JP6984969B2 - Height measuring jig - Google Patents

Description

The present invention relates to a jig used to measure the height of a table surface at a predetermined position on the table surface.

In the process of forming a device chip containing a device from a plate-shaped workpiece made of silicon, gallium arsenide, sapphire, glass, etc., a grinding device for grinding the workpiece, a polishing apparatus for polishing the workpiece, and the like are used. Various processing equipment is used. The processing apparatus includes a chuck table for holding the workpiece and a processing unit for processing the workpiece, and the workpiece held on the chuck table is processed by the machining unit.

The chuck table is supported by a table base. The upper surface of the table base is a flat support surface, and the chuck table is fixed on the support surface. The workpiece is machined by the machining unit while being held on a chuck table fixed on the support surface of the table base.

The machining unit includes a spindle substantially parallel to the vertical direction, a wheel mount arranged at the lower end of the spindle, and a machining tool mounted on the lower surface of the wheel mount. The processing tool is, for example, a grinding wheel having a grinding wheel on the lower surface, a polishing wheel having a polishing pad on the lower surface, and the like.

When machining the workpiece, the spindle is rotated to rotate the machining tool and the chuck table is rotated to move the machining unit downward in the vertical direction. When the grinding wheel or polishing pad attached to the machining tool comes into contact with the workpiece, the workpiece is machined.

Various improvements have been made to the table base, chuck table and machining unit in order to realize more appropriate machining of the workpiece. For example, in a grinding device, in order to grind the workpiece so that the workpiece has a uniform thickness, a chuck table is used in which the shape of the side surface of a cone having a side surface having an extremely small gradient is the shape of a holding surface. (See Patent Document 1).

Further, if the table base, the chuck table, and the machining unit are not in a predetermined positional relationship at the start of machining, the machining may be biased. Therefore, in the processing apparatus, the positions and inclinations of the table base, the chuck table, and the processing unit are adjusted in advance so that the workpiece can be appropriately processed.

In the adjustment, for example, the height is measured at a plurality of points on the support surface of the table base to confirm the inclination of the support surface. Further, the chuck table is fixed on the support surface of the table base, and the height is measured at a plurality of points on the holding surface of the chuck table to confirm the inclination of the holding surface.

The height of the table surface such as the support surface and the holding surface is measured by using a contact gauge mounted on the wheel mount of the processing unit. For example, the contact gauge is mounted on the wheel mount before the machining tool is mounted, and the gauge head at the lower end of the contact gauge is brought into contact with a predetermined position on the table surface to be measured by rotating the spindle. Let me. Then, the gauge head can be brought into contact with the table surface along the rotation trajectory of the processing tool in machining, and the height of the table surface can be measured (see Patent Document 2).

Japanese Unexamined Patent Publication No. 2007-22286 Japanese Unexamined Patent Publication No. 2013-141725

The height of the table surface is measured by a contact gauge mounted on the wheel mount, for example, at the center of the table surface and at the end of the table surface on the rotation trajectory of the machining tool passing through the center portion. It will be carried out at three points in total. The measurement is performed at the start of use, maintenance, replacement of the chuck table, etc. of the processing apparatus provided with the processing unit. In order to correctly detect that the change has occurred when the inclination of the table surface changes after starting the use of the processing device, it is preferable that the measurement is always performed at the same three points regardless of the measurement timing. ..

However, depending on the timing of the measurement, the worker who carries out the measurement is not always the same person, and since the table surface is not formed with marks or the like indicating the three points, the measurement is performed at the same place every time. Not always implemented.

Further, the support surface of the table base is provided with a groove serving as a path for transmitting a negative pressure to the holding surface of the chuck table. Therefore, when the contact type gauge is moved, the gauge head falls into the groove and the change in height becomes large, which may deteriorate the stability of the measurement data of the contact type gauge. Further, the support surface may be provided with an uneven shape such as a screw hole in addition to the groove, and the gauge head may collide with the uneven shape and the gauge head may be damaged.

The present invention has been made in view of such a problem, and an object thereof is to position a gauge head of a contact gauge at a predetermined position on a table surface to be measured, and to set the height of the table surface. It is to provide a measuring jig which can carry out measurement stably.

