JP2010042453A - Dicing device and blade distal end shape forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide dicing device and blade distal end shape forming method allowing improvement of productivity of the dicing device and considerable reduction of cost by reducing replacing frequencies of the blade. <P>SOLUTION: In this blade distal end shape forming method, the distal end of the blade 2 is machined into a V-shape by bringing the distal end of the blade 2 rotated at a lower rotation speed than a grinding tool 14 into contact with the rotated and inclined grinding wheel 14 by a motor 21A. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a dicing apparatus that divides a workpiece such as a wafer on which a semiconductor device or an electronic component is formed into individual chips.

  A dicing apparatus for cutting and grooving a workpiece such as a wafer on which a semiconductor device or an electronic component is formed includes at least a thin disk-shaped blade that is rotated at a high speed by a spindle, and a work table that holds and holds the workpiece. , X, Y, Z, and θ moving axes that change the relative positions of the work table and the blade are provided. When machining a workpiece, a cutting fluid for cooling or lubrication is supplied from a nozzle to a rotating blade or a machining point where the workpiece and the blade are in contact with each other, and the blade and the workpiece are relatively moved by each moving shaft. Cutting and grooving are performed on the workpiece.

  FIG. 1 shows an example of a dicing apparatus. The dicing apparatus 1 includes a high-frequency motor built-in spindles 3 and 3 that are arranged to face each other and have a blade 2 and a wheel cover (not shown) attached to the tip, an imaging unit 4 that images the surface of the workpiece W, and a workpiece W. A processing unit 6 having a work table 5 for sucking and holding is provided.

  The dicing apparatus 1 includes, in addition to the processing unit 6, a wafer cleaning device 7 that spin-cleans a processed workpiece W, a load port 8 that mounts a cassette that stores a large number of workpieces W mounted on a frame F, a workpiece Conveying means 9 for conveying W, display means 10 for displaying an image picked up by the image pickup means 4 and inputting an operation to each part, a controller (not shown) for controlling the operation of each part, and the like.

  In machining such a workpiece, a V-shaped groove may be formed in the workpiece for the purpose of preventing chipping (referred to as chipping) around the machining groove or forming a special cut surface. In the formation of such a V-shaped groove, dicing is performed using a blade having a V-shaped tip (see, for example, Patent Document 1).

The blade used for dicing is worn during processing, and the blade formed in a V shape is worn to reduce the tip. At this time, the V-shaped shape does not decrease uniformly as shown in FIG. 2, and the V-shaped tip shape often collapses and decreases. Thus, since the desired V-shaped shape is not formed in the blade whose tip shape is broken, the processing efficiency is lowered and the chip size and shape are not uniform, leading to a reduction in processing quality. Therefore, the blade is replaced with a new blade having a V-shaped shape formed correctly, and the worn blade is processed again into a correct V-shaped shape by using a dedicated device.
JP-A-6-169015

  However, since blade replacement is normally performed manually, it is necessary to completely stop the device once. When the frequency of blade replacement increases, the device is stopped for a long time. An increase in the stop time of the apparatus causes a problem that the productivity of the apparatus is greatly reduced and the cost is significantly increased. Further, by separately preparing and installing a dedicated device for regenerating the tip shape of the blade, equipment costs for introducing the device are increased, and a lot of factory space is consumed. This also raises the problem of increasing the cost.

  The present invention has been made to solve such a problem, and the blade formed in the V shape is regenerated without removing it from the apparatus, and the frequency of replacement of the blade is reduced, thereby reducing the productivity of the dicing apparatus. It is an object of the present invention to provide a dicing apparatus and a blade tip shape forming method which can be improved and the cost can be greatly reduced.

  In order to achieve the above object, the invention according to claim 1 is cut by a disk-shaped blade having a V-shaped tip, a spindle for rotating the blade, and the blade. A workpiece table that holds the workpiece to be moved, a moving shaft that relatively moves the workpiece table and the blade, and an angle similar to the angle of the tip of the blade is inclined near the workpiece table or on the jig plate. And a cylindrical rotary dresser that processes the tip of the blade by rotating.

