EP0567894B1 - Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir - Google Patents

Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir Download PDF

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Publication number
EP0567894B1
EP0567894B1 EP93106347A EP93106347A EP0567894B1 EP 0567894 B1 EP0567894 B1 EP 0567894B1 EP 93106347 A EP93106347 A EP 93106347A EP 93106347 A EP93106347 A EP 93106347A EP 0567894 B1 EP0567894 B1 EP 0567894B1
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EP
European Patent Office
Prior art keywords
pressure fluid
spindle sleeve
lens
guide pin
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP93106347A
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German (de)
English (en)
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EP0567894A1 (fr
Inventor
Franz Bobst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Satisloh Oensingen AG
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Loh Engineering AG
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Publication date
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Publication of EP0567894A1 publication Critical patent/EP0567894A1/fr
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices

Definitions

  • the invention relates to a device for guiding a workpiece or tool in the machining of toric or spherical surfaces of optical lenses on grinding or polishing machines, according to the preamble of claim 1.
  • a device for guiding a workpiece or tool in the machining of toric or spherical surfaces of optical lenses on grinding or polishing machines according to the preamble of claim 1.
  • Such a device is known from DE-C-2 252 503.
  • the device is preferably intended for machining toric surfaces.
  • a toric surface is understood to mean a non-rotationally symmetrical aspherical surface which has two radii of different sizes in two sections perpendicular to one another, while all other sections represent curves of a higher order.
  • the clear grinding and polishing of the blanks of toric lenses is usually carried out using tools which have a continuous or interrupted toric surface which is complementary to the lens surface. It is essential that the two arcuate profiles of the toric lens are perpendicular to each other, especially in the case of correction lenses. It is therefore essential that in the course of clear grinding and polishing the two special perpendicular planes of the Grinding or polishing tools that are moved past a point on the surface of the lens always remain parallel to themselves.
  • devices for clear grinding and polishing have a tool which is caused to carry out orbital movements which are as diverse as possible, but no rotary movement is provided around a vertical axis standing on the toric surface.
  • the devices for the clear grinding and polishing of toric lenses have a guide device which prevents such rotary movements and a driver device which ensures a change in position of the tool with respect to the lens.
  • the driver device essentially has a ball joint, in the axial direction of which the tool's force of action acts on the lens, and which deflects the various movements which cause a relative change in position between the lens and tool, a direction perpendicular to its axis, and thus a gimbal balance between Allows lens and tool.
  • a number of guide devices are known which operate on this principle.
  • the known guiding devices which are used for individual machining there are those in which the lens or the tool is held in place, while the other element, ie the tool or the lens, is guided by forks, drive rods and / or joints, in particular ball joints .
  • the guide systems working with a fork tend to make an eccentric adjustment, which prevents the torus from being fully realized.
  • the lens or the tool is caused to rotate, while the other element, ie the tool or the lens, is guided by a device which also has forks, drive rods and / or joints.
  • the devices used for guiding are structured accordingly.
  • the lining for optical lenses known from German patent specification 22 52 503 made a significant advance in relation to the problems shown.
  • the orientation of the torus axes is not accomplished via forks and the two otherwise usual ball pins, but rather a form-fitting lens carrier is used, which is guided by a rolling bellows in the circumferential direction and which holds the intermediate piece to be machined by an air cushion to the tool (or vice versa).
