CN104290002B - A kind of processing method of cylindrical mirror - Google Patents
A kind of processing method of cylindrical mirror Download PDFInfo
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- CN104290002B CN104290002B CN201310627647.2A CN201310627647A CN104290002B CN 104290002 B CN104290002 B CN 104290002B CN 201310627647 A CN201310627647 A CN 201310627647A CN 104290002 B CN104290002 B CN 104290002B
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- cylindrical mirror
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- 238000003672 processing method Methods 0.000 title claims abstract description 20
- 238000005498 polishing Methods 0.000 claims abstract description 24
- 239000001993 waxes Substances 0.000 claims abstract description 11
- 229910001651 emery Inorganic materials 0.000 claims description 10
- 229910003460 diamond Inorganic materials 0.000 claims description 9
- 239000010432 diamond Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000155 melts Substances 0.000 claims description 4
- 238000004018 waxing Methods 0.000 claims description 4
- 238000000034 methods Methods 0.000 abstract description 9
- 238000003754 machining Methods 0.000 abstract description 7
- 230000002950 deficient Effects 0.000 abstract description 2
- 239000002699 waste materials Substances 0.000 abstract description 2
- 230000003287 optical Effects 0.000 description 6
- 210000004279 Orbit Anatomy 0.000 description 4
- 238000010586 diagrams Methods 0.000 description 3
- 238000005516 engineering processes Methods 0.000 description 2
- 239000010410 layers Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 241000013987 Colletes Species 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
Abstract
The processing method that the invention discloses a kind of cylindrical mirror, including: take blank, milling rough benchmark face;With wax, blank is bonded in frock;Band blank frock is placed on milling-grinding equipment workpiece spindle, uses amesdial to beat table rough benchmark face, clamping;Programming milling cylinder to be processed;Measure processing cylindrical surface type data;Relatively face type data, if Rt value is more than 1 μm, then revise milling;If Rt value is less than 1 μm, then it is polished;As after polishing, processing cylinder Rt value and the Ra value of workpiece meet the expected requirements, workpiece is pulled down from frock, cleans, to obtain final product.The processing method of the cylindrical mirror of the present invention, improves working (machining) efficiency and the machining accuracy of cylindrical mirror, can the cylindrical mirror of machining high-precision;Significantly reduce difficulty of processing and detection difficulty, it is to avoid the generation of waste product, reduce processing percent defective;Technique is simple, easy to operate, has a good application prospect.
Description
Technical field
The invention belongs to Optical manufacture technology field, the processing method being specifically related to a kind of cylindrical mirror.
Background technology
Cylindrical mirror is a kind of nonaxisymmetrical special non-spherical lens, can be in one-dimensional offer optimal light focal power, orthogonal to that
Another dimension is equal to a plane, and this feature makes it obtain important application at some special dimensions.Along with the reach of science, cylinder
The application of mirror constantly expands, and its required precision is more and more higher.But owing to cylindrical mirror does not has rotation axes of symmetry, adding of it
Work and detect the most high-precision processing and detect relatively difficult.
Summary of the invention
The processing method that it is an object of the invention to provide a kind of cylindrical mirror, the machining accuracy solving existing cylindrical mirror is asked than relatively low
Topic.
