JP6424081B2 - Grinding method - Google Patents

Description

  The present invention relates to a grinding method for performing grinding on a plate-shaped workpiece using a grinding wheel and dressing the grinding wheel.

  When grinding hard plate-like workpieces such as sapphire or SiC in a grinding machine that grinds plate-like workpieces, the grinding wheel used for grinding tends to clog, so for example, the dresser board is placed near the chuck table The grinding surface of the grinding wheel is dressed (sharpened) during grinding of the plate workpiece or when the plate workpiece is carried into and out of the chuck table (for example, Patent Document 1 and Patent below) Reference 2). By dressing the grinding surface of the grinding wheel in this way, new abrasive grains are exposed on the grinding surface, enabling continuous grinding on a hard plate-like workpiece.

JP 2012-135851 A JP 2011-189456 A

  However, when the dresser board as described above is arranged in a grinding apparatus and the dressing of the grinding wheel is performed, the remaining thickness of the dresser board is controlled, or the parallelism between the upper surface of the dresser board and the grinding surface of the grinding wheel is adjusted. There is a need to perform management, which places a burden on the operator, and there is a problem that the grinding wheel cannot be dressed accurately.

  The present invention has been made in view of the above circumstances, and an object thereof is to perform an accurate dressing on a grinding wheel so that a hard plate-like workpiece can be continuously processed.

The present invention includes a chuck table for sucking and holding a plate-like work, a rough grinding means for roughly ground by contacting a ground surface of the rough grinding on the plate-shaped workpiece to be sucked and held on the chuck table, suction held on the chuck table A finish grinding means for bringing the ground surface of the finish grinding wheel into contact with the ground surface of the finished workpiece and finish grinding, and a plurality of the chuck tables are arranged at an equal angle, and the chuck table is disposed on the rough grinding means and the finish grinding means. The chuck table includes a porous suction plate having a suction surface for sucking and holding a plate-like workpiece, and a communication for connecting a suction source to the suction plate. has a passage to expose the suction surface is composed of a frame body surrounding the suction plate, of the chuck table positioned in the grinding position of crude grinding means To the upper surface of the plate-shaped workpiece to be sucked and held on the suction surface contacting the ground surface of the rough grinding plate workpiece as well as the rough grinding, the adsorption of the chuck table positioned in the grinding position of said finish grinding means A grinding step of finishing grinding the plate-shaped workpiece by bringing the grinding surface of the finish grinding wheel into contact with the upper surface of the plate-shaped workpiece sucked and held by the surface ;
Crude and to the suction surface of the chuck table positioned in the grinding position of the grinding means is brought into contact with the grinding surface of the rough grinding with dressing the grinding surface of the coarse grinding means to grind the suction surface Coarse grinding in which the ground surface of the finish grinding wheel is brought into contact with the upper surface of the plate-like workpiece sucked and held by the suction surface of the chuck table positioned at the grinding position of the finish grinding means to finish-grind the plate-like workpiece A rough dressing step is performed by bringing the ground surface of the rough grinding wheel into contact with the upper surface of the plate-like workpiece sucked and held by the suction surface of the chuck table positioned at the grinding position of the rough grinding means. And grinding the suction surface by bringing the grinding surface of the finish grinding wheel into contact with the suction surface of the chuck table that is ground with the rough grinding wheel and positioned at the grinding position of the finish grinding means. Finishing And a finish grinding surface dress step to dress the grinding surface of the lower grinding means, after execution count the the grinding process a predetermined, the implemented and the rough grinding surface dress step and said finish grinding surface dress step Continue the grinding process.

Since the grinding method according to the present invention is configured so that dressing can be performed by directly grinding the suction surface of the chuck table with a grinding wheel in the dressing process, it is not necessary to separately arrange a dresser board in the grinding device, and the dresser board can be managed. It becomes unnecessary.
Therefore, it is possible to perform accurate dressing on the grinding surface of the grinding wheel without using a dresser board, and it is possible to continuously grind a hard plate-like workpiece with the grinding wheel on which the dress is applied. .

