EP1386694A1 - Procédé et machine de polissage - Google Patents

Procédé et machine de polissage Download PDF

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Publication number
EP1386694A1
EP1386694A1 EP03025546A EP03025546A EP1386694A1 EP 1386694 A1 EP1386694 A1 EP 1386694A1 EP 03025546 A EP03025546 A EP 03025546A EP 03025546 A EP03025546 A EP 03025546A EP 1386694 A1 EP1386694 A1 EP 1386694A1
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing plate
drive shaft
pressure
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03025546A
Other languages
German (de)
English (en)
Other versions
EP1386694B1 (fr
EP1386694B2 (fr
Inventor
Christoph KÜBLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Vision International GmbH
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of EP1386694A1 publication Critical patent/EP1386694A1/fr
Publication of EP1386694B1 publication Critical patent/EP1386694B1/fr
Application granted granted Critical
Publication of EP1386694B2 publication Critical patent/EP1386694B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a method for polishing a point-asymmetrical Freeform surface according to the preamble of claim 1 and a polishing machine according to the preamble of claim 5.
  • a polishing machine for polishing spherical is known from EP 727 280 B1 Lens surfaces known.
  • This polishing machine has an upper one in an x direction movable carriage on. With this slide is a tool spindle that is one vertical axis is rotatably connected. The tool spindle is used for Inclusion of a dressing tool.
  • a workpiece spindle connected to a further slide is provided. The Workpiece spindle and the workpiece spindle with the dressing tool are in one fixed distance from each other. The carriage carrying these two spindles is in movable in z direction.
  • WO 97/00155 describes a polishing machine and a method for polishing known optical surfaces.
  • the polishing machine has a polishing head with a elastic membrane is provided.
  • the membrane is pressurized Controlled application of force to the surface to be polished.
  • the disadvantage of this Polishing machine that the size of the surface of the surface to be polished Depends on the pressurization.
  • the polishing head with the elastic membrane is moved by an associated spring in the direction of biased surface.
  • hydraulic cylinders are provided for providing a tilting movement of the elastic membrane to one on the axis of rotation in the area of the flexible membrane lying point.
  • the application of force to Polishing surface is detected by assigned sensors, rotating strips and solenoite.
  • DE 1 239 211 B discloses a gimbal-mounted optical grinding or polishing tool known.
  • An alignment member is provided to align the polishing plate elastic material.
  • This alignment member does not practice the tool from the Spindle lifting force. It can easily be designed so that even one Force the tool to the all-round movable joint, e.g. B. draws a ball joint, however, the alignment force is so weak that the tool is set to the workpiece is possible under the effect of the working pressure.
  • the use of a such a tool allows automatic loading of an optical grinding machine, since the workpiece remains rigid and axially immovable on the spindle and without lateral Tilting away takes a precisely defined position relative to the loading device.
  • the object of the invention is a method and a polishing machine with a Polishing head with polishing plate to polish a free-form surface by which a high quality optical surface can be polished and a constant one Polishing removal can be guaranteed on the entire optical surface to be polished can.
  • the object of the invention is for the method by the in claim 1 given characteristics solved.
  • the object of the invention is achieved for the polishing machine the features given in claim 5 solved.
  • the pressure in a Pressure chamber of the polishing head depending on the surface contour of the optical Area regulated so that the turntable resting on the optical surface it exerts a predetermined constant polishing pressure.
  • a polishing head in particular for polishing optical surfaces, can be used be, with a polishing plate, with a rotationally driven drive shaft is connected, the polishing plate being articulated and non-rotatable with the drive shaft connected is.
  • the polishing plate is connected in a rotationally fixed manner to the drive shaft it is possible that the polishing plate follows the surface contour on the one to be machined Surface rests. Thanks to the articulated connection, the polishing plate can Carry out tilting movements so that it has a maximum polishing surface on the on the polished surface.
  • the non-rotatable articulated connection Connect the polishing plate to the drive shaft using a spherical imbus joint. Because of this Ball imbus joint, it is possible to set the pivot point around which the polishing plate is in any Directions can be pivoted as close as possible to the surface to be polished Arrange polishing plates.
  • the close arrangement of the articulated connection to the polishing Surface of the polishing plate has the advantage that the polishing plate has the surface contours can respond quickly.
