JP6994407B2 - Measurement jig - Google Patents

Description

The present invention relates to a measuring jig used for confirming the inclination of a holding table of a grinding device and a grinding wheel.

The grinding device that grinds the plate-shaped workpiece is a rotating shaft with a holding table having a holding surface for holding the plate-shaped workpiece and a grinding wheel in which grinding grinds are arranged in an annular shape mounted on the wheel mount and centered on the center of the wheel mount. It is equipped with a grinding means for grinding the plate-shaped work held by the holding table by rotating the holding table, and after adjusting the inclination of the holding surface of the holding table and the grinding surface of the grinding wheel in parallel, the plate-shaped work is ground. ing. When measuring whether or not the holding surface and the grinding surface are parallel, for example, the distance between the holding surface and the grinding surface is measured. In addition, the measuring instrument is attached to the wheel mount, and the rotating shaft of the grinding means is rotated with the lower end of the measuring instrument in contact with the holding surface of the holding table to cause the measuring instrument to make a circular motion from the outer periphery of the holding surface. It is measured whether the value is the same up to the center and whether the value is gradually increased on the outer periphery on the opposite side from the center (see, for example, Patent Document 1 below).

Japanese Unexamined Patent Publication No. 2013-141725

When mounting a measuring instrument such as the one described above on a wheel mount, it is necessary to remove the grinding wheel from the wheel mount. When the problem that the thickness of the ground plate-shaped work is not uniform occurs, it is highly possible that the parallelism between the holding surface and the ground surface has changed. Since the measuring instrument is attached to the wheel mount after removing the wheel mount, it takes time to measure the parallelism between the holding surface and the grinding surface.

The present invention has been made in view of the above circumstances, and has a problem to be solved by the measuring jig which can shorten the time until the parallelism between the holding surface and the ground surface is measured.

The present invention comprises a holding table for holding a plate-shaped workpiece on a holding surface, a wheel mount having a mounting surface on the lower surface for mounting a grinding wheel having a grinding wheel arranged in an annular shape, and the wheel centered on the center of the wheel mount. In a grinding device having a spindle unit connected to the upper surface of a mount and rotating to grind a plate-shaped workpiece held by the holding table, the grinding device is mounted on the wheel mount and the shaft is rotated and held. A measuring jig for measuring the height of the holding surface of the grinding wheel on the surface in the rotation trajectory, the measuring jig is provided with a gauge for measuring the height of the holding surface, and the measuring jig is the wheel. Fixed to the mount, the tip of the gauge is positioned directly below the grinding surface of the grinding wheel, and the height of the holding surface directly below the grinding surface is measured along the rotation trajectory of the grinding wheel.

The grinding wheel is provided with a plurality of female screw holes which are open to the mounted surface in contact with the mounting surface of the wheel mount and are arranged at equal intervals in the circumferential direction around the center of the grinding wheel, and the wheel mount is provided. Is provided with a plurality of through holes that penetrate the upper surface and the lower surface, are arranged at equal intervals in the circumferential direction corresponding to the female screw holes of the grinding wheel, and screw-fix the grinding wheel to the mounting surface. The measuring jig includes an upper plate having a second through hole penetrating the upper surface and the lower surface, a lower plate on which the gauge is arranged, and a connecting portion for connecting the upper plate and the lower plate. Remove any one of the plurality of screws fixing the grinding wheel to the wheel mount, and pass a screw longer than the removed screw through the second through hole and the through hole. It is screwed into the female screw hole of the grinding wheel, the wheel mount is sandwiched between the grinding wheel and the upper plate, the upper plate is fixed, and the side side of the grinding wheel is bypassed and directly under the grinding surface. It is preferable that the gauge is configured so as to be positioned.

The measuring jig according to the present invention includes a gauge for measuring the height of the holding surface of the holding table, the measuring jig is fixed to the wheel mount, the tip of the gauge is positioned directly under the grinding surface of the grinding wheel, and the grinding wheel is used. In order to measure the height of the holding surface directly under the grinding surface along the rotation trajectory of the grinding wheel, when checking the inclination of the holding table and the grinding wheel, the grinding wheel is used with a measuring jig without removing the grinding wheel from the wheel mount. The height of the holding surface on the rotating track of the wheel can be measured. Therefore, according to the present invention, it is possible to quickly confirm whether or not the mechanical accuracy of the apparatus has changed while the grinding wheel is mounted on the wheel mount.

