CN112059815A - Fixed grinding head structure and edge error-free machining method thereof - Google Patents
Fixed grinding head structure and edge error-free machining method thereof Download PDFInfo
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- CN112059815A CN112059815A CN202010843847.1A CN202010843847A CN112059815A CN 112059815 A CN112059815 A CN 112059815A CN 202010843847 A CN202010843847 A CN 202010843847A CN 112059815 A CN112059815 A CN 112059815A
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- grinding head
- removal function
- edge
- workpiece
- fixed grinding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention belongs to the field of optical polishing, and particularly relates to a fixed grinding head structure and a processing method without edge errors. The grinding head adopts a fixed grinding head combined with a plurality of layers of elastic pads to realize the capability of completely extending out the edge of the tool and ensure the attachment of the tool to a complex surface; the tool adopts a rotation only mode and combines constant pressure to carry out quantitative modification. Processing a removal function obtained through collection and combining with a Preston equation to generate an actual removal function of each point on a path; and then solving the residence time based on the actual removal function, and finally generating a control program to polish the workpiece. According to the invention, the fixed grinding head can extend out of the edge to solve the problem of equation overdetermination, and meanwhile, the machining residence time is accurately solved based on the actual removal function, so that the chronic problem of the edge effect of the small grinding head is thoroughly solved.
Description
Technical Field
The invention belongs to the field of optical polishing, and particularly relates to a fixed grinding head structure and a processing technology without edge errors.
Background
In the field of optical processing, edge processing errors become bottlenecks that limit the performance of components due to increasingly stringent requirements for the aperture and utilization rate of optical components. The existing processing modes capable of controlling the edge error only comprise high-cost processing tools such as ion beams, magnetorheological and the like, no solution is provided for the edge error of the currently most widely applied small grinding head Tool, the edge processing error can be relieved by an air bag Tool derived from the small grinding head Tool through a Tool-lift mode, but the requirements on the control precision and the Tool size precision of a machine Tool are high, the processing effect is insufficient, and the further development of equipment is limited. Therefore, the invention of a novel processing tool with low cost and capable of controlling edge errors is extremely important, which provides a more economic solution for the edge-free optical processing and has great significance for promoting the mass production of the edge-error-free elements.
Disclosure of Invention
The invention aims to overcome the defects of high cost, complex realization, harsh conditions and the like in the existing edge control process, and provides a fixed grinding head structure and an edge error-free processing method, wherein the grinding head structure has extremely low cost, has stable removal characteristics at the edge, and is matched with a removal function model to carry out compensation iterative solution on the removal residence time, so that edge-free processing can be basically realized, and the surface shape precision PV can be converged to be below 0.1 wavelength. The invention can realize low-cost and large-batch manufacturing without edge processing, and greatly promotes the progress of the prior art.
The technical solution of the invention is as follows:
a fixed grinding head structure is characterized in that a grinding head comprises a metal grinding head substrate, a rubber shaping layer, a foamed silica gel flexible layer and a polishing cushion layer which are sequentially connected; the metal grinding head base is designed in an integrated mode, the surface curvature of the rubber shaping layer bonded with the foaming silica gel layer is slightly smaller than the minimum value of the curvature radius of a workpiece to be processed, and the thickness of the foaming silica gel layer is larger than 5 mm.
The edge error-free machining method utilizing the fixed grinding head structure is characterized by comprising the following steps:
(1) and (3) surface shape error detection: performing surface shape error detection on a workpiece to be processed by using a surface shape precision instrument to obtain surface shape error distribution data of the workpiece to be processed;
(2) path planning: abstracting a machine tool simulated travel path into a point set sequence which is distributed in sequence at equal intervals on the path, and obtaining the coordinate position of each point in the point set sequence, wherein L (n) is (x)n,yn)；
(3) Collecting a removal function: removing function tests are carried out to extract a removing function, the grinding head adopts a rotation-only mode to obtain an actual removing function and record the actual removing function as R (x, y), and a k.P (x, y) term is obtained based on Preston equation and polynomial fitting, wherein k is a constant, and P (x, y) is pressure distribution, and the formula is as follows:
R(x,y)＝k·P(x,y)·V(x,y)
Order to
Fitting kP (x, y) term with quadratic function, equation of
min||k·P(x,y)-ar2-br-c||2
When k.P (x, y) is ar2+br+c
(4) Respectively calculating the actual contact area and the actual contact area of the fixed grinding head and the workpiece to be processed at the position according to the coordinate position of each point in the point set sequence and the shape of the workpiece to be processed; calculating the actual removal function at each point in the point set sequence based on fitting the k.P (x, y) function, wherein the formula is as follows:
order to
If in (x)n,yn) When in position, the contact area of the grinding head and the workpiece is Sn
Then find outSolution equation
At this time (x)n,yn) The actual removal function of the location is defined as Rn＝(ar2+br+c+d)·V(x,y)
(5) Removing the function database R according to the obtained pointsnCalculating the residence time T (n) of each point grinding head in the machining process; the formula is as follows:
wherein
Where z is the removal and η is the convergence factor
(6) Calculating a corresponding feed rate v (n) according to the residence time T (n), wherein the formula is as follows:
(7) and generating a numerical control code according to the processing feed rate distribution v (n), thereby controlling the machine tool to perform ultra-precise shape-modifying polishing on the element to be processed.
