CN102873020B - Connection cover of mega sound wave energy transducer - Google Patents
Connection cover of mega sound wave energy transducer Download PDFInfo
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- CN102873020B CN102873020B CN201210388571.8A CN201210388571A CN102873020B CN 102873020 B CN102873020 B CN 102873020B CN 201210388571 A CN201210388571 A CN 201210388571A CN 102873020 B CN102873020 B CN 102873020B
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- connection cover
- cover body
- cold gas
- gas outlet
- inlet channel
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Abstract
The invention discloses a connection cover of a mega sound wave energy transducer. The connection cover comprises a connection cover body, an annular inner cavity, at least one groove, a cooling air inlet channel and a cooling air outlet channel, wherein the outer side wall of the annular inner cavity is connected with the inner side wall of the connection cover body; the grooves are uniformly formed in the inner side wall of the annular inner cavity; an air inlet at one end of the cooling air inlet channel is formed in the connection cover body, and an air port at the other end of the cooling air inlet channel is formed in the inner side wall of the annular inner cavity; and an air outlet at one end of the cooling air outlet channel is formed in the connection cover body, and an air port at the other end of the cooling air outlet channel is formed in the outer side wall of the annular inner cavity. On the premise of realizing a connection function, the connection cover has a sealing structure capable of cooling a piezo-electric crystal and separating air from liquid, so that heat produced by frequent vibration of the piezo-electric crystal can be quickly dissipated without being accumulated, and a relative independent environment can be kept; and the continuous working time and the service life of the piezo-electric crystal can be prolonged.
Description
Technical field
The present invention relates to semiconductor process technique field, particularly a kind of connection cover of megasonic transducer.
Background technology
Faced by semiconductor cleaning process, integrated circuit live width becomes less and less, the particle affecting silicon chip fraction defective is more and more less, and during the challenge of the more little more difficult cleaning of particle, mega sonic wave cleaning is more and more subject to people's attention, and the mechanism of mega sonic wave cleaning is cleaned silicon chip by high energy frequency vibration effect and in conjunction with the chemical reaction of chemical.When cleaning, by transducer, to send wavelength be 1 μm of frequency is the high energy sound wave of 0.8 megahertz, and solution molecule does accelerated motion under the promotion of this sound wave, and maximum instantaneous velocity can reach 30cm/s.Therefore, do not become the bubble that Ultrasonic Cleaning is such, and can only with fluid wave bump wafer surface at a high speed, the fine particles of the pollutant that silicon chip surface is adhered to is forced to remove and enters into cleaning fluid.But because reciprocal and dither inevitably discharge some heats while generation high energy sound wave, pile up for a long time when heat and can not get release and produce the ability of high-energy wave and the life-span after the service time of respective element by having a strong impact on transducer, so the service life in order to better ensure the effect that mega sonic wave cleans and transducer, the cooling matched with it is necessary.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, a kind of connection cover of megasonic transducer is provided, have can cooling press electric crystal and by gas-liquid isolate hermetically-sealed construction, the heat that piezo-electric crystal frequent vibration is produced dissipates rapidly and does not accumulate.
(2) technical scheme
The invention provides a kind of connection cover of megasonic transducer, comprise: connection cover body, annular cavity, groove, cold gas inlet channel and cold gas outlet passageway, described annular cavity lateral wall is connected with connection cover body madial wall, described groove is at least one, it is evenly arranged on annular cavity madial wall, the air inlet of described cold gas inlet channel one end is arranged on connection cover body, other end gas port is arranged on annular cavity madial wall, the gas outlet of described cold gas outlet passageway one end is arranged on connection cover body, other end gas port is arranged on annular cavity lateral wall.
Wherein, the connection cover of megasonic transducer also comprises: be positioned at connection cover body and contact cable fixing hole connecting thread hole on end face and connection cover body top offered with megasonic transducer.
Wherein, described connection cover bulk material is nonmetallic materials, and its profile is any one geometry.
Wherein, described this body profile of connection cover is cylindrical, rectangular shaped post or triangle cylindricality.
Wherein, described connection cover bulk material is polytetrafluoroethylene (PTFE), polytetrafluoroethylene (PTFE) alkoxy resin, Kynoar or polyether-ether-ketone resin.