  According to the first aspect of the present invention, the dicing apparatus includes a blade, a spindle that rotates the blade, a work table that holds the work, and a moving shaft that relatively moves the work table and the blade. It has been. Further, the dicing apparatus is provided with one or more cylindrical rotary dressers that process the tip of the blade by rotating.

  The rotary dresser is provided near the work table or on the jig plate, and is inclined in the same manner as the V-shaped angle formed on the blade.

  In the dicing apparatus configured as described above, the blade whose tip shape is broken due to wear is rotated while being attached to the rotating shaft of the spindle. The rotating blade having its tip brought into contact with a rotary dresser that is inclined and rotated in the same manner as the angle of the V-shaped shape is uniformly polished on the entire periphery of the tip to form a V-shaped shape.

  As a result, the blade whose tip shape is broken is regenerated without being removed from the dicing apparatus, and the replacement frequency of the blade is reduced. Further, since a mechanism for regenerating the blade tip shape is provided in the dicing apparatus, the consumption space is reduced. As a result, the productivity of the dicing apparatus can be improved and the cost can be greatly reduced.

  The invention of claim 2 is characterized in that, in the invention of claim 1, the rotary dresser is provided with an adjusting mechanism for adjusting an inclination angle.

  According to the invention of claim 2, the rotary dresser is provided with an adjusting mechanism capable of arbitrarily adjusting and fixing the angle, and the angle of the rotary dresser is changed in accordance with the angle of the V-shaped shape to be processed. As a result, any V-shaped blade of any angle can be processed, and the productivity of the dicing apparatus is improved and the cost is greatly reduced.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the rotary dresser is provided on a jig plate, and is mounted on the dicing apparatus by placing the jig plate on the work table. It is characterized by being able to.

  According to the invention of claim 3, the rotary dresser is provided on the plate-shaped jig plate, and is attached to the dicing apparatus by sucking and placing the jig plate on the work table. As a result, the rotary dresser can be removed when not needed, the apparatus size can be reduced, and the position of the rotary dresser can be finely adjusted by rotating the work table.

  According to a fourth aspect of the present invention, in the invention according to any one of the first, second, or third aspect, the rotating shaft of the spindle to which the blade is attached is rotated at a rotational speed less than the rotational speed of the rotary dresser. The rotating means is attached to the spindle.

  According to the invention of claim 4, the blade whose tip shape is broken by the rotating means attached to the spindle is rotated at a lower rotational speed than the rotary dresser while being attached to the spindle. As a result, the blade rotates at a speed suitable for forming the V-shape and is processed by the rotary dresser, and a mechanism for regenerating the blade tip shape is provided in the dicing apparatus, thereby reducing the consumption space.

  According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the rotating means is connected to an external motor attached to the spindle or the rotating shaft separately from a motor provided on the spindle for rotating the rotating shaft. It is a control means for controlling the number of revolutions of the motor provided in the speed reduction mechanism or the spindle.

  According to the fifth aspect of the present invention, an external motor that is mounted separately from the high-frequency motor that rotates the rotary shaft built in the spindle, or a speed reduction mechanism using a gear or a clutch connected to the rotary shaft, or the rotation of the built-in high-frequency motor. The rotation means is constituted by the control means for controlling the number.

  Thus, the rotating means can rotate the rotating shaft of the spindle to which the blade is attached at a speed suitable for forming the V-shaped shape of the blade.

  As described above, according to the dicing apparatus and the blade tip shape forming method of the present invention, a blade whose tip shape is broken is regenerated without being removed from the dicing device, and the blade replacement frequency is reduced. Further, since a mechanism for regenerating the blade tip shape is provided in the dicing apparatus, the consumption space is reduced. As a result, the productivity of the dicing apparatus can be improved and the cost can be greatly reduced.