In order to realize object above, the technical solution adopted in the present invention is: the processing method of a kind of cylindrical mirror, including following
Step:
1) take quadrangular type blank, a long side face adjacent with cylinder to be processed is carried out milling, controls the parallel of this face
Degree is 0.002, using this face as rough benchmark face;
2) heating makes wax melt, after one side waxing relative with cylinder to be processed on blank, by cylinder to be processed upward,
Rough benchmark face is close to the position limiting structure of frock, is bonded in frock by blank, after wax cools down, obtains band blank frock;
3) band blank frock is placed on milling-grinding equipment workpiece spindle, amesdial is fixed on milling-grinding equipment Z axis, beat table hair
Base datum level, within the control depth of parallelism is 0.005, clamping;
4) programming milling cylinder to be processed, during milling, workpiece spindle remains stationary as in zero-bit;
5) take the workpiece after programming milling, measure processing cylindrical surface type data, Rt value and the Ra value of cylinder must be processed;
6) compare face type data, such as step 5) gained processing cylinder Rt value be more than 1 μm, then carry out step 7);
Such as step 5) gained processing cylinder Rt value be less than or equal to 1 μm, then carry out step 8);
7) by the processing cylindrical surface type data feedback that obtains to milling-grinding equipment, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), be modified milling by these data, after milling return step 5);
Such as detection faces type X of certain point, the value of Y, Z are (2.5,3,1.2), then rear is (2.5,3 ,-1.2);
8) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder;
Such as detection faces type X of certain point, the value of Y, Z are (2.5,3,1.2), then rear is (2.5,3 ,-1.2);
9) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value and the Ra value of cylinder must be processed;Such as processing
The Rt value of cylinder and Ra value do not meet expection requirement, return step 8);
Rt value and Ra value as processed cylinder meet the expected requirements, and carry out step 10);
10) workpiece after polishing is pulled down from frock, clean, obtain the cylindrical mirror of one side completion of processing.
Described frock includes that body, body upper surface are provided with groove, is provided with the through hole of through body in the middle part of groove bottom surface;Described
The opening's edge of groove notch forms the supporting surface for supporting workpiece, described supporting surface be provided with position limiting structure.
Described position limiting structure is spacing edge, and described spacing edge is the limit for being close to the datum level of blank in the face of the one side of groove
Position is by face.
Step 3) in be use magnetic stand amesdial is fixed on milling-grinding equipment Z axis.
Step 4) described in program milling cylinder to be processed be use three times cylinders of dish (emery) wheel milling.
Step 4) described in program milling cylinder to be processed be first pass use butterfly rough grinding wheel carry out milling, adopt for second time
Carry out milling with butterfly finishing wheel, use for the 3rd time butterfly super grinding emery wheel to carry out milling.
The granularity of described rough grinding wheel is D91, diamond content C35;The granularity of described finishing wheel is D20, diamond
Content C50;The granularity of described super grinding emery wheel is D18, diamond content C75.
Step 5) in measure processing cylindrical surface type data method be: will programming milling after workpiece be placed on turntable, first
Along segment of a cylinder orientation measurement, obtain the face type data of cylinder Y, Z-direction;Then revolving-turret 90 °, along cylinder radius
Orientation measurement, obtains the face type data of cylinder X, Z-direction;Two groups of face type data are pressed coordinate figure combine, obtain comprising X,
Y, the Rt value of the cylindrical surface type data of Z coordinate, i.e. cylinder and Ra value.
Step 8) described in polishing be a size ofPolished die be polished.
By step 10) gained one side completion of processing cylindrical mirror repeat step 2)~10) operation, obtain two sides and process
The cylindrical mirror finished.
The processing method of the cylindrical mirror of the present invention, based on computer controlled optical surfacing forming technique, uses Digit Control Machine Tool to realize
Processing to cylinder;By the face shape error of high-precision optical surface shape measurement apparatus measures cylinder, obtain the face figurate number of Current surface
According to, face graphic data is compared with intended face shape, provides face graphic data for the next process-cycle, so go round and begin again, directly
To obtaining satisfactory optical surface;By designing high-precision frock, it is ensured that the concordance of workpiece secondary bonding location.
Blank milling datum level, makes table rough benchmark face clamping, it is ensured that part and the parallel relation of equipment tool axle, thus controls post
The bias in face.
