CN109202709A - A kind of adaptive grinding head for polishing of pressure control constant pressure - Google Patents
A kind of adaptive grinding head for polishing of pressure control constant pressure Download PDFInfo
- Publication number
- CN109202709A CN109202709A CN201811388017.3A CN201811388017A CN109202709A CN 109202709 A CN109202709 A CN 109202709A CN 201811388017 A CN201811388017 A CN 201811388017A CN 109202709 A CN109202709 A CN 109202709A
- Authority
- CN
- China
- Prior art keywords
- polishing
- tool spindle
- grinding head
- linear bearing
- main shaft
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
- B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
Abstract
The present invention relates to a kind of adaptive grinding head for polishing of pressure control constant pressure, including main shaft sleeve, connecting flange, fastening screw, holding screw, piston, sealing ring, linear bearing, roller, tool spindle, stop flange, mill substrate, flexible layer, polishing layer；The piston, tool spindle are coaxially fitted close, and are realized and are guaranteed being slidably connected for air-tightness；Air pressure enters cylinder by main shaft sleeve and forms air spring promotion tool spindle, and air spring coefficient of elasticity, which can pass through, adjusts air pressure change in cylinder；The tool spindle limited swivel, axially free sliding realize that polish pressure is constant to compensate bistrique axial runout；Flexible layer, polishing layer are arranged in sequence with, it can be achieved that pressure is evenly distributed on bistrique and workpiece contact (area) pattern below the mill substrate.Have the characteristics that structure is simple, pressure is constant and it is controllable, fitted closely with face to be processed, be suitable for the polishing of the high-precision surfaces such as aspherical, free form surface.
Description
Technical field
The present invention relates to a kind of adaptive grinding head for polishing of pressure control constant pressure, belong to advanced Optical manufacture technology neck
Domain.
Background technique
Aberration is such as corrected in the aspherical optimization for optical system, improves image quality, expands visual field and simplied system structure
There is remarkable effect in terms of reduction system dimension, weight, thus is used widely in all kinds of high performance optical systems.Especially
It is in light projection photoetching objective lens system, High-precision aspheric optical element is indispensable.However, accurate aspheric surface polishing technology is
The difficult point of manufacture.There is unique optical axis due to aspherical, while there are notable difference, polishing mills for aspherical upper each point radius of curvature
Head is difficult to realize perfect matching with non-spherical surface.Meanwhile conventional grinding head for polishing is during the polishing process due to machine tool accuracy, workpiece
The factors such as clamping accuracy and workpiece surface shape can cause axial runout, cause contact pressure unstable.Therefore conventional polishing
Bistrique can not solve aspheric surface polishing residual intermediate frequency error problem, it is difficult to obtain intermediate frequency error and meet the aspherical of system requirements.
The Chinese patent of Publication No. CN103072077A discloses the skill that a key name is the adaptive grinding head for polishing of double-flexibility
Art scheme, grinding head for polishing described in the program are used as polished film and the aspherical deformation layer being bonded using flexible layer, realize that one kind is non-
The flexible adaptive grinding head for polishing of spherical surface.Its coefficient of elasticity is unadjustable after the limitation of the program is flexible layer selection, and processes
Middle deformation scale is uneven, easily leads to pressure and is unevenly distributed, it is difficult to improve intermediate frequency error convergence efficiency.
It is that intraconnected multi cylinder adaptively polishes mill that the Chinese patent of Publication No. CN105150051A, which discloses a key name,
The technical solution of head, grinding head for polishing described in the program realize one kind in such a way that multi cylinder is in conjunction with grinding head for polishing subelement
The adaptive grinding head for polishing of intraconnected multi cylinder.The limitation of the program be to be difficult in small-bore space realize be evenly distributed it is more
A grinding head for polishing subelement, in the edge of work, pressure is unevenly distributed between grinding head for polishing subelement and subelement, individual subelements
It is easily interfered if being again introduced into after being all moved to optic periphery with machining locus.
