EP1386694A1 - Method of polishing and polishing machine - Google Patents
Method of polishing and polishing machine Download PDFInfo
- Publication number
- EP1386694A1 EP1386694A1 EP03025546A EP03025546A EP1386694A1 EP 1386694 A1 EP1386694 A1 EP 1386694A1 EP 03025546 A EP03025546 A EP 03025546A EP 03025546 A EP03025546 A EP 03025546A EP 1386694 A1 EP1386694 A1 EP 1386694A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- polishing
- polishing plate
- drive shaft
- pressure
- polished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
Definitions
- the invention relates to a method for polishing a point-asymmetrical Freeform surface according to the preamble of claim 1 and a polishing machine according to the preamble of claim 5.
- a polishing machine for polishing spherical is known from EP 727 280 B1 Lens surfaces known.
- This polishing machine has an upper one in an x direction movable carriage on. With this slide is a tool spindle that is one vertical axis is rotatably connected. The tool spindle is used for Inclusion of a dressing tool.
- a workpiece spindle connected to a further slide is provided. The Workpiece spindle and the workpiece spindle with the dressing tool are in one fixed distance from each other. The carriage carrying these two spindles is in movable in z direction.
- WO 97/00155 describes a polishing machine and a method for polishing known optical surfaces.
- the polishing machine has a polishing head with a elastic membrane is provided.
- the membrane is pressurized Controlled application of force to the surface to be polished.
- the disadvantage of this Polishing machine that the size of the surface of the surface to be polished Depends on the pressurization.
- the polishing head with the elastic membrane is moved by an associated spring in the direction of biased surface.
- hydraulic cylinders are provided for providing a tilting movement of the elastic membrane to one on the axis of rotation in the area of the flexible membrane lying point.
- the application of force to Polishing surface is detected by assigned sensors, rotating strips and solenoite.
- DE 1 239 211 B discloses a gimbal-mounted optical grinding or polishing tool known.
- An alignment member is provided to align the polishing plate elastic material.
- This alignment member does not practice the tool from the Spindle lifting force. It can easily be designed so that even one Force the tool to the all-round movable joint, e.g. B. draws a ball joint, however, the alignment force is so weak that the tool is set to the workpiece is possible under the effect of the working pressure.
- the use of a such a tool allows automatic loading of an optical grinding machine, since the workpiece remains rigid and axially immovable on the spindle and without lateral Tilting away takes a precisely defined position relative to the loading device.
- the object of the invention is a method and a polishing machine with a Polishing head with polishing plate to polish a free-form surface by which a high quality optical surface can be polished and a constant one Polishing removal can be guaranteed on the entire optical surface to be polished can.
- the object of the invention is for the method by the in claim 1 given characteristics solved.
- the object of the invention is achieved for the polishing machine the features given in claim 5 solved.
- the pressure in a Pressure chamber of the polishing head depending on the surface contour of the optical Area regulated so that the turntable resting on the optical surface it exerts a predetermined constant polishing pressure.
- a polishing head in particular for polishing optical surfaces, can be used be, with a polishing plate, with a rotationally driven drive shaft is connected, the polishing plate being articulated and non-rotatable with the drive shaft connected is.
- the polishing plate is connected in a rotationally fixed manner to the drive shaft it is possible that the polishing plate follows the surface contour on the one to be machined Surface rests. Thanks to the articulated connection, the polishing plate can Carry out tilting movements so that it has a maximum polishing surface on the on the polished surface.
- the non-rotatable articulated connection Connect the polishing plate to the drive shaft using a spherical imbus joint. Because of this Ball imbus joint, it is possible to set the pivot point around which the polishing plate is in any Directions can be pivoted as close as possible to the surface to be polished Arrange polishing plates.
- the close arrangement of the articulated connection to the polishing Surface of the polishing plate has the advantage that the polishing plate has the surface contours can respond quickly.
- the articulated connection has been found to be advantageous for the articulated connection to have one or more Locking elements to secure the connection between the drive shaft and the polishing head assigned. If a spherical imbus joint is provided as the articulated connection, then by means of the locking element ensures that the ball imbus head from the assigned Recess cannot slip out. This means that the polishing plate can be used without any problems of the surface to be polished. By the guaranteed by the locking element Various polishing plates can also easily detach the connection are exchanged for each other.
- a piston assigned to the pressure chamber is operatively connected to the drive shaft so that pressurization of the Pressure chamber is transferred to the polishing plate via the drive shaft.
- the polishing head (1) shown in FIG. 1 has a polishing plate (3) with a Polishing surface (5).
- the polishing surface (5) lies on a surface (41) to be polished Workpiece (39).
- the polishing plate 3 is connected to a drive shaft (7) via the articulated connection. added. In the illustrated embodiment, this is non-rotatable articulated Connection provided a ball imbus joint.
- the drive shaft (7) is on the The end of the side facing the polishing plate is provided with a spherical imbus head (19) a recess (13) formed in the polishing plate (3) engages.
- a locking element 15
- a spring element or spring pin on the polishing plate which is in a recess protrudes into the Kugelimbuskopf, be provided.
- the drive shaft (7) can be displaced translationally and rotatably via the bearing element (23) stored in a hollow cylinder (49).
- the hollow cylinder (49) is driven in rotation via a drive, not shown, of the polishing machine, the rotary movement due to the non-rotatable connection through the bearing element (23) completely on the Drive shaft (7) for the polishing head is transmitted.