  • the lens carrier is designed to be axially displaceable, the radial guide being a spherical pin Tip occurs around which the lens wearer can execute an oscillating movement, which is necessary for the form-fitting homokinetic adjustment of the tool and lens.
  • the effective contact pressure is transferred to the lens carrier via the roller bellows.
  • the entire chuck thus forms a homokinetic coupling, which allows torque-free transmission of torque between the lens holder and the tool and, at the same time, hermetically seals the ball joint against the abrasive polishing and grinding agents.
  • the known chuck described above is according to the prior art (Loh Toro-X 2000, grinding and polishing machine for the recipe production of the companies Loh Optikmaschinen KG in CH-4702 Oensingen and Wilhelm Loh Wetzlar Optikmaschinen GmbH Co. KG in DE-6330 Wetzlar) used on an axially movable quill, on the inner end of which the receiving chuck is concentrically attached.
  • the respective position of the quill must be readjusted each time the workpiece or tool is changed in order to ensure that the receiving chuck functions properly.
  • the known device with the advantageous bellows receiving chuck must be operated by hand for the axial movements. Workpieces can also only be changed by hand.
  • the invention has for its object to provide a device based on the preamble of claim 1, in which to realize an automatic workpiece and tool change, the quill is automatically adjusted or adjusted and is held in the working position with optimal balancing effectiveness of the feed chuck.
  • the quill is axially moved by a pressure medium cylinder and piston arrangement through a pressure medium, which at the same time also actuates the receiving chuck and brings it into a position most suitable for homokinetic compensatory movements.
  • all adjustment and delivery movements can be controlled exclusively and automatically by the pressure medium. This not only saves time, but it also achieves a consistently high processing quality.
  • Gases and liquids can be used as pressure medium, but compressed air is preferred.
  • the desired balance of forces between the forces generated by the pressure medium cylinder and piston arrangement and the forces acting in the receiving chuck is preferably achieved in accordance with claim 2.
  • the measures of claim 4 ensure that not only the piston of the pressure medium cylinder and piston assembly is retracted after a working cycle, but that the intake chuck is brought into a position by the vacuum used, which favors an automatic change of the parts to be changed.
  • Claim 5 contains features for a special design of the parts forming the ball joint and their attachment to the quill.
  • An expedient design of the guide pin carrying the ball head of the ball joint can be seen from claim 6.
  • Claims 7 and 8 characterize a stop arrangement for the guide pin with an integrated valve device for blocking the pressure medium supply to the receiving chuck when the guide pin is pushed out to the maximum.
  • the design of the device according to claims 9 to 11 is advantageous. This ensures that the intermediate piece holding the lens is latched and positioned on the lens holder of the receiving chuck, which facilitates the automatic loading and positioning of the parts to be changed.
  • the device can also be designed according to claim 12.
  • the device shown in Fig. 1 is part of a grinding or polishing machine, not shown, on which several of the devices shown (for example two) can be arranged in parallel. Such machines are used for prescription lens processing.
  • a rotationally symmetrical receiving chuck 2 is attached at the lower end of a quill 1.
  • the receiving chuck 2 has a bell-shaped flange 3 with a concentric hollow pin 4 and is non-rotatably and axially non-displaceably attached to the lower end of the sleeve 1 and fastened there in a suitable manner.
  • the outer wall 7 of a bellows 8 is firmly and tightly clamped between a peripheral wall 5 of the flange 3 and an outer ring 6 attached to it.
  • the inner wall 9 of the bellows 8 is fastened tightly to the cylindrical peripheral surface of a lens carrier 10.
  • the bellows 8 consists of an elastomeric material with an embedded reinforcement insert, which does not hinder the bending of the bellows, but excludes its elastic expansion.
  • the bellows can roll without being stretched and is rigid in the circumferential direction. Rotations of the lens carrier 10 relative to the flange 3 can therefore not occur in the machining operation.
  • the rolling bellows 8 seals an articulated chamber 12 essentially delimited by the flange 3 and the lens carrier 10.
