EP1251997B2 - Polishing head for a polishing machine - Google Patents

Polishing head for a polishing machine Download PDF

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Publication number
EP1251997B2
EP1251997B2 EP01909601A EP01909601A EP1251997B2 EP 1251997 B2 EP1251997 B2 EP 1251997B2 EP 01909601 A EP01909601 A EP 01909601A EP 01909601 A EP01909601 A EP 01909601A EP 1251997 B2 EP1251997 B2 EP 1251997B2
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EP
European Patent Office
Prior art keywords
polishing
drive shaft
polishing head
disc
head according
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP01909601A
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German (de)
French (fr)
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EP1251997A1 (en
EP1251997B1 (en
Inventor
Christoph KÜBLER
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Carl Zeiss Vision International GmbH
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Carl Zeiss Vision International GmbH
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Application filed by Carl Zeiss Vision International GmbH filed Critical Carl Zeiss Vision International GmbH
Priority to EP03025546A priority Critical patent/EP1386694B2/en
Publication of EP1251997A1 publication Critical patent/EP1251997A1/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00Means for securing grinding wheels on rotary arbors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a polishing head for a polishing machine. From the EP 0 567 894 A1 , from which the invention proceeds, a device for guiding a tool when polishing toric or spherical surfaces is known. The quill of this device is translationally movable by a coaxially arranged Druckstoffzylinder - and piston assembly.
  • a polishing machine for polishing spherical lens surfaces has an upper slide movable in an x-direction.
  • a tool spindle which is rotatably mounted about a vertical axis connected.
  • the tool spindle serves to receive a dressing tool.
  • workpiece spindle is provided for receiving the workpiece or the lens connected to a further carriage.
  • the workpiece spindle and the workpiece spindle with the dressing tool are arranged at a fixed distance from each other. The carriage carrying these two spindles can be moved in the z-direction.
  • a polishing machine and a method for polishing optical surfaces are known.
  • the polishing machine has a polishing head provided with an elastic membrane. By pressurizing the membrane, the application of force to the surface to be polished is regulated.
  • a disadvantage of this polishing machine that the size of the surface of the polishing head or the membrane resting on the surface to be polished depends on the pressurization.
  • the polishing head with the elastic membrane is biased by an associated spring in the direction of the surface to be polished.
  • hydraulic cylinders are provided for the provision of a tilting mobility of the elastic membrane around a point lying on the axis of rotation in the region of the flexible membrane.
  • the application of force to the surface to be polished is detected by associated sensors, rotating strips and solenoit.
  • the polishing of the optical surface in dependence on the rotational speed of the polishing head and the force acting on the surface to be polished contact pressure is controlled by pressurization.
  • a gimbal stored optics grinding or polishing tool known.
  • an alignment member is provided, which consists of elastic material. This alignment member exerts no tool lifting the tool off the spindle. It can be readily formed so that even a force the tool to the all-round joint, z. B. a ball joint, zoom, but the alignment force is so weak that the adjustment of the tool on the workpiece under the effect of the working pressure is possible.
  • the use of such a tool allows the automatic loading of an optical grinding machine, since the workpiece rigidly and axially immovable remains on the spindle and without lateral tilting a well-defined position relative to the feeder occupies.
  • a polishing machine with the polishing head in claim 11 and a method with such a polishing head in claim 12 beausprucht.
  • the polishing plate rotatably articulated to the drive shaft By the measure to connect the polishing plate rotatably articulated to the drive shaft, it is possible that the polishing plate following the surface contour rests on the surface to be machined. Due to the articulated connection of the polishing plate can perform tilting movements, so that it rests with a maximum polishing surface on the surface to be polished.
  • the non-rotatable articulated connection to connect the polishing plate via a Kugelimbusgelenk with the drive shaft.
  • this Kugelimbusgelenk it is possible to arrange the fulcrum by which the polishing plate can be pivoted in any direction as close to the surface of the polishing plate to be polished.
  • the close arrangement of the articulated connection to the polishing surface of the polishing plate has the advantage that the polishing plate can follow the surface contours responsive.
  • the articulated connection one or more locking element for securing the connection of the drive shaft and polishing head. If a ball-and-socket joint is provided as an articulated connection, it is ensured by means of the latching element that the ball-and-cage head can not slip out of the associated recess. As a result, the polishing plate can be removed without problems from the surface to be polished. By ensured by the locking element solvability of the compound also different polishing plates can be easily replaced with each other.