- a hydraulic or pneumatic system which is used to act upon the polishing head serves the required polishing pressure.
- Piston 33
- Pressurization of the piston (33) is that formed in the pressure chamber cylinder (31) Pressure chamber (29) a pressure supply (35) with a pressure control valve (37) and Assigned pressure reservoir (36).
- the rotationally fixed translationally movable coupling between the hollow cylinder (49) and the Drive shaft (7) takes place via a roller bearing (23).
- the drive shaft (7) has non-rotationally symmetrical outer profile (43), preferably a polygonal profile.
- the Form fit between the outer profile (43) of the drive shaft (7) and the inner wall of the Hollow cylinder is reached via rollers or rollers (25) in the bearing element (23) are added symmetrically to the outer profile of the drive shaft (7) and on the Roll off the outer profile (43) of the drive shaft.
- the axes of rotation of the rolls or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).
- a Ball bearing instead of the roller bearing of the drive shaft (7) in the hollow cylinder (49), a Ball bearing, as shown in Figure 4, may be provided.
- the drive axle has at least one area corresponding to the bearing Non-rotationally symmetrical outer profile, in particular a polygonal profile.
- polishing the polishing head For polishing the Polishing head, the diameter of which is smaller than the diameter of the surface to be polished, in a pivoting movement in the radial direction over the optical surface to be polished (41) moves. Both the workpiece (39) and the polishing plate are almost driven at the same speed in the same direction.
- moving the polishing plate About the optical surface to be polished (41) can be provided that the speeds of the Polishing plate or the speed of the workpiece, especially depending on the radial position of the polishing plate. This speed change has one positive influence on constant polishing removal.
- the pressure fluctuations are very small held so that the polishing plate with constant force on the optical to be polished Surface rests.
- the pressure control valve also helps to compensate Pressure fluctuations at.
- the arrangement described in connection with a polishing machine according to the State of the art is in particular non-rotationally symmetrical optical surfaces (41) polishable, the polishing removal being constant over the entire optical surface.
- the polishing surface of the polishing plate (3) rests as far as possible on the optical surface (41) to be polished. This will ensured in particular by the fact that the non-rotatable articulated connection between the polishing plate and the drive shaft (7) of the polishing plate by one on the Center axis (2) of the polishing head can be tilted in any direction can and the orientation of the polishing plate thereby the surface contour of the Polishing surface (41) can follow.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Die Erfindung betrifft ein Verfahren zum Polieren einer punktunsymmetrischen Freiformfläche gemäß dem Oberbegriff des Patentanspruchs 1 sowie eine Poliermaschine gemäß dem Oberbegriff des Patentanspruchs 5.The invention relates to a method for polishing a point-asymmetrical Freeform surface according to the preamble of claim 1 and a polishing machine according to the preamble of claim 5.
Aus der EP 727 280 B1 ist eine Poliermaschine zum Polieren sphärischer Linsenoberflächen bekannt. Diese Poliermaschine weist einen oberen in einer x-Richtung verfahrbaren Schlitten auf. Mit diesem Schlitten ist eine Werkzeugspindel, die um eine vertikale Achse drehbar gelagert ist, verbunden. Die Werkzeugspindel dient dabei zur Aufnahme eines Abrichtwerkzeuges. Zur Aufnahme des Werkstückes bzw. der Linse ist eine mit einem weiteren Schlitten verbundene Werkstückspindel vorgesehen. Die Werkstückspindel und die Werkstückspindel mit dem Abrichtwerkzeug sind in einem festen Abstand zueinander angeordnet. Der diese beiden Spindeln tragende Schlitten ist in z-Richtung verfahrbar.A polishing machine for polishing spherical is known from EP 727 280 B1 Lens surfaces known. This polishing machine has an upper one in an x direction movable carriage on. With this slide is a tool spindle that is one vertical axis is rotatably connected. The tool spindle is used for Inclusion of a dressing tool. To hold the workpiece or lens a workpiece spindle connected to a further slide is provided. The Workpiece spindle and the workpiece spindle with the dressing tool are in one fixed distance from each other. The carriage carrying these two spindles is in movable in z direction.
Aus der WO 97/00155 ist eine Poliermaschine und ein Verfahren zum Polieren von optischen Flächen bekannt. Die Poliermaschine weist eine Polierkopf auf, der mit einer elastischen Membran versehen ist. Durch Druckbeaufschlagung der Membran wird die Kraftbeaufschlagung der zu polierenden Fläche geregelt. Nachteilig ist bei dieser Poliermaschine, dass die Größe der auf der zu polierenden Fläche aufliegende Fläche des Polierkopfes bzw. der Membran von der Druckbeaufschlagung abhängt. Der Polierkopf mit der elastischem Membran wird durch eine zugeordnete Feder in Richtung der zu polierenden Fläche vorgespannt. Für die Bereitstellung einer Kippbeweglichkeit der elastischen Membran, um eine auf der Drehachse im Bereich der flexiblen Membran liegenden Punkt, sind Hydraulikzylinder vorgesehen. Die Kraftbeaufschlagung der zu polierenden Fläche wird durch zugeordnete Sensoren, Drehstreifen und Solenoit, detektiert. WO 97/00155 describes a polishing machine and a method for polishing known optical surfaces. The polishing machine has a polishing head with a elastic membrane is provided. The membrane is pressurized Controlled application of force to the surface to be polished. The disadvantage of this Polishing machine that the size of the surface of the surface to be polished Depends on the pressurization. The polishing head with the elastic membrane is moved by an associated spring in the direction of biased surface. For providing a tilting movement of the elastic membrane to one on the axis of rotation in the area of the flexible membrane lying point, hydraulic cylinders are provided. The application of force to Polishing surface is detected by assigned sensors, rotating strips and solenoite.
