EP1386694B2 - Procédé et machine de polissage - Google Patents

Procédé et machine de polissage Download PDF

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Publication number
EP1386694B2
EP1386694B2 EP03025546A EP03025546A EP1386694B2 EP 1386694 B2 EP1386694 B2 EP 1386694B2 EP 03025546 A EP03025546 A EP 03025546A EP 03025546 A EP03025546 A EP 03025546A EP 1386694 B2 EP1386694 B2 EP 1386694B2
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EP
European Patent Office
Prior art keywords
polishing
pressure
polishing plate
drive shaft
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03025546A
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German (de)
English (en)
Other versions
EP1386694B1 (fr
EP1386694A1 (fr
Inventor
Christoph KÜBLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Vision International GmbH
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Carl Zeiss Vision International GmbH
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Publication of EP1386694B1 publication Critical patent/EP1386694B1/fr
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a method for polishing a punctiform asymmetric free-form surface according to the preamble of patent claim 1 and to a polishing machine according to the preamble of patent claim 7.
  • a polishing machine for polishing spherical lens surfaces has an upper slide movable in an x-direction.
  • a tool spindle which is rotatably mounted about a vertical axis connected.
  • the tool spindle serves to receive a dressing tool.
  • workpiece spindle is provided for receiving the workpiece or the lens connected to a further carriage.
  • the workpiece spindle and the workpiece spindle with the dressing tool are arranged at a fixed distance from each other. The carriage carrying these two spindles can be moved in the z-direction.
  • a polishing machine and a method for polishing optical surfaces are known.
  • the polishing machine has a polishing head provided with an elastic membrane. By pressurizing the membrane, the application of force to the surface to be polished is regulated.
  • a disadvantage of this polishing machine that the size of the surface of the polishing head or the membrane resting on the surface to be polished depends on the pressurization.
  • the polishing head with the elastic membrane is biased by an associated spring in the direction of the surface to be polished.
  • hydraulic cylinders are provided for the provision of a tilting mobility of the elastic membrane around a point lying on the axis of rotation in the region of the flexible membrane.
  • the application of force to the surface to be polished is detected by associated sensors, swirl strips and solenoid.
  • the polishing of the optical surface in dependence on the rotational speed of the polishing head and the force acting on the surface to be polished contact pressure is controlled by pressurization.
  • a gimbal stored optics grinding or polishing tool known.
  • an alignment member is provided, which consists of elastic material. This alignment member exerts no tool lifting the tool off the spindle. It can be readily formed so that even a force the tool to the all-round joint, z. B. a ball joint, zoom, but the alignment force is so weak that the adjustment of the tool on the workpiece under the effect of the working pressure is possible.
  • the use of such a tool allows the automatic loading of an optical grinding machine, since the workpiece rigidly and axially immovable remains on the spindle and without lateral tilting a well-defined position relative to the feeder occupies.
  • gimbal-mounted optical abrasive polishing tool described is intended for a convex lens.
  • the lens is mounted on a workpiece carrier.
  • the workpiece carrier sits on a fixedly mounted spindle, which has no self-propelled, but is freely rotatable.
  • JP 63232948 A (Canon Inc.), 28 September 1988 (1988-09-28) discloses a polishing tool sitting on a shaft.
  • the shaft carries a rotor, which is enclosed by two cylinder chambers. Both sides of the rotor can be subjected to an air pressure in order to apply a predetermined pressure force to the polishing tool. Between the two cylinder chambers air outlets are provided, through which the air led to the two sides of the rotor can escape without affecting the pressure force on the two times of the rotor. In this way, a self-stabilizing effect of the pressing force of the polishing tool on the workpiece takes place.
  • the object of the invention is achieved for the method by the given in claim 1 features.
  • the object of the invention is achieved for the polishing machine by the features specified in claim 7.
  • the pressure in a pressure chamber of the polishing head is controlled as a function of the surface contour of the optical surface, so that the turntable resting on the optical surface exerts a predetermined constant polishing pressure thereon.
  • polishing head in particular for polishing optical surfaces, used, with a polishing plate, which is connected to a rotatably driven drive shaft, wherein the polishing plate with the drive shaft is pivotally and rotatably connected.
  • the polishing plate rotatably articulated to the drive shaft By the measure to connect the polishing plate rotatably articulated to the drive shaft, it is possible that the polishing plate following the surface contour rests on the surface to be machined. Due to the articulated connection of the polishing plate can perform tilting movements, so that it rests with a maximum polishing surface on the surface to be polished.
  • the polishing plate with the drive shaft means To connect form-fitting, so that the rotational movement of the drive shaft is transmitted due to the positive connection to the polishing plate.