The processing method of the cylindrical mirror of the present invention, uses computer controlled optical surfacing forming technique, accurately controls the face of cylinder
Type;Use flexibly and measure device measuring cylinder, reflect the difference on actual surface and expection surface intuitively, and according to difference
Generate reverse figure, with reverse figure reworking surface, thus revise surface;Through measurement repeatedly, feed back, revise
Surface, improves surface accuracy to meeting the requirements;The method of the present invention, improves working (machining) efficiency and the machining accuracy of cylindrical mirror,
Can the cylindrical mirror of machining high-precision;Significantly reduce difficulty of processing and detection difficulty, it is to avoid the generation of waste product, reduce
Processing percent defective;Technique is simple, easy to operate, has a good application prospect.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment 1 cylindrical mirror to be processed;
Fig. 2 is the top view of Fig. 1;
Fig. 3 is the structural representation of frock used by embodiment 1;
Fig. 4 is the top view of Fig. 3;
The structural representation of band blank frock when Fig. 5 is processing first;
Fig. 6 is band blank frock mounting structure schematic diagram during processing first;
The schematic diagram of programming milling cylinder when Fig. 7 is processing first;
Fig. 8 is the top view of Fig. 7, and in figure, dotted arrow is emery wheel running orbit;
The structural representation of band blank frock when Fig. 9 is processing second;
The schematic diagram of polishing cylinder when Figure 10 is processing second;
Figure 11 is the top view of Figure 10, and in figure, dotted arrow is polished die running orbit.
Detailed description of the invention
Below in conjunction with detailed description of the invention, the present invention is further illustrated.
Embodiment 1
As shown in Figure 1, 2, technological requirement is the profile of the cylindrical mirror that the present embodiment is to be processed:
Overall dimensions, long by 237.7, wide
Cylindrical curvature radius, concave surface R-107.5, convex surface R+107.5;
Surface figure accuracy Rt≤0.4 μm, Ra≤0.04 μm;
Centre deviation χ≤1.2 ';
Center thickness size 8 ± 0.1;
Beauty defects grade B=V.
The processing method of the cylindrical mirror of the present embodiment, comprises the following steps:
Process first R+107.5:
1) quadrangular type blank is taken, this blank length 237.7, wideThickness 22, to adjacent with cylinder to be processed one
Long side face carries out milling, and the depth of parallelism controlling this face is 0.002, using this face as rough benchmark face;
Taking frock used by the present embodiment, as shown in Figure 3,4, including body 1, body 1 upper surface is provided with groove to described frock
2, it is provided with the through hole 3 of through body 1 in the middle part of groove 2 bottom surface;The opening's edge of described groove 2 notch is formed for supporting workpiece
Supporting surface 4, described supporting surface 4 be provided with position limiting structure;Described position limiting structure is spacing along 5, described spacing along 5
In the face of the one side of groove 2 is for spacing by face 6 with what the datum level of blank was close to;
2) heating makes wax melt, after one side waxing relative with cylinder to be processed on blank, as it is shown in figure 5, by be added
Upward, rough benchmark face 9 is close to the spacing of frock 7 and is bonded in frock 7 by blank 8 by face work cylinder, treats that wax cools down
After, form wax layer 10 between supporting surface and the blank of frock, obtain band blank frock;
3) band blank frock is placed on milling-grinding equipment workpiece spindle, as shown in Figure 6, band hydraulic buckling chuck on workpiece spindle 13,
The frock 7 of band blank 8 is put into collet bore, with magnetic stand 15, amesdial 14 is fixed on milling-grinding equipment Z axis,
Manual manipulation Z axis moves, and beats table rough benchmark face, and controlling the depth of parallelism is 0.004, the knob of twisted hydraulic buckling chuck,
Clamping;
4) programming milling cylinder to be processed R+107.5, uses dish time cylinder rear center to be processed thickness of rough grinding wheel milling
20.90, change thickness 20.77 after dish time cylinder of finishing wheel milling, then with dish-shaped time cylinder of super grinding emery wheel milling
Rear center's thickness 20.72;During milling as shown in Figure 7,8, emery wheel 11 rotates clockwise, and it is at the cylinder to be processed of blank 8
Running orbit as the dotted line arrows, workpiece spindle remains stationary as in zero-bit;
The granularity of described rough grinding wheel is D91, diamond content C35;The granularity of described finishing wheel is D20, diamond
Content C50;The granularity of described super grinding emery wheel is D18, diamond content C75.