  • the polishing head is associated with a pressure chamber wherein a pressurization of the pressure chamber results in a translational movement of the polishing plate along a center axis of the polishing head. If the polishing plate is located on a surface to be polished, the result of pressurization is an increased polishing pressure.
  • one of the pressure chamber associated piston with the drive shaft is in operative connection, so that a pressurization of the pressure chamber is transmitted via the drive shaft to the polishing plate.
  • the drive shaft is driven by means of a coaxially arranged hollow cylinder, in which the drive shaft is rotatably mounted, via this hollow cylinder.
  • a positive connection has proved to be advantageous.
  • the drive shaft in the hollow cylinder is mounted by means of bearing elements, namely a rolling bearing or a ball bearing translatorily easily movable.
  • the in FIG. 1 shown polishing head (1) has a polishing plate (3) with a polishing pad (5).
  • the polishing pad (5) rests on a surface (41) of a workpiece (39) to be polished.
  • the polishing plate 3 is received via the articulated connection to a drive shaft (7).
  • a Kugelimbusgelenk is provided for this non-rotatable articulated connection.
  • the drive shaft (7) is on the side facing the polishing plate end provided with a Kugelimbuskopf (19) which engages in a in the polishing plate (3) formed recess (13).
  • a locking element for example, a spring element or spring pin on the polishing plate, which protrudes into a recess on the ball head in, may be provided.
  • the Kugelimbuskopf (19) is also possible to form the Kugelimbuskopf (19) on the polishing plate; In this case, then in the drive shaft (7) to provide a recess for rotationally secure articulated receiving the Kugelimbuskopfes.
  • the drive shaft (7) is translationally displaceable via bearing element (23) and non-rotatably mounted in a hollow cylinder (49).
  • the hollow cylinder (49) is rotationally driven via a drive of the polishing machine, not shown, wherein the rotational movement due to the rotationally fixed connection by the bearing element (23) is completely transferred to the drive shaft (7) for the polishing head.
  • a hydraulic or pneumatic system On the side remote from the polishing head of the drive shaft (7) in the hollow cylinder (49) is a hydraulic or pneumatic system, which serves to load the polishing head with the required polishing pressure provided.
  • This has a pressure chamber cylinder (31) with a translationally displaceable recorded therein piston (33).
  • piston (33) To decouple the piston (33) from the rotational movement of the drive shaft (7) and the hollow cylinder pivot bearing between the pressure chamber cylinder (31) and the hollow cylinder (49) and between the piston (33) driven Pleul (32) and the drive shaft (7 ) be provided.
  • the pressure chamber (29) formed in the pressure chamber cylinder (31) is assigned a pressure supply (35) with a pressure control valve (37) and a pressure reservoir (36).
  • the drive shaft (7) has for this purpose a non-rotationally symmetrical outer profile (43), preferably a polygonal profile.
  • the positive engagement between the outer profile (43) of the drive shaft (7) and the inner wall of the hollow cylinder is achieved by rollers or rollers (25) which are received in the bearing element (23) symmetrically to the outer profile of the drive shaft (7) and on the outer profile ( 43) of the drive shaft.
  • the axes of rotation of the rollers or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).
  • the rolling bearing of the drive shaft (7) in the hollow cylinder (49) can also be a ball bearing, as in FIG. 4 represented, be provided.
  • the drive axle has a non-rotationally symmetrical external profile, in particular a polygonal profile, at least in a region corresponding to the bearing
  • the polishing head whose diameter is smaller than the diameter of the surface to be polished, is moved in a pivoting movement in the radial direction over the optical surface (41) to be polished. Both the workpiece (39) and the polishing plate are driven at almost the same speed in the same direction.
  • the rotational speeds of the polishing plate or the rotational speed of the workpiece in particular in dependence on the radial position of the polishing plate to change. This speed change has a positive influence on a constant polishing removal.
  • the pressure fluctuations are kept very small, so that the polishing plate rests with constant force on the optical surface to be polished.
  • the pressure control valve also contributes to the compensation of pressure fluctuations.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention relates to a polishing head for a polishing machine, especially for polishing optical surfaces. The inventive polishing head comprises a polishing plate that is linked with a rotation-driven primary shaft. Said polishing plate (7) is hinged on the primary shaft (7) so as not to rotate. The hinged, rotationally fixed connection can be established by means of a hexagonal ball joint. Said hinged connection allows the polishing plate to rotate and simultaneously follow the surface (41) of the work piece (39) to be polished so that the polishing lining (5) always rests on the largest area possible of the surface (41).

