TW202144125A - Grinding device capable of preventing the grinding wheel from being attached - Google Patents

Grinding device capable of preventing the grinding wheel from being attached Download PDF

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Publication number
TW202144125A
TW202144125A TW110117857A TW110117857A TW202144125A TW 202144125 A TW202144125 A TW 202144125A TW 110117857 A TW110117857 A TW 110117857A TW 110117857 A TW110117857 A TW 110117857A TW 202144125 A TW202144125 A TW 202144125A
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Taiwan
Prior art keywords
grinding
light
grinding wheel
stone
time
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TW110117857A
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Chinese (zh)
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山中聡
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日商迪思科股份有限公司
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Publication of TW202144125A publication Critical patent/TW202144125A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/20Drives or gearings; Equipment therefor relating to feed movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/22Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

A subject of the present invention is to determine a type of a grinding wheel. The solution of the present invention is that the first grinding stone 360 is lowered to enter between a light projecting portion 50 and a light receiving portion 51 of the sensor 5 while rotating a first rotating stone 360 at a predetermined speed by using a rotating means 32. Accordingly, a state in which the light projected by the light projecting portion 50 is blocked by the first grinding stone 360 and a state in which the light projecting portion 50 is not blocked by the first grinding stone 360 are repeated. The time when the light receiving portion 51 does not receive light is measured and compared with the previously stored blocking time through a determination means 6, the grinding wheel mounted at the mounting member 33 is determined as the first grinding wheel 36.

Description

研削裝置Grinding device

本發明關於一種研削裝置。The present invention relates to a grinding device.

如專利文獻1所示,研削裝置係將在基台環狀地配置有研削磨石之研削輪裝設在與主軸的前端連結之安裝件,並藉由使該主軸旋轉,而一邊使研削磨石旋轉,一邊使旋轉中的研削磨石接觸保持在卡盤台的保持面之被加工物,而研削被加工物。As shown in Patent Document 1, in a grinding device, a grinding wheel having a grinding stone arranged annularly on a base is mounted on a mount connected to a front end of a main shaft, and the main shaft is rotated to grind and grind the grinding wheel. As the stone rotates, the rotating grinding stone is brought into contact with the workpiece held on the holding surface of the chuck table, and the workpiece is ground.

在此,研削裝置中例如有雙軸研削裝置,所述雙軸研削裝置具備:裝設有粗研削輪之粗研削手段、與裝設有精研削輪之精研削手段。 [習知技術文獻] [專利文獻]Here, the grinding apparatus includes, for example, a biaxial grinding apparatus including rough grinding means equipped with a rough grinding wheel and fine grinding means equipped with a fine grinding wheel. [Previously known technical literature] [Patent Literature]

[專利文獻1]日本特開2017-127936號公報[Patent Document 1] Japanese Patent Laid-Open No. 2017-127936

[發明所欲解決的課題] 在上述雙軸研削裝置中,會有將粗研削輪與精研削輪裝錯的情況,例如,若將粗研削輪裝設在精研削手段、或將精研削輪裝設在粗研削手段而將被加工物進行研削加工,則會成為被加工物及研削磨石損壞之原因。 並且,在由具備一個研削手段之單軸研削裝置所進行之被加工物的研削加工中,係因應被加工物的種類而選擇並使用適當的研削輪。因此,在交換研削輪之際,存在所謂有裝錯之慮的問題。 因此,研削裝置具有防止裝錯研削輪之課題。[Problems to be solved by the invention] In the above-mentioned two-axis grinding device, the rough grinding wheel and the fine grinding wheel may be installed wrongly. When the workpiece is ground, the workpiece and the grinding stone will be damaged. In addition, in the grinding of the workpiece by the uniaxial grinding apparatus provided with one grinding means, an appropriate grinding wheel is selected and used according to the type of the workpiece. Therefore, when exchanging the grinding wheel, there is a problem of so-called wrong installation. Therefore, the grinding device has the problem of preventing wrong installation of the grinding wheel.

