CN104175192A - Multi-ring self-adaptive polishing grinding head - Google Patents

Multi-ring self-adaptive polishing grinding head Download PDF

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Publication number
CN104175192A
CN104175192A CN201410390349.0A CN201410390349A CN104175192A CN 104175192 A CN104175192 A CN 104175192A CN 201410390349 A CN201410390349 A CN 201410390349A CN 104175192 A CN104175192 A CN 104175192A
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Prior art keywords
ring
polishing
grinding head
flexible
flexible ring
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Granted
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CN201410390349.0A
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Chinese (zh)
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CN104175192B (en
Inventor
张健
马占龙
代雷
彭利荣
隋永新
杨怀江
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201410390349.0A priority Critical patent/CN104175192B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B24B13/012Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本发明公开了一种多环形自适应抛光磨头,属于光学冷加工技术领域。解决了现有非球面抛光技术中磨头表面与工件表面不匹配、无法抑制中频误差的问题。本发明的多环形自适应抛光磨头包括法兰轴、多环刚性基底、柔性环和抛光环,其中,法兰轴的底端固定在多环刚性基底的顶端,多环刚性基底的底端设有具有相同圆心的多个圆环形凸台,柔性环可以柔性变形,柔性环由多个同心圆环组成,柔性环的顶端固定在多个圆环形凸台上,抛光环由多个同心圆环组成,抛光环的顶端固定在柔性环的底端上。本发明的磨头能够通过柔性环的柔性变形,自动补偿由机床、装调或工件本身带来的误差,实现非球面的高质量抛光。

The invention discloses a multi-ring self-adaptive polishing grinding head, which belongs to the technical field of optical cold processing. The invention solves the problem that the surface of the grinding head does not match the surface of the workpiece and the intermediate frequency error cannot be suppressed in the existing aspheric surface polishing technology. The multi-ring adaptive polishing grinding head of the present invention comprises a flange shaft, a multi-ring rigid base, a flexible ring and a polishing ring, wherein the bottom end of the flange shaft is fixed on the top of the multi-ring rigid base, and the bottom end of the multi-ring rigid base is There are multiple annular bosses with the same center, the flexible ring can be flexibly deformed, the flexible ring is composed of multiple concentric rings, the top of the flexible ring is fixed on multiple annular bosses, and the polishing ring is composed of multiple Composed of concentric rings, the top end of the polishing ring is fixed on the bottom end of the flexible ring. The grinding head of the present invention can automatically compensate the errors caused by the machine tool, the adjustment or the workpiece itself through the flexible deformation of the flexible ring, and realize high-quality polishing of the aspheric surface.

