JP5613439B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus having means for grinding and correcting an end face of a flange that supports a cutting blade.

  Workpieces such as semiconductor wafers with a plurality of electronic circuits such as IC and lSI formed on the surface, resin substrates, glass substrates, various ceramic substrates used for electronic components and optical components are put into individual chips with a cutting device. The divided chips are widely used in various electric devices.

  The cutting device includes a holding table for holding a workpiece and a cutting means for cutting the workpiece held on the holding table, and the cutting means is a superabrasive such as diamond or CBN (Cubic Boron Nitride). There is known one that is composed at least of a cutting blade having a grindstone portion in which grains are hardened with metal or resin, and a spindle that rotates the cutting blade at a high speed (for example, see Patent Document 1).

The cutting blade is attached to the tip of the spindle via a flange, and cutting is performed by cutting into the workpiece while the cutting blade rotates at a high speed of, for example, 30000 rpm.
More specifically, a cutting blade made of a grindstone formed in an annular shape called a washer blade is fixed with a nut to the tip of the spindle while being sandwiched between two flanges. Further, a cutting blade in which an annular grindstone is arranged on the outer periphery of a disk-shaped base called a hub blade is fixed to a tip of a spindle with a nut while facing a flange.

  As described above, the cutting blade is attached to the tip of the spindle in contact with the flange for both the washer blade and the hub blade. Therefore, if the end face of the flange that contacts the blade is not flat or if the angle between the end face of the flange and the axis of the spindle is not a right angle, the cutting blade will flutter when the spindle is rotated, and precision machining will not be possible. is there. Then, the flange end surface correction jig | tool for correcting the end surface of a flange is proposed (refer patent document 2). The flange end surface correcting jig is composed of a grinding member (grinding tip) for grinding the end surface of the flange, a fixing portion for fixing the grinding member, and a support portion for supporting the fixing portion. Is brought into contact with the end face of the flange and ground by the grinding member while rotating the flange, so that the end face of the flange is flattened and the angle between the spindle axis and the end face of the flange is corrected to a right angle.

JP-A-8-25209 Japanese Patent No. 3472390

  Conventionally, however, the operator makes contact between the grinding member and the end face of the flange, and the operator visually confirms the presence or absence of contact, and the positioning to the position where the end face correction is started is also visually confirmed. Confirmation was performed and the work was complicated. Moreover, since it is a manual work, the end face correction jig may be installed at an inappropriate position. Furthermore, if the grinding member is pressed more than necessary on the end surface, the end surface may be damaged. If the end face is damaged, the amount of the end face that must be cut by the end face correction increases, and the life of the flange is shortened, and the time required for the end face correction also increases. On the other hand, when the end surface and the grinding member are not in contact, it is necessary to move the end surface correction jig more than necessary when correcting the end surface, which increases the time required for the end surface correction.

  The present invention has been made in view of the above-described facts, and a technical problem thereof is to provide a cutting apparatus that can automatically perform an appropriate end face correction operation.

The present invention provides a holding table having a holding surface for holding a workpiece when the vertical direction is the Z direction, the direction orthogonal to the Z direction is the Y direction, and the direction orthogonal to the Z direction and the Y direction is the X direction. A holding means having a support surface and a rotation support portion for rotating the holding table about the Z direction as a rotation axis, a cutting blade for cutting a workpiece held by the holding means, and the cutting blade with the Y direction as a rotation axis. Cutting means having a spindle to be rotated and a flange for supporting a cutting blade at the end face of the spindle, a Z direction moving means for relatively moving the holding means and the cutting means in the Z direction, a holding means and a cutting means, Y direction moving means for relatively moving the Y direction, X direction moving means for relatively moving the holding means and the cutting means in the X direction, and a grinding wheel for grinding the end face of the flange Relates a cutting device having an end surface correction means for correcting the end face of the flange with the end surface modifying tool and a grinding wheel support member for supporting the grinding wheel, the end surface modifying jig holding surface of the holding table or The grindstone support member is disposed on the support surface of the rotation support unit, the grindstone support member is fixed to the upper surface of the plate member, and the end surface correcting means is disposed on the plate member and is disposed on the holding surface of the holding table or the support surface of the rotation support unit. A positioning unit for positioning the grindstone support member of the provided end surface correction jig with respect to the holding surface or the support surface, a storage unit for storing at least the relative positions of the end surface of the flange and the grinding grindstone in the X direction and the Z direction, Adjust the positional relationship between the end face of the flange and the grinding wheel at least in the X and Z directions by detecting the contact between the end face of the flange and the grinding wheel due to the relative movement of the flange and the grinding wheel in the Y direction. A control unit that determines an end surface correction start position in the Y direction by detecting that the end surface of the flange and the grinding wheel are brought into contact with each other in the Y direction after the flange end surface and the grinding wheel are in contact with each other; .

