KR20190132203A - Cutting apparatus - Google Patents

Abstract

The present invention provides a cutting device capable of easily correcting a cross section without replacing a jig chuck table. The cutting device includes: a holding table (30) holding an object to be processed; a cutting blade cutting the object to be processed, which is held by the holding table (30); and a mount flange (24) pinching and fixing the cutting blade to a front end of a spindle (22) rotating the cutting blade, on a cross section (24C). The holding table (30) includes: a holding jig (34) having a holding surface (34a) holding the object to be processed; multiple relief grooves (34c) formed at a position corresponding to a division estimation line of the object to be processed in the holding jig (34); and multiple narrow grooves (34d) formed at each area divided by the relief groove (34c). The holding jig (34) has a cross section correcting jig (100) including: a polishing stone (101) polishing the cross section (24C) of the mount flange (24); and a stone support member (102) holding the polishing stone (101).

Description

Cutting device {CUTTING APPARATUS}

The present invention relates to a cutting device.

Generally, the cutting device which cuts a to-be-processed object, such as a wafer, fixes a cutting blade to the front-end | tip of a spindle with a mount flange. The mount flange clamps the cutting blade with the fixing nut in a state in which an annular end face is brought into contact with one side of the cutting blade. In this type of mount flange, if deposits or scratches are generated on the end face, the cutting blade is partially sandwiched. For this reason, the cutting blades are easily shaken or rotated inclined with respect to the rotation axis during cutting, which causes defects in the workpiece and damage of the cutting blades. Therefore, periodically or at the time of replacing the flange of the mount, an end face of the mount flange is ground using a cross-section correcting jig having a grinding wheel, and a cross-sectional correction is performed to make the cross section flat and perpendicular to the axis of rotation.

When performing this kind of cross-sectional correction work, it is also assumed that the cross-sectional correction jig is suction-held to the chuck table that holds the workpiece during cutting. However, the cross-section correcting jig is smaller than the chuck table, and the chuck table is usually in the form of a porous shape and is configured to fully adsorb the workpiece. For this reason, if a cross-section correction jig is mounted on a chuck table, a squeezing leak will arise and it cannot fully adsorb | suck and hold a cross-section correction jig. In addition, when the porous surface of the chuck table is damaged, the flatness of the workpiece is affected. Therefore, when performing a cross-sectional correction work, the technique which replaces a mounting groove with the universal chuck table formed in the center and mounts it, and the technique which makes the cross-section correction jig adsorb | suck to this holding groove is proposed (for example, patent document 1). Reference).

Moreover, in addition to the chuck table for cutting, the cutting apparatus of the structure which forms the sub chuck table which is smaller than this chuck table, and mounts a cross-section correction jig on this sub chuck table is also proposed (for example, patent document 2).

Japanese Unexamined Patent Publication No. 2011-011299 Japanese Unexamined Patent Publication No. 2011-255458

However, when cutting what is called a package substrate as a to-be-processed object, this package substrate is hold | maintained in the jig chuck table (holding table) which has the relief groove of a cutting blade. In this configuration, after replacing the universal chuck table with the jig chuck table and placing it thereon, an operation of aligning the position of the relief groove is required, and there is a problem that the work of correcting the cross section becomes complicated. Moreover, in the structure which forms a sub chuck table other than the chuck table for cutting, there exists a problem that the footprint of a cutting device becomes large.

This invention is made | formed in view of the above, and an object of this invention is to provide the cutting device which can perform cross-sectional correction easily, without replacing and mounting a jig chuck table.

In order to solve the problem mentioned above and achieve the objective, the cutting device which concerns on this invention cuts the holding table which hold | maintains the to-be-processed object in which the several division planned line which intersects is set, and the workpiece hold | maintained by this holding table. A cutting blade to be rotated, a spindle for rotating the cutting blade, and a flange for clamping and cutting the cutting blade in cross section at the tip of the spindle, and the holding table includes a holding surface for holding the workpiece and the holding surface thereof. A plurality of cutting blade relief grooves formed at positions corresponding to the division scheduled lines of the workpiece held on the surface, a plurality of suction holes formed in respective regions partitioned by the cutting blade relief grooves, and negative pressure to the suction holes. Negative pressure transmission unit for transmitting the pressure, grinding grindstone for grinding the end face of the flange, and grindstone support for holding the grinding grindstone. It is configured to include the member.