[用於解決課題的手段] 本發明係一種研削裝置,其具備:卡盤台,其將被加工物保持在保持面;研削手段,其將環狀地配置有多個研削輪石之研削輪裝設在主軸的前端,並研削保持在該保持面的被加工物;以及旋轉手段,其使該主軸以預定的旋轉速度旋轉,其中,所述研削裝置具備:感測器,其具備投射光之投光部、與接受該投光部所投射的該光之受光部;以及判斷手段,其在使以預定的旋轉速度旋轉之該研削磨石進入該感測器的該投光部與該受光部之間而能藉由該研削磨石遮蔽該光之狀態下,使用該受光部接受該光之時間、該受光部接受該光之次數、該受光部未接受該光之時間、該受光部未接受該光之次數中的至少一者而判斷該研削輪的種類。 上述該研削輪較佳為由依據後述條件而不同之種類所形成:環狀地配置之該研削磨石的圓周方向的長度、該研削磨石的數量、該環狀地配置且呈彼此相鄰之該研削磨石與該研削磨石之間的間隙的長度、該間隙的數量。[Means for solving problems] The present invention relates to a grinding device comprising: a chuck table for holding a workpiece on a holding surface; a grinding means for mounting a grinding wheel in which a plurality of grinding wheel stones are arranged annularly on a front end of a main shaft, and grinding the workpiece held on the holding surface; and rotating means for rotating the main shaft at a predetermined rotational speed, wherein the grinding device includes a sensor including a light projecting portion for projecting light, and a sensor for receiving the light a light-receiving part of the light projected by the light-projecting part; and a judging means, which can be obtained by making the grinding stone rotating at a predetermined rotational speed enter between the light-emitting part and the light-receiving part of the sensor In the state where the grinding stone blocks the light, use the time that the light-receiving part receives the light, the number of times the light-receiving part receives the light, the time that the light-receiving part does not receive the light, and the number of times that the light-receiving part does not receive the light. to determine the type of the grinding wheel. The above-mentioned grinding wheel is preferably formed of different types according to the conditions described below: the circumferential length of the grinding stones arranged annularly, the number of the grinding stones, the annular arrangement and adjacent to each other. The length of the gap between the grinding stone and the grinding stone, and the number of the gap.

[發明功效] 針對環狀地配置有多個研削磨石之研削輪,若為使以預定的旋轉速度旋轉之研削磨石進入感測器的投光部與受光部之間而能藉由研削磨石遮蔽光之狀態,則由於判斷手段使用受光部接受光之時間、受光部接受光之次數、受光部未接受光之時間、受光部未接受光之次數中的至少一者而判斷研削輪的種類,故可防止裝錯研削輪。[Inventive effect] For a grinding wheel in which a plurality of grinding stones are arranged annularly, if the grinding stone rotating at a predetermined rotational speed enters between the light-emitting portion and the light-receiving portion of the sensor, light can be shielded by the grinding stone. The state of the grinding wheel is determined by using at least one of the time when the light-receiving part receives light, the number of times the light-receiving part receives light, the time when the light-receiving part does not receive light, and the number of times the light-receiving part does not receive light. Prevents the wrong grinding wheel from being installed.

1 研削裝置的構成 圖1所示的研削裝置1係將被加工物14進行研削加工之研削裝置。以下說明研削裝置1的構成。1 Structure of the grinding device The grinding apparatus 1 shown in FIG. 1 is a grinding apparatus which grinds the workpiece 14 . The configuration of the grinding device 1 will be described below.

如圖1所示,研削裝置1具備:基座10,其延伸設置在Y軸方向;以及柱體11,其立設在基座10上的+Y方向側。As shown in FIG. 1 , the grinding apparatus 1 includes a base 10 extending in the Y-axis direction, and a column 11 erected on the +Y-direction side of the base 10 .

在柱體11的-Y方向側的側面,配設有支撐研削手段3之研削進給手段4。研削手段3具備:主軸30,其具有Z軸方向的旋轉軸35;外殼31,其能旋轉地支撐主軸30;作為馬達的旋轉手段32,其以旋轉軸35作為軸並旋轉驅動主軸30;以及圓環狀的安裝件33,其與主軸30的下端連接。在圖1中,裝設有第一研削輪36,所述第一研削輪36被裝設在安裝件33的下表面。第一研削輪36相對於安裝件33為能裝卸,安裝件33亦可安裝其他種類的研削輪以取代第一研削輪36。On the side surface on the −Y direction side of the column body 11 , a grinding feed means 4 supporting the grinding means 3 is arranged. The grinding means 3 includes: a main shaft 30 having a rotating shaft 35 in the Z-axis direction; a casing 31 rotatably supporting the main shaft 30; a rotating means 32 serving as a motor, which uses the rotating shaft 35 as an axis to rotatably drive the main shaft 30; and The annular mounting member 33 is connected to the lower end of the main shaft 30 . In FIG. 1 , a first grinding wheel 36 is installed, and the first grinding wheel 36 is installed on the lower surface of the mount 33 . The first grinding wheel 36 is detachable relative to the mounting member 33 , and the mounting member 33 can also be mounted with other types of grinding wheels to replace the first grinding wheel 36 .

第一研削輪36具備:第一輪基台361;以及多個第一研削磨石360,其等環狀地排列在第一輪基台361的下表面且具有大致長方體形狀。The first grinding wheel 36 includes: a first wheel base 361; and a plurality of first grinding stones 360 which are arranged annularly on the lower surface of the first wheel base 361 and have a substantially rectangular parallelepiped shape.

