JP5898982B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus that includes a plurality of grinding means and performs grinding on a plurality of plate-like workpieces.

  In the grinding process of the plate-like workpiece, grinding is performed by a grinding apparatus including a plurality of grinding means. For example, a grinding apparatus including a plurality of grinding means includes a rough grinding means for performing rough grinding on a plate workpiece and a finish grinding means for performing finish grinding on the plate workpiece subjected to the rough grinding. is there. Then, rough grinding and finish grinding are sequentially performed on the plate-like workpiece, and the plate-like workpiece is ground to a predetermined thickness (see, for example, Patent Document 1 below).

JP 2011-131291 A

  However, when continuously grinding a plurality of plate-like workpieces in the grinding apparatus as described above, rough grinding means and finish grinding means are simultaneously operated to perform grinding in parallel. Since the amount of grinding of the plate-like workpiece is larger than that of grinding, rough grinding requires a longer processing time than finish grinding. For this reason, it is rare that the timing of exchanging the grinding wheel of the rough grinding means and the grinding wheel of the finish grinding means is the same, and the exchange timing is almost always different. Nevertheless, in order to efficiently perform warming up after replacement of the grinding wheel, in the conventional grinding apparatus, when the grinding wheel of one grinding means comes to be replaced, other grinding means can be used. Since even the grinding wheel is replaced at the same time, it is extremely uneconomical. In addition, since the grinding wheel is replaced every time it is time to replace the grinding wheel, the frequency of wheel replacement work is increasing.

  Further, as described above, the rough grinding means and the finish grinding means rarely have the same timing for exchanging the grinding wheel. Therefore, the dressing for adjusting the grinding surface of the grindstone performed at the time of exchanging the grinding wheel, and each grinding means It is difficult to simultaneously set up to set the operation origin in the vertical direction and warm up to maintain the operation accuracy of the grinding machine, resulting in a problem that the work time becomes longer and the work efficiency is lowered. is there.

  The present invention has been made in view of the above circumstances, and in a grinding apparatus including a plurality of grinding means, there is a problem to be solved by synchronizing the replacement times of the grinding wheels in the plurality of grinding means. ing.

The present invention comprises a holding means capable of holding and rotating a work piece by a holding surface, a grinding means comprising a grinding wheel in which grinding wheels for grinding the work piece held by the holding means are arranged in an annular shape, The grinding means is ground and fed in a direction perpendicular to the holding surface of the holding means to approach the holding surface, and the grinding wheel is brought into contact with the workpiece held by the holding means, and the thickness of the workpiece A plurality of holding means and a turntable capable of revolving, wherein at least two of at least three holding means provided on the turntable are provided. one of together simultaneously with at least two grinding means to allow for grinding each of the workpiece held by the holding means comprises two grinding feed means for each grinding feed the two grinding means A grinding apparatus, the machining of the workpiece by the grinding grindstone, with causes reduce the thickness of the workpiece held by the holding means, for grinding feed individual grinding means consumption of the grinding grindstone individual A determination unit that individually monitors based on the grinding feed position of the grinding feed means and determines when the grinding wheel needs to be replaced when the grinding feed position reaches the grinding wheel exchange position designated for the grinding feed means; A storage unit that stores a grinding feed position at the end of grinding each time the workpiece held on the holding surface is ground, and the grinding wheel based on the plurality of grinding feed positions stored in the storage unit Of the grinding feed means based on the prediction of the prediction section so that the replacement time of each grinding wheel attached to each grinding means predicted by the prediction section is the same time. Grinding feed Comprising a calculation unit for calculating and control means for controlling each of the grinding feed amount by controlling the two grinding feed means based on the calculation result by the calculated output section, the a.