According to this configuration, since the holding table includes a grinding grindstone for grinding the end face of the flange and a grindstone support member for holding the grinding grindstone, the cross section can be easily modified without replacing the jig chuck table. You can run Moreover, since it is not necessary to prepare a sub chuck table separately, expansion of the footprint of a cutting device can be prevented.

In this structure, the grindstone support member may be disposed below the height of the holding surface and fixed to the side surface of the holding table so as to face the end face of the flange.

According to the present invention, since the holding table includes a grinding grindstone for grinding the end face of the flange and a grindstone support member for holding the grinding grindstone, the cross section correction can be easily performed without replacing the jig chuck table. Can be. Moreover, since it is not necessary to prepare a sub chuck table separately, expansion of the footprint of a cutting device can be prevented.

1 is an external perspective view illustrating a configuration of a cutting device according to the present embodiment.
2 is a plan view schematically showing a workpiece.
3 is a bottom view schematically showing a workpiece.
4 is a plan view schematically illustrating the holding jig.
5 is a side cross-sectional view schematically showing a holding jig in a state mounted on a jig base.
6 is an exploded perspective view showing the configuration of a cutting unit of a cutting device.
FIG. 7: is a side view which shows the state where the cross section of the mount flange is correct | amended by the cross section correction jig which concerns on this embodiment.
8 is a side view illustrating a state in which cross-sectional correction of a mount flange is performed by a cross-sectional correction jig according to another embodiment.

The cutting device concerning embodiment of this invention is demonstrated. This invention is not limited by the content described in the following embodiment. In addition, the component described below includes the thing which a person skilled in the art can easily assume, and the substantially same thing. Furthermore, the structure described below can be combined suitably. Moreover, various omission, substitution, or a change of a structure can be performed in the range which does not deviate from the summary of this invention.

1 is an external perspective view illustrating a configuration of a cutting device according to the present embodiment. 2 is a plan view schematically showing a workpiece. 3 is a bottom view schematically showing a workpiece. The cutting device 1 is a device that cuts the work 11 and divides the work 11 into individual chips. In this embodiment, the to-be-processed object 11 is what is called a device package (package board | substrate), and includes the frame 13 formed in substantially square shape by planar view, as shown to FIG. 2 and FIG. The frame 13 is made of, for example, a metal such as copper, a resin, ceramics, or the like, and surrounds a plurality of device regions 15 (three in this embodiment) and each device region 15. Includes a peripheral surplus region 17.

The device region 15 is further divided into a plurality of regions (48 regions in this embodiment) by a plurality of intersecting streets (divisional lines to be divided) 19, and each region includes an IC, an LSI, or an LED. Devices (not shown) are arranged. Moreover, the resin 12 which covered the whole back surface 13b side of each device area | region 15 and sealed several devices is formed in the back surface 13b side of the frame body 13. This resin 12 is formed in predetermined thickness, and protrudes from the back surface 13b of the frame body 13. As shown in FIG. In addition, a plurality of stages 14 corresponding to each device are formed on the surface 13a side of the frame body 13. A plurality of electrode pads (not shown) are formed around each stage 14.

The to-be-processed object 11 arrange | positions a device to each stage 14 from the back surface 13b side of the frame 13, for example, and the electrode pad arrange | positioned around the electrode of each device and the stage 14, for example. After connecting to a metal wire (not shown) etc., the back surface 13b side is sealed by resin 12, and is obtained. By dividing the workpiece 11 along the street 19, a plurality of chips sealed with resin can be formed. In addition, the to-be-processed object 11 is not limited to a device package (package substrate), A ceramic substrate, a glass substrate, a semiconductor wafer, an optical device wafer, etc. are contained.