Description

Die Erfindung betrifft einen Polierkopf für eine Poliermaschine. Aus der EP 0 567 894 A1 , von der die Erfindung ausgeht, ist eine Vorrichtung zur Führung eines Werkzeugs beim Polieren torischer oder sphärischer Flächen bekannt. Die Pinole dieser Vorrichtung ist durch eine koaxial angeordnete Druckmittelzylinder - und Kolbenanordnung translatorisch bewegbar.The invention relates to a polishing head for a polishing machine. From the EP 0 567 894 A1 , from which the invention proceeds, a device for guiding a tool when polishing toric or spherical surfaces is known. The quill of this device is translationally movable by a coaxially arranged Druckmittelzylinder - and piston assembly.

Aus der EP 727 280 B1 ist eine Poliermaschine zum Polieren sphärischer Linsenoberflächen bekannt. Diese Poliermaschine weist einen oberen in einer x-Richtung verfahrbaren Schlitten auf. Mit diesem Schlitten ist eine Werkzeugspindel, die um eine vertikale Achse drehbar gelagert ist, verbunden. Die Werkzeugspindel dient dabei zur Aufnahme eines Abrichtwerkzeuges. Zur Aufnahme des Werkstückes bzw. der Linse ist eine mit einem weiteren Schlitten verbundene Werkstückspindel vorgesehen. Die Werkstückspindel und die Werkstückspindel mit dem Abrichtwerkzeug sind in einem festen Abstand zueinander angeordnet. Der diese beiden Spindeln tragende Schlitten ist in z-Richtung verfahrbar.From the EP 727 280 B1 For example, a polishing machine for polishing spherical lens surfaces is known. This polishing machine has an upper slide movable in an x-direction. With this carriage, a tool spindle, which is rotatably mounted about a vertical axis connected. The tool spindle serves to receive a dressing tool. For receiving the workpiece or the lens connected to a further carriage workpiece spindle is provided. The workpiece spindle and the workpiece spindle with the dressing tool are arranged at a fixed distance from each other. The carriage carrying these two spindles can be moved in the z-direction.

Aus der WO 97/00155 ist eine Poliermaschine und ein Verfahren zum Polieren von optischen Flächen bekannt. Die Poliermaschine weist eine Polierkopf auf, der mit einem elastische Membran versehen ist. Durch Druckbeaufschlagung der Membran wird die Kraftbeaufschlagung der zu polierenden Fläche geregelt. Nachteilig ist bei dieser Poliermaschine, dass die Größe der auf der zu polierenden Fläche aufliegende Fläche des Polierkopfes bzw. der Membran von der Druckbeaufschlagung abhängt. Der Polierkopf mit der elastischem Membran wird durch eine zugeordnete Feder in Richtung der zu polierenden Fläche vorgespannt. Für die Bereitstellung einer Kippbeweglichkeit der elastischen Membran, um eine auf der Drehachse im Bereich der flexiblen Membran liegenden Punkt, sind Hydraulikzylinder vorgesehen. Die Kraftbeaufschlagung der zu polierenden Fläche wird durch zugeordnete Sensoren, Drehstreifen und Solenoit, detektiert.From the WO 97/00155 For example, a polishing machine and a method for polishing optical surfaces are known. The polishing machine has a polishing head provided with an elastic membrane. By pressurizing the membrane, the application of force to the surface to be polished is regulated. A disadvantage of this polishing machine, that the size of the surface of the polishing head or the membrane resting on the surface to be polished depends on the pressurization. The polishing head with the elastic membrane is biased by an associated spring in the direction of the surface to be polished. For the provision of a tilting mobility of the elastic membrane around a point lying on the axis of rotation in the region of the flexible membrane, hydraulic cylinders are provided. The application of force to the surface to be polished is detected by associated sensors, rotating strips and solenoit.

In dem aus dieser Schrift bekannten Verfahren wird das Polieren der optischen Oberfläche in Abhängigkeit von der Drehzahl des polierenden Kopfes und der auf die zu polierende Oberfläche wirkenden Anpresskraft durch Druckbeaufschlagung gesteuert.In the method known from this document, the polishing of the optical surface in dependence on the rotational speed of the polishing head and the force acting on the surface to be polished contact pressure is controlled by pressurization.

Aus der DE 1 239 211 B ist ein kardanisch gelagertes Optik- Schleif- oder Polierwerkzeug bekannt. Zur Ausrichtung des Poliertellers ist ein Ausrichtglied vorgesehen, das aus elastischem Werkstoff besteht. Dieses Ausrichtglied übt keine das Werkzeug von der Spindel abhebende Kraft aus. Es kann ohne weiteres so ausgebildet werden, dass sogar eine Kraft das Werkzeug an das allseitig bewegliche Gelenk, z. B. ein Kugelgelenk, heranzieht, wobei jedoch die Ausrichtkraft so schwach ist, dass die Einstellung des Werkzeuges auf das Werkstück unter der Wirkung des Arbeitsdruckes möglich ist. Die Verwendung eines solchen Werkzeuges gestattet das automatische Beschicken einer Optik- Schleifmaschine, da das Werkstück starr und axial unbeweglich auf der Spindel verbleibt und ohne seitliches Wegkippen eine genau definierte Lage relativ zu der Beschickungsvorrichtung, einnimmt.From the DE 1 239 211 B is a gimbal stored optics grinding or polishing tool known. For alignment of the polishing plate an alignment member is provided, which consists of elastic material. This alignment member exerts no tool lifting the tool off the spindle. It can be readily formed so that even a force the tool to the all-round joint, z. B. a ball joint, zoom, but the alignment force is so weak that the adjustment of the tool on the workpiece under the effect of the working pressure is possible. The use of such a tool allows the automatic loading of an optical grinding machine, since the workpiece rigidly and axially immovable remains on the spindle and without lateral tilting a well-defined position relative to the feeder occupies.

Es ist Aufgabe der Erfindung einen Polierkopf zum Polieren einer Freiformfläche bereitzustellen, dessen Antriebswelle derart leichtgängig translatorisch bewegbar ist, dass die eingeleitete translatorische Bewegung bzw. Kraftbeaufschlagung nahezu vollständig auf den Polierteller übertragen wird.It is an object of the invention to provide a polishing head for polishing a freeform surface, the drive shaft is so easily translationally movable that the initiated translational movement or force application is almost completely transferred to the polishing plate.

