TWI760524B - Jig for height measurement - Google Patents

Jig for height measurement Download PDF

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TWI760524B
TWI760524B TW107123679A TW107123679A TWI760524B TW I760524 B TWI760524 B TW I760524B TW 107123679 A TW107123679 A TW 107123679A TW 107123679 A TW107123679 A TW 107123679A TW I760524 B TWI760524 B TW I760524B
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height
measuring
work
plate member
base
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TW107123679A
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Chinese (zh)
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TW201911401A (en
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服部真人
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日商迪思科股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

安定地實施工作台面的高度之測定。 Measure the height of the work surface stably.

一種高度測定用治具，是在加工裝置中測定高度之時使用，該 加工裝置具備可旋轉的工作台座、及將輪座固定於前端的主軸，該工作台座可以將以保持面保持板狀的被加工物之工作夾台以支撐面來支撐，該輪座可以裝設加工工具，該高度測定用治具是使固定於該輪座之接觸式量器沿著該加工工具的旋轉軌道掃描來測定該保持面或該支撐面的高度，並具備形成有複數個開口部的板件、及從該板件突出之複數個定位部，該定位部具有將該板件定位於相對於該工作夾台或該工作台座之預定位置的功能，該開口部是沿該旋轉軌道形成為在該板件已被定位於該預定位置時讓該保持面或該支撐面之測定對象區域露出。 A height measuring jig is used when measuring height in a processing device. The processing device is provided with a rotatable table base and a main shaft that fixes a wheel base to the front end. The work table base can support a work chuck that holds a plate-shaped workpiece with a holding surface on a support surface. The wheel base can be installed. A processing tool, the jig for measuring the height is to measure the height of the holding surface or the supporting surface by scanning a contact gauge fixed to the wheel base along the rotation orbit of the processing tool, and has a plurality of openings formed thereon The plate member, and a plurality of positioning portions protruding from the plate member, the positioning portion has the function of positioning the plate member at a predetermined position relative to the work clamping table or the work table base, and the opening portion is along the rotation track. It is formed so that the measurement target area of the holding surface or the supporting surface is exposed when the plate member has been positioned at the predetermined position.

Description

高度測定用治具 Jig for height measurement 發明領域 Field of Invention

本發明是有關於一種在工作台面之預定位置測定該工作台面之高度時所使用的治具。 The present invention relates to a jig used for measuring the height of a work surface at a predetermined position of the work surface.

發明背景 Background of the Invention

在從由矽或砷化鎵、藍寶石、玻璃等所構成之板狀的被加工物形成包含元件之元件晶片的步驟中，可使用磨削該被加工物的磨削裝置或研磨該被加工物的研磨裝置等各種的加工裝置。該加工裝置具備保持被加工物的工作夾台、及對該被加工物進行加工的加工單元，且是以該加工單元對已保持於該工作夾台上之該被加工物進行加工。 In the step of forming a device wafer including elements from a plate-shaped workpiece made of silicon, gallium arsenide, sapphire, glass, or the like, a grinding device for grinding the workpiece or grinding the workpiece may be used. Various processing equipment such as grinding equipment. The processing apparatus includes a work chuck for holding a workpiece, and a processing unit for processing the workpiece, and the processing unit processes the workpiece held on the work chuck.

該工作夾台是被工作台座所支撐。該工作台座之上表面是形成為平坦的支撐面，且可在該支撐面上固定工作夾台。被加工物是以已保持於被固定在該工作台座之支撐面上的工作夾台之上的狀態被該加工單元所加工。 The work clamp table is supported by the work table base. The upper surface of the work table base is formed as a flat support surface, and the work clamp table can be fixed on the support surface. The workpiece is processed by the processing unit in a state of being held on the work chuck fixed on the support surface of the table base.

該加工單元具備大致平行於該鉛直方向的主軸、配置於該主軸的下端的輪座、及裝設於該輪座之下表面的加工工具。該加工工具可為例如在下表面具備磨削磨石的磨削輪或在下表面具備研磨墊的研磨輪等。 The machining unit includes a main shaft substantially parallel to the vertical direction, a wheel seat disposed at the lower end of the main shaft, and a machining tool mounted on the lower surface of the wheel seat. The processing tool may be, for example, a grinding wheel provided with a grinding stone on the lower surface, or a grinding wheel provided with a polishing pad on the lower surface, or the like.

在被加工物的加工時是使該主軸旋轉而使該加工工具旋轉，並且使該工作夾台旋轉，且使該加工單元朝鉛直方向下方移動。當裝設於該加工工具之該磨削磨石或研磨墊接觸於該被加工物時，該被加工物即被加工。 When machining a workpiece, the spindle is rotated to rotate the machining tool, and the table is rotated to move the machining unit vertically downward. When the grinding stone or polishing pad mounted on the processing tool contacts the workpiece, the workpiece is processed.

為了實現被加工物之更適當的加工，已對工作台座、工作夾台以及加工單元採取各式各樣的改善。例如，在磨削裝置中，為了將該被加工物磨削成均一的厚度，所使用的有將具有極小的梯度之側面的圓錐的該側面之形狀設為保持面之形狀的工作夾台(參照專利文獻1)。 In order to realize more appropriate processing of the workpiece, various improvements have been made to the table base, the work chuck, and the processing unit. For example, in a grinding apparatus, in order to grind the workpiece to a uniform thickness, there is used a table ( Refer to Patent Document 1).

又，在開始進行加工時，只要工作台座、工作夾台及加工單元未形成為預定的位置關係，就會有在加工上產生偏差的情況。因此，在加工裝置中，會事先將工作台座、工作夾台以及加工單元的位置或傾斜等調整成能夠適當地加工被加工物。 In addition, when the processing is started, if the table base, the work chuck, and the processing unit are not formed in a predetermined positional relationship, there are cases in which deviations in processing occur. Therefore, in the processing apparatus, the positions, inclinations, and the like of the table base, the work chuck, and the processing unit are adjusted in advance so that the workpiece can be appropriately processed.

在該調整中，是例如在工作台座之支撐面的複數處測定高度來確認該支撐面的傾斜。又，將工作夾台固定於工作台座之支撐面上，而在該工作夾台之保持面的複數處測定高度來確認該保持面的傾斜。 In this adjustment, for example, heights are measured at plural places of the support surface of the table base, and the inclination of the support surface is confirmed. In addition, the table is fixed to the support surface of the table base, and the height of the holding surface of the table is measured at a plurality of places to confirm the inclination of the holding surface.

該支撐面或該保持面等的工作台面的高度的測定是使用裝設於該加工單元之輪座的接觸式量器來實施。例如，藉由在裝設加工工具之前的輪座上裝設該接觸式量器，並旋轉該主軸以使該接觸式量器之下端的測量頭接觸於成為測定對象之該工作台面的預定之處。如此一來，可以使該測量頭沿著加工中的加工工具的旋轉軌道來 接觸於該工作台面以測定該工作台面的高度(參照專利文獻2)。 The measurement of the height of the table surface, such as the support surface or the holding surface, is carried out using a contact gauge installed in the wheel base of the processing unit. For example, by installing the contact gauge on the wheel base before the machining tool is installed, and rotating the main shaft, the measuring head at the lower end of the contact gauge is brought into contact with a predetermined position of the work surface that is the object of measurement. place. In this way, the measuring head can be made to follow the rotation path of the machining tool being machined. The height of the table surface is measured by touching the table surface (refer to Patent Document 2).