  In the present invention, the thickness of the work piece held by the holding means by the grinding wheel is reduced, and the consumption amount of the grinding wheel is individually monitored at the grinding feed position of the individual grinding feed means for grinding and feeding the individual grinding means. Then, when the grinding feed position reaches the grinding wheel exchange position set in the grinding feed means, it can be determined that the grinding wheel needs to be replaced. In addition, each time the workpiece is ground, the grinding feed position is stored, the replacement time of the grinding wheel is predicted based on the plurality of stored grinding feed positions, and the replacement time of the plurality of grinding wheels is predicted. By calculating the grinding feed amount of each grinding feed means so that they are at the same time, it is possible to synchronize the exchange times of the grinding wheels provided in the plurality of grinding means. A setup to detect the origin position where the grinding wheel and the holding surface of the chuck table come in contact with the dressing that improves the grinding performance by adjusting the grinding surface of the grinding wheel attached to the grinding wheel by synchronizing the replacement time of the grinding wheel And warming up for maintaining the accuracy of the grinding apparatus can be performed at the same time, and the working time can be shortened.

It is a perspective view showing a grinding device provided with a plurality of grinding means. It is a fragmentary sectional view of the grinding device to which the control means for synchronizing a grinding wheel exchange time was connected. It is a fragmentary sectional view of the grinding device which shows the state which controls the grinding feed amount of rough grinding means and finish grinding means. It is explanatory drawing which shows typically the relationship between the consumption of a grindstone, and a grinding feed position.

  A grinding apparatus 1 shown in FIG. 1 includes a rough grinding means 4 and a finish grinding means 5, and is a grinding apparatus that performs rough grinding and finish grinding on a plate-like workpiece that is a workpiece. The grinding device 1 is provided with various devices for receiving, temporarily placing, conveying, grinding and cleaning a plate-like workpiece on the upper surface of the device base 2 extending in the Y-axis direction. Below, the structure of the grinding apparatus 1 is demonstrated.

  As shown in FIG. 1, the grinding apparatus 1 is provided with a holding means 10 that can hold and rotate a plate-like workpiece, a rough grinding means 4 that performs rough grinding on the plate-like workpiece, and a rough grinding means 4 that performs rough grinding. Finish grinding means 5 for performing finish grinding on the plate-shaped workpiece, grinding feed means 7 for grinding and feeding the rough grinding means 4 in the Z-axis direction, and second grinding feed for grinding and feeding the finish grinding means 5 in the Z-axis direction And means 8.

  As shown in FIG. 1, a turntable 3 is disposed on the upper surface of the apparatus base 2, and at least three holding means 10 are disposed on the upper surface of the turntable 3. A rotation shaft 9 for rotating the turntable 3 is disposed at the center of the turntable 3, and the turntable 3 can be rotated about the rotation shaft 9. By rotating the turntable 3, the three holding means 10 are revolved, and an attachment / detachment area B where the plate-like workpiece is attached / detached, and a grinding where the rough grinding means 4 and the finish grinding means 5 perform grinding. The area C can be moved sequentially.

  As shown in FIG. 1, a cassette 15 </ b> A that houses a plate-shaped workpiece before processing and a cassette 15 </ b> B that stores a plate-shaped workpiece after processing are disposed at the front in the Y-axis direction of the apparatus base 2. In the vicinity of the cassette 15A and the cassette 15B, a transport robot 16 is provided for carrying out the plate-shaped workpiece before processing from the cassette 15A and loading the plate-shaped workpiece after processing into the cassette 15B.

  In the movable region of the transfer robot 16, a temporary placement means 17 on which a plate-shaped workpiece before processing is placed and positioned at a fixed position, and a cleaning means 19 for cleaning the plate-shaped workpiece after processing are arranged. Yes. In the vicinity of the temporary placing means 17, a transport arm 18 </ b> A for carrying the plate-like workpiece temporarily placed on the temporary placing means 17 into the holding means 10 is disposed. Further, in the vicinity of the cleaning unit 19, a transfer arm 18 </ b> B that carries the plate-shaped workpiece into the cleaning unit 19 from the holding unit 10 that holds the processed plate-shaped workpiece is disposed.

