CN109013544A - A kind of fountain high-frequency ultrasonic cleaning device - Google Patents
A kind of fountain high-frequency ultrasonic cleaning device Download PDFInfo
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- CN109013544A CN109013544A CN201811003484.XA CN201811003484A CN109013544A CN 109013544 A CN109013544 A CN 109013544A CN 201811003484 A CN201811003484 A CN 201811003484A CN 109013544 A CN109013544 A CN 109013544A
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- piezoelectric vibrator
- cleaning device
- frequency ultrasonic
- ultrasonic cleaning
- procapsid
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- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 40
- 238000004140 cleaning Methods 0.000 claims abstract description 83
- 108090000565 Capsid Proteins Proteins 0.000 claims abstract description 35
- 239000007788 liquid Substances 0.000 claims description 23
- 230000004323 axial length Effects 0.000 claims description 4
- 230000008901 benefit Effects 0.000 abstract description 6
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 14
- 239000002245 particle Substances 0.000 description 14
- 239000012535 impurity Substances 0.000 description 11
- 230000006378 damage Effects 0.000 description 8
- 239000007921 spray Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 230000009514 concussion Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000006210 lotion Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- MIZLGWKEZAPEFJ-UHFFFAOYSA-N 1,1,2-trifluoroethene Chemical group FC=C(F)F MIZLGWKEZAPEFJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- -1 ether Ketone Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention relates to the precision cleaning equipment technical fields of semicon industry or optical precision part, disclose a kind of fountain high-frequency ultrasonic cleaning device, including procapsid, are configured with nozzle inner pyramidal hole inside it, are configured with raised type frustum in its back-end；Rear cylinder body, front-end structure inside it has shoulder, the lower end surface of shoulder is configured to extend out formula cone inclined-plane, the rear end of procapsid is inserted into the inside of the front end of rear cylinder body, to construct annular accommodating chamber, feed liquor port is configured on procapsid, the outside inclined-plane of raised type frustum and the formula cone inclined-plane that extends out of shoulder are collectively configured to first runner, are connected to annular accommodating chamber；The upper surface of shoulder is arranged in piezoelectric vibrator, and second flow channel is configured between the side end face of the rear end of the lower surface and procapsid of piezoelectric vibrator, and second flow channel is connected to first runner and nozzle inner pyramidal hole respectively.The fountain high-frequency ultrasonic cleaning device has the advantages that cleaning efficiency is high, cleaning precision is high, cavitation is small and cleaning is without dead angle.
Description
Technical field
The present invention relates to the precision cleaning equipment technical fields of semicon industry or optical precision part, more particularly to one kind
Fountain high-frequency ultrasonic cleaning device.
Background technique
Ultrasonic cleaning technology is the most commonly used one of industry cleaning link technology, and traditional ultrasonic cleaning technology is to pass through
The cavitation that the ultrasonic wave of 20kHz-100kHz (kHz) generates in a liquid, is removed the spot of body surface,
To achieve the purpose that cleaning.But ultrasonic cavitation effect is too strong to be caused body surface centainly to damage, such as in semiconductor device
In the cleanings of precision components such as part, optical precision part, since device surface has micro-structure, conventional highfrequency ultrasonic cleaning can be right
Its surface damages.In addition, supersonic frequency is higher, with regard to smaller, highest frequency is the diameter of the impurity particle grain of cleaning
The conventional ultrasonic wave cleaning solution of 100kHz is difficult to clean 1 micron of impurity particle below.
When ultrasonic wave of the frequency higher than 400kHz is propagated in a liquid, the surface of cleaned component can be made to be formed about speed
The very big and very thin acoustic boundary layer of gradient, foreign particle can be from the surfaces of device after being acted on by the concussion of liquid megahertz frequency
It falls off, the micron of component surface and the impurity particle of submicron order can be washed, realize ultraprecise cleaning.In addition, high
Frequency ultrasonic cleaning process will not generate damage due to extremely low cavitation effect, to the surface of cleaned component, can be effectively
Phenomena such as solving corrosion caused by after precision components are cleaned or damage and failure.Frequency is the water tank type of 900kHz-1000kHz
Ultrasonic cleaning is current using more universal high-frequency ultrasonic cleaning device.However, working as semiconductor crystal wafer or other devices quilt
Impurity particle after cleaning cannot be discharged outside slot in time, just probably will cause the secondary attachment of impurity particle, this is just
Need to expend a large amount of cleaning solution to complete the cleaning of device.Also, the device junction that high-frequency ultrasonic cleaning sink can clean
Structure and position are limited by groove body size and high-frequency ultrasonic vibration source position, often there is cleaning dead angle.In addition, in order into
One step improves cleaning precision, the smaller impurity particle of cleaning, and the high-frequency ultrasonic cleaning device of which is difficult further to mention
The frequency of praetersonic.
