JP3113002B2 - Polishing head, polishing apparatus and processing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing head and a polishing apparatus for polishing a surface of a hard and brittle material such as a semiconductor, glass, ceramics, a single metal or a single crystal of a metal oxide. The processing of the present invention is a method of so-called EEM (Elastic Emi), which is a method of colliding abrasive grains with a workpiece, applying energy to a minute region of the workpiece and removing the atomic units to advance the processing.
This is due to a polishing process based on session machining.

[0002]

2. Description of the Related Art Conventional polishing apparatuses are generally disclosed in
As shown in JP-A-88565, etc., FIG.
It is configured as shown in FIG.

[0003] In the figure, a mounting foot 1 of an air rail 102 is shown.
02 ′ is attached to the head 101 of the main shaft. The air rail 102 and the air table 103 are connected to the air rail 1.
The air slider is slid over the straddle 02 and constitutes an air slider. The frame 104 is fixed to the air table 103,
The air cylinder 105 is fixed to the frame 104. A vertical shaft 106 is provided on the air cylinder 105 via an air bearing, and an elastic spherical tool 107 made of a polyurethane sphere or the like is attached to a lower end of the vertical shaft 106. The vertical shaft 106 is a rotating shaft that is rotated by a motor via a flexible joint 108. The vertical shaft 106 is slid in the horizontal Y direction by the air slider.

A workpiece 109 is vertically mounted on an arm 111 of XZ numerical control means 110 which can be numerically displaced in a Z direction (vertical direction) and an X direction (horizontal direction). The water tank 112 is attached to a horizontal base 114 and contains a suspension 113 of fine abrasive particles. The head 101 of the main shaft is moved in the XYZ directions for convenience in operation and can be stopped at an arbitrary position. Workpiece 10
In order to form a constant-thickness bearing-like flow of the suspension on the surface of the workpiece 9, the vertical shaft 106 is arranged so that an arbitrary constant minute pressure is always applied to the working surface of the workpiece 109.

[0005]

The above conventional example has the following drawbacks.

Since the rotating shaft is vertical and the processing surface of the workpiece is vertical and fixed, it may not be possible to perform processing on a processing surface such as a spherical surface or a colloidal surface. For example, in FIG. 8, the elastic spherical tool 107
The lower part of the workpiece 109 cannot be machined.

When processing by the EEM polishing method,
The size of the machining area is determined by the size of the crushed surface area when the elastic sphere tool is pressed against the workpiece. Since the crushing surface area is proportional to the pressing force (polishing processing force), in the above conventional example which cannot cope with a continuous change in the required polishing processing force when the elastic spherical tool is inclined with respect to the curvature of the workpiece, Cannot expect machining area accuracy.

[0008] Since it is not possible to have a constant angle with respect to the curvature, errors in the processing area are large. For example, FIG.
In, the size of the area differs between the projection planes F and G on the workpiece depending on the processing position. Further, the workpiece 1
When the diameter of 09 is large, the rotating shaft becomes long, and the rotation of the elastic spherical tool 107 induces vibration.

An object of the present invention is to provide a polishing head and a polishing apparatus which can cope with a continuous change in required polishing power for any curvature of the surface shape of a workpiece.

[0010]

A polishing head according to the present invention comprises:
The workpiece is immersed in the polishing liquid in which the abrasive grains are dispersed, while the elastic spherical tool is pressed against the workpiece and rotates, and the polishing in the polishing liquid is caused by the flow of the polishing liquid induced thereby. Abrasive grains collide with the workpiece, and weighting means for pressing the elastic spherical tool against the workpiece in a polishing apparatus configured to process a minute surface area of the workpiece, and the elastic spherical tool A rotating means for rotating the polishing head, wherein the weighting means comprises
Attach a spring to cancel the weight,
Displacement detection means for detecting a vertical displacement of
Tilt detecting means for detecting the tilt of the head, and the height of the polishing liquid level
Liquid level detecting means for detecting the
Change, the weight change when the polishing head is tilted, and the elasticity
Air syringe that generates force to control buoyancy change of spherical tool
And the displacement detection means, the inclination detection
Means and a signal from the liquid level detecting means.
Control to compensate by controlling the force generated in the cylinder
It is characterized by having means.