In dem aus dieser Schrift bekannten Verfahren wird das Polieren der optischen Oberfläche in Abhängigkeit von der Drehzahl des polierenden Kopfes und der auf die zu polierende Oberfläche wirkenden Anpresskraft durch Druckbeaufschlagung gesteuert.In the method known from this document, the polishing of the optical surface depending on the speed of the polishing head and the one to be polished Surface contact pressure controlled by pressurization.
Aus der DE 1 239 211 B ist ein kardanisch gelagertes Optik- Schleif- oder Polierwerkzeug bekannt. Zur Ausrichtung des Poliertellers ist ein Ausrichtglied vorgesehen, das aus elastischem Werkstoff besteht. Dieses Ausrichtglied übt keine das Werkzeug von der Spindel abhebende Kraft aus. Es kann ohne weiteres so ausgebildet werden, dass sogar eine Kraft das Werkzeug an das allseitig bewegliche Gelenk, z. B. ein Kugelgelenk, heranzieht, wobei jedoch die Ausrichtkraft so schwach ist, dass die Einstellung des Werkzeuges auf das Werkstück unter der Wirkung des Arbeitsdruckes möglich ist. Die Verwendung eines solchen Werkzeuges gestattet das automatische Beschicken einer Optik- Schleifmaschine, da das Werkstück starr und axial unbeweglich auf der Spindel verbleibt und ohne seitliches Wegkippen eine genau definierte Lage relativ zu der Beschickungsvorrichtung, einnimmt.DE 1 239 211 B discloses a gimbal-mounted optical grinding or polishing tool known. An alignment member is provided to align the polishing plate elastic material. This alignment member does not practice the tool from the Spindle lifting force. It can easily be designed so that even one Force the tool to the all-round movable joint, e.g. B. draws a ball joint, however, the alignment force is so weak that the tool is set to the workpiece is possible under the effect of the working pressure. The use of a such a tool allows automatic loading of an optical grinding machine, since the workpiece remains rigid and axially immovable on the spindle and without lateral Tilting away takes a precisely defined position relative to the loading device.
Es ist Aufgabe der Erfindung ein Verfahren sowie eine Poliermaschine mit einem Polierkopf mit Polierteller zum Polieren einer Freiformfläche bereitzustellen, durch die eine qualitativ hochwertige optische Oberfläche polierbar ist und ein konstanter Polierabtrag auf der gesamten zu polierenden optischen Oberfläche gewährleistet werden kann.The object of the invention is a method and a polishing machine with a Polishing head with polishing plate to polish a free-form surface by which a high quality optical surface can be polished and a constant one Polishing removal can be guaranteed on the entire optical surface to be polished can.
Die Aufgabe der Erfindung wird für das Verfahren durch die im Patentanspruch 1 gegebenen Merkmale gelöst. Die Aufgabe der Erfindung wird für die Poliermaschine durch die im Patentanspruch 5 gegebenen Merkmale gelöst.The object of the invention is for the method by the in claim 1 given characteristics solved. The object of the invention is achieved for the polishing machine the features given in claim 5 solved.
Weitere vorteilhafte Maßnahmen sind in weiteren abhängigen Ansprüchen beschrieben.Further advantageous measures are described in further dependent claims.
In einer vorteilhaften Ausführungsform der Erfindung wird der Druck in einer Druckkammer des Polierkopfes in Abhängigkeit von der Oberflächenkontur der optischen Fläche geregelt, so dass der auf der optischen Oberfläche aufliegende Drehteller auf dieselbe einen vorbestimmten konstanten Polierdruck ausübt. In an advantageous embodiment of the invention, the pressure in a Pressure chamber of the polishing head depending on the surface contour of the optical Area regulated so that the turntable resting on the optical surface it exerts a predetermined constant polishing pressure.
Es kann ein Polierkopf, insbesondere zum Polieren von optischen Flächen, eingesetzt werden, mit einem Polierteller, der mit einer rotatorisch antreibbaren Antriebswelle verbunden ist, wobei der Polierteller mit der Antriebswelle gelenkig und drehfest verbunden ist.A polishing head, in particular for polishing optical surfaces, can be used be, with a polishing plate, with a rotationally driven drive shaft is connected, the polishing plate being articulated and non-rotatable with the drive shaft connected is.
Durch die Maßnahme den Polierteller drehfest gelenkig mit der Antriebswelle zu verbinden ist es möglich, daß der Polierteller der Oberflächenkontur folgend auf der zu bearbeitenden Oberfläche aufliegt. Durch die gelenkige Verbindung kann der Polierteller Kippbewegungen ausführen, so daß er mit einer maximalen Polierfläche auf der zu polierenden Oberfläche aufliegt.As a result of the measure, the polishing plate is connected in a rotationally fixed manner to the drive shaft it is possible that the polishing plate follows the surface contour on the one to be machined Surface rests. Thanks to the articulated connection, the polishing plate can Carry out tilting movements so that it has a maximum polishing surface on the on the polished surface.