Summary of the invention
(1) technical problems to be solved
The object of the present invention is to provide a kind of fountain high-frequency ultrasonic cleaning devices, in the prior art at least to solve
Spray equipment exist be difficult further to improve the ultrasonic frequency of cleaning solution, can not clean 0.2 micron of impurity particle below,
Cavitation is small, to the surface of cleaned component cause damage, cleaning have dead angle and cleaning efficiency not high technical problem it
One.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of fountain high-frequency ultrasonic cleaning devices, comprising: front housing
Body has the nozzle inner pyramidal hole sprayed for cleaning solution in the internal structure of the procapsid, is configured in the rear end of the procapsid
The raised type frustum protruded towards outside；Rear cylinder body, the front-end structure inside the rear cylinder body have towards the center of the rear cylinder body
The shoulder of axis direction protrusion, wherein the lower end surface of the shoulder is configured to extend out formula cone inclined-plane, and the rear end of the procapsid is inserted
Enter the inside to the front end of the rear cylinder body, to construct annular accommodating chamber, corresponds to the annular in the procapsid and accommodate
The position of chamber is configured with feed liquor port, and the outside inclined-plane of the raised type frustum and the formula that extends out of the shoulder bore the common structure in inclined-plane
The first runner flowed out for cleaning solution is caused, the first runner is connected to the annular accommodating chamber；And piezoelectric vibrator, it is described
The upper surface of the shoulder is arranged in piezoelectric vibrator, wherein the lower surface of the piezoelectric vibrator and the rear end of the procapsid
Be configured with the second flow channel for cleaning solution outflow between side end face, the second flow channel respectively with the first runner and described
The connection of nozzle inner pyramidal hole.
Wherein, the aperture of the feed liquor port is greater than the internal orifice dimension of the first runner.
Wherein, the outer diameter of the piezoelectric vibrator is greater than the internal orifice dimension of the shoulder, also, the internal orifice dimension of the shoulder is greater than
The internal orifice dimension of the liquid feeding end in the nozzle inner pyramidal hole.
Wherein, the fountain high-frequency ultrasonic cleaning device further includes circuit switching plate, and the circuit switching plate is along institute
State the inside for being axially disposed within the rear cylinder body of rear cylinder body, wherein the circuit switching plate and the piezoelectric vibrator are along axial
It is arranged in compartment.
Wherein, insulating element is installed between the piezoelectric vibrator and the circuit switching plate.
Wherein, the insulating element includes baffler, and the baffler includes Circular Plate and the hole edge from the Circular Plate
The cylinder extended towards the direction of piezoelectric vibrator, wherein the Circular Plate and the circuit switching plate are in close contact, the cylinder
Towards the piezoelectric vibrator side end face and be configured with gap between the piezoelectric vibrator.
Wherein, seal member is arranged in the periphery of the cylinder, wherein the wall thickness of the seal member is greater than the cylinder
The axial length of body.
Wherein, annular groove is configured on the inner surface of the rear cylinder body, the annular groove is located at the route and turns
The outside of fishplate bar is embedded with circlip in the annular groove.
Wherein, the fountain high-frequency ultrasonic cleaning device further includes rear end cap, the rear end cap be fastened on it is described after
The rear end of cylinder.
Wherein, the fountain high-frequency ultrasonic cleaning device further includes cable and the electricity that is fixedly connected with the rear end cap
Cable fixing head, the cable are fixed on the circuit switching plate after sequentially passing through the cable fixing head and the rear end cap,
The piezoelectric vibrator is fixedly connected by lead with the circuit switching plate.
