JP2938593B2 - Polishing tool holding device and polishing head provided with the polishing tool holding device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing tool holding device used for a polishing device for polishing an optical element such as a mirror and a lens, and a polishing head provided with the polishing tool holding device.

[0002]

2. Description of the Related Art An example of a conventional polishing tool holding device for holding a polishing tool will be described with reference to FIG.

[0003] The polishing tool 82 has a mirror on the lower surface in the figure,
A polishing surface 82a for polishing a workpiece 87 such as a lens is provided, and an upper portion thereof is held by a tool holding portion 81 of a polishing tool holding device 80. A convex spherical surface 81b is formed on the illustrated upper surface of the tool holding portion 81.

On the other hand, a concave spherical surface 83b corresponding to the convex spherical surface 81b is formed at the illustrated lower end of the support portion 83, and the convex spherical surface 81b and the concave spherical surface 83b are separated from each other with an appropriate gap. The periphery of the space sandwiched between the convex spherical surface 81b and the concave spherical surface 83b is sealed by rubber boots 85 that are in close contact with the tool holding portion 81 and the support portion 83, respectively.

The concave spherical surface 83b is opened with a plurality of fluid passages 83a communicating with a fluid supply source (not shown) via a slip ring 84, respectively. The fluid pressurized in the space sandwiched between the fluid supply source and the space fills the space.

The disk 86 to which the workpiece 87 is fixed is rotated in the direction of arrow A.

During polishing, the support portion 83 rotates in the direction of arrow B and reciprocates in the direction of arrow C (hereinafter referred to as "oscillation").
That. The rotational motion and the swinging motion are transmitted to the tool holding portion 81 via the rubber boot 85, and the tool holding portion 8 is moved.
The polishing tool 82 held at 1 rotates in the direction of arrow B and swings in the direction of arrow C. Further, a pressing force is applied to the support portion 83 downward in the figure, and the pressing force is applied to the tool holding portion 81 via a fluid filling a space sandwiched between the convex spherical surface 81b and the concave spherical surface 83b, The polishing surface 82a of the polishing tool 82 is pressed against the workpiece 87. At this time, the disk 86 is rotating in the direction of arrow A.

Therefore, at the time of the polishing, the resultant force of the rocking force acting in the direction of arrow C and the pressing force (hereinafter referred to as "processing force")
That. ) Is applied to the tool holding portion 81, and a frictional force is applied to the polishing surface 82a of the polishing tool 82 held by the tool holding portion 81.

[0009]

In the above-mentioned conventional polishing tool holding apparatus, the point of application of the frictional force generated by the rubbing between the polishing tool and the workpiece during polishing is located on the polishing surface of the polishing tool. The point of action of the oscillating power (force in the direction parallel to the frictional force) of the machining force applied to the portion is located at a portion of the tool holding portion closer to the convex spherical surface side, so that the frictional force and the oscillating power Is a couple of forces to rotate the polishing tool held by the tool holding unit. As a result, there is a problem that the pressure distribution on the polishing surface of the polishing tool is non-uniform and uneven.

The present invention has been made in view of the above-mentioned problems of the prior art, and the polishing surface of a polishing tool held by a tool holding portion has various shapes on the processing surface of a workpiece during polishing. A polishing tool holding device that can sufficiently follow the shape, and can make the pressure distribution on the polishing surface of the polishing tool uniform by eliminating the generation of a couple that attempts to rotate the polishing tool. And a polishing head provided with the polishing tool holding device.

[0011]

A polishing tool holding apparatus according to the present invention for achieving the above object has a convex spherical surface provided on a tool holding portion for holding a polishing tool and a support for applying a working force. At least three spaced-apart spheres are sandwiched by concave spheres provided in the portion, the tool holding portion and the support portion are connected by a flexible member, and a center point of the convex sphere and the concave sphere The center point of each of the above is coincident with the center point of the polishing surface of the polishing tool held by the tool holder. The polishing tool, the tool holding unit and the support unit are each made of a magnetic material, and the polishing tool is attracted to the tool holding unit, and a magnet for attracting the tool holding unit to the support unit is provided on the tool holding unit. The flexible member connecting the tool holding portion and the support portion is characterized in that a space sandwiched between the convex spherical surface and the concave spherical surface is formed by forming at least three spaced spheres therebetween. Some of them are sealed in a space.

Next, a polishing head of the present invention includes any one of the above-mentioned polishing tool holding devices of the present invention, and applies a processing force to the polishing tool holding device.