  In the present invention, since the positional relationship between the end face of the flange constituting the cutting means and the grinding wheel for end face grinding is recognized three-dimensionally under the control of the control unit, the contact between the end face of the flange and the grinding wheel It is not necessary for the operator to visually confirm the above, and it is possible to automatically perform an appropriate end face correction operation.

It is a perspective view which shows an example of a cutting device. It is sectional drawing which shows an example of a cutting means. It is sectional drawing which shows another example of a cutting means. It is a disassembled perspective view which shows an example of a holding means and an end surface correction jig. It is a disassembled perspective view which shows another example of a holding means and an end surface correction jig. It is explanatory drawing which shows the connection relationship of a cutting means and an end surface correction means. It is explanatory drawing which shows an example of the positional relationship of the X direction and Z direction of a flange and a grinding wheel. It is explanatory drawing which shows the state which the end surface of the flange and the grinding wheel contacted. It is explanatory drawing which showed the procedure which determines the reference position of a grinding wheel, (A) is the state in which the grinding wheel was aligned with the lower end of a flange end surface, (B) is the position of the grinding wheel in the Z direction at a predetermined position. The state where it matched, (C) The state where the position of the X direction of the grinding stone was aligned with the predetermined position is shown. It is explanatory drawing which shows the state which grinds the end surface of a flange. It is a top view which shows another example of an end surface correction jig | tool.

A cutting apparatus 1 shown in FIG. 1 is an apparatus in which two cutting means 3 a and 3 b cut a workpiece (workpiece) held by a holding means 2. Note that there may be only one cutting means. The workpiece to be cut is not particularly limited. For example, silicon wafers, semiconductor wafers such as gallium arsenide, adhesive members such as DAF (Die Attach Film) provided on the back side of the wafer for chip mounting, semiconductor product packages, ceramics Glass, sapphire (Al ₂ O ₃ ) -based inorganic material substrates, various electronic components such as LCD drivers, and various processing materials that require micron-order processing position accuracy.

  The holding means 2 includes a holding table 20 that holds the workpiece, a rotation support portion 21 that rotates the holding table 20 around the Z direction that is the vertical direction, and a clamp portion 22 that fixes the workpiece from the outer peripheral side. ing. The holding table 20 includes a suction part 200 that is formed of a porous member and holds a workpiece by negative pressure, and a frame body 201 that surrounds the suction part 200, and the upper surfaces of the suction part 200 and the frame body 201 are flush with each other. The holding surface 20a is made. On the other hand, the rotation support unit 21 can rotate the holding table 20 by a predetermined angle.

  Since the two cutting means 3a and 3b are configured in the same manner, they will be described with common reference numerals. The cutting means 3a and 3b have a cutting blade 30 for cutting the work held by the holding means 2, and a spindle 31 for rotating the cutting blade 30 about the Y direction which is a direction orthogonal to the Z direction. ing. The spindle 31 is made of metal such as SUS and has conductivity.

  The holding means 2 is driven by the X direction moving means 4 and can move in the X direction orthogonal to the Z direction and the Y direction. The X-direction moving means 4 includes a ball screw 40 having a rotation axis in the X-axis direction, a guide rail 41 disposed in parallel with the ball screw 40, a motor 42 connected to one end of the ball screw 40, and a lower portion. There is provided a moving base 43 which is in sliding contact with the guide rail 41 and in which a nut (not shown) is screwed into the ball screw 40, and the ball base 40 driven by the motor 42 is rotated to turn the moving base 43. The guide rail 41 is guided to move in the X direction.

  The two cutting means 3a and 3b are driven by the two Z-direction moving means 5a and 5b, respectively, and can be moved in the Z-direction, and are driven by the two Y-direction moving means 6a and 6b, respectively. It is possible to move to.

