JP5340835B2 - Mounting flange end face correction method - Google Patents

Description

  The present invention relates to a mount flange end face correction method for correcting an end face of a mount flange on which a cutting blade of a cutting apparatus is mounted.

  Workpieces such as semiconductor wafers with multiple electronic circuits such as IC and LSI on the surface, resin substrates, glass substrates, and various ceramic substrates used for electronic components and optical components are placed on individual chips using a cutting machine. The divided chips are widely used in various electric devices.

  The cutting apparatus includes a holding table (chuck table) for holding a workpiece and a cutting means for cutting the workpiece held on the holding table. The cutting means is diamond or CBN (Cubic Boron Nitride). ) And the like, and a cutting blade having a grindstone portion (cutting blade) in which superabrasive grains such as metal or resin are hardened, and a spindle that rotates the cutting blade at a high speed (for example, see Japanese Patent Laid-Open No. 2000-252240). .

  The cutting blade is attached to the tip of the spindle via a mount flange, and cutting is performed by cutting into the workpiece while the cutting blade rotates at a high speed of, for example, 30000 rpm.

  More specifically, a cutting blade in which an annular grindstone (cutting blade) is arranged on the outer periphery of a disk-shaped base called a hub blade is attached to a mount flange that is detachably attached to the tip of a spindle and is a nut. It is fixed with.

  Further, a cutting blade made of a grindstone formed in an annular shape called a washer blade is fixed to the tip of the spindle with a nut while being sandwiched between a mount flange and a detachable flange.

  In this way, the cutting blade is mounted on the tip of the spindle in contact with the mount flange. Therefore, if the end surface of the mount flange that contacts the cutting blade is not flat, or if the angle between the end surface of the mount flange and the spindle axis is not a right angle, the cutting blade will flutter when the spindle rotates, and precise machining will not be possible. There is a problem.

  In order to solve such a problem, a flange end face correction jig for correcting the end face of the mount flange has been proposed (see Japanese Patent No. 3472390). This flange end surface correcting jig is composed of a grinding member (grinding tip) for grinding the end surface of the mount flange, a fixing portion for fixing the grinding member, and a support portion for supporting the fixing portion.

  The grinding member is brought into contact with the end surface of the mount flange and ground by the grinding member while rotating the mount flange, so that the end surface of the mount flange is flattened and the angle formed between the spindle axis and the end surface of the mount flange is Corrected at right angles.

JP 2000-252240 A Japanese Patent No. 3472390

  In the conventional mount flange end face correction method using the flange end face correction jig described above, an operator makes contact between the grinding member and the end face of the mount flange, and the presence or absence of contact has been visually confirmed. Therefore, the grinding member is pressed more than necessary on the end face of the mount flange, and the end face may be damaged.

  If the end face is damaged, there is a problem that the amount of the end face that must be cut by the end face correction increases, the life of the mount flange is shortened, and the time required for the end face correction is also increased. On the other hand, when the end face is not in contact with the grinding member, there is a problem that the time required for end face correction increases.

  The present invention has been made in view of these points, and an object of the present invention is to provide a method for correcting the end face of a mount flange without shortening the life of the mount flange and increasing the time for end face correction. That is.

  According to the present invention, the end face of the mount flange that mounts the cutting blade that is fixed to the tip of the spindle that is rotatably supported and that holds the work piece held on the holding table is used as the flange end face correcting jig having the grinding member. A mounting flange end surface correction method using a holding step of holding the flange end surface correction jig by the holding table with the grinding member and the end surface facing each other; An imaging step for imaging the end surface to form a captured image, and the holding table and the mount flange are brought close to each other so that the grinding member and the end surface of the mount flange are brought into contact with each other based on the captured image. Based on the Y movement amount calculating step for calculating the Y movement amount to be relatively moved in the Y direction and the Y movement amount calculated in the Y movement amount calculation step, A contact step in which the holding table and the mount flange are moved relative to each other in the Y direction to contact the grinding member and the end surface of the mount flange, and a reference position for starting the end surface correction is determined based on the captured image. There is provided a method for correcting an end face of a mount flange, comprising: a reference position determining step; and a correction step of rotating the mount flange to grind and correct the end face by the grinding member.