[0013]

In the polishing tool holding device of the present invention configured as described above, at least three spheres spaced from each other by the convex spherical surface provided on the tool holding portion and the concave spherical surface provided on the support portion. Since each ball is rolled, the tool holding portion is freely inclined with respect to the support portion within the range of bending of the flexible member connecting the tool holding portion and the support portion by rolling the balls.

When the supporting portion rotates, the flexible member bends, and the rotation of the supporting portion is transmitted to the tool holding portion via the flexible member.

The working force applied to the support portion is transmitted from the concave spherical surface of the support portion to the convex spherical surface of the tool holding portion via the respective spheres, and acts on the polishing surface of the polishing tool held by the tool holding portion. I do. Since the center point of the convex sphere and the center point of the concave sphere respectively correspond to the center point of the polishing surface of the polishing tool, the machining force can be maintained regardless of how the tool holding portion is inclined with respect to the support portion. Is always coincident with the center point of the polished surface. As a result, at the time of polishing, a couple for rotating the polishing tool does not occur.

[0016]

An embodiment of the present invention will be described with reference to the drawings.

First, a description will be given of a polishing device 30 to which the polishing tool holding device of the present embodiment is mounted.

In FIG. 2, a Y-table 3
2 are guided by two parallel guide rails 31a and 31b, and are mounted so as to be reciprocally movable in the arrow Y direction and in the opposite direction. A ball screw 3 is provided between the two guide rails 31a and 31b in parallel with the respective guide rails 31a and 31b.
1c is rotatably supported by the ball screw 31c.
Is screwed into a ball nut (not shown) provided on the Y table 32, and one end of the ball screw 31c is connected to the output shaft of the motor 31d. Thereby, the ball screw 31c
Is rotated forward and backward by the drive of the motor 31d, so that the Y table 32 is reciprocated in the arrow Y direction and the opposite direction.

An X table 33 is mounted on the Y table 32 so as to be reciprocally movable in an arrow X direction (a direction perpendicular to the arrow Y direction) and in the opposite direction, guided by a guide 32a. A ball screw 33c is rotatably supported inside the guide 32a in parallel with the arrow X direction. The ball screw 33c is screwed into a ball nut (not shown) provided on the X table 33, and one end of the ball screw 33c is provided. Is connected to the output shaft of the motor 33d. As a result, the X table 33 is reciprocated in the direction of the arrow X and in the opposite direction by the forward and reverse rotation of the ball screw 33c driven by the motor 33d.

The X table 33 is provided with a .theta. Table 34 via rotation driving means (not shown). The rotation driving means rotates and rotates in the direction of the arrow .theta. I have.

Tab 35 fixed to the θ table 34
The inside is filled with a polishing liquid, and the workpiece 36 is fixed to the tub 35 while being immersed in the polishing liquid.

Above the workpiece 36, three L-shaped polishing frames 37a, 37 provided on the surface plate 31 are provided.
Each tip of b and 37c is located, and a mounting plate 38 for mounting the tilting device 40 is fixed to each tip.

The tilting device 40 will be described with reference to FIG.

The three corners of the equilateral triangular mounting plate 41 are fixed to the mounting plate 38 (see FIG. 2).
The triangular mounting plate 41 has three shafts 4 parallel to each side.
5a, 45b (the others are not shown) are fixed.
Block 4 for each of 5a and 45b (others are not shown)
2a, 42b, and 42c are rotatably mounted around respective shafts 45a, 45b (the others are not shown). On the two outer sides of the block 42a, two inside parts of a square-shaped polishing arm 43a that are opposed to each other in the vertical direction in the figure are attached via known sliding means, respectively. The portions are guided by two outer portions of the block 42a, respectively, and are reciprocally movable (up and down directions in the figure) with respect to the block 42a. The other two polishing arms 43b and 43c are also connected to the other blocks 42b and 4c.
2c have the same configuration. Ball screws 46a, 46b, 46c are rotatably supported on the polishing arms 43a, 43b, 43c in parallel with the two inner portions, respectively.
a, 46b, 46c are blocks 42a, 42b, 4
2c respectively, and each block 42a, 42b, 4
2c is screwed into a ball nut (not shown) provided inside. In addition, each ball screw 46a, 46
b and 46c are shown at the upper ends of the polishing arms 43a and 43c, respectively.
b, motors 44a mounted on the upper side of 43c,
44b and 44c are connected to output shafts, respectively. The illustrated lower sides of the respective polishing arms 43a, 43b, 43c are respectively attached to three corners of a triangular polishing head mounting plate 48 via universal joints 47a, 47b, 47c.