(3) beneficial effect
Fountain high-frequency ultrasonic cleaning device provided by the invention has the advantages that compared with prior art
Electric signal by inputting high frequency motivates piezoelectric vibrator to generate the strong high-frequency ultrasonic vibration of superelevation to piezoelectric vibrator
Dynamic, cleaning solution is flowed into from the feed liquor port of rear cylinder body, and cleaning solution can be in advance full of annular accommodating chamber, and cleaning solution is by procapsid
The blocking of raised type frustum flow to the surface of piezoelectric vibrator from side wall, in addition, the design for passing through second flow channel, it can be ensured that clear
Washing lotion is close to surface of the piezoelectric vibrator towards nozzle inner pyramidal hole completely, in this way, air would not be generated on the surface of piezoelectric vibrator,
The effect of vibration of piezoelectric vibrator forms high-frequency ultrasonic and gushs, formed by the intracorporal nozzle inner pyramidal hole of front housing super in cleaning solution
The outflow of sound wave fluid column is realized and sprays cleaning to the high-frequency ultrasonic of cleaned component.It should be noted that due in this application
Directly use piezoelectric vibrator as ultrasonic transducer, therefore, it is possible to which the ultrasonic frequency of cleaning solution is made to be maintained at 900kHz
To in the range of 3000kHz, greatly reduce cavitation effect, further, efficiently reduce cavitation, as a result, when
When the cleaning solution of high frequency is ejected on cleaned component, damage not will cause to the surface of cleaned component.Ultrasonic wave is in liquid
When propagating in body, the surface of cleaned component can be made to be formed about the very big and very thin acoustic boundary layer of velocity gradient, impurity
Particle can be fallen off by after the concussion effect of liquid megahertz frequency from the surface of cleaned component, can wash cleaned component table
0.2 micron of impurity particle below in face realizes ultraprecise cleaning.In addition, the shape by the way that procapsid to be designed to spray-nozzle type sprinkler head
Formula, thus, without limiting space, convenient for arranging in pairs or groups, other equipment are used, with equipment takes up little area, cleaning solution consumption is few and cleaning
High-efficient advantage.In addition, the fountain high-frequency ultrasonic cleaning device of the application can directly to cleaned component particular portion
Position carries out fixed point spray cleaning, and cleans without dead angle.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the fountain high-frequency ultrasonic cleaning device of embodiments herein；
Fig. 2 is the overall structure diagram of the fountain high-frequency ultrasonic cleaning device of embodiments herein；
Fig. 3 is the schematic diagram of internal structure of Fig. 2；
Fig. 4 is the liquid stream runner of the cleaning solution flowing in the fountain high-frequency ultrasonic cleaning device of the embodiment of application
Structural schematic diagram；
Fig. 5 is the overall structure diagram of the procapsid in Fig. 1；
Fig. 6 is the overall structure diagram of the rear cylinder body in Fig. 1；
Fig. 7 is the partial enlargement structural representation of the I in Fig. 4；
Fig. 8 is the partial enlargement structural representation of the II in Fig. 7.
In figure, 1: piezoelectric vibrator；2: rear cylinder body；2a: shoulder；2b: liquid feeding end；20: first runner；23: annular accommodating chamber；
2a1: formula tapered surface is extended out；3: procapsid；3a: nozzle inner pyramidal hole；3b: raised type frustum；Outside inclined-plane: 3b1；30: second
Road；4: cable fixing head；5: cable；6: rear end cap；7: seal member；8: circlip；9: insulating element；91: baffler；911: circle
Ring flat-plate；912: cylinder.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Following instance
For illustrating the present invention, but it is not intended to limit the scope of the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Embodiment 1:
As shown in Figures 1 to 8, schematically show that the fountain high-frequency ultrasonic cleaning device includes piezoelectricity vibration in figure
Son 1, rear cylinder body 2, procapsid 3, nozzle inner pyramidal hole 3a, raised type frustum 3b, shoulder 2a, annular accommodating chamber 23, feed liquor port 2b,
First runner 20 and second flow channel 30.
