JPH06328336A - Chucking device - Google Patents

Abstract

PURPOSE:To precisely control the accuracy of a work chucking face by providing a position regulating means for making a chucking device float to a base plate to regulate its position. CONSTITUTION:Three supporting members 16, 16, 18 compose a position regulating means for making a chucking device float to a magnet chuck table 40 functioning as a base plate to regulate its position. The two supporting members 16 severally have a jack bolt 16b and an operation section 16a to operate the jack bolt 16b, and moreover the lower end of the jack bolt 16a is formed as a semi-spherical supporting end 16c. An operator manually rotates the operation section 16a to regulate the inclination of a main body 12 on the basis of the upper face 47 of the magnet chuck table 40.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chuck device for detachably setting a work.

[0002]

2. Description of the Related Art A chuck device for detachably setting a work is set on a table or the like of a machine tool. For example, the chuck device 4 is set on the table 3 of an ordinary surface grinder as shown in FIG. The work is chucked on the work chuck surface 2 of the chuck device 4.

With the chuck device 4 mounted on the table 3, in order to improve the flatness, the work chuck surface 2 of the chuck device 4 is so-called self-cut. This self-cutting is performed by directly cutting the work chuck surface 2 with the grindstone 1 on the machine in order to match the rotation axis perpendicularity of the grindstone 1 to be processed with the work chuck surface 2 on the table 3. To improve the accuracy of.

[0004]

However, there is a limit to improving the accuracy of the work chuck surface by such a self-cutting method, for example, about ± 1 μm. Further, it is difficult to maintain the accuracy of the work chuck surface 2. That is, there is a problem that the flatness of the work chuck surface 2 deteriorates due to scratches, dents, wear of the chuck surface, or dust, grinding powder, or the like on the work chuck surface 2.

The present invention has been made to solve the above-mentioned problems, and it is possible to control the accuracy of the work chuck surface with high accuracy, and even if the accuracy due to scratches or dents deteriorates, the accuracy can be improved. It is an object of the present invention to provide a chuck device that can easily recover the above.

[0006]

According to the present invention, there is provided a chuck device for setting a work to be attachable to and detachable from a substrate, which is floated with respect to the substrate. This is achieved by a chuck device that comprises position adjusting means for adjusting.

In the present invention, preferably, the position adjusting means includes support members provided at three positions, and two of the three support members are adjusted to adjust the substrate. It is configured to float and adjust the position. Further, in the present invention, it is preferable to have a coolant passage. Further, in the present invention,
It is preferably a vacuum chuck. More preferably, the substrate is a magnet chuck.

[0008]

The chuck device is set on the substrate, and the position adjusting means is adjusted on the substrate to align the chuck device with the substrate. Preferably, in a chuck device supported at three points, the chuck device is aligned with the substrate by adjusting the support members at three points. By providing the coolant passage, it is possible to remove heat generated when processing the workpiece chucked by the chuck device.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the examples described below are suitable specific examples of the present invention, and therefore, various technically preferable limitations are given, but the scope of the present invention particularly limits the present invention in the following description. Unless otherwise stated, the present invention is not limited to these modes.

FIG. 1 is a perspective view showing a preferred embodiment of the chuck device of the present invention. Further, FIG. 2 shows AA of FIG.
It is sectional drawing in a line. Further, FIG. 3 shows a side surface of the chuck device of FIG. In FIG. 1, the chuck device 10 includes a main body 12, a plurality of vacuum plates 14, and three support members 16, 16, 18.

The main body 12 is a rectangular member, and six vacuum plates 14 are arranged in two rows. These vacuum plates 14 are connected to the passage 22 via the air chamber 14a as shown in FIG.

The passage 22 is connected to the intake hole 20. The intake hole 20 is connected to a vacuum suction means 24 as shown in FIG. Each vacuum plate 14
For example, a porous pad. And the suction means 24
2, the work W set on the vacuum plate 14 can be detachably sucked and set in a vacuum as shown in FIG.

Three support members 16, 1 shown in FIGS. 1 and 3
Reference numerals 6 and 18 constitute position adjusting means for floating the position of the so-called chuck device 10 with respect to the magnet chuck table 40 as a substrate to adjust the position.