先前技術文獻 prior art literature 專利文獻 Patent Literature

專利文獻1：日本專利特開2007-222986號公報 Patent Document 1: Japanese Patent Laid-Open No. 2007-222986

專利文獻2：日本專利特開2013-141725號公報 Patent Document 2: Japanese Patent Laid-Open No. 2013-141725

發明概要 Summary of Invention

藉由裝設於輪座之接觸式量器所進行之工作台面的高度的測定是在例如該工作台面之中央部、及通過該中央部之該加工工具的旋轉軌道上的該工作台面之2處端部，共計3點上實施。該測定是在具備該加工單元之加工裝置的使用開始時或維護時、工作夾台的更換時等實施。為了在開始進行加工裝置的使用後且於該工作台面之傾斜已變化的情況下，可正確地檢測產生變化之情形，較理想的是無論測定時間點為何時，都總是在相同的3點上實施測定。 The measurement of the height of the work surface by the contact measuring device mounted on the wheel base is performed, for example, at the center of the work surface and on the rotation orbit of the processing tool passing through the center of the work surface. At the end, it is implemented at a total of 3 points. This measurement is carried out at the start of use of the processing apparatus provided with the processing unit, at the time of maintenance, at the time of replacement of the work table, and the like. When the inclination of the table surface has changed after starting to use the processing device, it is desirable to always be at the same three points regardless of the measurement time point so that the change can be accurately detected. Carry out the measurement above.

然而，因為根據測定的時間點會使實施測定之作業人員並不一定是同一人，又，於工作台面上並未形成有表示該3點之標記等，所以測定並不一定每次都可在同一處實施。 However, since the operator who performs the measurement may not necessarily be the same person depending on the time of the measurement, and there are no marks or the like indicating the three points on the work surface, the measurement may not always be performed every time. implemented in the same place.

又，在該工作台座之該支撐面上設有成為用於對工作夾台之保持面傳達負壓的路徑之溝。因此，會 有下述情況：使該接觸式量器移動時該測量頭落入該溝而使高度的變化變大，導致接觸式量器之測定資料的安定性惡化。此外，於該支撐面上有除了該溝以外還有螺孔等之設有凹凸形狀的情況，而有該測量頭碰撞到該凹凸形狀而使該測量頭受到損傷的疑慮。 Moreover, the groove which becomes a path for transmitting a negative pressure to the holding surface of a work clamp is provided in this support surface of this table base. Therefore, will In some cases, when the contact gauge is moved, the measuring head falls into the groove, so that the change in height becomes large, and the stability of the measurement data of the contact gauge is deteriorated. In addition, in addition to the grooves, there are cases in which uneven shapes such as screw holes are provided on the support surface, and there is a possibility that the measuring head may be damaged by colliding with the uneven shapes.

本發明是有鑒於所述問題點而作成的發明，其目的在於提供一種測定用治具，該測定用治具是使接觸式量器之測量頭定位於成為測定對象之工作台面的預定位置，而可以安定地實施對該工作台面之高度的測定。 The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a measuring jig that positions a measuring head of a contact measuring device at a predetermined position on a table surface to be measured, Therefore, the measurement of the height of the work surface can be performed stably.

根據本發明的一態樣，可提供一種高度測定用治具，其是在加工裝置中測定高度之時使用，該加工裝置具備可旋轉的工作台座、及將輪座固定於前端的主軸，該工作台座可以將以保持面保持板狀的被加工物之工作夾台以支撐面來支撐，該輪座可以裝設磨削或研磨被加工物的加工工具，測定高度之時是使固定於該輪座之接觸式量器沿著該加工工具的旋轉軌道掃描來測定該保持面或該支撐面的高度，該高度測定用治具之特徵在於具備：覆蓋該保持面或該支撐面且形成有複數個開口部的板件；及從該板件突出之凸狀的複數個定位部，該定位部具有將該板件定位在相對於該工作夾台或該工作台座之預定位置的功能，該開口部是沿該旋轉軌道形成為在該板件定位於相 對於該工作夾台或該工作台座之該預定位置時，讓該保持面或該支撐面的一部分露出，該開口部是能夠讓該接觸式量器通過該開口部來接觸於該保持面或該支撐面的該一部分的大小。 According to one aspect of the present invention, there can be provided a height measuring jig used when measuring height in a processing apparatus including a rotatable table base and a spindle for fixing a wheel base to a front end, the The table base can support the work clamp table holding the plate-shaped workpiece with the holding surface with the support surface. The wheel seat can be equipped with a processing tool for grinding or grinding the workpiece. When measuring the height, it is fixed to the workpiece. The contact measuring device of the wheel seat scans along the rotation orbit of the processing tool to measure the height of the holding surface or the supporting surface, and the height measuring jig is characterized by having: covering the holding surface or the supporting surface and forming a a plurality of plate parts with openings; and a plurality of convex positioning parts protruding from the plate parts, the positioning parts have the function of positioning the plate parts at a predetermined position relative to the work clamp or the work table base, the The opening portion is formed along the rotation track so as to be positioned at the opposite side of the plate member. For the predetermined position of the work table or the work table base, a part of the holding surface or the supporting surface is exposed, and the opening portion is capable of allowing the contact gauge to contact the holding surface or the holding surface through the opening portion. The size of this portion of the support surface.

再者，本發明的一個態樣的高度測定用治具，是在測定具有同心圓狀地形成有複數個環狀凹部的該支撐面的該工作台座之該支撐面的高度時使用，也是本發明的一態樣的高度測定用治具之特徵在於：該板件具有藉由覆蓋該環狀凹部來防止該測定器的接觸式量器落下至該環狀凹部的功能。 Furthermore, the height measuring jig of one aspect of the present invention is used when measuring the height of the support surface of the table base having the support surface in which a plurality of annular recesses are formed concentrically, which is also the present invention. In one aspect of the invention, the height measuring jig is characterized in that the plate member has a function of preventing the contact measuring device of the measuring device from falling to the annular concave portion by covering the annular concave portion.

又，在本發明的一態樣中，亦可為：該複數個定位部包含形成於該板件的一面的複數個第1定位部、及形成於該板件的另一面的複數個第2定位部，該複數個第1定位部分別具有下述功能：當該板件定位在相對於該工作夾台之預定位置而使該板件的該一面接觸於該保持面時，是接觸於該工作夾台的側面來抑制該板件相對於該工作夾台之位置關係的變化，該複數個第2定位部分別具有下述功能：當該板件定位在相對於該工作台座之預定位置而使該板件的該另一面接觸於該支撐面時，插入形成於該支撐面之凹部來抑制該板件相對於該工作台座之位置關係的變化。 Furthermore, in one aspect of the present invention, the plurality of positioning portions may include a plurality of first positioning portions formed on one side of the plate member and a plurality of second positioning portions formed on the other side of the plate member Positioning parts, the plurality of first positioning parts respectively have the following functions: when the plate is positioned at a predetermined position relative to the work clamp and the one side of the plate is in contact with the holding surface, it is in contact with the holding surface. The side surface of the work clamp is used to restrain the change of the positional relationship of the plate relative to the work clamp, and the plurality of second positioning parts respectively have the following functions: when the plate is positioned at a predetermined position relative to the work base, When the other surface of the plate is brought into contact with the support surface, a recess formed in the support surface is inserted to suppress a change in the positional relationship of the plate relative to the table base.

