CN107775453A - A kind of high-accuracy processing method of strip speculum - Google Patents
A kind of high-accuracy processing method of strip speculum Download PDFInfo
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- CN107775453A CN107775453A CN201710792247.5A CN201710792247A CN107775453A CN 107775453 A CN107775453 A CN 107775453A CN 201710792247 A CN201710792247 A CN 201710792247A CN 107775453 A CN107775453 A CN 107775453A
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- face
- strip
- milling
- optical surface
- face type
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention provides a kind of high-accuracy processing method of strip speculum, including takes blank, DMG ultrasonic wave milling machine tool working milling rough benchmarks face, milling loss of weight positioning hole, using hand polish combination QED MRFs, programs polished optical surface；Optical surface face type data are measured, with reference to drawing requirement, carry out face type amendment；The processing method of the strip speculum of the present invention, improve the processing efficiency and machining accuracy of strip speculum, can machining high-precision strip speculum, significantly reduce difficulty of processing and detection difficulty, the generation of waste product is avoided, reduces processing percent defective, technique is simple, it is easy to operate, have a good application prospect.
Description
Technical field
The present invention relates to the processing method of speculum, and in particular to a kind of high-accuracy processing method of strip speculum.
Background technology
High-accuracy super-smooth surface manufacture needs to realize by computer numerical control polishing technology, and what is introduced herein is one
The accurate MRF lathe of kind.QED Magnetorheologicai polishing liquid induction systems are a closed re-circulation systems, make magnetorheological throwing
Light liquid mixes well always, and constantly monitors and control its many attributes, such as polishes flow quantity.Reside in the defeated of polishing fluid
Send the conduit of pump and polishing solution conveying system.The defeated pump of polishing fluid is an electromagnetic flow valve by conduit, then passes through flow instrument
Table.Polishing fluid from there is transported to a spherical wheel hub, is rotated in about 1-3 meter per second.Wheel hub is supported around its outer surface
Banding polishing fluid.Scraper plate removes the polishing fluid of wheel hub.The polishing fluid of pump is returned by pump recirculation and using recovery.This envelope
The polishing fluid mixing that recirculating system keeps good is closed, and is kept for the life-span of the polishing fluid of continuous use.
Electromagnet is an inalienable part of the system.They are located at directly over polishing wheel.Magnet is placed on
On the emery wheel of powerful this geomagnetic gradient bottom.
When magneto-rheological fluid is by the region, solidifies (in units of millisecond), then return to its reset condition, again with
Millisecond leaves the region for unit.During the magnetizing fluid polishing in the region of the bottom of wheel.Optical surface, which is placed on, squeezes colour band
The sub-fraction of its original thickness is pressed onto, so as to the significant shear stress of optical surface on a side and subsequent polish pressure
Deng fluid.
MRF (magnetorheological) processing method
Need to input two functions during MRF (magnetorheological)：One is clearance and distribution (polishing tool) process
Describe, and another describes initial surface error.The prediction of two functions of drive software algorithm performs of computer, and produce
The instrument can repair the prediction of mistake, and the instruction of one group of Digit Control Machine Tool.The part of equipment positioning in a fluid, to protect
Hold the surface that constant gap is arbitrary shape.It is by the magnetic flow liquid of part during the stop of fluid to determine the different removal times
Between a function.
The content of the invention
It is an object of the invention to provide a kind of processing method of strip speculum, solves the processing essence of existing strip speculum
Degree than it is relatively low the problem of.Strip speculum, two kinds of processing skills are processed using ultrasonic wave milling machine tool working and MRF lathe
Art complements each other, and finally energy processing optical face type reaches the precision of nanometer level.
In order to realize the above object the technical solution adopted in the present invention is：A kind of high-accuracy processing of strip speculum
Method, comprise the following steps：
Step 1: the milling of ultrasonic wave milling machine tool working is molded
Rectangle cylinder blank is taken, carries out ultrasonic wave milling, takes the workpiece after milling, measures processing optical face face type number
According to；
Step 2: hand polish optical surface
Remove the damaging layer on optical surface surface completely, and by hand tru(e)ing face type to PV<5μm；
Step 3: MRF lathe polishes optical surface
The processing optical face face type data measured in step 1 are imported MRF lathe, MRF lathe root
Continue to polish optical surface until meeting sets requirement according to the processing optical face face type data measured in step 1.
Further, in step 1 the milling of ultrasonic wave milling machine tool working be molded comprise the following steps that：
1) rectangle cylinder blank is taken, a pair long side side adjacent with face to be processed carries out milling lightening grooves；
2) heating melts wax, will be to be processed face-up after one side waxing relative with face to be processed on blank, blank
Reference plane is close to the position limiting structure of frock, and blank is bonded in frock, after wax cooling, forms band blank frock；
3) amesdial will be fixed on milling-grinding equipment Z axis with blank fitting device on DMG milling-grinding equipment workpiece spindles,
Rough benchmark face is positioned, it is within 0.005 to control the depth of parallelism, is clamped；
4) milling face to be processed, workpiece spindle remains stationary as in zero-bit during milling；
5) workpiece after milling is taken, measures processing optical face face type data.