  As shown in FIG. 2, the holding means 10 includes a chuck table 100 that holds the plate-like workpiece W, and a rotating shaft 101 that is connected to the chuck table 100. The chuck table 100 has a holding unit 102 that sucks and holds the plate-like workpiece W, and the surface of the holding unit 102 is a holding surface 103 on which the plate-like workpiece W is placed and held. A suction hole 104 is formed in the central portion of the chuck table 100 and the rotating shaft 101. The suction hole 104 communicates with a suction source 105 connected to the lower part of the rotating shaft 101. The suction force generated from the suction source 105 is transmitted to the holding unit 102 through the suction hole 104, and the plate-like workpiece W can be sucked and held on the holding surface 103.

  As shown in FIG. 2, the rotation shaft 103 is connected to a motor 107 via a belt 106, and the rotation of the rotation shaft 103 and the chuck table 100 can be rotated by driving the motor 107.

  A column 6A and a column 6B are arranged in parallel at the rear part of the apparatus base 2 of the grinding apparatus 1 shown in FIG. 1 in parallel with each other, and are roughened via the first grinding feed means 7 on the front side of the column 6A. Grinding means 4 is provided, and finish grinding means 5 is provided via a second grinding feed means 8 on the front side of the column 6B.

  The rough grinding means 4 includes a spindle 40 that has a vertical axis and is rotatable, a spindle housing 41 that rotatably supports the spindle 40, a motor 42 that is connected to the upper end of the spindle 40 and rotates the spindle 40, A rough grinding wheel 44 is mounted on the lower end of the spindle 40 via a mounter 43, and a rough grinding wheel 45 fixed in a ring shape is provided at the lower part of the rough grinding wheel 44. In the rough grinding means 4, the grinding wheel 44 can be rotated in the same direction by rotating the spindle 40 with the motor 42.

  The first grinding feed means 7 includes a rotatable ball screw 70, a servo motor 71 connected to the upper end of the ball screw 70, and a bearing 72 that is disposed at the lower end of the ball screw 70 and rotatably supports the ball screw 70. And a pair of guide rails 73 arranged in parallel with the ball screw 70 and a moving base 74 for grinding and feeding the rough grinding means 4 in the Z-axis direction. The spindle housing 41 is fixed to one surface of the moving base 74, and a nut structure is formed at the center of the other surface, and a ball screw 70 is screwed into the nut structure. Then, by driving the servo motor 71, the ball screw 70 can be rotated to move the moving base 74 in the Z-axis direction, and the coarse grinding means 4 can be moved up and down in the Z-axis direction.

  The finish grinding means 5 has a vertical spindle 50 that can rotate, a spindle housing 51 that rotatably supports the spindle 50, a motor 52 that is connected to the upper end of the spindle 50 and rotates the spindle 50, A finish grinding wheel 54 is mounted on the lower end of the spindle 50 via a mounter 53, and a finish grinding wheel 55 fixed in an annular shape is provided below the finish grinding wheel 54. In the finish grinding means 5, the finish grinding wheel 54 can be rotated in the same direction when the motor 52 rotates the spindle 50.

The second grinding feed means 8 includes a rotatable ball screw 80, a servo motor 81 connected to the upper end of the ball screw 80, a bearing portion 82 that rotatably supports the ball screw 80 at the lower end,
A pair of guide rails 83 disposed in parallel with the ball screw 80 and a moving base 84 for grinding and feeding the finish grinding means 5 in the Z-axis direction are provided. A spindle housing 81 is fixed to one surface of the movable base 84, and a nut structure is formed at the center of the other surface, and a ball screw 80 is screwed into the nut structure. Then, by driving the servo motor 81, the ball screw 80 can be rotated to move the moving base 84, and the finish grinding means 5 can be moved up and down in the Z-axis direction.