本發明的一態樣之高度測定用治具具備覆蓋該工作台面之板件、及從該板件突出之凸狀的複數個定 位部，且是載置於該工作台面上的預定位置而使用。該高度測定用治具是以形成有該定位部之面朝向下方的狀態來載置於該工作台面上。 A height measuring jig of one aspect of the present invention includes a plate member covering the table surface, and a plurality of convex-shaped fixed members protruding from the plate member. It is placed at a predetermined position on the work surface and used. The jig for height measurement is placed on the table in a state where the surface on which the positioning portion is formed faces downward.

複數個該定位部在該板件未定位於該工作台面上之適當的位置的情況下，是將任一個該定位部配設於抵接於該工作台面之位置。因此，可藉由將該板件定位於該定位部未抵接於該工作台面之位置，而將該板件定位於預定位置。也就是說，複數個該定位部具備將該板件定位於相對於該工作夾台或該工作台座之預定位置的功能。 When the plurality of positioning portions are not positioned at appropriate positions on the work surface, any one of the positioning portions is disposed at a position abutting on the work surface. Therefore, the board can be positioned at a predetermined position by positioning the board at a position where the positioning portion is not in contact with the work surface. That is to say, a plurality of the positioning parts have the function of positioning the plate at a predetermined position relative to the work clamp or the work base.

在該板件上形成有複數個開口部，當將該板件定位於工作夾台或工作台座上之預定位置時，可將該工作台面之特定的一部分藉由該開口部而露出。在測定該工作台面之高度時，是讓接觸式量器之測量頭接觸於藉由該開口部而露出的該一部分，以測定該一部分的高度。 A plurality of openings are formed on the plate, and when the plate is positioned at a predetermined position on the work clamp or the work table, a specific part of the work surface can be exposed through the openings. When measuring the height of the table surface, the height of the part is measured by bringing the measuring head of the contact measuring device into contact with the part exposed through the opening.

當使用該高度測定用治具時，在進行該工作台面的高度的測定時，每次都可藉由該開口部將相同的該特定的一部分露出。因此，無論測定時間點或測定人員，都可以安定地對工作台面之相同部分進行測定。 When the height measuring jig is used, the same specific part can be exposed through the opening every time when the height of the table is measured. Therefore, regardless of the measurement time point or the measurement person, the same part of the work surface can be stably measured.

從而，根據本發明的一態樣，可提供一種測定用治具，該測定用治具是將接觸式量器之測量頭定位於成為測定對象之工作台面的預定位置，而可以安定地實施對該工作台面之高度的測定。 Therefore, according to one aspect of the present invention, there can be provided a measuring jig that can stably perform calibration by positioning the measuring head of a contact measuring device at a predetermined position on a table surface to be measured. Determination of the height of the work surface.

1:高度測定用治具 1: Jig for height measurement

1a:第1面 1a: side 1

1b:第2面 1b: Side 2

2:磨削裝置 2: Grinding device

3:開口部 3: Opening

4:裝置基台 4: Device base

4a:開口 4a: Opening

5a:第1定位部 5a: 1st positioning part

5b:第2定位部 5b: Second positioning part

5c:板件 5c: Plate

6:工作夾台 6: Work clamp table

6a:保持面 6a: Keep Face

6b:工作台座 6b: Workbench base

6c:支撐面 6c: Support surface

6d:溝(環狀凹部) 6d: groove (annular recess)

6e:凹部 6e: Recess

6f:吸引路 6f: Attraction Road

7:被加工物 7: Processed objects

8:X軸移動工作台 8: X-axis moving table

10:搬出入區域 10: Moving in and out of the area

12:加工區域 12: Processing area

14:磨削單元(加工單元) 14: Grinding unit (machining unit)

16:支撐部 16: Support part

18:Z軸導軌 18: Z-axis guide

20:Z軸移動板 20: Z-axis moving board

22:滾珠螺桿 22: Ball screw

24:Z軸脈衝馬達 24: Z-axis pulse motor

26:主軸殼體 26: Spindle housing

28:主軸 28: Spindle

28a:輪座 28a: Wheel seat

30:磨削輪(加工工具) 30: Grinding wheel (processing tool)

30a:孔 30a: hole

32:磨削磨石 32: Grinding grindstone

34:固定具 34: Fixtures

34a:插通孔 34a: through hole

36:吸引源 36: Attract source

38:接觸式量器 38: Contact gauge

38a:測量頭 38a: Measuring head

38b:指示部 38b: Instructions

38c:軌道 38c: Orbit

X、Y、Z:方向 X, Y, Z: direction

圖1是示意地顯示磨削裝置的立體圖。 FIG. 1 is a perspective view schematically showing a grinding apparatus.

圖2是示意地顯示由磨削單元進行之被加工物的磨削加工的立體圖。 FIG. 2 is a perspective view schematically showing grinding of a workpiece by a grinding unit.

圖3是示意地顯示由磨削單元進行之被加工物的磨削加工的局部截面圖。 FIG. 3 is a partial cross-sectional view schematically showing grinding of a workpiece by a grinding unit.

圖4(A)是示意地顯示裝設有接觸式量器之輪座的局部截面圖，圖4(B)是示意地顯示高度測定用治具之第1面側的立體圖，圖4(C)是示意地顯示高度測定用治具之第2面側的立體圖。 Fig. 4(A) is a partial cross-sectional view schematically showing the wheel base on which the contact gauge is installed, Fig. 4(B) is a perspective view schematically showing the first surface side of the height measuring jig, and Fig. 4(C) ) is a perspective view schematically showing the second surface side of the height measuring jig.

圖5(A)是示意地顯示工作夾台及高度測定用治具的立體圖，圖5(B)是示意地顯示已定位於工作夾台上之高度測定用治具的立體圖，圖5(C)是示意地顯示工作台座及高度測定用治具的立體圖，圖5(D)是示意地顯示已定位於工作台座上之高度測定用治具的立體圖。 Fig. 5(A) is a perspective view schematically showing a work clamp table and a jig for height measurement, Fig. 5(B) is a perspective view schematically showing a height measurement jig positioned on the work clamp table, Fig. 5(C) ) is a perspective view schematically showing a table base and a height-measuring jig, and FIG. 5(D) is a perspective view schematically showing the height-measuring jig positioned on the table base.

圖6是示意地顯示藉由接觸式量器測定已定位有高度測定用治具之工作夾台的保持面的高度之情形的立體圖。 FIG. 6 is a perspective view schematically showing a state in which the height of the holding surface of the table on which the jig for height measurement is positioned is measured by a contact gauge.

用以實施發明之形態 Form for carrying out the invention

參照附圖，說明本發明的一個態樣的實施形態。本實施形態之高度測定用治具是在磨削裝置或研磨裝置等的加工裝置中，於對該加工裝置所具備之工作夾台的保持面或該加工裝置所具備之工作台座的支撐面等的工作台面的高度進行測定時使用。圖1是作為使用本實施形態之高度測定用治具之加工裝置之一例而示意地顯示磨削裝置的立體圖。 An embodiment of one aspect of the present invention will be described with reference to the drawings. The jig for height measurement according to the present embodiment is used in a grinding device or a processing device such as a polishing device, on a holding surface of a work chuck provided in the processing device or a support surface of a table base provided in the processing device, etc. used when measuring the height of the work surface. FIG. 1 is a perspective view schematically showing a grinding apparatus as an example of a processing apparatus using the jig for height measurement according to the present embodiment.