In embodiments herein, there is the nozzle inner pyramidal hole 3a sprayed for cleaning solution in the internal structure of the procapsid 3,
The raised type frustum 3b protruded towards outside is configured in the rear end of the procapsid 3.It should be noted that nozzle inner pyramidal hole 3a
Upper end bore is greater than its lower end bore.In this way, certain adjusting can be played the role of to the flow velocity of the cleaning solution of ejection, that is,
When cleaning solution will gradually be sprayed from the 3a of nozzle inner pyramidal hole, pressure and flow velocity can be constantly in the trend of rising, in this way, can
So that cleaning solution is gushed away in the form of ultrasonic wave fluid column, to reach better cleaning effect, improve cleaned component
Cleaning efficiency.
In one embodiment, the magnitude range of the angle a of nozzle inner pyramidal hole 3a is more than or equal to 10 degree and to be less than or equal to
60 degree.It should be noted that if the angle a of nozzle inner pyramidal hole 3a is excessive, then made by the high-frequency ultrasonic that piezoelectric vibrator 1 generates
It is flooded with the pressure that will be cleaned liquid.If the angle a of nozzle inner pyramidal hole 3a is too small, ultrasonic wave fluid column can not be formed,
Under this situation, the purpose of constraint liquid flow direction is also just not achieved, cannot achieve clean in place operation.
The angle a of nozzle inner pyramidal hole 3a is preferably 15 °.
Raised type frustum 3b plays the role of similar for flow-stopping plate, that is, cleaning solution is prevented smoothly to be flowed into first passage
In 20.If not adding raised type frustum 3b, liquid can be successfully flowed into first passage 20 and second flow channel 30 simultaneously very much
It is sprayed from nozzle inner pyramidal hole 3a, in this case, cleaning solution will be biased to the side of liquid feeding end 2b, and with respect to liquid feeding end 2b's
The cleaning solution of other side will be reduced, and the case where liquid is full of cannot be cleaned by turn resulting in annular accommodating chamber 23, as a result, will
Air or bubble are generated on the surface of piezoelectric vibrator 1.Thus, the effect of raised type frustum 3b is to stop to enter from liquid feeding end 2b
Cleaning solution be rapidly introduced into after first runner 20 and second flow channel 30 and flow out, that is, first allow cleaning solution pitch of the laps to hold full of annular
Receive chamber 23, then, cleaning solution is " unrestrained " cross after raised type frustum 3b and flow uniformly into first runner 20 and second flow channel 30 after
Outflow.
Front-end structure inside the rear cylinder body 2 has the shoulder 2a towards the central axial direction protrusion of the rear cylinder body 2,
In, the lower end surface of shoulder 2a is configured to extend out formula cone inclined-plane 2a1, and the rear end of the procapsid 3 is inserted into the front end of the rear cylinder body 2
Inside be configured with liquid feeding end at the position of the corresponding annular accommodating chamber 23 of the procapsid 3 to construct annular accommodating chamber 23
The formula cone inclined-plane 2a1 that extends out of mouth 2b, the outside inclined-plane 3b1 and shoulder 2a of raised type frustum 3b are collectively configured to for cleaning solution
The first runner 20 of outflow, the first runner 20 are connected to the annular accommodating chamber 23.