Zur Übertragung der Drehbewegung der Antriebswelle auf den Polierteller hat es sich als vorteilhaft herausgestellt, den Polierteller mit der Antriebswelle mittels Formschluß zu verbinden, so daß die Drehbewegung der Antriebswelle aufgrund des Formschlusses auf den Polierteller übertragen wird.It has proven to be suitable for transmitting the rotary movement of the drive shaft to the polishing plate it is advantageous to close the polishing plate with the drive shaft by means of a positive lock connect so that the rotational movement of the drive shaft due to the positive connection the polishing plate is transferred.
Es hat sich als vorteilhaft herausgestellt für die drehfeste gelenkige Verbindung den Polierteller über ein Kugelimbusgelenk mit der Antriebswelle zu verbinden. Durch dieses Kugelimbusgelenk ist es möglich, den Drehpunkt, um den der Polierteller in beliebige Richtungen geschwenkt werden kann, möglichst nah an der zu polierenden Oberfläche des Poliertellers anzuordnen. Die nahe Anordnung der gelenkigen Verbindung zur polierenden Oberfläche des Poliertellers hat den Vorteil, daß der Polierteller den Oberflächenkonturen reaktionsschnell folgen kann.It has proven to be advantageous for the non-rotatable articulated connection Connect the polishing plate to the drive shaft using a spherical imbus joint. Because of this Ball imbus joint, it is possible to set the pivot point around which the polishing plate is in any Directions can be pivoted as close as possible to the surface to be polished Arrange polishing plates. The close arrangement of the articulated connection to the polishing Surface of the polishing plate has the advantage that the polishing plate has the surface contours can respond quickly.
Es hat sich als vorteilhaft herausgestellt, der gelenkigen Verbindung ein oder mehrere Rastelemente zur Sicherung der Verbindung von Antriebswelle und Polierkopf zuzuordnen. Ist als gelenkige Verbindung ein Kugelimbusgelenk vorgesehen, so wird mittels des Rastelementes sichergestellt, daß der Kugelimbuskopf aus der zugeordneten Ausnehmung nicht herausrutschen kann. Dadurch kann der Polierteller ohne Probleme von der zu polierenden Fläche entfernt werden. Durch die durch das Rastelement gewährleistete Lösbarkeit der Verbindung können außerdem verschiedene Polierteller leicht gegeneinander ausgetauscht werden.It has been found to be advantageous for the articulated connection to have one or more Locking elements to secure the connection between the drive shaft and the polishing head assigned. If a spherical imbus joint is provided as the articulated connection, then by means of the locking element ensures that the ball imbus head from the assigned Recess cannot slip out. This means that the polishing plate can be used without any problems of the surface to be polished. By the guaranteed by the locking element Various polishing plates can also easily detach the connection are exchanged for each other.
Es hat sich als vorteilhaft herausgestellt, dem Polierkopf eine Druckkammer zuzuordnen wobei aus einer Druckbeaufschlagung der Druckkammer eine translatorische Bewegung des Poliertellers entlang einer Mittenachse des Polierkopfes resultiert. Liegt der Polierteller auf einer zu polierenden Oberfläche auf, so resultiert aus einer Druckbeaufschlagung ein erhöhter Polierdruck.It has proven to be advantageous to assign a pressure chamber to the polishing head a translational movement from pressurization of the pressure chamber of the polishing plate along a central axis of the polishing head results. The polishing plate is lying on a surface to be polished, results from pressurization increased polishing pressure.
Es hat sich als vorteilhaft herausgestellt, wenn ein der Druckkammer zugeordneter Kolben mit der Antriebswelle in Wirkverbindung steht, so daß eine Druckbeaufschlagung der Druckkammer über die Antriebswelle auf den Polierteller übertragen wird.It has proven to be advantageous if a piston assigned to the pressure chamber is operatively connected to the drive shaft so that pressurization of the Pressure chamber is transferred to the polishing plate via the drive shaft.
Es hat sich als vorteilhaft herausgestellt die Antriebswelle mittels eines koaxial angeordneten Hohlzylinders, in dem die Antriebswelle drehfest gelagert ist, über diesen Hohlzylinder anzutreiben. Für die Übertragung der Drehbewegung hat sich eine formschlüssige Verbindung als vorteilhaft erwiesen.It has been found to be advantageous to use a coaxial drive shaft arranged hollow cylinder, in which the drive shaft is rotatably mounted, via this To drive hollow cylinders. There is one for the transmission of the rotary movement positive connection proved to be advantageous.
Es hat sich als vorteilhaft herausgestellt, die Antriebswelle in dem Hohlzylinder mittels Lagerelementen, z.B. einer Wälzlagerung oder einer Kugellagerung, translatorisch leicht bewegbar zu lagern. Durch diese Lagerung wird gewährleistet, daß bei Druckbeaufschlagung der Druckkammer sich die Antriebswelle in dem Hohlzylinder leichtgängig translatorisch bewegen kann und somit die eingeleitete translatorische Bewegung bzw. Kraftbeaufschlagung nahezu vollständig auf den Polierteller übertragen wird.It has proven to be advantageous to use the drive shaft in the hollow cylinder Bearing elements, e.g. a roller bearing or a ball bearing, translationally light to store it movably. This storage ensures that at Pressurizing the pressure chamber, the drive shaft in the hollow cylinder can move smoothly translationally and thus the initiated translational Almost completely transfer movement or application of force to the polishing plate becomes.