The Chinese patent of Publication No. CN104625952B discloses the skill for the bistrique that a key name is the distribution of controllable pressing pressure
Art scheme, grinding head for polishing described in the program are realized a kind of controllable using slider cylinder, round head pin, through slot, multiple groups cylinder, hinge
The bistrique of pressing pressure distribution.The limitation of the program is that round head pin and through slot coefficient of friction are big, and structure is complex, hinge pair
It can not reflect in real time in the transmitting of power, in small-bore range and wheelhead pressure when required application pressure is smaller or situation of change is little
Control it is vulnerable, grinding head center remove the edge of work after easily turn on one's side.
Summary of the invention
The present invention proposes a kind of adaptive grinding head for polishing of pressure control constant pressure, it is therefore intended that solution is deposited in the prior art
Pressure caused by polish pressure is unstable, bistrique surface and workpiece surface mismatch the technical problems such as be unevenly distributed, subtract
The medium-high frequency error introduced in small polishing process.
To achieve the above object, the adaptive grinding head for polishing of pressure control constant pressure of the invention includes main shaft sleeve, connects
Acting flange, linear bearing, sealing ring, piston, tool spindle, stop flange, mill substrate, flexible layer, polishing layer；Institute's spindle shaft
Set, connecting flange, linear bearing, stop flange are coaxial and are fixedly connected to form through-hole, the tool spindle, piston, mill base
Bottom is coaxial and close connection, the tool spindle and the linear bearing, stop flange cooperate, realization be pivoted it is limited, on
Under it is free to slide, the sealing ring, which is mounted in the middle part of piston, is located at the main shaft sleeve, connecting flange, linear bearing, limit method
Cylinder is formed in the through-hole that orchid is fixedly connected to form and is realized is pivoted limited, opposite sliding up and down.The mill substrate with
Tool spindle connection realizes that radial motion state is consistent with main shaft sleeve, axially opposing sliding；Below the mill substrate successively
It is arranged with flexible layer, polishing layer, the flexible layer can produce plastic deformation, and being deformed jointly with top cylinder pressure makes to throw
Photosphere and aspheric-surface workpiece realize tight fit.
The connecting flange, stop flange are evenly equipped with through-hole；The main shaft sleeve, linear bearing surface and connecting flange,
Through-hole opposite position is provided with threaded hole on stop flange, and the fastening screw, holding screw pass through through-hole and the screw thread
Hole forms screw pair.
The with good grounds matched annular groove of sealing ring, the sealing ring are mounted on the annular in the middle part of the outside piston
In slot.
There is hole above the tool spindle, has matching axis below the piston, cooperatively form interference fit.
The tool spindle is axially provided with and corresponding 1 pair of roller or more on the linear bearing uniformly distributed groove, institute
State tool spindle and linear bearing and form sliding pair, realization be pivoted it is limited, freely up and down slide.
There is external screw thread above the mill substrate, there is internal thread hole, the external screw thread and interior spiral shell below the tool spindle
Line forms screw thread pair, realizes the mill substrate with tool spindle and closely connect.
The mill base material is aluminium, copper, aluminium alloy or stainless steel.
The flexibility layer material is rubber, sponge or polyurethane.
The polishing layer material is pitch, polyurethane, damping cloth, polytetrafluoroethylene (PTFE).
The beneficial effects of the present invention are: the adaptive grinding head for polishing of pressure control constant pressure of the invention is aspherical in realization
When polishing, rubbing head is pressed in workpiece surface, keeps constant air pressure by cylinder storing compressed air and forms air spring, according to need
It adjusts air pressure in cylinder and changes air spring coefficient of elasticity, obtain the adjustable air spring constructions of coefficient of elasticity.According to not
With workpiece closest to ball radius of curvature, make the bistrique substrate to match, by the plastic deformation of flexible layer, make polishing layer with it is non-
Spherical face profile realizes matching fitting.In use, the grinding head for polishing any Working position of workpiece always on air bag polishing lathe
Normal keeps constant angle, and compressed air application pressure is constant, and bistrique, which is free to move axially, can compensate automatically due to lathe essence
Axial runout caused by degree, alignment error and workpiece surface appearance keeps polishing speckle regions pressure constant, and removal function is stablized.