  Since the two Z-direction moving units 5a and 5b are configured in the same manner, they will be described with common reference numerals. The Z-direction moving means 5 includes a ball screw 50 having a vertical rotation axis, a guide rail 51 disposed in parallel to the ball screw 50, a pulse motor 52 connected to one end of the ball screw 50, and a side portion. And an elevating base 53 in which a nut (not shown) is screwed to the ball screw 50, and the ball screw 50 driven by the pulse motor 52 is rotated to rotate the elevating base. 53 is guided by the guide rail 51 and moves in the Z direction, and the cutting means 3a and 3b fixed to the lifting base 53 are moved up and down in the Z direction.

  Since the two Y-direction moving units 6a and 6b are configured in the same manner, they will be described with common reference numerals. The Z-direction moving means 6 includes a ball screw 60 having a rotation axis in the Y-axis direction, a guide rail 61 disposed in parallel with the ball screw 60, a pulse motor 62 connected to one end of the ball screw 60, and a side And a moving base 63 in which a nut (not shown) is screwed into the ball screw 60 while the portion is in sliding contact with the guide rail 61, and the moving base is rotated by the rotation of the ball screw 60 driven by the pulse motor 62. The table 63 is guided by the guide rail 61 and moves in the Y-axis direction to move the cutting means 3a and 3b in the Y direction.

  The operations of the X direction moving means 4, the Z direction moving means 5 and the Y direction moving means 6 are controlled by the control unit 10. Therefore, the position in the X direction of the holding table 2 driven by the X direction moving means 4, the positions in the Y direction and Z direction of the cutting means 3a, 3b driven by the Z direction moving means 5 and the Y direction moving means 6, It is controlled by the control unit 10. The control unit 10 can store position information necessary for the control of the holding table 2 and the cutting means 3a and 3b in the storage unit 11, and can read out the stored content and use it for control as necessary.

  As the cutting blades 30 of the cutting means 3a and 3b, for example, there are two types of blades, a hub blade 32 shown in FIG. 2 and a washer blade 33 shown in FIG. A hub blade 32 shown in FIG. 2 is electrodeposited on a base 320 formed in a ring shape with a through hole for insertion into the spindle 31 in the thickness direction, and an outer peripheral portion on one surface side of the base 320. And a cutting blade 321. The cutting blade 321 is formed, for example, by dispersing diamond abrasive grains in a nickel base material. On the other hand, the washer blade 33 shown in FIG. 3 is, for example, a blade composed only of a cutting blade formed in a very thin ring shape by dispersing diamond abrasive grains in a nickel base material.

  As shown in FIGS. 2 and 3, a flange 34 is attached to the spindle 31 of the cutting means 3a, 3b. The flange 34 is formed of a metal such as SUS and has conductivity, and includes a boss portion 340 that protrudes in the Y direction and a diameter-expanded portion 341 that expands from the boss portion 340. A male screw 340 a is formed at the tip of the boss 340. In addition, an end surface 341 a that supports the hub blade 32 or the washer blade 33 from the side is provided on the peripheral edge portion of the enlarged diameter portion 341.

  The hub blade 32 shown in FIG. 2 is fixed to the flange 34 by inserting the cutting blade 321 into contact with the end surface 341 a of the flange 34 and screwing the nut 36 to the male screw 340 a formed on the boss portion 340. The The flange 34 is fixed to the spindle 31 by screwing a bolt 35 to a female screw 310 formed at the tip of the spindle 31.

  The washer blade 33 shown in FIG. 3 is inserted so that one surface is in contact with the end surface 341a of the flange 34, a removable flange 37 having the same outer diameter as the flange 34 is inserted into the boss portion 340, and a nut 36 is inserted into the boss portion. It is fixed to the flange 34 by being screwed onto a male screw 340 a formed on the 340. The flange 34 is fixed to the spindle 31 by screwing a bolt 35 to a female screw 310 formed at the tip of the spindle 31.

  As shown in FIG. 4, the holding surface 20 a of the holding table 20 has a plurality of receiving holes 20 b. The end face correction jig 7 can be attached to and detached from the holding surface 20.

  The end surface correction jig 7 is supported by the plate member 70, a plurality of positioning pins 71 protruding from the lower surface of the plate member 70, the grindstone support member 72 fixed to the upper surface 70 a of the plate member 70, and the grindstone support member 72. The end face correction jig 7 can be attached while being positioned at a fixed position with respect to the holding surface 20 by inserting the positioning pin 71 into the accommodation hole 20b.