如圖2所示,相鄰的兩個第一研削磨石360係空開第一間隙長度363而配設,所有的第一研削磨石360被排列成整體呈環狀。各第一研削磨石360具有作為其圓周方向的長度之第一研磨齒長度364。第一研削磨石360的下表面362成為研削被加工物14的研削面。在研削磨石中,可藉由改變第一研磨齒長度364的值、第一間隙長度363的值而謀求研削品質的最佳化,因此準備有此等值不同之多種類的研削輪。As shown in FIG. 2 , two adjacent first grinding stones 360 are arranged with a first gap length 363 therebetween, and all the first grinding stones 360 are arranged in a ring shape as a whole. Each of the first grinding stones 360 has a first grinding tooth length 364 as its circumferential length. The lower surface 362 of the first grinding stone 360 serves as a grinding surface for grinding the workpiece 14 . In the grinding stone, the grinding quality can be optimized by changing the value of the first grinding tooth length 364 and the value of the first gap length 363. Therefore, various types of grinding wheels with different values are prepared.

使用圖1所示之旋轉手段32,並以旋轉軸35作為軸而使主軸30旋轉,藉此與主軸30連接之安裝件33及被裝設在安裝件33之第一研削輪36會以通過第一輪基台361的中心之Z軸方向的旋轉軸35為軸而旋轉。Using the rotating means 32 shown in FIG. 1, and using the rotating shaft 35 as the axis to rotate the main shaft 30, the mounting member 33 connected to the main shaft 30 and the first grinding wheel 36 installed on the mounting member 33 will pass through The rotation shaft 35 in the Z-axis direction at the center of the first wheel base 361 rotates as an axis.

研削進給手段4具備:滾珠螺桿40,其具有Z軸方向的旋轉軸45;一對導軌41,其相對於滾珠螺桿40平行地配設;Z軸馬達42,其與滾珠螺桿40的上端連結並以旋轉軸45為軸而使滾珠螺桿40轉動;升降板43,其內部的螺帽與滾珠螺桿40螺合且側部與導軌41滑接;以及保持座44,其與升降板43連結並保持主軸30。 當藉由使用Z軸馬達42而驅動滾珠螺桿40,滾珠螺桿40以旋轉軸45為軸而旋轉,則成為後述的構成:升降板43會一邊被導軌41引導一邊在Z軸方向升降移動,伴隨於此,保持在保持座44之研削手段3會相對於保持面200往垂直方向(Z軸方向)移動。The grinding and feeding means 4 includes: a ball screw 40 having a rotating shaft 45 in the Z-axis direction; a pair of guide rails 41 arranged parallel to the ball screw 40; and a Z-axis motor 42 connected to the upper end of the ball screw 40 And take the rotating shaft 45 as the axis to make the ball screw 40 rotate; the lifting plate 43, the inner nut is screwed with the ball screw 40 and the side part is slidingly connected with the guide rail 41; and the holding seat 44, which is connected with the lifting plate 43 and Hold the spindle 30. When the ball screw 40 is driven by using the Z-axis motor 42, and the ball screw 40 rotates about the rotation shaft 45, the configuration described later is obtained: the lift plate 43 moves up and down in the Z-axis direction while being guided by the guide rail 41, Here, the grinding means 3 held by the holder 44 moves in the vertical direction (Z-axis direction) with respect to the holding surface 200 .

在基座10上配設有卡盤台2。卡盤台2具備圓板狀的吸引部20與支撐吸引部20之環狀的框體21。吸引部20為具有多個細孔之多孔構件,吸引部20的上表面成為吸引保持被加工物14之保持面200。框體21的上表面210與保持面200形成為同一平面。The chuck table 2 is arranged on the base 10 . The chuck table 2 includes a disk-shaped suction part 20 and an annular frame body 21 supporting the suction part 20 . The suction portion 20 is a porous member having a plurality of pores, and the upper surface of the suction portion 20 serves as a holding surface 200 for sucking and holding the workpiece 14 . The upper surface 210 of the frame body 21 and the holding surface 200 are formed on the same plane.

在卡盤台2的保持面200連接有未圖示的吸引源。例如,在被加工物14載置於保持面200之狀態,藉由使該吸引源運作,而可將被加工物14吸引保持在保持面200。A suction source (not shown) is connected to the holding surface 200 of the chuck table 2 . For example, when the workpiece 14 is placed on the holding surface 200 , the workpiece 14 can be sucked and held on the holding surface 200 by operating the suction source.

並且,在卡盤台2配設有未圖示的旋轉機構。藉由使用該旋轉機構,而可使卡盤台2旋轉。In addition, a rotation mechanism not shown is arranged on the chuck table 2 . By using this rotation mechanism, the chuck table 2 can be rotated.