  • the articulated connection has been found to be advantageous for the articulated connection to have one or more Locking elements to secure the connection between the drive shaft and the polishing head assigned. If a spherical imbus joint is provided as the articulated connection, then by means of the locking element ensures that the ball imbus head from the assigned Recess cannot slip out. This means that the polishing plate can be used without any problems of the surface to be polished. By the guaranteed by the locking element Various polishing plates can also easily detach the connection are exchanged for each other.
  • a piston assigned to the pressure chamber is operatively connected to the drive shaft so that pressurization of the Pressure chamber is transferred to the polishing plate via the drive shaft.
  • the polishing head (1) shown in FIG. 1 has a polishing plate (3) with a Polishing surface (5).
  • the polishing surface (5) lies on a surface (41) to be polished Workpiece (39).
  • the polishing plate 3 is connected to a drive shaft (7) via the articulated connection. added. In the illustrated embodiment, this is non-rotatable articulated Connection provided a ball imbus joint.
  • the drive shaft (7) is on the The end of the side facing the polishing plate is provided with a spherical imbus head (19) a recess (13) formed in the polishing plate (3) engages.
  • a locking element 15
  • a spring element or spring pin on the polishing plate which is in a recess protrudes into the Kugelimbuskopf, be provided.
  • the drive shaft (7) can be displaced translationally and rotatably via the bearing element (23) stored in a hollow cylinder (49).
  • the hollow cylinder (49) is driven in rotation via a drive, not shown, of the polishing machine, the rotary movement due to the non-rotatable connection through the bearing element (23) completely on the Drive shaft (7) for the polishing head is transmitted.
  • a hydraulic or pneumatic system which is used to act upon the polishing head serves the required polishing pressure.
  • Piston 33
  • Pressurization of the piston (33) is that formed in the pressure chamber cylinder (31) Pressure chamber (29) a pressure supply (35) with a pressure control valve (37) and Assigned pressure reservoir (36).
  • the rotationally fixed translationally movable coupling between the hollow cylinder (49) and the Drive shaft (7) takes place via a roller bearing (23).
  • the drive shaft (7) has non-rotationally symmetrical outer profile (43), preferably a polygonal profile.
  • the Form fit between the outer profile (43) of the drive shaft (7) and the inner wall of the Hollow cylinder is reached via rollers or rollers (25) in the bearing element (23) are added symmetrically to the outer profile of the drive shaft (7) and on the Roll off the outer profile (43) of the drive shaft.
  • the axes of rotation of the rolls or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).
  • a Ball bearing instead of the roller bearing of the drive shaft (7) in the hollow cylinder (49), a Ball bearing, as shown in Figure 4, may be provided.
  • the drive axle has at least one area corresponding to the bearing Non-rotationally symmetrical outer profile, in particular a polygonal profile.
  • polishing the polishing head For polishing the Polishing head, the diameter of which is smaller than the diameter of the surface to be polished, in a pivoting movement in the radial direction over the optical surface to be polished (41) moves. Both the workpiece (39) and the polishing plate are almost driven at the same speed in the same direction.
  • moving the polishing plate About the optical surface to be polished (41) can be provided that the speeds of the Polishing plate or the speed of the workpiece, especially depending on the radial position of the polishing plate. This speed change has one positive influence on constant polishing removal.
  • the pressure fluctuations are very small held so that the polishing plate with constant force on the optical to be polished Surface rests.
  • the pressure control valve also helps to compensate Pressure fluctuations at.
  • the arrangement described in connection with a polishing machine according to the State of the art is in particular non-rotationally symmetrical optical surfaces (41) polishable, the polishing removal being constant over the entire optical surface.
  • the polishing surface of the polishing plate (3) rests as far as possible on the optical surface (41) to be polished. This will ensured in particular by the fact that the non-rotatable articulated connection between the polishing plate and the drive shaft (7) of the polishing plate by one on the Center axis (2) of the polishing head can be tilted in any direction can and the orientation of the polishing plate thereby the surface contour of the Polishing surface (41) can follow.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP03025546A 2000-02-03 2001-01-11 Procédé et machine de polissage Expired - Lifetime EP1386694B2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004455 2000-02-03
DE10004455 2000-02-03
EP01909601A EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP01909601A Division EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse
EP01909601.5 Division 2001-01-11