It is a perspective view which shows the structure of an example of the grinding device used with the 1st example of the grinding method. It is side surface sectional drawing which shows a grinding process among the 1st examples of the grinding method. It is side surface sectional drawing which shows a dressing process among the 1st examples of the grinding method. It is a perspective view which shows the structure of an example of the grinding apparatus used with the 2nd example of the grinding method. It is a schematic diagram explaining the state of dressing a grinding wheel every time two plate workpieces are ground in the second example of the grinding method. It is a schematic diagram explaining the state which dresses a grindstone whenever it grinds one sheet-like workpiece | work in the 3rd example of the grinding method.

1 First Example of Grinding Method A grinding apparatus 10 shown in FIG. 1 is an example of a grinding apparatus that performs grinding on a plate-like workpiece W that is an example of a workpiece. The grinding device 10 includes a device base 11 extending in the Y-axis direction and a column 12 erected on the rear side of the device base 11 in the Y-axis direction. The upper surface 11a of the apparatus base 11 is provided with a chuck table 13 that can move and rotate in the Y-axis direction.

  On the side of the column 12, a grinding means 30 for grinding the plate-like workpiece is supported by the grinding feed means 40 so as to be movable up and down. The grinding means 30 includes a spindle 31 having an axis in the Z-axis direction, a holder 32 that holds a housing that rotatably supports the spindle 31, a motor 33 that is connected to the upper end of the spindle 31, and a lower end of the spindle 31. A grinding wheel 35 mounted via a mount 34 and a grinding wheel 36 fixed in an annular shape to the lower part of the grinding wheel 35 are provided. The lower surface of the grinding wheel 36 is a grinding surface that contacts the upper surface of the plate-like workpiece W. When the motor 33 rotates the spindle 31 at a predetermined rotational speed, the grinding wheel 35 can be rotated at the predetermined rotational speed.

  The grinding feed means 40 includes a ball screw 41 extending in the Z-axis direction, a motor 42 connected to one end of the ball screw 41, a pair of guide rails 43 extending in parallel to the ball screw 41, and a nut provided therein is a ball screw. And an elevating plate 44 that is screwed to 41 and whose side part is in sliding contact with the guide rail 43. When the ball screw 41 is rotated by the motor 42, the grinding means 30 can be moved up and down along with the lifting plate 44 along the pair of guide rails 43. As shown in FIG. 2, a scale 24 for detecting the vertical position of the grinding wheel 35 is disposed in the column 12 in parallel with the ball screw 41.

  As shown in FIG. 2, the chuck table 13 has a porous suction plate 14 whose upper surface is constituted by a suction surface 14 a that sucks and holds the plate-like workpiece W, and a communication path 16 that communicates a suction source 17 with the suction plate 14. And a frame 15 that exposes the suction surface 14a upward and surrounds the periphery of the suction plate 14. The suction plate 14 is formed of, for example, a # 800 porous member and can be used as a suction holding member for sucking and holding the plate-like workpiece W, and can also be used as a dresser board for dressing (sharpening) the grinding wheel 36. Can do.

  Below the chuck table 13, an inclination adjusting unit 19 that adjusts the facing state between the suction surface 14 a of the suction plate 14 and the grinding surface 360 of the grinding wheel 36 is disposed. By adjusting the inclination adjusting unit 20, The suction surface 14a can be tilted by a predetermined angle. In order to make the thickness of the plate-shaped workpiece to be ground uniform, the suction surface 14 a and the grinding surface 360 of the grinding wheel 36 are made parallel by the inclination adjusting unit 19.

  On the upper surface 11 a of the apparatus base 11, the thickness of the plate-like workpiece W is measured by measuring the height of the upper surface of the chuck table 13 and measuring the height of the upper surface of the plate-like workpiece W sucked and held by the chuck table 13. A recognizing contact type height gauge 20 is provided. The height gauge 20 includes a table upper surface measurement unit 21 that measures the upper surface height of the chuck table 13 and a workpiece upper surface measurement unit 22 that measures the upper surface height of the plate-like workpiece W that is sucked and held by the chuck table 13. Yes.

