EP1469701A3 - Erhobene Mikrostrukturen - Google Patents

Erhobene Mikrostrukturen Download PDF

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Publication number
EP1469701A3
EP1469701A3 EP04076015A EP04076015A EP1469701A3 EP 1469701 A3 EP1469701 A3 EP 1469701A3 EP 04076015 A EP04076015 A EP 04076015A EP 04076015 A EP04076015 A EP 04076015A EP 1469701 A3 EP1469701 A3 EP 1469701A3
Authority
EP
European Patent Office
Prior art keywords
raised
raised microstructures
film
microstructures
raised micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04076015A
Other languages
English (en)
French (fr)
Other versions
EP1469701A2 (de
EP1469701B1 (de
Inventor
Michael Pederson
Peter V. Loeppert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knowles Electronics LLC
Original Assignee
Knowles Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/910,110 external-priority patent/US6987859B2/en
Application filed by Knowles Electronics LLC filed Critical Knowles Electronics LLC
Publication of EP1469701A2 publication Critical patent/EP1469701A2/de
Publication of EP1469701A3 publication Critical patent/EP1469701A3/de
Application granted granted Critical
Publication of EP1469701B1 publication Critical patent/EP1469701B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Silicon Compounds (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Inorganic Insulating Materials (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Silicon Polymers (AREA)
  • Amplifiers (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
EP04076015A 2000-08-11 2001-08-10 Erhobene Mikrostrukturen Expired - Lifetime EP1469701B1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US63740100A 2000-08-11 2000-08-11
US637401 2000-08-11
US910110 2001-07-20
US09/910,110 US6987859B2 (en) 2001-07-20 2001-07-20 Raised microstructure of silicon based device
EP01959715A EP1310136B1 (de) 2000-08-11 2001-08-10 Breitbandiger miniaturwandler

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP01959715A Division EP1310136B1 (de) 2000-08-11 2001-08-10 Breitbandiger miniaturwandler

Publications (3)

Publication Number Publication Date
EP1469701A2 EP1469701A2 (de) 2004-10-20
EP1469701A3 true EP1469701A3 (de) 2005-11-16
EP1469701B1 EP1469701B1 (de) 2008-04-16

Family

ID=27092826

Family Applications (2)

Application Number Title Priority Date Filing Date
EP01959715A Expired - Lifetime EP1310136B1 (de) 2000-08-11 2001-08-10 Breitbandiger miniaturwandler
EP04076015A Expired - Lifetime EP1469701B1 (de) 2000-08-11 2001-08-10 Erhobene Mikrostrukturen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP01959715A Expired - Lifetime EP1310136B1 (de) 2000-08-11 2001-08-10 Breitbandiger miniaturwandler

Country Status (9)

Country Link
EP (2) EP1310136B1 (de)
JP (3) JP4338395B2 (de)
KR (1) KR100571967B1 (de)
CN (2) CN1498513B (de)
AT (2) ATE321429T1 (de)
AU (1) AU2001281241A1 (de)
DE (2) DE60118208T2 (de)
DK (2) DK1469701T3 (de)
WO (1) WO2002015636A2 (de)

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EP1469701A2 (de) 2004-10-20
DE60133679D1 (de) 2008-05-29
JP5049312B2 (ja) 2012-10-17
CN101867858A (zh) 2010-10-20
JP2004506394A (ja) 2004-02-26
KR20030033026A (ko) 2003-04-26
DE60118208T2 (de) 2007-04-12
CN101867858B (zh) 2012-02-22
AU2001281241A1 (en) 2002-02-25
ATE392790T1 (de) 2008-05-15
DK1469701T3 (da) 2008-08-18
JP2007116721A (ja) 2007-05-10
DK1310136T3 (da) 2006-07-31
WO2002015636A3 (en) 2002-10-24
KR100571967B1 (ko) 2006-04-18
DE60133679T2 (de) 2009-06-10
CN1498513A (zh) 2004-05-19
WO2002015636A2 (en) 2002-02-21
JP4338395B2 (ja) 2009-10-07
EP1469701B1 (de) 2008-04-16
JP2009153203A (ja) 2009-07-09
EP1310136A2 (de) 2003-05-14
CN1498513B (zh) 2010-07-14
ATE321429T1 (de) 2006-04-15
EP1310136B1 (de) 2006-03-22
DE60118208D1 (de) 2006-05-11

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