First, as shown in FIG. 3, one support member 18 is, for example, one into which a steel ball having a diameter of 8 mm is press-fitted. The support member 18 can form a space D between the lower surface 12 a of the main body 12 and the surface 47 of the magnet chuck table 40. This distance D is preferably 5 μ
m or less. As shown in FIGS. 1 and 4, the support member 18 is arranged near the center on the short side of the main body 12.

On the other hand, the two support members 16, 16
Is located at one corner and the other corner of the other short side of the main body 14, as shown in FIGS. 1 and 4.

As shown in FIGS. 3 and 4, the support member 16
Each has a jack bolt 16b and an operating portion 16a for operating the jack bolt 16b. Moreover, the lower end of the jack bolt 16a has a hemispherical support end 16c.
Has become. By manually turning the operation portion 16a by the operator, as shown in FIG. 1, the inclination of the main body 12 is adjusted along the arrow R direction and the arrow Q direction, and the upper surface 47 of the magnet chuck table 40 shown in FIG. Can be done with.

Referring to FIGS. 5 and 6, a plurality of grooves 30 are formed on the lower surface 12a of the main body 12. This groove 3
0 is for heat dissipation and is provided to prevent the main body 12 from being thermally deformed. For example, when the workpiece W shown in the figure is ground, a coolant such as a coolant is passed through the groove 30 to remove heat from the main body 12,
The main body 12 is suppressed from being thermally deformed. Thereby, the accuracy of the finished surface of the upper surface of the main body 12 of the chuck device 10 can be improved.

Next, a description will be given of how to improve the accuracy of the work chuck surface 45 of the chuck device 10 shown in FIG. In this embodiment, as the substrate 40, the ordinary grinder shown in FIG. 8 is used as an example of a magnet chuck substrate. First, by external setup, the work chuck surface 45 shown in FIG. 7 is finished to a flatness of 0.1 μm or less by lapping or the like.

Next, the chuck device 10 shown in FIG. 7 is chucked on the magnet chuck surface 47 of an ordinary grinding machine as shown in FIG. This magnet chuck surface 47 is shown in FIG.
As shown in, the self-griding is performed in advance to a flatness of, for example, about 2 μm or less. This self-gliding may be the usual self-gliding.

As shown in FIG. 7, the accuracy of the magnet chuck surface 47 of the grinder and the work chuck surface (vacuum chuck surface) 45 of the chuck device 10 is adjusted by using the two support members 16, 16. . At this time, the vacuum plate (also referred to as a vacuum chuck plate) 14 in FIG. 1 adjusts the accuracy while being chucked to the magnet chuck surface 47 side by the magnetic force. The adjustment allowance by the support member 16a is at most about 4 μm, for example.

Next, referring to FIGS. 10 and 11, a method of adjusting the accuracy of the work chuck surface 45 of the chuck device 10 with respect to the magnet chuck surface 47 described above (inclination adjusting method).
Will be described.

First, FIG. 10 shows a case where the inclination in the X-axis direction is adjusted. In FIG. 10, a dial gauge or a non-contact type displacement gauge 100 is a fixed column 11
It is set to 0. The dial gauge or the non-contact type displacement gauge 100 measures the inclination of the work chuck surface 45 corresponding to one support member 16 side.

When measuring the tilt in the X-axis direction, the magnet chuck table 40 is fed in the X-axis direction. Thus, the inclination of the vacuum chuck surface 45 with respect to the X-axis direction is measured, and the support member 16
X of the vacuum chuck surface 45 by adjusting
Adjust the tilt in the axial direction.

Next, FIG. 10 shows the vacuum chuck surface 4
5 shows the adjustment of the inclination of the No. 5 in the Y axis direction. When adjusting the tilt in the Y-axis direction, the magnet chuck table 40 is moved in the Y-axis direction. Thereby, the dial gauge or the non-contact displacement gauge 100 can measure the inclination of the vacuum chuck surface 45 in the Y-axis direction. By adjusting the support member 16 based on this, the inclination of the vacuum chuck surface 45 in the Y-axis direction is adjusted.

By the way, the vacuum chuck surface 45
In addition, there are cases where the so-called on-machine perpendicularity to the spindle cannot be maintained due to scratches, dents, wear, or the like. In this case, only the chuck device 10 is removed from the magnet chuck table 40, and the external setup is performed as shown in FIG.
The flatness can be obtained by lapping only the vacuum chuck surface 45, and it is possible to recover the vacuum chuck surface 45 to a predetermined accuracy.