在卡盤台2的周圍配設有蓋28,蓋28係能伸縮地與蛇腹27連結。 若卡盤台2在Y軸方向移動,則蓋28與卡盤台2一體地在Y軸方向移動,而蛇腹27會伸縮。A cover 28 is disposed around the chuck table 2, and the cover 28 is connected to the accordion 27 in a retractable manner. When the chuck table 2 moves in the Y-axis direction, the cover 28 moves in the Y-axis direction integrally with the chuck table 2, and the accordion 27 expands and contracts.

在基座10上的卡盤台2的+Y方向側配設有感測器5。感測器5具備基台53與配設在基台53上的投受光元件54。投受光元件54為具備貫通X軸方向的凹部之構件,且具備投射光之投光部50與接受從投光部50投射的光之受光部51。The sensor 5 is arranged on the +Y direction side of the chuck table 2 on the base 10 . The sensor 5 includes a base 53 and a light-emitting and receiving element 54 arranged on the base 53 . The light projecting and receiving element 54 is a member including a recessed portion penetrating the X-axis direction, and includes a light projecting portion 50 that projects light and a light receiving portion 51 that receives light projected from the light projecting portion 50 .

設成在從投光部50投射的光被受光部51接受時檢測電壓,且在從投光部50投射的光未被受光部51接受時不檢測電壓。It is assumed that the voltage is detected when the light projected from the light projecting unit 50 is received by the light receiving unit 51 , and the voltage is not detected when the light projected from the light projecting unit 50 is not received by the light receiving unit 51 .

感測器5係與判斷手段6連接。判斷手段6具有依據受光部51接受光之時間、受光部51接受光之次數、受光部51未接受光之時間、受光部51未接受光之次數中的至少一者而判斷研削輪的種類之功能。 例如,將與圖2所示之第一研磨齒長度364對應且受光部51未接受光之時間亦即第一遮光時間,預先儲存在判斷手段6。The sensor 5 is connected to the judgment means 6 . The judging means 6 has a method of judging the type of grinding wheel based on at least one of the time when the light receiving portion 51 receives light, the number of times the light receiving portion 51 receives light, the time when the light receiving portion 51 does not receive light, and the number of times the light receiving portion 51 does not receive light. Features. For example, the time corresponding to the first grinding tooth length 364 shown in FIG. 2 and the time when the light receiving portion 51 does not receive light, that is, the first light blocking time, is stored in the judgment means 6 in advance.

2 研削裝置的動作 (研削加工) 說明使用上述研削裝置1而將被加工物14進行研削加工之際的研削裝置1的動作。 在使用研削裝置1將被加工物14進行研削加工之際,首先,將圖1所示之被加工物14載置於卡盤台2的保持面200。然後,使連接至卡盤台2之未圖示的吸引源運作,將所產生的吸引力傳達至保持面200。藉此,被加工物14被吸引保持在保持面200。2 Operation of the grinding device (grinding processing) The operation of the grinding device 1 when grinding the workpiece 14 using the above-described grinding device 1 will be described. When grinding the workpiece 14 using the grinding device 1 , first, the workpiece 14 shown in FIG. 1 is placed on the holding surface 200 of the chuck table 2 . Then, a suction source not shown connected to the chuck table 2 is operated, and the generated suction force is transmitted to the holding surface 200 . Thereby, the workpiece 14 is attracted and held by the holding surface 200 .

在被加工物14被吸引保持在保持面200之狀態,使用未圖示的Y軸移動手段等,使卡盤台2在+Y方向移動,而定位在研削手段3的下方。 接著,使用未圖示的旋轉機構而使卡盤台2旋轉,使保持在保持面200之被加工物14旋轉,且使用旋轉手段32以旋轉軸35為軸而使第一研削磨石360旋轉。In a state where the workpiece 14 is sucked and held on the holding surface 200 , the chuck table 2 is moved in the +Y direction using a Y-axis moving means not shown, etc., and is positioned below the grinding means 3 . Next, the chuck table 2 is rotated using a rotation mechanism (not shown), the workpiece 14 held on the holding surface 200 is rotated, and the first grinding stone 360 is rotated about the rotation shaft 35 using the rotation means 32 .