Each of the polishing arms 43a, 43b, 43c
Each ball screw 46a, 46b, 46c
The blocks 42a, 42b, 42c are rotated forward and reverse by driving the blocks 4a, 44b, 44c, respectively.
Respectively reciprocate (vertical direction in the figure). For example, by moving each of the polishing arms 43a, 43b, 43c in the same direction by the same distance, the polishing head mounting plate 48 can be moved by the distance while maintaining the same posture. 43a, 43
By moving b and 43c by different distances, the polishing head mounting plate 48 can be freely inclined in any direction. Thereby, the tilting device 40
Is a polishing head 50 attached to the polishing head mounting plate 48.
2 (see FIG. 2) can be freely tilted in any direction with respect to the workpiece 36 fixed to the tab 35, and can be freely raised and lowered.

Next, the polishing tool holding device 10 of the present embodiment
The polishing head 50 having the above will be described with reference to FIG. The polishing head 50 includes a constant pressure device 20 and a swing device 51.

The main body 52 of the swinging device 51 has its upper part fitted into a hole of the polishing head mounting plate 48 and is attached to the lower surface side of the polishing head mounting plate 48 by a fixing means such as a screw. An output shaft 53a of a drive motor 53 fixed to an upper portion of the main body 52 is fitted into a hole at one end of a crank 54 supported on the main body 52 via a plurality of bearings, and is fixed to the crank 54 by screws (not shown). Have been. On the left side of the crank 54 in the figure, a counter mass 56 is
2 is slidably attached to a first slide shaft 55 provided in the direction 2 in the direction of arrow D and in the opposite direction, and the crank 54 and the counter mass 56 are connected by a first connecting rod 54a. On the right side of the crank 54 in the figure, a swinging slider 57 to which the casing 21 of the constant pressure device 20 is attached by a fixing means such as a screw is slidably attached to the second slide shaft 58 in the direction of arrow D and the opposite direction. The crank 54 and the swing slider 57 are connected by a second connecting rod 54b.

The driving of the drive motor 53 causes the crank 54 to rotate, and this rotational movement is transmitted to the counter mass 56 via the first connecting rod 54a.
6 reciprocates in the direction of arrow D and in the opposite direction. In addition, the rotational motion is simultaneously transmitted to the swing slider 57 via the second connecting rod 54b, and the swing slider 57 reciprocates in the direction of arrow D and the opposite direction. At the time of each reciprocating movement, the counter mass 56 and the swing slider 57
Are configured to move in opposite directions to each other to prevent generation of vibration due to reciprocal movement. In this way,
The oscillating device 51 reciprocates the constant pressure device 20 attached to the oscillating slider 57 in the direction of arrow D and in the opposite direction, thereby moving the polishing tool 1 held by the polishing tool holding device 10 in the direction of arrow D and its direction. It is configured to swing (reciprocate) in the opposite direction.

The constant pressure device 20 will be described with reference to FIG.

The casing 21 of the constant-pressure device 20 has a cylindrical shape, and is internally provided with a voice coil motor (VCM) 22 for generating a pressing force during polishing.
The yoke 22a of the VCM 22 is fitted into the inner periphery of the casing 21 and fixed to the casing 21.
The illustrated upper end of the load shaft 23 is fixed to the second bobbin 22b. The load shaft 23 is reciprocally movable in the axial direction (the direction of the arrow E and the reverse direction thereof) via a known ball spline 24 provided on the casing 21, and the rotation around the axis is restrained. Installed. At the lower end of the load shaft 23 in the figure, two parallel leaf springs 25a and 25b fixed to the support portion 3 of the polishing tool holding device 10 by a plurality of screws are respectively fixed perpendicular to the load shaft 23. ing. The illustrated lower end surface of the load shaft 23 constantly presses the load sensor 26 in the direction of arrow E by the resilient force of each leaf spring 25a, 25b, so that the load sensor 26 It is sandwiched between the illustrated upper surface. The load sensor 26 includes a temperature sensor 26a for detecting the temperature of the load sensor 26.
Is attached.

The pressing force generated by the VCM 22 is:
It is added from the bobbin 22b to the load shaft 23 in the direction of arrow E,
The load is applied to the support 3 from the load shaft 23 via the load sensor 26. At this time, the load sensor 26 is
Is configured to detect the magnitude of the pressing force applied to the support unit 3 from.