As shown in FIG. 1, the cutting device 1 includes a holding table (also referred to as a jig chuck table) 30 that sucks and holds the workpiece 11, and the workpiece 11 held by the holding table 30. The cutting unit 20 which cuts (processes) the to-be-processed object 11 with the cutting blade 21, and moves the holding table 30 to an X-axis direction (processing feed direction), supplying cutting water to a cutting machine. The transfer unit (not shown), the calculation transfer unit 40 which moves the cutting unit 20 in the Y-axis direction (output transfer direction) perpendicular to the X-axis direction, and the cutting unit 20 in the X-axis direction and Y It is provided with the cut-out feed unit 50 which moves to a Z-axis direction (vertical direction) orthogonal to an axial direction, respectively.

The cutting device 1 is equipped with the rectangular parallelepiped apparatus main body 2, and the opening 2a of the rectangular shape long in the X-axis direction is formed in this upper surface. In this opening 2a, the holding table 30, the process feed unit, the waterproof cover 3 which covers this process feed unit, and a pair of bellows part 4 connected to this waterproof cover 3 are provided. ) Is formed. The holding table 30 includes a jig base 32 having two kinds of suction ports, and a holding jig 34 that is attached to the upper surface 32a of the jig base 32 to suck and hold the workpiece 11. It is provided. Moreover, the holding table 30 can move freely in the X-axis direction the upper surface of the apparatus main body 2 by the process transfer unit not shown, and is parallel with a Z-axis direction by the rotation drive source which is not shown in figure. It can rotate freely around the shaft center. As shown to FIG. 5 and FIG. 6, the holding jig 34 is formed in substantially rectangular flat plate shape, and the upper surface becomes the holding surface 34a which suction-holds the to-be-processed object 11. As shown in FIG.

On the holding surface 34a, a relief groove (a relief groove for cutting blades) 34c is formed at a position corresponding to the street 19 of the workpiece 11. By the relief groove 34c, the holding surface 34a of the holding jig 34 is divided into a plurality of regions corresponding to the respective chips to be divided from the workpiece 11. The width of the relief groove 34c is wider than the width of the cutting blade 21, and the depth of the relief groove 34c is deeper than the cutting depth of the cutting blade 21. Therefore, the cutting blade 21 does not interfere with the holding jig 34 even when the cutting blade 21 is deeply cut in cutting the workpiece 11 along the street 19. In addition, the holding jig 34 is formed thicker than the depth of the relief groove 34c.

In each region partitioned by the relief grooves 34c, pores (suction holes) 34d are formed to penetrate the holding jig 34 up and down and open to the holding surface 34a. As shown in FIG. 6, when the holding jig 34 is mounted on the upper surface 32a of the jig base 32, each pore 34d is formed in the center part of the upper surface 32a side of the jig base 32. As shown in FIG. It communicates with the 1st suction port 32b.

The 1st suction port 32b is connected to the suction source (negative pressure transmission part) 38 through the 1st solenoid valve 36a. This suction source 38 transmits negative pressure to each of the pores 34d via the first suction port 32b. For this reason, the workpiece | work 11 is superposed on the holding surface 34a of the holding jig 34 in the state mounted on the upper surface 32a of the jig base 32, and corresponds to each chip of the workpiece 11 After the area is aligned with the respective pores 34d, the first solenoid valve 36a is opened to suck and hold the workpiece 11 on the holding table 30. Moreover, the 2nd suction opening 32c for attaching the holding jig 34 to the jig base 32 is formed in the outer peripheral part of the upper surface 32a side of the jig base 32. As shown in FIG. This second suction port 32c is connected to the suction source 38 via the second solenoid valve 36b. For this reason, when the lower surface 34b of the holding jig 34 is brought into contact with the upper surface 32a of the jig base 32, and the second solenoid valve 36b is opened, the holding jig 34 is placed on the jig base 32. It can attach to the upper surface 32a.

As shown in FIG. 1, while the upper surface of the apparatus main body 2 extends along the Y-axis direction, the door-shaped support structure 5 arrange | positioned over the holding table 30 is formed. The output conveyance unit 40 and the cut-out conveyance unit 50 are formed in the said support structure 5. The calculation conveyance unit 40 moves the cutting unit 20 in the Y-axis direction which is a calculation conveyance direction parallel to the holding surface 34a of the holding table 30 and orthogonal to the X-axis direction, thereby maintaining the holding table ( 30) and the cutting unit 20 are relatively computed and conveyed along the Y-axis direction. As shown in FIG. 1, the calculation transfer unit 40 is disposed in the support structure 5 and is disposed in parallel with the pair of guide rails 41 extending in the Y-axis direction and these guide rails 41. The ball screw 42 and the nut (not shown) which screw-connects this ball screw 42 are provided inside, and the blade movement base 43 which moves along the guide rail 41 is provided. A pulse motor (not shown) for rotating the ball screw 42 is connected to one end of the ball screw 42, and the blade movement base 43 is guide rail 41 by the rotation of the ball screw 42. Along the Y axis.