在被加工物14以上述未圖示之旋轉機構的旋轉軸為軸而旋轉,且第一研削磨石360以旋轉軸35為軸而旋轉之狀態,使用研削進給手段4使研削手段3往-Z方向下降。藉由使第一研削磨石360往-Z方向下降,而第一研削磨石360的下表面362接觸被加工物14的上表面140。 在下表面362接觸被加工物14的上表面140之狀態,藉由使第一研削磨石360進一步往-Z方向下降而研削被加工物14。 被加工物14的研削加工結束後,則使用研削進給手段4使研削手段3往+Z方向移動,使第一研削磨石360從被加工物14的上表面140分離後,從卡盤台2的保持面200搬出被加工物14。In a state in which the workpiece 14 is rotated about the rotating shaft of the above-mentioned rotating mechanism (not shown), and the first grinding stone 360 is rotated about the rotating shaft 35, the grinding feed means 4 is used to move the grinding means 3 toward - Descending in the Z direction. By lowering the first grinding stone 360 in the −Z direction, the lower surface 362 of the first grinding stone 360 contacts the upper surface 140 of the workpiece 14 . In a state where the lower surface 362 is in contact with the upper surface 140 of the workpiece 14 , the workpiece 14 is ground by further descending the first grinding stone 360 in the −Z direction. After the grinding process of the workpiece 14 is completed, the grinding feed means 4 is used to move the grinding means 3 in the +Z direction, the first grinding stone 360 is separated from the upper surface 140 of the workpiece 14, and then separated from the chuck table 2. The holding surface 200 of the workpiece 14 is carried out.

(研削輪的種類的判斷) 在研削裝置1中,在進行被加工物14的研削加工之前,係使用感測器5而判斷裝設在安裝件33之研削輪的種類。以下,說明判斷研削輪的種類之際的研削裝置1的動作。 在本實施方式中,判斷裝設在安裝件33之研削輪為圖2所示之第一研削輪36、或為圖3所示之第二研削輪37。(Judgment of the type of grinding wheel) In the grinding apparatus 1 , before grinding the workpiece 14 , the sensor 5 is used to determine the type of the grinding wheel mounted on the mount 33 . Hereinafter, the operation of the grinding device 1 when the type of the grinding wheel is judged will be described. In the present embodiment, it is determined that the grinding wheel mounted on the mounting member 33 is the first grinding wheel 36 shown in FIG. 2 or the second grinding wheel 37 shown in FIG. 3 .

在圖3中,表示第二研削輪37的俯視圖。第二研削輪37具備:環狀的第二輪基台371;以及多個第二研削磨石370,其等空開第二間隙長度373而環狀地排列在第二輪基台371的下表面。第二研削磨石370係與第一研削磨石360同樣地具有大致長方體形狀,且其圓周方向的長度成為比第一研磨齒長度364更短的長度亦即第二研磨齒長度374。 第二研削輪37在環狀地配置之各研削磨石的圓周方向的長度、研削磨石的數量、環狀地配置且呈彼此相鄰之研削磨石與研削磨石之間的間隙的長度、該間隙的數量,係與第一研削輪36不同。 亦即,第一研磨齒長度364與第二研磨齒長度374不同。並且,第一間隙長度363與第二間隙長度373不同。再者,第一研削輪36所具備之第一研削磨石360的數量與第二研削輪37所具備之第二研削磨石370的數量不同。除此之外,相鄰的第一研削磨石360彼此的間隙的數量與相鄰的第二研削磨石370彼此的間隙的數量不同。In FIG. 3, the top view of the 2nd grinding wheel 37 is shown. The second grinding wheel 37 includes: an annular second wheel base 371; surface. The second grinding stone 370 has a substantially rectangular parallelepiped shape like the first grinding stone 360 , and the length in the circumferential direction is the second grinding tooth length 374 , which is a length shorter than the first grinding tooth length 364 . Length of the second grinding wheel 37 in the circumferential direction of each of the annularly arranged grinding stones, the number of the grinding stones, and the length of the gap between the annularly arranged and adjacent grinding stones and the grinding stones , The number of the clearance is different from that of the first grinding wheel 36 . That is, the first grinding tooth length 364 is different from the second grinding tooth length 374 . Also, the first gap length 363 is different from the second gap length 373 . Furthermore, the number of the first grinding stones 360 included in the first grinding wheel 36 is different from the number of the second grinding stones 370 included in the second grinding wheel 37 . In addition to this, the number of gaps between adjacent first grinding stones 360 and the number of gaps between adjacent second grinding stones 370 are different.

在判斷研削輪的種類之際,首先,使圖1所示的感測器5運作,從投受光元件54的投光部50朝向受光部51投射光。When determining the type of the grinding wheel, first, the sensor 5 shown in FIG. 1 is operated, and light is projected from the light projecting part 50 of the light projecting and receiving element 54 toward the light receiving part 51 .

接著,使用旋轉手段32,例如使裝設在安裝件33之第一研削輪36以預定的速度旋轉。在此,預定的速度例如設為10rpm。Next, using the rotating means 32, for example, the first grinding wheel 36 attached to the mounting member 33 is rotated at a predetermined speed. Here, the predetermined speed is set to 10 rpm, for example.