  • the non-rotatable articulated connection to connect the polishing plate via a Kugelimbusgelenk with the drive shaft.
  • this Kugelimbusgelenk it is possible to arrange the fulcrum by which the polishing plate can be pivoted in any direction as close to the surface of the polishing plate to be polished.
  • the close arrangement of the articulated connection to the polishing surface of the polishing plate has the advantage that the polishing plate can follow the surface contours responsive.
  • the articulated connection one or more latching elements for securing the connection of drive shaft and polishing head. If a ball-and-socket joint is provided as an articulated connection, it is ensured by means of the latching element that the ball-and-cage head can not slip out of the associated recess. As a result, the polishing plate can be removed without problems from the surface to be polished. By ensured by the locking element solvability of the compound also different polishing plates can be easily replaced with each other.
  • polishing head It has proven to be advantageous to associate the polishing head with a pressure chamber, resulting in a translatory movement of the polishing plate along a center axis of the polishing head from a pressurization of the pressure chamber. If the polishing plate is located on a surface to be polished, the result of pressurization is an increased polishing pressure.
  • one of the pressure chamber associated piston is in operative connection with the drive shaft, so that a pressurization of the pressure chamber is transmitted via the drive shaft to the polishing plate.
  • the in FIG. 1 shown polishing head (1) has a polishing plate (3) with a polishing pad (5).
  • the polishing pad (5) rests on a surface (41) of a workpiece (39) to be polished.
  • the polishing plate 3 is received via the articulated connection to a drive shaft (7).
  • a Kugelimbusgelenk is provided for this non-rotatable articulated connection.
  • the drive shaft (7) is on the side facing the polishing plate end provided with a Kugelimbuskopf (19) which engages in a in the polishing plate (3) formed recess (13).
  • a locking element for example, a spring element or spring pin on the polishing plate, which protrudes into a recess on the ball head in, may be provided.
  • the Kugelimbuskopf (19) is also possible to form the Kugelimbuskopf (19) on the polishing plate; In this case, then in the drive shaft (7) to provide a recess for rotationally secure articulated receiving the Kugelimbuskopfes.
  • the drive shaft (7) is translationally displaceable via a bearing element (23) and rotatably mounted in a hollow cylinder (49).
  • the hollow cylinder (49) is rotationally driven via a drive of the polishing machine, not shown, wherein the rotational movement due to the rotationally fixed connection by the bearing element (23) is completely transferred to the drive shaft (7) for the polishing head.
  • a hydraulic or pneumatic system On the side remote from the polishing head of the drive shaft (7) in the hollow cylinder (49) is a hydraulic or pneumatic system, which serves to load the polishing head with the required polishing pressure provided.
  • This has a pressure chamber cylinder (31) with a translationally displaceable recorded therein piston (33) to decouple the piston (33) from the rotational movement of the drive shaft (7) and the hollow cylinder pivot bearings between the pressure chamber cylinder (31) and the hollow cylinder (49) and between the piston (33) driven Pleul (32) and the drive shaft (7) may be provided.
  • the pressure chamber (29) formed in the pressure chamber cylinder (31) is assigned a pressure supply (35) with a pressure control valve (37) and a pressure reservoir (36).
  • the drive shaft (7) has for this purpose a non-rotationally symmetrical outer profile (43), preferably a polygonal profile.
  • Hollow cylinder is achieved by rollers or rollers (25) which are received in the bearing element (23) symmetrically to the outer profile of the drive shaft (7) and roll on the outer profile (43) of the drive shaft.
  • the axes of rotation of the rollers or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).
  • the rolling bearing of the drive shaft (7) in the hollow cylinder (49) can also be a ball bearing, as in FIG. 4 represented, be provided.
  • the balls (53) in longitudinal grooves (51) of the hollow cylinder (49) and further longitudinal grooves (55) of the drive shaft (7) are mounted, wherein the longitudinal grooves extend parallel to the axis of rotation of the drive shaft (7).
  • the drive axle has a non-rotationally symmetrical outer profile, in particular a polygonal profile, at least in a region corresponding to the bearing.
  • the polishing head whose diameter is smaller than the diameter of the surface to be polished, is moved in a pivoting movement in the radial direction over the optical surface (41) to be polished. Both the workpiece (39) and the polishing plate are driven at almost the same speed in the same direction.
  • the rotational speeds of the polishing plate or the rotational speed of the workpiece in particular in dependence on the radial position of the polishing plate to change. This speed change has a positive influence on a constant polishing removal.
  • the pressure fluctuations are kept very small, so that the polishing plate rests with constant force on the optical surface to be polished.
  • the pressure control valve also contributes to the compensation of pressure fluctuations.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Claims (9)