Further, hand polish optical surface uses and does matrix with aluminium alloy in step 2, is bonded the polishing of pitch above
Head.
Further, motion mode during the rubbing head that hand polish optical surface uses in step 2 has following four：
The first：Rubbing head is also parallel with strip mirror parallel to strip mirror, swaying direction；
Second：Rubbing head and strip mirror have a certain angle, and swaying direction is parallel with strip mirror；
The third：Rubbing head has certain angle parallel to strip mirror, swaying direction with strip mirror；
4th kind：Rubbing head rotates clockwise or counterclockwise parallel to strip mirror, rubbing head；
When testing result shows blank optical surface turned-down edge, just with the first motion mode；Testing result shows blank light
During the alice of face, with regard to the motion mode in addition to the first.
Further, hand polish optical surface craft tru(e)ing face type has two ways in step 2：The first is whole in polishing
On the basis of individual face, only increase polishing time in high point；Second polishing high point, the low place of face type are completely not polished.
Further, QED polishes comprising the following steps that for optical surface in step 3：
(1) prepare 4 metals to fix on MRF lathe Q axle round tables by block and 4 sets of screws；
(2) strip mirror is placed in metal by among block, blend rubber cushion insulation blocking, tightening four side screws；
(3) workpiece positions；
(4) calculation procedure：The processing optical face face type data importing QED lathes drawn are measured in step 1, it is grown
Degree and width are repaired, and make the length and width that data are shown that it is square to calculate machinable RMS in the range of N and M
Root difference, then solve perform calculating, be calculated result, show that current processing can make optical surface face type reach 0.1 wavelength,
So that the acceleration of X-axis and Y-axis is 2500mm/sec during machining2, the feed speed of X-axis and Y-axis is 100mm/sec；
(5) polish：The program just calculated is performed, machine automatically begins to process, until EP (end of program)；
(6) vertical interferometer measurement S1 faces are used, takes interferometer to carry eyeglass each side 6 sub-apertures, is combined into a left side
After right two sub-apertures, then a summation is spliced into, draws the face type data in the range of length N width M.
The beneficial effects of the invention are as follows：A kind of high-accuracy processing method of strip speculum, including blank is taken, DMG ultrasounds
Ripple milling machine tool working milling rough benchmark face, milling loss of weight positioning hole, using hand polish combination QED MRFs, programming is treated
Polish optical surface；Optical surface face type data are measured, with reference to drawing requirement, carry out face type amendment.The strip speculum of the present invention
Processing method, improve the processing efficiency and machining accuracy of strip speculum, can machining high-precision strip speculum, effectively
Difficulty of processing and detection difficulty are reduced, avoids the generation of waste product, reduces processing percent defective, technique is simple, easy to operate,
Have a good application prospect.
Brief description of the drawings
Fig. 1 is the first motion mode of rubbing head；
Fig. 2 is second of motion mode of rubbing head；
Fig. 3 is the third motion mode of rubbing head；
Fig. 4 is the 4th kind of motion mode of rubbing head；
Fig. 5 is the structural representation of rubbing head.
Embodiment
The present invention is described further below in conjunction with the accompanying drawings.
A kind of processing method of strip speculum, comprises the following steps：
One .DMG millings are molded
1) rectangle cylinder blank is taken, a pair long side side adjacent with face to be processed carries out the loss of weight of milling drawing requirement
Flute length 13mm, wide 6mm, deep 10mm；
2) heating melts wax, will be to be processed face-up after one side waxing relative with face to be processed on blank, blank
Reference plane is close to the position limiting structure of frock, and blank is bonded in frock, after wax cooling, forms band blank frock；
3) amesdial will be fixed on milling-grinding equipment Z axis with blank fitting device on DMG milling-grinding equipment workpiece spindles,
Rough benchmark face is positioned, it is within 0.005 to control the depth of parallelism, is clamped；
4) milling face to be processed is programmed, workpiece spindle remains stationary as in zero-bit during milling；
5) workpiece after programming milling is taken, measures processing optical face face type data；
Two, hand polishes and QED polishings are combined polishing optical surface
1) hand polish
1. hand-polished purpose：The damaging layer on optical surface surface is removed completely, and makes turned-down edge effect minimum as far as possible, no
Uniform removal amount is minimum, has certain polishing effect at chamfering.