The upper surface of shoulder 2a is arranged in the piezoelectric vibrator 1, wherein the lower surface of the piezoelectric vibrator 1 and the procapsid 3
Rear end side end face between be configured with for cleaning solution outflow second flow channel 30, the second flow channel 30 respectively with the first runner
20 and nozzle inner pyramidal hole 31a connection.It should be noted that the lower surface of the piezoelectric vibrator 1, refers to towards nozzle inner pyramidal hole
The surface of that side 3a.Specifically, piezoelectric vibrator 1 is motivated to generate superelevation strong to piezoelectric vibrator 1 by the electric signal of input high frequency
High-frequency ultrasonic vibration, cleaning solution flows into from the feed liquor port 2b of rear cylinder body 2, and cleaning solution can be in advance full of annular accommodating chamber
23, cleaning solution is flow to the surface of piezoelectric vibrator 1 from side wall by the blocking of the raised type frustum 3b in procapsid 3, in addition, passing through
The design of the second flow channel 30, it can be ensured that cleaning solution is close to piezoelectric vibrator 1 towards the surface of nozzle inner pyramidal hole 3a completely, this
Sample would not generate air on the surface of piezoelectric vibrator 1, and the effect of vibration of piezoelectric vibrator 1 forms high-frequency ultrasonic in cleaning solution
It gushs, the outflow of ultrasonic wave fluid column is formed by the nozzle inner pyramidal hole 3a in procapsid 3, cleaned component (is not shown in realization in figure
High-frequency ultrasonic out) sprays cleaning.It should be noted that due to directly having used piezoelectric vibrator 1 as super in this application
Sonic transducer, therefore, it is possible to be maintained at the ultrasonic frequency of cleaning solution in the range of 900kHz to 3000kHz, greatly
Reduce cavitation effect, further, efficiently reduce cavitation, as a result, when the cleaning solution of high frequency be ejected into it is cleaned
When on component, damage not will cause to the surface of cleaned component.When ultrasonic wave is propagated in a liquid, cleaned component can be made
Surface be formed about the very big and very thin acoustic boundary layer of velocity gradient, foreign particle is made by the concussion of liquid megahertz frequency
It can fall off from the surface of cleaned component after, 0.2 micron of impurity particle below of cleaned parts surface can be washed,
Realize ultraprecise cleaning.
In addition, by way of procapsid 3 is designed to spray-nozzle type sprinkler head, thus, it is other convenient for arranging in pairs or groups without limiting space
Equipment uses, and has the advantages that equipment takes up little area, cleaning solution consumption is few and cleaning efficiency is high.
In addition, the fountain high-frequency ultrasonic cleaning device of the application can privileged site directly to cleaned component carry out
Fixed point spray cleaning, and clean without dead angle.
In one embodiment, the manufacture material of the procapsid 3 and rear cylinder body 2 is nonmetallic materials, also, this is nonmetallic
Material should have corrosion-resistant, waterproof and insulate characteristic, it is preferable that the nonmetallic materials can be poly- trifluoro-ethylene or polyethers ether
Ketone.
It should be noted that the barrel of the procapsid 3 should have certain length, to guarantee the annular accommodating chamber formed
23 have certain capacity.
As shown in figure 4, in a preferred embodiment, structure between the piezoelectric vibrator 1 and the port of nozzle inner pyramidal hole 3a
Clearance D is made, the magnitude range of the clearance D is greater than 0 and to be less than or equal to 5mm (millimeter).In this way it can be ensured that cleaning solution can
It is tightly attached to piezoelectric vibrator 1 completely towards the surface of nozzle inner pyramidal hole 3a, avoids generating air on the surface of the piezoelectric vibrator 1.
As shown in figs. 4 and 7, in the ratio of the application more preferably technical solution, the aperture of feed liquor port 2b
Greater than the internal orifice dimension of the first runner 20.In this way it can be ensured that cleaning solution can avoid this equably full of annular accommodating chamber 23
There is the case where air due to not cleaned liquid is full of in annular accommodating chamber 23.
As shown in fig. 7, one in the application is somebody's turn to do than in more preferably technical solution, the outer diameter A of the piezoelectric vibrator 1 is greater than
The internal orifice dimension B of shoulder 2a, also, the internal orifice dimension C of liquid feeding end 2b of the internal orifice dimension B of shoulder 2a greater than nozzle inner pyramidal hole 3a.
In this way it can be ensured that the high-frequency ultrasonic vibration generated via piezoelectric vibrator 1 can be applied to completely in the 3a of nozzle inner pyramidal hole
Portion, the cleaning solution for passing through nozzle inner pyramidal hole 3a is capable of forming high-frequency ultrasonic and gushs, by the nozzle in procapsid 3
Taper hole 3a forms the outflow of ultrasonic wave fluid column, realizes and sprays cleaning to the high-frequency ultrasonic of cleaned component.