  A workpiece presence / absence determining unit 23 that determines whether or not the plate-like workpiece W is held on the chuck table 13 is connected to the table upper surface measuring unit 21 and the workpiece upper surface measuring unit 22. The workpiece presence / absence determination unit 23 recognizes the difference between the measurement value of the table upper surface measurement unit 21 and the measurement value of the workpiece upper surface measurement unit 22 as the thickness of the plate workpiece, thereby forming a plate shape on the suction surface 14a of the chuck table 13. It is possible to determine whether or not the workpiece is held. The work presence / absence determination unit may be configured to connect a pressure gauge to the communication path 16 and determine whether or not the work is held based on the measurement value of the pressure gauge.

  Next, a grinding method for grinding the plate-like workpiece W and dressing the grinding surface 360 of the grinding wheel 36 using the grinding apparatus 10 will be described. The plate-like workpiece W is formed of a hard material such as silicon carbide or sapphire, for example.

(1) Carry-in process As shown in FIG. 1, the plate-like workpiece W is carried into the chuck table 13. Thereafter, the suction source 17 shown in FIG. 2 is actuated to cause a suction force to act on the suction surface 14a through the suction path 16, and suck and hold the plate-like workpiece W on the suction surface 14a.

(2) Grinding Step Next, as shown in FIG. 2, the plate-like workpiece W is ground by the grinding means 30. First, the chuck table 13 shown in FIG. 1 moves in the Y-axis direction, and the plate-like workpiece W is moved below the grinding means 30.

  Here, the height gauge 20 measures the height of the suction surface 14a of the chuck table 13 and the height of the upper surface of the plate-like workpiece W, which are reference surfaces for recognizing the thickness of the plate-like workpiece W. Specifically, the table upper surface measurement unit 21 contacts the upper surface of the frame body 15 and measures the height of the suction surface 14 a of the suction plate 14. Since the upper surface of the frame 15 and the suction surface 14 a of the suction plate 14 are formed flush with each other, the height of the upper surface of the frame 15 is the same as the height of the suction surface 14 a of the suction plate 14.

  On the other hand, the workpiece upper surface measuring unit 22 comes into contact with the upper surface of the plate-like workpiece W sucked and held by the suction surface 14a and measures the height of the upper surface of the plate-like workpiece W. Subsequently, when the workpiece presence / absence determination unit 23 recognizes that there is a difference between the measurement value measured by the table upper surface measurement unit 21 and the measurement value measured by the workpiece upper surface measurement unit 22, a plate-like workpiece is formed on the suction surface 14 a of the chuck table 13. It is determined that W is held.

  When the workpiece presence / absence determination unit 23 determines that the plate-like workpiece W is held on the suction surface 14a, the chuck table 13 is rotated at a predetermined rotation speed by a rotation unit (not shown), and the grinding unit 30 is rotated at a predetermined rotation speed. While rotating the grinding wheel 35, the grinding means 30 is lowered by the grinding feed means 40 to a position where the grinding wheel 36 contacts the upper surface of the plate-like workpiece W sucked and held by the chuck table 13.

Then, grinding is performed while the grinding surface 360 of the rotating grinding wheel 36 is brought into contact with the upper surface of the plate-like workpiece W and pressed. During grinding, the grinding feed means 40 feeds the grinding means 3 to a predetermined depth position while the scale 24 detects the vertical position of the grinding means 30. When the plate-like workpiece W is thinned to a desired thickness, the grinding means 30 is raised by the grinding feed means 40, and the grinding process is completed. The workpiece presence / absence determination unit 23 calculates the difference between the measurement value measured by the table upper surface measurement unit 21 and the measurement value measured by the workpiece upper surface measurement unit 22 even during grinding.
It is possible to determine whether or not the plate-like workpiece W has been thinned to a desired thickness.