在磨削裝置2之裝置基台4的上表面設有開口4a。於該開口4a內具備有X軸移動工作台8，該X軸移動工作台8在上表面載置有吸引保持被加工物的工作夾台6、及支撐該工作夾台6的工作台座6b。該X軸移動工作台8是藉由圖未示之X軸方向移動機構而可朝X軸方向移動。該X軸移動工作台8可藉由X軸方向移動機構而定位於裝卸被加工物的搬出入區域10、及磨削加工該被加工物的加工區域12。 An opening 4 a is provided on the upper surface of the device base 4 of the grinding device 2 . Inside the opening 4a, there is provided an X-axis moving table 8 on which a table 6 for sucking and holding a workpiece and a table base 6b for supporting the table 6 are mounted on the upper surface. The X-axis moving table 8 is movable in the X-axis direction by an X-axis direction moving mechanism not shown. The X-axis moving table 8 can be positioned in the carry-in area 10 for attaching and detaching the workpiece, and the processing area 12 for grinding the workpiece by the X-axis direction moving mechanism.

該工作台座6b之上表面是成為載置該工作夾台8之支撐面6c(參照圖5(C))。於該工作台座6b之支撐面6c上形成有例如配置排列成同心圓狀之複數個溝(環狀凹部)6d(參照圖3及圖5(C))。該工作台座6b在內部具備吸引路6f(參照圖3)，該吸引路6f是將一端通到該溝6d，並將另一端連接於吸引源36(參照圖3)。 The upper surface of the table base 6b serves as a support surface 6c on which the table 8 is placed (see FIG. 5(C) ). A plurality of grooves (annular recesses) 6d (refer to FIG. 3 and FIG. 5(C) ) are formed on the support surface 6c of the table base 6b, for example, arranged in a concentric circle. The table base 6b is provided with a suction path 6f (see FIG. 3 ) inside which leads one end to the groove 6d and connects the other end to the suction source 36 (see FIG. 3 ).

於該工作台座6b之上載置有工作夾台6。該工作夾台6之上表面是成為載置被加工物的保持面6a。在工作夾台6之上部配設有多孔質構件。於該工作夾台6之該多孔質構件的下方形成有通到該工作夾台6之底面的通氣口。當在該工作台座6b上載置工作夾台6時，該通氣口是通過該工作台座6b之該溝6d及吸引路6f而連通至該吸引源36。 The table 6 is placed on the table base 6b. The upper surface of the table 6 is a holding surface 6a on which the workpiece is placed. A porous member is arranged on the upper part of the table 6 . A ventilation port leading to the bottom surface of the work clamp 6 is formed below the porous member of the work clamp 6 . When the table 6 is placed on the table base 6b, the ventilation port communicates with the suction source 36 through the groove 6d and the suction path 6f of the table base 6b.

當使該吸引源36作動時，會使負壓作用於已載置於該保持面6a上之被加工物，該被加工物即被吸引保持於工作夾台6。又，載置該工作夾台6之該工作台 座6b能夠以繞著垂直於該保持面6a之軸的方式旋轉。 When the suction source 36 is actuated, a negative pressure is applied to the workpiece placed on the holding surface 6 a , and the workpiece is sucked and held by the table 6 . Also, the table on which the table 6 is placed The seat 6b is rotatable about an axis perpendicular to the holding surface 6a.

於該加工區域12的上方配設有磨削加工該被加工物的磨削單元(加工單元)14。於裝置基台4的後方側豎立設置有支撐部16，該磨削單元14是藉由該支撐部16所支撐。於支撐部16之前表面設有朝Z軸方向伸長之一對Z軸導軌18，且在各個Z軸導軌18上可滑動地安裝有Z軸移動板20。 Above the processing area 12, a grinding unit (processing unit) 14 for grinding the workpiece is disposed. A support portion 16 is erected on the rear side of the device base 4 , and the grinding unit 14 is supported by the support portion 16 . A pair of Z-axis guide rails 18 extending in the Z-axis direction is provided on the front surface of the support portion 16 , and a Z-axis moving plate 20 is slidably mounted on each Z-axis guide rail 18 .

在Z軸移動板20的背面側(後表面側)設置有螺帽部(圖未示)，且在該螺帽部螺合有平行於Z軸導軌18之Z軸滾珠螺桿22。在Z軸滾珠滾珠螺桿22的一端部連結有Z軸脈衝馬達24。只要以Z軸脈衝馬達24使Z軸滾珠螺桿22旋轉，Z軸移動板20即沿著Z軸導軌18在Z軸方向上移動。 A nut portion (not shown) is provided on the back side (rear surface side) of the Z-axis moving plate 20 , and the Z-axis ball screw 22 parallel to the Z-axis guide rail 18 is screwed to the nut portion. A Z-axis pulse motor 24 is connected to one end of the Z-axis ball screw 22 . As long as the Z-axis ball screw 22 is rotated by the Z-axis pulse motor 24 , the Z-axis moving plate 20 moves in the Z-axis direction along the Z-axis guide rail 18 .

於Z軸移動板20的前表面側下部固定有實施被加工物的磨削加工的磨削單元14。只要使Z軸移動板20在Z軸方向上移動，磨削單元14即可以在Z軸方向(加工進給方向)上移動。 A grinding unit 14 for performing grinding processing of a workpiece is fixed to the lower part of the front surface side of the Z-axis moving plate 20 . As long as the Z-axis moving plate 20 is moved in the Z-axis direction, the grinding unit 14 can be moved in the Z-axis direction (processing feed direction).

磨削單元14具有藉由連結於基端側之馬達而旋轉的主軸28。該馬達是設置於主軸殼體26內。於該主軸28之前端側配設有輪座28a，於該輪座28a之下表面可裝設隨著該主軸28之旋轉而旋轉的磨削輪(加工工具)30。於該磨削輪30之下表面設置有磨削磨石32。 The grinding unit 14 has a main shaft 28 that is rotated by a motor connected to the base end side. The motor is arranged in the main shaft housing 26 . A wheel seat 28 a is disposed on the front end side of the main shaft 28 , and a grinding wheel (processing tool) 30 that rotates with the rotation of the main shaft 28 can be mounted on the lower surface of the wheel seat 28 a. A grinding stone 32 is provided on the lower surface of the grinding wheel 30 .

針對磨削單元14進一步詳述。圖2是示意地顯示由磨削單元14進行之被加工物的磨削加工的立體 圖。如圖2所示，在磨削加工被吸引保持於工作夾台6之保持面6a上的被加工物7時，使載置該工作夾台6之該工作台座6b旋轉，並且一邊使該磨削輪30旋轉一邊使磨削輪30下降。如此一來，可將該磨削磨石32抵接於被加工物1之被磨削面，而將該被加工物7磨削加工。 Further details are given for the grinding unit 14 . FIG. 2 is a perspective view schematically showing the grinding process of the workpiece by the grinding unit 14 picture. As shown in FIG. 2, when grinding the workpiece 7 sucked and held on the holding surface 6a of the table 6, the table base 6b on which the table 6 is placed is rotated, and the grinding The grinding wheel 30 is lowered while the grinding wheel 30 is rotated. In this way, the grinding stone 32 can be brought into contact with the ground surface of the workpiece 1, and the workpiece 7 can be ground.

圖3是示意地顯示由磨削單元進行之被加工物的磨削加工的局部截面圖。於圖3中所顯示的是，輪座28a及磨削輪30的一部分的截面、與工作台座6b及工作夾台6之截面。如圖3所示，於輪座28a上形成有插通孔34a，該插通孔34a是供用於將該磨削輪(加工工具)30裝設於該輪座28a而使用之固定具34插通。 FIG. 3 is a partial cross-sectional view schematically showing grinding of a workpiece by a grinding unit. Shown in FIG. 3 are a cross-section of the wheel base 28 a and a portion of the grinding wheel 30 , and a cross-section of the table base 6 b and the work chuck 6 . As shown in FIG. 3 , an insertion hole 34a is formed in the wheel base 28a, and the through hole 34a is for inserting a fixture 34 for attaching the grinding wheel (processing tool) 30 to the wheel base 28a. Pass.