  • a ball joint consisting of a ball head 13 which engages in a ball socket 14 located in the lens carrier 10.
  • the ball head 13 is located at the free end of a guide pin 15 which is guided in an axially displaceable piston-like manner within an axial bore 11 which is continuous over the length of the sleeve 1 and within a guide bush 16 inserted therein.
  • the guide pin 15 has a longitudinal bore 17 closed at both ends, which is connected by an upper transverse bore 18 to the axial bore 11 and by a lower transverse bore 19 to the joint chamber 12 forming a pressure medium space.
  • the receiving chuck 2 with its ball joint 13, 14 and the rolling bellows 8 forms an exactly backlash-free, homokinetic coupling between the lens carrier 10 and the flange 3 in the circumferential direction because of the rigidity of the rolling bellows Rigid bellows 8 does not hinder the tiltability of the lens carrier 10 about the ball joint 13, 14 relative to the flange 3, so that tilting compensatory movements of the lens carrier 10 are possible without restriction.
  • the bellows 8 hermetically seals the ball joint 13, 14 against the abrasive polishing and grinding agents.
  • the lens carrier 10 is releasably locked to an intermediate piece 21, which is concentrically attached to it and holds the lens 20.
  • a circumferential inner groove 22 is provided on a lower cylindrical wall of the lens carrier 10 and a circumferential outer groove 23 is provided on a complementary cylindrical wall of the intermediate piece 21.
  • An O-ring 24 is inserted into the circumferential inner groove 22, which is the locking element effective between the two grooves 22, 23.
  • the intermediate piece 21 engages in a form-fitting and positioning manner in the lens carrier 10.
  • the intermediate piece 21 sits on the grinding or polishing tool 25 with the interposition of the lens 20 fastened to it for processing.
  • the sleeve 1 can be moved axially in the manner described below by a pressure medium cylinder and piston arrangement arranged coaxially thereto.
  • the piston 26 is designed as an annular piston attached to the quill 1, which is displaceable within the cylinder 27 with the quill 1 acting as a piston rod.
  • the cylinder 27 is closed at one end by an upper cylinder cover 29 provided with a pressure medium chamber 28.
  • the pressure medium chamber 28 is located within a cup-shaped extension 30 of the cylinder cover 29.
  • the upper end of the sleeve 1, which is immersed in the pressure medium chamber 28, is axially displaceable but non-rotatably guided in the upper cylinder cover 29.
  • a guide ring is fastened axially immovably and non-rotatably within the upper cylinder cover 29.
  • the Quill 1 passes through the guide ring 31 and is non-rotatable with respect to it by multi-spline toothing elements or the like, which are partly attached to the quill 1 above the piston 26 and partly in the corresponding through bore of the guide ring 31.
  • connection bore 32 for the optional supply of the pressure medium or the application of a negative pressure.
  • the connection bore 32 is in constant communication with both the pressure medium chamber 28 and with a pressure medium space 33.
  • the pressure medium space 33 is delimited by the cylinder 27, the upper cylinder cover 29, the outer surface of the sleeve 1 and the piston 26. Since there is no pressure difference between the pressure medium chamber 28 and the pressure medium space 33 due to the arrangement described, a seal between the sleeve 1 and the upper cylinder cover 29 or the guide ring 31 is omitted, as a result of which the sleeve 1 passes through the guide ring 31 with low friction.
  • the sleeve 1 With its end carrying the receiving chuck 2, the sleeve 1 is axially displaceably guided through a lower cylinder cover 34 which closes the lower end of the cylinder 27.
  • a seal between the lower cylinder cover 34 and the sleeve 1 passed through it is not necessary to reduce friction because no pressure medium is supplied to the cylinder space between the piston 26 and the lower cylinder cover 34.
  • This space is permanently connected to the outside atmosphere via a ventilation opening 35 which is guided through the lower cylinder cover 34.
  • the two cylinder covers 29 and 34 and the cylinder 27 are held together by suitable means.
  • the entire device can, for example, by means of the lower cylinder cover 34 on a crosshead or the like.
  • the grinding and polishing machine which is movably driven (not shown) in accordance with the kinematic requirements of machining toric surfaces.