According to one aspect of the present invention, a rotatable table base capable of supporting a chuck table for holding a plate-shaped workpiece on a holding surface and a wheel on which a machining tool for grinding or polishing the workpiece can be mounted. In a machining apparatus comprising a spindle with a mount fixed to the tip, a contact gauge fixed to the wheel mount is scanned along the rotation trajectory of the machining tool to measure the height of the holding surface or the supporting surface. A height measuring jig used in the case of a plate that covers the holding surface or the supporting surface and has a plurality of openings formed therein, and a plurality of convex positioning portions protruding from the plate. The positioning portion has a function of positioning the plate at a predetermined position with respect to the chuck table or the table base, and the opening has the plate at the predetermined position with respect to the chuck table or the table base. It is formed along the rotation trajectory so as to expose the holding surface or a part of the supporting surface when positioned, and the opening is the holding surface or the supporting surface through which the contact gauge passes through the opening. Provided is a height measuring jig characterized by having a size that allows contact with the part of the above.

It is a height measuring jig according to one aspect of the present invention used when measuring the height of the support surface of the table base having the support surface in which a plurality of annular recesses are formed concentrically. , the plate, the height measurement jig該接Sawashiki gauge by covering the annular recess and having a function to prevent the falling into the annular recess also in one aspect of the present invention be.

Further, in one aspect of the present invention, the plurality of positioning portions are a plurality of first positioning portions formed on one surface of the plate and a plurality of second positioning portions formed on the other surface of the plate. Each of the plurality of first positioning portions, including the positioning portion, is when the plate is positioned in a predetermined position with respect to the chuck table so that one surface of the plate is in contact with the holding surface. It has a function of contacting the side surface of the chuck table and suppressing a change in the positional relationship of the plate with respect to the chuck table, and each of the plurality of second positioning portions is supported by the other surface of the plate. When the plate is positioned in a predetermined position with respect to the table base so as to be in contact with the surface, it is inserted into a recess formed in the support surface and has a function of suppressing a change in the positional relationship of the plate with respect to the table base. You may.

The height measuring jig according to one aspect of the present invention includes a plate covering the table surface and a plurality of convex positioning portions protruding from the plate, and is placed at a predetermined position on the table surface. Used for. The height measuring jig is placed on the table surface with the surface on which the positioning portion is formed facing downward.

The plurality of positioning portions are arranged at positions where any of the positioning portions hits the table surface when the plate is not positioned at an appropriate position on the table surface. Therefore, by positioning the plate at a position where the positioning portion does not hit the table surface, the plate is positioned at a predetermined position. That is, the plurality of positioning portions have a function of positioning the plate at a predetermined position with respect to the chuck table or the table base.

A plurality of openings are formed in the plate, and when the plate is positioned in a predetermined position on a chuck table or table base, the openings expose a specific part of the table surface. .. When measuring the height of the table surface, the gauge head of the contact type gauge is brought into contact with the part exposed by the opening, and the height of the part is measured.

When the height measuring jig is used, the same specific part is exposed by the opening every time the height of the table surface is measured. Therefore, the same portion of the table surface can be stably measured regardless of the measurement timing or the measurer.

Therefore, according to one aspect of the present invention, there is provided a measuring jig capable of stably measuring the height of the table surface by positioning the gauge head of the contact gauge at a predetermined position on the table surface to be measured. Will be done.

It is a perspective view which shows typically the grinding apparatus. It is a perspective view which shows typically the grinding process of the workpiece by the grinding unit. It is a partial cross-sectional view schematically showing the grinding process of a work piece by a grinding unit. FIG. 4A is a partial cross-sectional view schematically showing a wheel mount equipped with a contact gauge, and FIG. 4B schematically shows a first surface side of a height measuring jig. It is a perspective view, and FIG. 4C is a perspective view schematically showing a second surface side of a height measuring jig. FIG. 5A is a perspective view schematically showing a chuck table and a height measuring jig, and FIG. 5B is a perspective view schematically showing a height measuring jig positioned on the chuck table. 5 (C) is a perspective view schematically showing a table base and a height measuring jig, and FIG. 5 (D) is a schematic view of a Tasaka measuring jig positioned on the table base. It is a perspective view which shows. It is a perspective view schematically showing how the height of the holding surface of a chuck table in which a height measuring jig is positioned is measured by a contact type gauge.

