CN105127889B - A kind of self adaptation grinding head for polishing - Google Patents
A kind of self adaptation grinding head for polishing Download PDFInfo
- Publication number
- CN105127889B CN105127889B CN201510562614.3A CN201510562614A CN105127889B CN 105127889 B CN105127889 B CN 105127889B CN 201510562614 A CN201510562614 A CN 201510562614A CN 105127889 B CN105127889 B CN 105127889B
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- China
- Prior art keywords
- bistrique
- sub
- polishing
- pedestal
- grinding head
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of self adaptation grinding head for polishing, including：Flange pedestal（1）, in flange pedestal（1）Lower section have bistrique pedestal in its concentric fits（2）, in bistrique pedestal（2）Following table EDS maps be provided with bistrique unit（3）, wherein, the bistrique unit（3）, including, sub-base（31）, sub- bistrique（32）And subbase set（33）, when work is polished, sub- bistrique（32）Can be according to polishing face with respect to sub-base（31）Self adaptation movement is carried out, sub- bistrique is improved（32）With the laminating degree in polishing face, improve quality of finish, the self adaptation grinding head for polishing can be used for aspherical pre-polish(ing) and add, with machining accuracy is high, simple structure, the advantages of reasonable in design.
Description
Technical field
The present invention relates to optics cold processing technique field, a kind of self adaptation grinding head for polishing is specifically provided, be particularly suited for
The processing of aspheric surface optical accessory.
Background technology
Aspheric surface optical accessory can significantly simplify system, improve as matter, reduces the outside dimension and weight of system, therefore, with
Continuing to develop for science and technology, the manufacture demand of aspheric surface optical accessory is dramatically increased, especially in lithographic objective optical system
In, the quantity of High-precision aspheric optical element accounts for more than the 50% of total optical element quantity.Due to aspherical with unique light
Axle, while there is notable difference in aspherical upper each point radius of curvature, therefore common spherical polishing technique cannot solve it is aspherical pre-
Polishing problem is more at present to carry out aspherical pre-polish(ing) using small abrasive nose glossing.However, small abrasive nose pre-polish(ing) is aspherical
Residual intermediate frequency error is larger, is difficult to obtain in the case of extremely strict to aspherical intermediate frequency error requirements and meets the non-of system requirements
Sphere processing result, such as in NA lithographic objectives optical system high, High-precision aspheric optical element generally has irrelevance
It is more than the features such as 3 ° more than 1mm, gradient, aspherical intermediate frequency index need to be better than 0.5nmRMS, significantly increase manufacture difficulty, commonly
Small abrasive nose pre-polish(ing) is difficult to meet above-mentioned process requirements.
It is a kind of " double-flexibility self adaptation polishing mill that the Chinese patent of Application No. 201310034268.2 discloses a key name
The technical scheme of head ", the grinding head for polishing described in the program uses flexible layer as polished die and the aspherical deformation layer fitted, real
A kind of aspherical flexible self adaptation grinding head for polishing is showed.The limitation of the program is that flexible layer stroke is smaller, is deviateed in polishing
Amount has that stroke is not enough when larger aspherical.
Therefore, how to solve the above problems, as people's problem demanding prompt solution.
The content of the invention
In consideration of it, it is an object of the invention to provide a kind of self adaptation grinding head for polishing, at least to solve existing aspherical throwing
Grinding head for polishing present in light technology is low with the laminating degree in polishing face, close disk effect it is poor, influence quality of finish the problems such as.
The technical scheme that the present invention is provided, specifically, a kind of self adaptation grinding head for polishing, it is characterised in that including：
Flange pedestal 1；
Bistrique pedestal 2, its lower section for being located at the flange pedestal 1, and with the concentric fits of flange pedestal 1；
Bistrique unit 3, its distribution is arranged at the lower surface of the bistrique pedestal 2；
Wherein, the bistrique unit 3, including,
Sub-base 31, its one end is fixedly connected with the lower surface of the bistrique pedestal 2, and is set in the sub-base 31
There is the cavity 311 that insertion is upper and lower；
Sub- bistrique 32, it has connecting portion and polishing portion, wherein, the connecting portion is and described in the cavity 311
The inwall gap of cavity 311 coordinates, and the end of the connecting portion and the bistrique pedestal 2 lower surface elastic abutment；
Subbase set 33, its outside for being set in the sub-base 31 and the sub- bistrique 32, for the sub- bistrique 32
Move spacing.