例如，於該固定具34之前端形成有螺牙，於該磨削輪30之上表面在對應該插通孔34a的位置上形成有於內壁具備螺紋槽之複數個孔30a。藉由將插通於該插通孔34a的該固定具34鎖緊於該磨削輪30的該孔30a，以將該磨削輪30裝設於該輪座28a。 For example, a screw thread is formed at the front end of the fixture 34, and a plurality of holes 30a having screw grooves on the inner wall are formed on the upper surface of the grinding wheel 30 at positions corresponding to the insertion holes 34a. The grinding wheel 30 is mounted on the wheel base 28a by locking the fixing tool 34 inserted through the insertion hole 34a to the hole 30a of the grinding wheel 30 .

例如，可在將該磨削輪30裝設於該輪座28a的期間，事先調整工作台座6b、工作夾台6及磨削單元14之位置或傾斜等，以使該工作夾台6的該保持面6a相對於該磨削磨石32的磨削面成為平行。 For example, when the grinding wheel 30 is mounted on the wheel base 28a, the positions or inclinations of the table base 6b, the work chuck 6 and the grinding unit 14 may be adjusted in advance so that the The holding surface 6 a is parallel to the grinding surface of the grinding stone 32 .

在該調整中，是例如在該工作台座6b的該支撐面6c的複數處測定高度來確認該支撐面6c的傾斜。又，將該工作夾台6固定於該工作台座6b的該支撐面6c上，並在該工作夾台6的該保持面6a的複數處測定高度來 確認該保持面6a的傾斜。使用已裝設於該磨削單元14之輪座28a的接觸式量器來實施對該支撐面6c或該保持面6a等的工作台面的高度的測定。 In this adjustment, the inclination of the support surface 6c is confirmed, for example, by measuring the heights at plural places of the support surface 6c of the table base 6b. In addition, the table 6 is fixed to the support surface 6c of the table base 6b, and heights are measured at plural places of the holding surface 6a of the table 6 to obtain The inclination of the holding surface 6a was confirmed. The measurement of the height of the table surface, such as the support surface 6c, the holding surface 6a, etc., is performed using the contact-type gauge installed in the wheel base 28a of the grinding unit 14.

圖4(A)是示意地顯示裝設有接觸式量器38之輪座28a的局部截面圖。如圖4(A)所示，該接觸式量器38之上部是形成為可插入該輪座28a之插通孔34a的大小。例如，在該插通孔34a之內壁形成有螺紋槽的情況下，在該接觸式量器38的該上部形成螺牙時，可以藉由將該上部鎖緊於該插通孔34a而將該接觸式量器38裝設於該輪座28a。 FIG. 4(A) is a partial cross-sectional view schematically showing the wheel base 28a on which the contact gauge 38 is mounted. As shown in FIG. 4(A) , the upper part of the contact gauge 38 is formed in a size that can be inserted into the insertion hole 34a of the wheel base 28a. For example, when a screw groove is formed on the inner wall of the insertion hole 34a, when a screw thread is formed on the upper part of the contact gauge 38, the upper part can be locked to the insertion hole 34a, so that the The contact gauge 38 is mounted on the wheel base 28a.

於該接觸式量器38的下端配設有接觸於成為高度測定對象之該工作台面的測量頭38a，當使該測量頭38a接觸於該工作台面時即可以測定該工作台面的高度。於該接觸式量器38上設有指示部38b，測定結果是藉由該指示部38b而顯示。 A measuring head 38a which is in contact with the table surface which is the object of height measurement is disposed at the lower end of the contact measuring device 38. When the measuring head 38a is brought into contact with the table surface, the height of the table surface can be measured. An indication portion 38b is provided on the contact measuring device 38, and the measurement result is displayed by the indication portion 38b.

該接觸式量器38是例如裝設於磨削輪30被裝設前的輪座28a上，並藉由使該主軸28旋轉，而使該測量頭38a接觸於成為測定對象之該工作台面的預定之處。當使該主軸28旋轉時，可以使該測量頭38a沿著加工中的磨削磨石32之軌道接觸於該工作台面並進行測定。 The contact gauge 38 is, for example, mounted on the wheel base 28a before the grinding wheel 30 is mounted, and by rotating the main shaft 28, the measuring head 38a is brought into contact with the table surface which is the measurement object. place of reservation. When the main shaft 28 is rotated, the measuring head 38a can be brought into contact with the table surface along the orbit of the grinding stone 32 being processed to perform measurement.

由該接觸式量器38所進行之工作台面的高度的測定，是在例如該工作台面之中央部、及通過該中央部之該磨削磨石32的旋轉軌道上的該工作台面之2處端部，共計3點上實施。該測定是在該磨削裝置2之開始使 用時或維護時、工作夾台6的更換時等實施。為了在開始進行該磨削裝置2的使用後且於該工作台面之傾斜已變化的情況下，可正確地檢測產生該變化之情形，較理想的是無論測定時間點為何時，都總是在相同的3點上實施測定。 The height of the table surface is measured by the contact measuring device 38, for example, at the center of the table surface and at two places on the table surface on the rotational orbit of the grinding stone 32 passing through the center portion The end is implemented at a total of 3 points. This measurement is performed at the start of the grinding device 2 It is implemented at the time of use or maintenance, at the time of replacement of the work chuck 6, and the like. When the inclination of the table surface has changed after the use of the grinding device 2 is started, it is desirable to always detect the change in the situation that the change occurs, regardless of the measurement time point. The measurement was carried out at the same 3 points.

然而，根據測定的時間點，並不一定是同一人實施測定，又，於工作台面上並未形成有表示該3點之標記等，所以測定並不一定每次都能夠在同一處實施。 However, depending on the timing of the measurement, the same person does not necessarily perform the measurement, and since no marks or the like indicating the three points are formed on the table surface, the measurement cannot necessarily be performed at the same place every time.

又，在該工作台座6b之該支撐面6c上設有溝6d。因此，會有下述情形：使該接觸式量器38移動時該測量頭38a落入該溝6d而導致高度大幅變化，且使測定資料的安定性惡化。 In addition, a groove 6d is provided on the support surface 6c of the table base 6b. Therefore, when the contact measuring device 38 is moved, the measuring head 38a falls into the groove 6d, thereby causing a large change in height and deteriorating the stability of the measurement data.

此外，於該支撐面6c上除了該溝6d以外，還設有例如將工作台座6b固定於X軸移動工作台8上之螺絲用螺孔、或將工作夾台6固定於工作台座6b之螺絲用的螺孔等凹凸形狀。當該支撐面6c上設有凹凸形狀時，會有該測量頭38a碰撞到該凹凸形狀而使該測量頭38a受到損傷的疑慮。於是，在該測定時使用本實施形態之高度測定用治具。 In addition to the groove 6d, the support surface 6c is provided with, for example, a screw hole for fixing the table base 6b to the X-axis moving table 8, or a screw for fixing the work clamp 6 to the table base 6b. Concave and convex shapes such as screw holes for use. When the supporting surface 6c is provided with a concave-convex shape, there is a possibility that the measuring head 38a collides with the concave-convex shape and the measuring head 38a is damaged. Therefore, the height measurement jig of this embodiment is used for this measurement.