(3) Dressing process After carrying out the grinding process, the plate-like workpiece W is unloaded from the chuck table 13. As shown in FIG. 3, in the height gauge 20, the height measurement is performed by the table upper surface measurement unit 21 and the workpiece upper surface measurement unit 22, and the workpiece presence / absence determination unit 23 measures the measurement value of the table upper surface measurement unit 21 and the workpiece upper surface measurement. When it is recognized that there is no difference between the measured values of the part 22, it is determined that the plate-like workpiece W is not held on the suction surface 14 a of the chuck table 13.

  When the grinding ability of the grinding wheel 36 is reduced due to the grinding of the plate-like workpiece W, the grinding means 30 rotates the grinding wheel 35 and the grinding feed means 40 performs suction based on the measurement value measured by the height gauge 20. The grinding means 30 is moved closer to the position where the grinding surface 360 of the grinding wheel 36 contacts the suction surface 14a of the plate 14. The rotating grinding wheel 36 is brought into contact with the suction surface 14a of the suction plate 14 for grinding, and the grinding surface of the grinding wheel 36 is dressed so that new abrasive grains are exposed on the grinding surface 360 of the grinding wheel 36. .

  Thus, when new abrasive grains appear on the grinding surface 360 of the grinding wheel 36 and the grinding ability is restored, a new plate-like workpiece can be carried into the chuck table 13 and the above-described grinding process can be carried out continuously. By performing the dressing process after performing the grinding process a predetermined number of times, the grinding process can be performed continuously.

Thus, in the first example of the grinding method, the chuck table 13 including the suction plate 14 having a porous structure having the suction surface 14a for sucking and holding the plate-like workpiece W and the frame body 15 surrounding the suction plate 14; Since the grinding device 10 including the grinding means 30 for grinding the plate-like workpiece W is used, the suction surface 14a of the suction plate 14 is directly ground with the grinding wheel 36 so that the grinding surface of the grinding wheel 36 can be dressed. In addition, it is not necessary to separately arrange a dresser board in the grinding apparatus 10, and management of the dresser board or the like is not required, and the hard plate-like workpiece W can be continuously ground with the grinding wheel 36.
Further, since the grinding surface 360 of the grinding wheel 36 and the suction surface 14a of the suction plate 14 are adjusted in advance, the grinding surface 360 and the suction surface 14a are in contact with each other even when dressing. Therefore, it is not necessary to manage the parallelism between the two for the dress.

2 Second Example of Grinding Method A grinding device 50 shown in FIG. 4 is an example of a grinding device that performs rough grinding and finish grinding on the plate-like workpiece W. The grinding device 50 has a device base 51 extending in the Y-axis direction, and a rotatable turntable 52 is disposed at the center of the upper surface of the device base 51. On the turntable 52, chuck tables 60A, 60B, and 60C capable of sucking and holding the plate-like workpiece W and being rotatable are arranged at equal intervals. The chuck tables 60A, 60B and 60C can be revolved as the turntable 52 rotates.

  The chuck tables 60A, 60B and 60C have the same configuration as the chuck table 13 shown in FIG. That is, as shown in FIG. 4, each chuck table includes a porous suction plate 61 having a suction surface 61 a for sucking and holding a plate-like workpiece, and a frame body 62 surrounding the suction plate 61. ing.

  A front portion of the apparatus base 51 in the Y-axis direction is provided with a cassette 53a for storing the plate-shaped workpiece W before grinding and a cassette 53b for storing the plate-shaped workpiece after grinding. Further, a conveying means 54 is provided at a position facing the cassette 53a and the cassette 53b to carry out the plate-like workpiece W from the cassette 53a and carry the plate-like workpiece W into the cassette 53b. In the movable range of the conveying means 54, a temporary placing means 55 for temporarily placing the plate-like workpiece W and a cleaning means 58 for removing grinding dust adhering to the ground plate-like workpiece W are disposed.

