JP2017205810A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To keep a fairing grindstone in a dressable state over a long period and prevent a cutting blade from being excessively dressed.SOLUTION: A cutting device 1 comprises holding means 3, cutting and feeding means 11, cutting means 6, index feeding means 12, cutting-in and feeding means 16, and fairing means 5 for fairing an end surface 630a of a cutting edge 630 of a cutting blade 63 into a flat plane. The fairing means 5 comprises a narrow plate-like fairing grindstone 50 and means 51 for fixing by making the width direction of the fairing grindstone 50 coincide with the X axis direction and making the depth direction coincide with the Y axis direction in a state in which the fairing grindstone 50 stands, and comprises means 7 for measuring a height position of an upper surface 50a of the fairing grindstone 50. The cutting device 1 fairs the end surface 630a of the cutting edge 630 into a flat plane by moving the cutting means 6 in the Y axis direction by the index feeding means 12 with the cutting means 6 positioned at a height position at which the lower end of the cutting edge 630 of the rotated cutting blade 63 cuts in the fairing grindstone 50.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cutting apparatus for cutting a workpiece with a cutting blade.

  A cutting apparatus used for manufacturing a semiconductor wafer can perform a desired cutting process on a workpiece by cutting a rotating cutting blade into the workpiece held by a holding unit. Examples of cutting include cutting that cuts a workpiece in a lattice shape along the division lines formed on the workpiece, and circular workpieces that are rounded against the outer periphery of the workpiece. There is a cutting process.

  In a cutting process in which a circular workpiece is cut into a circle against the outer periphery of the workpiece, for example, in edge trimming of a workpiece, for example, about 2/3 of the end face of the cutting blade of the cutting blade is processed. The cutting blade is positioned so as to be in contact with the outer peripheral portion of the workpiece, and the workpiece is cut by the cutting blade. Therefore, the amount of wear of the cutting blade is different between the inner portion and the outer portion of the end face of the cutting blade in the radial direction of the workpiece by performing the cutting process. That is, a cutting blade obtained by cutting a predetermined number of workpieces has, for example, a state in which the end surface of the cutting blade is inclined downward from the inside to the outside, or a state in which a minute step is generated on the end surface of the cutting blade.

  Therefore, during cutting, it is necessary to dress the cutting blade periodically to shape the end face of the cutting blade flat. Therefore, there exists a cutting device provided with the dressing board (shaped grinding stone) for dressing the end surface of a cutting blade flatly (for example, refer to patent documents 1).

JP 2010-588 A

  When dressing the cutting blade, for example, as described in Patent Document 1, the flat shaped grinding stone 90 shown in FIG. 7 is laid down, that is, the cutting blade 91 mounted on the rotary shaft 92 is placed. The shaping grindstone 90 is held so that the contact area between the end face of the cutting blade 910 and the shaping grindstone 90 is increased to some extent, and the cutting blade 91 that rotates relative to the shaping grindstone 90 is cut to a predetermined depth. Then, dressing is performed by moving the cutting blade 91 in the axial direction of the rotary shaft 92 (Y-axis direction). As shown in FIG. 7, groove-shaped dress marks M extending in the Y-axis direction are formed on the upper surface 90 a of the shaping grindstone 90 by the cutting blade 91. Then, cutting of the cutting blade 91 and movement of the cutting blade 91 in the Y-axis direction are repeated as necessary, and the end surface of the cutting blade 910 of the cutting blade 91 is shaped flat.

  When dressing of the cutting blade 91 by the shaping grindstone 90 is performed a plurality of times, the shaping grindstone 90 is also cut and becomes thinner in the -Z direction. If the shaping grindstone 90 becomes too thin, it may be broken and shattered during dressing. In this case, it takes a lot of time to replace the shaping grindstone 90, and adverse effects such as breakage of the cutting blade 91 are caused. Can occur. Therefore, as shown in FIG. 8, the shaping grindstone 90 is replaced while leaving a predetermined thickness so that the shaping grindstone 90 is not crushed. On the other hand, there is a problem that the amount of consumption (replacement frequency) of the shaping grindstone 90 increases because the portion of the shaping grindstone 90 to be discarded increases. Moreover, when the replacement frequency of the shaping grindstone 90 increases, it becomes necessary to provide a shaping grindstone exchanging mechanism for improving the efficiency of the exchanging work in the cutting apparatus, and the processing of the workpiece is interrupted each time the exchange is performed. There is also.