Description

Many annular self adaptation grinding head for polishing
Technical field
The present invention relates to a kind of how annular self adaptation grinding head for polishing, belong to optics cold processing technique field.
Background technology
Glossing in optics cold working, normally fits tightly pitch polishing grinding pan and surface of the work, does relative motion simultaneously, produces very large tangential force, the minute protrusions of glass surface is ground, thereby forms gradually smooth surface.But in this glossing, the radius of curvature that pitch polishing grinding pan cannot change with non-spherical surface adapts to, and therefore cannot carry out polishing to aspheric surface.
In contemporary optics shaping surface technology, conventionally use flexible polishing bistrique to carry out numerical control polishing to surface of the work.Flexible polishing bistrique generally includes flange shaft and is fixed on the polished die of flange shaft lower end.But this flexible polishing bistrique lacks rigidity and polishing path track is relatively fixing, therefore cannot effectively suppress intermediate frequency error, obtain high-precision aspherical optical element.
Summary of the invention
The object of the invention is to solve the surperficial problem of not mating, cannot suppress intermediate frequency error with surface of the work of bistrique in existing aspheric surface polishing technology, a kind of how annular self adaptation grinding head for polishing is provided.
The technical scheme that technical solution problem of the present invention is taked is as follows:
Many annular self adaptation grinding head for polishing, comprise flange shaft, also comprise, encircle stiff base, flexible ring and buffing ring more; The bottom of described flange shaft is fixed on the top of many ring stiff base; The bottom of described many ring stiff base is provided with has the identical center of circle and according to radius from small to large, a plurality of round ring boss that are arranged in order from inside to outside; Described flexible ring can plastic deformation, and flexible ring is by having the identical center of circle and according to radius from small to large, a plurality of annulus that are arranged in order from inside to outside form, and the top of flexible ring is fixed on the bottom of round ring boss; Described buffing ring is by having the identical center of circle and according to radius from small to large, and a plurality of annulus that are arranged in order from inside to outside form, and the top of buffing ring is fixed on the bottom of flexible ring, and the bottom surface of a plurality of annulus of described buffing ring has identical radius of curvature.
Further, the bottom surface of described a plurality of round ring boss has identical radius of curvature.
Further, the bottom surface of a plurality of annulus of described flexible ring has identical radius of curvature.
Further, described flange shaft is fixed in many ring stiff base by fastening bolt.
Further, the number of described fastening bolt is 3-6.
Further, the annulus of described flexible ring is corresponding one by one with round ring boss.
Further, the annulus of described flexible ring and the annulus of buffing ring are corresponding one by one.
Further, the material of described flexible ring is rubber or sponge.
Further, the material of described buffing ring is pitch or polyurethane.
Further, the material of described many ring stiff base is duralumin, hard alumin ium alloy or stainless steel.
Compared with prior art, the invention has the beneficial effects as follows:
Of the present invention how annular self adaptation grinding head for polishing, can be applied on all kinds of numerical-control polishing equipments, be particularly useful for aspheric surface polishing, by the plastic deformation of flexible ring, auto-compensation by lathe, debug or error that workpiece itself brings, by the quantity control of flexible ring and the distortion jointly producing with buffing ring, guarantee how mate in real time by annular with non-spherical surface for rubbing head, and on polissoir, realize whole aspheric surface polishing by the swing of rubbing head, effectively suppress non-spherical surface intermediate frequency error, improve non-spherical surface quality.
Accompanying drawing explanation
Fig. 1 is the profile of the how annular self adaptation grinding head for polishing of the present invention;
Fig. 2 is the upward view of the how annular self adaptation grinding head for polishing of the present invention;
In figure, 1, flange shaft 2, fastening bolt 3, encircle stiff base 4, flexible ring 5, buffing ring more.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figure 1-2, of the present invention how annular self adaptation grinding head for polishing, comprises flange shaft 1, fastening bolt 2, encircles stiff base 3 more, flexible ring 4 and buffing ring 5.Wherein, flange shaft 1 is not particularly limited, and is the common frame for movement being connected with main shaft of numerical control machine tool in this area, and the top of flange shaft 1 is connected with main shaft of numerical control machine tool, how annular self adaptation grinding head for polishing is fixed on Digit Control Machine Tool, and the concrete size of flange shaft 1 matches with machine tool chief axis.Many ring stiff base 3 are generally disc structure, top is provided with groove, the size of groove coordinates with the bottom of flange shaft 1, the bottom of flange shaft 1 is fixed on the top of many ring stiff base 3 by fastening bolt 2, flange shaft 1 and many ring stiff base 3 can be synchronized with the movement, and the number of fastening bolt 2 is generally 3-6; The bottoms of many ring stiff base 3 be provided with have phase concentric and according to radius from small to large, a plurality of round ring boss of being arranged in order from inside to outside, the width of the round ring boss of different radii can be the same or different, the spacing of every adjacent two round ring boss can be the same or different, and the bottom surface of preferred all round ring boss has identical radius of curvature; All round ring boss can with many rings stiff base 3 integrated moldings; The number of round ring boss is determined according to practical application; The material of many ring stiff base 3 is metal material, as duralumin, hard alumin ium alloy or stainless steel.Flexible ring 4 is by having phase concentric according to radius from small to large, a plurality of annulus that are arranged in order from inside to outside form, the bottom surface of all annulus of preferred flexible ring 4 has identical radius of curvature, the top of flexible ring 4 is fixed on the bottom of round ring boss, can be fixed on all round ring boss, also can be fixed on part round ring boss, specifically the annulus number according to round ring boss and flexible ring 4 determines, when round ring boss identical with flexible ring 4 numbers, flexible ring 4 is fixed on all round ring boss, when the annulus number of flexible ring 4 is less than the number of round ring boss, flexible ring 4 is fixed on part round ring boss, a plurality of annulus of preferred flexible ring 4 are corresponding one by one with a plurality of round ring boss, and size coupling, on a round ring boss, fix the annulus of a flexible ring 4 coordinating with its radius, all annulus of flexible ring 4 are separately fixed on the round ring boss corresponding with it, fixed form generally adopts bonding fixing, flexible ring 4 is flexible material, is generally macromolecular material, as rubber or sponge.Buffing ring 5 is by having phase concentric according to radius from small to large, a plurality of annulus that are arranged in order from inside to outside form, the bottom surface of all annulus of buffing ring 5 has identical radius of curvature, and for contacting with surface of the work, the top of buffing ring 5 is fixed on the bottom of flexible ring 4, preferably a plurality of annulus of buffing ring 5 and a plurality of annulus of flexible ring 4 are corresponding one by one, and size matches, on the annulus of a flexible ring 4, fix the annulus of a buffing ring 5 coordinating with its radius, all annulus of buffing ring 5 are separately fixed on the annulus of the flexible ring corresponding with it 4, fixed form generally adopts bonding fixing, common plastic deformation, the assurance buffing ring 5 and non-spherical surface form fit of producing of flexible ring 4 and buffing ring 5, the material of buffing ring 5 is macromolecular material, as pitch or polyurethane.
During use, first the top of the flange shaft of above-mentioned how annular self adaptation grinding head for polishing 1 is connected with main shaft of numerical control machine tool, then controls how annular self adaptation grinding head for polishing and drop to non-spherical element surface, then open polishing fluid feed system and start to carry out polishing.Flexible ring 4 can produce plastic deformation, for compensating due to lathe, debuging or error that workpiece itself brings, and guarantees that buffing ring 5, when bistrique moves to aspheric surface diverse location, mates with non-spherical surface in real time, thus assurance quality of finish.
Obviously, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof.It should be pointed out that the those of ordinary skill for described technical field, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of the claims in the present invention.