  Preferably, a vertical direction orthogonal to the Y direction is a Z direction, a direction orthogonal to the Y direction and the Z direction is an X direction, and in the imaging step, a plurality of the captured images are formed from a plurality of angles, In the reference position determination step, the holding table and the mount flange are relatively positioned in the Z direction in order to position the grinding member in a first predetermined position with respect to the end surface in the Z direction based on the captured image. A Z movement amount calculating step for calculating a Z movement amount to be moved; and for positioning the grinding member at a second predetermined position with respect to the end surface in the X direction based on the captured image, An X movement amount calculation step for calculating an X movement amount to be moved relative to the mount flange in the X direction; and the holding table and the mount flange are connected to the Z movement amount calculation step. A Z positioning step in which the grinding member is moved to a Z position that is the first predetermined position with respect to the mount flange, and the holding table and the mount An X positioning step of relatively moving the flange with the X movement amount calculated in the X movement amount calculating step, and positioning the grinding member at an X position that is the second predetermined position with respect to the mount flange; ,including.

  According to the present invention, the grinding member and the end face of the mount flange are determined by the imaging means to determine the reference position for starting the end face correction, so that the grinding member is not pressed against the end face more than necessary. The life of the mount flange is not shortened, and the end face and the grinding member are prevented from coming into contact with each other, so that the time required for end face correction is not increased.

It is an external appearance perspective view of the cutting device which has a mount flange to which the end face correction method of the mount flange of the present invention is applied. It is sectional drawing of the state in which the hub blade was mounted | worn with the mount flange. It is sectional drawing of the state in which the washer blade was attached to the mount flange. It is a flowchart of the end surface correction method of the mount flange of this invention. It is a perspective view of a flange end surface correction jig. It is a disassembled perspective view which shows a mode that a flange end surface correction jig | tool is mounted | worn on a holding table. It is sectional drawing for demonstrating an imaging step. It is sectional drawing for demonstrating a Y positioning step. It is explanatory drawing of a reference position determination step. It is explanatory drawing of an end surface correction step.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows the appearance of a cutting apparatus 2 having a cutting unit suitable for applying the method for correcting an end face of a mount flange according to the present invention.

  A holding table mechanism 6 having a holding table 8 is mounted on the base 4 of the cutting apparatus 2 so as to be movable in the X-axis direction. A flange end face correction jig 10 is sucked and held on the holding table 8. 12 is a bellows.

  Reference numeral 14 denotes a cutting unit. The cutting unit 14 is arranged to be movable in the Y-axis direction and the Z-axis direction by a Y-axis moving mechanism 16 composed of a ball screw and a pulse motor and a Z-axis moving mechanism 18 composed of a ball screw and a pulse motor. Has been.

  A spindle 22 (see FIG. 2) is rotatably accommodated in the spindle housing 20 of the cutting unit 14, and a mount flange 24 is attached to the tip of the spindle 22.

  A first camera 26 is attached to the base 4 sideways. On the other hand, the second camera 28 is attached to the support member 30 downward, and an X-axis moving mechanism 32 comprising a ball screw and a pulse motor, a Y-axis moving mechanism 34 comprising a ball screw and a pulse motor, and a ball screw and pulse motor. It is mounted so as to be movable in the X-, Y-, and Z-axis directions by a Z-axis moving mechanism 36 comprising:

  Referring to FIG. 2, a sectional view of the cutting blade 40 mounted on the mount flange 24 is shown. A mount flange 24 is attached to the tip of the spindle 22 and fixed with bolts 38. The mount flange 24 has an end surface 24a and a boss portion 24b formed on the outer peripheral portion.

  The cutting blade 40 is called a hub blade, and a circular base 42 having a circular hub 42a and a cutting edge (grinding stone portion) 44 in which diamond abrasive grains are dispersed in a nickel base material are electrodeposited on the outer periphery of the circular base 42. Has been configured.

  The mounting hole of the cutting blade 40 is inserted into the boss portion 24b of the mount flange 24, the cutting blade 40 is brought into contact with the end surface 24a of the mount flange 24, and the nut 46 is attached to the male screw formed on the boss portion 24b of the mount flange 24. By screwing, the cutting blade 40 is attached to the mount flange 24 attached to the tip of the spindle 22.