  In addition, since the contact area between the end face of the cutting blade and the shaping grindstone is widened, there is a problem that the cutting blade is excessively dressed and the cutting blade is excessively consumed. Therefore, in a cutting device equipped with a shaping grindstone for shaping the end face of the cutting blade of the cutting blade flatly, the shaping grindstone can be dressed for a longer period of time, and the replacement frequency of the shaping grindstone is reduced. There is a problem of preventing the blade from being excessively dressed.

The present invention for solving the above problems includes a holding means having a holding surface for holding a workpiece, a cutting feed means for cutting and feeding the holding means in the X-axis direction, and a cutting blade having a cutting blade on the outer periphery. A cutting means for cutting the workpiece held by the holding means by being mounted on the rotating shaft, and the cutting means is an axial direction of the rotating shaft and orthogonal to the holding surface direction with respect to the X-axis direction. Index feeding means for feeding an index in the Y-axis direction, cutting feed means for cutting and feeding the cutting means in the X-axis direction and the Z-axis direction perpendicular to the holding surface and perpendicular to the holding surface, and the cutting A cutting device comprising: a shaping means for shaping the end face of the blade of the blade flatly, the holding means comprising a holding table having the holding surface and a support base for supporting the holding table; The shaping means has a width And a fixing means for fixing the shaping grindstone with the width direction of the shaping grindstone matching the X-axis direction and the depth direction matching the Y-axis direction with the shaping grindstone standing. The cutting means is positioned by the cutting feed means at a height position at which the lower end of the cutting blade of the rotated cutting blade cuts into the shaping grindstone, and the cutting means is moved by the index feed means to the Y axis. It is a cutting device which moves in the direction and shapes the end face of the cutting blade flat.
In this cutting apparatus, it is preferable to include a height position measuring means for measuring the height position of the upper surface of the shaping grindstone.

In the cutting apparatus according to the present invention, the shaping means is configured to align the width direction of the shaping stone with the X-axis direction and the depth direction with the Y-axis direction in a state where the shaping stone is narrow and the shaping stone is raised. And a fixing means for fixing the shaping grindstone. Then, the cutting means is positioned by the cutting feed means at a height position where the lower end of the cutting blade of the rotated cutting blade cuts into the shaping grindstone, and the cutting means is moved in the Y-axis direction by the index feeding means. Thus, the end face of the cutting blade can be shaped flat without being dressed. Moreover, since the disposal part of a shaping grindstone can be reduced by using a shaping grindstone for a long period of time, the frequency | count of replacement | exchange of a shaping grindstone can be decreased.
Furthermore, by providing a height position measuring means for measuring the height position of the upper surface of the shaping grindstone, it is possible to recognize the consumption amount of the shaping grindstone, and to grasp the consumption amount of the cutting blade based on this. .

It is a perspective view which shows an example of a cutting device. It is a perspective view which shows an example of the shaping grindstone fixed to the fixing means. It is a typical perspective view showing the state where the cutting blade is cut in the upper surface of the shaping grindstone and then the cutting blade is moved in the Y-axis direction to perform dressing of the cutting blade. It is a typical front view showing the state where dressing of the cutting blade is performed by moving the cutting blade in the Y-axis direction after cutting the cutting blade into the upper surface of the shaping grindstone. It is a typical front view which shows the state which imaged the upper surface of the shaping grindstone by the height position measurement means, and has measured the height position. It is a perspective view which shows the used shaping grindstone fixed to the fixing means. It is a perspective view which shows the state which is dressing the cutting blade of the cutting blade with the conventional shaping grindstone. It is a conventional orthopedic whetstone that is dressed, used, and discarded. It is a typical perspective view showing the state where the cutting blade is cut in the upper surface of the wide shaping grindstone and then the cutting blade is moved in the Y-axis direction to dress the cutting blade.