  FIG. 2 shows the rough grinding means 4 and the finish grinding means 5 having the common structure, the first grinding feed means 7 and the second grinding means 8, and the servo constituting the first grinding feed means 7. The servo motor 81 that constitutes the motor 71 and the second grinding feed means 8 is connected to the control means 11, and the positions of the rough grinding means 4 and the finish grinding means 5 in the Z-axis direction are controlled by the control means 11. The Further, since the abrasive grains contained in the grinding wheel 45 for rough grinding and the abrasive grains contained in the grinding stone 55 for finish grinding have different particle sizes, both the grinding stones have different degrees of wear and different processing times. The time of replacement differs between the wheel 44 and the finish grinding wheel 54. Therefore, in order to synchronize the replacement timing of the rough grinding wheel 44 and the replacement timing of the finish grinding wheel 54 in the servo motor 71 of the first grinding feed means 7 and the servo motor 81 of the second grinding feed means 8, The control means 11 also has a function of controlling the grinding feed amount in the Z-axis direction of the rough grinding means 4 and the finish grinding means 5 by the first grinding feed means 7 and the second grinding feed means 8.

  The control means 11 monitors the amount of wear of the grindstones 45 and 55 based on the grinding feed position P2 of the first grinding feed means 7 and the second grinding feed means 8, respectively. In the illustrated example, the grinding feed position P2 is a height position of the position reference portion 20 which is a screwed portion between the ball screws 70 and 80 and the nut structures of the moving bases 74 and 84.

  When the grindstones 45, 55 are consumed, the grinding surfaces 45a, 55a, which are the lower surfaces of the grindstones 45, 55, rise, and accordingly, the grinding feed amount of the rough grinding means 4 and the finish grinding means 5 is increased by the consumption amount. There is a need to. On the other hand, the wheel exchange position P1 is designated for the grinding feed means 7 and 8. The grinding feed position P2 approaches the wheel exchange position P1 due to the wear of the grindstones 45 and 55, and when the grinding feed position P2 reaches the grinding wheel exchange position P1, the rough grinding wheel 44 and the finish grinding wheel are exchanged. Judgment is necessary. Such a determination is performed by the determination unit 110 provided in the control unit 11.

  The control means 11 stores a storage unit 111 that stores a grinding feed position P2 at the end of the grinding each time the plate-like workpiece W held by the holding unit 102 of the chuck table 100 is ground, and stores it in the storage unit 111. The prediction unit 112 that predicts the replacement time of the rough grinding wheel 44 and the finish grinding wheel 54 based on the plurality of grinding feed positions P2 and the replacement time of the rough grinding wheel 44 predicted by the prediction unit 112 are shown in FIG. A calculation unit 113 that calculates the grinding feed amount of the first grinding feed unit 7 or the second grinding feed unit 8 based on the prediction of the prediction unit 112 so as to coincide with the replacement time of the grinding wheel 54. ing.

  The judgment unit 110 shown in FIG. 2 individually recognizes the grinding feed positions P2 of the rough grinding means 4 and the finish grinding means 5 when the plate-like workpiece W is roughly ground and finish ground. It is monitored whether or not the wheel replacement position P1 is reached. On the other hand, the storage unit 111 stores the grinding feed position P2 of the rough grinding unit 4 and the finish grinding unit 5 each time the grinding of the plate-like workpiece W held by the holding unit 102 is completed.

  Based on the data stored in the storage unit 111, the prediction unit 112 calculates an average value of the amount of wear of the grindstone that occurs when grinding one plate-like workpiece W, and grinds it in relation to the number of grinding of the plate-like workpiece W. The time when the feed position P2 reaches the wheel exchange position P1 can be predicted.

  The calculation unit 113 calculates a grinding feed amount in the Z-axis direction that is necessary for the replacement timing of the rough grinding wheel 44 and the replacement timing of the finish grinding wheel 54 to be the same timing based on the prediction result of the prediction unit 112. be able to.

In the following, first, the grinding process by the grinding apparatus 1 will be described.
The transport robot 16 shown in FIG. 1 takes out a plate-shaped workpiece before processing from the cassette 15 </ b> A and transports it to the temporary placement means 17. The plate-like workpiece temporarily placed on the temporary placing means 17 is placed on the holding surface 101 of the chuck table 100 located in the attachment / detachment region B by the transfer arm 18A.

  As shown in FIG. 2, after the plate-like workpiece W is placed on the holding surface 101 of the chuck table 100, the suction force generated from the suction source 105 is transmitted to the holding unit 102 through the suction hole 104.