5) take the workpiece after programming milling, this workpiece is placed on turntable, first along segment of a cylinder orientation measurement, obtains post
Face Y, the face type data of Z-direction;Then revolving-turret 90 °, measure along cylinder radial direction, obtain cylinder X, Z-direction
Face type data;Two groups of face type data are pressed coordinate figure combine, obtain comprising the cylindrical surface type data of X, Y, Z coordinate,
Rt value 1.53 μm and Ra value 0.19 μm of cylinder must be processed;
6) comparing face type data, the Rt value of gained processing cylinder is 1.53 μm, more than 1 μm, enters and revises milling step;
7) by the processing cylindrical surface type data feedback that obtains to milling-grinding equipment, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), be modified milling by these data;
8) measure processing cylinder face type data, must process cylinder Rt value 0.94 μm and Ra value 0.15 μm;
9) comparing face type data, the Rt value of gained processing cylinder is 0.94 μm, less than 1 μm, enters polishing step;
10) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
11) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.91 μm and the Ra value of cylinder must be processed
0.14μm;
12) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
13) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.76 μm and the Ra value of cylinder must be processed
0.12μm;
14) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
15) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.59 μm and the Ra value of cylinder must be processed
0.08μm;
16) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
17) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.47 μm and the Ra value of cylinder must be processed
0.06μm;
18) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
19) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.39 μm and the Ra value of cylinder must be processed
0.04μm;Face type data fit expection requirement;
20) workpiece after polishing is pulled down from frock, clean, obtain the cylindrical mirror of one side completion of processing.
Process second R-107.5:
1) heating makes wax melt, after one side waxing relative with cylinder to be processed on blank, as it is shown in figure 9, by be added
Upward, rough benchmark face 9 is close to the spacing of frock 7 and is bonded in frock by blank 8 by face work cylinder, after wax cools down,
Form wax layer 10 between supporting surface and the blank of frock, obtain band blank frock;
2) band blank frock is placed on milling-grinding equipment workpiece spindle, with magnetic stand, amesdial is fixed on milling-grinding equipment Z axis
On, manual manipulation Z axis moves, and beats table rough benchmark face, and controlling the depth of parallelism is 0.004, clamping;
3) programming milling cylinder to be processed R-107.5, uses dish time cylinder rear center to be processed thickness of rough grinding wheel milling
8.25, change thickness 8.14 after dish time cylinder of finishing wheel milling, then with after dish time cylinder of super grinding emery wheel milling
Center thickness 8.09;During milling, workpiece spindle remains stationary as in zero-bit;
4) take the workpiece after programming milling, this workpiece is placed on turntable, first along segment of a cylinder orientation measurement, obtains post
Face Y, the face type data of Z-direction;Then revolving-turret 90 °, measure along cylinder radial direction, obtain cylinder X, Z-direction
Face type data;Two groups of face type data are pressed coordinate figure combine, obtain comprising the cylindrical surface type data of X, Y, Z coordinate,
Rt value 1.49 μm and Ra value 0.18 μm of cylinder must be processed;
5) comparing face type data, the Rt value of gained processing cylinder is 1.49 μm, more than 1 μm, enters and revises milling step;
6) by the processing cylindrical surface type data feedback that obtains to milling-grinding equipment, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), be modified milling by these data;
7) measure processing cylinder face type data, must process cylinder Rt value 0.89 μm and Ra value 0.14 μm;
8) comparing face type data, the Rt value of gained processing cylinder is 0.89 μm, less than 1 μm, enters polishing step;
9) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;Polishing
Time, such as Figure 10, shown in 11, polished die 12 rotates counterclockwise, its at the running orbit of the cylinder to be processed of blank 8 as empty
Shown in line arrow;
10) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.83 μm and the Ra value of cylinder must be processed
0.14μm;
11) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
12) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.78 μm and the Ra value of cylinder must be processed
0.13μm;
13) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
14) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.62 μm and the Ra value of cylinder must be processed
0.09μm;
15) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
16) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.54 μm and the Ra value of cylinder must be processed
0.06μm;
17) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
18) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.45 μm and the Ra value of cylinder must be processed
0.05μm;
19) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder, selectSmall size polished die be polished;
20) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value 0.38 μm and the Ra value of cylinder must be processed
0.04μm;Face type data fit expection requirement;
21) workpiece after polishing is pulled down from frock, clean, obtain the cylindrical mirror of two sides completion of processing.