The polishing apparatus of the present invention can be positioned on a surface plate.
And two orthogonal movement axes provided above each
To rotate around the vertical axis and
Polishing table equipped with a table having
The work piece is fixed to the table,
In order to process while following the normal direction of the workpiece,
2. A tilting mechanism provided above a rolling movement axis.
Is mounted.

[0012] The polishing apparatus of the present invention is characterized in that a workpiece
And a polishing tool for polishing the surface to be processed
In a polishing apparatus for polishing a workpiece, the polishing tool
Is the rotation operation by the rotation means, and the
Pressing the surface to apply pressure to the polishing tool
Around the axis in the pressing direction of the pressing member of the pressing means.
It is characterized by having a rotation regulating means.

According to the processing method of the present invention, the work
And immersing a processing tool for processing the surface to be processed
A processing method for processing an object, wherein the processing tool is a rotating hand.
Rotational operation by step and pressing to the surface to be processed by pressurizing means
Perform a pressurizing operation to reduce the buoyancy of the machining tool in the machining fluid.
Calculate, and the calculated buoyancy is applied to the pressing force of the pressurizing means.
In addition, processing is performed by applying a processing pressure to the surface to be processed.
It is characterized by that.

[0014]

The polishing head generates a polishing force by means of an air cylinder, and the weighting shaft (spindle) is supported by an air bearing, whereby the polishing force generated by the air cylinder is transmitted to the elastic spherical tool without loss. Can be.
On the other hand, by supporting the rotating shaft with the air bearing, the rotating force generated by the rotating means mounted on the rotating shaft can be transmitted to the elastic spherical tool without loss.

The polishing head is mounted on a tilting device,
By mounting the workpiece horizontally on a table having two axes of orthogonal rotation and one axis, the load direction of the polishing head can be adjusted to an arbitrary angle at an arbitrary position on the workpiece.

A spring for canceling the weight of the movable portion such as the rotating system of the elastic sphere tool and the air spindle disposed below the air cylinder is provided, and the force generated in the air cylinder can be limited to the polishing processing force. .

A displacement meter (displacement detecting means) for the polishing head body is mounted on the air spindle, and a control device for correction is provided to control the magnitude of the force generated by the air cylinder, thereby expanding the spring. The change of the reaction force due to can be corrected.

By mounting a goniometer (tilt detecting means) on the polishing head and having control means for correction, the magnitude of the force generated by the air cylinder when the polishing head is tilted is controlled. The change in own weight due to the inclination degree under the air cylinder can be corrected.

The polishing head is equipped with a level meter (liquid level detecting means) for detecting the level of the liquid level of the polishing liquid, and has a control means for correction. The air cylinder is submerged in the polishing liquid. By controlling the magnitude of the generated force, it is possible to correct a change in buoyancy corresponding to the volume of the elastic spherical tool.

The vibration can be eliminated by supporting the rotating shaft as close as possible to the elastic spherical tool. Of the present invention
The polishing device is provided around the axis in the pressing direction of the pressing member of the pressing means.
With the rotation control means, the work surface of the workpiece can be added.
During construction, the pressurizing means must not rotate in the axial direction.
And the displacement of the polishing tool is minimized.
The machining method of the present invention calculates the buoyancy of a machining tool in machining fluid.
And adding the calculated buoyancy to the pressing force of the pressurizing means.
Processing by applying processing pressure to the surface to be processed
Generates constant processing force regardless of the amount of tool sinking
can do.

[0021]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 2 shows a polishing head 5 according to a first embodiment of the present invention.
FIG. 2 is a perspective view showing a polishing apparatus 30 to which a No. 0 is attached.