  Referring to FIG. 3, a sectional view of the washer blade 48 mounted on the mount flange 24 is shown. The washer blade 48 is inserted into the boss portion 24b of the mount flange 24, the detachable flange 50 is inserted into the boss portion 24b of the mount flange 24 from the outside, and the washer blade 48 is sandwiched between the mount flange 24 and the detachable flange 50, and the nut The washer blade 48 is attached to the mount flange 24 by screwing 46 to a male screw formed on the boss portion 24 b of the mount flange 24.

  As shown in FIGS. 2 and 3, the cutting blades 40 and 48 are attached to the tip of the spindle 22 in contact with the mount flange 24. Therefore, when the end surface 24a of the mount flange 24 that contacts the cutting blades 40 and 48 is not flat, or when the angle between the end surface 24a of the mount flange 24 and the axis of the spindle 22 is not a right angle, the cutting blade is rotated when the spindle 22 rotates. 40 and 48 flutter, and there is a problem that precise processing cannot be performed.

  The method for correcting the end surface of the mount flange according to the present invention is to solve such a problem by correcting the end surface 24a of the mount flange 24. The method of the embodiment of the present invention will be described below with reference to FIGS. A method for correcting the end face of the mount flange will be described in detail.

  Referring to FIG. 4, there is shown a flowchart of a mounting flange end face correction method according to an embodiment of the present invention. FIG. 5 is a perspective view of the flange end face correcting jig, and FIG. 6 is an exploded perspective view showing a state where the flange end face correcting jig is mounted on a holding table (chuck table).

  As shown in FIG. 5, the flange end surface correction jig 10 has a grinding member (grinding tip) 58 mounted on a support member 54 fixed to a support base 52 formed of a metal such as SUS, and the grinding member 58. The holding member 56 is mounted thereon, and the screw 60 is screwed into a screw hole formed in the support member 54, whereby the grinding member 58 is sandwiched between the support member 54 and the holding member 56. The support member 54 and the holding member 56 are also formed from a metal such as SUS.

  The grinding member 58 is configured by solidifying abrasive grains such as white alundum (WA) and green carborundum (GC) with a mixture of a resin and a conductive material. As an alternative, the grinding member 58 may be formed from cemented carbide.

  The flange end face correcting jig 10 configured as described above removes a normal chuck table mounted on the cutting apparatus 2 and sucks it into a holding table (chuck table) 8 mounted instead as shown in FIG. Retained.

  The holding table 8 has a radial groove 62a formed in a cross shape and a plurality of concentric circular grooves 62b. Both the radial groove 62a and the circular groove 62b are connected to a negative pressure suction source (not shown).

  Referring to the flowchart of FIG. 4 again, first, in step S10, the grinding member 58 of the flange end face correcting jig 10 and the end face 24a of the mount flange 24 are opposed to each other as shown in FIG. The suction is held by the holding table 8.

  Next, in step S11, the grinding member 58 and the end surface 24a of the mount flange 24 are imaged by the imaging means including the first camera 26 and the second camera 28, thereby forming a plurality of captured images.

  Next, the process proceeds to step S12, and the holding table 8 and the mount flange 24 are relatively moved in the approaching Y direction in order to bring the grinding member 58 and the end face 24a into contact with each other based on the captured image captured in step S11. The power Y movement amount is calculated.

  In step S13, based on the calculated Y movement amount, the mount flange 24 is moved in the arrow Y direction as shown in FIG. 8 (A), and shown in FIGS. 8 (B) and 9 (A). Thus, the grinding member 58 and the end surface 24a of the mount flange 24 are brought into contact with each other.

  Next, the process proceeds to step S14, and the reference position determination step for starting the end face correction is performed based on the captured image. In this reference position determination step, the holding table 8 and the mount flange 24 should be moved relative to each other in the Z direction in order to position the grinding member 58 at the first predetermined position with respect to the end surface 24a in the Z direction based on the captured image. In order to position the grinding member 58 at the second predetermined position with respect to the end surface 24a in the X direction based on the captured image and the Z movement amount calculation step for calculating the Z movement amount, the holding table 8 and the mount flange 24 are An X movement amount calculating step for calculating an X movement amount to be relatively moved in the direction.