  The plate-like workpiece W is sucked and held on the holding surface 103 by the suction force transmitted to the holding unit 102. Further, the motor 107 is driven, and the rotational force is transmitted to the rotary shaft 101 via the belt 106. Then, the chuck table 100 is rotated in the direction of arrow A by the rotation of the rotating shaft 101.

  The turntable 3 shown in FIGS. 1 and 2 sequentially rotates the rotating shaft 9 in the direction of the arrow A and sequentially holds the chuck table 100 holding the plate-like workpiece W below the rough grinding means 4 and the finish grinding means 5. Move.

  When the chuck table 100 is positioned below the rough grinding means 7, the first grinding feed means 7 is operated. The ball screw 70 is rotated by driving the servo motor 71, and the rough grinding means 4 is lowered by a predetermined grinding feed amount in the Z-axis direction. While lowering the coarse grinding means 4, the motor 42 shown in FIG. 1 is driven to rotate the coarse grinding wheel 44 in the direction of arrow A.

  When the rough grinding wheel 44 comes into contact with the rotating plate-like workpiece W, the grindstone 45 of the rough grinding wheel 44 shown in FIG. After the rough grinding is completed, the turntable 3 is rotated in the direction of arrow A by the rotation of the rotating shaft 9, and the chuck table 3 is moved below the finish grinding means 5. Then, the finish grinding means 5 performs finish grinding on the plate-like workpiece W subjected to the rough grinding by the same operation as the above rough grinding means 4. When the plate-like workpiece W is finished to a predetermined thickness, finish grinding is finished.

  After one plate-like workpiece W is finish-ground, the turntable 3 shown in FIG. 1 rotates in the direction of arrow A, and the chuck table 100 holding the plate-like workpiece W is moved to the attachment / detachment region B. After being moved to the attachment / detachment region B, the transfer arm 18 </ b> B moves the plate-like workpiece W to the cleaning means 19. And the washing | cleaning means 19 act | operates and the grinding | polishing waste adhering to the plate-shaped workpiece W is wash | cleaned. The cleaned plate-like workpiece W is accommodated in the cassette 15B by the transfer robot 16.

  Next, a control procedure for synchronizing the replacement timing of the rough grinding wheel 44 and the finish grinding wheel 54 by the control means 11 when the plate-like workpiece W is ground will be described with reference to FIGS. Before the grinding of the plate-like workpiece W by the grinding apparatus 1, as shown in FIG. 4, a process called setup is performed, and the holding surface 103 of the chuck table 100, the grinding surfaces of the grindstone 45 and the grindstone 55, The height position of the position reference unit 20 at the time of contact is set as the origin, and its Z-axis coordinate value is set in the control means 11. Further, the thickness of the plate-like workpiece W before processing is also set in the control means 11.

  As shown in FIG. 3, after the chuck table 100 holding the plate-like workpiece W is positioned below the rough grinding means 4, when the first grinding feed means 7 is operated, the ball screw 70 is rotated to rotate roughly. The grinding means 4 descends in the Z-axis direction, and the grinding feed position P2 of the rough grinding means 4 also moves in the Z-axis direction.

  When the plate-like workpiece W is roughly ground by the rough grinding means 4, the grinding feed in the Z-axis direction by the first grinding feed means 7 is controlled under the control of the control means 11. During grinding, for example, the thickness of the plate-like workpiece W is measured using a height gauge (not shown), and grinding feed is performed until the plate-like workpiece W is formed to a predetermined thickness. Correspondingly, the grinding feed amount can be adjusted.

  The determination unit 110 recognizes the grinding feed position P2 of the rough grinding means 4 during grinding of the plate workpiece W, and when the plate workpiece W is formed to a predetermined thickness, the grinding feed position P2 is the wheel exchange position P1. Monitor whether or not When the grinding feed position P2 does not reach the wheel replacement position P1 during grinding, the grinding feed position P2 is stored in the storage unit 111. Thereafter, other plate-like workpieces are sequentially ground, and the same determination and storage are performed.