Claims (10)

1.多环形自适应抛光磨头,包括法兰轴(1),其特征在于,还包括,多环刚性基底(3)、柔性环(4)和抛光环(5);1. A multi-ring self-adaptive polishing grinding head, including a flange shaft (1), characterized in that it also includes a multi-ring rigid base (3), a flexible ring (4) and a polishing ring (5); 所述法兰轴(1)的底端固定在多环刚性基底(3)的顶端;The bottom end of the flange shaft (1) is fixed on the top end of the multi-ring rigid base (3); 所述多环刚性基底(3)的底端设有具有相同的圆心且按照半径从小到大,从内到外依次排列的多个圆环形凸台;The bottom end of the multi-ring rigid base (3) is provided with a plurality of annular bosses that have the same center of circle and are arranged sequentially from inside to outside according to the radius from small to large; 所述柔性环(4)可以柔性变形,柔性环(4)由具有相同的圆心且按照半径从小到大,从内到外依次排列的多个圆环组成,柔性环(4)的顶端固定在圆环形凸台的底端;The flexible ring (4) can be flexibly deformed, and the flexible ring (4) is composed of a plurality of circular rings that have the same center of circle and are arranged sequentially from inside to outside according to the radius from small to large, and the top of the flexible ring (4) is fixed on the bottom end of the annular boss; 所述抛光环(5)由具有相同的圆心且按照半径从小到大,从内到外依次排列的多个圆环组成,抛光环(5)的顶端固定在柔性环(4)的底端上,所述抛光环(5)的多个圆环的底面具有相同的曲率半径。The polishing ring (5) is composed of a plurality of circular rings which have the same center and are arranged sequentially from the inside to the outside according to the radius from small to large, and the top of the polishing ring (5) is fixed on the bottom end of the flexible ring (4) , the bottom surfaces of the plurality of circular rings of the polishing ring (5) have the same radius of curvature. 2.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述多个圆环形凸台的底面具有相同的曲率半径。2 . The multi-ring self-adaptive polishing grinding head according to claim 1 , wherein the bottom surfaces of the plurality of circular bosses have the same radius of curvature. 3 . 3.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述柔性环(4)的多个圆环的底面具有相同的曲率半径。3. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the bottom surfaces of the plurality of rings of the flexible ring (4) have the same radius of curvature. 4.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述法兰轴(1)通过紧固螺栓(2)固定在多环刚性基底(3)上。4. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the flange shaft (1) is fixed on the multi-ring rigid base (3) by fastening bolts (2). 5.根据权利要求4所述的多环形自适应抛光磨头,其特征在于,所述紧固螺栓(2)的个数为3-6个。5. The multi-ring self-adaptive polishing grinding head according to claim 4, characterized in that, the number of said fastening bolts (2) is 3-6. 6.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述柔性环(4)的圆环与圆环形凸台一一对应。6 . The multi-ring self-adaptive polishing grinding head according to claim 1 , characterized in that, the rings of the flexible ring ( 4 ) are in one-to-one correspondence with the annular bosses. 7 . 7.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述柔性环(4)的圆环与抛光环(5)的圆环一一对应。7. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the rings of the flexible ring (4) correspond to the rings of the polishing ring (5) one by one. 8.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述柔性环(4)的材料为橡胶或海绵。8. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the material of the flexible ring (4) is rubber or sponge. 9.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述抛光环(5)的材料为沥青或聚氨酯。9. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the material of the polishing ring (5) is asphalt or polyurethane. 10.根据权利要求1所述的多环形自适应抛光磨头,其特征在于,所述多环刚性基底(3)的材料为硬铝合金或不锈钢。10. The multi-ring self-adaptive polishing grinding head according to claim 1, characterized in that, the material of the multi-ring rigid base (3) is hard aluminum alloy or stainless steel.
CN201410390349.0A 2014-08-08 2014-08-08 Many annular self adaptation grinding head for polishing Expired - Fee Related CN104175192B (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105290916A (en) * 2015-10-29 2016-02-03 中国科学院长春光学精密机械与物理研究所 Ultra-precise grinding head and using method thereof
CN107000154A (en) * 2014-12-17 2017-08-01 奥林巴斯株式会社 The machining tool of optical element and the manufacture method of optical element
CN107775453A (en) * 2017-09-05 2018-03-09 上海现代先进超精密制造中心有限公司 A kind of high-accuracy processing method of strip speculum
CN109202709A (en) * 2018-11-21 2019-01-15 中国科学院光电技术研究所 Air pressure control constant pressure self-adaptive polishing grinding head
CN110936288A (en) * 2019-10-30 2020-03-31 重庆大学 A kind of electroplating polishing grinding head with flexible layer
CN111230662A (en) * 2020-03-13 2020-06-05 浙江上风高科专风实业有限公司 Noise reduction type sweep-bending combined axial flow blade production and processing equipment
CN111376142A (en) * 2019-12-25 2020-07-07 苏州大学 A method and device for numerical control milling, grinding, forming and polishing of a large-diameter aspherical mirror
CN112571203A (en) * 2020-12-07 2021-03-30 中国科学院长春光学精密机械与物理研究所 Deformable grinding and polishing disc