Further, the measuring jig includes an upper plate having a second through hole penetrating the upper surface and the lower surface, a lower plate on which a gauge is arranged, and a connecting portion for connecting the upper plate and the lower plate. Remove one of the multiple screws that secure the grinding wheel to the wheel mount, and pass a screw longer than the removed screw through the second through hole and through hole, and screw it into the female screw hole of the grinding wheel. The wheel mount is sandwiched between the grinding wheel and the upper plate to fix the upper plate, and the gauge is positioned directly under the grinding surface by bypassing the side of the grinding wheel, so grinding from the wheel mount. The measuring jig can be easily fixed to the wheel mount without removing the wheel.

It is a perspective view which shows the structure of a grinding apparatus. It is an exploded perspective view of the grinding means which shows the state before the grinding wheel is attached to the wheel mount. It is a perspective view which shows the structure of the measuring jig. It is a perspective view which shows the state which the measuring jig is fixed to the wheel mount which attached the grinding wheel. It is sectional drawing which shows the state which the measuring jig is fixed to the wheel mount which attached the grinding wheel.

[Grinding device]
The grinding device 1 shown in FIG. 1 is a form of a grinding device that grinds a plate-shaped work. The grinding device 1 has a device base 2 extending in the Y-axis direction and a column 3 erected on the rear side of the device base 2 in the Y-axis direction. The apparatus base 2 includes a holding table 20 for holding the plate-shaped work on the holding surface 21a, and a thickness measuring means 30 for measuring the thickness of the plate-shaped work sucked and held by the holding table 20.

The holding table 20 includes a porous plate 21 having a holding surface 21a for sucking and holding the plate-shaped work, and a frame body 22 for accommodating the porous plate 21. The periphery of the holding table 20 is covered with the cover 4. A ring-shaped convex portion is formed in the frame body 22, and the region inside the convex portion is a concave portion formed according to the shape of the porous plate 21. The upper surface of the convex portion is a reference surface 22a having the same height as the holding surface 21a of the porous plate 21. Below the holding table 20, although not shown, a rotating means for rotating the holding table 20 and a moving means for moving the holding table 20 together with the cover 4 in the Y-axis direction are connected.

The thickness measuring means 30 includes, for example, a contact-type first gauge 31 and a second gauge 32. The first gauge 31 and the second gauge 32 are connected to the end of the bracket 5 erected on the upper surface of the device base 2. The stylus of the first gauge 31 corresponds to the position of the holding surface 21a of the holding table 20. The stylus of the second gauge 32 corresponds to the position of the reference surface 22a of the frame body 22. Then, the height of the upper surface of the holding table 20 is measured by the first gauge 31, and the height of the upper surface of the plate-shaped work held by the holding table 20 is measured by the second gauge 32. The difference can be calculated as the thickness of the plate-shaped work.

The grinding device 1 is connected to a wheel mount 40 having a mounting surface 40b on the lower surface for mounting a grinding wheel 55 in which a grinding wheel 56 is arranged in an annular shape, and an upper surface 40a of the wheel mount 40 centered on the center of the wheel mount 40. Grinding means 50 that has a rotating spindle unit 51 and grinds a plate-shaped workpiece held by the holding table 20, and grinding that grinds and feeds the grinding means 50 in the direction of approaching and separating from the holding table 20 (Z-axis direction). It is provided with a feeding means 60.

The grinding feed means 60 includes a ball screw 61 extending in the Z-axis direction, a motor 62 connected to one end of the ball screw 61, and a pair of guide rails 63 extending in parallel with the ball screw 61 and arranged on the column 3. , One surface of which is provided with an elevating plate 64 connected to the grinding means 50. A pair of guide rails 63 are slidably contacted with the other surface of the elevating plate 64, and a ball screw 61 is screwed into a nut formed at the center of the elevating plate 64. By driving the ball screw 61 by the motor 62, the grinding means 50 can be moved up and down in the Z-axis direction together with the elevating plate 64.