  In the vicinity of the temporary placing means 55, a first carrying means 56a for carrying the pre-grinding plate workpiece W temporarily placed on the temporary placing means 55 to any one of the chuck tables 60A, 60B and 60C is disposed. Yes. Further, in the vicinity of the cleaning unit 58, a second transport unit 56 b that transports the ground plate workpiece W held on any of the chuck tables to the cleaning unit 58 is disposed.

  Height gauges 63a and 63b are arranged around the turntable 52. The height gauges 63a and 63b are respectively provided by a table upper surface measuring unit 64 for measuring the upper surface height of each chuck table and a workpiece upper surface measuring unit 65 for measuring the upper surface height of the plate-like workpiece W sucked and held by each chuck table. It is configured. Connected to the table upper surface measurement unit 64 and the workpiece upper surface measurement unit 65 is a workpiece presence / absence determination unit 66 that determines whether or not the plate-like workpiece W is held on the suction surface 61a of each chuck table.

  A column 57a extending in the Z-axis direction is erected on the rear portion of the apparatus base 52 in the Y-axis direction, and a rough grinding means 70a is disposed in front of the column 57a via a grinding feed means 80a. A column 57b extending in the Z-axis direction is erected on the apparatus base 52 in parallel with the column 57a, and a finish grinding means 70b is disposed in front of the column 57b via a grinding feed means 80b.

  The rough grinding means 70a includes a spindle 71 having an axis in the Z-axis direction, a holder 72 that holds a housing that rotatably supports the spindle 71, a motor 73 connected to one end of the spindle 71, and a lower end of the spindle 71. The grinding wheel 75 is detachably mounted on the mount 74, and the grinding wheel 76a for rough grinding is fixed to the lower part of the grinding wheel 75 in an annular shape. The spindle 71 is rotated by driving the motor 73, and the grinding wheel 75 can be rotated at a predetermined rotational speed. The finish grinding means 70b has the same configuration as the rough grinding means 70a except that the grinding wheel is a grinding wheel 76b for finish grinding. The description is omitted.

  The grinding feed means 80a includes a ball screw 81 extending in the Z-axis direction, a motor 82 connected to one end of the ball screw 81, a guide rail 83 extending in parallel with the ball screw 81, and one surface connected to the holder 72. The lift plate 84 is provided. A pair of guide rails 83 are in sliding contact with the other surface of the elevating plate 84, and a ball screw 81 is screwed into a nut formed at the center. By rotating the ball screw 81 by the motor 82, the holder 72 can be moved up and down together with the lift plate 84, and the grinding wheel 75 can be moved up and down at a predetermined grinding feed rate. Since the grinding feed means 80b has the same configuration as that of the grinding feed means 80a, the same reference numerals are given to the parts that are similarly configured, and the description thereof is omitted.

  Next, a grinding method for dressing the grinding wheels 76a and 76b each time two plate workpieces W are ground using the grinding apparatus 50 will be described with reference to FIGS. As the grinding wheel 76a for rough grinding, a type having a large particle size (for example, # 300) is used. Further, as the grinding wheel 76b for finish grinding, a type having a small particle size (for example, # 2000) is used.

(1) Carry-in process First, one sheet-like workpiece W before grinding is taken out from the cassette 53 a by the conveying means 54 and temporarily placed in the temporary placing means 55. After the positioning of the plate-like workpiece W in the temporary placement means 55, the first transfer means 56a carries the plate-like workpiece W into the chuck table 60A that stands by at the loading / unloading position, as shown in FIG. 5 (a). To do. The loading / unloading position means a position at which the first conveying means 56a and the second conveying means 56b shown in FIG. 4 can carry the plate-shaped workpiece W into and out of the chuck tables 60A to 60C. To do.