  The prediction unit 112 predicts the replacement time of the rough grinding wheel 44 based on the data of the grinding feed position P2 sequentially stored in the storage unit 111. Specifically, for example, an average value of the amount of wear of the grindstone 45 generated when grinding one plate-like workpiece W is obtained from a plurality of data stored in the storage unit 111, and the grinding feed position P2 and the wheel exchange position P1 are determined. By dividing the distance between them by this average value, the number of ground workpieces W until the grinding feed position P2 reaches the wheel replacement position P1 is obtained. For example, as shown in FIG. 4, the thickness of the grindstone 45 at the end of the first plate-like workpiece grinding is T1, the grinding feed position at that time is P2, and the grindstone 45 at the end of the second plate-like workpiece grinding of the grindstone 45 If the thickness is T2 and the grinding feed position at that time is P2 ′, the thickness of the grindstone 45 at the end of the third plate-like workpiece grinding is T3 and the grinding feed position at that time is P2 ″ = P1. The number of grinding of the plate-like workpiece W until the feed position P2 reaches the wheel exchange position P1 is 3, and the time when grinding is performed for the number of grinding obtained in this way is the time for exchanging the grinding wheel 44.

  On the other hand, the finish grinding means 5 simultaneously performs the finish grinding of the plate-like workpiece W subjected to the rough grinding simultaneously with the rough grinding of the rough grinding means 4, so that the second grinding feed is performed under the control of the control means 11. The grinding feed in the Z-axis direction of the finish grinding means 5 by means 8 is performed. Then, the determination unit 110 recognizes the grinding feed position P2 of the finish grinding means 5 during grinding of the plate-like workpiece W, and determines that the plate-like workpiece W is formed to a predetermined thickness by a height gauge or the like (not shown). It is monitored whether or not the grinding feed position P2 has reached the wheel exchange position P1. When the grinding feed position P2 does not reach the wheel replacement position P1 during grinding, the grinding feed position P2 is stored in the storage unit 111. Thereafter, other plate-like workpieces are sequentially ground, and the same determination and storage are performed.

  The prediction unit 112 predicts the replacement time of the finish grinding wheel 54 based on the data stored in the storage unit 111. Specifically, as in the case of rough grinding, for example, an average value of the amount of wear of the grindstone 55 generated when grinding one plate-like workpiece W is obtained from data of a plurality of grinding feed positions stored in the storage unit 111, for example. By dividing the distance between the grinding feed position P2 and the wheel exchange position P1 by this average value, the number of sheets of the plate-like workpiece W to be ground until the grinding feed position P2 reaches the wheel exchange position P1 is obtained. Then, the time when the grinding is performed for the number of grindings thus obtained can be set as the replacement time of the grinding wheel 54.

  The calculation unit 113 calculates the grinding feed amount in the Z-axis direction of the rough grinding unit 4 and the finish grinding unit 5 in order to synchronize the replacement timing of the rough grinding wheel 44 and the finish grinding wheel 54 predicted by the prediction unit 112. . For example, while the prediction unit 112 predicted that the rough grinding wheel 44 was replaced at the time when ten plate-like workpieces W were continuously rough ground, the finish grinding wheel 54 was replaced at the time of 20 sheets. When it is predicted that the final workpiece W has been subjected to finish grinding, if the grinding is continued as it is, the rough grinding wheel 44 doubles the number of replacements. On the other hand, if the finish grinding wheel 54 is also replaced when the rough grinding wheel 44 is replaced, the finish rough grinding wheel 54 that is not very worn is discarded, which is uneconomical. Therefore, by reducing the grinding feed amount of the rough grinding means 4 in the Z-axis direction, the consumption amount of the grindstone 45 for each rough grinding of the plate-like workpiece W is reduced.

  Specifically, for example, the calculating unit 113 reduces the grinding feed amount of rough grinding by 50% so that the replacement time of the rough grinding wheel 44 is the time when 15 plate-like workpieces W are continuously ground. On the other hand, the grinding feed amount of finish grinding is increased by 50% so that the finish grinding wheel 54 is replaced at the time when the 15 plate-like workpieces W are continuously ground. That is, the amount of rough grinding by the rough grinding wheel 44 is reduced, and the amount of finish grinding by the finish grinding wheel 54 is increased accordingly.