On the other hand, a displacement sensor 27 is attached to the upper end of the casing 21 in the figure, and the displacement sensor 27 determines the displacement of the displacement sensor reference 27 a fixed to the bobbin 22 b of the VCM 22 with respect to the casing 21. By detecting, the axial displacement of the load shaft 23 with respect to the casing 21 is detected.

Here, the control of the pressing force will be described with reference to FIG.

The VCM 22 includes a control box 28
A current is applied by the AMP 28c to generate a pressing force to be applied to the support portion 3 via the load shaft 23. The pressing force detected by the load sensor 26 is input as a load signal from the load sensor 26 to the controller 28b via the buffer 28a. The temperature of the load sensor 26 detected by the temperature sensor 26a is input as a temperature signal from the temperature sensor 26a to the controller 28b via the buffer 26b, and is used for compensating for an error due to the temperature of the load sensor 26. The controller 28b performs an operation based on the load signal and the temperature signal, calculates a difference between a pressing force currently applied to the support portion 3 during polishing and a predetermined pressing force, and eliminates the difference. Is input to the AMP 28c, and the AMP 28c supplies a current to the VCM 22 based on the control signal to
2 is controlled. In this way, the pressure applied to the support portion 3 is feedback-controlled, and is always maintained at the set pressure.

The displacement sensor 27 (see FIG. 5)
Detects the amount of displacement of the load shaft 23 with respect to the casing 21 in the axial direction, and outputs the detection signal to the tilting device 4.
0 is input to a controller that controls the load shaft 23, and the tilting device 40 is controlled by the controller to
The tilting device 40 is driven such that the amount of displacement is always kept within a certain range.

Next, the polishing tool holding device 10 will be described with reference to FIG.

The polishing tool 1 made of a magnetic material such as a metal
An outer diameter (for example, a processing surface 36 having a diameter of φ100 mm) sufficiently smaller than a processing surface 36a (see FIG. 4) of the processing object 36.
a), a viscoelastic layer 1b such as asphalt pitch is formed on the surface facing the workpiece.
The illustrated lower surface of b is the polishing surface 1a.

Tool holder 2 for holding polishing tool 1
Is made of a magnetic material such as metal, and a metal magnet holder 4a for holding the magnet 4 in the tool holder 2 is provided with two screws 4
b, 4c. The polishing tool 1 is held by the upper part of the figure being fitted into a hole 2 a formed in the tool holding part 2 and being attracted to the tool holding part 2 by the magnetic force of the magnet 4. Further, by separating the polishing tool 1 against the magnetic force, the polishing tool 1 can be detached from the tool holding portion 2.

A convex spherical surface 2 b is formed on the tool holding portion 2, and the central point of the convex spherical surface 2 b is
coincides with the center point R of a. A concave surface 3b is formed on the support 3 made of a magnetic material such as a metal, and the center point of the concave surface 3b coincides with the center point R of the polishing surface 1a. The tool holding unit 2 includes three spheres 5a, 5b made of a non-magnetic material such as stainless steel by the convex spherical surface 2b and the concave spherical surface 3b.
With the other (not shown) sandwiched therebetween, the magnetic force of the magnet 4 is always attracted to the support portion 3.

Each of the balls 5a and 5b (the others are not shown) can be moved no matter how the tool holder 2 and the support 3 move relative to each other.
The polishing tool 1 is configured to be able to roll freely, to be guided by a retainer portion 4d formed on the magnet holder 4a, and to be always arranged at positions spaced from each other by 120 ° around the central axis of the polishing tool 1. I have. The outer diameter of each of the spheres 5a, 5b (the others are not shown) is equal to the difference between the radius of the convex spherical surface 2b and the radius of the concave spherical surface 3b.

The annular rubber seal 6, which is a flexible member,
It is made of an inert material such as silicon rubber, and is closely adhered to the peripheral portion 2c of the tool holding portion 2 and the peripheral portion 3c of the support portion 3 with an adhesive. Thereby, the rubber seal 6 connects the tool holding part 2 and the support part 3, and seals the space between the convex spherical surface 2b and the concave spherical surface 3b from the outside.

Next, an example of the operation of the polishing apparatus 30 during polishing will be described (see FIG. 2).