  A preferred embodiment of a dicing apparatus according to the present invention will be described in detail below with reference to the accompanying drawings. First, the dicing apparatus according to the present invention will be described. FIG. 3 is a perspective view showing the appearance of the dicing apparatus, and FIG. 4 is a perspective view of the attached rotary dresser.

  The dicing device 11 includes a high frequency motor built-in type spindles 3 and 3 which are mounted on a surface of a workpiece W and are mounted with a blade 2, a wheel cover (not shown), and a rotating means which rotates the blade 2 from outside. An imaging means 4 for imaging, a work table 5 for sucking and holding the workpiece W, and a processing section 6 having a pair of rotary dressers 12 and 12 for processing the tip of the blade 2 are provided.

  The dicing apparatus 11 includes, in addition to the processing unit 6, a wafer cleaning apparatus 7 that spin-cleans the processed workpiece W, a load port 8 that mounts a cassette that stores a large number of workpieces W mounted on the frame F, a workpiece Conveying means 9 for conveying W, display means 10 for displaying an image picked up by the image pickup means 4 and inputting an operation to each part, and a control means for controlling the operation of each part and the number of revolutions of a motor built in the spindle And a controller (not shown).

  As shown in FIG. 4, the rotary dresser 12 includes a grindstone 14 that is rotated by a motor 13, an angle adjustment mechanism 15, and a position adjustment mechanism 16.

  The grindstone 14 is a cylindrical grindstone, and is rotated in the direction of the arrow θ by a motor 13 attached to the central axis of the cylinder.

  The angle adjustment mechanism 15 is rotatably provided in the direction of arrow A by connecting the main body 17A to which the motor 13 is attached and the main body 17B attached to the position adjustment mechanism 16 by a rotary joint 17C. Accordingly, the grindstone 14 can be adjusted to a desired angle by rotating the main body 17A in the direction of arrow A and then fixing the main body 17A with the fixing nut 17D.

  The position adjustment mechanism 16 is a mechanism such as a linear motion shaft that moves the attached main body 17B in the direction of arrow B, and moves the grindstone 14 in the direction of arrow B by moving the main body 17B in the direction of arrow B. The position of the grindstone 14 adjusted to the angle is adjusted.

  Next, the rotating means attached to the spindle 3 will be described. FIG. 5 is a side sectional view of the spindle to which the rotating means is attached, and FIG. 6 is another side sectional view of the spindle to which the rotating means is attached.

  As shown in FIG. 5, the spindle 3 has a blade 2 attached to a tip of a rotary shaft 18 sandwiched between flanges 19, and a wheel cover 20 </ b> A is attached around the blade 2. An external motor 21A as a rotating means for rotating the rotary shaft 18 is attached to the upper portion of the wheel cover 20A.

  The external motor 21 </ b> A conducts the rotation to the rotary shaft 18 by winding the belt 22 around the rotary shaft 18, and rotates the blade 2 at a rotational speed of 0 to 1000 rpm which is smaller than the rotational speed of the grindstone 14 of the rotary dresser 12.

  The belt 22 is normally detached from the rotary shaft 18 and is wound around the rotary shaft 18 manually or automatically when the rotation of the motor built in the spindle 3 stops and the rotation of the rotary shaft 18 stops. As a result, the blade 2 rotates at a speed suitable for forming a V-shape and is processed by the rotary dresser 12.

  Next, another embodiment of the rotating means will be described. As shown in FIG. 6, the blade 2 is attached to the tip of the rotary shaft 18 by being sandwiched by the flange 19, and the wheel cover 20 </ b> B is attached around the blade 2. An external motor 21B as a rotating means for rotating the rotary shaft 18 is attached to the front portion of the wheel cover 20B.

  The external motor 21B conducts rotation to the rotary shaft 18 by inserting the shaft 24 into a flange fixing nut 23 attached to the tip of the rotary shaft 18, and the blade 2 is 0 to 1000 rpm less than the rotational speed of the grindstone 14 of the rotary dresser 12. Rotate at the number of revolutions.