Single cylinder and bistrique are easy to accomplish in small-bore space, only need bistrique not exclusively to remove the edge of work and then turn on one's side without bistrique, is dry
The danger related to improves the controlling extent of edge effect.
Detailed description of the invention
Fig. 1 is a kind of structure chart of adaptive grinding head for polishing of pressure control constant pressure of the invention；
Fig. 2 is 13 orthogonal matrix shape distribution schematic diagram of polishing layer；
Fig. 3 is 13 petal-shaped distribution schematic diagram of polishing layer；
Fig. 4 is 13 concentric circles distribution schematic diagram of polishing layer；
Wherein, 1 is main shaft sleeve, and 2 be connecting flange, and 3 be fastening screw, and 4 be holding screw, and 5 be piston, and 6 be sealing
Circle, 7 be linear bearing, and 8 be roller, and 9 be tool spindle, and 10 be stop flange, and 11 be mill substrate, and 12 be flexible layer, and 13 are
Polishing layer.
Specific embodiment
The guarantor that embodiments of the present invention are described further with reference to the accompanying drawing, but are not intended to restrict the invention
Protect range.
Referring to attached drawing 1, a kind of adaptive grinding head for polishing of pressure control constant pressure of the invention, including main shaft sleeve 1, company
Acting flange 2, fastening screw 3, holding screw 4, piston 5, sealing ring 6, linear bearing 7, roller 8, tool spindle 9, stop flange
10, mill substrate 11, flexible layer 12, polishing layer 13.
The main shaft sleeve 1, connecting flange 2, linear bearing 7, stop flange 10 are coaxial and pass through fastening screw 3, tightening
Screw 4 is fixedly connected with concentric fits and forms through-hole, and the tool spindle 9, piston 5 are coaxial by hole axle interference fit, closely connect
It connects, by the way that in the slot axially matched with work with roller 8, the tool spindle 9 is slided by being formed with the linear bearing 7
Pair, by the realization of stop flange 10 be pivoted it is limited, freely up and down slide.The sealing ring 6 is whole after being mounted in the middle part of piston 5
Body is put into main shaft sleeve 1, connecting flange 2, linear bearing 7, stop flange 10 from chamfering above main shaft sleeve 1 and is fixedly connected with shape
At through-hole in form enclosed cylinder and realize and be pivoted limited, opposite sliding up and down.
The mill substrate is connected through a screw thread with tool spindle, realizes that radial motion state is consistent with main shaft sleeve, axis
It is slided up and down to one-dimensional, stroke L=L1-L2-H1.Wherein, L1 is 1 length of main shaft sleeve, and L2 1 chamferings of main shaft sleeve are axial
Length, H1 are piston thickness；
Flexible layer 12, polishing layer 13 are arranged in sequence with below the mill substrate 11, the flexible layer 12 can produce soft
Property deformation, being deformed jointly with top cylinder pressure makes polishing layer 13 and aspheric-surface workpiece realize tight fit.
The polishing processing of the adaptive grinding head for polishing of pressure control constant pressure is that polishing optical element is placed in mill
Head lower section, main shaft sleeve 1 are connected with lathe interface by hydraulic caliper, and grinding head for polishing and polishing optical element need Working position bent
Rate radius normal is vertical, the compressed air of adjustable air pressure size by hydraulic caliper internal porosity enter main shaft sleeve 1 with close
The piston 5 of seal 6 forms closed cylinder, push coaxially connected piston 5, tool spindle 9, mill substrate 11 along main shaft sleeve 1,
Sliding, forces flexible layer 12, polishing layer 13 in the through-hole that connecting flange 2, linear bearing 7, stop flange 10 are fixedly connected to form
Connect with polishing surface elastic, complete elastic telescopic, realizes that polishing layer 13 and aspheric-surface workpiece tight fit and pressure control,
Automatic compensation is due to lathe, adjustment and workpiece itself bring error.Grinding head for polishing always protect by any Working position normal of workpiece
Constant angle is held, compressed air application pressure is constant, keeps any machining area pressure of aspheric-surface workpiece constant, and removal function is steady
It is fixed.At processing polished machined surface edge, grinding head for polishing only need to be walked out not exclusively, i.e., without rollover risk, greatly improve edge effect
The influence answered.