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. The height measuring jig according to the present embodiment is the height of a table surface such as a holding surface of a chuck table provided by the processing device or a support surface of a table base provided by the processing device in a processing device such as a grinding device or a polishing device. Used when measuring the table. FIG. 1 is a perspective view schematically showing a grinding device as an example of a processing device in which the height measuring jig according to the present embodiment is used.

An opening 4a is provided on the upper surface of the apparatus base 4 of the grinding apparatus 2. Inside the opening 4a, an X-axis moving table 8 on which a chuck table 6 for sucking and holding the workpiece and a table base 6b for supporting the chuck table 6 are placed on the upper surface is provided. The X-axis moving table 8 can be moved in the X-axis direction by an X-axis direction moving mechanism (not shown). The X-axis moving table 8 is positioned in a loading / unloading region 10 to which the workpiece is attached / detached by the X-axis direction moving mechanism, and a machining region 12 to which the workpiece is ground.

The upper surface of the table base 6b is a support surface 6c (see FIG. 5C) on which the chuck table 8 is placed. On the support surface 6c of the table base 6b, for example, a plurality of concentrically arranged grooves (annular recesses) 6d (see FIGS. 3 and 5 (C)) are formed. The table base 6b is internally provided with a suction path 6f (see FIG. 3) having one end connected to the groove 6d and the other end connected to a suction source 36 (see FIG. 3).

A chuck table 6 is placed on the table base 6b. The upper surface of the chuck table 6 is a holding surface 6a on which the workpiece is placed. A porous member is arranged on the upper part of the chuck table 6. Below the porous member of the check table 6, a vent leading to the bottom surface of the chuck table 6 is formed. When the chuck table 6 is placed on the table base 6b, the vent communicates with the suction source 36 through the groove 6d and the suction path 6f of the table base 6b.

When the suction source 36 is operated, a negative pressure acts on the workpiece placed on the holding surface 6a, and the workpiece is suction-held on the chuck table 6. Also, the table base 6b on which the chuck table 6 rests can rotate about an axis perpendicular to the holding surface 6a.

A grinding unit (machining unit) 14 for grinding the workpiece is disposed above the machining region 12. A support portion 16 is erected on the rear side of the apparatus base 4, and the grinding unit 14 is supported by the support portion 16. A pair of Z-axis guide rails 18 extending in the Z-axis direction are provided on the front surface of the support portion 16, and a Z-axis moving plate 20 is slidably attached to each Z-axis guide rail 18.

A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 20, and a Z-axis ball screw 22 parallel to the Z-axis guide rail 18 is screwed into this nut portion. ing. A Z-axis pulse motor 24 is connected to one end of the Z-axis ball screw 22. When the Z-axis ball screw 22 is rotated by the Z-axis pulse motor 24, the Z-axis moving plate 20 moves in the Z-axis direction along the Z-axis guide rail 18.

A grinding unit 14 for performing grinding of the workpiece is fixed to the lower portion on the front surface side of the Z-axis moving plate 20. If the Z-axis moving plate 20 is moved in the Z-axis direction, the grinding unit 14 can be moved in the Z-axis direction (machining feed direction).

The grinding unit 14 has a spindle 28 rotated by a motor connected to the proximal end side. The motor is provided in the spindle housing 26. A wheel mount 28a is disposed on the tip end side of the spindle 28, and a grinding wheel (machining tool) 30 that rotates according to the rotation of the spindle 28 is mounted on the lower surface of the wheel mount 28a. A grinding wheel 32 is provided on the lower surface of the grinding wheel 30.