  A cutting apparatus 1 shown in FIG. 1 is an apparatus that performs cutting by rotating a cutting blade 63 provided in the cutting means 6 on a workpiece held on a holding surface 300a of a holding table 30. .

  On the base 10 of the cutting apparatus 1, a cutting feed unit 11 that reciprocates the holding table 30 in the cutting feed direction (X-axis direction) is disposed. The cutting feed means 11 includes a ball screw 110 having an axis in the X-axis direction, a pair of guide rails 111 arranged in parallel with the ball screw 110, a motor 112 for rotating the ball screw 110, and an internal nut formed by the ball screw 110. And a movable plate 113 whose bottom is in sliding contact with the guide rail 111. Then, when the motor 112 rotates the ball screw 110, the movable plate 113 is guided by the guide rail 111 and moves in the X axis direction, and the holding means 3 disposed on the movable plate 113 is moved to the movable plate 113. The workpiece held by the holding means 3 is cut and fed by moving in the X-axis direction along with the movement.

  The holding means 3 that holds the workpiece includes a holding table 30 and a support base 31 that supports the holding table 30. The holding table 30 has, for example, a circular outer shape, and includes a suction unit 300 that sucks a workpiece and a frame body 301 that supports the suction unit 300. The suction unit 300 communicates with a suction source (not shown), and sucks and holds the workpiece on a holding surface 300a that is an exposed surface of the suction unit 300 and is flush with the upper surface of the frame 301. And the holding surface direction of the holding surface 300a is a horizontal direction. The holding table 30 is supported by a support base 31 disposed on the bottom surface side of the holding table 30. The support base 31 is fixed on the movable plate 113 and can support the holding table 30 and can rotate the holding table 30.

  On the rear side (−X direction side) on the base 10, the portal column 14 is erected so as to straddle the cutting feed means 11. On the front surface of the portal column 14 (the surface on the + X direction side), index feeding means 12 for reciprocating the cutting means 6 in the Y axis direction perpendicular to the holding surface direction (horizontal direction) with respect to the X axis direction is disposed. Has been. The index feeding means 12 includes a ball screw 120 having an axial center in the Y-axis direction, a pair of guide rails 121 arranged in parallel to the ball screw 120, a motor 122 that rotates the ball screw 120, and an internal nut. Is composed of a movable plate 123 that is screwed into the ball screw 120 and whose side portion is in sliding contact with the guide rail 121. When the motor 122 rotates the ball screw 120, the movable plate 123 is guided by the guide rail 121 and moves in the Y-axis direction, and the cutting means 6 disposed on the movable plate 123 moves the movable plate 123. The index is fed in the Y-axis direction with the movement of.

  On the movable plate 123, a cutting feed means 16 for reciprocating the cutting means 6 in the Z-axis direction (vertical direction) perpendicular to the X-axis direction and the Y-axis direction and perpendicular to the holding surface 300a of the holding table 30 is disposed. Has been. The incision feeding means 16 includes a ball screw 160 having an axis in the Z-axis direction, a pair of guide rails 161 arranged in parallel to the ball screw 160, a motor 162 for rotating the ball screw 160, and an internal nut formed by the ball screw 160. And a support member 163 whose side part is in sliding contact with the guide rail 161. When the motor 162 rotates the ball screw 160, the support member 163 is guided by the guide rail 161 and moves in the Z-axis direction, and the cutting means 6 supported by the support member 163 moves the support member 163. Along with this, cutting feed is performed in the Z-axis direction.

  The cutting means 6 includes a rotary shaft 60 whose axial direction is the Y-axis direction and a housing 61 that is fixed to the lower end of the support member 163 and rotatably supports the rotary shaft 60, as shown in a partially enlarged view in FIG. And a motor (not shown) for rotating the rotary shaft 60 and a cutting blade 63 attached to the rotary shaft 60. The cutting blade 63 also rotates at high speed as the motor drives the rotary shaft 60 to rotate. .