For example, the case of polishing a workpiece 36 having an aspherical workpiece surface 36a will be described.
The X table 33 and the Y table 32 are respectively moved, and the work surface 36 a of the work 36 moves below the polishing head 50 mounted on the tilting device 40.
Next, the tilting device 40 is driven to lower the polishing head 50, and the workpiece 3 in which the polishing surface 1a of the polishing tool 1 held by the polishing tool holding device 10 is immersed in the polishing liquid.
6 comes in contact with the work surface 36a. The workpiece 36 is rotated in the direction of the arrow θ by the rotation of the θ table 34, and at the same time, the polishing tool 1 is rocked by the rocking device 51 (see FIG. 4) in the direction of the arrow D and in the opposite direction. At this time, a constant pressure is applied by the constant pressure device 20 to the polishing tool holding device 10.
The polishing surface 1a of the polishing tool 1 and the workpiece 36
Is rubbed and polished. At the time of the polishing, the tilting device 40 is driven based on a processing program created in advance, and the load shaft 23 of the constant pressure device 20 is maintained so as to always coincide with the normal direction of the surface 36a to be processed.

The operation of the polishing tool holding device 10 of this embodiment will be described with reference to FIGS. 1 (a) and 1 (b).

The convex spherical surface 2b formed on the tool holding portion 2 and the concave spherical surface 3b formed on the support portion 3 sandwich three spheres 5a and 5b (others not shown). The tool holder 2 can be freely inclined with respect to the support 3 within the range of the deflection of the rubber seal 6.

In this embodiment, the load shaft 23 is not configured to forcibly rotate around the axis. However, when the load shaft 23 is configured to forcibly rotate about the axis, the load shaft 2 is not rotated.
The rotation of 3 is transmitted to the support section 3 via the two leaf springs 25a and 25b, and the rotation is transmitted to the tool holding section 2 while the rubber seal 6 bends, so that the polishing tool 1 rotates.

The pressing force P applied to the support portion 3 by the load shaft 23 via the load sensor 26 and the oscillating force N applied to the support portion 3 by the load shaft 23 via the respective leaf springs 25a and 25b during swinging. Is transmitted from the concave spherical surface 3b to the convex spherical surface 2b via the respective spheres 5a, 5b (the others are not shown), and the polishing surface 1a of the polishing tool 1 held by the tool holder 2.
Act on. Since the center point of the convex sphere 2b and the center point of the concave sphere 3b coincide with the center point R of the polished surface 1a, no matter how the tool holding unit 2 is inclined with respect to the support unit 3, The point of application of the force is located at the center point R of the polishing surface 1a. Since the frictional force F generated during the polishing also acts on the polishing surface 1a, no couple force for rotating the polishing tool 1 is generated. As a result, the pressure distribution ω on the polishing surface 1a is always kept uniform.

As described above, in the polishing tool holding device 10 of the present embodiment, the polishing tool 1 can be used even if the surface 36a to be processed of the workpiece 36 has various shapes such as an aspherical surface. The polishing surface 1a can freely follow the above-mentioned shape while being freely inclined with respect to the support portion 3. Also, no matter how the polishing tool 1 is inclined, the couple does not occur, and the pressure distribution ω on the polishing surface 1a is always uniform. Therefore, the processing surface 36a of the workpiece 36 can be uniformly and uniformly polished.

Since the tool holding section 2 is always attracted to the support section 3 by the magnetic force of the magnet 4, each of the balls 5a,
5b (others are not shown) can be maintained, and the handling can be made very convenient, and the polishing tool holding device 10 can have a simple structure. Further, since the polishing tool 1 is configured to be fitted into the hole 2a of the tool holding portion 2 and held by being attracted to the tool holding portion 2 by the magnetic force of the magnet 4, the attachment and detachment of the polishing tool 1 can be easily performed. I can do it.

Since the rubber seal 6 seals the space between the convex spherical surface 2b and the concave spherical surface 3b, the polishing liquid does not enter the space and the polishing is not performed in the polishing liquid. However, it is possible to prevent dust and the like from entering. Thereby, good rolling of each of the balls 5a, 5b (the others are not shown) can be maintained.

In the present embodiment, an example is shown in which three spheres 5a and 5b (others are not shown) are sandwiched between the convex spherical surface 2b and the concave spherical surface 3b. It may be configured to be sandwiched between each other.

[0052]

Since the present invention is configured as described above, the following effects can be obtained.

Since the tool holding portion is freely inclined with respect to the support portion within the range of deflection of the flexible member, the polishing surface of the polishing tool held by the tool holding portion is the same as that of the work surface of the workpiece. It can sufficiently follow the shape.

The working point of the working force applied to the support is always located at the center point of the polishing surface of the polishing tool, no matter how the polishing tool is inclined with respect to the support. Since there is no couple to rotate, the pressure distribution on the polishing surface of the polishing tool can be made uniform at all times.