Schließlich hat es sich als vorteilhaft herausgestellt eine Poliermaschine mit dem geschilderten Polierkopf zu bestücken.Finally, it has proven advantageous to use a polishing machine with the to equip the described polishing head.
Anhand eines Ausführungsbeispieles wird die Erfindung im folgenden näher beschrieben. The invention is described in more detail below using an exemplary embodiment.
Es zeigt:
- Figur 1
- eine schematische Skizze des Polierkopfes in einem dessen Mittenachse enthaltenen Schnittes;
Figur 2- einen Schnitt entlang der Ebene II - II in Figur 1;
Figur 3- einen Schnitt entlang der Ebene III - III in Figur 1; und
- Figur 4
- Schnitt entlang der Ebene III - III bei einem alternativen Ausführungsbeispiel.
- Figure 1
- a schematic sketch of the polishing head in a section containing its central axis;
- Figure 2
- a section along the plane II - II in Figure 1;
- Figure 3
- a section along the plane III - III in Figure 1; and
- Figure 4
- Section along the plane III - III in an alternative embodiment.
Der in Figur 1 dargestellte Polierkopf (1) weist einen Polierteller (3) mit einem Polierbelag (5) auf. Der Polierbelag (5) liegt auf einer zu polierenden Oberfläche (41) eines Werkstückes (39) auf.The polishing head (1) shown in FIG. 1 has a polishing plate (3) with a Polishing surface (5). The polishing surface (5) lies on a surface (41) to be polished Workpiece (39).
Der Polierteller 3 ist über die gelenkige Verbindung an einer Antriebswelle (7)
aufgenommen. Im dargestellten Ausführungsbeispiel ist für diese drehfeste gelenkige
Verbindung ein Kugelimbusgelenk vorgesehen. Die Antriebswelle (7) ist dazu auf der dem
Polierteller zugewandten Seite endseitig mit einem Kugelimbuskopf (19) versehen, der in
eine im Polierteller (3) ausgebildete Ausnehmung (13) eingreift.The polishing
Zur Sicherung ist die Verbindung zwischen dem Kugelimbuskopf (19) und dem Polierteller (3) mittels eines Rastelementes (15) gesichert ist. Als Rastelement können beispielsweise ein Federelement bzw. Federstift am Polierteller, der in eine Ausnehmung am Kugelimbuskopf hinein ragt, vorgesehen sein.To secure the connection between the Kugelimbuskopf (19) and the Polishing plate (3) is secured by means of a locking element (15). Can as a locking element For example, a spring element or spring pin on the polishing plate, which is in a recess protrudes into the Kugelimbuskopf, be provided.
Es ist auch möglich, den Kugelimbuskopf (19) an dem Polierteller auszubilden; in diesem Fall ist dann in der Antriebswelle (7) eine Ausnehmung zur drehsicheren gelenkigen Aufnahme des Kugelimbuskopfes vorzusehen. Allerdings ist in diesem Fall der Abstand zwischen der Gelenkstelle - also dem Punkt, um den eine Kippung des Poliertellers relativ zur starren Antriebswelle erfolgen kann - und der zu polierenden Fläche (41) größer. It is also possible to form the spherical imbus head (19) on the polishing plate; in this The case is then in the drive shaft (7) a recess for rotationally articulated Inclusion of the ball imbus head to be provided. However, in this case the distance between the hinge point - the point around which the polishing plate tilts relatively to the rigid drive shaft - and the surface to be polished (41) larger.
Die Antriebswelle (7) ist über Lagerelement (23) translatorisch verschiebbar und drehfest in einem Hohlzylinder (49) gelagert. Der Hohlzylinder (49) wird rotatorisch angetrieben über einen nicht dargestellten Antrieb der Poliermaschine, wobei die Drehbewegung aufgrund der drehfesten Verbindung durch das Lagerelement (23) vollständig auf die Antriebswelle (7) für den Polierkopf übertragen wird.The drive shaft (7) can be displaced translationally and rotatably via the bearing element (23) stored in a hollow cylinder (49). The hollow cylinder (49) is driven in rotation via a drive, not shown, of the polishing machine, the rotary movement due to the non-rotatable connection through the bearing element (23) completely on the Drive shaft (7) for the polishing head is transmitted.
