetime JP4353393B2 (ja)

Priority Applications (23)

Application Number Priority Date Filing Date Title
JP2002017840A JP4353393B2 (ja) 2001-06-05 2002-01-28 半導体集積回路装置
TW091110054A TW541668B (en) 2001-06-05 2002-05-14 Semiconductor integrated circuit device and manufacturing method thereof
US10/158,903 US6885057B2 (en) 2001-06-05 2002-06-03 Semiconductor integrated circuit device with reduced leakage current
KR1020020031301A KR20030011227A (ko) 2001-06-05 2002-06-04 반도체 집적 회로 장치 및 그 제조 방법
US11/104,488 US6998674B2 (en) 2001-06-05 2005-04-13 Semiconductor integrated circuit device with reduced leakage current
US11/288,287 US7087942B2 (en) 2001-06-05 2005-11-29 Semiconductor integrated circuit device with reduced leakage current
US11/452,275 US7388238B2 (en) 2001-06-05 2006-06-14 Semiconductor integrated circuit device with reduced leakage current
US12/078,992 US7569881B2 (en) 2001-06-05 2008-04-09 Semiconductor integrated circuit device with reduced leakage current
KR1020080048868A KR20080053450A (ko) 2001-06-05 2008-05-26 반도체 집적 회로 장치
US12/457,917 US7964484B2 (en) 2001-06-05 2009-06-25 Semiconductor integrated circuit device with reduced leakage current
KR1020100027411A KR20100049517A (ko) 2001-06-05 2010-03-26 반도체 집적 회로 장치
KR1020100078270A KR20100095416A (ko) 2001-06-05 2010-08-13 반도체 집적 회로 장치
KR1020100105198A KR20100132937A (ko) 2001-06-05 2010-10-27 반도체 집적 회로 장치
US13/067,177 US8125017B2 (en) 2001-06-05 2011-05-13 Semiconductor integrated circuit device with reduced leakage current
KR1020110141001A KR20120022687A (ko) 2001-06-05 2011-12-23 반도체 집적 회로 장치
KR1020110141006A KR101260194B1 (ko) 2001-06-05 2011-12-23 반도체 집적 회로 장치
KR1020110140997A KR101252997B1 (ko) 2001-06-05 2011-12-23 반도체 집적 회로 장치
KR1020110145764A KR20120005427A (ko) 2001-06-05 2011-12-29 반도체 집적 회로 장치
US13/352,142 US8232589B2 (en) 2001-06-05 2012-01-17 Semiconductor integrated circuit device with reduced leakage current
US13/528,025 US8437179B2 (en) 2001-06-05 2012-06-20 Semiconductor integrated circuit device with reduced leakage current
US13/865,279 US8797791B2 (en) 2001-06-05 2013-04-18 Semiconductor integrated circuit device with reduced leakage current
US14/323,064 US9111636B2 (en) 2001-06-05 2014-07-03 Semiconductor integrated circuit device with reduced leakage current
US14/826,911 US9530485B2 (en) 2001-06-05 2015-08-14 Semiconductor integrated circuit device with reduced leakage current

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001168945 2001-06-05
JP2001-168945 2001-06-05
JP2002017840A JP4353393B2 (ja) 2001-06-05 2002-01-28 半導体集積回路装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2005020477A Division JP4311561B2 (ja) 2001-06-05 2005-01-28 半導体集積回路装置と半導体装置の製造方法
JP2007064514A Division JP2007251173A (ja) 2001-06-05 2007-03-14 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2003060077A JP2003060077A (ja) 2003-02-28
JP2003060077A5 true JP2003060077A5 (ja) 2005-08-18
JP4353393B2 JP4353393B2 (ja) 2009-10-28

Family

ID=26616338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002017840A Expired - Lifetime JP4353393B2 (ja) 2001-06-05 2002-01-28 半導体集積回路装置

Country Status (4)

Country Link
US (12) US6885057B2 (ja)
JP (1) JP4353393B2 (ja)
KR (9) KR20030011227A (ja)
TW (1) TW541668B (ja)

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