  In the present embodiment, the cutting blade 63 is a hub blade in which a cutting blade 630 containing diamond abrasive grains or the like is formed radially outward on the outer peripheral portion of a base metal 631 made of an alloy casting or the like. However, the present invention is not limited to this, and may be a hubless type, that is, a washer-type annular blade having no base metal.

  The cutting apparatus 1 includes a shaping unit 5 that shapes the end surface 630a of the cutting blade 630 of the cutting blade 63 flatly. The shaping unit 5 fixes the narrow plate-shaped shaping grindstone 50 and the shaping grindstone 50. Fixing means 51.

  As shown in FIG. 2, the shaping grindstone 50 is, for example, a grindstone in which CBN (cubic boron nitride) abrasive grains are hardened with a resin bond, and the shape seen from the + X direction side is, for example, a square, and has a narrow width. It is formed in a flat plate shape. In addition, the abrasive grains contained in the shaping grindstone 50 can be appropriately selected depending on the type of the cutting blade 63 shown in FIG. 1, and other than the CBN abrasive grains, for example, GC abrasive grains (green carbon) or alumina abrasive grains can be used. It may be used. For example, the shaping grindstone 50 shown in FIG. 2 has a width W of 2 mm, a depth D of 7.5 cm, and a height H of 7.5 cm. For example, the value of the width W may be about 5 mm, and the external shape of the shaping grindstone may be a rectangle.

  The fixing means 51 is, for example, fixed on the movable plate 113 shown in FIG. 1 and has an outer shape formed in a substantially rectangular parallelepiped shape. As shown in FIG. 2, a screw clamp 510 that can advance and retract in the X-axis direction is integrally formed on the upper portion of the fixing means 51, and the shaping grindstone 50 is inserted into the screw clamp 510 from above. By rotating and tightening the fixing screw 510a, the shaping grindstone 50 can be fixed at a predetermined height position.

  The shaping grindstone 50 is inserted and fixed to the screw clamp 510 of the fixing means 51 in a state where the width W direction of the shaping grindstone 50 is matched with the X-axis direction and the depth D direction is matched with the Y-axis direction. As shown in FIG. 2, the shaping grindstone 50 fixed to the fixing means 51 in a standing state is, for example, a state in which the lower part of the entire shaping grindstone 50 is buried inside the fixing means 51, and the remaining portions are fixed. The surface 51a is exposed in the + Z direction from the upper surface 51a of the means 51, and the upper surface 50a of the shaping grindstone 50 is a horizontal plane orthogonal to the Z-axis direction. In addition, unlike the conventional cutting device, since the shaping grindstone 50 is fixed in an upright state, the shaping device 5 shown in FIG. 1 can save space.

  A height position measuring means 7 for measuring the height position of the upper surface 50a of the shaping grindstone 50 is disposed on the side surface of the housing 61 of the cutting means 6 shown in FIG. The height position measuring means 7 includes, for example, a CCD camera 70 that captures an image of the upper surface 50a of the shaping grindstone 50, and an autofocus mechanism (not shown) for measuring the height position. In the measurement of the height position of the upper surface 50a of the shaping grindstone 50 by the height position measuring means 7, for example, the CCD camera 70 is moved up and down by moving the cutting means 6 up and down in the Z-axis direction. Perform image analysis with. If the focus of the CCD camera 70 is adjusted by the autofocus mechanism and the image looks clear with contrast, the contrast has a peak value. If the image is out of focus, the contrast becomes low. Is the height position at which the focus is achieved, and the height position of the upper surface 50a of the shaping grindstone 50 is measured based on the image acquired by the CCD camera 70 with reference to the height position. The height position measuring means 7 is not limited to the configuration in the present embodiment, and may be configured from a measuring instrument such as a laser displacement meter, a back pressure sensor, or a micro gauge. Further, the height position measuring means 7 also functions as an alignment means for imaging and detecting a position to be cut of the workpiece. That is, the height measuring means 7 captures the surface to be cut of the workpiece with the CCD camera 70, and detects the position on the workpiece to be cut by image processing such as pattern matching based on the acquired image. Can do.