Used by the present embodiment, capital equipment title and model are as follows:
Milling-grinding equipment: optical manufacturing center, model MCG250;
Measurement equipment: contourograph, model PGI1240;
Polissoir: mechanical hand polissoir, model MCP250.
Claims (10)
1. the processing method of a cylindrical mirror, it is characterised in that: comprise the following steps:
1) take quadrangular type blank, a long side face adjacent with cylinder to be processed is carried out milling, controls the parallel of this face
Degree is 0.002, using this face as rough benchmark face;
2) heating makes wax melt, after one side waxing relative with cylinder to be processed on blank, by cylinder to be processed upward,
Rough benchmark face is close to the position limiting structure of frock, is bonded in frock by blank, after wax cools down, obtains band blank frock;
3) band blank frock is placed on milling-grinding equipment workpiece spindle, amesdial is fixed on milling-grinding equipment Z axis, beat table hair
Base datum level, within the control depth of parallelism is 0.005, clamping;
4) programming milling cylinder to be processed, during milling, workpiece spindle remains stationary as in zero-bit;
5) take the workpiece after programming milling, measure processing cylindrical surface type data, Rt value and the Ra value of cylinder must be processed;
6) compare face type data, if the Rt value of step 5) gained processing cylinder is more than 1 μm, then carry out step 7);
If the Rt value of step 5) gained processing cylinder is less than or equal to 1 μm, then carry out step 8);
7) by the processing cylindrical surface type data feedback that obtains to milling-grinding equipment, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), be modified milling by these data, after milling return step 5);
8) by the processing cylindrical surface type data feedback that obtains to polissoir, the Z value with X, Y plane as the plane of symmetry is generated
Reverse data (X, Y ,-Z), with these data polish cylinder;
9) take the workpiece after polishing, measure processing cylindrical surface type data, Rt value and the Ra value of cylinder must be processed;Such as processing
The Rt value of cylinder and Ra value do not meet expection requirement, return step 8);
Rt value and Ra value as processed cylinder meet the expected requirements, and carry out step 10);
10) workpiece after polishing is pulled down from frock, clean, obtain the cylindrical mirror of one side completion of processing.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: described frock includes body,
Body upper surface is provided with groove, is provided with the through hole of through body in the middle part of groove bottom surface;The opening's edge of described groove notch is formed and is used for
Support workpiece supporting surface, described supporting surface be provided with position limiting structure.
3. according to the processing method of the cylindrical mirror described in claim 1 or 2, it is characterised in that: described position limiting structure is
Spacing edge, described spacing edge is for spacing by face with what the datum level of blank was close in the face of the one side of groove.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: step 3) is use magnetic force
Amesdial is fixed on milling-grinding equipment Z axis by gauge stand.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: program milling described in step 4)
Grinding cylinder to be processed is to use three times cylinders of dish (emery) wheel milling.
The processing method of described cylindrical mirror the most according to claim 5, it is characterised in that: program milling described in step 4)
Grinding cylinder to be processed is that first pass uses butterfly rough grinding wheel to carry out milling, uses for second time butterfly finishing wheel to carry out milling,
Butterfly super grinding emery wheel is used for 3rd time to carry out milling.
The processing method of described cylindrical mirror the most according to claim 6, it is characterised in that: the granularity of described rough grinding wheel
For D91, diamond content C35;The granularity of described finishing wheel is D20, diamond content C50;Described superfinishing frosted
The granularity of wheel is D18, diamond content C75.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: step 5) is measured processing post
The method of face, face type data is: is placed on turntable by the workpiece after programming milling, first along segment of a cylinder orientation measurement, obtains
Cylinder Y, the face type data of Z-direction;Then revolving-turret 90 °, measure along cylinder radial direction, obtain cylinder X, Z side
To face type data;Two groups of face type data are pressed coordinate figure combine, obtain comprising the cylindrical surface type data of X, Y, Z coordinate,
The i.e. Rt value of cylinder and Ra value.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: polishing described in step 8) is
Use a size ofPolished die be polished.
The processing method of described cylindrical mirror the most according to claim 1, it is characterised in that: by step 10) gained one side
The cylindrical mirror of completion of processing repeats step 2)~10) operation, obtain the cylindrical mirror of two sides completion of processing.
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