The grinding unit 14 will be described in more detail. FIG. 2 is a perspective view schematically showing the grinding process of the workpiece by the grinding unit 14. As shown in FIG. 2, when the workpiece 7 sucked and held on the holding surface 6a of the chuck table 6 is ground, the table base 6b on which the chuck table 6 is placed is rotated and the grinding wheel 30 is rotated. The grinding wheel 30 is lowered while allowing the grinding wheel 30 to be lowered. Then, the grinding wheel 32 is applied to the surface to be ground of the workpiece 1, and the workpiece 7 is ground.

FIG. 3 is a partial cross-sectional view schematically showing the grinding process of the workpiece by the grinding unit. FIG. 3 shows a partial cross section of the wheel mount 28a and the grinding wheel 30, and a cross section of the table base 6b and the chuck table 6. As shown in FIG. 3, the wheel mount 28a is formed with an insertion hole 34a into which a fixing tool 34 used for mounting the grinding wheel (machining tool) 30 is inserted.

For example, a thread is formed at the tip of the fixture 34, and a plurality of holes 30a having thread grooves on the inner wall are formed at positions corresponding to the insertion holes 34a on the upper surface of the grinding wheel 30. There is. The fixture 34 inserted into the insertion hole 34a is fastened into the hole 30a of the grinding wheel 30, so that the grinding wheel 30 is mounted on the wheel mount 28a.

For example, while the grinding wheel 30 is mounted on the wheel mount 28a, the table base 6b and the chuck table 6 are arranged so that the holding surface 6a of the chuck table 6 is parallel to the grinding surface of the grinding wheel 32. The position and inclination of the grinding unit 14 are adjusted in advance.

In the adjustment, for example, the height of the support surface 6c of the table base 6b is measured at a plurality of points to confirm the inclination of the support surface 6c. Further, the chuck table 6 is fixed on the support surface 6c of the table base 6b, and the height is measured at a plurality of points of the holding surface 6a of the chuck table 6 to confirm the inclination of the holding surface 6a. .. The height of the table surface such as the support surface 6c and the holding surface 6a is measured by using the contact gauge mounted on the wheel mount 28a of the grinding unit 14.

FIG. 4A is a partial cross-sectional view schematically showing the wheel mount 28a to which the contact gauge 38 is mounted. As shown in FIG. 4A, the upper portion of the contact gauge 38 is formed to have a size that allows it to be inserted into the insertion hole 34a of the wheel mount 28a. For example, when a thread groove is formed on the inner wall of the insertion hole 34a, when a thread is formed on the upper portion of the contact type gauge 38, the upper portion is tightened into the insertion hole 34a to form the contact type gauge 38. Can be attached to the wheel mount 28a.

At the lower end of the contact type gauge 38, a gauge head 38a that comes into contact with the table surface whose height is to be measured is disposed, and when the gauge head 38a is brought into contact with the table surface, the height of the table surface is increased. Can measure the height. The contact gauge 38 is provided with an indicator 38b, and the measurement result is indicated by the indicator 38b.

The contact type gauge 38 is attached to, for example, a wheel mount 28a before the grinding wheel 30 is attached, and by rotating the spindle 28, the gauge head 38a is measured at a predetermined position on the table surface to be measured. To contact. When the spindle 28 is rotated, the gauge head 38a can be brought into contact with the table surface for measurement along the trajectory of the grinding wheel 32 in machining.

The height of the table surface is measured by the contact gauge 38, for example, at two points, a central portion of the table surface and an end portion of the table surface on the rotation trajectory of the grinding wheel 32 passing through the central portion. It will be carried out at a total of 3 points. The measurement is performed at the start of use of the grinding device 2, maintenance, replacement of the chuck table 6, and the like. When the inclination of the table surface changes after the start of use of the grinding device 2, in order to accurately detect the change, the measurement is always performed at the same three points regardless of the measurement timing. It is preferable to carry out.

However, depending on the timing of the measurement, the same person may not always perform the measurement, and since the mark or the like indicating the three points is not formed on the table surface, the measurement cannot always be performed at the same place. ..

Further, a groove 6d is provided on the support surface 6c of the table base 6b. Therefore, when the contact type gauge 38 is moved, the gauge head 38a may drop into the groove 6d and the height may change significantly, resulting in deterioration of the stability of the measurement data.