  The operation of the cutting device 1 when the end surface 630a of the cutting blade 630 of the cutting blade 63 is shaped flat in the cutting device 1 will be described below with reference to FIGS. In addition, in FIGS. 3-5, a part of each structure of the cutting device 1 is shown typically.

  First, the movable plate 113 is sent in the −X direction by the cutting feed means 11 shown in FIG. 1, and the shaping grindstone 50 is positioned below the cutting means 6. That is, for example, the position in the X-axis direction of the axial center line extending in the Y-axis direction of the rotating shaft 60 and the position in the X-axis direction of the center line extending in the Y-axis direction on the upper surface 50a of the shaping grindstone 50 are matched. The shaping grindstone 50 is positioned. Next, the upper surface 50 a of the shaping grindstone 50 is imaged by the CCD camera 70 of the height position measuring means 7, and the position of the shaping grindstone 50 in which the cutting blade 63 is cut in the Y-axis direction, for example, the upper surface 50 a of the shaping grindstone 50. An end on the -Y direction side is detected. The index feeding means 12 drives the cutting means 6 in the Y-axis direction, and the cutting blade 63 is positioned above the −Y-direction end of the upper surface 50a of the shaped grindstone 50.

  When the rotating shaft 60 rotates at a high speed, the cutting blade 63 attached to the rotating shaft 60 rotates at a high speed, and the cutting means 6 is driven in the Z-axis direction by the cutting feed means 16, and the Z-axis direction with the shaping grindstone 50. Alignment is performed. That is, as shown in FIG. 3, the cutting means 6 descends to a height position at which the lower end of the cutting blade 630 of the cutting blade 63 cuts the shaping grindstone 50 from the upper surface 50 a by several μm by the cutting feed means 16. If the cutting blade 63 is cut too deeply into the shaping grindstone 50, an excessive load may be applied to the cutting blade 63 when the cutting blade 63 is moved in the Y-axis direction. It is preferable that the lower end of the cutting blade 630 cuts into the shaping grindstone 50 by about 1 to 10 μm, that is, the lower end of the cutting blade 630 of the cutting blade 63 covers the upper surface 50 a of the shaping grindstone 50.

  Thereafter, the index feeding means 12 moves the cutting blade 63 in the + Y direction side from the −Y direction side end of the upper surface 50 a of the shaping grindstone 50 to the + Y direction side end. In addition to being fixed by the fixing means 51 with the width direction of the shaping stone 50 matched with the X-axis direction and the depth direction matched with the Y-axis direction in a state where the narrow flat shaped shaping stone 50 is erected, Since the cutting blade 63 is gradually dressed and consumed as it moves from the end on the −Y direction side to the end on the + Y direction side, as shown in FIG. No dress mark is formed, and the upper surface 50b of the dressing grindstone 50 after dressing approximates an inclined surface indicated by a virtual line L1 slightly inclined upward from the −Y direction end to the + Y direction end. It becomes.

  For example, when the cutting blade 63 moves to the end of the shaping grindstone 50 on the + Y direction side, index feeding is once stopped, the cutting means 6 is moved in the + Z direction, and the cutting blade 63 is separated from the shaping grindstone 50. Further, the cutting means 6 is moved to the −Y direction side to return to the original position. Next, as shown in FIG. 5, the index feeding means 12 positions the CCD camera 70 of the height position measuring means 7 above the end on the −Y direction side of the shaping grindstone 50 once dressed. 70, the end on the −Y direction side of the upper surface 50b of the shaping grindstone 50 is imaged, and the height position Z1 of the end on the −Y direction side of the upper surface 50b of the shaping grindstone 50 is measured based on the image acquired by the CCD camera 70. . The index feed means 12 moves the height position measuring means 7 to the + Y direction side from the −Y direction end of the upper surface 50 b of the shaping grindstone 50 to the + Y direction side, and the CCD camera 70 of the height position measuring means 7. Is positioned above the + Y-direction end of the shaping grindstone 50 once dressed, and the CCD camera 70 images the + Y-direction end of the upper surface 50b of the shaping grindstone 50. Then, based on the image acquired by the CCD camera 70, the height position Z2 of the end on the + Y direction side of the upper surface 50b of the shaping grindstone 50 is measured. While the height position measuring means 7 is moved in the + Y direction side from the −Y direction end of the upper surface 50 b of the shaping grindstone 50 to the + Y direction end, the CCD camera 70 continuously moves the upper surface 50 b of the shaping grindstone 50. You may scan it.