Wherein, the gas outlet of the air inlet of the cold gas inlet channel one end on described connection cover body and cold gas outlet passageway one end is arranged on described in not in the same horizontal line.
Wherein, described groove is any one geometry.
Wherein, described groove is semicircle, rectangle or square.
(3) beneficial effect
The connection cover of megasonic transducer provided by the invention, under the prerequisite realizing linkage function, have can cooling press electric crystal and by gas-liquid isolate hermetically-sealed construction, the heat that piezo-electric crystal frequent vibration is produced dissipates rapidly and does not accumulate, and ensure that relatively independent environment, improve stream time and the service life of piezo-electric crystal.
Accompanying drawing explanation
Fig. 1 is the connection cover internal structure schematic diagram of megasonic transducer of the present invention;
Fig. 2 is the connection cover external structure schematic diagram of megasonic transducer of the present invention;
Fig. 3 a-Fig. 3 b is the connection cover fundamental diagram of megasonic transducer of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
As shown in Figure 1, the connection cover of megasonic transducer provided by the invention, comprise: connection cover body 1, annular cavity 4, groove 5, cold gas import 6 and cold gas outlet 7, described annular cavity 4 lateral wall is connected with connection cover body 1 madial wall, described groove 5 is at least one, it is evenly arranged on annular cavity 4 madial wall, and described groove 5 is any one geometry, as: semicircle, rectangle or square; The air inlet 6 of described cold gas inlet channel one end is arranged on connection cover body 1, other end gas port is arranged on annular cavity 4 madial wall, the gas outlet 7 of described cold gas outlet passageway one end is arranged on connection cover body 1, and other end gas port is arranged on annular cavity 4 lateral wall.The connection cover of megasonic transducer also comprises: be positioned at connection cover body 1 and contact the cable fixing hole 2 connecting thread hole 3 on end face and connection cover body 1 top offered with megasonic transducer 12; Described connection cover body 1 is connected and fixed with megasonic transducer 12 by described connecting thread hole 3, described cable fixing hole 2 is used for fixing the coaxial fitting 8 connecting piezo-electric crystal 9 and power amplifier, forms sealed environment after being installed by the sealing ring on cable connector 8.Described connection cover body 1 material is nonmetallic materials, particularly, described connection cover body 1 material is that polytetrafluoroethylene (PTFE) or other anticorrosive properties are good, and machining property and the high nonmetallic materials of intensity, its profile is any one geometry, as: cylindrical, rectangular shaped post or triangle cylindricality.
As shown in Figure 2, the gas outlet 7 of the air inlet 6 of the cold gas inlet channel one end on described connection cover body 1 and cold gas outlet passageway one end is arranged on described in not in the same horizontal line.Described cold gas inlet channel is slightly longer than described cold gas outlet passageway length in addition.
As shown in Fig. 3 a-Fig. 3 b, during work, the vibration of high frequency can be produced when piezo-electric crystal 9 works, produce heat, refrigerating gas is passed into by the air inlet 6 of cold gas inlet channel one end, and refrigerating gas is directly communicated in cleaning piezo-electric crystal (PZT) chamber, refrigerating gas flows uniformly in annular cavity 4 by groove 5 after processing chamber, then get rid of via the gas outlet 7 of the cold gas outlet passageway one end be connected with annular cavity 4 and joint 10, through refrigerating gas circulating so repeatedly, the heat that PZT vibration produces is taken away, thus realize the object of cooling.Below piezo-electric crystal carrier, be provided with sealing ring 10, to realize the effect sealed, the liquid in megasonic transducer 12 chamber and top tank air district kept apart.Serve the effect of sealing and cooling.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (7)
1. the connection cover of a megasonic transducer, it is characterized in that, comprise: connection cover body, annular cavity, groove, cold gas inlet channel and cold gas outlet passageway, described annular cavity lateral wall is connected with connection cover body madial wall, described groove is at least one, it is evenly arranged on annular cavity madial wall, the air inlet of described cold gas inlet channel one end is arranged on connection cover body, the other end gas port of cold gas inlet channel is arranged on the wall of the internal cavity of annular cavity inside, the gas outlet of described cold gas outlet passageway one end is arranged on connection cover body, other end gas port is arranged on annular cavity lateral wall, cold gas import is positioned at cold gas outlet top,
The connection cover of megasonic transducer also comprises: be positioned at connection cover body and contact cable fixing hole connecting thread hole on end face and connection cover body top offered with megasonic transducer, wherein,
Described cable fixing hole is used for fixing the coaxial fitting connecting piezo-electric crystal and power amplifier, forms sealed environment after being installed by the sealing ring on cable connector.