Publications (3)

Publication Number Publication Date
EP1386694A1 true EP1386694A1 (fr) 2004-02-04
EP1386694B1 EP1386694B1 (fr) 2009-05-20
EP1386694B2 EP1386694B2 (fr) 2013-01-09

Family

ID=7629520

Family Applications (2)

Application Number Title Priority Date Filing Date
EP01909601A Expired - Lifetime EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse
EP03025546A Expired - Lifetime EP1386694B2 (fr) 2000-02-03 2001-01-11 Procédé et machine de polissage

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP01909601A Expired - Lifetime EP1251997B2 (fr) 2000-02-03 2001-01-11 Tete de polissage pour une polisseuse

Country Status (7)

Country Link
US (3) US20030045211A1 (fr)
EP (2) EP1251997B2 (fr)
JP (1) JP4945771B2 (fr)
AU (1) AU2001237285A1 (fr)
DE (3) DE10100860A1 (fr)
TW (1) TW558477B (fr)
WO (1) WO2001056740A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1779967A2 (fr) * 2005-11-01 2007-05-02 Satisloh GmbH Réalisation d'une glissière du chariot d'un outil rapide, en particulier pour un tour de pièces optiques
DE102017102094A1 (de) 2017-02-02 2018-08-02 Steffen Nitschke Werkzeugmodul zur Feinbearbeitung

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001237285A1 (en) 2000-02-03 2001-08-14 Carl Zeiss Polishing head for a polishing machine
DE10250856A1 (de) * 2002-10-25 2004-05-13 Carl Zeiss Verfahren und Vorrichtung zum Herstellen von optischen Gläsern
DE10319945A1 (de) * 2003-05-02 2005-01-27 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung von optisch wirksamen Flächen
DE102004003131A1 (de) 2004-01-15 2005-08-11 Carl Zeiss Vorrichtung und Verfahren zum Polieren einer optischen Fläche, optisches Bauelement, sowie Verfahren zum Herstellen eines Polierwerkzeugs
DE102004062319B3 (de) * 2004-12-20 2006-03-02 Schneider Gmbh + Co. Kg Polierwerkzeug
DE202008016454U1 (de) * 2008-06-17 2009-03-05 Satisloh Gmbh Werkzeug zum Polieren und Feinschleifen von optisch wirksamen Flächen in der Feinoptik
JP4709257B2 (ja) * 2008-08-08 2011-06-22 株式会社トプコン レンズ研磨装置
GB2477557A (en) * 2010-02-08 2011-08-10 Qioptiq Ltd Aspheric optical surface polishing tool with individually movable polishing pads
DE102010019491B4 (de) 2010-04-30 2015-07-09 Carl Zeiss Vision International Gmbh Polierwerkzeug zur Bearbeitung von optischen Flächen, insbesondere Freiformflächen
DE102011014230A1 (de) * 2011-03-17 2012-09-20 Satisloh Ag Vorrichtung zur Feinbearbeitung von optisch wirksamen Flächen an insbesondere Brillengläsern
FR2972672B1 (fr) 2011-03-18 2013-03-15 Coriolis Composites Attn Olivier Bouroullec Machine d'application de fibres avec systeme de securite
CN102490104A (zh) * 2011-12-09 2012-06-13 中国科学院长春光学精密机械与物理研究所 非球面反射镜自动加工装置
DE102012014399A1 (de) 2012-07-20 2014-05-15 Carl Zeiss Vision International Gmbh Vorrichtung zum Ermitteln und Ausgeben eines für einen Brillenträger geeigneten Brillenlinsentyp
DE102012216724A1 (de) 2012-09-19 2014-03-20 Carl Zeiss Vision International Gmbh Verfahren und Vorrichtung zur Polierbearbeitung von Brillenlinsen und Gießformen für die Brillenlinsenherstellung sowie entsprechendes Verfahren zur Herstellung von Brillenlinsen und Gießformen für die Brillenlinsenherstellung
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CN103302585A (zh) * 2013-06-25 2013-09-18 濮阳市亚利机械制造有限公司 一种用于研磨空气炮炮口的研磨机
DE102014206424A1 (de) 2014-04-03 2015-10-08 Carl Zeiss Vision International Gmbh Polierwerkzeug sowie Vorrichtung und Verfahren zur formfehleroptimierten Polierbearbeitung von Brillenlinsenoberflächen und Gießformschalen zur Brillenlinsenherstellung
DE102016004328A1 (de) * 2016-04-13 2017-10-19 Satisloh Ag Werkzeugspindel für eine Vorrichtung zur Feinbearbeitung von optisch wirksamen Flächen an Werkstücken
DE102016006741A1 (de) * 2016-06-06 2017-12-07 Schneider Gmbh & Co. Kg Werkzeug, Vorrichtung und Verfahren zum Polieren von Linsen
CN106002521A (zh) * 2016-07-19 2016-10-12 苏州誉衡昌精密机械有限公司 一种自动抛光轮机构
CN107322411B (zh) * 2017-06-09 2023-04-11 中国科学院西安光学精密机械研究所 一种大口径非球面光学元件抛光装置
CN107186572B (zh) * 2017-06-09 2023-04-11 中国科学院西安光学精密机械研究所 一种非球面光学元件抛光装置
JP2019000957A (ja) * 2017-06-16 2019-01-10 株式会社春近精密 レンズ研磨装置およびレンズ研磨方法
CN109514384A (zh) * 2018-11-07 2019-03-26 西安工业大学 非球面光学元件的抛光方法和装置
CN109202709A (zh) * 2018-11-21 2019-01-15 中国科学院光电技术研究所 一种气压控制恒定压力自适应抛光磨头
EP3663039A1 (fr) 2018-12-03 2020-06-10 Carl Zeiss Vision International GmbH Machine de polissage destinée au traitement d'une surface optique d'un verre de lunettes, dispositif de réception destiné à être utilisé dans la machine de polissage, procédé de traitement polissage des surfaces optiques des verres de lunettes et procédé de fabrication d'un verre de lunettes
JP7354879B2 (ja) * 2020-03-05 2023-10-03 トヨタ自動車株式会社 自動水研装置
CN111906672B (zh) * 2020-07-21 2021-05-07 温州大学 一种基于气压砂轮的自动化抛光装置
CN113618542A (zh) * 2021-07-13 2021-11-09 中国兵器科学研究院宁波分院 一种抛光设备
CN118123685B (zh) * 2024-04-30 2024-10-01 扬州利凯机械制造有限公司 一种轴承制造用轴承抛光机