  The reference position determination step further includes a Z positioning step in which the holding table 8 and the mount flange 24 are relatively moved in the Z direction so that the grinding member 58 is positioned at a Z position that is a first predetermined position with respect to the mount flange 24. And an X positioning step in which the holding table 8 and the mount flange 24 are relatively moved in the X direction so that the grinding member 58 is positioned at the X position which is the second predetermined position with respect to the mount flange 24.

  The Z positioning step is a vertical positioning step for lowering the mount flange 24 by the Z movement amount in the Z-axis direction as shown in FIG. 9B, and the X positioning step is a grinding member as shown in FIG. 9C. This is a left-right alignment step in which 58 is moved in the X-axis direction by an X movement amount to a position crossing the end face 24a of the mount flange 24.

  As shown in FIG. 9C, after the grinding member 58 of the flange end face correcting jig 10 is moved to the reference position, the mount flange 24 in step S15 is rotated and the end face 24a is ground and corrected by the grinding member 58. Perform correction steps.

  In this correction step, the grinding member 58 is reciprocated a plurality of times across the end surface 24a in the direction orthogonal to the axial direction of the spindle 22, that is, in the arrow X direction, while rotating the mount flange 24 in the arrow A direction as shown in FIG. And an index feed step for feeding the mount flange 24 by a predetermined distance in the axial direction of the spindle 22. The end face 24a of the mount flange 24 is corrected by repeating the end face grinding step and the index feed step.

  According to the embodiment of the mount flange end face correction method described above, the reference position for starting the end face correction based on the captured images obtained by capturing the grinding member 58 and the end face 24a of the mount flange 24 with the first and second cameras 26 and 28. Therefore, the grinding member 58 is not pressed against the end surface 24a more than necessary, the life of the mount flange 24 is not shortened, and the end surface 24a and the grinding member 58 are prevented from coming into contact with each other. The time required for correcting the end face of the mount flange 24 is not increased.

8 Holding table 10 Flange end face correction jig 14 Cutting unit 22 Spindle 24 Mount flange 24a End face 26 First camera 28 Second camera 40 Cutting blade (hub blade)
48 Washer blade 58 Grinding member

Claims (2)

The end face of the mount flange that mounts the cutting blade that is fixed to the tip of the spindle that is rotatably supported and that cuts the workpiece held on the holding table is corrected using a flange end face correcting jig having a grinding member. A method for correcting the end face of the mount flange,
A holding step of holding the flange end face correction jig by the holding table with the grinding member and the end face facing each other;
An imaging step of imaging the grinding member and the end face with an imaging means to form a captured image;
Y movement for calculating the amount of Y movement to move relative to the holding table and the mounting flange in the approaching Y direction to bring the grinding member into contact with the end face of the mounting flange based on the captured image A quantity calculating step;
Based on the Y movement amount calculated in the Y movement amount calculation step, the holding table and the mount flange are moved relative to each other in the Y direction to bring the grinding member into contact with the end surface of the mount flange. Steps,
A reference position determining step for determining a reference position for starting the end face correction based on the captured image;
A correction step of rotating the mount flange to grind and correct the end face by the grinding member;
An end face correction method for a mount flange, comprising: The vertical direction perpendicular to the Y direction is the Z direction, the direction perpendicular to the Y direction and the Z direction is the X direction,
In the imaging step, a plurality of the captured images are formed from a plurality of angles,
In the reference position determination step, the holding table and the mount flange are relatively positioned in the Z direction in order to position the grinding member in a first predetermined position with respect to the end surface in the Z direction based on the captured image. A Z movement amount calculating step for calculating a Z movement amount to be moved;
In order to position the grinding member at the second predetermined position with respect to the end surface in the X direction based on the captured image, an X movement amount to move the holding table and the mount flange relative to each other in the X direction is set. An X movement amount calculating step to calculate;
The holding table and the mount flange are moved relative to each other by the Z movement amount calculated in the Z movement amount calculation step, and the grinding member is moved to the Z position that is the first predetermined position with respect to the mount flange. A Z positioning step for positioning;
The holding table and the mount flange are moved relative to each other by the X movement amount calculated in the X movement amount calculation step, and the grinding member is moved to the X position that is the second predetermined position with respect to the mount flange. An X positioning step for positioning;
The method for correcting an end face of the mount flange according to claim 1.

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