In FIG. 2, a Y table 32 is mounted on a surface plate 31 so as to be reciprocally movable in the direction of the arrow Y and in the opposite direction while being guided by two parallel guide rails 31a and 31b. A ball screw 31c is rotatably supported between the two guide rails 31a and 31b in parallel with the respective guide rails 31a and 31b. The ball screw 31c is a ball (not shown) provided on the Y table 32. One end of the ball screw 31c is screwed into the nut,
d is connected to the output shaft. As a result, the Y table 32 is reciprocated in the arrow Y direction and in the opposite direction by the forward and reverse rotation of the ball screw 31c driven by the motor 31d.

The Y table 32 has an X table 33
Are mounted so as to be reciprocally guided by the guide 32a in the direction of the arrow X (perpendicular to the direction of the arrow Y) and in the opposite direction. A ball screw 33c is rotatably supported inside the guide 32a in a direction parallel to the arrow X direction. The ball screw 33c is screwed into a ball nut (not shown) provided on the X table 33, and one end of the ball screw 33c. Is connected to the output shaft of the motor 33d. As a result, the X table 33 is reciprocated in the direction of the arrow X and in the opposite direction by the forward and reverse rotation of the ball screw 33c driven by the motor 33d.

The X table 33 includes a θ table 34
Are mounted via rotation driving means (not shown), and the rotation driving means rotates forward in the direction of the arrow θ and in the direction opposite thereto,
The structure is reversed. X table 33, Y
The work piece 3 is determined by the table 32 and the θ table 34.
6 is held in a position and orientation of at least three degrees of freedom, and a table of two orthogonal rotations and one axis is configured.

Tab 35 fixed to the θ table 34
The inside is filled with a polishing liquid in which abrasive grains are dispersed, and the workpiece 36 is fixed to the tub 35 while being immersed in the polishing liquid.

Above the workpiece 36, three L-shaped polishing frames 37a, 37 provided on the surface plate 31 are provided.
Each of the tips of the polishing head 50 and the tip 37b is located at the tip of the table 32, 33, and 34.
A mounting plate 38 for mounting a Z tilting device 40, which is a holding means for holding at a position and orientation having at least three degrees of freedom different from the above, is fixed.

FIG. 3 shows the Z tilting device 40.
This will be described with reference to FIG.

The three corners of the equilateral triangle mounting plate 41 are:
Each is fixed to the mounting plate 38 (see FIG. 2). On the triangular mounting plate 41, three shafts 45a, 45b (the others are not shown) are fixed in parallel with the respective sides, and blocks 42a, 42b are respectively provided for the respective shafts 45a, 45b (the other is not shown). , 42c are rotatably mounted around respective shafts 45a, 45b (the others are not shown). The two outside portions of the block 42a are provided with a square-shaped polishing arm 43.
The two inner portions facing each other in the vertical direction in the drawing are attached via known sliding means, and the two inner portions of the polishing arm 43a are the two portions of the block 42a.
It is guided by the two outer portions, and is reciprocally movable (up and down direction in the figure) with respect to the block 42a. The other two polishing arms 43b and 43c are also connected to another block 42.
b and 42c have the same configuration.

Each of the polishing arms 43a, 43b and 43c has a ball screw 46 parallel to the two inner portions.
a, 46b, and 46c are rotatably supported, respectively, and the ball screws 46a, 46b, and 46c are inserted through the blocks 42a, 42b, and 42c, respectively, and provided inside the blocks 42a, 42b, and 42c. Each is screwed to a ball nut (not shown). The illustrated upper ends of the ball screws 46a, 46b, 46c are connected to the output shafts of motors 44a, 44b, 44c attached to the upper sides of the polishing arms 43a, 43b, 43c, respectively. The illustrated lower sides of the polishing arms 43a, 43b, 43c are universal joints 47a, 47b, 4
7c are attached to the three corners of the triangular polishing head mounting plate 48 through the respective 7c.