(2) Rough Grinding Step Next, as shown in FIG. 5B, the turntable 52 rotates to move the chuck table 60A below the rough grinding means 70a. Here, the height gauge 63 a shown in FIG. 4 measures the height of the suction surface 61 a of the chuck table 60 </ b> A by the table upper surface measurement unit 64 and measures the upper surface height of the plate-like workpiece W by the workpiece upper surface measurement unit 65. Subsequently, if there is a difference between the measurement value measured by the table upper surface measurement unit 64 and the measurement value measured by the workpiece upper surface measurement unit 65, the workpiece presence / absence determination unit 66 causes the plate-like workpiece W to be placed on the suction surface 61a of the chuck table 60A. Judged to be retained. Thereafter, the coarse grinding means 70a rotates the grinding wheel 75, and the grinding feed means 80a positions the coarse grinding means 70a at a position where the grinding wheel 76a contacts the upper surface of the plate-like workpiece W. Then, the plate-like workpiece W sucked and held on the chuck table 60A is roughly ground by the rotating grinding wheel 76a.

  Further, while the plate-like workpiece W held on the chuck table 60A is roughly ground, the plate-like workpiece W before grinding is carried into the chuck table 60B positioned at the carry-in / out position shown in FIG. 5B. Keep it. Then, when the rough grinding of the plate-like workpiece W held on the chuck table 60A is completed, as shown in FIG. 5C, the turntable 52 rotates to move the chuck table 60B below the rough grinding means 70a. Thereafter, when the workpiece presence / absence determination unit 66 determines that the plate-like workpiece W is held on the suction surface 61a of the chuck table 60B in the same manner as described above, the plate-like shape held by the chuck table 60B by the rough grinding means 70a. The workpiece W is roughly ground.

(3) Finishing grinding process When the plate-like workpiece W sucked and held on the chuck table 60B moves below the rough grinding means 70a, the plate-like workpiece W sucked and held on the chuck table 60A moves below the finish grinding means 70b. Moving. Then, the height gauge 63b shown in FIG. 4 measures the height of the suction surface 61a of the chuck table 60A and the height of the upper surface of the plate-like workpiece W, and if there is a difference between the two measured values, the workpiece presence / absence determining unit 66 It is determined that the plate-like workpiece W is held on the suction surface 61a of the table 60A. Thereafter, the finish grinding means 70b performs finish grinding by bringing the rotating grinding wheel 76b into contact with the upper surface of the plate-like workpiece W held by the chuck table 60A.

  After finishing the finish grinding of the plate-like workpiece W sucked and held by the chuck table 60A, as shown in FIG. 5 (d), the turntable 52 further rotates to bring the chuck table 60B below the finish grinding means 70b. Move. When the workpiece presence / absence determination unit 66 determines that the plate-like workpiece W is held on the suction surface 61a of the chuck table 60B, the plate-like workpiece W sucked and held on the chuck table 60B is finish-ground by the finish grinding means 70b.

  As described above, when the chuck table 60B is moved below the finish grinding means 70b by the rotation of the turntable 52, the chuck table 60A is moved to the carry-in / out position as shown in FIG. And the conveyance means 54 carries out the plate-shaped workpiece | work W after finish grinding from the chuck table 60A, and accommodates it in the cassette 53b. On the other hand, the plate-like workpiece W before grinding, carried out from the cassette 53a by the carrying means 54, is carried into the chuck table 60A.

(4) Dressing Step After performing rough grinding and finish grinding on the two plate-like workpieces W, dressing is sequentially performed on the grinding surfaces of the grinding wheels 76a and 76b shown in FIG. First, as shown in FIG. 5D, when the chuck table 60C that holds nothing moves below the rough grinding means 70a due to the rotation of the turntable 52, the height gauge 63a measures the table upper surface measurement unit 64 and the workpiece upper surface measurement. The height of the suction surface 61a of the chuck table 60C is measured by the unit 65. When the workpiece presence / absence determination unit 66 recognizes that there is no difference between the measurement value measured by the table upper surface measurement unit 64 and the measurement value measured by the workpiece upper surface measurement unit 65, the plate-like workpiece W is placed on the suction surface 61a of the chuck table 60C. Judge that it is not held.