  The grindstone support member 72 is made of a metal such as SUS and has conductivity. The grinding wheel 73 also has conductivity, and is configured by, for example, solidifying abrasive grains such as white alundum and green carborundum with a mixed material of resin and conductive material. The grinding wheel 73 may be configured by dispersing and solidifying abrasive grains in a conductive resin material, or may be formed of a super hard material.

  The upper surface of the rotation support portion 21 is a support surface 210, and a recess 211 is formed in the support surface 210. A suction hole 212 for communicating with the suction source 22 and sucking and holding the holding table 20 is formed at the bottom of the recess 211. Further, a recess 213 is further formed at the center of the bottom of the recess 211, and the workpiece is held at the bottom of the recess 213 by communicating with the suction source 22 and applying a negative pressure to the suction part 200 of the holding table 20. A suction hole 214 is formed for this purpose.

  As shown in FIG. 5, the end surface correction jig 7 may be directly fixed to the rotation support portion 21 in a state where the holding table 20 is not held on the rotation support portion 21. In this case, as shown in FIG. 5, the same number of receiving holes 210 a as the positioning pins 71 are formed in the support surface 210 of the rotation support portion 21, whereby the positioning pins 71 are received in the receiving holes 210 a and the support surface 210. The end face correction jig 7 can be positioned with respect to. Even in this case, the end face correction jig 7 is rotatable while being supported by the rotation support portion 21.

  As shown in FIG. 6, the grindstone support member 72 is connected in series with the continuity detection unit 80, the power source 81, and the spindle 31. The continuity detection unit 80 is configured by an ammeter, for example. Moreover, the detection result in the continuity detection unit 80 can be read out by the control unit 10, and the control unit 10 can perform processing according to the detection result. FIG. 6 shows a state in which the cutting blade 30 is not attached to the spindle 31.

  In the cutting apparatus 1 configured as described above, the end surface 341a of the flange 34 and the cutting blade 321 or the washer blade 33 of the hub blade 32 shown in FIGS. 2 and 3 are brought into close contact with each other, and the end surface 341a of the flange 34 and the spindle 31 are contacted. The end face is corrected by grinding the end face 341a in order to make the axis of the right angle to the right angle. For such grinding, a grinding wheel 73 constituting the end face correction jig 7 can be used.

  In grinding the end surface 341 a of the flange 34, first, the end surface correction jig 7 shown in FIGS. 4 and 5 is mounted on the holding table 20 or the rotation support portion 21.

  As shown in FIG. 4, the end surface correction jig 7 is placed in a state of being positioned with respect to the holding table 20 by inserting the positioning pin 71 into the accommodation hole 20 b or the accommodation hole 210 a. Then, the suction force from the suction source 22 is applied to the suction unit 200 to be sucked and held.

  Before starting the grinding of the end surface 341a of the flange 341, the control unit 10, for example, as shown in FIG. 7, the distance X0 between the lower end of the end surface 341a and the center of the grinding wheel 73 in the X direction, and the lower end of the end surface 341a. And the distance Z0 between the lower end in the Z direction of the grinding wheel 73 are stored in the storage unit 11 as information on the relative position between the end surface 341a and the grinding wheel 73. In addition to the relative positional relationship between the end surface 341a and the grinding wheel 73 in the X direction and the Z direction, the relative positional relationship between the end surface 341a and the grinding wheel 73 in the Y direction may be stored in the storage unit 11. Good.

  Next, by using the positional relationship, the flange 341 and the grinding wheel 73 are relatively moved in the X direction and the Z direction, whereby the end surface 341a of the flange 341 and the grinding wheel 73 are positioned in the X direction and the Z direction. Align. Specifically, under the control of the control unit 10, the Z direction moving means 5a or 5b shown in FIG. 1 moves the cutting means 3a or 3b by Z0 in the Z direction, and the X direction movement shown in FIG. The means 4 moves the holding means 2 by X0. By such movement, the alignment of the lower end of the end face of the flange 341 and the grinding wheel 73 in the X direction and the Z direction is accurately performed.