  The control unit 11 controls the first grinding feed unit 7 and the second grinding feed unit 8 based on the calculation result of the calculation unit 113 to control the respective grinding feed amounts. By such control, the replacement time of the rough grinding wheel 44 and the replacement time of the finish grinding wheel 54 are synchronized. Then, by synchronizing the replacement times of the two wheels, the dressing that prepares the grinding surfaces of the grindstone 45 and the grindstone 55 to improve the grinding performance, the grinding surface of the grindstone 45 and the grindstone 55, and the holding surface 103 of the chuck table 100 are provided. Since the setup for detecting the origin position of each grinding means at the time of contact and the warm-up for maintaining the accuracy of the grinding apparatus 1 can be performed simultaneously, the working time can be shortened.

  Even if the replacement time of the rough grinding wheel 44 and the replacement time of the finish grinding wheel 54 do not completely match, for example, every time the rough grinding wheel is replaced three times, the finish grinding wheel is replaced once. The replacement time may be synchronized at a single timing.

  In the above embodiment, a grinding apparatus having rough grinding means and finish grinding means has been described as an example, but there may be three or more grinding means, and a plurality of grinding means having the same function may be provided. There may be.

1: Grinding device 2: Device base 3: Turntable 4: Coarse grinding means 40: Spindle 41: Spindle housing 42: Motor 43: Mount 44: Coarse grinding wheel 45: Grinding wheel
5: Finish grinding means 50: Spindle 51: Spindle housing 52: Motor 53: Mount 54: Finish grinding wheel 55: Grinding wheel 6A, 6B: Column 7: First grinding feed means 70: Ball screw 71: Servo motor 72: Bearing part 73: Guide rail 74: Moving base
8: Second grinding feed means 80: Ball screw 81: Servo motor 82: Bearing portion 83: Guide rail 84: Moving base 9: Rotating shaft 10: Holding means 100: Chuck table 101: Holding surface 102: Holding portion 103: Rotating shaft 104: Suction hole 105: Suction source 106: Belt 107: Motor 11: Control unit 110: Determination unit 111: Storage unit 112: Prediction unit 113: Calculation unit 15A, 15B: Cassette 16: Transport robot 17: Temporary placement unit 18A: Transfer arm 18A Transfer arm 19: Cleaning means 20: Position detector

Claims (1)

A holding means capable of holding and rotating a workpiece by a holding surface, a grinding means comprising a grinding wheel in which grinding wheels for grinding the workpiece held by the holding means are arranged in an annular shape, and the grinding means Grinding to feed the grinding wheel in a direction perpendicular to the holding surface of the holding means to approach the holding surface and bring the grinding wheel into contact with the workpiece held by the holding means to reduce the thickness of the workpiece A plurality of holding means, and a turntable capable of revolving, wherein the holding means is revolved, and at least two of the holding means provided on the turntable. with the same time comprises at least two grinding means to allow for grinding for each workpiece held in a grinding apparatus comprising two grinding feed means for each grinding feed the two grinding means There,
Grinding of the workpiece by the grinding wheel reduces the thickness of the workpiece held by the holding means, and grinds the amount of consumption of the grinding wheel by the individual grinding feed means for grinding and feeding the individual grinding means. A determination unit that individually monitors based on the feed position and determines when the grinding wheel needs to be replaced when the grinding feed position reaches the grinding wheel exchange position designated in the grinding feed means;
A storage unit for storing a grinding feed position at the end of grinding each time the workpiece held on the holding surface is ground;
A prediction unit for predicting the replacement time of the grinding wheel based on the plurality of grinding feed positions stored in the storage unit;
A calculation unit that calculates the grinding feed amount of the grinding feed unit based on the prediction of the prediction unit so that the replacement time of each grinding wheel attached to each grinding unit predicted by the prediction unit is the same time;
Control means for controlling the two grinding feed units based on the calculation result by the calculation unit to control the respective grinding feed amounts;
A grinding apparatus comprising:

Images