  Thereafter, the grinding feed means 80a shown in FIG. 4 positions the rough grinding means 70a at a position where the grinding wheel 76a contacts the suction surface 61a of the chuck table 60C based on the measurement value measured by the height gauge 63a. Subsequently, the suction surface 61a is ground with a grinding wheel 76a that rotates together with the grinding wheel 75, and the grinding surface of the grinding wheel 76a is dressed.

  After dressing the grinding surface of the grinding wheel 76a in this way, as shown in FIG. 5E, the turntable 52 is further rotated to move the chuck table 60C below the finish grinding means 70b. When the workpiece presence / absence determination unit 66 determines that the plate-like workpiece W is not held on the suction surface 61a of the chuck table 60C, the suction surface 61a of the chuck table 60C is ground with the grinding wheel 76b of the finish grinding means 70b to grind the grinding wheel. Dress the ground surface of 76b. In this manner, new abrasive grains are exposed on the grinding surfaces of the grinding wheels 76a and 76b.

3 Third Example of Grinding Method Next, a grinding method for dressing the grinding wheels 76a and 76b each time one sheet of workpiece W is ground using the grinding device 50 will be described with reference to FIGS. To do. In addition, the same part as the operation | movement in each process of the 2nd example of the grinding method mentioned above is abbreviate | omitted and demonstrated.

(1) Coarse grinding step As shown in FIG. 6A, the turntable 52 rotates, the chuck table 60A on which the plate-like workpiece W is sucked and held is moved below the coarse grinding means 70a, and the coarse grinding means 70a. Thus, rough grinding is performed on the plate-like workpiece W.

(2) First Dressing Step Thereafter, as shown in FIG. 6B, the turntable 52 further rotates, the chuck table 60B holding nothing is moved below the rough grinding means 70a, and rough grinding is performed. The suction surface 61a of the chuck table 60B is ground by means 70a to dress the grinding surface of the grinding wheel 76a shown in FIG. The plate-like workpiece W before grinding is carried into the chuck table 60C moved to the carry-in / out position.

(3) Finishing grinding step At the same time as the chuck table 60B moves below the rough grinding means 70a in the first dressing step, the roughly ground plate-like workpiece W is sucked and held as shown in FIG. 6 (b). The chuck table 60A thus moved moves below the finish grinding means 70b. Then, finish grinding is performed on the plate-like workpiece W held on the chuck table 60A by the finish grinding means 70b.

(4) Second Dressing Step Thereafter, as shown in FIG. 6C, the turntable 52 further rotates, the chuck table 60B holding nothing is moved below the finish grinding means 70b, and finish grinding is performed. The suction surface 61a of the chuck table 60B is ground by means 70b to dress the grinding wheel 76b. The plate-like workpiece W after finish grinding is carried out from the chuck table 60A moved to the carry-in / out position.

  As described above, when the chuck table 60B moves below the finish grinding means 70b, the chuck table 60C moves below the rough grinding means 70a, and the plate-like workpiece W held on the chuck table 60C is roughly ground. Thereafter, the turntable 52 further rotates, and as shown in FIG. 6D, the chuck table 60A holding nothing is moved below the rough grinding means 70a to grind the suction surface 61a of the chuck table 60A. Then, the grinding surface of the grinding wheel 76a is dressed.

  Thereafter, as shown in FIGS. 6D and 6E, the same steps as the finish grinding step and the second dressing step are repeated. That is, when the chuck table 60C shown in FIG. 6D is moved below the finish grinding means 70b by the rotation of the turntable 52, the plate-like workpiece W is finish ground. Thereafter, when the turntable 52 further rotates and the chuck table 60A holding nothing moves below the finish grinding means 70b as shown in FIG. 6E, the suction surface 61a of the chuck table 60A is ground. Then, the grinding wheel 76b is dressed.

As described above, in the second and third examples of the grinding method, dressing can be performed by grinding the suction surfaces 61a of the suction plates 61 of the chuck tables 60A, 60B and 60C included in the grinding device 50 with the grinding wheels 76a and 76b. Therefore, it is not necessary to install a dresser board in the grinding device 50.
Thus, since each suction plate 61 of each chuck table functions as a dresser boat, it is possible to perform full-automatic grinding on the hard plate-like workpiece W and dressing on the grinding wheels 76a and 76b. The operator does not need to operate the grinding device 50 one by one.