Each of the polishing arms 43a, 43b, 43c
Is that each ball screw 46a, 46b, 46c
The blocks 42a, 42b, 42c are rotated forward and backward by the driving of the blocks 4a, 44b, 44c, respectively.
Respectively reciprocate (vertical direction in the figure). For example, by moving each of the polishing arms 43a, 43b, and 43c in the same direction by the same distance, the polishing head mounting plate 48 can be moved by the distance while maintaining the same posture. In addition, each polishing arm 43a, 4
The polishing head mounting plate 48 can be freely inclined in any direction by moving the 3b and 43c by different distances.

As a result, the tilting device 40 includes a polishing head 50 (FIG. 2) mounted on the polishing head mounting plate 48.
) Can be freely tilted in any direction with respect to the workpiece 36 fixed to the tab 35, and can be freely raised and lowered.

Next, the polishing head 50 of this embodiment will be described with reference to FIG.

The main body 51 of the polishing head 50 constitutes an air cylinder as a weighting means together with a spindle 52 as a weighting shaft, and is fixed at a predetermined position on the polishing head mounting plate 48. The porous material 55 constituting the air bearing has an inner diameter that is about 10 μm larger than the outer diameter of the cylindrical spindle 52, and the supplied air P 3 flows into the gap by the air bearing (so-called porous restrictor). Support without contact. However, there is no restriction in the vertical direction, and therefore, the spindle 52 is moved in the vertical direction (arrow A).
Direction). If a difference occurs between the pressures of the air P1 and P2 supplied to each of the two air chambers 53a and 53b, a force is generated in the vertical direction of the spindle 52. For example, the pressure difference between the air chambers 53a and 53b is 1 kg / cm ² ,
If the effective area of the pressure receiving surfaces 52a and 52b of the spindle 52 is 1 cm ² , a force of 1 kg is generated in the vertical direction.

On the other hand, an elastic sphere tool 65 made of an elastic material such as polyurethane at the tip is mounted on a rotating shaft 64,
The rotating shaft 64 is supported by a plurality of air bearings. That is, the radial direction is supported by the porous material 61, and the thrust direction is supported by the porous materials 63a and 63b in a non-contact manner. A motor 60a having a built-in encoder 60b (not shown) is fixed to the housing 62 of each of the porous members 61, 63a, 63b with screws or the like, and the output shaft 60c is fixed to the rotary shaft 64.
The rotation means of the elastic spherical tool 65 is configured. By this rotating means, the rotation of the motor 60a is transmitted to the elastic spherical tool 65 via the rotating shaft 64, and rotates in the direction of arrow B.
Further, the force generated by the spindle 52 is
2, a housing 62, porous materials 63 a and 63 b, a rotating shaft 64, an elastic sphere tool 65 via a mounting plate 59 fixed to
Is transmitted to.

In this manner, the rotational and vertical forces are applied to the tip of the elastic sphere tool, and the processing is performed as follows. That is, the elastic spherical tool 65 is pressed by the processing force against the workpiece 36 immersed in the polishing liquid in which the abrasive grains are dispersed, and elastically deforms. In addition, the elastic spherical tool 6
Due to the flow of the polishing liquid induced by the rotation of 5, the polishing liquid is drawn into the contact area between the elastic spherical tool 65 and the workpiece 36. Abrasive grains in the polishing liquid collide with the workpiece 36 and remove a minute area on the surface of the workpiece 36. The size of the contact area is determined by the magnitude of the vertical force, and the elastic spherical tool 6
The rotation speed of 5 determines the amount of abrasive grains drawn into the contact area per time, and determines the resolution of processing.

Next, the detent mechanism of the present embodiment will be described with reference to FIG.