Die Aufgabe der Erfindung wird durch die im Patentanspruch 1 gegebenen Merkmale gelöst.The object of the invention is achieved by the given in claim 1 features.

Ferner wird eine Poliermaschine mit dem Polierkopf in Anspruch 11 sowie ein Verfahren mit einem derartigen Polierkopf in Anspruch 12 beausprucht.Furthermore, a polishing machine with the polishing head in claim 11 and a method with such a polishing head in claim 12 beausprucht.

Durch die Maßnahme den Polierteller drehfest gelenkig mit der Antriebswelle zu verbinden ist es möglich, daß der Polierteller der Oberflächenkontur folgend auf der zu bearbeitenden Oberfläche aufliegt. Durch die gelenkige Verbindung kann der Polierteller Kippbewegungen ausführen, so daß er mit einer maximalen Polierfläche auf der zu polierenden Oberfläche aufliegt.By the measure to connect the polishing plate rotatably articulated to the drive shaft, it is possible that the polishing plate following the surface contour rests on the surface to be machined. Due to the articulated connection of the polishing plate can perform tilting movements, so that it rests with a maximum polishing surface on the surface to be polished.

Zur Übertragung der Drehbewegung der Antriebswelle auf den Polierteller hat es sich als vorteilhaft herausgestellt, den Polierteller mit der Antriebswelle mittels Formschluß zu verbinden, so daß die Drehbewegung der Antriebswelle aufgrund des Formschlusses auf den Polierteller übertragen wird.To transmit the rotational movement of the drive shaft to the polishing plate, it has been found to be advantageous to connect the polishing plate with the drive shaft by means of positive engagement, so that the rotational movement of the drive shaft is transmitted due to the positive connection to the polishing plate.

Es hat sich als vorteilhaft herausgestellt für die drehfeste gelenkige Verbindung den Polierteller über ein Kugelimbusgelenk mit der Antriebswelle zu verbinden. Durch dieses Kugelimbusgelenk ist es möglich, den Drehpunkt, um den der Polierteller in beliebige Richtungen geschwenkt werden kann, möglichst nah an der zu polierenden Oberfläche des Poliertellers anzuordnen. Die nahe Anordnung der gelenkigen Verbindung zur polierenden Oberfläche des Poliertellers hat den Vorteil, daß der Polierteller den Oberflächenkonturen reaktionsschnell folgen kann.It has proven to be advantageous for the non-rotatable articulated connection to connect the polishing plate via a Kugelimbusgelenk with the drive shaft. Through this Kugelimbusgelenk it is possible to arrange the fulcrum by which the polishing plate can be pivoted in any direction as close to the surface of the polishing plate to be polished. The close arrangement of the articulated connection to the polishing surface of the polishing plate has the advantage that the polishing plate can follow the surface contours responsive.

Es hat sich als vorteilhaft herausgestellt der gelenkigen Verbindung ein oder mehrere Rastelement zur Sicherung der Verbindung von Antriebswelle und Polierkopf zuzuordnen. Ist als gelenkige Verbindung ein Kugelimbusgelenk vorgesehen, so wird mittels des Rastelementes sichergestellt, daß der Kugelimbuskopf aus der zugeordneten Ausnehmung nicht herausrutschen kann. Dadurch kann der Polierteller ohne Probleme von der zu polierenden Fläche entfernt werden. Durch die durch das Rastelement gewährleistete Lösbarkeit der Verbindung können außerdem verschiedene Polierteller leicht gegeneinander ausgetauscht werden.It has proven to be advantageous to assign the articulated connection one or more locking element for securing the connection of the drive shaft and polishing head. If a ball-and-socket joint is provided as an articulated connection, it is ensured by means of the latching element that the ball-and-cage head can not slip out of the associated recess. As a result, the polishing plate can be removed without problems from the surface to be polished. By ensured by the locking element solvability of the compound also different polishing plates can be easily replaced with each other.

Dem Polierkopf wird eine Druckkammer zugeordnet wobei aus einer Druckbeaufschlagung der Druckkammer eine translatorische Bewegung des Poliertellers entlang einer Mittenachse des Polierkopfes resultiert. Liegt der Polierteller auf einer zu polierenden Oberfläche auf, so resultiert aus einer Druckbeaufschlagung ein erhöhter Polierdruck.The polishing head is associated with a pressure chamber wherein a pressurization of the pressure chamber results in a translational movement of the polishing plate along a center axis of the polishing head. If the polishing plate is located on a surface to be polished, the result of pressurization is an increased polishing pressure.

Es hat sich als vorteilhaft herausgestellt, wenn ein der Druckkammer zugeordneter Kolben mit der Antriebswelle in Wirkverbindung steht, so daß eine Druckbeaufschlagung der Druckkammer über die Antriebswelle auf den Polierteller übertragen wird.It has proven to be advantageous if one of the pressure chamber associated piston with the drive shaft is in operative connection, so that a pressurization of the pressure chamber is transmitted via the drive shaft to the polishing plate.