  After the end face 341a of the flange 341 and the grinding wheel 73 are aligned in the X direction and the Z direction, the cutting means 3a or the cutting means 3b and the end face correction jig 7 are moved relative to each other in the Y direction. As shown, the lower end of the end surface 341a of the flange 341 and the grinding wheel 73 are brought into contact with each other. In this embodiment, the cutting means 3a or the cutting means 3b is brought into contact with the lower end of the end surface 341a and the grinding wheel 73 by bringing the flange 341 closer to the grinding wheel 73 by driving the Y direction moving means 6a or Y direction moving means 6b. Let Here, when the relative positional relationship in the Y direction between the end surface 341 a and the grinding wheel 73 is stored in the storage unit 11, the control unit 10 stores the relative positional relationship in the Y direction from the storage unit 11. Reading and moving the flange 341 in the Y direction at high speed using the positional relationship information until the end surface 341a of the flange 341 contacts the grinding wheel 73, and fine adjustment thereafter moves the flange 341 in the Y direction at low speed. By performing the contact detection by moving, it is possible to shorten the time until the end surface 341a of the flange 341 contacts the grinding wheel 73.

  When the end surface 341a and the grinding wheel 73 come into contact with each other, the closed circuit 8 is formed, and the conduction detector 80 detects that the flange 341 and the grinding wheel 73 are in contact with each other. When the controller 10 confirms that the flange 341 and the grinding wheel 73 are in contact with each other, the controller 10 immediately stops the movement of the cutting means 3a or the cutting means 3b in the Y direction by the Y-direction moving means 6a or the Y-direction moving means 6b. The contact position at this time becomes the end face correction start position in the Y direction.

  Next, by moving the flange 341 and the grinding wheel 73 relatively in the Z direction from the state shown in FIG. 9A where the lower end of the end surface 341a and the grinding wheel 73 are in contact with each other, FIG. As shown, the grinding wheel 73 is positioned at a predetermined position in the Z direction in relation to the flange 341. Then, by moving the holding means 2 in the X direction from that state, the grinding wheel 73 is positioned at a predetermined position in the X direction in relation to the flange 341 as shown in FIG.

  Thus, after the position of the grinding wheel 73 is positioned at a predetermined position in relation to the end surface 341a of the flange 341, the holding means 2 while rotating the flange 341 in the direction of arrow A by the rotation of the spindle 31, as shown in FIG. The end face 341a of the flange 341 is ground by reciprocally moving the grinding wheel 73 of this type in the X direction a plurality of times. Further, the flange 341 is index-fed by a predetermined distance in the Y direction, and the same grinding is performed. As a result, the end surface 341a is flattened, and the axis of the spindle 31 and the end surface 341a are perpendicular to each other.

  As described above, the end face correction jig 7 is positioned with respect to the holding means 2 by the positioning pin (positioning portion) 71, and the relative positions of the grinding wheel 73 and the flange 341 in the positioning state in the X direction and the Z direction are determined. The contact between the end surface 341a of the flange 341 and the grinding wheel 73 is detected by the conduction detection unit (detection unit) 80, and the control unit 10 detects the contact between the grinding wheel 73 and the flange 341 in the X direction and the Z direction. After the relative position is adjusted, contact between the end surface 341a of the flange 341 and the grinding wheel 73 is recognized and the end surface correction start position in the Y direction is recognized, so that the positioning unit 71, the storage unit 11, the detection unit 80, and the control unit 10 constitutes an end face correcting means.

  Since the positioning and grinding operations between the end surface 341a of the flange 341 and the grinding wheel 73 are all accurately performed in a state where the positional relationship is recognized under the control of the control unit 10, the grinding wheel is placed at an appropriate position on the end surface 341a. 73 can be brought into contact. Further, since the grinding wheel 73 is not pressed against the end surface 341a more than necessary, the end surface 341a is not damaged, and the force for pressing the end surface 341a is insufficient, so that grinding takes too much time. There is no problem.

  In an apparatus having two cutting means such as the cutting apparatus 1 shown in FIG. 1, the end face correcting jig 7 is rotated 180 degrees after the end face of the flange of one of the cutting means is ground and corrected. By doing so, the end face of the other flange can be similarly ground. Also in that case, the control part 10 can perform the same control. Moreover, when the end face correction jig is provided with two grinding wheels disposed with their backs facing each other, the end faces of the flanges of the two cutting means can be ground simultaneously.