2. connection cover as claimed in claim 1, it is characterized in that, described connection cover bulk material is nonmetallic materials, and its profile is any one geometry.
3. connection cover as claimed in claim 2, is characterized in that, described this body profile of connection cover is cylindrical, rectangular shaped post or triangle cylindricality.
4. connection cover as claimed in claim 2, it is characterized in that, described connection cover bulk material is polytetrafluoroethylene (PTFE), polytetrafluoroethylene (PTFE) alkoxy resin, Kynoar or polyether-ether-ketone resin.
5. connection cover as claimed in claim 1, is characterized in that, described in be arranged on the gas outlet of the air inlet of the cold gas inlet channel one end on described connection cover body and cold gas outlet passageway one end not in the same horizontal line.
6. connection cover as claimed in claim 1, it is characterized in that, described groove is any one geometry.
7. connection cover as claimed in claim 6, is characterized in that, described groove is semicircle, rectangle or square.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210388571.8A CN102873020B (en) | 2012-10-12 | 2012-10-12 | Connection cover of mega sound wave energy transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210388571.8A CN102873020B (en) | 2012-10-12 | 2012-10-12 | Connection cover of mega sound wave energy transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102873020A CN102873020A (en) | 2013-01-16 |
| CN102873020B true CN102873020B (en) | 2015-05-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210388571.8A Active CN102873020B (en) | 2012-10-12 | 2012-10-12 | Connection cover of mega sound wave energy transducer |
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| Country | Link |
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| CN (1) | CN102873020B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112676259B (en) * | 2020-12-30 | 2022-07-19 | 广州安费诺诚信软性电路有限公司 | Cleaning process of FPC board containing micro-holes |
| CN113399237B (en) * | 2021-05-31 | 2022-06-07 | 肇庆奥迪威传感科技有限公司 | Ultrasonic transducer and assembly method |
| CN114345826B (en) * | 2021-12-28 | 2023-01-03 | 北京东方金荣超声电器有限公司 | Megasonic transmitting device for cleaning wafer and sonic cleaning system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2281850Y (en) * | 1996-09-29 | 1998-05-20 | 陈伯恒 | Energy saving ultrasonic generator |
| CN1498513A (en) * | 2000-08-11 | 2004-05-19 | ��˹��ŵ�� | Miniature broadband transducer |
| EP1552765A1 (en) * | 2002-09-18 | 2005-07-13 | Tong Huang | A magnetic brush for cleaning the wall of an arc aquarium |
| CN102327883A (en) * | 2011-10-10 | 2012-01-25 | 北京七星华创电子股份有限公司 | Megasonic cleaning head and megasonic cleaning system provided with same |
| CN202909926U (en) * | 2012-10-12 | 2013-05-01 | 北京七星华创电子股份有限公司 | Connecting cover for megasonic transducer |
-
2012
- 2012-10-12 CN CN201210388571.8A patent/CN102873020B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2281850Y (en) * | 1996-09-29 | 1998-05-20 | 陈伯恒 | Energy saving ultrasonic generator |
| CN1498513A (en) * | 2000-08-11 | 2004-05-19 | ��˹��ŵ�� | Miniature broadband transducer |
| EP1552765A1 (en) * | 2002-09-18 | 2005-07-13 | Tong Huang | A magnetic brush for cleaning the wall of an arc aquarium |
| CN102327883A (en) * | 2011-10-10 | 2012-01-25 | 北京七星华创电子股份有限公司 | Megasonic cleaning head and megasonic cleaning system provided with same |
| CN202909926U (en) * | 2012-10-12 | 2013-05-01 | 北京七星华创电子股份有限公司 | Connecting cover for megasonic transducer |
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|---|---|
| CN102873020A (en) | 2013-01-16 |
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