Further, in the support surface 6c, in addition to the groove 6d, for example, a screw hole for a screw for fixing the table base 6b on the X-axis moving table 8 and a screw hole for fixing the chuck table 6 to the table base 6b. An uneven shape such as a screw hole is provided. When the uneven shape is provided on the support surface 6c, the gauge head 38a may collide with the uneven shape and the gauge head 38a may be damaged. Therefore, the height measuring jig according to the present embodiment is used for the measurement.

Next, the height measuring jig according to the present embodiment will be described. FIG. 4B is a perspective view schematically showing the first surface 1a side of the height measuring jig 1, and FIG. 4C is the second surface 1b side of the height measuring jig 1. Is a perspective view schematically showing. The height measuring jig 1 has a support surface 6c of the table base 6b and a substantially disk-shaped plate 5c having a size covering the holding surface 6a of the chuck table 6. A plurality of openings 3 are formed in the plate 5c.

On the side of the first surface 1a of the height measuring jig 1, a plurality of convex first positioning portions 5a protruding from the plate 5c are formed. Further, on the second surface 1b side of the height measuring jig 1, a plurality of convex second positioning portions 5b protruding from the plate 5c are formed.

When measuring the height of the holding surface 6a of the chuck table 6, as shown in FIGS. 5A and 5B, the height is measured with the second surface 1b facing downward. The jig 1 is placed on the holding surface 6a. FIG. 5A is a perspective view schematically showing a chuck table and a height measuring jig, and FIG. 5B is a perspective view schematically showing a height measuring jig positioned on the chuck table. It is a figure.

The plurality of second positioning portions 5b formed on the second surface 1b side are arranged so as to line up on the circumference of a circle (not shown) having a diameter slightly larger than the outer diameter of the holding surface 6a. Will be set up. In particular, each of the plurality of the second positioning portions 5b is arranged at a position where the holding surface 6a of the chuck table 6 can be surrounded from the outer peripheral side. Then, when the plate 5c is not positioned at an appropriate position on the holding surface 6a, any of the second positioning portions 5b hits the holding surface 6a.

When the height measuring jig 1 is placed on the holding surface 6a, the positions where the plurality of second positioning portions 5b do not touch the holding surface 6a and the second surface 1b contacts the holding surface 6a. The plate 5c is placed on the plate so as to be positioned. Then, the height measuring jig 1 is positioned at a predetermined position on the holding surface 6a. That is, the plurality of second positioning portions 5b have a function of positioning the plate 5c at a predetermined position with respect to the chuck table 6.

Further, even if the height measuring jig 1 mounted on the holding surface 6a is to be moved in any direction in the plane parallel to the holding surface 6a, the second positioning portion 5b Is in contact with the chuck table 6 and is hindered from moving. That is, the second positioning portion 5b has a function of suppressing a change in the positional relationship of the plate 5 with respect to the chuck table 6.

The plurality of openings 3 are provided along the rotation trajectory of the grinding wheel (machining tool) 30 at a total of three locations, for example, the central portion of the plate 5c and the outer peripheral portion of the plate 5c. Formed side by side. Therefore, when the wheel mount 28a to which the contact gauge 38 is mounted is positioned above the height measuring tool 1, the spindle 28 is rotated to rotate the wheel mount 28a along the track 38c (see FIG. 6). , The gauge head 38a can be inserted into the opening 3.

As shown in FIG. 5B, when the height measuring jig 1 is positioned at a predetermined position on the holding surface 6a, the opening 3 exposes a predetermined portion of the holding surface 6a. When the height measuring jig 1 is positioned at a predetermined position on the holding surface 6a when measuring the height of the holding surface 6a, the height measurement point can be defined by the opening 3. Therefore, when the height measuring jig 1 is used, the holding surface 6a can be measured at the same place every time, and the height can be measured stably.

Further, when measuring the height of the support surface 6c of the table base 6b, as shown in FIGS. 5C and 5D, the height is such that the first surface 1a side is directed downward. The measuring jig 1 is placed on the support surface 6c. FIG. 5C is a perspective view schematically showing the table base 6b and the height measuring jig 1, and FIG. 5D is a schematic view of the height measuring jig 1 positioned on the table base 6b. It is a perspective view which shows.