The grinding means 50 is connected to a spindle unit 51 having an axis (rotating axis) having an axis in the Z-axis direction, a spindle housing 52 in which the spindle unit 51 is rotatably surrounded and supported, and one end of the spindle unit 51. The motor 53, the holder 54 that holds the spindle housing 52, the grinding wheel 55 that is detachably mounted via the wheel mount 40 at the lower end of the spindle unit 51, and the free end 55b of the grinding wheel 55 are annularly fixed. It is provided with a ground grinding wheel 56. Then, the motor 53 is driven to rotate the spindle unit 51, so that the grinding wheel 55 can be rotated at a predetermined rotation speed.

As shown in FIG. 2, the grinding wheel 55 is arranged at equal intervals in the circumferential direction with the opening 550 opened in the mounted surface 55a in contact with the mounting surface 40b of the wheel mount 40 and the center of the grinding wheel 55. It is provided with a plurality of female screw holes 551 (six in the illustrated example) for screwing the screw 6. The mounted surface 55a is a flat surface parallel to the horizontal direction orthogonal to the vertical direction. The outer diameter of the grinding wheel 55 is formed to be substantially the same as the outer diameter of the wheel mount 40. A plurality of grinding wheels 56 are arranged at equal intervals in the circumferential direction at the free end 55b of the grinding wheel 55, and are bonded and fixed by, for example, an adhesive.

The wheel mount 40 is formed in a disk shape and is fixed to the tip of the spindle unit 51. The mounting surface 40b of the wheel mount 40 is a flat surface parallel to the mounted surface 55a. The wheel mount 40 penetrates the upper surface 40a and the lower surface (mounting surface 40b), is arranged at equal intervals in the circumferential direction corresponding to the female screw holes 551 of the grinding wheel 55, and is arranged on the mounting surface 40b. It is provided with a plurality of through holes 41 for fixing the 55 with screws. The number of through holes 41 corresponds to the number of female screw holes 551 of the grinding wheel 55, and for example, six are formed.

When mounting the grinding wheel 55 on the wheel mount 40, the through hole 41 of the wheel mount 40 and the female screw hole 551 of the grinding wheel 55 are matched, and the mounted surface 55a of the wheel mount 40 and the mounting surface 40b of the wheel mount 40 are aligned. The screws 6 are passed through the six through holes 41 of the wheel mount 40 and screwed into the female screw holes 551 to be fastened to fix the screws. On the other hand, when removing the grinding wheel 55 from the wheel mount 40, after removing all the screws 6 from the six female screw holes 551 and the through holes 41, the mounting surface 40b of the wheel mount 40 and the mounting surface 55a of the grinding wheel 55 Should be separated.

[Measurement jig]
The measuring jig 10 shown in FIG. 3 is mounted on the wheel mount 40 in the above-mentioned grinding apparatus 1 to rotate the shaft and measure the height of the holding surface of the grinding wheel 56 on the holding surface 21a in the rotating track 100. It is a form of jig. The measuring jig 10 includes a gauge 14 for measuring the height of the holding surface of the holding surface 21a, and is fixed to the wheel mount 40 so that the tip 140 of the gauge 14 is positioned directly below the grinding surface 56b of the grinding wheel 56. The height of the holding surface directly below the grinding surface 56b is measured along the rotating track 100 of 56.

The measuring jig 10 shown in the present embodiment has an upper plate 11 having a second through hole 110 penetrating the upper surface 11a and the lower surface 11b, a lower plate 12 on which the gauge 14 is arranged, and the upper plate 11 and the lower plate 11. It is provided with a connection portion 13 for connecting to the plate 12. The upper plate 11 is formed in the shape of a rectangular plate, for example, and the upper surface 11a and the lower surface 11b are flat surfaces parallel to the horizontal direction orthogonal to the vertical direction. In the illustrated example, the lower surface 11b is a surface fixed to the upper surface 40a of the wheel mount 40. When fixing the measuring jig 10 to the wheel mount 40, the second through hole 110 is aligned with one of the plurality of through holes 41 shown in FIG. 2, and the long screw 7 longer than the screw 6 is used. Is configured to penetrate through the second through hole 110.