Auf der vom Polierkopf abgewandten Seite der Antriebswelle (7) ist in dem Hohlzylinder (49) ein Hydraulik- oder Pneumatiksystem, das zur Beaufschlagung des Polierkopfes mit dem erforderlichen Polierdruck dient, vorgesehen. Dieses weist einen Druckkammerzylinder (31) mit einem darin translatorisch verschiebar aufgenommenen Kolben (33) auf. Zur Entkoppelung des Kolbens (33) von der Drehbewegung der Antriebswelle (7) und des Hohlzylinders können Drehlager zwischen dem Druckkammerzylinder (31) und dem Hohlzylinder (49) sowie zwischen dem vom Kolben (33) angetriebenen Pleul (32) und der Antriebswelle (7) vorgesehen sein. Zur Druckbeaufschlagung des Kolbens (33) ist der im Druckkammerzylinder (31) gebildeten Druckkammer (29) eine Druckversorgung (35) mit einem Druckregelventil (37) und einem Druckreservoir (36) zugeordnet. Durch Druckbeaufschlagung der Druckkammer (29) wird eine entlang einer Mittenachse (2) des Polierkopfes (1) gerichteten Kraft auf den Kolben (33) eingeleitet. Aus dieser Kraft resultiert eine translatorische Bewegung des Poliertellers bzw. eine Erhöhung der wirkenden Polierkraft, sofern der Polierbelag (5)auf einer zu polierenden optischen Fläche (41) eines Werkstückes (39) aufliegt.On the side of the drive shaft (7) facing away from the polishing head is in the hollow cylinder (49) a hydraulic or pneumatic system which is used to act upon the polishing head serves the required polishing pressure. This shows one Pressure chamber cylinder (31) with a translationally displaceably received therein Piston (33). To decouple the piston (33) from the rotary movement of the Drive shaft (7) and the hollow cylinder can pivot between the Pressure chamber cylinder (31) and the hollow cylinder (49) and between the piston (33) driven connecting rod (32) and the drive shaft (7) can be provided. to Pressurization of the piston (33) is that formed in the pressure chamber cylinder (31) Pressure chamber (29) a pressure supply (35) with a pressure control valve (37) and Assigned pressure reservoir (36). By pressurizing the pressure chamber (29) a force directed onto the piston along a central axis (2) of the polishing head (1) (33) initiated. This force results in a translatory movement of the polishing plate or an increase in the effective polishing force if the polishing surface (5) is too close polishing optical surface (41) of a workpiece (39) rests.
Die drehfeste translatorisch bewegbare Kopplung zwischen dem Hohlzylinder (49) und der Antriebswelle (7) erfolgt über ein Wälzlager (23). Die Antriebswelle (7) weist dazu ein nicht rotationssymmetrisches Außenprofil (43), vorzugsweise ein Mehrkantprofil auf. Der Formschluß zwischen dem Außenprofil (43) der Antriebswelle (7) und der Innenwand des Hohlzylinders wird über Rollen oder Walzen (25) erreicht, die in dem Lagerelement (23) symmetrisch zum Außenprofil der Antriebswelle (7) aufgenommen sind und an dem Außenprofil (43) der Antriebswelle abrollen. Die Drehachsen der Rollen oder Walzen sind dabei senkrecht zur Rotationachse der Antriebswelle (7) ausgerichtet. The rotationally fixed translationally movable coupling between the hollow cylinder (49) and the Drive shaft (7) takes place via a roller bearing (23). For this purpose, the drive shaft (7) has non-rotationally symmetrical outer profile (43), preferably a polygonal profile. The Form fit between the outer profile (43) of the drive shaft (7) and the inner wall of the Hollow cylinder is reached via rollers or rollers (25) in the bearing element (23) are added symmetrically to the outer profile of the drive shaft (7) and on the Roll off the outer profile (43) of the drive shaft. The axes of rotation of the rolls or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).
Anstelle der Wälzlagerung der Antriebswelle (7) in dem Hohlzylinder (49) kann auch eine Kugellagerung, wie in Figur 4 dargestellt, vorgesehen sein. Zur drehfesten translatorisch verschiebbaren Verbindung sind die Kugeln (53) in Längsnuten (51) des Hohlzylinders (49) und weiteren Längsnuten (55) der Antriebswelle (7) gelagert, wobei sich die Längsnuten parallel zur Rotationsachse der Antriebswelle (7) erstrecken. Auch in diesem Fall weist die Antriebsachse wenigstens in einem der Lagerung entsprechenden Bereich ein nicht-rotationssymmetrisches Außenprofil, insbesondere ein Mehrkantprofil auf.Instead of the roller bearing of the drive shaft (7) in the hollow cylinder (49), a Ball bearing, as shown in Figure 4, may be provided. For non-rotatable translational Slidable connection are the balls (53) in the longitudinal grooves (51) of the hollow cylinder (49) and further longitudinal grooves (55) of the drive shaft (7), the Extend the longitudinal grooves parallel to the axis of rotation of the drive shaft (7). Also in this In this case, the drive axle has at least one area corresponding to the bearing Non-rotationally symmetrical outer profile, in particular a polygonal profile.
Im folgenden wird das Polierverfahren näher beschrieben. Zum Polieren wird der Polierkopf, dessen Durchmesser kleiner ist als der Durchmesser der zu polierenden Fläche, in einer Schwenkbewegung in radialer Richtung über die zu polierende optische Fläche (41) bewegt. Sowohl das Werkstück (39) als auch der Polierteller werden dabei mit nahezu gleicher Drehzahl in identischer Richtung angetrieben. Bei Bewegung des Poliertellers über die zu polierende optische Fläche (41) kann vorgesehen sein, daß die Drehzahlen des Poliertellers oder die Drehzahl des Werkstückes, insbesondere in Abhängigkeit von der radialen Position des Poliertellers, zu verändern. Diese Drehzahländerung hat einen positiven Einfluß auf einen konstanten Polierabtrag.The polishing process is described in more detail below. For polishing the Polishing head, the diameter of which is smaller than the diameter of the surface to be polished, in a pivoting movement in the radial direction over the optical surface to be polished (41) moves. Both the workpiece (39) and the polishing plate are almost driven at the same speed in the same direction. When moving the polishing plate About the optical surface to be polished (41) can be provided that the speeds of the Polishing plate or the speed of the workpiece, especially depending on the radial position of the polishing plate. This speed change has one positive influence on constant polishing removal.