As a result, even if the surface to be processed of the workpiece has various shapes such as an aspherical surface, the surface to be processed can be uniformly and uniformly polished.

According to the second aspect of the present invention, since the tool holding portion is always attracted to the support portion by the magnetic force of the magnet, even when the processing force is not applied to the support portion, the tool holding portion is always convex. Since the state in which at least three spaced-apart spheres are sandwiched between the spherical surface and the concave spherical surface of the support portion is maintained, the handling can be made very convenient. Further, the structure of the polishing tool holding device can be simplified. Further, since the polishing tool is attracted to the tool holding portion by the magnet, it is easy to attach and detach the polishing tool to and from the tool holding portion.

According to the third aspect of the present invention, the space sandwiched between the convex spherical surface and the concave spherical surface is sealed by the flexible member including the respective spheres in the space, so that the dust and the polishing liquid are removed by the flexible member. It is possible to prevent the ball from entering the space, and it is possible to maintain good rolling of each ball.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of the present invention, wherein (a) is a cross-sectional view of a main part of the embodiment, and (b) is a schematic view of the embodiment.

FIG. 2 is a perspective view of the polishing apparatus of the embodiment.

FIG. 3 is a perspective view of the tilting device of the embodiment.

FIG. 4 is a sectional view of a principal part of the polishing head of the embodiment.

FIG. 5 is a sectional view of a main part of the constant pressure device of the embodiment.

FIG. 6 is a control block diagram of a pressing force of the constant pressure device of the embodiment.

FIG. 7 is a sectional view of an example of a conventional polishing tool holding device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Polishing tool 1a Polishing surface 1b Viscoelastic body layer 2 Tool holding part 2a Hole 2b Convex spherical surface 2c, 3c Peripheral edge 3 Support part 3b Concave spherical surface 4 Magnet 4a Magnet holder 4b, 4c Screw 4d Retainer part 5a, 5b Ball 6 Rubber seal 10 Polishing tool holding device 20 Constant pressure device 22 VCM (voice coil motor) 23 Load shaft 25a, 25b Leaf spring 26 Load sensor 26a Temperature sensor 27 Displacement sensor 30 Polishing device 31 Surface plate 32 Y table 33 X table 34 θ table 35 Tab 36 Cover Workpiece 36a Work surface 37a, 37b, 37c Polishing frame 40 Tilter 41 Triangular mounting plate 42a, 42b, 42c Block 43a, 43b, 43c Polishing arm 44a, 44b, 44c Motor 45a, 45b, 45c Shaft 46a, 46b, 46c ball screw 47a, 47b, 47c Universal joint 48 Polishing head mounting plate 50 Polishing head 51 Swinging device 53 Drive motor 54 Crank 54a First connecting rod 54b Second connecting rod 55 First slide shaft 56 Counter mass 57 Swing slider 58 Second slide shaft

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Shukunori Yamamoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (56) References JP-A-61-19556 (JP, A) JP-A Sho 56-126573 (JP, A) Japanese Utility Model Showa 61-195937 (JP, U) Japanese Utility Model Showa 52-82991 (JP, U) Japanese Patent Publication No. 37-15084 (JP, Y1) (58) Field surveyed (Int. Cl. ⁶ , DB name) B24B 41/04 B24B 13/01 B24B 49/16

Claims (4)

(57) [Claims] 1. A method according to claim 1, wherein at least three interposed spheres are formed by a convex spherical surface provided on a tool holding portion for holding a polishing tool and a concave spherical surface provided on a support portion for applying a processing force. The tool holding portion and the support portion are connected by a flexible member, and the center point of the convex spherical surface and the center point of the concave spherical surface are centered on the polishing surface of the polishing tool held by the tool holding portion. A polishing tool holding device, wherein each of the points corresponds to a point. 2. A polishing tool, a tool holder and a supporter are each made of a magnetic material, and a magnet for attracting the polishing tool to the tool holder and attracting the tool holder to the supporter is provided. The polishing tool holding device according to claim 1, wherein the polishing tool holding device is provided in the tool holding portion. 3. A flexible member for connecting a tool holding portion and a support portion includes a space sandwiched between a convex spherical surface and a concave spherical surface, wherein at least three spaced spheres are included in the space. The polishing tool holding device according to claim 1, wherein the device is sealed. 4. A polishing head comprising the polishing tool holding device according to claim 1, wherein a polishing force is applied to the polishing tool holding device.