As shown in figs. 4 and 7, to advanced optimize the fountain high-frequency ultrasonic cleaning device in above-mentioned technical proposal,
Based on the above technical solution, which further includes circuit switching plate 10, which turns
Fishplate bar 10 is along the inside for being axially disposed within the rear cylinder body 2 of the rear cylinder body 2, wherein the circuit switching plate 10 and the piezoelectric vibrator 1
It is arranged along axial in compartment.It should be noted that by the way that the circuit switching plate 10 and piezoelectric vibrator 1 are carried out electrical separation,
It is directly contacted because of the circuit switching plate 10 with piezoelectric vibrator 1 so as to be effectively prevented from, so that there is a situation where short circuits, into one
Step ground, it is ensured that operator is carrying out the safety in cleaning process to cleaned component.
In a specific embodiment, which can be pcb board (printed circuit board).
In another preferred technical solution, insulation is installed between the piezoelectric vibrator 1 and the circuit switching plate 10
Component 9.Specifically, the setting of the insulating element 9 plays piezoelectric vibrator 1 and circuit switching plate 10 carrying out electrical separation
Effect, also, since the insulating element 9 should have certain insulation characterisitic, therefore, it is possible to avoid that short circuit occurs well
Situation.
In addition, be lost to reduce insulating element 9 to ultrasonic vibration caused by piezoelectric vibrator 1, so, which can
It is fabricated by flexible or elastic material, that is, so that being flexible contact between insulating element 9 and piezoelectric vibrator 1.
As shown in Figure 1, Figure 2, shown in Fig. 5 and Fig. 6, which includes baffler 91, which includes Circular Plate
911 and hole edge towards piezoelectric vibrator 1 from the Circular Plate 911 the cylinder 912 that extends of direction, wherein the Circular Plate 911 with should
Circuit switching plate 10 be in close contact, the cylinder 912 towards the piezoelectric vibrator 1 side end face and constructed between the piezoelectric vibrator 1
There is gap.Specifically, by constructing the cylinder 912 towards the side end face of the piezoelectric vibrator 1 and between the piezoelectric vibrator 1
Have gap, the oscillation space of piezoelectric vibrator 1 caused to limit so as to be effectively prevented from, it is ensured that piezoelectric vibrator 1 it is effective
Vibration.
As shown in Figure 7 and Figure 8, in the ratio of the application more preferably technical solution, in the periphery set of the cylinder 912
Equipped with seal member 7, wherein the wall thickness of the seal member 7 is greater than the axial length of the cylinder 912.Specifically, the seal member
7 setting can play preferable sealing function.In addition, passing through so that the wall thickness of the seal member 7 is greater than the cylinder 912
Axial length so that cylinder 912 towards the piezoelectric vibrator 1 side end face and be configured between the piezoelectric vibrator 1
The oscillation space of piezoelectric vibrator 1 is caused to limit it is possible to further be effectively prevented from gap, it is ensured that piezoelectric vibrator 1 it is suitable
Benefit vibration.
It should be noted that the seal member 7 can be sealing ring or sealing strip.It is readily appreciated that, the structure of the seal member 7
It not merely is confined to above-mentioned the case where enumerating, can also correspondingly be adjusted according to the actual needs.
To advanced optimize the rear cylinder body 2 in above-mentioned technical proposal, based on the above technical solution, in the rear cylinder body
It is configured with annular groove on 2 inner surface, which is located at the outside of the circuit switching plate 10, embedded in the annular groove
Equipped with circlip 8.Specifically, the setting of the circlip 8, primarily serving prevents piezoelectric vibrator 1, insulating element 9 and circuit switching plate
10 the effect of play occurs along the axial direction of rear cylinder body 2, that is, plays the role of compressing sealing.Further, so that piezoelectric vibrator
1, firm position between 10 three of insulating element 9 and circuit switching plate.
As shown in Figure 1 to Figure 3, it is also schematically shown in figure after the fountain high-frequency ultrasonic cleaning device further includes
End cap 6, the rear end cap 6 are fastened on the rear end of the rear cylinder body 2.It should be noted that using the connection type of buckle-type, greatly
Facilitate the installation and disassembly of rear end cap 6.In addition, by adding the rear end cap 6 in the rear end of the rear cylinder body 2, so as to so that
It obtains the rear cylinder body 2 and the internal entirety for relative close type is collectively formed in procapsid 3, in this way, in the cleaning solution warp when hyperfrequency
After nozzle inner pyramidal hole 3a is ejected, it will not splash again on piezoelectric vibrator 1 and circuit switching plate 10, in this way, just effectively
Avoid there is a situation where short circuit.