Die Antriebswelle wird mittels eines koaxial angeordneten Hohlzylinders, in dem die Antriebswelle drehfest gelagert ist, über diesen Hohlzylinder angetrieben. Für die Übertragung der Drehbewegung hat sich eine formschlüssige Verbindung als vorteilhaft erwiesen.The drive shaft is driven by means of a coaxially arranged hollow cylinder, in which the drive shaft is rotatably mounted, via this hollow cylinder. For the transmission of the rotational movement, a positive connection has proved to be advantageous.

Die Antriebswelle in dem Hohlzylinder wird mittels Lagerelementen, nämlich einer Wälzlagerung oder einer Kugellagerung translatorisch leicht bewegbar gelagert. Durch diese Lagerung wird gewährleistet, daß bei Druckbeaufschlagung der Druckkammer sich die Antriebswelle in dem Hohlzylinder leichtgängig translatorisch bewegen kann und somit die eingeleitete translatorische Bewegung bzw. Kraftbeaufschlagung nahezu vollständig auf den Polierteller übertragen wird.The drive shaft in the hollow cylinder is mounted by means of bearing elements, namely a rolling bearing or a ball bearing translatorily easily movable. By this storage ensures that when pressure is applied to the pressure chamber, the drive shaft in the hollow cylinder can move smoothly translational and thus the initiated translational movement or force application is almost completely transferred to the polishing plate.

Weitere vorteilhafte Maßnahmen sind in weiteren abhängigen Ansprüchen beschrieben.Further advantageous measures are described in further dependent claims.

Anhand eines Ausführungsbeispieles wird die Erfindung im folgenden näher beschrieben.Reference to an exemplary embodiment, the invention will be described in more detail below.

Es zeigt:

Figur 1
eine schematische Skizze des Polierkopfes in einem dessen Mittenachse enthaltenen Schnittes;
Figur 2
einen Schnitt entlang der Ebene II - II in Figur 1;
Figur 3
einen Schnitt entlang der Ebene III - III in Figur 1; und
Figur 4
Schnitt entlang der Ebene III - III bei einem alternativen Ausführungsbeispiel.
It shows:
FIG. 1
a schematic sketch of the polishing head in a section containing its center axis;
FIG. 2
a section along the plane II - II in FIG. 1 ;
FIG. 3
a section along the plane III - III in FIG. 1 ; and
FIG. 4
Section along the plane III-III in an alternative embodiment.

Der in Figur 1 dargestellte Polierkopf (1) weist einen Polierteller (3) mit einem Polierbelag (5) auf. Der Polierbelag (5) liegt auf einer zu polierenden Oberfläche (41) eines Werkstückes (39) auf.The in FIG. 1 shown polishing head (1) has a polishing plate (3) with a polishing pad (5). The polishing pad (5) rests on a surface (41) of a workpiece (39) to be polished.

Der Polierteller 3 ist über die gelenkige Verbindung an einer Antriebswelle (7) aufgenommen. Im dargestellten Ausführungsbeispiel ist für diese drehfeste gelenkige Verbindung ein Kugelimbusgelenk vorgesehen. Die Antriebswelle (7) ist dazu auf der dem Polierteller zugewandten Seite endseitig mit einem Kugelimbuskopf (19) versehen, der in eine im Polierteller (3) ausgebildete Ausnehmung (13) eingreift.The polishing plate 3 is received via the articulated connection to a drive shaft (7). In the illustrated embodiment, a Kugelimbusgelenk is provided for this non-rotatable articulated connection. The drive shaft (7) is on the side facing the polishing plate end provided with a Kugelimbuskopf (19) which engages in a in the polishing plate (3) formed recess (13).

Zur Sicherung ist die Verbindung zwischen dem Kugelimbuskopf (19) und dem Polierteller (3) mittels eines Rastelementes (15) gesichert ist. Als Rastelement können beispielsweise ein Federelement bzw. Federstift am Polierteller, der in eine Ausnehmung am Kugelimbuskopf hinein ragt, vorgesehen sein.To secure the connection between the ball cam head (19) and the polishing plate (3) by means of a locking element (15) is secured. As a latching element, for example, a spring element or spring pin on the polishing plate, which protrudes into a recess on the ball head in, may be provided.

Es ist auch möglich, den Kugelimbuskopf (19) an dem Polierteller auszubilden; in diesem Fall ist dann in der Antriebswelle (7) eine Ausnehmung zur drehsicheren gelenkigen Aufnahme des Kugelimbuskopfes vorzusehen. Allerdings ist in diesem Fall der Abstand zwischen der Gelenkstelle - also dem Punkt, um den eine Kippung des Poliertellers relativ zur starren Antriebswelle erfolgen kann - und der zu polierenden Fläche (41) größer.It is also possible to form the Kugelimbuskopf (19) on the polishing plate; In this case, then in the drive shaft (7) to provide a recess for rotationally secure articulated receiving the Kugelimbuskopfes. However, in this case, the distance between the hinge point - ie the point by which a tilting of the polishing plate relative to the rigid drive shaft can take place - and the surface to be polished (41) larger.