The cutting feed unit 50 moves the cutting unit 20 in the Z-axis direction, which is the cutting feed direction orthogonal to the holding surface 34a of the holding table 30, thereby holding the holding table 30 and the cutting unit 20. Is to infeed along the Z axis. The infeed transfer unit 50 includes a pair of guide rails 51 disposed on the blade movement base 43 and extending in the Z-axis direction, ball screws 52 formed in parallel with these guide rails 51; And a cutting feed base 53 having a nut (not shown) for screwing with the ball screw 52 and moving along the guide rail 51. The cutting unit 20 described above is supported by the infeed transfer base 53. Moreover, the pulse motor 54 which rotates the ball screw 52 is connected to one end of the ball screw 52, and the infeed feed base 53 is guide rail 51 by the rotation of the ball screw 52. Moreover, as shown in FIG. And move along the Z axis.

The cutting unit 20 is such that the cutting blade 21 can be positioned at any position of the holding surface 34a of the holding table 30 by the calculating transfer unit 40 and the infeed transfer unit 50. It is. As shown in FIG. 6, the cutting unit 20 includes a housing 23, a spindle 22, a mount flange (flange) 24, a cutting blade 21, and a fixing nut 25. do. In addition, although illustration is abbreviate | omitted, the cutting unit 20 is equipped with the blade edge of the cutting blade 21 at the time of a cutting process, and the nozzle which supplies cutting water toward a processing point, respectively.

The cutting blade 21 is a so-called hub blade, which is fixed to the outer periphery of a disk-shaped base 21A formed of metal (for example, aluminum) and forms an annular cutting edge 21B for cutting the workpiece 110. Equipped. The cutting edge 21B is formed to a predetermined thickness composed of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and bond materials (bonding materials) such as metals and resins. Moreover, you may use the washer blade comprised only by a cutting edge as a cutting blade.

The spindle 22 cuts the workpiece 11 by rotating the cutting blade 21. The spindle 22 is accommodated in the housing 23, which is supported by the infeed transport base 53 of the infeed transport unit 50. The axis centers of the spindle 22 and the cutting blade 21 of the cutting unit 20 are set parallel to the Y axis direction. In addition, one end side of the spindle 22 projects outward from one end of the housing 23, and a motor (not shown) for rotating the spindle 22 is provided on the other end side of the spindle 22. It is connected. Moreover, the mount flange 24 is attached to the outer periphery of one end (tip) of the spindle 22.

The mount flange 24 supports the cutting blade 21. The mount flange 24 is made of metal and has a cylindrical boss portion 24A attached to the outer circumference of one end of the spindle 22 and a flange portion 24B extending radially outward from the outer circumferential surface of the boss portion 24A. It is provided. The mount flange 24 is fixed to the spindle 22 by inserting one end of the spindle 22 into the boss portion 24A and screwing the bolt 26 into one end of the spindle 22. In addition, the cutting blade 21 is fitted to the outer circumferential portion of the boss portion 24A, and the fixing nut 25 is screwed to the outer circumference of the boss portion 24A. Thereby, the base 21A of the cutting blade 21 is clamped by the fixing nut 25 and the mount flange 24 to fix it. The flange portion 24B of the mount flange 24 is formed with a cross section 24C that contacts the base 21A of the cutting blade 21 and supports the cutting blade 21. Moreover, as shown in FIG. 1, the imaging unit 29 which image | photographs the upper surface of the to-be-processed object 11 is fixed to the cutting unit 20 so that it may move integrally. The imaging part 29 is equipped with the CCD camera which image | photographs the area | region which should be divided | divided into the to-be-processed object 11 hold | maintained by the holding table 30. As shown in FIG. The CCD camera captures an image of the workpiece 11 held on the holding table 30, and acquires an image for performing alignment of the workpiece 11 and the cutting blade 21.