接著，針對本實施形態之高度測定用治具作說明。圖4(B)是示意地顯示高度測定用治具1之第1面1a側的立體圖，圖4(C)是示意地顯示高度測定用治具1之第2面1b側的立體圖。該高度測定用治具1具有覆蓋工作台座6b之支撐面6c、或工作夾台6之保持面6a的大小之大 致圓板狀的板件5c。該板件5c形成有複數個開口部3。 Next, the jig for height measurement of this embodiment is demonstrated. FIG. 4(B) is a perspective view schematically showing the side of the first surface 1a of the jig 1 for height measurement, and FIG. 4(C) is a perspective view schematically showing the side of the second surface 1b of the jig 1 for height measurement. The height measuring jig 1 has a size large enough to cover the support surface 6c of the table base 6b or the holding surface 6a of the table 6 A disc-shaped plate member 5c is formed. The plate member 5c has a plurality of openings 3 formed thereon.

於該高度測定用治具1之第1面1a側形成有從該板件5c突出之凸狀的複數個第1定位部5a。又，於該高度測定用治具1之第2面1b側形成有從該板件5c突出之凸狀的複數個第2定位部5b。 A plurality of convex first positioning portions 5a protruding from the plate member 5c are formed on the first surface 1a side of the height-measuring jig 1. Moreover, a plurality of convex-shaped second positioning portions 5b protruding from the plate member 5c are formed on the second surface 1b side of the height-measuring jig 1 .

在測定該工作夾台6之保持面6a的高度時，如圖5(A)及圖5(B)所示，是將該第2面1b側朝向下方來將該高度測定用治具1載置於該保持面6a之上。圖5(A)是示意地顯示工作夾台及高度測定用治具的立體圖，圖5(B)是示意地顯示已定位於工作夾台上之高度測定用治具的立體圖。 When measuring the height of the holding surface 6a of the table 6, as shown in FIGS. 5(A) and 5(B) , the jig 1 for measuring the height is mounted with the second surface 1b facing downward. placed on the holding surface 6a. FIG. 5(A) is a perspective view schematically showing a work clamp and a height-measuring jig, and FIG. 5(B) is a schematic perspective view showing the height-measuring jig positioned on the work clamp.

形成於該第2面1b側之複數個該第2定位部5b是配設成在比該保持面6a之外徑稍大之外徑的圓(圖未示)的圓周上排列。特別是，該複數個該第2定位部5b分別是配設在可以從外周側包圍工作夾台6之保持面6a的位置。如此一來，在未將板件5c定位於該保持面6a上之適當的位置的情況下，會使任一個該第2定位部5b抵接於該保持面6a。 The plurality of second positioning portions 5b formed on the second surface 1b side are arranged on the circumference of a circle (not shown) having an outer diameter slightly larger than the outer diameter of the holding surface 6a. In particular, the plurality of the second positioning portions 5b are respectively disposed at positions that can surround the holding surface 6a of the table 6 from the outer peripheral side. In this way, when the plate member 5c is not positioned at an appropriate position on the holding surface 6a, any one of the second positioning portions 5b is brought into contact with the holding surface 6a.

當將該高度測定用治具1載置於該保持面6a上時，是載置成不使該複數個第2定位部5b抵接於該保持面6a而將該板件5c定位於該第2面1b接觸於該保持面6a之位置。如此一來，該高度測定用治具1即被定位於該保持面6a上的預定位置。也就是說，複數個該第2定位部5b具備將該板件5c定位於相對於該工作夾台6的預定位置的功 能。 When the height measuring jig 1 is placed on the holding surface 6a, the plate member 5c is placed on the holding surface 6a without the plurality of second positioning portions 5b abutting on the holding surface 6a. The two surfaces 1b are in contact with the position of the holding surface 6a. In this way, the jig 1 for height measurement is positioned at a predetermined position on the holding surface 6a. That is to say, the plurality of second positioning portions 5b have functions for positioning the plate member 5c at a predetermined position relative to the work chuck 6 . can.

又，就算想讓像這樣載置於該保持面6a上的該高度測定用治具1朝平行於該保持面6a之面內的任一方向移動，也會因該第2定位部5b接觸於該工作夾台6而使移動受到阻礙。也就是說，第2定位部5b具備抑制該板件5相對於該工作夾台6的位置關係的變化的功能。 In addition, even if the height measuring jig 1 placed on the holding surface 6a in this way is to be moved in any direction within the plane parallel to the holding surface 6a, the second positioning portion 5b is in contact with the Movement of the work clamp 6 is hindered. That is, the second positioning portion 5b has a function of suppressing changes in the positional relationship of the plate member 5 with respect to the table 6 .

複數個該開口部3是形成為例如沿該磨削輪(加工工具)30的旋轉軌道排列在該板件5c之中央部、及該板件5c之外周部的2處之共計3處上。因此，當將裝設有接觸式量器38之輪座28a定位於該高度測定用治具1的上方，且使主軸28旋轉而使該輪座28a沿著軌道38c(參照圖6)旋轉時，可以將測量頭38a插入該開口部3。 The plurality of openings 3 are formed, for example, to be arranged in a total of three places along the rotation orbit of the grinding wheel (working tool) 30 at the central part of the plate 5c and two in the outer peripheral part of the plate 5c. Therefore, when the wheel base 28a on which the contact gauge 38 is mounted is positioned above the height measuring jig 1, and the spindle 28 is rotated, the wheel base 28a is rotated along the rail 38c (see FIG. 6 ). , the measuring head 38 a can be inserted into the opening 3 .

如圖5(B)所示，當將高度測定用治具1定位於該保持面6a上之預定位置時，藉由該開口部3而使該保持面6a之預定之處露出。在測定該保持面6a的高度時，當將該高度測定用治具1定位於該保持面6a上的預定位置時，即可以藉由該開口部3來界定高度的測定處。因此，當使用該高度測定用治具1時，可以每次都在相同處實施該保持面6a之測定，而可以安定地實施高度的測定。 As shown in FIG. 5(B), when the jig 1 for height measurement is positioned at a predetermined position on the holding surface 6a, the predetermined portion of the holding surface 6a is exposed through the opening 3. When measuring the height of the holding surface 6a, when the height measuring jig 1 is positioned at a predetermined position on the holding surface 6a, the opening 3 can define the height measurement position. Therefore, when the jig 1 for height measurement is used, the measurement of the holding surface 6a can be performed at the same place every time, and the height measurement can be performed stably.

又，在測定該工作台座6b之支撐面6c的高度時，如圖5(C)及圖5(D)所示，是將該第1面1a側朝向下方來將該高度測定用治具1載置於該支撐面6c之上。圖5(C)是示意地顯示工作台座6b及高度測定用治具1的立體圖，圖5(D)是示意地顯示已定位於工作台座6b上之高度 測定用治具1的立體圖。 Moreover, when measuring the height of the support surface 6c of the table base 6b, as shown in Fig. 5(C) and Fig. 5(D), the jig 1 for measuring the height is directed downward from the side of the first surface 1a. placed on the support surface 6c. Fig. 5(C) is a perspective view schematically showing the table base 6b and the height measuring jig 1, and Fig. 5(D) is a schematic diagram showing the height positioned on the table base 6b A perspective view of the measurement jig 1.