As the improvement of technical solution, referring to Fig. 1,11 lower surface of mill substrate is cambered surface, and the song of the cambered surface
Rate radius is related to required machining optical element best-fit sphere radius of curvature, the bistrique substrate cambered surface radius R=R1-H2.
Wherein R1 is the machining optical element best-fit sphere radius of curvature, and H2 is to be intended that with flexible layer 12,13 overall thickness of polishing layer.
Wherein, best-fit sphere radius of curvature are as follows: based on aspherical equation to be processed, determined using linear search method
The maximum the smallest spherical surface of aspherical degree is known as best-fit sphere R, so that between the spherical surface and aspherical spatially each corresponding points
The variance of deviation is minimum.
In view of the requirement of processing rigidity, intensity, wear-resisting, quality etc., main shaft sleeve 1 is manufactured using 9Cr18 material；
Piston is manufactured using 6082 material of aluminium alloy；Linear bearing 7, roller 8, tool spindle 9 are manufactured using bearing steel material；Connection method
Orchid 2, stop flange 10 are manufactured using cemented carbide material；The bistrique is manufactured using copper or aluminium；Sealing ring 6 uses Carbon fibe material
Material manufacture, piston 5 and main shaft sleeve are gap-matched H6/f5.
The flexible layer 12 is fixed with the 11 lower end surface adhesion of mill substrate, and polishing layer 13 is fixed with 12 adhesion of flexible layer.
13 material of polishing layer is the high molecular materials such as pitch, polyurethane, damping cloth, polytetrafluoroethylene (PTFE).Using poly-
Urethane material can get higher removal efficiency, as the first procedure of pre-polish(ing).It can get using damping cloth, polytetrafluoroethylene (PTFE)
Preferable surface quality and polishing efficiency, can be used as the second operation work of polishing.It can get fabulous surface using asphalt material
Medium-high frequency error in quality and removal face shape error, the third procedure as pre-polish(ing).Polishing layer 13 is polyurethane, damping
It can be used grinding wheel to carry out reconditioning whens cloth, polytetrafluoroethylene (PTFE) etc., when polishing layer 13 is pitch, heat gun or other modes can be used to add
Temperature softening is pressed and molded in work surface, or carries out turning by required radius of curvature using diamond cutter.
As the improvement of technical solution, referring to fig. 2, the orthogonal thereto rectangular, petal-shaped of polishing layer 13 described in Fig. 3, Fig. 4 or
Concentric circles.
Claims (10)
1. a kind of adaptive grinding head for polishing of pressure control constant pressure, it is characterised in that: including main shaft sleeve (1), connecting flange
(2), fastening screw (3), holding screw (4), piston (5), sealing ring (6), linear bearing (7), roller (8), tool spindle
(9), stop flange (10), mill substrate (11), flexible layer (12), polishing layer (13)；Wherein,
The main shaft sleeve (1), connecting flange (2), piston (5), tool spindle (9), stop flange (10), mill substrate (11)
Coaxially, the sealing ring (6) is located on the piston (5), is placed in the main shaft sleeve (1) and forms cylinder；The tool master
Axis (9) and the linear bearing (7), stop flange (10) cooperate, realization be pivoted it is limited, freely up and down slide；The master
Axis axle sleeve (1), connecting flange (2), linear bearing (7), stop flange (10) are coaxial and are fixedly connected to form through-hole, the piston
(5), tool spindle (9) is fixedly connected to be placed in the through-hole and realizes and be pivoted limited, opposite sliding up and down；The mill base
Bottom (8) is connect with tool spindle (9), realizes radial, axially opposing sliding consistent with main shaft sleeve (1) motion state；
It is arranged in sequence with flexible layer (12), polishing layer (13) below the mill substrate (11), the flexible layer (12) can produce
Plastic deformation realizes polishing layer (13) and non-spherical element surface to fit closely, the grinding head for polishing processing object be glass,
The optical surfaces such as metal.
2. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: the master
Axis axle sleeve (1) is fixedly connected with connecting flange (2) specifically: passes through fastening between the main shaft sleeve (1) and connecting flange (2)
Screw (3) realizes close connection.
3. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: the company
Acting flange (2) is fixedly connected with linear bearing (7), stop flange (10) specifically: the connecting flange (2) and linear bearing
(7) holding screw (4) are crossed and realize close connection.
4. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: described straight
Spool holds (7) and is fixedly connected with stop flange (10) specifically: the linear bearing (7) and stop flange (10) pass through clamp screw
It follows closely (4) and realizes close connection.
5. according to a kind of described in any item adaptive grinding head for polishing of pressure control constant pressure of claim 2 to 4, feature exists
In: the connecting flange (2), stop flange (10) are evenly equipped with through-hole；The main shaft sleeve (1), linear bearing (7) surface and company
Through-hole opposite position is provided with threaded hole, the fastening screw (3), holding screw on acting flange (2), stop flange (10)
(4) it passes through through-hole and the threaded hole forms screw pair.
6. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: described close
Concrete mode of the seal (6) on piston (5) are as follows: the matched annular groove of the with good grounds sealing ring (6) on the piston (5),
The sealing ring (6) is mounted in the annular groove.
7. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: the work
Plug (5), tool spindle (9) are fixedly connected specifically: the piston (5) and tool spindle (9) are same by axis, hole cooperation realization
Axis is tightly fastened connection.
8. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 7, it is characterised in that: the work
There is hole above tool main shaft (9), has matching axis below the piston (5), cooperatively form interference fit with hole.
9. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 1, it is characterised in that: the work
Have the concrete mode of main shaft (9) and the linear bearing (7) cooperation are as follows: the tool spindle (9) be axially provided with groove with it is described
On linear bearing (7) roller (8) match realization be pivoted it is limited, freely up and down slide.
10. a kind of adaptive grinding head for polishing of pressure control constant pressure according to claim 9, it is characterised in that: described
Tool spindle (9) is axially provided with groove specifically: the tool spindle (9) is axially provided with and roller on the linear bearing (7)
(8) corresponding 1 pair or more uniformly distributed groove, the tool spindle (9) and linear bearing (7) form sliding pair；
The mode that the mill substrate (11) connects in tool spindle (7) are as follows: the mill substrate (11) and tool spindle (7) are logical
It crosses screw thread and realizes close connection；
Have external screw thread above the mill substrate (8), there is internal thread hole below the tool spindle (7), the external screw thread with it is interior
Screw thread forms screw thread pair；
Mill substrate (11) material is aluminium, copper, aluminium alloy or stainless steel；
Flexible layer (12) material is rubber, sponge or polyurethane；
Polishing layer (13) material is pitch, polyurethane, damping cloth, polytetrafluoroethylene (PTFE).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811388017.3A CN109202709A (en) | 2018-11-21 | 2018-11-21 | A kind of adaptive grinding head for polishing of pressure control constant pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811388017.3A CN109202709A (en) | 2018-11-21 | 2018-11-21 | A kind of adaptive grinding head for polishing of pressure control constant pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109202709A true CN109202709A (en) | 2019-01-15 |