2. as shown in figure 5, the size of rubbing head 2 and material：Polish strip mirror is that aluminium alloy does matrix, above bonding drip
Blue or green rubbing head, wherein pitch is global board 73#.Alloy matrix aluminum in polishing, size are 200 × 30 × 45 (mm).Covering
Superincumbent pitch head, thickness about 3mm, size are 200 × 30 (mm).
3. the first motion mode, as shown in Figure 1
Rubbing head 2 is also parallel with strip mirror parallel to strip mirror 1, swaying direction.
Through actual verification, polished with this polishing mode, how concave strip mirror is in short direction, i.e. the easy alice in edge.
4. second of motion mode, as shown in Figure 2
Rubbing head 2 and strip mirror 1 have a certain angle, and swaying direction is parallel with strip mirror.
Through actual verification, this polishing mode polishes, and strip mirror is in the more turned-down edges in short direction.
5. the third motion mode, as shown in Figure 3
Rubbing head 2 is parallel to strip mirror 1, but swaying direction has certain angle with strip mirror.
Through actual verification, polished with this polishing mode, strip mirror is in the more turned-down edges in short direction.
6. the 4th kind of motion mode, as shown in Figure 4
Rubbing head 2 is parallel to strip mirror 1, but rubbing head rotates clockwise or counterclockwise.
Through actual verification, polished with this polishing mode, strip mirror is in the more turned-down edges in short direction.Such a polishing mode, strip mirror
The cutting force by all directions is understood, it is necessary to pay attention to fixing tight strip mirror, prevents from dropping.Above-mentioned motion mode, except the first meeting
Cause outside alice, remaining can all cause different degrees of turned-down edge, therefore can be by with reference to Different Exercise Mode, to a certain degree
Upper reduction edge effect：When testing result shows turned-down edge, just with the first motion mode；When testing result shows alice, just use
Motion mode in addition to the first.The detection method of damaging layer is removed completely：With bright light torch irradiate workpiece surface, with hand
The direction observation in 90 ° of electric light line, surface is without pit, no marking.
7. anti-wire drawing
During polishing, rubbing head and workpiece can be blocked with finger, now, finger can be to having certain throwing at edge of work chamfering
Light effect, can also be individually to being polished at chamfering.Whether wire drawing does not occur because being polished at chamfering, need to also be under
Further verified during secondary polishing.
8. manual tru(e)ing face type
If by hand after the completion of blind throwing, the larger (PV of testing result display surface type>5 μm), at this moment using hand-polished method,
Preliminary tru(e)ing face type is carried out to surface, the time of follow-up QED amendments can be saved.According to testing result, in face, type is higher
Region increases removal amount, and adoptable method has：Stop the more time, go into overdrive, build up speed etc..
There is two ways during amendment：1st, on the basis of entire surface is polished, only polishing time is increased in high point.2nd, only polish
High point, the low place of face type are completely not polished.
During using the first correcting mode, calculated by 1.5 μm/h.That is, correction then polishes one small if 1.5 μm
When with regard to censorship, if correction is 3 μm, polishing 2h with regard to censorship, the like.
During using second of correcting mode, calculated by 3 μm/h.That is, correction then polishes a hour just if 3 μm
Censorship, if correction is 6 μm, 2h is with regard to censorship for polishing, the like.
Type amendment face to face is to PV<At 5 μm, you can complete amendment by hand, now take turns to QED amendments.
2) QED is polished
1. prepare 4 metals to fix on MRF lathe Q axle round tables by block and 4 sets of M6 screws
2. strip mirror is placed in metal by among block, blend rubber cushion is protected by, last four side screw tightening, it is ensured that
It is firmly motionless
3. workpiece positions；
Highly proofread：Probe visits the height for taking workpiece surface, when probe is close to workpiece surface, multiplying power 10%
Proofread position：Its both sides right angle is set to align using QED lathe self aligning systems, camera reticle alignment workpiece is left
Upper angle
Tilting angle:The height for taking four points of close four side 10mm positions on workpiece is visited, makes X, Y inclination is no more than
300
Mark is proofreaded:The position demarcated on check and correction workpiece in relative measurement data, makes it consistent with the data imported afterwards
4. calculation procedure：The processing optical face face type data importing QED lathes drawn are measured in step 1, to its length
Repaired with width, the length and width that data are shown is calculated machinable in the range of 424mm and 24mm
RMS (root-mean-square deviation) value, then solve (performing calculating), is calculated result, shows that current processing can reach optical surface face type
To 0.1 wavelength so that the acceleration of X-axis and Y-axis is 2500mm/sec2 during machining, and the feed speed of X-axis and Y-axis is
100 mm/sec；
5. polishing：Run program (perform the program just calculated, machine automatically begins to process), until program knot
Beam；
6. using vertical interferometer measurement S1 faces, take interferometer to carry eyeglass each side 6 sub-apertures, be combined into left and right
After two sub-apertures, then a summation is spliced into, draws length 424mm, the face type data in the range of width 24mm.