The plurality of first positioning portions 5a formed on the first surface 1a side are arranged according to the positions of the grooves (annular recesses) 6d and the recesses 6e formed on the support surface 6c. The height measuring jig 1 is placed on the support surface 6c so that the plurality of first positioning portions 5a are inserted into the groove 6d or the recess 6e and the first surface 1a is in contact with the support surface 6c. The height measuring jig 1 is positioned at a predetermined position on the support surface 6c. Therefore, the plurality of the first positioning portions 5a have a function of positioning the plate 5c at a predetermined position.

Further, even if the height measuring jig 1 is to be moved in any direction in the plane parallel to the support surface 6c, the first positioning portion 5a comes into contact with the wall surface of the groove 6d or the recess 6e. Therefore, movement is hindered. That is, the plurality of first positioning portions 5a have a function of suppressing a change in the positional relationship of the plate 5c with respect to the table base 6b.

As shown in FIG. 5D, when the height measuring jig 1 is positioned at a predetermined position on the support surface 6c, the opening 3 exposes a predetermined portion of the support surface 6c. When the height measuring jig 1 is positioned at a predetermined position on the support surface 6c when measuring the height of the support surface 6c, the height measurement point can be defined by the opening 3. Therefore, when the height measuring jig 1 is used, the measurement of the support surface 6c can be performed at the same place every time, and the height measurement can be stably performed.

Further, the grooves 6d, the recesses 6e, and the like formed on the support surface 6c of the table base 6b are covered with the plate 5c. Therefore, when the spindle 28 is rotated to move the contact type gauge 38 mounted on the wheel mount 28a, the gauge head 38a moves on the plate 5c without falling into the groove 6d, the recess 6e, or the like. Therefore, since the change in the height of the gauge head 38a is small, the measurement by the contact type gauge 38 can be stably performed. The thickness of the plate 5c is smaller than, for example, the depth of the groove 6d or the recess 6e.

Here, the height measurement carried out at a predetermined position on the holding surface 6a of the chuck table 6 by using the height measuring jig 1 according to the present embodiment will be described with reference to FIG. FIG. 6 is a perspective view schematically showing how the height of the holding surface 6a of the chuck table 6 in which the height measuring jig 1 is positioned is measured by the contact gauge 38.

First, as shown in FIG. 6, the contact gauge 38 is attached to the insertion hole 34a of the wheel mount 28a of the grinding unit 14 of the grinding device 2. Further, the height measuring jig 1 is placed on the holding surface 6a so that the second positioning portion 5b does not hit the holding surface 6a with the second surface 1b side of the height measuring jig 1 facing downward. Put 1 on it. Then, the height measuring jig 1 is positioned at a predetermined position on the holding surface 6a of the chuck table 6, and the predetermined measured portion of the holding surface 6a is exposed by the opening 3.

Next, when the spindle 28 is rotated to insert the gauge head 38a into the first opening 3 and bring it into contact with the holding surface 6a, the height of the holding surface 6a is measured and the measurement result is obtained on the indicating portion 38b. Shown.

After reading and recording the measurement result shown on the indicator 38b, the spindle 28 is rotated to insert the gauge head 38a into the opening 3 one after another along the track 38c, and similarly to the indicator 38b. Read and record the indicated measurement results. When the height is measured at all the portions of the holding surface 6a exposed by the opening 3, the inclination of the holding surface 6a can be calculated from the measurement result.

When the height is measured at a predetermined position on the support surface 6c of the table base 6b, the first surface 1b of the height measuring jig 1 is directed downward and the predetermined surface 6c is turned downward. The height measuring jig 1 is positioned at the position, and the measurement is similarly performed at the portion exposed by the opening 3.

When it is detected that the holding surface 6a or the supporting surface 6c is tilted from a predetermined direction as a result of measuring the height, for example, the holding surface 6a or the supporting surface 6c faces in a predetermined direction. The inclination of the chuck table 6 or the table base 6b is adjusted in this way. Alternatively, the holding surface 6a or the support surface 6c is ground or polished so as to form the holding surface 6a or the support surface 6c facing in a predetermined direction.