Die Antriebswelle (7) ist über Lagerelement (23) translatorisch verschiebbar und drehfest in einem Hohlzylinder (49) gelagert. Der Hohlzylinder (49) wird rotatorisch angetrieben über einen nicht dargestellten Antrieb der Poliermaschine, wobei die Drehbewegung aufgrund der drehfesten Verbindung durch das Lagerelement (23) vollständig auf die Antriebswelle (7) für den Polierkopf übertragen wird.The drive shaft (7) is translationally displaceable via bearing element (23) and non-rotatably mounted in a hollow cylinder (49). The hollow cylinder (49) is rotationally driven via a drive of the polishing machine, not shown, wherein the rotational movement due to the rotationally fixed connection by the bearing element (23) is completely transferred to the drive shaft (7) for the polishing head.

Auf der vom Polierkopf abgewandten Seite der Antriebswelle (7) ist in dem Hohlzylinder (49) ein Hydraulik- oder Pneumatiksystem, das zur Beaufschlagung des Polierkopfes mit dem erforderlichen Polierdruck dient, vorgesehen. Dieses weist einen Druckkammerzylinder (31) mit einem darin translatorisch verschiebar aufgenommenen Kolben (33) auf. Zur Entkoppelung des Kolbens (33) von der Drehbewegung der Antriebswelle (7) und des Hohlzylinders können Drehlager zwischen dem Druckkammerzylinder (31) und dem Hohlzylinder (49) sowie zwischen dem vom Kolben (33) angetriebenen Pleul (32) und der Antriebswelle (7) vorgesehen sein. Zur Druckbeaufschlagung des Kolbens (33) ist der im Druckkammerzylinder (31) gebildeten Druckkammer (29) eine Druckversorgung (35) mit einem Druckregelventil (37) und einem Druckreservoir (36) zugeordnet. Durch Druckbeaufschlagung der Druckkammer (29) wird eine entlang einer Mittenachse (2) des Polierkopfes (1) gerichteten Kraft auf den Kolben (33) eingeleitet. Aus dieser Kraft resultiert eine translatorische Bewegung des Poliertellers bzw. eine Erhöhung der wirkenden Polierkraft, sofern der Polierbelag (5)auf einer zu polierenden optischen Fläche (41) eines Werkstückes (39) aufliegt.On the side remote from the polishing head of the drive shaft (7) in the hollow cylinder (49) is a hydraulic or pneumatic system, which serves to load the polishing head with the required polishing pressure provided. This has a pressure chamber cylinder (31) with a translationally displaceable recorded therein piston (33). To decouple the piston (33) from the rotational movement of the drive shaft (7) and the hollow cylinder pivot bearing between the pressure chamber cylinder (31) and the hollow cylinder (49) and between the piston (33) driven Pleul (32) and the drive shaft (7 ) be provided. For pressurizing the piston (33), the pressure chamber (29) formed in the pressure chamber cylinder (31) is assigned a pressure supply (35) with a pressure control valve (37) and a pressure reservoir (36). By applying pressure to the pressure chamber (29), a force directed along a center axis (2) of the polishing head (1) is introduced to the piston (33). This force results in a translatory movement of the polishing plate or an increase in the effective polishing force, provided that the polishing pad (5) rests on an optical surface (41) of a workpiece (39) to be polished.

Die drehfeste translatorisch bewegbare Kopplung zwischen dem Hohlzylinder (49) und der Antriebswelle (7) erfolgt über ein Wälzlager (23). Die Antriebswelle (7) weist dazu ein nicht rotationssymmetrisches Außenprofil (43), vorzugsweise ein Mehrkantprofil auf. Der Formschluß zwischen dem Außenprofil (43) der Antriebswelle (7) und der Innenwand des Hohlzylinders wird über Rollen oder Walzen (25) erreicht, die in dem Lagerelement (23) symmetrisch zum Außenprofil der Antriebswelle (7) aufgenommen sind und an dem Außenprofil (43) der Antriebswelle abrollen. Die Drehachsen der Rollen oder Walzen sind dabei senkrecht zur Rotationachse der Antriebswelle (7) ausgerichtet.The rotationally fixed translationally movable coupling between the hollow cylinder (49) and the drive shaft (7) via a rolling bearing (23). The drive shaft (7) has for this purpose a non-rotationally symmetrical outer profile (43), preferably a polygonal profile. The positive engagement between the outer profile (43) of the drive shaft (7) and the inner wall of the hollow cylinder is achieved by rollers or rollers (25) which are received in the bearing element (23) symmetrically to the outer profile of the drive shaft (7) and on the outer profile ( 43) of the drive shaft. The axes of rotation of the rollers or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).