  • the pressure medium space of the joint chamber 12 and the pressure medium space 33 of the pressure medium cylinder and piston arrangement 26, 27 communicate with one another, i.e. are directly connected to the connection bore 32 in the case of the pressure medium chamber 33 and indirectly in the case of the pressure medium chamber of the joint chamber 12.
  • the pressure medium supplied via the connection bore 32 passes through a feed bore 36 in the upper cylinder cover 29 or in the guide ring 31 into the pressure medium chamber 33.
  • pressure medium of the same pressure passes from the connection bore 32 into the pressure medium chamber 28 and from there via the axial bore 11 in the sleeve 1 and via the bores 18, 17 and 19 in the guide pin 15 into the pressure medium chamber of the joint chamber 12.
  • the pressure medium chamber of the joint chamber 12 and the pressure medium chamber 33 located above the piston 26 are therefore acted upon simultaneously by the pressure medium.
  • the dimensions of the pressure medium active surfaces on the piston 26, including the end ring surface of the quill 1 located in the pressure medium chamber 28, on the one hand, and the pressure medium active surfaces in the receiving chuck 2, on the other hand are designed for a balance between the axially active forces directed in opposite directions in the working position. 1 and 4, in which in the area of the U-shaped transition between the outer wall 7 and the inner wall 9 of the bellows 8 there are symmetrical relationships with respect to a center line between the walls 7 and 9 .
  • This working position of the bellows 8 ensures optimal homokinetic compensatory movements between the flange 3 and the lens carrier 10 of the receiving chuck 2.
  • Tilting movements ie compensating movements of the lens carrier 10, on the other hand, are made more difficult or at least restricted if the bellows 8 have the configuration shown in FIGS. 2 and 3 shows.
  • the pressure medium applied to the receiving chuck 2 is too high, while in FIG. 3 it is too low.
  • there is a tightening of the bellows which impairs the tilting ability of the rolling bellows 8.
  • the sleeve 1 and the receiving chuck 2 assume approximately the position shown in FIG. 1, in which the aforementioned balance of forces is present and a sufficient contact pressure is applied between the workpiece and the tool for the intended machining process.
  • the guide pin 15 also has a special feature illustrated by FIG. 5. When it is acted upon by the pressure medium on its end face, its outward displacement path is limited by a stop. For this purpose, an O-ring 37 inserted into a circumferential groove of the same is provided at the upper end of the guide pin 15 and, when the guide pin is pushed out to the maximum, strikes the end face 38 of the guide bush 16 inserted into the axial bore 11 of the sleeve 1. This arrangement also acts as a valve device.
  • the device is moved into the working position by supplying the pressure medium to the connection bore 32.
  • the pressure medium flows through the connection bore 32 into the pressure medium space 33, the pressure medium chamber 28 and via the bores described in the pressure medium space of the joint chamber 12.
  • the rolling bellows 8 with the lens carrier 10 and the intermediate piece 21 holding the lens 20 is extended downward in the receiving chuck 2, the stop arrangement described with valve device at the upper end the guide pin 15 prevents an ancestor from being too wide.
  • the piston 26 extends with the sleeve 1 until the workpiece, ie the lens 20, is pressed against the tool to the extent necessary for the machining.
  • the device is returned to its starting position, the sleeve 1 being returned to its loading and starting position by applying a negative pressure via the connection bore 32 to the pressure medium chamber 33.
  • the lens carrier 10 with the intermediate piece 21 and the processed lens 20 located thereon is lifted off the tool 25. Since the negative pressure applied also acts on the pressure medium space of the joint chamber 12 via the bores and spaces described, the membrane formed by the bellows 8 and the lens carrier 10 with the intermediate piece 21 and the lens 20 is pulled against the bell-shaped flange 3 against the stop .
  • the precise positioning of the workpiece or of the parts carrying the workpiece required for automatic loading is achieved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Claims (12)