And generating an actual removal function according to the removal function acquired by the fixed grinding head, then forming the residence time and the feed rate required by the machining, generating a numerical control code, and controlling the machine tool to perform ultra-precise machining.
Compared with the prior art, the invention has the beneficial effects that:
the fixed grinding head can almost completely extend out of the edge during actual processing, so that the overdetermined problem in the edge residence time solving equation is solved; and only the edge 1-2 mm is excessively removed, and the removal amount of the rest areas is very stable, so that the edge removal rate can be accurately controlled, the requirement on the control precision of the machine tool is very low, and the method is suitable for the transformation of most small grinding head machine tools. This enables low-cost processing of edge-effect-free components, which is of great importance for mass-production in the future optical processing field.
Drawings
Fig. 1 is a structural view of a fixed grinding head, wherein a is a front view, b is a sectional view A-A in a, c is a top view, and d is a perspective view.
FIG. 2 is the measurement result of the initial machining profile of the experimental workpiece before machining in the example, wherein a is a profile result top view 2d diagram, and b is a profile result perspective 3d diagram
Fig. 3 is a surface convergence result obtained after five iterative processes using the method proposed by the present invention, wherein a is a surface result top view 2d diagram, and b is a surface result perspective 3d diagram.
Fig. 4 is a fringe pattern of the interferometer after the workpiece is machined.
Fig. 5 is a top view 2d of the surface shape result and b is a perspective 3d of the surface shape result of the workpiece used in the conventional process according to the embodiment.
Fig. 6 is a top view 2d of a surface shape result and a perspective 3d of the surface shape result obtained by using a conventional grinding head and a conventional machining method.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and examples, which are only for the purpose of illustrating the present invention and should not be construed as limiting the scope of the present invention.
Referring to fig. 1, fig. 1 is a structural diagram of a fixed grinding head, and as shown in the diagram, the fixed grinding head provided by the present invention is composed of a metal grinding head substrate 2, a rubber shaping layer 3, a foamed silica gel flexible layer 4 and a polishing pad layer 5 which are connected in sequence; the metal grinding head base is of an integrated structure with a fixing screw hole 1, and is fixed on a rotating shaft of a small grinding head machine tool through a fastening screw during machining; the rubber shaping layer 3 is used as a first layer and is adhered to the metal grinding head base 2, and the curvature of one side surface of the rubber shaping layer is changed by means of cutting, polishing and the like to enable the curvature to be slightly smaller than the minimum value of the curvature radius of a workpiece to be processed; the foaming silica gel layer 4 is adhered to the rubber shaping layer 3, the thickness of the foaming silica gel layer 4 is required to be larger than 5mm, and the appearance of the rubber shaping layer is re-engraved on the surface of the foaming silica gel layer 4 and is smoother; and finally, adhering the polishing layer 5 pad on the foaming silica gel layer 4, and mounting the fixed grinding head on a machine tool rotating shaft for ultraprecise polishing during processing.
Example (b):
the diameter of the fixed grinding head is 30mm, the processing adopts a rotation-only motion mode, the rotation speed is 150rpm, and the path is a spiral line with the step pitch of 1 mm; the workpiece to be processed is a fused quartz planar element with the diameter of 100 mm.
Polishing the workpiece by:
(1) and (3) surface shape error detection: performing surface shape error detection on the workpiece by using a laser interferometer to obtain surface shape error distribution data of the workpiece, wherein the result is shown in FIG. 2;
(2) path planning: and taking points at the position of every 1mm along the path as the coordinate positions of the path sampling points by adopting a spiral path with the step pitch of 1 mm.
(3) Performing a removal function test to extract a removal function, obtaining the removal function and recording the removal function as R (x, y), and then combining polynomial fitting based on a Preston equation to obtain a k.P (x, y) term, wherein the fitting result is as follows: a ═ 9.67 e-06; b is 1.21 e-04; c is 2.80 e-04. And calculating to obtain the actual removal function at each path sampling point based on the results.
(4) And based on the removal function database and the iterative equation of each point, obtaining the tool residence time T (n) of each path point in the machining process and calculating to obtain the corresponding machining feed rate.