形成於該第1面1a側之複數個該第1定位部5a是對準形成於該支撐面6c之溝(環狀凹部)6d或凹部6e的位置而配設。當使該複數個第1定位部5a插入該溝6d或凹部6e而將該高度測定用治具1於該支撐面6c上載置成使該第1面1a接觸於該支撐面6c時，可將該高度測定用治具1定位於該支撐面6c上之預定位置。從而，該複數個該第1定位部5a具備將該板件5c定位於預定位置之功能。 The plurality of first positioning portions 5a formed on the first surface 1a side are arranged in alignment with the positions of the grooves (annular recesses) 6d or recessed portions 6e formed on the support surface 6c. When the plurality of first positioning portions 5a are inserted into the grooves 6d or the recessed portions 6e, and the height measuring jig 1 is placed on the support surface 6c so that the first surface 1a contacts the support surface 6c, the The height measuring jig 1 is positioned at a predetermined position on the support surface 6c. Therefore, the plurality of the first positioning portions 5a have the function of positioning the plate member 5c at a predetermined position.

又，就算想讓該高度測定用治具1朝平行於該支撐面6c之面內的任一方向移動，也會因該第1定位部5a接觸於該溝6d或該凹部6e的壁面而使移動受到阻礙。也就是說，該複數個第1定位部5a具備有抑制該板件5c相對於該工作台座6b的位置關係的變化的功能。 Furthermore, even if the height measuring jig 1 is to be moved in any direction within the plane parallel to the support surface 6c, the first positioning portion 5a will contact the groove 6d or the wall surface of the recessed portion 6e. Movement is hindered. That is, the plurality of first positioning portions 5a have a function of suppressing changes in the positional relationship of the plate member 5c with respect to the table base 6b.

如圖5(D)所示，當將高度測定用治具1定位於該支撐面6c上之預定位置時，藉由該開口部3而使該支撐面6c之預定之處露出。在測定該支撐面6c的高度時，當將該高度測定用治具1定位於該支撐面6c上的預定位置時，即可以藉由該開口部3來界定高度的測定處。因此，當使用該高度測定用治具1時，可以每次都在相同處實施該支撐面6c之測定，而可以安定地實施該高度的測定。 As shown in FIG. 5(D) , when the height measuring jig 1 is positioned at a predetermined position on the support surface 6c, the predetermined portion of the support surface 6c is exposed through the opening 3. When measuring the height of the support surface 6c, when the height-measuring jig 1 is positioned at a predetermined position on the support surface 6c, the opening 3 can define the height measurement position. Therefore, when the jig 1 for height measurement is used, the measurement of the support surface 6c can be performed at the same place every time, and the measurement of the height can be performed stably.

此外，形成於該工作台座6b的該支撐面6c之溝6d或凹部6e等會被板件5c所覆蓋。因此，使主軸28旋轉來使裝設於輪座28a之該接觸式量器38移動時，測量頭38a不會落入溝6d或凹部6e等而是在該板件5c上移動。 從而，因為測量頭38a之高度的變化較小，所以可以安定地實施由該接觸式量器38進行的測定。再者，該板件5c之厚度是例如比該溝6d或凹部6e之深度更小。 In addition, the groove 6d or the concave portion 6e formed on the support surface 6c of the table base 6b is covered by the plate member 5c. Therefore, when the main shaft 28 is rotated to move the contact gauge 38 mounted on the wheel base 28a, the measuring head 38a does not fall into the groove 6d or the recess 6e, but moves on the plate 5c. Therefore, since the change in the height of the measuring head 38a is small, the measurement by the contact measuring device 38 can be performed stably. Furthermore, the thickness of the plate member 5c is, for example, smaller than the depth of the groove 6d or the recess 6e.

在此，利用圖6來說明使用本實施形態之高度測定用治具1，而在該工作夾台6之保持面6a之預定位置實施的高度的測定。圖6是示意地顯示藉由接觸式量器38測定已定位有高度測定用治具1之工作夾台6的保持面6a的高度之情形的立體圖。 Here, the height measurement performed at the predetermined position of the holding surface 6a of this work chuck|zipper 6 using the jig 1 for height measurement of this embodiment is demonstrated using FIG. 6. FIG. FIG. 6 is a perspective view schematically showing a state in which the height of the holding surface 6 a of the table 6 on which the height measuring jig 1 is positioned is measured by the contact gauge 38 .

首先，如圖6所示，將接觸式量器38裝設於磨削裝置2之磨削單元14的輪座28a之插通孔34a。又，將該高度測定用治具1之第2面1b側朝向下方，並將該高度測定用治具1在該保持面6a載置成使第2定位部5b不抵接於該保持面6a。如此一來，可將該高度測定用治具1定位於工作夾台6的保持面6a上之預定位置，而將保持面6a之預定的被測定處藉由開口部3露出。 First, as shown in FIG. 6 , the contact gauge 38 is attached to the insertion hole 34 a of the wheel base 28 a of the grinding unit 14 of the grinding device 2 . Furthermore, the second surface 1b side of the height measuring jig 1 is directed downward, and the height measuring jig 1 is placed on the holding surface 6a so that the second positioning portion 5b does not come into contact with the holding surface 6a. . In this way, the height measurement jig 1 can be positioned at a predetermined position on the holding surface 6 a of the work chuck 6 , and the predetermined measured portion of the holding surface 6 a can be exposed through the opening 3 .

接著，當使主軸28旋轉而使測量頭38a插入最初的開口部3並接觸於該保持面6a時，即可測定該保持面6a之高度且將測定結果顯示於該指示部38b。 Next, when the spindle 28 is rotated and the measuring head 38a is inserted into the first opening 3 and contacts the holding surface 6a, the height of the holding surface 6a is measured and the measurement result is displayed on the indicator 38b.

於讀取並記錄顯示於指示部38b之測定結果後，使該主軸28旋轉來使該測量頭38a沿著軌道38c一個一個地插入開口部3，並同樣地讀取並記錄顯示於指示部38b之測定結果。當在保持面6a當中藉由開口部3而露出的全部之處都測定高度時，即可以從該測定結果計算出該保持面6a的傾斜。 After reading and recording the measurement results displayed on the indicator 38b, the spindle 28 is rotated to insert the measuring heads 38a into the opening 3 one by one along the rail 38c, and the same is read and recorded on the indicator 38b. the measurement results. The inclination of the holding surface 6a can be calculated from the measurement result when the height is measured at all the places exposed through the openings 3 in the holding surface 6a.

在工作台座6b之支撐面6c的預定之處實施高度的測定時，是將該高度測定用治具1之第1面1b朝向下方，來將該高度測定用治具1定位於該支撐面6c上的預定位置，且同樣地在藉由開口3而露出之處實施測定。 When the height measurement is performed at a predetermined position of the support surface 6c of the table base 6b, the height measurement jig 1 is positioned on the support surface 6c by facing the first surface 1b of the height measurement jig 1 downward. at a predetermined position on the top, and similarly, the measurement is carried out at the position exposed through the opening 3 .

再者，高度的測定之結果為檢測出該保持面6a或該支撐面6c為已從預定的方向傾斜時，是例如將工作夾台6或工作台座6b的傾斜調整成使該保持面6a或該支撐面6c朝向預定的方向。或者，以形成朝向預定的方向的該保持面6a或該支撐面6c的方式實施該保持面6a或該支撐面6c的磨削加工或研磨加工。 Furthermore, when it is detected that the holding surface 6a or the supporting surface 6c is inclined from a predetermined direction as a result of the height measurement, for example, the inclination of the table 6 or the table base 6b is adjusted so that the holding surface 6a or the supporting surface 6b is inclined. The support surface 6c faces a predetermined direction. Alternatively, grinding or polishing of the holding surface 6 a or the supporting surface 6 c is performed so as to form the holding surface 6 a or the supporting surface 6 c facing a predetermined direction.