Further, as described above, as shown in FIGS. 5 and 6, a plurality of grooves 30 are formed on the bottom surface or the bottom surface (or also referred to as a seating surface) of the main body 12, which is actually shown in FIG. When the workpiece is ground by the grindstone 60 shown in FIG. 9, the coolant, which is a coolant, flows into the groove 32, so that the thermal deformation of the main body 12 due to the processing heat can be suppressed.

Actually, by using such a chuck device 10, it is possible to control the flatness or straightness or squareness of the work chuck surface (also referred to as a vacuum chuck surface) 45 in units of 0.1 μm, for example. is there. Further, even if the work chuck surface 45 deteriorates in accuracy due to scratches or dents, the accuracy can be easily recovered. Furthermore, the precision of the work chuck surface 45 can be improved with existing equipment. Moreover, the work chuck surface 45 due to the processing heat
Can be suppressed.

As described above, according to the embodiment of the present invention, as a method for improving the flatness, straightness, and squareness of the chuck surface of a normal surface grinder, the vacuum plate is used for the flatness adjustment by an external setup. The three-point support type jack bolt floats about 5 μm from the magnet chuck of the surface grinder to attract the magnet, and the flatness, straightness, and squareness are adjusted on the machine by the jack bolt.

In addition, a groove is provided on the bottom surface of the vacuum plate to remove heat when the grinding fluid passes through the groove, and as a result, heat dissipation is improved and thermal deformation is suppressed. From the above, it is possible to improve the precision of the machined finished surface.

The present invention is not limited to the above embodiment. For example, the number of grooves 30 is not particularly limited to five. Further, the work chuck surface 45 shown in FIG.
Is not limited to vacuum chucks only. Further, in the embodiment, the position adjusting means is provided with the three support members 1.
Although it is composed of 6, 16 and 18, it is of course possible to use not only three but also four or more, for example.

[0031]

As described above, claim 1 and claim 2 are provided.
According to the invention, the accuracy of the work chuck surface can be controlled with high accuracy, and even if the accuracy deteriorates due to scratches or dents, the accuracy can be easily recovered again.
According to the invention of claim 3, deformation due to heat generated during processing can be suppressed, and high accuracy can be maintained.

[Brief description of drawings]

FIG. 1 is a perspective view showing a preferred embodiment of a chuck device of the present invention.

FIG. 2 is a cross-sectional view taken along the line AA of the chuck device of FIG.

FIG. 3 is a side view of the chuck device of FIG.

FIG. 4 is a plan view of the chuck device of FIG.

5 is a side view of the chuck device of FIG.

6 is a side view of the chuck device of FIG.

FIG. 7 is a side view showing the chuck device of FIG. 1 set on a magnet chuck table which is a substrate.

FIG. 8 is a perspective view showing a grinding machine for setting the chuck device of the present invention.

FIG. 9 is a view showing a state in which the chuck device of the present invention is self-ground.

FIG. 10 is a diagram illustrating adjustment of the inclination of the work chuck surface in the X-axis direction.

FIG. 11 is a diagram for explaining adjustment of the inclination of the work chuck surface in the Y-axis direction.

FIG. 12 is a diagram illustrating conventional self-cutting of a work chuck surface.

[Explanation of symbols]

10 chuck device 12 main body 14 vacuum plate 16, 18 support member (position adjusting means) 30 groove (coolant flow path) 40 magnet chuck table (substrate) 45 work chuck surface (vacuum chuck surface)

Claims (5)

[Claims] 1. A chuck device for setting a work to be attachable to and detachable from a substrate, the chuck device including position adjusting means for floating the position of the substrate to adjust the position. apparatus. 2. The position adjusting means includes support members provided at three positions, and two of the three support members are provided.
2. The structure is such that the two support members are adjusted to float and adjust the position with respect to the substrate.
The chuck device according to 1. 3. The chuck device according to claim 1, further comprising a coolant passage. 4. The chuck device according to claim 1, which is a vacuum chuck. 5. The chuck device according to claim 1, wherein the substrate is a magnet chuck.