  1. Dispositif pour le guidage d'une pièce à usiner ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur des machines à meuler ou à polir, comprenant :
    - un mandrin récepteur (2) comportant un support de lentille ou d'outil (10), un élément de raccordement constitué par un tenon (4) et une bride (3) en forme de cloche pour la fixation du mandrin, un joint à rotule (13, 14) qui relie le support de lentille ou d'outil à l'élément de raccordement, un soufflet à déroulement (8) rigide en direction périphérique qui relie la bride et le support de lentille ou d'outil, ledit soufflet à déroulement étanchant l'espace désigné dans ce qui suit par chambre à rotule (12), dans lequel se trouve le joint à rotule, et une conduite de fluide sous pression étant reliée à la chambre à rotule, et
    - un fourreau (1) axialement mobile et agencé sur la machine à meuler ou polir, le mandrin récepteur étant fixé de façon concentrique à l'extrémité intérieure du fourreau,
    caractérisé en ce que le fourreau (1) est mobile par un agencement à piston-et-cylindre à fluide sous pression (26, 27) agencé de façon coaxiale par rapport à celui-ci, et en ce que les espaces à fluide sous pression de la chambre à rotule (12) et de l'agencement à piston-et-cylindre à fluide sous pression (26, 27) sont reliés l'un à l'autre et peuvent être sollicités simultanément par le fluide sous pression.
  2. Dispositif selon la revendication 1, caractérisé en ce que les surfaces exposées au fluide sous pression sur le piston (26) et dans le mandrin récepteur (2) sont conçues pour un équilibre entre les forces agissant axialement et dirigées en sens opposé dans la position de travail.
  3. Dispositif selon l'une ou l'autre des revendications 1 et 2, caractérisé en ce que le piston (26) est réalisé sous la forme d'un piston annulaire fixé sur le fourreau (1), en ce que le cylindre (27) est refermé à une extrémité par un premier couvercle de cylindre (29) pourvu d'une chambre à fluide sous pression (28), dans laquelle plonge l'extrémité du fourreau (19), qui est détournée du mandrin récepteur (2), en ce que le fourreau (1) est guidé dans le premier couvercle de cylindre (29) de façon axialement mobile mais sans possibilité de tourner, et guidé de façon axialement mobile, par son extrémité portant le mandrin récepteur (2) à travers un second couvercle de cylindre (34) qui referme l'autre extrémité du cylindre (27), et en ce que l'espace à fluide sous pression (33) délimité par le cylindre (27), par le premier couvercle de cylindre (29), par la surface extérieure du fourreau, et par le piston (26) est relié à la chambre à fluide sous pression (28) qui est à son tour reliée à l'espace à fluide sous pression de la chambre à rotule (12) via un perçage axial traversant (11) du fourreau (1).
  4. Dispositif selon l'une quelconque des revendications 1 à 3, caractérisé en ce que le fourreau (1) peut être ramené dans sa position de chargement de départ par application d'une dépression à l'espace à fluide sous pression (33) délimité par le cylindre (27), par le premier couvercle de cylindre (29), par la surface extérieure du fourreau et par le piston (26).
  5. Dispositif selon l'une quelconque des revendications 1 à 4, caractérisé en ce que dans le perçage axial (11) du fourreau (1) est guidée de façon axialement mobile à la manière d'un piston, une tige de guidage (15) pénétrant dans l'espace à fluide sous pression de la chambre à rotule (12), cette tige de guidage (15) portant à son extrémité libre la tête de rotule (13) du joint à rotule qui s'engage dans la cavité articulaire (14) du joint à rotule, qui est située dans le support de lentille ou d'outil (10), et la tige de guidage (15) établit via un perçage longitudinal (17) la liaison entre le perçage axial (11) du fourreau (1) et l'espace à fluide sous pression de la chambre à rotule (12).
  6. Dispositif selon la revendication 5, caractérisé en ce que le perçage longitudinal (17) de la tige de guidage (15) est refermé aux deux extrémités, la liaison du perçage longitudinal (17) avec le perçage axial (11) du fourreau (1) et avec l'espace à fluide sous pression de la chambre à rotule (12) étant établie par des perçages transversaux (18, 19) dans la tige de guidage (15).
  7. Dispositif selon l'une ou l'autre des revendications 5 et 6, caractérisé en ce que le trajet de déplacement dirigé vers l'extérieur de la tige de guidage (15) est limité par une butée à laquelle est associé un dispositif de soupape grâce auquel la liaison entre le perçage axial (11) du fourreau (1) et le perçage longitudinal (17) de la tige de guidage (15) est interrompue lorsque la tige de guidage (15) est déployée au maximum.
  8. Dispositif selon la revendication 7, caractérisé en ce qu'il est prévu à une extrémité de la tige de guidage (15) un joint torique (37) mis en place dans une gorge périphérique de celle-ci, qui bute, lorsque la tige de guidage (15) est déployée au maximum, sur la surface frontale (38) d'une douille de guidage (16) mise en place dans le perçage axial (11) du fourreau (1), et qui forme, conjointement avec cette douille, simultanément le dispositif de soupape.
  9. Dispositif selon l'une quelconque des revendications 1 à 8, caractérisé en ce que pour l'usinage de lentilles toriques, le support de lentille (10) est enclenché de façon détachable avec un élément intermédiaire (21) qui est agencé de façon concentrique par rapport à celui-ci et qui retient la lentille (20).
  10. Dispositif selon la revendication 9, caractérisé en ce que pour l'enclenchement, il est prévu une gorge intérieure périphérique (22) sur le support de lentille (10), et une gorge extérieure périphérique (23) sur l'élément intermédiaire (21), et en ce qu'un joint torique (24) est mis en place dans la gorge intérieure périphérique (22).
  11. Dispositif selon l'une ou l'autre des revendications 9 et 10, caractérisé en ce que dans la position enclenchée, l'élément intermédiaire (21) s'engage par coopération de formes et de façon positionnée dans le support de lentille (10).
  12. Dispositif selon l'une quelconque des revendications 1 à 11, caractérisé en ce que le fourreau (1) peut être fixé axialement par rapport au cylindre (27) dans la position de travail.
EP93106347A 1992-05-01 1993-04-20 Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir Expired - Lifetime EP0567894B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4214266 1992-05-01
DE4214266A DE4214266A1 (de) 1992-05-01 1992-05-01 Vorrichtung zur fuehrung eines werkstuecks oder werkzeugs bei der bearbeitung torischer oder sphaerischer flaechen optischer linsen auf schleif- oder poliermaschinen