  The wear position B of the shaping grindstone 50 is calculated by subtracting the height position Z1 from the height position Z2. Since the wear amount B of the shaping grindstone 50 is the wear amount of the cutting blade 63 shown in FIG. 4, the cutting blade 63 is placed on the shaping grindstone 50 from the −Y direction side end to the + Y direction side end in the + Y direction side. The amount of wear of the cutting blade 63 when dressed by moving once can be grasped. Further, the blade diameter of the cutting blade 63 after dressing can be grasped from the blade diameter of the cutting blade 63 before dressing and the consumption amount B of the cutting blade 63 which are recognized in advance.

  Again, the cutting means 6 is moved until the lower end of the cutting blade 630 of the rotating cutting blade 63 shown in FIG. 4 is at a height where the shaping grindstone 50 is cut from the upper surface 50b by several μm, that is, until the cutting blade 630 covers the upper surface 50b. The cutting blade 63 is moved to the + Y direction side from the −Y direction side end of the upper surface 50 b of the shaping grindstone 50 to the + Y direction side end. When the cutting blade 63 moves to the + Y direction end of the shaping grindstone 50, the cutting blade 63 is further lowered by about several μm from the + Y direction end of the upper surface 50 b of the shaping grindstone 50 to the −Y direction end − The cutting blade 63 is dressed by the shaping grindstone 50 by moving to the Y direction side. The end surface 630a of the cutting blade 630 of the cutting blade 63 is gradually dressed and flattened from the most protruding portion.

  For example, when the lowering of the cutting blade 63 and the movement of the cutting blade 63 in the Y-axis direction are repeated as necessary and the end surface 630a of the cutting blade 630 of the cutting blade 63 is shaped flat, the cutting means 6 is moved in the + Z direction. To finish the dressing of the cutting blade 63.

  As shown in FIG. 6, the dressing of the cutting blade 63 is repeated until the height position of the upper surface 50 a of the shaping grindstone 50 is slightly above the height position of the upper surface 51 a of the fixing means 51. When 50 is cut, the operator opens the screw clamp 510, removes the used shaping whetstone 50 from the fixing means 51, discards the removed shaping whetstone 50, and fixes a new shaping whetstone 50. Secure to means 51.

  In the cutting apparatus 1 according to the present invention, the shaping means 5 includes a flat plate-shaped shaping stone 50 having a narrow width, and the width W direction of the shaping stone 50 is made to coincide with the X-axis direction in a state where the shaping stone 50 is raised. And fixing means 51 for fixing the shaping grindstone 50 so as to coincide with the Y-axis direction. Then, the cutting means 6 is positioned by the cutting feed means 16 at a height position where the lower end of the cutting blade 630 of the rotated cutting blade 63 is cut into the shaping grindstone 50, and the cutting means 6 is moved in the Y-axis direction by the index feed means 12. Thus, the end face 630a of the cutting blade 630 can be shaped flat while preventing the cutting blade 63 from being excessively dressed. Further, by dressing the cutting blade 630 using the upper surface of the shaping grindstone 50 in an upright state, the cutting blade 630 can be dressed many times using the same part in the width direction and the longitudinal direction. Therefore, the shaping grindstone 50 can be used for a long time. Moreover, since the discarding part of the shaping grindstone 50 can be reduced by making the shaping grindstone 50 narrow, the number of replacements of the shaping grindstone 50 can be reduced.