The spindle 52 includes plates 56a and 56b fixed to the main body 51 with screws or the like, and the plates 56a and 56b.
The porous plates 57a, 57 installed in each of the 56b
The rotation around the central axis is regulated by a rotation preventing mechanism comprising a moving plate 58 fixed to the spindle 52 with screws or the like. That is, the air P4 and P5 supplied to the porous plates 57a and 57b constituting the air bearing form a small film of the moving plate 58 and the porous plates 57a and 57b, and support the moving plate 58 in a non-contact manner. And while being movable in the direction of arrow C,
It does not move in the orthogonal direction. Therefore, in FIG.
The spindle 52 of the polishing head 50 does not rotate around its central axis, and the displacement of the elastic spherical tool 65 during processing is suppressed to a minimum.

The mounting plate 59 is set at an arbitrary angle (φ) with respect to the spindle 52, and the tool rotation center (fixed =
For example, the angle φ is set to 45 ° so that the “0” portion does not contact the workpiece 36.

Next, the control of the processing pressure will be described with reference to FIG.

The servo valve 71 is provided from the air source 73 to the air chamber 5.
The amount of air supplied to 3a and 53b is controlled independently. Pressure receiving surfaces 52a, 52b of spindle 52
Are known, the force generated at this portion is the effective area multiplied by the pressure difference. The controller 7 is set so that the value obtained by dividing the target load by the effective area and the value read by the differential pressure sensor 71 are the same.
4 achieves the target load by controlling the amount of air supplied by the servo valve 72 to each of the air chambers 53a and 53b.

However, as described above, the spindle 52
Since there is no restriction in the vertical direction, the own weight of the movable portion is added to the target load unless the own weight is cancelled. Therefore, in this embodiment, one end of the spring 54 is connected to the main body 51 in order to minimize the pressure difference between the air chambers 53a and 53b.
The other end is fixed to the spindle 52, respectively.
Cancel the weight of 2 or less. In some cases, the spring 54 is not used and the pressure difference between the air chambers 53a and 53b is used to support the own weight of the movable portion below the spring 54. In this case, the pressure for canceling the own weight is offset as the differential pressure sensor 71. , The S / N ratio of the differential pressure measurement deteriorates, and the load accuracy decreases. Regarding the spring 54, for example, when the weight of the movable portion is 3 kg and the dynamic range of the target load is 0 to 500 g,
If the own weight to be canceled in step 4 is 3 kg, the load generated on the spindle by air pressure is 0 to 500 g. The spring 54 is set such that the vertical position of the spindle 52 cancels its own weight at the center position of the movable effective range. However, when the position of the spindle 52 with respect to the main body 51 changes, the spring 54 is generated. The reaction force changes. The controller 74 measures the position of the spindle 52 with the displacement meter 66 and the amplifier 75, calculates the reaction force generated by the spring 54 from the spring constant of the spring 54, and calculates the target load generated on the workpiece 36 by the spindle 52. The pressure difference between the air chambers 53a and 53b is controlled so as to be constant regardless of the position.

The correction of the force generated by the air cylinder due to the inclination of the polishing head 50 will be described.

The weight of the movable part is obtained in advance with the weighting shaft (spindle) 52 in a vertical state, and registered in the controller 74. When the weight axis (spindle) 52 of the polishing head 50 is made coincident with the normal direction of the curvature of the processing surface of the workpiece 36, the angle of the polishing head 50 with respect to the horizontal detected by the goniometer 90 shown in FIG. To the controller 74 via the amplifier. The controller 74 calculates the current weight of the movable portion from the detected angle, and increases the force generated by the air cylinder by an amount corresponding to the reduced weight of the previously registered movable portion, thereby processing the workpiece 36. A constant polishing force is always generated in the direction normal to the curvature of the surface.

The correction of the force generated by the air cylinder due to the buoyancy generated when the elastic spherical tool 65 is immersed in the polishing liquid 92 will be described.

The level of the polishing liquid 92 detected by the level meter 91 shown in FIG. 1 is sent to the controller 74 via an amplifier (not shown). The controller 74 calculates the buoyancy corresponding to the volume of the elastic spherical tool 65 immersed in the polishing liquid from the detected liquid level, and increases the force generated in the air cylinder by the calculated amount. A constant polishing power is always generated without being affected by the amount of sinking.