然後,使用研削進給手段4而使第一研削輪36往-Z方向只下降適當的距離。 如此,如圖4所示,第一研削磨石360進入投受光元件54的凹部540,第一研削磨石360的下表面362被定位在比以直線連結投光部50與受光部51之投受光連線52的高度位置更下方。Then, the first grinding wheel 36 is lowered by an appropriate distance in the −Z direction using the grinding feed means 4 . In this way, as shown in FIG. 4 , the first grinding stone 360 enters the concave portion 540 of the light projecting and receiving element 54 , and the lower surface 362 of the first grinding stone 360 is positioned at a distance from the projection connecting the light projecting portion 50 and the light receiving portion 51 with a straight line. The height position of the light-receiving connection line 52 is further down.

此時,由於第一研削磨石360旋轉,故會交互地重複第一研削磨石360與投受光連線52重疊而被遮光之狀態、與第一研削磨石360未與投受光連線52重疊而未被遮光之狀態。At this time, since the first grinding stone 360 rotates, the state where the first grinding stone 360 overlaps with the light-emitting and receiving line 52 and is blocked from light, and the first grinding stone 360 is not connected to the light-emitting and receiving line 52 is alternately repeated. The state of overlapping without being blocked.

在圖5中,表示在藉由旋轉的第一研削磨石360而從投光部50投射的光重複被遮蔽之狀態與未被遮蔽之狀態時感測器5所檢測之電壓的變化之圖表。 在圖5中,表示在第一研削輪36以預定的旋轉速度旋轉之情形中,從投光部50投射的光被第一研削磨石360遮蔽之時間亦即第一遮光時間365、與從投光部50投射的光未被第一研削磨石360遮蔽而被受光部51接受之時間以及第一受光時間366。在第一遮光時間365中,電壓的數值成為0V。並且,在第一受光時間366中,電壓的數值成為非0V的值(例如5V)。In FIG. 5 , a graph showing a change in the voltage detected by the sensor 5 when the light projected from the light projecting portion 50 by the rotating first grinding stone 360 is repeatedly blocked and not blocked. . In FIG. 5 , when the first grinding wheel 36 rotates at a predetermined rotational speed, the time when the light projected from the light projecting part 50 is blocked by the first grinding stone 360 , that is, the first blocking time 365 , and the time from The time when the light projected by the light projecting unit 50 is received by the light receiving unit 51 without being blocked by the first grinding stone 360 and the first light receiving time 366 . During the first light blocking time 365, the value of the voltage becomes 0V. In addition, in the first light receiving time 366, the value of the voltage becomes a value other than 0V (for example, 5V).

在此,在圖1所示的判斷手段6中,預先儲存有第一遮光時間365。若所儲存的第一遮光時間365與所測量的遮光時間一致,則藉由判斷手段6判斷裝設在安裝件33之研削輪是第一研削輪36。Here, in the determination means 6 shown in FIG. 1 , the first light blocking time 365 is stored in advance. If the stored first shading time 365 is consistent with the measured shading time, the judging means 6 determines that the grinding wheel installed on the mounting member 33 is the first grinding wheel 36 .

另一方面,考慮例如將第二研削輪37取代第一研削輪36而裝設在安裝件33之情形。以圖3所示之第二研削磨石370的下表面372在被定位於比圖4所示的投受光連線52的高度位置更下方之狀態,藉由第二研削磨石370旋轉而重複遮光狀態與非遮光狀態。在圖6中,表示在所投射的光被第二研削輪37斷續地遮蔽之際感測器5所檢測之電壓的變化之圖表。On the other hand, consider a case where, for example, the second grinding wheel 37 is attached to the mount 33 instead of the first grinding wheel 36 . In a state where the lower surface 372 of the second grinding stone 370 shown in FIG. 3 is positioned lower than the height position of the light-emitting and receiving line 52 shown in FIG. Shading state and non-shading state. In FIG. 6, the graph which shows the change of the voltage detected by the sensor 5 when the projected light is interrupted by the 2nd grinding wheel 37 is shown.

將從投光部50投射的光被第二研削磨石370遮蔽之時間設為第二遮光時間375,並將從投光部50投射的光未被第二研削磨石370遮蔽而被受光部51接受之時間設為第二受光時間376。 圖1所示的判斷手段6中,例如預先儲存有第二研削輪37以預定的旋轉速度旋轉之情形中的第二遮光時間375,所述第二遮光時間375是與第二研削磨石370的第二研磨齒長度374對應。若所儲存的第二遮光時間375與所測量的遮光時間一致,則藉由判斷手段6判斷裝設在安裝件33之研削輪是第二研削輪37。The time when the light projected from the light projecting part 50 is blocked by the second grinding stone 370 is set as the second light blocking time 375, and the light projected from the light projecting part 50 is not blocked by the second grinding stone 370 but is blocked by the light receiving part The time when 51 is received is set as the second light receiving time 376 . In the judgment means 6 shown in FIG. 1 , for example, a second light blocking time 375 when the second grinding wheel 37 rotates at a predetermined rotational speed is stored in advance, and the second light blocking time 375 corresponds to the second grinding stone 370 . The second grinding tooth length 374 corresponds. If the stored second shading time 375 is consistent with the measured shading time, the judging means 6 determines that the grinding wheel mounted on the mounting member 33 is the second grinding wheel 37 .