Anstelle der Wälzlagerung der Antriebswelle (7) in dem Hohlzylinder (49) kann auch eine Kugellagerung, wie in Figur 4 dargestellt, vorgesehen sein. Zur drehfesten translatorisch verschiebbaren Verbindung sind die Kugeln (53) in Längsnuten (51) des Hohlzylinders (49) und weiteren Längsnuten (55) der Antriebswelle (7) gelagert, wobei sich die Längsnuten parallel zur Rotationsachse der Antriebswelle (7) erstrecken. Auch in diesem Fall weist die Antriebsachse wenigstens in einem der Lagerung entsprechenden Bereich ein nichtrotationssysmmetrisches Außenprofil, insbesondere ein Mehrkantprofil aufInstead of the rolling bearing of the drive shaft (7) in the hollow cylinder (49) can also be a ball bearing, as in FIG. 4 represented, be provided. For rotationally fixed translationally displaceable connection, the balls (53) in longitudinal grooves (51) of the hollow cylinder (49) and further longitudinal grooves (55) of the drive shaft (7), wherein the longitudinal grooves extend parallel to the axis of rotation of the drive shaft (7). In this case as well, the drive axle has a non-rotationally symmetrical external profile, in particular a polygonal profile, at least in a region corresponding to the bearing

Im folgenden wird das Polierverfahren näher beschrieben. Zum Polieren wird der Polierkopf, dessen Durchmesser kleiner ist als der Durchmesser der zu polierenden Fläche, in einer Schwenkbewegung in radialer Richtung über die zu polierende optische Fläche (41) bewegt. Sowohl das Werkstück (39) als auch der Polierteller werden dabei mit nahezu gleicher Drehzahl in identischer Richtung angetrieben. Bei Bewegung des Poliertellers über die zu polierende optische Fläche (41) kann vorgesehen sein, daß die Drehzahlen des Poliertellers oder die Drehzahl des Werkstückes, insbesondere in Abhängigkeit von der radialen Position des Poliertellers, zu verändern. Diese Drehzahländerung hat einen positiven Einfluß auf einen konstanten Polierabtrag.In the following, the polishing method will be described in more detail. For polishing, the polishing head, whose diameter is smaller than the diameter of the surface to be polished, is moved in a pivoting movement in the radial direction over the optical surface (41) to be polished. Both the workpiece (39) and the polishing plate are driven at almost the same speed in the same direction. When moving the polishing plate on the optical surface to be polished (41) can be provided that the rotational speeds of the polishing plate or the rotational speed of the workpiece, in particular in dependence on the radial position of the polishing plate to change. This speed change has a positive influence on a constant polishing removal.

Durch die Wahl eines sehr großen Speichervolumens (36) im Verhältnis zum sich verändernden Volumen des Kolbens (31), werden die Druckschwankungen sehr klein gehalten, so daß der Polierteller mit konstanter Kraft auf der zu polierenden optischen Fläche aufliegt. Das Druckregelventil trägt auch noch zum Ausgleich von Druckschwankungen bei.By choosing a very large storage volume (36) in relation to the changing volume of the piston (31), the pressure fluctuations are kept very small, so that the polishing plate rests with constant force on the optical surface to be polished. The pressure control valve also contributes to the compensation of pressure fluctuations.

Durch die beschriebene Anordnung in Verbindung mit einer Poliermaschine nach dem Stand der Technik sind insbesondere nicht rotationssymmetrische optische Oberflächen (41) polierbar, wobei der Polierabtrag über die gesamte optische Fläche konstant ist. Für den gleichmäßigen Polierabtrag ist es erforderlich, daß der Polierbelag des Poliertellers (3) möglichst großflächig auf der zu polierenden optischen Fläche (41) aufliegt. Dies wird insbesondere dadurch gewährleistet, daß durch die drehfeste gelenkige Verbindung zwischen dem Polierteller und der Antriebswelle (7) der Polierteller um einen auf der Mittenachse (2) des Polierkopfes liegenden Punkt in beliebige Richtungen gekippt werden kann und die Ausrichtung des Poliertellers dadurch der Oberflächenkontur der zu polierenden Fläche (41) folgen kann.By the described arrangement in connection with a polishing machine according to the prior art in particular non-rotationally symmetrical optical surfaces (41) are polishable, wherein the polishing removal over the entire optical surface is constant. For the uniform polishing removal, it is necessary that the polishing pad of the polishing plate (3) rests as large as possible on the optical surface to be polished (41). This is ensured in particular by the fact that the polishing plate can be tilted about an on the center axis (2) of the polishing head point in any directions by the rotationally fixed articulated connection between the polishing plate and the drive shaft (7) and the orientation of the polishing plate thereby the surface contour of to be polished surface (41) can follow.