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CN2297280Y (en) * 1997-05-02 1998-11-18 张建民 Flexible grinding tools
CN101444897A (en) * 2007-11-29 2009-06-03 株式会社荏原制作所 Polishing apparatus and method
JP2010115767A (en) * 2008-11-14 2010-05-27 Haruchika Seimitsu:Kk Processing plate correction method of spherical lens polishing machine, processing plate correction tool and spherical lens polishing machine
CN102528609A (en) * 2011-12-30 2012-07-04 中国科学院长春光学精密机械与物理研究所 Vibratory polishing grinding head

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DE29608877U1 (en) * 1996-05-17 1996-08-22 Opto Tech Optikmaschinen GmbH, 35435 Wettenberg Holder for optical lenses
CN2297280Y (en) * 1997-05-02 1998-11-18 张建民 Flexible grinding tools
CN101444897A (en) * 2007-11-29 2009-06-03 株式会社荏原制作所 Polishing apparatus and method
JP2010115767A (en) * 2008-11-14 2010-05-27 Haruchika Seimitsu:Kk Processing plate correction method of spherical lens polishing machine, processing plate correction tool and spherical lens polishing machine
CN102528609A (en) * 2011-12-30 2012-07-04 中国科学院长春光学精密机械与物理研究所 Vibratory polishing grinding head

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107000154A (en) * 2014-12-17 2017-08-01 奥林巴斯株式会社 The machining tool of optical element and the manufacture method of optical element
CN105290916A (en) * 2015-10-29 2016-02-03 中国科学院长春光学精密机械与物理研究所 Ultra-precise grinding head and using method thereof
CN107775453A (en) * 2017-09-05 2018-03-09 上海现代先进超精密制造中心有限公司 A kind of high-accuracy processing method of strip speculum
CN109202709A (en) * 2018-11-21 2019-01-15 中国科学院光电技术研究所 Air pressure control constant pressure self-adaptive polishing grinding head
CN110936288A (en) * 2019-10-30 2020-03-31 重庆大学 A kind of electroplating polishing grinding head with flexible layer
CN110936288B (en) * 2019-10-30 2021-04-27 重庆大学 A kind of electroplating polishing grinding head with flexible layer
CN111376142A (en) * 2019-12-25 2020-07-07 苏州大学 A method and device for numerical control milling, grinding, forming and polishing of a large-diameter aspherical mirror
CN111230662A (en) * 2020-03-13 2020-06-05 浙江上风高科专风实业有限公司 Noise reduction type sweep-bending combined axial flow blade production and processing equipment
CN111230662B (en) * 2020-03-13 2021-01-26 浙江上风高科专风实业有限公司 Noise reduction type sweep-bending combined axial flow blade production and processing equipment
CN112571203A (en) * 2020-12-07 2021-03-30 中国科学院长春光学精密机械与物理研究所 Deformable grinding and polishing disc

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