Family
ID=64993337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811388017.3A Pending CN109202709A (en) | 2018-11-21 | 2018-11-21 | A kind of adaptive grinding head for polishing of pressure control constant pressure |
Country Status (1)
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| CN (1) | CN109202709A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110027039A (en) * | 2019-05-20 | 2019-07-19 | 南京易跬申自动化设备有限公司 | Floating type constant pressure plastic piece hole chamfer forming device and forming method |
| CN110860971A (en) * | 2019-11-29 | 2020-03-06 | 福建省佳美集团公司 | Automatic blank grinding machine for ceramics |
| CN111002155A (en) * | 2019-11-27 | 2020-04-14 | 中国科学院上海光学精密机械研究所 | Polishing force control flexible polishing tool |
| CN111692994A (en) * | 2020-06-02 | 2020-09-22 | 中国科学院西安光学精密机械研究所 | Angle measuring device assembling structure and method |
| CN111958484A (en) * | 2020-08-18 | 2020-11-20 | 中国科学院光电技术研究所 | Inner cylinder surface polishing tool |
| CN112059815A (en) * | 2020-08-20 | 2020-12-11 | 中国科学院上海光学精密机械研究所 | Fixed grinding head structure and edge error-free machining method thereof |
| CN112139989A (en) * | 2020-09-29 | 2020-12-29 | 杭州麦查居家具有限公司 | Intelligent balancing device for polishing machine |
| CN112571203A (en) * | 2020-12-07 | 2021-03-30 | 中国科学院长春光学精密机械与物理研究所 | Deformable grinding and polishing disc |
| CN113043116A (en) * | 2021-04-13 | 2021-06-29 | 罗俊涛 | Optical lens polishing device and polishing process |
| CN113664620A (en) * | 2021-08-06 | 2021-11-19 | 广州奇芯机器人技术有限公司 | Constant-pressure polishing method and device for periphery of glass |
| CN113857956A (en) * | 2021-09-26 | 2021-12-31 | 宇环数控机床股份有限公司 | Grinding head structure of double-end-face grinding machine |
| US20230029755A1 (en) * | 2021-07-28 | 2023-02-02 | Zhejiang University | Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110027039A (en) * | 2019-05-20 | 2019-07-19 | 南京易跬申自动化设备有限公司 | Floating type constant pressure plastic piece hole chamfer forming device and forming method |
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| CN111692994A (en) * | 2020-06-02 | 2020-09-22 | 中国科学院西安光学精密机械研究所 | Angle measuring device assembling structure and method |
| CN111958484A (en) * | 2020-08-18 | 2020-11-20 | 中国科学院光电技术研究所 | Inner cylinder surface polishing tool |
| CN112059815A (en) * | 2020-08-20 | 2020-12-11 | 中国科学院上海光学精密机械研究所 | Fixed grinding head structure and edge error-free machining method thereof |
| CN112059815B (en) * | 2020-08-20 | 2022-05-31 | 中国科学院上海光学精密机械研究所 | Fixed grinding head structure and edge error-free machining method thereof |
| CN112139989A (en) * | 2020-09-29 | 2020-12-29 | 杭州麦查居家具有限公司 | Intelligent balancing device for polishing machine |
| CN112571203A (en) * | 2020-12-07 | 2021-03-30 | 中国科学院长春光学精密机械与物理研究所 | Deformable grinding and polishing disc |
| CN113043116A (en) * | 2021-04-13 | 2021-06-29 | 罗俊涛 | Optical lens polishing device and polishing process |
| CN113043116B (en) * | 2021-04-13 | 2022-03-22 | 东莞市富饶光电有限公司 | Optical lens polishing device and polishing process |
| US20230029755A1 (en) * | 2021-07-28 | 2023-02-02 | Zhejiang University | Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method |
| US11839944B2 (en) * | 2021-07-28 | 2023-12-12 | Zhejiang University | Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method |
| CN113664620A (en) * | 2021-08-06 | 2021-11-19 | 广州奇芯机器人技术有限公司 | Constant-pressure polishing method and device for periphery of glass |
| CN113857956A (en) * | 2021-09-26 | 2021-12-31 | 宇环数控机床股份有限公司 | Grinding head structure of double-end-face grinding machine |
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Application publication date: 20190115 |
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