Next, a second embodiment of the present invention will be described with reference to FIG.

Load shaft 8 fixed to bobbin 82 with screws or the like
Reference numeral 5 denotes a square, and four surfaces thereof are provided with four porous pads 84a, 84b, 84c, 84d attached to the main body 83.
(Not shown) in a non-contact manner. Therefore, since it is restricted from four directions, rotation about the axis becomes impossible, and it is not necessary to provide a detent as in the first embodiment. Because of non-contact support, force is transmitted in the vertical direction without loss, and the voice coil motor 81 (hereinafter referred to as VC
M81) is transmitted directly to the elastic spherical tool 65. The force generated by the VCM 81 is the bobbin 8
Since there is a difference depending on the vertical position of the displacement meter 2, the displacement meter 8
6 to read the position, and adjust the VC so that the difference is corrected.
The current flowing to M81 is controlled. Polishing head 5
The inclination correction of 0 and the buoyancy correction of the elastic spherical tool 65 are also performed.

The structure for rotating the elastic spherical tool 65 is the same as that of the first embodiment.

[0050]

As described above, in the polishing head according to the present invention, the polishing force is generated by the air cylinder, and the load shaft (spindle) is supported by the air bearing to thereby generate the polishing force generated by the air cylinder. Is transmitted to the elastic sphere tool without loss, and the rotating shaft supported by the air cylinder is transmitted to the elastic sphere tool without loss, and the rotational force generated by the rotating means mounted on the rotating shaft is disposed under the air cylinder. It is possible to improve the accuracy of the polishing force by providing a spring for canceling the weight of the movable part such as the rotating system of the elastic spindle tool and the air spindle, and using only the polishing force as the force generated in the air cylinder. it can.

Each detecting means for detecting the spindle displacement, the inclination of the polishing head, and the height of the polishing liquid surface,
A control means for controlling a force generated in the cylinder based on a signal from each detection means, so that the grinding force is always constant, and the elastic spherical tool is crushed when the elastic spherical tool is pressed against the workpiece. The surface area accuracy can be improved. Further, the rotation axis of the tool can be supported as close as possible to the tool in the form of an elastic sphere, so that vibration can be eliminated.

On the other hand, a polishing apparatus according to the present invention has a tilting device and a table having two axes of orthogonal rotation and one axis. A polishing head is mounted on the holding means, and a workpiece is mounted on the table. By doing so, it is possible to match the normal direction and the weighting direction of the polishing head with respect to any curvature of the surface shape of the workpiece, so that it can handle workpieces of all curvatures and adjust the air cylinder in real time. By controlling the generated force, the polishing processing force is always kept constant, and highly accurate polishing processing can be realized. Further, the polishing apparatus of the present invention
The rotation of the pressure member around the axis in the pressure direction of the pressure member
The provision of the regulating means allows the work surface of the workpiece
Without the pressing means rotating in the axial direction.
First, the displacement of the polishing tool is minimized. Further
In addition, the machining method of the present invention reduces the buoyancy of a machining tool in machining fluid.
Calculate and add the calculated buoyancy to the pressure of the pressurizing means.
To apply the processing pressure to the surface to be processed
Constant processing power regardless of the sinking amount of the processing tool
Can occur.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part showing a first embodiment of a polishing head according to the present invention.

FIG. 2 is a perspective view showing a polishing apparatus to which the polishing head of the present embodiment is mounted.

FIG. 3 is a perspective view showing a Z tilting device according to the embodiment.

FIG. 4 is a front view showing a rotation stopping mechanism of the embodiment.

FIG. 5 is a diagram for explaining control of a processing pressure according to the embodiment.

FIG. 6 is a sectional view of a principal part showing a second embodiment of the polishing head of the present invention.

FIG. 7 shows a conventional example of a polishing apparatus, (A) is a front view,
(B) is a side view.