  The shaft 24 is normally detached from the rotating shaft 18, and is inserted into the flange fixing nut 23 manually or automatically when the rotation of the motor built in the spindle 3 stops and the rotation of the rotating shaft 18 stops. As a result, the blade 2 rotates at a speed suitable for forming a V-shape and is processed by the rotary dresser 12.

  The dicing apparatus 11 configured as described above is rotated by the external motor 21A or 21B while the blade 2 that has been worn out and its tip shape is broken is attached to the rotary shaft 18 of the spindle 3 to match the angle of the V shape. The tip of the blade 2 is brought into contact with the grindstone 14 of the rotary dresser 12 that is inclined and rotated, and the entire periphery of the tip is uniformly polished to form a V-shape.

  As a result, the blade 2 whose tip shape is broken is regenerated without being removed from the dicing apparatus 11, and the replacement frequency of the blade 2 is reduced. Further, since the rotary dresser 12 for regenerating the blade tip shape and the external motor 21A or 21B as the rotating means are provided in the dicing apparatus 11, the space consumed is reduced. As a result, the productivity of the dicing apparatus can be improved and the cost can be greatly reduced.

  In this embodiment, the rotary dressers 12 and 12 are provided in the vicinity of the work table 5. However, the present invention is not limited to this, and the rotary dressers 12 and 12 are provided on the jig plate 25 as shown in FIG. Even if the jig plate 25 is mounted on the work table 5 by suction as required, it can be suitably implemented. At this time, the rotary dresser 12 may be one instead of a pair. When there is one rotary dresser 12, after processing one surface of the V shape, the other surface is processed by rotating the work table 5.

  Accordingly, the rotary dresser 12 can be removed when not needed, the size of the dicing apparatus 11 can be reduced, and the position of the rotary dresser 12 can be finely adjusted by rotating the work table 5.

  Next, the blade tip shape forming method according to the present invention will be described. FIG. 8 is a side view showing how the tip shape of the blade is formed.

  In the blade tip shape formation, as shown in FIG. 8, the external motor 21A as the rotating means shown in FIG. 5 or the external motor 21B as the rotating means shown in FIG. 6 is transferred to the grindstone 14 rotated by the motor 13 of the rotary dresser 12. Is carried out by bringing the tip of the rotating blade 2 into contact with each other.

  The rotary dresser 12 moves the main body 17A in the direction of arrow A by the angle adjustment mechanism 15 so that the grindstone 14 has the same angle as the V-shaped shape of the blade 2 so that the angle is suitable for the V-shaped shape of the blade 2. Tilt to an angle of. The inclined grindstone 14 is moved in the direction of arrow B by the position adjusting mechanism 16 to adjust the contact position with the blade 2.

  After the angle and position of the pair of rotary dressers 12 are adjusted, the work table 5 is moved in the X direction shown in FIG. 3 and the spindle 3 is moved in the Y direction. The center is aligned with the intersecting grindstones 14, 14 as shown in FIG. At this time, the blade 2 is rotating at a rotational speed smaller than the rotational speed of the grindstone 14 rotated by the external motor 21A shown in FIG. 5 or the external motor 21B shown in FIG.

  As shown in FIG. 10, the blade 2 having the center position is brought into contact with the grindstones 14 and 14 by lowering the spindle 3. In this state, the work table 5 is further reciprocated in the X direction shown in FIG. 3 to reciprocate the rotary dressers 12 and 12 to process the tip of the blade 2.

  In the processing, the blade 2 is polished by lowering the blade 2 or bringing the rotary dressers 12 and 12 close to each other. When the polishing is continued and the tip of the blade 2 becomes an angle equivalent to the inclination angle of the grindstones 14 and 14 as shown in FIG. 11, the blade 2 and the grindstones 14 and 14 stop rotating when the desired V-shape is formed. The blade 2 is raised and the rotary dressers 12 and 12 are retracted to complete the blade tip shape formation.