Durch die Wahl eines sehr großen Speichervolumens (36) im Verhältnis zum sich verändernden Volumen des Kolbens (31), werden die Druckschwankungen sehr klein gehalten, so daß der Polierteller mit konstanter Kraft auf der zu polierenden optischen Fläche aufliegt. Das Druckregelventil trägt auch noch zum Ausgleich von Druckschwankungen bei.By choosing a very large storage volume (36) in relation to itself changing volume of the piston (31), the pressure fluctuations are very small held so that the polishing plate with constant force on the optical to be polished Surface rests. The pressure control valve also helps to compensate Pressure fluctuations at.
Durch die beschriebene Anordnung in Verbindung mit einer Poliermaschine nach dem Stand der Technik sind insbesondere nicht rotationssymmetrische optische Oberflächen (41) polierbar, wobei der Polierabtrag über die gesamte optische Fläche konstant ist. Für den gleichmäßigen Polierabtrag ist es erforderlich, daß der Polierbelag des Poliertellers (3) möglichst großflächig auf der zu polierenden optischen Fläche (41) aufliegt. Dies wird insbesondere dadurch gewährleistet, daß durch die drehfeste gelenkige Verbindung zwischen dem Polierteller und der Antriebswelle (7) der Polierteller um einen auf der Mittenachse (2) des Polierkopfes liegenden Punkt in beliebige Richtungen gekippt werden kann und die Ausrichtung des Poliertellers dadurch der Oberflächenkontur der zu polierenden Fläche (41) folgen kann. The arrangement described in connection with a polishing machine according to the State of the art is in particular non-rotationally symmetrical optical surfaces (41) polishable, the polishing removal being constant over the entire optical surface. For uniform polishing removal, it is necessary that the polishing surface of the polishing plate (3) rests as far as possible on the optical surface (41) to be polished. this will ensured in particular by the fact that the non-rotatable articulated connection between the polishing plate and the drive shaft (7) of the polishing plate by one on the Center axis (2) of the polishing head can be tilted in any direction can and the orientation of the polishing plate thereby the surface contour of the Polishing surface (41) can follow.
- 11
- Polierkopfpolishing head
- 22
- Mittenachsemid-axis
- 33
- Poliertellerpolishing plate
- 55
- Polierbelag (~ Belag)Polishing surface (~ surface)
- 77
- Antriebswelledrive shaft
- 99
- gelenkige Verbindungarticulated connection
- 1313
- Ausnehmung im PoliertellerRecess in the polishing plate
- 1515
- Rastelementlocking element
- 1919
- Kugelimbuskopfball head
- 2020
- Ausnehmungrecess
- 2323
- Lagerelementebearing elements
- 2525
- Walzen oder RollenRolls or rolls
- 2929
- Druckkammerpressure chamber
- 3131
- DruckkammerzylinderPressure chamber cylinder
- 3232
- Pleuelpleuel
- 3333
- Kolbenpiston
- 3535
- Druckversorgungpressure supply
- 3636
- Reservoirreservoir
- 3737
- DruckregelventilPressure control valve
- 3939
- Werkstückworkpiece
- 4141
- Optische FlächeOptical surface
- 4343
- Außenprofilouter profile
- 4949
- Hohlzylinderhollow cylinder
- 5151
- Längsnutenlongitudinal grooves
- 5353
- Kugelnroll
- 5555
- Längsnut in AntriebswelleLongitudinal groove in the drive shaft
Claims (5)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10004455 | 2000-02-03 | ||
| DE10004455 | 2000-02-03 | ||
| EP01909601A EP1251997B2 (en) | 2000-02-03 | 2001-01-11 | Polishing head for a polishing machine |
Related Parent Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01909601A Division EP1251997B2 (en) | 2000-02-03 | 2001-01-11 | Polishing head for a polishing machine |
| EP01909601.5 Division | 2001-01-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1386694A1 true EP1386694A1 (en) | 2004-02-04 |
| EP1386694B1 EP1386694B1 (en) | 2009-05-20 |
| EP1386694B2 EP1386694B2 (en) | 2013-01-09 |
Family
ID=7629520
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP03025546A Expired - Lifetime EP1386694B2 (en) | 2000-02-03 | 2001-01-11 | Method of polishing and polishing machine |
| EP01909601A Expired - Lifetime EP1251997B2 (en) | 2000-02-03 | 2001-01-11 | Polishing head for a polishing machine |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01909601A Expired - Lifetime EP1251997B2 (en) | 2000-02-03 | 2001-01-11 | Polishing head for a polishing machine |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US20030045211A1 (en) |
| EP (2) | EP1386694B2 (en) |
| JP (1) | JP4945771B2 (en) |
| AU (1) | AU2001237285A1 (en) |