  1. Procédé pour le polissage d'une surface à forme libre sans symétrie ponctuelle avec une tête de polissage (1) avec plateau de polissage (3) qui est relié de manière solidaire en rotation et articulée avec un arbre d'entraînement (7) qui peut être entraîné en rotation, le plateau de polissage (3) étant entraîné en rotation dans la même direction de rotation que la surface à forme libre optique à polir, caractérisé en ce que la pression dans une chambre de pression (29) de la tête de polissage (1) est réglée en fonction du contour de surface de la surface à forme libre (41) optique, de sorte que le plateau rotatif reposant sur la surface (41) optique exerce une pression de polissage constante prédéfinie sur cette surface.
  2. Procédé selon la revendication 1, caractérisé en ce que le corps (39) à usiner est entraîné avec une fréquence de rotation approximativement identique au plateau de polissage (3).
  3. Procédé selon la revendication 1, caractérisé en ce que le plateau de polissage (3) exécute un mouvement radial par rapport au corps (39) à usiner.
  4. Procédé selon la revendication 3, caractérisé en ce que la fréquence de rotation du plateau de polissage (3) ou de la surface à polir (41) est modifiée en fonction de la position radiale du plateau de polissage (3).
  5. Procédé selon l'une quelconque des revendications 1 à 4, caractérisé en ce qu'un cylindre creux (49) est entraîné par rotation au moyen d'un entraînement d'une machine de polissage, le mouvement de rotation étant transmis du fait d'une liaison solidaire en rotation par un élément de palier (23) complètement à l'arbre d'entraînement (7) pour la tête de polissage.
  6. Procédé selon l'une quelconque des revendications 1 à 5, caractérisé en ce qu'un piston (33) est sollicité en pression au moyen d'exactement une chambre de pression (29) formée dans un cylindre de chambre de pression (31).
  7. Machine de polissage avec une tête de polissage avec chambre de pression (29) et plateau de polissage (3) qui est relié de manière solidaire en rotation et articulée avec un arbre d'entraînement (7) qui peut être entraîné en rotation, le plateau de polissage (3) étant conçu pour tourner en rotation dans la même direction qu'une surface à forme libre (41) optique à polir, caractérisée en ce que, pour la pression dans la chambre de pression (29), il est prévu un réglage de pression en fonction du contour de surface de la surface (41) optique pour exercer une pression de polissage constante prédéfinie sur la surface (41) optique avec le plateau de polissage (3) reposant sur la surface (41) optique.
  8. Machine de polissage selon la revendication 7, caractérisée en ce qu'un cylindre creux (49) peut être entraîné en rotation au moyen d'un entraînement de la machine de polissage, le mouvement de rotation étant transmis du fait d'une liaison solidaire en rotation par un élément de palier (23) complètement à l'arbre d'entraînement (7) pour la tête de polissage (1).
  9. Machine de polissage selon l'une quelconque des revendications 7 ou 8, caractérisée en ce qu'il est prévu un piston (33) qui peut être alimenté en pression au moyen d'exactement une chambre de pression (29) formée dans un cylindre de chambre de pression (31).
EP03025546A 2000-02-03 2001-01-11 Procédé et machine de polissage Expired - Lifetime EP1386694B2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004455 2000-02-03
DE10004455 2000-02-03
EP01909601A EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP01909601.5 Division 2001-01-11
EP01909601A Division EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse

Publications (3)

Publication Number Publication Date
EP1386694A1 EP1386694A1 (fr) 2004-02-04
EP1386694B1 EP1386694B1 (fr) 2009-05-20
EP1386694B2 true EP1386694B2 (fr) 2013-01-09

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ID=7629520

Family Applications (2)

Application Number Title Priority Date Filing Date
EP01909601A Expired - Lifetime EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse
EP03025546A Expired - Lifetime EP1386694B2 (fr) 2000-02-03 2001-01-11 Procédé et machine de polissage

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP01909601A Expired - Lifetime EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse

Country Status (7)

Country Link
US (3) US20030045211A1 (fr)
EP (2) EP1251997B2 (fr)
JP (1) JP4945771B2 (fr)
AU (1) AU2001237285A1 (fr)
DE (3) DE10100860A1 (fr)
TW (1) TW558477B (fr)
WO (1) WO2001056740A1 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
DE102012216724A1 (de) 2012-09-19 2014-03-20 Carl Zeiss Vision International Gmbh Verfahren und Vorrichtung zur Polierbearbeitung von Brillenlinsen und Gießformen für die Brillenlinsenherstellung sowie entsprechendes Verfahren zur Herstellung von Brillenlinsen und Gießformen für die Brillenlinsenherstellung

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Publication number Priority date Publication date Assignee Title
EP1251997B2 (fr) 2000-02-03 2011-06-08 Carl Zeiss Vision GmbH Tete de polissage pour une polisseuse
DE10250856A1 (de) 2002-10-25 2004-05-13 Carl Zeiss Verfahren und Vorrichtung zum Herstellen von optischen Gläsern
DE10319945A1 (de) * 2003-05-02 2005-01-27 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung von optisch wirksamen Flächen
DE102004003131A1 (de) † 2004-01-15 2005-08-11 Carl Zeiss Vorrichtung und Verfahren zum Polieren einer optischen Fläche, optisches Bauelement, sowie Verfahren zum Herstellen eines Polierwerkzeugs
DE102004062319B3 (de) * 2004-12-20 2006-03-02 Schneider Gmbh + Co. Kg Polierwerkzeug
DE102005052314A1 (de) 2005-11-01 2007-05-03 Satisloh Gmbh Fast-Tool-Anordnung, insbesondere für Drehmaschinen zur Bearbeitung von optischen Werkstücken
DE202008016454U1 (de) * 2008-06-17 2009-03-05 Satisloh Gmbh Werkzeug zum Polieren und Feinschleifen von optisch wirksamen Flächen in der Feinoptik
JP4709257B2 (ja) * 2008-08-08 2011-06-22 株式会社トプコン レンズ研磨装置
GB2477557A (en) * 2010-02-08 2011-08-10 Qioptiq Ltd Aspheric optical surface polishing tool with individually movable polishing pads
DE102010019491B4 (de) 2010-04-30 2015-07-09 Carl Zeiss Vision International Gmbh Polierwerkzeug zur Bearbeitung von optischen Flächen, insbesondere Freiformflächen
DE102011014230A1 (de) * 2011-03-17 2012-09-20 Satisloh Ag Vorrichtung zur Feinbearbeitung von optisch wirksamen Flächen an insbesondere Brillengläsern
FR2972672B1 (fr) 2011-03-18 2013-03-15 Coriolis Composites Attn Olivier Bouroullec Machine d'application de fibres avec systeme de securite