It is preferred that, the lower surface of the bistrique pedestal 2 is cambered surface, and the cambered surface radius of curvature with polishing face most
Good fit sphere radius of curvature is related.
Further preferably, the lower surface radius of curvature R 1 of the bistrique pedestal 2 is specially：R1=R-H+2 mm；
Wherein, the R is the best fit sphere curvature radius in polishing face, and the H is the unloaded bistrique unit 3
Under the conditions of height.
Further preferably, the end of the connecting portion of sub- bistrique 32 passes through the lower surface of stage clip 34 and the bistrique pedestal 2
Elastic abutment, the stage clip 34 is located in the cavity 311 of the sub-base 31, its one end and the connecting portion phase of the sub- bistrique 32
Support, the other end offsets with the lower surface of the bistrique pedestal 2.
Further preferably, the end face of the connecting portion of sub- bistrique 32 is provided with blind hole 3211, the stage clip 34 and the son
One end that the connecting portion of bistrique 32 offsets is located in the blind hole 3211.
Further preferably, the sub- bistrique 32 includes：
Piston 321, is provided with limited block 3212 and coordinates with subbase set 33；
Polished die substrate 322, its upper surface is fixedly connected with the end of the piston 321；
Polished die 323, its lower surface for being fixedly installed on the polished die substrate 322.
Further preferably, the material of the polished die 323 is polyurethane or pitch.
Further preferably, the bistrique unit 3 is in polycyclic same heart shaped or orthogonal moment in the lower surface of the bistrique pedestal 2
Battle array shape distribution.
Further preferably, the quantity of the bistrique unit 3 is 3 ~ 100.
The self adaptation grinding head for polishing that the present invention is provided, when being polished work, the sub- grinding head polishing portion in each bistrique unit
Can be forced into polishing face, now, each sub- bistrique will be carried out according between polishing face, with bistrique pedestal lower surface
Elastic telescopic, adaptivity movement is carried out relative to sub-base, and the bistrique unit that raising distribution is arranged at bistrique pedestal lower surface is whole
Body and the laminating degree in polishing face, improve polishing effect, it is applied to aspherical polishing, realize that efficient face shape adds
Work.
The self adaptation grinding head for polishing that the present invention is provided, can effectively improve the overall patch with aspheric surface polishing machined surface of bistrique
It is right, the aspherical pre-polish(ing) processing of big irrelevance can be adapted to, with machining accuracy is high, simple structure, the advantages of reasonable in design.
Brief description of the drawings
Fig. 1 is the structural representation of self adaptation grinding head for polishing；
Fig. 2 is the structural representation of bistrique unit；
Fig. 3 is the polycyclic same heart shaped distribution schematic diagram of bistrique unit；
Fig. 4 is bistrique unit orthogonal matrix shape distribution schematic diagram.
Specific embodiment
The present invention is further expalined with specific embodiment below, but the guarantor being not intended to limit the invention
Shield scope.
It is low with the laminating degree in polishing face in order to solve grinding head for polishing present in existing aspheric surface polishing technology, close disk
Effect is poor, the problems such as influence quality of finish, present embodiment provides a kind of self adaptation grinding head for polishing, its strong adaptability and throws
The laminating degree of light machined surface is high, concrete structure, reference can be made to Fig. 1, including：Flange pedestal 1, in the lower section of flange pedestal 1 by tight
Gu screw concentric fits have bistrique pedestal 2, the following table EDS maps of bistrique pedestal 2 are provided with bistrique unit 3, wherein, the mill
Head unit 3, referring to Fig. 1, Fig. 2, including, sub-base 31, sub- bistrique 32 and subbase set 33, one end and the bistrique pedestal of sub-base 31
2 lower surface is fixedly connected, and is internally provided with the upper and lower cavity 311 of insertion in sub-base 31；Sub- bistrique 32, it has company
Socket part and polishing portion, wherein, in cavity 311, the inwall gap with cavity 311 coordinates connecting portion, and sub- bistrique 32 is connected
Portion and the lower surface elastic abutment of bistrique pedestal 2, make sub- bistrique 32 by the elastic telescopic between bistrique pedestal 2, complete son
Bistrique 32 is moved along the cavity 311 of sub-base 31, to adapt to different polishing curved surfaces, is ground in sub-base 31 and son
First 32 outer cover can move spacing, the shifting of siding stopping bistrique 32 equipped with subbase set 33, subbase set 33 to sub- bistrique 32
Dynamic stroke.