The lower plate 12 has the same configuration as the upper plate 11, and the upper surface 12a and the lower surface 12b are flat surfaces parallel to the horizontal direction orthogonal to the vertical direction. The gauge 14 is arranged so as to penetrate the upper surface 12a and the lower surface 12b of the lower plate 12, and the tip 140 of the gauge 14 projects downward from the lower surface 12b of the lower plate 12. The gauge 14 shown in the present embodiment is configured by a contact-type height gauge, but is not limited to such a configuration, and may be configured by a non-contact optical measuring instrument.

The connecting portion 13 is a plate-shaped member extending in the vertical direction. In the illustrated example, the upper plate 11 is connected to the upper end of the connecting portion 13 and the lower plate 12 is connected to the lower end of the connecting portion 13 so that the upper plate 11 and the lower plate 12 face each other. As a result, the measuring jig 10 is formed in a U-shape, for example. The length of the connecting portion 13 in the vertical direction is not particularly limited, but is at least the height from the upper surface 40a of the wheel mount 40 with the grinding wheel 55 mounted on the wheel mount 40 to the grinding surface 56a of the grinding wheel 56. It is preferable that it is set. The measuring jig 10 shown in the present embodiment is formed in a U-shape, but is not limited to such a shape.

When fixing the measuring jig 10 configured in this way to the wheel mount 40, first, the screw 6 is screwed into the female screw hole 551 through the through hole 41 of the wheel mount 40, and the grinding wheel 55 is inserted into the wheel mount 40. After removing any one of the plurality of screws 6 fixing the screws, the through hole 41 from which one screw 6 has been removed and the second through hole 110 of the upper plate 11 are made to match, and the upper plate 11 The lower surface 11b of the wheel mount 40 is brought into contact with the upper surface 40a of the wheel mount 40. That is, as shown in FIG. 4, the upper plate 11 of the measuring jig 10 is placed on the upper surface 40a of the wheel mount 40 without removing the grinding wheel 55 from the wheel mount 40.

Next, as shown in FIG. 5, a long screw 7 longer than the screw 6 is passed through the second through hole 110 and the through hole 41 and screwed into the female screw hole 551 of the grinding wheel 55, and is screwed onto the grinding wheel 55 and above. The wheel mount 40 is sandwiched between the plate 11 and the upper plate 11 is fixed. When the upper plate 11 is fixed to the wheel mount 40, the lower plate 12 is positioned below the grinding wheel 56 by detouring the side side of the grinding wheel 55 by the connecting portion 13, and the gauge 14 is directly below the grinding surface 56a. Positioned. In this way, the measuring jig 10 is fixed to the grinding wheel 55 with the grinding wheel 55 mounted on the wheel mount 40.

When measuring the height of the holding surface 21a of the holding table 20 shown in FIG. 1 with the measuring jig 10 fixed to the grinding wheel 55, the tip 140 of the gauge 14 is in contact with the holding surface 21a. By rotating the grinding wheel 55, the grinding wheel 56 is scanned along the rotating track 100, and the height of the holding surface is measured. Then, the inclination of the holding table 20 and the grinding wheel 55 is confirmed based on the change in the vertical position of the tip 140 of the gauge 14. Then, if necessary, the holding table 20 or the grinding means 50 is tilted and adjusted so that the holding surface 21a of the holding table 20 and the grinding surface 56a of the grinding wheel 56 are parallel to each other.