  Further, as in the end face correction jig 9 shown in FIG. 11, a plurality of grindstone support members 91 are arranged in an arc shape on the upper surface of the circular plate member 90, and radially extend from each grindstone support member 91 toward the outer peripheral side. If the protruding grinding wheel 92 is provided, the end faces of a plurality of flanges can be ground simultaneously. Further, when the specific grinding wheel 92 is worn or clogged, the plate member 90 is rotated. Thus, it is possible to immediately start grinding using another grinding wheel without wear or clogging.

  In the present embodiment, the holding unit 2 is configured to move in the X direction. However, when the cutting units 3a and 3b are moved in the X direction, relative movement in the X direction between the holding unit 2 and the cutting units 3a and 3b is performed. It is good also as a structure implement | achieved. In this embodiment, the cutting means 3a and 3b move in the Y direction. However, when the holding means 2 moves in the Y direction, the relative movement in the Y direction between the holding means 2 and the cutting means 3a and 3b. It is good also as a structure by which is implement | achieved. Further, in this embodiment, the cutting means 3a and 3b are configured to move in the Z direction. However, when the holding means 2 moves in the Z direction, the relative movement in the Z direction between the holding means 2 and the cutting means 3a and 3b. It is good also as a structure by which is implement | achieved.

1: Cutting device 2: Holding means 20: Holding table 20a: Holding surface 20b: Accommodating hole 200: Suction part 201: Frame body 21: Rotating support part 210: Support surface 210a: Accommodating hole 211: Recessed part 212: Suction hole 213: Recess 214: Suction hole 22: Clamp part 3a, 3b: Cutting means 30: Cutting blade 31: Spindle 310: Male screw 32: Hub blade 320: Base 321: Cutting blade 33: Washer blade 34: Flange 340: Boss part 340a: Male screw 341: Expanded diameter portion 341a: End face 35: Bolt 36: Nut 4: X direction moving means 40: Ball screw 41: Guide rail 42: Motor 43: Moving base 5a, 5b: Z direction moving means 50: Ball screw 51 : Guide rail 52: Pulse motor 53: Lifting base 6a, 6b: Y direction moving means 6 0: Ball screw 61: Guide rail 62: Pulse motor 63: Moving base 7: End face correction jig 70: Plate member 70a: Upper surface 71: Positioning pin (positioning part)
72: Grinding wheel support member 73: Grinding wheel 8: Closed circuit 80: Conduction detection unit (detection unit) 81: Power supply 9: End face correction jig 90: Plate member 91: Grinding wheel support member 92: Grinding wheel 10: Control unit 11: Memory

Claims (1)

When the vertical direction is the Z direction, the direction orthogonal to the Z direction is the Y direction, and the Z direction and the direction orthogonal to the Y direction are the X direction,
Holding means having a holding table having a holding surface for holding a workpiece, and a rotation support portion having a support surface and rotating the holding table around the Z direction as a rotation axis;
A cutting blade for cutting the work held by the holding means; a spindle for rotating the cutting blade around the Y direction as a rotation axis; and a flange for supporting the cutting blade at an end surface at the tip of the spindle. Cutting means;
Z-direction moving means for relatively moving the holding means and the cutting means in the Z direction;
Y-direction moving means for relatively moving the holding means and the cutting means in the Y direction;
An X direction moving means for relatively moving the holding means and the cutting means in the X direction;
End face correcting means for correcting the end face of the flange using an end face correcting jig having a grinding wheel for grinding the end face of the flange and a grinding wheel support member for supporting the grinding wheel;
A cutting device comprising:
The end surface correction jig is disposed on the holding surface of the holding table or the support surface of the rotation support portion, and the grindstone support member is fixed to the upper surface of the plate member,
The end face correcting means includes
The grindstone support member of the end face correction jig disposed on the plate member and disposed on the holding surface of the holding table or the support surface of the rotation support portion is disposed on the holding surface or the support surface. A positioning part for positioning;
A storage unit that stores relative positions of at least the X direction and the Z direction between the end face of the flange and the grinding wheel;
A detection unit for detecting contact between the end face of the flange and the grinding wheel due to relative movement in the Y direction between the flange and the grinding wheel;
After adjusting the positional relationship between the end surface of the flange and the grinding wheel in at least the X direction and the Z direction, the end surface of the flange and the grinding wheel are moved closer to each other in the Y direction to thereby adjust the end surface of the flange and the grinding wheel. A control unit that determines an end face correction start position in the Y direction by detecting that the grinding wheel has come into contact;
Cutting device having

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