WO2002015636A3 - Miniature broadband transducer - Google Patents

Miniature broadband transducer Download PDF

Info

Publication number
WO2002015636A3
WO2002015636A3 PCT/US2001/025184 US0125184W WO0215636A3 WO 2002015636 A3 WO2002015636 A3 WO 2002015636A3 US 0125184 W US0125184 W US 0125184W WO 0215636 A3 WO0215636 A3 WO 0215636A3
Authority
WO
WIPO (PCT)
Prior art keywords
perforated member
diaphragm
disclosed
support ring
micro
Prior art date
Application number
PCT/US2001/025184
Other languages
French (fr)
Other versions
WO2002015636A2 (en
Inventor
Michael Pedersen
Peter V Loeppert
Sung Bok Lee
Original Assignee
Knowles Electronics Llc
Michael Pedersen
Peter V Loeppert
Sung Bok Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/910,110 external-priority patent/US6987859B2/en
Application filed by Knowles Electronics Llc, Michael Pedersen, Peter V Loeppert, Sung Bok Lee filed Critical Knowles Electronics Llc
Priority to CN018140300A priority Critical patent/CN1498513B/en
Priority to JP2002519372A priority patent/JP4338395B2/en
Priority to AU2001281241A priority patent/AU2001281241A1/en
Priority to KR1020037002017A priority patent/KR100571967B1/en
Priority to DE60118208T priority patent/DE60118208T2/en
Priority to EP01959715A priority patent/EP1310136B1/en
Priority to DK04076015T priority patent/DK1469701T3/en
Publication of WO2002015636A2 publication Critical patent/WO2002015636A2/en
Publication of WO2002015636A3 publication Critical patent/WO2002015636A3/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Silicon Compounds (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Inorganic Insulating Materials (AREA)
  • Amplifiers (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Silicon Polymers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

Multiple embodiments of solid state micro-structures, such as a condenser microphone, are disclosed. According to one embodiment, the transducer a fixed perforated member, a freely movable diaphragm spaced from the perforated member, a support ring in the perforated member maintaining the proper spacing between the diaphragm and the perforated member near the perimeter; and compliant suspension springs allowing the diaphragm to rest freely on the support ring and yet mechanically decouples the diaphragm from the perforated member. According to another embodiment, a raised micro-structure is disclosed for use in a silicon based device. The raised micro-structure comprises a generally planar film having a ribbed sidewall supporting the film.
PCT/US2001/025184 2000-08-11 2001-08-10 Miniature broadband transducer WO2002015636A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN018140300A CN1498513B (en) 2000-08-11 2001-08-10 Miniature broadband transducer
JP2002519372A JP4338395B2 (en) 2000-08-11 2001-08-10 Small broadband converter
AU2001281241A AU2001281241A1 (en) 2000-08-11 2001-08-10 Miniature broadband transducer
KR1020037002017A KR100571967B1 (en) 2000-08-11 2001-08-10 Miniature broadband transducer
DE60118208T DE60118208T2 (en) 2000-08-11 2001-08-10 WIDE BAND MINIATURE CONVERTER
EP01959715A EP1310136B1 (en) 2000-08-11 2001-08-10 Miniature broadband transducer
DK04076015T DK1469701T3 (en) 2000-08-11 2001-08-10 Elevated microstructures

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US63740100A 2000-08-11 2000-08-11
US09/637,401 2000-08-11
US09/910,110 US6987859B2 (en) 2001-07-20 2001-07-20 Raised microstructure of silicon based device
US09/910,110 2001-07-20

Publications (2)

Publication Number Publication Date
WO2002015636A2 WO2002015636A2 (en) 2002-02-21
WO2002015636A3 true WO2002015636A3 (en) 2002-10-24

Family

ID=27092826

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/025184 WO2002015636A2 (en) 2000-08-11 2001-08-10 Miniature broadband transducer

Country Status (9)

Country Link
EP (2) EP1469701B1 (en)
JP (3) JP4338395B2 (en)
KR (1) KR100571967B1 (en)
CN (2) CN1498513B (en)
AT (2) ATE392790T1 (en)
AU (1) AU2001281241A1 (en)
DE (2) DE60118208T2 (en)
DK (2) DK1469701T3 (en)
WO (1) WO2002015636A2 (en)

Families Citing this family (119)

* Cited by examiner, † Cited by third party
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Also Published As

Publication number Publication date
DE60118208T2 (en) 2007-04-12
EP1310136A2 (en) 2003-05-14
DE60118208D1 (en) 2006-05-11
JP2009153203A (en) 2009-07-09
ATE392790T1 (en) 2008-05-15
EP1469701B1 (en) 2008-04-16
EP1469701A2 (en) 2004-10-20
WO2002015636A2 (en) 2002-02-21
CN101867858A (en) 2010-10-20
JP4338395B2 (en) 2009-10-07
ATE321429T1 (en) 2006-04-15
JP2004506394A (en) 2004-02-26
CN101867858B (en) 2012-02-22
CN1498513B (en) 2010-07-14
DK1469701T3 (en) 2008-08-18
DE60133679T2 (en) 2009-06-10
JP5049312B2 (en) 2012-10-17
EP1469701A3 (en) 2005-11-16
KR20030033026A (en) 2003-04-26
DE60133679D1 (en) 2008-05-29
DK1310136T3 (en) 2006-07-31
JP2007116721A (en) 2007-05-10
EP1310136B1 (en) 2006-03-22
AU2001281241A1 (en) 2002-02-25
CN1498513A (en) 2004-05-19
KR100571967B1 (en) 2006-04-18

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