Bezugszeichenliste:LIST OF REFERENCE NUMBERS

11
Polierkopfpolishing head
22
Mittenachsemid-axis
33
Poliertellerpolishing plate
55
Polierbelag (∼ Belag)Polishing coating (~ coating)
77
Antriebswelledrive shaft
99
gelenkige Verbindungarticulated connection
1313
Ausnehmung im PoliertellerRecess in the polishing plate
1515
Rastelementlocking element
1919
Kugelimbuskopfball head
2020
Ausnehmungrecess
2323
Lagerelementebearing elements
2525
Walzen oder RollenRollers or rollers
2929
Druckkammerpressure chamber
3131
DruckkammerzylinderPressure chamber cylinder
3232
Pleuelpleuel
3333
Kolbenpiston
3535
Druckversorgungpressure supply
3636
Reservoirreservoir
3737
DruckregelventilPressure control valve
3939
Werkstückworkpiece
4141
Optische FlächeOptical surface
4343
Außenprofilouter profile
4949
Hohlzylinderhollow cylinder
5151
Längsnutenlongitudinal grooves
5353
Kugelnroll
5555
Längsnut in AntriebswelleLongitudinal groove in drive shaft

Claims (16)

  1. Polishing head, for polishing optical freeform surfaces, having a polishing disc which is connected to a drive shaft which can be rotationally driven, and the polishing disc (3) is connected to the drive shaft (7) in an articulated and rotationally locked manner, characterized in that a pressure chamber (29) is provided, a translatory movement of the polishing disc (3) along a centre axis (2) of the polishing head resulting from pressurizing of the pressure chamber (29), the drive shaft (7) being mounted in a driven hollow cylinder (49) in such a way as to be rotationally locked and displaceable in a translatory manner along the centre axis (2) of the polishing head and the drive shaft (7) having an outer profile (43) which is non-rotationally symmetrical at least in one section, the outer profile (43) being connected to the hollow cylinder in a rotationally locked manner via a rolling-contact bearing arrangement (23, 25) or the outer profile (43) having longitudinal grooves (51), in which balls (53) are arranged, via which balls (53) the drive shaft (7) is connected to the hollow cylinder (49), which is provided on the inside with longitudinal grooves (51) formed in the opposite direction.
  2. Polishing head according to Claim 1, characterized in that a rotary movement of the drive shaft (7) is transmitted to the polishing disc (3) by means of positive locking.
  3. Polishing head according to Claim 1 or 2, characterized in that the polishing disc (3) is mounted on the drive shaft (7) in such a way as to be tiltable about a point lying on the centre axis (2).
  4. Polishing head according to one of the preceding claims, characterized in that the positive locking for transmitting the rotary movement of the drive shaft (7) to the polishing disc (3) is produced in the articulated connection.
  5. Polishing head according to Claim 5, characterized in that a ball socket joint is provided as articulated connection.
  6. Polishing head according to at least one of the preceding claims, characterized in that a catch element (15) is provided for securing the articulated connection of polishing disc (3) and drive shaft (7).
  7. Polishing head according to at least one of the preceding claims, characterized in that the pressure chamber (29) comprises a pressure-chamber cylinder (31), in which a piston (33) is arranged such as to be movable in a translatory manner.
  8. Polishing head according to Claim 10, characterized in that the piston (33) is in operative connection with the drive shaft (7).
  9. Polishing head according to at least one of the preceding claims, characterized in that the drive shaft (7) is mounted in such a way as to be rotationally locked and displaceable in a translatory manner along a centre axis (2) of the polishing head and is connected to a rotationally driven piston in a rotationally locked manner.
  10. Polishing head according to at least one of the preceding claims, characterized in that the outer profile (43) is designed in the form of a polygonal profile.
  11. Polishing machine having a polishing head according to at least one of the preceding claims.
  12. Method of polishing a non-centrosymmetric freeform surface with a polishing machine according to Claim 11, the polishing disc (3) being rotationally driven in the same direction of rotation as the optical surface to be polished.
  13. Method according to Claim 12, characterized in that the body (39) to be treated is driven at approximately the same rotational frequency as the polishing disc (3).
  14. Method according to Claim 13, characterized in that the rotary disc (3) performs a radial movement relative to the body (39) to be treated.
  15. Method according to Claim 14, characterized in that the rotational frequency of the rotary disc (3) or of the surface (41) to be polished is varied as a function of the radial position of the rotary disc (3).
  16. Method according to at least one of Claims 12 to 15, characterized in that the pressure in the chamber (29) is controlled as a function of the surface contour of the optical surface (41), so that the rotary disc resting on the optical surface (41) exerts a predetermined constant polishing pressure on the latter.
EP01909601A 2000-02-03 2001-01-11 Polishing head for a polishing machine Expired - Lifetime EP1251997B2 (en)

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DE10004455 2000-02-03
PCT/EP2001/000253 WO2001056740A1 (en) 2000-02-03 2001-01-11 Polishing head for a polishing machine

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DE10100860A1 (en) 2001-08-23
EP1251997A1 (en) 2002-10-30
JP4945771B2 (en) 2012-06-06
US20030045211A1 (en) 2003-03-06
US8011996B2 (en) 2011-09-06
EP1386694B1 (en) 2009-05-20
TW558477B (en) 2003-10-21
EP1386694B2 (en) 2013-01-09
DE50114907D1 (en) 2009-07-02
EP1386694A1 (en) 2004-02-04
EP1251997B1 (en) 2004-04-14
US7588480B2 (en) 2009-09-15
DE50101982D1 (en) 2004-05-19
US20080020691A1 (en) 2008-01-24
WO2001056740A1 (en) 2001-08-09
US20050037695A1 (en) 2005-02-17
AU2001237285A1 (en) 2001-08-14
JP2003525756A (en) 2003-09-02

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