As shown in figure 3, to advanced optimize the fountain high-frequency ultrasonic cleaning device in above-mentioned technical proposal, above-mentioned
On the basis of technical solution, which further includes cable 5 and is fixedly connected with the rear end cap 6
Cable fixing head 4, the cable 5 are fixed on the circuit switching plate 10 after sequentially passing through the cable fixing head 4 and the rear end cap 6,
The piezoelectric vibrator 1 is fixedly connected by lead (not shown) with the circuit switching plate 10.That is, by by lead
One end is connect with the electrode of piezoelectric vibrator 1, and the other end is fixed on circuit switching plate 10, and one end of cable 5 is exposed, the other end
Fixed on circuit switching plate 10, in this way, also it is achieved that being electrically connected for the piezoelectric vibrator 1 and cable 5, it is at the same time, also real
Showed cable 5 with piezoelectric vibrator 1 separating on mechanical connection, to just efficiently avoid the drawing due to outer bound pair cable 5
Power, the case where causing the lead on piezoelectric vibrator 1 to fall off.
It should be noted that the cable 5 primarily serves the effect for being supplied to the 1 high-frequency ultrasonic signal of piezoelectric vibrator.
In conclusion motivating piezoelectric vibrator 1 to generate the strong height of superelevation to piezoelectric vibrator 1 by the electric signal of input high frequency
Frequency ultrasonic vibration, cleaning solution are flowed into from the feed liquor port 2b of rear cylinder body 2, and cleaning solution can be in advance full of annular accommodating chamber 23, clearly
Washing lotion is flow to the surface of piezoelectric vibrator 1 from side wall by the blocking of the raised type frustum 3b in procapsid 3, in addition, by this second
The design of runner 30, it can be ensured that cleaning solution is close to piezoelectric vibrator 1 towards the surface of nozzle inner pyramidal hole 3a, in this way, pressing completely
The surface of electric tachometer indicator 1 would not generate air, and the effect of vibration of piezoelectric vibrator 1 forms high-frequency ultrasonic and gush, lead in cleaning solution
The nozzle inner pyramidal hole 3a crossed in procapsid 3 forms the outflow of ultrasonic wave fluid column, realizes and sprays to the high-frequency ultrasonic of cleaned component
Cleaning.It should be noted that due to directly having used piezoelectric vibrator 1 as ultrasonic transducer in this application, therefore, it is possible to make
The ultrasonic frequency for obtaining cleaning solution is maintained in the range of 900kHz to 3000kHz, greatly reduces cavitation effect, further
Ground efficiently reduces cavitation, as a result, when the cleaning solution of high frequency is ejected on cleaned component, to cleaned component
Surface not will cause damage.When ultrasonic wave is propagated in a liquid, the surface of cleaned component can be made to be formed about speed ladder
Very big and very thin acoustic boundary layer is spent, foreign particle can be from cleaned component after being acted on by the concussion of liquid megahertz frequency
Surface falls off, and can wash 0.2 micron of impurity particle below of cleaned parts surface, realizes ultraprecise cleaning.
In addition, by way of procapsid 3 is designed to spray-nozzle type sprinkler head, thus, it is other convenient for arranging in pairs or groups without limiting space
Equipment uses, and has the advantages that equipment takes up little area, cleaning solution consumption is few and cleaning efficiency is high.
In addition, the fountain high-frequency ultrasonic cleaning device of the application can privileged site directly to cleaned component carry out
Fixed point spray cleaning, and clean without dead angle.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of fountain high-frequency ultrasonic cleaning device characterized by comprising
Procapsid has the nozzle inner pyramidal hole sprayed for cleaning solution in the internal structure of the procapsid, after the procapsid
End is configured with the raised type frustum protruded towards outside；
Rear cylinder body, the front-end structure inside the rear cylinder body have the shoulder towards the central axial direction protrusion of the rear cylinder body,
Wherein, the lower end surface of the shoulder is configured to extend out formula cone inclined-plane, before the rear end of the procapsid is inserted into the rear cylinder body
The inside at end is configured with feed liquor at the position that the procapsid corresponds to the annular accommodating chamber to construct annular accommodating chamber
Port, the outside inclined-plane of the raised type frustum and the formula cone inclined-plane that extends out of the shoulder are collectively configured to for cleaning solution outflow
First runner, the first runner are connected to the annular accommodating chamber；And
The upper surface of the shoulder is arranged in piezoelectric vibrator, the piezoelectric vibrator, wherein the lower surface of the piezoelectric vibrator and institute
State be configured between the side end face of the rear end of procapsid for cleaning solution outflow second flow channel, the second flow channel respectively with it is described
First runner and nozzle inner pyramidal hole connection.