| DE (3) | DE50114907D1 (en) |
| TW (1) | TW558477B (en) |
| WO (1) | WO2001056740A1 (en) |
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| DE19701312A1 (en) | 1997-01-16 | 1998-07-23 | Zeiss Carl Fa | Spectacle lens with spherical front and multifocal back, and method for its production |
| EP1009581A4 (en) * | 1997-02-20 | 2004-07-28 | Technology Resource Int Corp | Method and apparatus for assembling lens-forming device |
| DE19756960B4 (en) | 1997-12-20 | 2011-06-09 | Asphericon Gmbh | Method for processing rotationally symmetrical functional surfaces |
| DE29803158U1 (en) † | 1998-02-23 | 1998-08-06 | Schneider Gmbh & Co Kg | Multi-spindle polishing machine with various polishing tools |
| US6165057A (en) * | 1998-05-15 | 2000-12-26 | Gill, Jr.; Gerald L. | Apparatus for localized planarization of semiconductor wafer surface |
| CN100372648C (en) * | 1998-12-01 | 2008-03-05 | 伦敦大学学院 | A polishing machine and method |
| EP1386694B2 (en) * | 2000-02-03 | 2013-01-09 | Carl Zeiss Vision GmbH | Method of polishing and polishing machine |
| DE10164628A1 (en) | 2001-02-09 | 2002-09-05 | Optotech Optikmasch Gmbh | A method for polishing aspherically ground lens surfaces has a flexible working face matched to the lens surface and rigidised by a magnetic medium. |
| JP2002346895A (en) | 2001-05-29 | 2002-12-04 | Olympus Optical Co Ltd | Arm shaft mechanism of lens polishing machine |
| JP4019058B2 (en) | 2001-07-17 | 2007-12-05 | 株式会社日立国際電気 | Cooling device for electronic device and electronic device with cooling device |
| JP4244372B2 (en) | 2002-01-11 | 2009-03-25 | 日本精機株式会社 | Semiconductor sensor device |
| JP3990205B2 (en) | 2002-06-21 | 2007-10-10 | オリンパス株式会社 | Polishing equipment |
| JP4201054B2 (en) | 2007-02-16 | 2008-12-24 | 凸版印刷株式会社 | Color filter, manufacturing method thereof, and liquid crystal display device |
-
2001
- 2001-01-11 EP EP03025546A patent/EP1386694B2/en not_active Expired - Lifetime
- 2001-01-11 AU AU2001237285A patent/AU2001237285A1/en not_active Abandoned
- 2001-01-11 EP EP01909601A patent/EP1251997B2/en not_active Expired - Lifetime
- 2001-01-11 DE DE50114907T patent/DE50114907D1/en not_active Expired - Lifetime
- 2001-01-11 DE DE10100860A patent/DE10100860A1/en not_active Ceased
- 2001-01-11 WO PCT/EP2001/000253 patent/WO2001056740A1/en active IP Right Grant
- 2001-01-11 DE DE50101982T patent/DE50101982D1/en not_active Expired - Lifetime
- 2001-01-11 JP JP2001556620A patent/JP4945771B2/en not_active Expired - Fee Related
- 2001-01-30 TW TW090101335A patent/TW558477B/en not_active IP Right Cessation
-
2002
- 2002-08-02 US US10/211,750 patent/US20030045211A1/en not_active Abandoned
-
2004
- 2004-09-24 US US10/949,505 patent/US7588480B2/en not_active Expired - Lifetime
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2007
- 2007-08-13 US US11/837,918 patent/US8011996B2/en not_active Expired - Fee Related
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1779967A2 (en) * | 2005-11-01 | 2007-05-02 | Satisloh GmbH | Slide design for a rapidly reciprocating tool carrier, especially for an optical workpiece lathe |
| DE102005052314A1 (en) * | 2005-11-01 | 2007-05-03 | Satisloh Gmbh | Fast tool arrangement, in particular for lathes for processing optical workpieces |
| JP2007125690A (en) * | 2005-11-01 | 2007-05-24 | Satisloh Gmbh | High-speed tool device |
| EP1779967A3 (en) * | 2005-11-01 | 2007-10-31 | Satisloh GmbH | Slide design for a rapidly reciprocating tool carrier, especially for an optical workpiece lathe |
| US8056453B2 (en) | 2005-11-01 | 2011-11-15 | Satisloh Gmbh | Fast tool servo |
| DE102017102094A1 (en) | 2017-02-02 | 2018-08-02 | Steffen Nitschke | Tool module for fine machining |
| DE102017102094B4 (en) | 2017-02-02 | 2019-07-11 | Steffen Nitschke | Tool module for fine machining |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001056740A1 (en) | 2001-08-09 |
| US20080020691A1 (en) | 2008-01-24 |
| EP1251997B1 (en) | 2004-04-14 |
| EP1386694B1 (en) | 2009-05-20 |
| US20030045211A1 (en) | 2003-03-06 |
| DE50114907D1 (en) | 2009-07-02 |
| AU2001237285A1 (en) | 2001-08-14 |
| US8011996B2 (en) | 2011-09-06 |
| JP4945771B2 (en) | 2012-06-06 |
| EP1386694B2 (en) | 2013-01-09 |
| EP1251997A1 (en) | 2002-10-30 |
| DE50101982D1 (en) | 2004-05-19 |
| US7588480B2 (en) | 2009-09-15 |
| JP2003525756A (en) | 2003-09-02 |
| US20050037695A1 (en) | 2005-02-17 |
| EP1251997B2 (en) | 2011-06-08 |
| TW558477B (en) | 2003-10-21 |
| DE10100860A1 (en) | 2001-08-23 |
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