  As described above, according to the dicing apparatus and the blade tip shape forming method according to the present invention, the rotary dresser and the rotation attached to the spindle are inclined according to the V-shaped angle formed on the blade. The blade whose tip shape is broken by the means is regenerated without being removed from the dicing apparatus, and the frequency of blade replacement is reduced. Further, since a mechanism for regenerating the blade tip shape is provided in the dicing apparatus, the consumption space is reduced. As a result, the productivity of the dicing apparatus can be improved and the cost can be greatly reduced.

  In the present embodiment, a rotating means for rotating the blade 2 at a rotational speed smaller than the rotational speed of the grindstone 14 is provided on the wheel cover at the front part of the spindle. The motor is provided with a speed reduction mechanism such as a clutch or a gear, or the built-in motor can be rotated at a low speed, and can be suitably implemented even when the blade 2 is rotated at a rotational speed less than the rotational speed of the grindstone 14 by the control means. It is.

The perspective view which shows the external appearance of the conventional dicing apparatus. Sectional drawing of the braid | blade in which the V-shaped shape was formed, and the blade in which the V-shaped shape collapsed. The perspective view which shows the external appearance of the dicing apparatus concerning this invention. The perspective view which expanded the rotary dresser part provided in the dicing apparatus. Side surface sectional drawing of the spindle provided with the rotation means. The side sectional view of the spindle provided with the rotation means by another embodiment. The perspective view which showed the rotary dresser by another embodiment. The side view which showed a mode that the front-end | tip shape formation of a braid | blade was performed. The side view which showed a mode that alignment of the rotary dresser was performed. The side view which showed a mode that the grindstone and the blade contacted. The side view which showed a mode that the front-end | tip of the braid | blade was processed into the desired shape.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 11 ... Dicing apparatus, 2 ... Blade, 3 ... Spindle, 4 ... Imaging apparatus, 5 ... Work table, 6 ... Processing part, 7 ... Wafer cleaning apparatus, 8 ... Load port, 9 ... Conveyance means, 10 ... Display means , 12 ... Load port, 13 ... Motor, 14 ... Grinding wheel, 15 ... Angle adjustment mechanism, 16 ... Position adjustment mechanism, 17A, 17B ... Main body, 17C ... Rotary joint, 17D ... Fixing nut, 18 ... Rotating shaft, 19 ... Flange , 20A, 20B ... wheel cover, 21A, 21B ... external motor, 22 ... belt, 23 ... flange fixing nut, 24 ... shaft, 25 ... jig plate, workpiece ... W

Claims (6)

A disk-shaped blade having a V-shaped tip, and
A spindle for rotating the blade;
A work table for holding a work to be cut by the blade;
A movement axis for relatively moving the work table and the blade;
A cylindrical rotary dresser for processing the tip of the blade by rotating near the work table or on a jig plate at an angle similar to the angle of the tip of the blade. A dicing apparatus characterized by the above.   The dicing apparatus according to claim 1, wherein the rotary dresser includes an adjustment mechanism that adjusts an inclination angle.   The dicing apparatus according to claim 1, wherein the rotary dresser is provided on a jig plate, and is attached to the dicing apparatus by placing the jig plate on the work table. .   The rotating means for rotating the rotating shaft of the spindle, to which the blade is attached, at a rotational speed lower than the rotational speed of the rotary dresser is attached to the spindle. The dicing apparatus described in 1.   In addition to the motor provided on the spindle for rotating the rotating shaft, the rotating means is an external motor attached to the spindle, a speed reduction mechanism connected to the rotating shaft, or the rotational speed of the motor provided on the spindle. The dicing apparatus according to claim 4, wherein the dicing apparatus is a control unit that controls the process. A disk-shaped blade having a V-shaped tip, a spindle that rotates the blade, a work table that holds a workpiece to be cut by the blade, and the work table and the blade are relatively Cylindrical rotary dresser that processes the tip of the blade by rotating it provided near the work table or on the jig plate at an angle similar to the angle of the tip of the blade. In a dicing apparatus comprising:
A blade tip shape forming method, wherein the blade tip is processed into a V-shape by bringing the tip of the blade into contact with the inclined rotary dresser that rotates.

Images