The polishing processing of the self adaptation grinding head for polishing is that polishing face is positioned over the lower section of bistrique, each bistrique
The polishing portion of unit neutron bistrique directly connects with polishing face, and now, each sub- bistrique can pass through according to polishing face
With the elastic abutment between bistrique pedestal lower surface, elastic telescopic is completed, adaptive displacement is carried out with respect to sub-base, realize each
Sub- grinding head polishing portion fits completely with polishing face, improves and closes disk effect, improves quality of finish.
Used as the improvement of technical scheme, referring to Fig. 1, the lower surface of the bistrique pedestal 2 is cambered surface, and the cambered surface song
Rate radius is related to the best fit sphere curvature radius in polishing face, it is preferable that the following table face curvature of the bistrique pedestal 2 half
Footpath R1 is specially：R1=R-H+2mm；
Wherein, the R is the best fit sphere curvature radius in polishing face, and the H is the unloaded bistrique unit 3
Under the conditions of height.
Wherein, the radius of curvature of best fit sphere is：Based on the aspherical equation in polishing face, using least square
Method determines a sphere curvature radius R, makes the variance of deviation between the sphere and aspherical spatially each corresponding points minimum, this
When R be the radius of curvature of best fit ball；Height under the idle condition of bistrique unit 3 refers to：In the unloaded state, by subbase
Seat and the distance of bistrique pedestal lower surface connection end to sub- grinding head polishing portion end.
Used as the further improvement of technical scheme, referring to Fig. 1, Fig. 2, the end of the connecting portion of sub- bistrique 32 passes through stage clip
34 are located in the cavity 311 of the sub-base 31 with the lower surface elastic abutment of the bistrique pedestal 2, the stage clip 34, one
End offsets with the connecting portion of sub- bistrique 32, and the other end offsets with the lower surface of the bistrique pedestal 2, by the pressure in this programme
Spring realizes the elastic abutment between the connecting portion of sub- bistrique 32 and the lower surface of bistrique pedestal 2, can effectively improve sub- bistrique and is entering
Row polishing phase makes the bistrique in this programme be particularly suited for big irrelevance aspheric the stroke of sub-base resilient movement
The pre-polish(ing) processing in face.
In order to improve the cooperation stability between stage clip 34 and the connecting portion of sub- bistrique 32, it is preferable that referring to Fig. 2, in sub- bistrique
The end face of 32 connecting portions is provided with blind hole 3211, and the stage clip 34 is located at described with one end that the connecting portion of sub- bistrique 32 offsets
In blind hole 3211.
Used as the improvement of technical scheme, referring to Fig. 2, the sub- bistrique 32 includes：Piston 321, is provided with limited block
3212 coordinate with subbase set 33, i.e., when piston moves to the bottom surface that its upper limit position block covers with subbase to be contacted, piston has reached
To maximum shift value, it is not possible to continue to move out, polished die substrate 322 is fixedly connected with the lower end of piston 321, throwing
The lower surface of optical mode substrate 322 is fixedly installed polished die 323, is directly connected with polishing face by polished die 323, wherein,
The material of polished die 323 can select polyurethane or pitch, material removal efficiency higher can be obtained using polyurethane material, non-
Used after sphere milling operation, as the procedure of pre-polish(ing) first, surface quality higher can be obtained using asphalt material, as
Pre-polish(ing) second operation work is used, polished die 323 using preceding need amendment polished die shape when polished die be polyurethane material when,
Electroplated diamond grinding wheel correction of the flank shape can be used, when it is pitch to polish mold materials, can be used heat gun to soften pitch, be then pressed into
Non-spherical surface shaping to be processed.