Publications (2)

Publication Number Publication Date
EP0567894A1 EP0567894A1 (fr) 1993-11-03
EP0567894B1 true EP0567894B1 (fr) 1995-11-29

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EP93106347A Expired - Lifetime EP0567894B1 (fr) 1992-05-01 1993-04-20 Dispositif pour le guidage d'une pièce ou d'un outil lors de l'usinage de surfaces toriques ou sphériques de lentilles optiques sur machine à meuler ou polir

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US (1) US5421770A (fr)
EP (1) EP0567894B1 (fr)
DE (1) DE4214266A1 (fr)

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DE102004003131A1 (de) * 2004-01-15 2005-08-11 Carl Zeiss Vorrichtung und Verfahren zum Polieren einer optischen Fläche, optisches Bauelement, sowie Verfahren zum Herstellen eines Polierwerkzeugs
US7153184B2 (en) 2002-10-25 2006-12-26 Carl Zeiss Vision Gmbh Method and apparatus for producing optical glasses
DE102010019491A1 (de) 2010-04-30 2011-11-03 Carl Zeiss Vision Gmbh Polierwerkzeug zur Bearbeitung von optischen Flächen, insbesondere Freiformflächen

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FR2733710B1 (fr) * 1995-05-03 1997-07-18 Essilor Int Pre-molette pour le glantage d'une lentille optique, et son procede de mise en oeuvre
DE19800841C2 (de) * 1998-01-13 2001-07-19 Optotech Optikmasch Gmbh Verfahren zum gleichzeitigen Polieren von mindestens zwei optischen Linsen und Vorrichtung zur Durchführung des Verfahrens
US6080044A (en) * 1998-03-26 2000-06-27 Gerber Coburn Optical, Inc. Fining/polishing machine
US6089960A (en) * 1998-06-03 2000-07-18 One Source Manufacturing Semiconductor wafer polishing mechanism
FR2784923B1 (fr) * 1998-10-22 2001-01-05 Essilor Int Dispositif de serrage d'un palet sur une machine a deborder les verres optiques
US6257968B1 (en) * 1998-12-16 2001-07-10 National Optronics, Incorporated Quick-release lens clamp pad assembly for use in eyeglass lens processing
TW436382B (en) 1999-03-12 2001-05-28 Mitsubishi Materials Corp Wafer holding head, wafer polishing apparatus, and method for making wafers
DE10100860A1 (de) 2000-02-03 2001-08-23 Zeiss Carl Polierkopf für eine Poliermaschine
DE10053230A1 (de) * 2000-10-26 2002-05-08 Schneider Gmbh & Co Kg Spannfutter für eine Vorrichtung zum Polieren von Linsen und Vorrichtung mit einem solchen Spannfutter
DE10057228B4 (de) * 2000-11-18 2006-04-20 Optotech Optikmaschinen Gmbh Verfahren zum Schleifen von optischen Linsen mittels Ring- und Formwerkzeugen und Vorrichtung zur Durchführung des Verfahrens
EP1327496B1 (fr) 2002-01-09 2009-06-17 Hoya Corporation Appareil de polissage
DE10319945A1 (de) * 2003-05-02 2005-01-27 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung von optisch wirksamen Flächen
WO2005080047A1 (fr) * 2004-02-20 2005-09-01 Hoya Corporation Dispositif et procédé pour bloquer une lentille optique
KR100597649B1 (ko) * 2004-11-26 2006-07-05 삼성전자주식회사 베리어 메탈을 포함하는 반도체 디바이스의 제조방법 및그 구조
DE202008016454U1 (de) * 2008-06-17 2009-03-05 Satisloh Gmbh Werkzeug zum Polieren und Feinschleifen von optisch wirksamen Flächen in der Feinoptik
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DE4214266A1 (de) 1993-11-04
EP0567894A1 (fr) 1993-11-03
DE4214266C2 (fr) 1994-05-05
US5421770A (en) 1995-06-06

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