CN102490104A (zh) * 2011-12-09 2012-06-13 中国科学院长春光学精密机械与物理研究所 非球面反射镜自动加工装置
DE102012014399A1 (de) 2012-07-20 2014-05-15 Carl Zeiss Vision International Gmbh Vorrichtung zum Ermitteln und Ausgeben eines für einen Brillenträger geeigneten Brillenlinsentyp
US9352509B1 (en) * 2013-05-08 2016-05-31 The Boeing Company Tools and methods for use in removing a coating
ITBS20130066A1 (it) * 2013-05-16 2014-11-17 Cms Spa Unita' portautensile di macchine lucidatrici di lastre in pietra o affini
CN103302585A (zh) * 2013-06-25 2013-09-18 濮阳市亚利机械制造有限公司 一种用于研磨空气炮炮口的研磨机
DE102014206424A1 (de) 2014-04-03 2015-10-08 Carl Zeiss Vision International Gmbh Polierwerkzeug sowie Vorrichtung und Verfahren zur formfehleroptimierten Polierbearbeitung von Brillenlinsenoberflächen und Gießformschalen zur Brillenlinsenherstellung
DE102016004328A1 (de) * 2016-04-13 2017-10-19 Satisloh Ag Werkzeugspindel für eine Vorrichtung zur Feinbearbeitung von optisch wirksamen Flächen an Werkstücken
DE102016006741A1 (de) * 2016-06-06 2017-12-07 Schneider Gmbh & Co. Kg Werkzeug, Vorrichtung und Verfahren zum Polieren von Linsen
CN106002521A (zh) * 2016-07-19 2016-10-12 苏州誉衡昌精密机械有限公司 一种自动抛光轮机构
DE102017102094B4 (de) 2017-02-02 2019-07-11 Steffen Nitschke Werkzeugmodul zur Feinbearbeitung
CN107186572B (zh) * 2017-06-09 2023-04-11 中国科学院西安光学精密机械研究所 一种非球面光学元件抛光装置
CN107322411B (zh) * 2017-06-09 2023-04-11 中国科学院西安光学精密机械研究所 一种大口径非球面光学元件抛光装置
JP2019000957A (ja) * 2017-06-16 2019-01-10 株式会社春近精密 レンズ研磨装置およびレンズ研磨方法
CN109514384A (zh) * 2018-11-07 2019-03-26 西安工业大学 非球面光学元件的抛光方法和装置
CN109202709A (zh) * 2018-11-21 2019-01-15 中国科学院光电技术研究所 一种气压控制恒定压力自适应抛光磨头
EP3663039A1 (fr) 2018-12-03 2020-06-10 Carl Zeiss Vision International GmbH Machine de polissage destinée au traitement d'une surface optique d'un verre de lunettes, dispositif de réception destiné à être utilisé dans la machine de polissage, procédé de traitement polissage des surfaces optiques des verres de lunettes et procédé de fabrication d'un verre de lunettes
JP7354879B2 (ja) * 2020-03-05 2023-10-03 トヨタ自動車株式会社 自動水研装置
CN111906672B (zh) * 2020-07-21 2021-05-07 温州大学 一种基于气压砂轮的自动化抛光装置
CN113618542A (zh) * 2021-07-13 2021-11-09 中国兵器科学研究院宁波分院 一种抛光设备

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JP2003525756A (ja) 2003-09-02
EP1251997A1 (fr) 2002-10-30
DE50101982D1 (de) 2004-05-19
DE50114907D1 (de) 2009-07-02
EP1386694B1 (fr) 2009-05-20
EP1386694A1 (fr) 2004-02-04
EP1251997B2 (fr) 2011-06-08
EP1251997B1 (fr) 2004-04-14
JP4945771B2 (ja) 2012-06-06
US20050037695A1 (en) 2005-02-17
US8011996B2 (en) 2011-09-06
WO2001056740A1 (fr) 2001-08-09
US7588480B2 (en) 2009-09-15
DE10100860A1 (de) 2001-08-23
US20030045211A1 (en) 2003-03-06
US20080020691A1 (en) 2008-01-24
TW558477B (en) 2003-10-21

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