Used as the improvement of technical scheme, referring to Fig. 3, Fig. 4, the bistrique unit 3 is in the lower surface of the bistrique pedestal 2
Polycyclic same heart shaped or orthogonal matrix shape are distributed.
The quantity of sub- bistrique unit 3 depends on processing the size of aspherical irrelevance and Grad, irrelevance and gradient
When value is bigger, the quantity of sub- bistrique unit is more, and the quantity of usual sub- bistrique unit is 3 ~ 100.
Above-mentioned embodiment highlights the difference of each embodiment, and its similar portion can be with cross-reference.
The present invention is further described with specific embodiment below.
Embodiment 1
It is a kind of self adaptation grinding head for polishing referring to Fig. 1, including uses the flange pedestal 1 and bistrique of fastening bolt concentric fits
Pedestal 2, the flange pedestal is processed by stainless steel material, and bistrique pedestal is processed by duralumin material, in bistrique pedestal 2
Following table EDS maps be provided with bistrique unit 3, while the lower surface of bistrique pedestal 2 is cambered surface, and corresponding radius of curvature R 1=R-
H+2mm, wherein, R is the best fit sphere curvature radius in polishing face, and H is the height under the idle condition of bistrique unit 3
Degree, H is specially the distance of sub-base and bistrique pedestal connection end to polished die in the present embodiment.
Referring to Fig. 2, the bistrique unit 3 includes：Sub-base 31, base sleeve 33, stage clip 34, piston 321, polished die substrate
322 and polished die 323, wherein, the limited block 3212 on piston 321 extends to its end with the elastic abutment of sub-base 31
Portion, and end face in the end is provided with blind hole 3211, it is big that the piston 321 is integrally formed one end bore, the small post of one end bore
Body, the specific assembling process of the bistrique unit is that the less one end of the bore of piston 321 is fitted into base sleeve 33 first, while
Polished die 323 is bonded in polished die substrate 322, polished die substrate 322 is then bonded to the less end of the bore of piston 321
On face, stage clip 34 is put into the blind hole 3211 of piston 321, then one end of sub-base 31 is adhered to the following table of bistrique pedestal 2
On face, last base sleeve 33 is attached in sub-base 31 by screw thread engagement sleeves, the big one end of the bore of piston 321 is located at sub-base
In 31 cavity 311, and stage clip 33 offsets with the lower surface of bistrique pedestal 2, completes the assembling of bistrique unit.
In above-mentioned bistrique unit, coordinated using gap between the inwall of piston 321 and the inner chamber 311 of sub-base 31, thus it is living
Plug 321, polished die substrate 322 and polished die 323 may occur from adapting to resilient movement in use, by the elasticity of bistrique unit
It is flexible, can improve that bistrique is overall and aspherical laminating degree, realize processing aspherical efficient face shape, in bistrique unit except
Using outside standard component, other mechanical parts can be processed stage clip using duralumin material.
Wherein, the stroke of the piston 321 may be set to 5 ~ 8mm, and 2mm, residue 3 ~ 6mm conducts can be in advance pressed into use
Springing stroke.
Claims (7)
1. a kind of self adaptation grinding head for polishing, it is characterised in that including：
Flange pedestal（1）；
Bistrique pedestal（2）, it is located at the flange pedestal（1）Lower section, and with the flange pedestal（1）Concentric fits；
Bistrique unit（3）, its distribution is arranged at the bistrique pedestal（2）Lower surface；
Wherein, the bistrique unit（3）, including,
Sub-base（31）, its one end and the bistrique pedestal（2）Lower surface be fixedly connected, and in the sub-base（31）Inside set
It is equipped with the upper and lower cavity of insertion（311）；
Sub- bistrique（32）, it has connecting portion and polishing portion, wherein, the connecting portion is in the cavity（311）It is interior, it is and described
Cavity（311）Inwall gap coordinate, and the end of the connecting portion and the bistrique pedestal（2）Lower surface elastic abutment；
Subbase set（33）, it is set in the sub-base（31）With the sub- bistrique（32）Outside, for the sub- bistrique
（32）Move spacing；
The bistrique pedestal（2）Lower surface be cambered surface, and radius of curvature and the polishing face of the cambered surface best fit
Sphere curvature radius is related；
The bistrique pedestal（2）Lower surface radius of curvature R 1 be specially：R1=R-H+2mm, wherein, the R is polishing face
Best fit sphere curvature radius, the H be the bistrique unit（3）Height under idle condition.