As described above, the measuring jig 10 according to the present invention includes a gauge 14 for measuring the height of the holding surface of the holding table 20, the measuring jig 10 is fixed to the wheel mount 40, and the tip 140 of the gauge 14 is a grinding wheel. When checking the inclination of the holding table 20 and the grinding wheel 55 in order to measure the height of the holding surface directly under the grinding surface 56a along the rotation path 100 of the grinding wheel 56, which is positioned directly under the grinding surface 56a of the 56. In addition, it is not necessary to remove the grinding wheel 55 from the wheel mount 40. Therefore, according to the present invention, it is possible to quickly confirm whether or not the parallelism between the holding surface 21a and the grinding surface 56a has changed while the grinding wheel 55 is mounted on the wheel mount 40.
Further, the measuring jig 10 includes an upper plate 11 having a second through hole 110 penetrating the upper surface 11a and the lower surface 11b, a lower plate 12 on which the gauge 14 is arranged, and the upper plate 11 and the lower plate 12. One of the plurality of screws 6 for fixing the grinding wheel 55 to the wheel mount 40 with a connecting portion 13 is removed, and the length is the same as the thickness of the upper plate 11 than the removed screw 6. The long screw 7 is passed through the second through hole 110 and the through hole 41 and screwed into the female screw hole 551 of the grinding wheel 55, and the wheel mount 40 is sandwiched between the grinding wheel 55 and the upper plate 11 and the upper plate 11 is sandwiched between the grinding wheel 55 and the upper plate 11. Is configured so that the gauge 14 is positioned directly under the grinding surface 56a by bypassing the side side of the grinding wheel 55, so that the measuring jig 10 can be mounted on the wheel without removing the grinding wheel 55 from the wheel mount 40. It can be easily fixed to 40.

1: Grinding device 2: Equipment base 3: Column 4: Cover 5: Bracket 6: Screw 7: Long screw 10: Measuring jig 11 Upper plate 110: Second through hole 12: Lower plate 13: Connection part 14: Gauge 140: Tip 20: Holding table 21: Porous plate 22: Frame 30: Thickness measuring means 31: First gauge 32: Second gauge 40: Wheel mount 41: Through hole 50: Grinding means 51: Spindle unit 52: Spindle housing 53: Motor 54: Holder 55: Grinding wheel 550: Opening 551: Female screw hole 56: Grinding wheel 60: Grinding feed means 61: Ball screw 62: Motor 63: Guide rail 64: Elevating plate

Claims (2)

A wheel mount that has a holding table that holds the plate-shaped work on the holding surface and a mounting surface that mounts a grinding wheel with a grinding wheel arranged in an annular shape on the lower surface, and a wheel mount on the upper surface of the wheel mount centered on the center of the wheel mount. In a grinding device having a spindle unit to be connected and rotated and a grinding means for grinding a plate-shaped workpiece held by the holding table, the shaft is mounted on the wheel mount and the shaft is rotated to rotate the shaft on the holding surface. It is a measuring jig that measures the height of the holding surface of the grinding wheel in the rotating trajectory.
The measuring jig includes a gauge for measuring the height of the holding surface.
The measuring jig is fixed to the wheel mount, the tip of the gauge is positioned directly below the grinding surface of the grinding wheel, and the height of the holding surface directly below the grinding surface is set along the rotation trajectory of the grinding wheel. Measuring jig to measure. The grinding wheel is provided with a plurality of female screw holes which are open to the mounted surface of the wheel mount in contact with the mounting surface and are arranged at equal intervals in the circumferential direction around the center of the grinding wheel.
The wheel mount penetrates the upper surface and the lower surface, and is disposed at equal intervals in the circumferential direction corresponding to the female screw hole of the grinding wheel, and has a plurality of through holes for screwing the grinding wheel to the mounting surface. Prepare,
The measuring jig has an upper plate having a second through hole penetrating the upper surface and the lower surface, a lower plate on which the gauge is arranged, and a connection portion connecting the upper plate and the lower plate. Prepare,
Remove any one of the plurality of screws fixing the grinding wheel to the wheel mount, and pass a screw longer than the removed screw through the second through hole and the through hole, and grind the grinding wheel. It is screwed into the female screw hole of the wheel, the wheel mount is sandwiched between the grinding wheel and the upper plate to fix the upper plate, and the side side of the grinding wheel is bypassed and directly under the grinding surface. The measuring jig according to claim 1, wherein the gauge is positioned.

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