As described above, when the height measuring jig 1 according to the present embodiment is used, the gauge head 38a of the contact gauge 38 can be positioned at a predetermined position on the table surface to be measured, so that the height of the table surface is high. The measurement can be performed stably.

The present invention is not limited to the description of the above embodiment, and can be modified in various ways. For example, in the height measuring jig 1 according to the above embodiment, a plurality of first positioning portions 5a are arranged on the first surface 1a side, and a plurality of second positioning portions 5b are arranged on the second surface 1b side. Although the case of arranging the above is described, one aspect of the present invention is not limited to this.

The height measuring jig 1 according to the above embodiment can be used for both the measurement of the height of the support surface 6c of the table base 6b and the measurement of the height of the holding surface 6a of the chuck table 6. , One aspect of the present invention is not limited to this.

For example, while the plurality of first positioning portions 5a are arranged on the first surface 1a side, the second positioning portion 5b may not be arranged on the second surface 1b side. Alternatively, while the plurality of second positioning portions 5b are arranged on the second surface 1b side, the first positioning portion 5a may not be arranged on the first surface 1a side. In these cases, the height measuring jig 1 can be used only for either the measurement of the height of the support surface 6c of the table base 6b or the measurement of the height of the holding surface 6a of the chuck table 6.

In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

2 Grinding device 4 Equipment base 4a Opening 6 Chuck table 6a Holding surface 6b Table base 6c Support surface 6d Groove 6e Recess 6f Suction path 8 X-axis moving table 10 Carry-in / out area 12 Machining area 14 Grinding unit 16 Support part 18 Z-axis guide Rail 20 Z-axis moving plate 22 Z-axis ball screw 24 Z-axis pulse motor 26 Spindle housing 28 Spindle 28a Wheel mount 30 Grinding wheel 30a Hole 32 Grinding grindstone 34 Fixture 34a Insertion hole 36 Suction source 38 Contact gauge 38a Gauge head 38b Instruction Part 38c Orbit 1 Height measuring tool 1a, 1b Surface 3 Opening 5a, 5b Positioning part 5c Plate 7 Work piece

Claims (3)

A rotatable table base that can support a chuck table that holds a plate-shaped workpiece on the holding surface, and a spindle that has a wheel mount fixed to the tip that can mount a machining tool that grinds or polishes the workpiece. For height measurement used when measuring the height of the holding surface or the supporting surface by scanning a contact gauge fixed to the wheel mount along the rotation trajectory of the processing tool in a processing device including the above. It ’s a jig,
A plate that covers the holding surface or the supporting surface and has a plurality of openings formed therein.
With a plurality of convex positioning portions protruding from the plate,
The positioning portion has a function of positioning the plate in a predetermined position with respect to the chuck table or the table base.
The opening is formed along the rotation trajectory so as to expose the measurement target area of the holding surface or the supporting surface when the plate is positioned at the predetermined position with respect to the chuck table or the table base. ,
The opening is a jig for measuring height, characterized in that the contact gauge has a size that allows the contact gauge to come into contact with the measurement area through the opening. The height measuring jig according to claim 1, which is used when measuring the height of the support surface of the table base having the support surface in which a plurality of annular recesses are formed concentrically.
The plates height measurement jig, characterized in that該接Sawashiki gauge by covering the annular recess has a function to prevent the falling into the annular recess. The plurality of positioning portions include a plurality of first positioning portions formed on one surface of the plate and a plurality of second positioning portions formed on the other surface of the plate.
Each of the plurality of first positioning portions contacts the side surface of the chuck table when the plate is positioned in a predetermined position with respect to the chuck table so that one surface of the plate is in contact with the holding surface. Therefore, it has a function of suppressing a change in the positional relationship of the plate with respect to the chuck table.
Each of the plurality of second positioning portions was formed on the support surface when the plate was positioned in a predetermined position with respect to the table base so that the other surface of the plate was in contact with the support surface. The height measuring jig according to claim 1 or 2, wherein the jig is inserted into a recess and has a function of suppressing a change in the positional relationship of the plate with respect to the table base.

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