  In the first example of the grinding method and the second example of the grinding method, the number of grinding steps to be performed before the dressing step is not limited and can be arbitrarily set.

10: Grinding device 11: Device base 11a: Upper surface 12: Column 13: Chuck table 14: Suction plate 14a: Suction surface 15: Frame body 16: Communication path 17: Suction source 19: Tilt adjustment unit 20: Height gauge 21: Table upper surface Measuring unit 22: Workpiece upper surface measuring unit 23: Work presence / absence determining unit 24: Scale 30: Grinding means 31: Spindle 32: Holder 33: Motor 34: Mount 35: Grinding wheel 36: Grinding wheel 40: Grinding feed means 41: Ball screw 42 : Motor 43: Guide rail 44: Elevating plate 50: Grinding device 51: Device base 52: Turntable 53a, 53b: Cassette 54: Conveying means 55: Temporary placing means 56a: First conveying means 56b: Second conveying means 57a, 57b: Column 58: Cleaning means 60: Chuck table 61: Suction plate 6 a: Suction surface 62: Frame 63: Height gauge 64: Table upper surface measurement unit 65: Work upper surface measurement unit 66: Work presence / absence determination unit 70a: Coarse grinding means 70b: Finish grinding means 71: Spindle 72: Holder 73: Motor 74: Mount 75: Grinding wheel 76, 77: Grinding wheel 80a, 80b: Grinding feed means 81: Ball screw 82: Motor 83: Guide rail 84: Lift plate

Claims (1)

A chuck table for sucking and holding a plate workpiece, a rough grinding means for rough grinding by bringing a grinding surface of a rough grinding wheel into contact with a plate workpiece sucked and held by the chuck table , and a plate shape sucked and held by the chuck table A finish grinding means for bringing the workpiece into contact with the grinding surface of the finish grinding wheel and finish grinding; and a turntable for arranging the plurality of chuck tables at equal angles and positioning the chuck table on the rough grinding means and the finish grinding means. A grinding method using a grinding apparatus comprising:
The chuck table has a porous suction plate having a suction surface for sucking and holding a plate-like work, and a communication path for communicating a suction source to the suction plate, and exposes the suction surface to surround the suction plate. A frame, and
With contacting the ground surface of the rough grinding on the upper surface of the plate-shaped workpiece to be sucked and held on the suction surface of the chuck table positioned in the grinding position to rough grinding plate workpiece of crude grinding means, said A grinding step in which the grinding surface of the finish grinding wheel is brought into contact with the upper surface of the plate-like workpiece sucked and held by the suction surface of the chuck table positioned at the grinding position of the finish grinding means, and the plate-like workpiece is finish-ground .
Crude and to the suction surface of the chuck table positioned in the grinding position of the grinding means is brought into contact with the grinding surface of the rough grinding with dressing the grinding surface of the coarse grinding means to grind the suction surface Coarse grinding in which the ground surface of the finish grinding wheel is brought into contact with the upper surface of the plate-like workpiece sucked and held by the suction surface of the chuck table positioned at the grinding position of the finish grinding means to finish-grind the plate-like workpiece The face dressing process,
The grinding surface of the rough grinding wheel is brought into contact with the upper surface of the plate-like workpiece sucked and held by the suction surface of the chuck table positioned at the grinding position of the rough grinding means, and the plate-like workpiece is coarsely ground. The suction surface of the finish grinding wheel is brought into contact with the suction surface of the chuck table, which is ground with a rough grinding wheel and positioned at the grinding position of the finish grinding means, so that the suction surface is ground. Finishing grinding surface dressing process to dress the grinding surface;
With
After the the grinding process was performed a predetermined number of times, the grinding process to continue the grinding process was performed and the rough grinding surface dress step and said finish grinding surface dress step.

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