2. fountain high-frequency ultrasonic cleaning device according to claim 1, which is characterized in that the hole of the feed liquor port
Diameter is greater than the internal orifice dimension of the first runner.
3. fountain high-frequency ultrasonic cleaning device according to claim 1, which is characterized in that outside the piezoelectric vibrator
Diameter is greater than the internal orifice dimension of the shoulder, also, the internal orifice dimension of the shoulder is greater than the inner hole of the liquid feeding end in the nozzle inner pyramidal hole
Diameter.
4. fountain high-frequency ultrasonic cleaning device according to claim 1, which is characterized in that the fountain high frequency is super
Sound wave cleaning device further includes circuit switching plate, and the circuit switching plate is axially disposed within the rear cylinder body along the rear cylinder body
Inside, wherein the circuit switching plate and the piezoelectric vibrator are arranged along axial in compartment.
5. fountain high-frequency ultrasonic cleaning device according to claim 4, which is characterized in that in the piezoelectric vibrator and
Insulating element is installed between the circuit switching plate.
6. fountain high-frequency ultrasonic cleaning device according to claim 5, which is characterized in that the insulating element includes
Baffler, the baffler include the cylinder that the direction of Circular Plate and hole edge towards piezoelectric vibrator from the Circular Plate is extended,
Wherein, the Circular Plate and the circuit switching plate are in close contact, the cylinder towards the piezoelectric vibrator side end face and with
Gap is configured between the piezoelectric vibrator.
7. fountain high-frequency ultrasonic cleaning device according to claim 6, which is characterized in that in the periphery of the cylinder
It is arranged with seal member, wherein the wall thickness of the seal member is greater than the axial length of the cylinder.
8. fountain high-frequency ultrasonic cleaning device according to claim 4, which is characterized in that in the rear cylinder body
Annular groove is configured on surface, the annular groove is located at the outside of the circuit switching plate, embedded in the annular groove
Equipped with circlip.
9. fountain high-frequency ultrasonic cleaning device according to claim 4, which is characterized in that the fountain high frequency is super
Sound wave cleaning device further includes rear end cap, and the rear end cap is fastened on the rear end of the rear cylinder body.
10. fountain high-frequency ultrasonic cleaning device according to claim 9, which is characterized in that the fountain high frequency
Ultrasonic cleaning equipment further includes cable and the cable fixing head that is fixedly connected with the rear end cap, and the cable sequentially passes through institute
It is fixed on the circuit switching plate after stating cable fixing head and the rear end cap, the piezoelectric vibrator passes through lead and the line
Road pinboard is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811003484.XA CN109013544A (en) | 2018-08-30 | 2018-08-30 | A kind of fountain high-frequency ultrasonic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811003484.XA CN109013544A (en) | 2018-08-30 | 2018-08-30 | A kind of fountain high-frequency ultrasonic cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109013544A true CN109013544A (en) | 2018-12-18 |
Family
ID=64625841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811003484.XA Pending CN109013544A (en) | 2018-08-30 | 2018-08-30 | A kind of fountain high-frequency ultrasonic cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109013544A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109604078A (en) * | 2019-01-02 | 2019-04-12 | 北京科技大学 | A kind of dual cavity water jet self-vibration spray nozzle device |
| CN114251972A (en) * | 2021-12-14 | 2022-03-29 | 东方电气集团东方汽轮机有限公司 | Online ultrasonic cleaning system of condenser |
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| CN114251972A (en) * | 2021-12-14 | 2022-03-29 | 东方电气集团东方汽轮机有限公司 | Online ultrasonic cleaning system of condenser |
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