並且,在研削裝置1中,例如不僅可藉由受光部51未接受光之時間,也可藉由受光部51接受光之時間來判斷研削輪的種類。 例如,可預先使第一受光時間366及第二受光時間376儲存在判斷手段6,基於所測量的受光時間,判斷裝設在安裝件33之研削輪是第一研削輪36或第二研削輪37。Moreover, in the grinding apparatus 1, the type of grinding wheel can be judged not only by the time when the light receiving part 51 does not receive light, but also by the time when the light receiving part 51 receives light, for example. For example, the first light-receiving time 366 and the second light-receiving time 376 may be stored in the determination means 6 in advance, and based on the measured light-receiving time, it may be determined whether the grinding wheel mounted on the mounting member 33 is the first grinding wheel 36 or the second grinding wheel 37.

再者,例如事先使在第一研削輪36、第二研削輪37旋轉一次的期間中受光部51接受光之次數,亦即相鄰的研削磨石間的間隙的數量分別儲存至判斷手段6,並測量在研削輪實際旋轉一次的期間中受光部51接受光之次數,藉此可判斷第一研削輪36、第二研削輪37是何者裝設在安裝件33。Furthermore, for example, the number of times the light receiving portion 51 receives light during one rotation of the first grinding wheel 36 and the second grinding wheel 37, that is, the number of gaps between adjacent grinding stones, is stored in the judgment means 6, respectively. , and measure the number of times the light-receiving portion 51 receives light during the actual rotation of the grinding wheel, thereby determining which of the first grinding wheel 36 and the second grinding wheel 37 is mounted on the mounting member 33 .

除此之外,例如事先使在第一研削輪36、第二研削輪37旋轉一次的期間中受光部51未接受光之次數,亦即研削磨石的數量分別儲存至判斷手段6,並測量在研削輪實際旋轉一次的期間中受光部51未接受光之次數,藉此可判斷第一研削輪36、第二研削輪37是何者裝設在安裝件33。In addition to this, for example, the number of times the light-receiving portion 51 does not receive light during one rotation of the first grinding wheel 36 and the second grinding wheel 37, that is, the number of grinding stones, is stored in the judgment means 6, respectively, and measured. The number of times the light-receiving portion 51 does not receive light during the actual rotation of the grinding wheel can determine which one of the first grinding wheel 36 and the second grinding wheel 37 is attached to the mount 33 .

如以上所述,使用受光部51接受光之時間、受光部51接受光之次數、受光部51未接受光之時間、受光部51未接受光之次數中的至少一者而判斷研削輪的種類,藉此可防止裝錯研削輪,並可預防由使用錯的研削輪所導致之被加工物及研削磨石的損壞等。As described above, the type of grinding wheel is determined by using at least one of the time when the light receiving portion 51 receives light, the number of times the light receiving portion 51 receives light, the time when the light receiving portion 51 does not receive light, and the number of times the light receiving portion 51 does not receive light. , which can prevent the wrong grinding wheel from being installed, and can prevent the damage to the workpiece and the grinding stone caused by using the wrong grinding wheel.

此外,在本實施方式中,係判斷裝設在安裝件33的研削輪是第一研削輪36或第二研削輪37,但即使在研削輪是三種以上之情形中,亦可使用同樣的方法進行判斷。In addition, in the present embodiment, it is determined whether the grinding wheel mounted on the mount 33 is the first grinding wheel 36 or the second grinding wheel 37, but even in the case of three or more grinding wheels, the same method can be used make a judgment.

1:研削裝置 10:基座 11:柱體 14:被加工物 140:上表面 2:卡盤台 20:吸引部 200:保持面 21:框體 210:框體的上表面 27:蛇腹 28:蓋 3:研削手段 30:主軸 31:外殼 32:旋轉手段 33:安裝件 35:旋轉軸 36:第一研削輪 360:第一研削磨石 361:第一輪基台 362:下表面 363:第一間隙長度 364:第一研磨齒長度 365:第一遮光時間 366:第一受光時間 37:第二研削輪 370:第二研削磨石 372:下表面 373:第二間隙長度 374:第二研磨齒長度 375:第二遮光時間 376:第二受光時間 4:研削進給手段 40:滾珠螺桿 41:導軌 42:Z軸馬達 43:升降板 44:保持座 45:旋轉軸 5:感測器 50:投光部 51:受光部 52:投受光連線 53:基台 54:投受光元件 6:判斷手段1: Grinding device 10: Pedestal 11: Cylinder 14: Processed objects 140: Upper surface 2: Chuck table 20: Attraction Department 200: keep face 21: Frame 210: The upper surface of the frame 27: Snake Belly 28: Cover 3: Grinding means 30: Spindle 31: Shell 32: Rotation Means 33: Mounting pieces 35: Rotary axis 36: First grinding wheel 360: First Grinding Grinding Stone 361: First round abutment 362: Lower Surface 363: First gap length 364: Length of the first grinding tooth 365: First shading time 366: The first light receiving time 37: Second grinding wheel 370: Second Grinding Stone 372: Lower Surface 373:Second gap length 374: Length of the second grinding tooth 375: Second shading time 376: Second light receiving time 4: Grinding feed method 40: Ball screw 41: Rails 42: Z-axis motor 43: Lifting plate 44: Hold the seat 45: Rotary axis 5: Sensor 50: Projection part 51: Light receiving part 52: Projecting and receiving light connection 53: Abutment 54: Light-emitting and receiving element 6: Judgment means