2. according to self adaptation grinding head for polishing described in claim 1, it is characterised in that the sub- bistrique（32）The end of connecting portion leads to
Cross stage clip（34）With the bistrique pedestal（2）Lower surface elastic abutment, the stage clip（34）Positioned at the sub-base（31）'s
Cavity（311）It is interior, its one end and the sub- bistrique（32）Connecting portion offsets, the other end and the bistrique pedestal（2）Lower surface
Offset.
3. according to self adaptation grinding head for polishing described in claim 2, it is characterised in that：The sub- bistrique（32）The end face of connecting portion sets
It is equipped with blind hole（3211）, the stage clip（34）With the sub- bistrique（32）One end that connecting portion offsets is located at the blind hole（3211）
It is interior.
4. according to self adaptation grinding head for polishing described in claim 1, it is characterised in that the sub- bistrique（32）Including：
Piston（321）, it is provided with limited block（3212）With the subbase set（33）Coordinate；
Polished die substrate（322）, its upper surface and the piston（321）End be fixedly connected；
Polished die（323）, it is fixedly installed on the polished die substrate（322）Lower surface.
5. according to self adaptation grinding head for polishing described in claim 4, it is characterised in that：The polished die（323）Material be poly- ammonia
Ester or pitch.
6. according to self adaptation grinding head for polishing described in claim 1, it is characterised in that：The bistrique unit（3）In the bistrique base
Seat（2）Lower surface be distributed in polycyclic same heart shaped or orthogonal matrix shape.
7. according to self adaptation grinding head for polishing described in claim 1, it is characterised in that：The bistrique unit（3）Quantity be 3 ~ 100
It is individual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510562614.3A CN105127889B (en) | 2015-09-07 | 2015-09-07 | A kind of self adaptation grinding head for polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510562614.3A CN105127889B (en) | 2015-09-07 | 2015-09-07 | A kind of self adaptation grinding head for polishing |
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| CN105127889A CN105127889A (en) | 2015-12-09 |
| CN105127889B true CN105127889B (en) | 2017-06-23 |
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| CN201510562614.3A Expired - Fee Related CN105127889B (en) | 2015-09-07 | 2015-09-07 | A kind of self adaptation grinding head for polishing |
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| CN105798726A (en) * | 2016-06-02 | 2016-07-27 | 张清金 | Double-stance edge grinding device for columnar stone piers |
| CN105798729A (en) * | 2016-06-02 | 2016-07-27 | 张清金 | Improved columnar stone pier edge grinding device |
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| CN108890504B (en) * | 2018-07-25 | 2023-07-14 | 浙江工业大学 | Flexible pneumatic polishing head for processing complex parts |
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| CN109894946A (en) * | 2019-04-17 | 2019-06-18 | 江苏珀然轮毂有限公司 | A kind of wheel burr polishing device |
| CN110216537B (en) * | 2019-06-06 | 2020-06-09 | 中国科学院合肥物质科学研究院 | Semi-active self-adaptive grinding device |
| CN110281145A (en) * | 2019-07-29 | 2019-09-27 | 苏州昱耀模具科技有限公司 | Grinding and polishing device bistrique |
| CN111482857B (en) * | 2020-06-01 | 2021-11-30 | 山西宝隆科技有限公司 | Surface treatment system after forming of metallurgical casting connecting piece |
| CN111958425B (en) * | 2020-08-14 | 2023-03-07 | 重庆大学 | Multi-contact profile abrasive belt grinding device |
| CN114193282B (en) * | 2021-12-31 | 2022-09-30 | 广西大学 | Outdoor farmland robot manipulator grinding device |
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