So far, the processing of whole strip speculum just completes, and the method significantly reduces difficulty of processing and detection is difficult
Degree, avoids the generation of waste product, reduces processing percent defective, technique is simple, easy to operate, has a good application prospect.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
- A kind of 1. high-accuracy processing method of strip speculum, it is characterised in that：Comprise the following steps：Step 1: DMG millings are moldedRectangle cylinder blank is taken, carries out ultrasonic wave milling, takes the workpiece after milling, measures processing optical face face type data；Step 2: hand polish optical surfaceRemove the damaging layer on optical surface surface completely, and by hand tru(e)ing face type to PV<5μm；Step 3: QED polishes optical surfaceThe processing optical face face type data measured in step 1 are imported MRF lathe, MRF lathe is according to step The processing optical face face type data measured in rapid one continue to polish optical surface until meeting sets requirement.
- A kind of 2. high-accuracy processing method of strip speculum according to claim 1, it is characterised in that：In step 1 DMG millings shaping comprises the following steps that：1) rectangle cylinder blank is taken, a pair long side side adjacent with face to be processed carries out milling lightening grooves；2) heating melts wax, will be to be processed face-up after one side waxing relative with face to be processed on blank, rough benchmark Face is close to the position limiting structure of frock, and blank is bonded in frock, after wax cooling, forms band blank frock；3) amesdial will be fixed on milling-grinding equipment Z axis with blank fitting device on DMG milling-grinding equipment workpiece spindles, positioned Rough benchmark face, it is within 0.005 to control the depth of parallelism, is clamped；4) milling face to be processed, workpiece spindle remains stationary as in zero-bit during milling；5) workpiece after milling is taken, measures processing optical face face type data.
- A kind of 3. high-accuracy processing method of strip speculum according to claim 1, it is characterised in that：Hand in step 2 Work polishing optical surface uses does matrix with aluminium alloy, is bonded the rubbing head of pitch above.
- A kind of 4. high-accuracy processing method of strip speculum according to claim 1 or 3, it is characterised in that：Step 2 Motion mode during the rubbing head that middle hand polish optical surface uses has following four：The first：Rubbing head is also parallel with strip mirror parallel to strip mirror, swaying direction；Second：Rubbing head and strip mirror have a certain angle, and swaying direction is parallel with strip mirror；The third：Rubbing head has certain angle parallel to strip mirror, swaying direction with strip mirror；4th kind：Rubbing head rotates clockwise or counterclockwise parallel to strip mirror, rubbing head；When testing result shows blank optical surface turned-down edge, just with the first motion mode；Testing result shows blank optical surface During alice, with regard to the motion mode in addition to the first.
- A kind of 5. high-accuracy processing method of strip speculum according to claim 1, it is characterised in that：Hand in step 2 Work polishing optical surface craft tru(e)ing face type has two ways：The first only increases in high point and thrown on the basis of entire surface is polished Between light time；Second polishing high point, the low place of face type are completely not polished.
- A kind of 6. high-accuracy processing method of strip speculum according to claim 1, it is characterised in that：In step 3 QED polishing optical surfaces comprise the following steps that：(1) prepare 4 metals to fix on MRF lathe Q axle round tables by block and 4 sets of screws；(2) strip mirror is placed in metal by among block, blend rubber cushion insulation blocking, tightening four side screws；(3) workpiece positions；(4) calculation procedure：Import QED lathes the processing optical face face type data that draw are measured in step 1, to its length and Width is repaired, and makes the length and width that data are shown in the range of N and M, calculates machinable RMS root-mean-square deviations Value, then solve performs calculating, and result is calculated, and shows that current processing can make optical surface face type reach 0.1 wavelength so that The acceleration of X-axis and Y-axis is 2500mm/sec during machining2, the feed speed of X-axis and Y-axis is 100mm/sec；(5) polish：The program just calculated is performed, machine automatically begins to process, until EP (end of program)；(6) vertical interferometer measurement S1 faces are used, take interferometer to carry eyeglass each side 6 sub-apertures, are combined into left and right two After sub-aperture, then a summation is spliced into, draws the face type data in the range of length N width M.
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| CN110842658A (en) * | 2019-11-28 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Combined processing method for controlling edge effect of irregular clear aperture reflector |
| CN111002114A (en) * | 2020-01-04 | 2020-04-14 | 云南驰宏国际锗业有限公司 | Precise polishing method for germanium lens |
| CN111745504A (en) * | 2020-05-20 | 2020-10-09 | 深圳市裕展精密科技有限公司 | Polishing mechanism, polishing device and polishing method |
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Application publication date: 20180309 |