圖1係表示研削裝置的整體之立體圖。 圖2係第一研削輪的俯視圖。 圖3係第二研削輪的俯視圖。 圖4係從側面觀看研削磨石遮蔽從感測器的投光部所投射的光的情況之剖面圖。 圖5係表示第一研削輪斷續地遮蔽來自投光部的光之際的電壓的變化之圖表圖。 圖6係表示第二研削輪斷續地遮蔽來自投光部的光之際的電壓的變化之圖表圖。FIG. 1 is a perspective view showing the entirety of a grinding apparatus. Figure 2 is a top view of the first grinding wheel. Figure 3 is a top view of the second grinding wheel. 4 is a cross-sectional view of a state in which a grinding stone shields light projected from a light-projecting portion of a sensor viewed from the side. FIG. 5 is a graph showing a change in voltage when the first grinding wheel intermittently shields light from a light projecting portion. FIG. 6 is a graph showing a change in voltage when the second grinding wheel intermittently shields light from a light projecting portion.

3:研削手段3: Grinding means

5:感測器5: Sensor

6:判斷手段6: Judgment means

30:主軸30: Spindle

32:旋轉手段32: Rotation Means

33:安裝件33: Mounting pieces

36:第一研削輪36: First grinding wheel

360:第一研削磨石360: First Grinding Grinding Stone

361:第一輪基台361: First round abutment

362:下表面362: Lower Surface

50:投光部50: Projection part

51:受光部51: Light receiving part

52:投受光連線52: Projecting and receiving light connection

54:投受光元件54: Light-emitting and receiving element

540:凹部540: Recess

Claims (2)

一種研削裝置,其具備: 卡盤台,其將被加工物保持在保持面; 研削手段,其將環狀地配置有多個研削磨石之研削輪裝設在主軸的前端,並研削保持在該保持面的被加工物;以及 旋轉手段,其使該主軸以預定的旋轉速度旋轉, 其中,該研削裝置具備: 感測器,其具備投射光之投光部、與接受該投光部所投射的該光之受光部;以及 判斷手段,其在使以預定的旋轉速度旋轉之該研削磨石進入該感測器的該投光部與該受光部之間而能藉由該研削磨石遮蔽該光之狀態下,使用該受光部接受該光之時間、該受光部接受該光之次數、該受光部未接受該光之時間、該受光部未接受該光之次數中的至少一者而判斷該研削輪的種類。A grinding device comprising: A chuck table, which holds the workpiece on the holding surface; Grinding means, which mounts a grinding wheel with a plurality of grinding stones annularly arranged at the front end of the main shaft, and grinds the workpiece held on the holding surface; and a rotating means that rotates the main shaft at a predetermined rotational speed, Among them, the grinding device has: a sensor including a light projecting portion that projects light, and a light receiving portion that receives the light projected by the light projecting portion; and Determining means for using the grinding stone in a state in which the grinding stone rotating at a predetermined rotational speed enters between the light projecting portion and the light receiving portion of the sensor so that the light can be shielded by the grinding stone The type of the grinding wheel is determined by at least one of the time that the light-receiving part receives the light, the number of times the light-receiving part receives the light, the time that the light-receiving part does not receive the light, and the number of times that the light-receiving part does not receive the light. 如請求項1之研削裝置,其中,該研削輪係由依據後述條件而不同之種類所形成:環狀地配置之該研削磨石的圓周方向的長度、該研削磨石的數量、該環狀地配置且呈彼此相鄰之該研削磨石與該研削磨石之間的間隙的長度、該間隙的數量。The grinding device according to claim 1, wherein the grinding wheel train is formed of different types depending on the following conditions: the circumferential length of the grinding stones arranged annularly, the number of the grinding stones, the annular The length of the gap between the grinding stone and the grinding stone adjacent to each other, and the number of the gap.
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