如以上說明，因為當使用本實施形態之高度測定用治具1時，會將接觸式量器38之測量頭38a定位於成為測定對象之工作台面的預定位置，所以可以安定地實施該工作台面的高度的測定。 As described above, when the height measuring jig 1 of the present embodiment is used, the measuring head 38a of the contact gauge 38 is positioned at a predetermined position on the table to be measured, so that the table can be stably implemented. determination of the height.

再者，本發明並不限定於上述實施形態之記載，可作各種變更而實施。例如，在上述實施形態之高度測定用治具1中，雖然已針對在第1面1a側配設複數個第1定位部5a並且在第2面1b側配設複數個第2定位部5b的情況進行說明，但本發明之一態樣並不限定於此。 In addition, this invention is not limited to the description of the said embodiment, Various changes can be made and implemented. For example, in the height-measuring jig 1 of the above-described embodiment, although a plurality of first positioning portions 5a are arranged on the first surface 1a side and a plurality of second positioning portions 5b are arranged on the second surface 1b side The case will be described, but one aspect of the present invention is not limited to this.

上述實施形態之高度測定用治具1雖然可以在工作台座6b之支撐面6c的高度的測定、及工作夾台6的保持面6a的高度的測定之任一種測定中使用，但本發明之一態樣並不限定於此。 The height measuring jig 1 of the above-described embodiment can be used for any measurement of the height of the support surface 6c of the table base 6b and the measurement of the height of the holding surface 6a of the work chuck 6. The aspect is not limited to this.

亦可例如，一方面在第1面1a側配設複數個 第1定位部5a，另一方面卻不在第2面1b側配設第2定位部5b。又，亦可一方面在第2面1b側配設複數個第2定位部5b，另一方面卻不在第1面1a側配設第1定位部5a。在這些情況下，成為僅能夠在工作台座6b之支撐面6c的高度的測定、及工作夾台6之保持面6a的高度的測定之任一種測定中使用的高度測定用治具1。 For example, on the one hand, a plurality of The first positioning portion 5a, on the other hand, is not provided with the second positioning portion 5b on the side of the second surface 1b. Moreover, you may arrange|position the some 2nd positioning part 5b on the 2nd surface 1b side, while arrange|positioning the 1st positioning part 5a on the 1st surface 1a side. In these cases, the height measuring jig 1 can be used only for the measurement of the height of the support surface 6c of the table base 6b and the measurement of the height of the holding surface 6a of the work chuck 6 .

另外，上述實施形態之構造、方法等，只要在不脫離本發明的目的之範圍內，均可適當變更而實施。 In addition, the structure, method, etc. of the above-mentioned embodiment can be suitably changed and implemented in the range which does not deviate from the objective of this invention.

1:高度測定用治具 1: Jig for height measurement

1a:第1面 1a: side 1

1b:第2面 1b: Side 2

3:開口部 3: Opening

5a:第1定位部 5a: 1st positioning part

5b:第2定位部 5b: Second positioning part

5c:板件 5c: Plate

6:工作夾台 6: Work clamp table

6a:保持面 6a: Keep Face

6b:工作台座 6b: Workbench base

28:主軸 28: Spindle

28a:輪座 28a: Wheel seat

34a:插通孔 34a: through hole

38:接觸式量器 38: Contact gauge

38a:測量頭 38a: Measuring head

38b:指示部 38b: Instructions

38c:軌道 38c: Orbit

Claims (3)

一種高度測定用治具，是在加工裝置中測定高度之時使用，該加工裝置具備可旋轉的工作台座、及將輪座固定於前端的主軸，該工作台座可以將以保持面保持板狀的被加工物之工作夾台以支撐面來支撐，該輪座可以裝設磨削或研磨被加工物的加工工具，測定高度之時是使固定於該輪座之接觸式量器沿著該加工工具的旋轉軌道掃描來測定該保持面或該支撐面的高度，該高度測定用治具之特徵在於具備：覆蓋該保持面或該支撐面且形成有複數個開口部的板件；及從該板件突出之凸狀的複數個定位部，該定位部具有將該板件定位在相對於該工作夾台或該工作台座之預定位置的功能，該開口部是沿該旋轉軌道形成為在該板件定位在相對於該工作夾台或該工作台座之該預定位置時，讓該保持面或該支撐面的測定對象區域露出，該開口部是能夠讓該接觸式量器通過該開口部來接觸於該測定對象區域的大小。 A height measuring jig is used when measuring height in a processing device, the processing device is provided with a rotatable table base, and a main shaft fixed to the front end of a wheel base, and the table base can hold a plate-shaped surface with a holding surface. The working table of the workpiece is supported by a supporting surface, and the wheel seat can be equipped with a processing tool for grinding or grinding the workpiece. When measuring the height, the contact gauge fixed on the wheel seat is made along the workpiece. The height of the holding surface or the supporting surface is measured by scanning the rotational orbit of the tool, and the jig for measuring the height is characterized by comprising: a plate member covering the holding surface or the supporting surface and formed with a plurality of openings; A plurality of convex positioning portions protruding from the plate member, the positioning portion has the function of positioning the plate member at a predetermined position relative to the work clamp table or the work table base, and the opening portion is formed along the rotation track to be in the When the plate is positioned at the predetermined position relative to the work clamp or the work base, the measurement object area of the holding surface or the support surface is exposed, and the opening is capable of allowing the contact measuring device to pass through the opening. Contact the size of the measurement target area. 如請求項1之高度測定用治具，是在測定具有同心圓狀地形成有複數個環狀凹部的該支撐面的該工作台座之該支撐面的高度時使用，該板件具有藉由覆蓋該環狀凹部來防止該接觸式量器落下至該環狀凹部的功能。 The height measuring jig of claim 1 is used when measuring the height of the support surface of the table base having the support surface having a plurality of annular concave portions formed concentrically, and the plate member has The annular recess has the function of preventing the contact measuring device from falling to the annular recess. 如請求項1或2之高度測定用治具，其中該複數個定位部包含形成於該板件的一面的複數個第1定位部、及形成於該板件的另一面的複數個第2定位部， 該複數個第1定位部分別具有下述功能：當該板件定位在相對於該工作夾台之預定位置而使該板件的該一面接觸於該保持面時，接觸該工作夾台的側面來抑制該板件相對於該工作夾台之位置關係的變化，該複數個第2定位部分別具有下述功能：當該板件定位在相對於該工作台座之預定位置而使該板件的該另一面接觸於該支撐面時，插入形成於該支撐面之凹部來抑制該板件相對於該工作台座之位置關係的變化。 The height measuring jig according to claim 1 or 2, wherein the plurality of positioning portions include a plurality of first positioning portions formed on one side of the plate member and a plurality of second positioning portions formed on the other side of the plate member department, The plurality of first positioning portions respectively have the following functions: when the plate member is positioned at a predetermined position relative to the work clamp table and the one side of the plate member contacts the holding surface, contacting the side surface of the work clamp table In order to suppress the change of the positional relationship of the plate relative to the work clamping table, the plurality of second positioning parts respectively have the following functions: when the plate is positioned at a predetermined position relative to the table base, the When the other surface is in contact with the support surface, a recess formed on the support surface is inserted to suppress the change in the positional relationship of the plate with respect to the table base.
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