(5) And generating a numerical control code to control the machine tool to perform ultra-precise shape-modifying polishing on the element to be processed according to the processing feed rate distribution v (n).
(6) And (5) returning to the step 1 to continue the second iterative processing if the requirements are not met after the processing.
From the processing result, after the margin of the surface shape error is removed by 1.5mm, the surface shape error converges from the initial 0.468 lambda to 0.096 lambda, and a very high processing precision is achieved, and the result is shown in fig. 3, and the concave shape of the initial surface shape shows that the workpiece edge error has a greater convergence difficulty, and the processing result can be compared with the processing precision of the magnetorheological tool. From the stripe results of fig. 4, the stripes of the whole surface are in straight stripe shape, and the edge bending is not basically existed.
If the traditional machining grinding head and the traditional process method are adopted for machining, after the edge of the fused quartz glass with the same diameter of 100mm is removed by 1.5mm, although the surface shape convergence of the middle part is good, the problem of edge warping cannot be solved, and PV is even increased from the initial 0.425 lambda to 0.625 lambda, which means that the edge error of the traditional small grinding head tool and the traditional process method cannot be controlled completely, and even the surface shape precision of the edge is damaged.
The whole result proves the strong convergence capability of the fixed grinding head to the full-caliber surface shape, and the invention proves that the invention can effectively solve the problem of edge error of the traditional small grinding head tool, greatly reduce the machine tool cost and improve the processing precision and efficiency.
The foregoing is merely a preferred embodiment of the present invention, which is described in some detail and with reference to specific details, but is not intended to limit the scope of the invention. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention, which is defined in the following claims and their equivalents.
Claims (3)
1. A fixed grinding head structure is characterized in that a grinding head comprises a metal grinding head substrate, a rubber shaping layer, a foamed silica gel flexible layer and a polishing cushion layer which are sequentially connected; the metal grinding head base is designed in an integrated mode, the surface curvature of the rubber shaping layer bonded with the foaming silica gel layer is slightly smaller than the minimum value of the curvature radius of a workpiece to be processed, and the thickness of the foaming silica gel layer is larger than 5 mm.
2. A method of edge error free machining using a fixed grinding head structure of claim 1, characterized by the steps of:
(1) and (3) surface shape error detection: performing surface shape error detection on a workpiece to be processed by using a surface shape precision instrument to obtain surface shape error distribution data of the workpiece to be processed;
(2) path planning: abstracting a machine tool simulated travel path into a point set sequence which is distributed in sequence at equal intervals on the path, and obtaining the coordinate position of each point in the point set sequence, wherein L (n) is (x)n,yn)；
(3) Collecting a removal function: performing a removal function test to extract a removal function, obtaining an actual removal function and recording the actual removal function as R (x, y) by using a grinding head in a rotation-only mode, and obtaining a k.P (x, y) term based on a Preston equation and polynomial fitting, wherein k is a constant, P (x, y) is pressure distribution, omega is a tool rotation angular velocity, and a quadratic polynomial is taken as an example, and the formula is as follows:
R(x,y)＝k·P(x,y)·V(x,y)
Order to
Fitting kP (x, y) term with quadratic function, equation of
min||k·P(x,y)-ar2-br-c||2
When k.P (x, y) is ar2+br+c
(4) Respectively calculating the actual contact area and the actual contact area S of the fixed grinding head and the workpiece to be processed under the position according to the coordinate position of each point in the point set sequence and the shape of the workpiece to be processedn(ii) a Calculating the actual removal function R at each point in the point set sequence based on fitting k.P (x, y) functionnThe formula is as follows:
order to
If in (x)n,yn) When in position, the grinding head and the workpieceContact area is Sn
Then solve the equation
At this time (x)n,yn) The actual removal function of the location is defined as Rn＝(ar2+br+c+d)·V(x,y)
(5) Removing the function database R according to the obtained pointsnCalculating the residence time T (n) of each point grinding head in the machining process; the formula is as follows:
wherein
Where z is the removal and η is the convergence factor
(6) Calculating a corresponding feed rate v (n) according to the residence time T (n), wherein the formula is as follows:
(7) and generating a numerical control code according to the processing feed rate distribution v (n), thereby controlling the machine tool to perform ultra-precise shape-modifying polishing on the element to be processed.
3. The fixed grinding head structure edge-error-free machining method according to claim 2, wherein an actual removal function is generated according to a removal function acquired by the fixed grinding head, residence time and feed rate required for machining are further formed, a numerical control code is generated, and a machine tool is controlled to perform ultra-precise machining.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115592555A (en) * | 2022-10-11 | 2023-01-13 | 南方科技大学（Cn） | Surface trimmer for silicon-based material and application of surface trimmer in trimming and polishing |
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