  That is, for example, as shown in FIG. 9, with respect to the wide shaping grindstone 53 having a width D3, the lower end of the cutting blade of the rotating cutting blade 63 cuts to a height position where a predetermined amount of the shaping grindstone 53 is cut from the upper surface 53a. When the blade 63 is lowered and the cutting blade 63 is moved to the + Y direction side from the −Y direction side end of the upper surface 53a of the shaping grindstone 53 to the + Y direction side, dressing of the cutting blade 63 is performed. Since the contact surface between the cutting blade 630 and the shaping grindstone 53 becomes too wide, the cutting blade 630 of the cutting blade 63 is excessively dressed and the cutting blade 630 is excessively consumed. Further, since the groove-shaped dress mark M1 is formed on the upper surface 53a of the shaping grindstone 53, the cutting blade 63 is moved from the −Y direction end to the + Y direction end of the upper surface 53a of the shaping grindstone 53. After moving to the + Y direction side and performing dressing, when the cutting blade 63 is moved from the + Y direction end of the upper surface 53a of the shaping grindstone 53 to the −Y direction end to the −Y direction side, dressing of the cutting blade 63 is performed. It is difficult to carry out while grasping the amount of wear of the cutting blade 63. Therefore, dressing of the cutting blade 63 is performed only when the cutting blade 63 is index-fed to the + Y direction side, but the waste portion of the used shaping grindstone 53 has a large volume on the + Y direction side. Therefore, the disposal part of the shaping grindstone 53 becomes large. In contrast, since the discarded portion of the used shaping grindstone 50 shown in FIG. 6 is small, the number of replacements of the shaping grindstone 50 can be reduced. Further, as shown in FIG. 8, the discarded portion of the shaped grinding stone 50 that has been used is disposed of the flat shaped grinding stone 90 that has been used and used for dressing in the state of being laid down as in the prior art. It is smaller than the part. Further, the used shaping whetstone 50 is less likely to be broken and shattered during dressing than the flat shaped shaping whetstone 90 which is thinned by repeated dressing.

  The cutting device 1 according to the present invention is not limited to the above embodiment, and the size and shape of each component of the cutting device 1 illustrated in the accompanying drawings are not limited thereto. Modifications can be made as appropriate within a range in which the effects of the present invention can be exhibited.

1: Cutting device 10: Base 14: Portal column 11: Cutting feed means 110: Ball screw 111: A pair of guide rails
112: Motor 113: Movable plate 12: Index feeding means 120: Ball screw 121: A pair of guide rails
122: Motor 123: Movable plate 16: Cutting feed means 161: A pair of guide rails 162: Motor
163: Support member 3: Holding means 30: Holding table 300: Suction part 300a: Holding surface 301: Frame
31: Support base
5: Shaping means 50: Shaping stone 50a: Upper surface of the shaping wheel W: Width of the shaping wheel
D: Depth of the shaping wheel H: Height of the shaping wheel
51: Fixing means 510: Screw clamp 6: Cutting means 60: Rotating shaft 61: Housing 63: Cutting blade 630: Cutting blade 630a: End face of cutting blade 631: Base metal
7: Height position measuring means 70: CCD camera 53: Wide shaping whetstone

Claims (2)

A holding means having a holding surface for holding a workpiece, a cutting feed means for cutting and feeding the holding means in the X-axis direction, and a holding blade having a cutting blade having a cutting edge on the outer periphery thereof mounted on a rotating shaft and rotated. Cutting means for cutting the workpiece held by the head, and index feeding means for feeding the cutting means in the Y-axis direction that is the axial direction of the rotary shaft and is perpendicular to the X-axis direction. And a cutting feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction and perpendicular to the holding surface, and the end face of the cutting blade of the cutting blade is shaped flat A cutting device comprising:
The holding means includes a holding table having the holding surface, and a support base that supports the holding table,
The shaping means includes a flat plate-shaped shaping stone having a narrow width, and with the shaping stone standing upright, the shaping wheel is aligned in the width direction with the X-axis direction and the depth direction is matched with the Y-axis direction. A fixing means for fixing the grindstone,
The cutting means is positioned by the cutting feed means at a height position at which the lower end of the cutting blade of the rotated cutting blade cuts into the shaping grindstone, and the cutting means is moved in the Y-axis direction by the index feeding means. A cutting device for shaping the end face of the cutting blade flat.   The cutting apparatus according to claim 1, further comprising a height position measuring unit that measures a height position of an upper surface of the shaping grindstone.

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