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EP1779967A2 (fr) * 2005-11-01 2007-05-02 Satisloh GmbH Réalisation d'une glissière du chariot d'un outil rapide, en particulier pour un tour de pièces optiques
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EP1779967A3 (fr) * 2005-11-01 2007-10-31 Satisloh GmbH Réalisation d'une glissière du chariot d'un outil rapide, en particulier pour un tour de pièces optiques
US8056453B2 (en) 2005-11-01 2011-11-15 Satisloh Gmbh Fast tool servo
DE102017102094A1 (de) 2017-02-02 2018-08-02 Steffen Nitschke Werkzeugmodul zur Feinbearbeitung
DE102017102094B4 (de) 2017-02-02 2019-07-11 Steffen Nitschke Werkzeugmodul zur Feinbearbeitung

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EP1251997A1 (fr) 2002-10-30
JP4945771B2 (ja) 2012-06-06
JP2003525756A (ja) 2003-09-02
DE10100860A1 (de) 2001-08-23
TW558477B (en) 2003-10-21
US7588480B2 (en) 2009-09-15
EP1386694B1 (fr) 2009-05-20
DE50101982D1 (de) 2004-05-19
EP1251997B1 (fr) 2004-04-14
US20050037695A1 (en) 2005-02-17
US20030045211A1 (en) 2003-03-06
AU2001237285A1 (en) 2001-08-14
DE50114907D1 (de) 2009-07-02
EP1386694B2 (fr) 2013-01-09
EP1251997B2 (fr) 2011-06-08
US8011996B2 (en) 2011-09-06
US20080020691A1 (en) 2008-01-24

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