8 is a schematic diagram when processing a spherical workpiece with the polishing apparatus shown in FIG. 7;

9 is a diagram illustrating a processing area when processing a spherical workpiece by the polishing apparatus shown in FIG. 7;

[Explanation of symbols]

 Reference Signs List 30 Polishing device 31 Surface plate 32 Y table 33 X table 34 θ table 35 Tab 36 Workpiece 36a Workpiece surface 37a, 37b, 37c Polishing frame 40 Z tilting device 41 Triangular mounting plate 42a, 42b, 42c Block 43a, 43b, 43c Polishing arms 44a, 44b, 44c Motors 45a, 45b, 45c Shafts 46a, 46b, 46c Ball screws 47a, 47b, 47c Universal joint 48 Polishing head mounting plate 50 Polishing head 51 Main body 52 Spindle 52a Spindle pressure receiving surface a 52b Spindle Pressure receiving surface b 53a Air chamber a 53b Air chamber b 54 Spring 55 Porous material 56a, 56b Plate 57a, 57b Porous plate 58 Moving plate 59 Mounting plate 60a Motor 60c Output shaft 61 Porous material 62 Housing 63a Porous material 63b Porous material 64 Rotary shaft 65 Tool 66 Displacement gauge 71 Differential pressure sensor 72 Servo valve 73 Air source 74 Controller 81 Voice coil motor 82 Bobbin 83 Main body 84a Porous pad 84b Porous pad 84c Porous pad 85 Weight axis 86 Displacement meter 90 Angle meter 91 Level meter 92 Polishing liquid

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-107964 (JP, A) JP-A-62-88565 (JP, A) JP-A-63-232975 (JP, A) JP-A-1- 210258 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) B24B 37/00

Claims (4)

(57) [Claims] 1. A workpiece is immersed in a polishing liquid in which abrasive grains are dispersed, while an elastic sphere tool is pressed and rotated against the workpiece, and the flow of the polishing liquid induced by the rotation is performed. Weight means for pressing the elastic spherical tool against the workpiece in a polishing apparatus configured so that the abrasive grains in the polishing liquid collide with the workpiece, and a fine surface area of the workpiece is processed. A rotating means for rotating the elastic spherical tool, wherein the weighting means cancels its own weight of the movable part.
The spring in the vertical direction to detect the vertical displacement of the load shaft.
Displacement detecting means for detecting the inclination of the polishing head.
Tilt detection means and liquid level detection to detect the height of the polishing liquid level
Means for changing the reaction force of the spring,
The change in own weight during tilting and the change in buoyancy of the elastic spherical tool
An air cylinder for generating a controlling force, further comprising: the displacement detecting means, the tilt detecting means, and the liquid level detecting means.
Generated in the air cylinder based on the signal from the knowledge means
It has a control means for correcting by controlling the force.
Polishing head 2. A table having two orthogonal moving axes provided on a surface plate so as to be positionable, and a rotary moving axis provided above and rotatable about a vertical axis so as to be capable of rotational positioning. 2. The polishing apparatus according to claim 1 , wherein a workpiece is fixed to the table, and a tilting mechanism provided above the rotation axis so as to process the workpiece while following a normal direction of the workpiece. 3. A polishing head, wherein the polishing head is mounted. 3. A work piece and a work surface are polished in a working fluid.
Polish the workpiece by immersing the polishing tool to be processed.
In the polishing apparatus, the polishing tool is operated by rotating means by rotating means and pressing means.
Pressure operation on the surface to be processed by the polishing tool
The pressing direction of the pressing member of the pressing means for applying a pressing force
Characterized by being provided with a rotation restricting means around the axis of
Polishing equipment. 4. A work and a work surface are machined in a working fluid.
Method of processing the workpiece by immersing the processing tool to be processed
Method, wherein the working tool is rotated by a rotating means,
Pressurizing the surface to be processed according to
Calculate the buoyancy of the machining tool and add the calculated buoyancy
The working pressure on the work surface in consideration of the pressing force of the pressing means.
Processing in a polishing liquid characterized by processing by applying force
Construction method.