By the way, as mentioned above, the cutting blade 21 clamps the base 21A of the cutting blade 21 by the fixing nut 25 and the end surface 24C of the mount flange 24, and is fixing it. Here, for example, a part of the aluminum metal forming the base 21A is attached to the end face 24C of the mount flange 24, so that the end face 24C of the mount flange 24 is not flat or has a cross section. If the angle formed between the shaft center of 24C and the spindle 22 is not at right angles, there is a possibility that a problem arises that the cutting blade 21 is rattled at the time of rotation of the spindle 22 and cannot be cut accurately. . For this reason, the cutting device 1 is equipped with the cross section correction jig 100 which corrects the end surface 24C of the mount flange 24. As shown in FIG. This end surface modification jig 100 grinds the end surface 24C of this mount flange 24 regularly or at the time of replacing the mount flange 24, and this end surface 24C and the shaft center of the spindle 22 are carried out. This angle is corrected to a plane perpendicular.

In this embodiment, as shown in FIG. 4, the cross-sectional correction jig 100 is formed in the holding jig 34 of the holding table 30. Specifically, the cross-sectional correction jig 100 is formed in one corner portion 34f in which the relief groove 34c in the holding jig 34 is not formed, so as not to interfere with the relief groove 34c. . The cross-sectional correction jig 100 includes a grinding grindstone 101 for grinding the end face 24C of the mount flange 24, a grindstone support member 102 for supporting (holding) the grinding grindstone 101, and these grinding operations. It is comprised by the fixing screw 103 which fixes the grindstone 101 and the grindstone support member 102 to the holding jig 34.

As shown in FIG. 7, an end portion 34g lower than the holding surface 34a is formed in the corner 34f of the holding jig 34, and the end portion 34g and the grindstone supporting member ( 102, the grinding grinder 101 is pinched. The grindstone support member 102 is fixed to the side surface of the holding jig 34 (holding table 30) so as to face the end face 24C of the mount flange 24. Moreover, in this embodiment, when the grindstone support member 102 is fixed to the edge part 34g, the upper surface 102a of the grindstone support member 102 is a surface with the holding surface 34a, or it is hold | maintained. Lower than cotton For this reason, the grindstone support member 102 prevents the operation | movement which hold | maintains the to-be-processed object 11 to the holding surface 34a of the holding jig 34, and performs a cutting process to the to-be-processed object 11. can do. In addition, the fixing screw 103 is fixed to the end portion 34g through a through hole (not shown) formed in the grindstone support member 102. Since the head part of the fixing screw 103 is accommodated in the through-hole, it can prevent that this head part inhibits the series of operation | movement which performs the cutting process to the to-be-processed object 11. Moreover, the grindstone support member is provided with the upper block and the lower block which hold | maintain the grinding grindstone 101, and fix a lower block to 34 g of edges in the state which clamped the grinding grindstone 101 between this upper block. You can also do it. According to this structure, it becomes easy to form said edge part 34g in the holding surface 34a of the holding jig 34. As shown in FIG.

Next, the operation procedure of the cross-sectional correction which concerns on this embodiment is demonstrated. Cross-sectional correction is performed regularly or at the time of replacing the mount flange 24 of the cutting unit 20. The operator stops the operation of the cutting device 1, and removes the fixing nut 25 and the cutting blade 21 (FIG. 6) of the cutting unit 20. In addition, the mount flange 24 may be removed from the spindle 22, and a new mount flange 24 may be mounted on the spindle 22. In these states, as shown in FIG. 7, the mount flange 24 is in a state where the end face 24C is exposed.

Next, the calculation transfer unit 40 and the infeed transfer unit 50 are operated so that the cutting unit 20 is positioned at a position facing the grinding grindstone 101 of the cross-section correcting jig 100. And the calculation transfer unit 40 is operated and the cutting unit 20 is Y-axised to the predetermined position which the end surface 24C of the mount flange 24 and the grinding grindstone 101 contact as shown in FIG. Calculate and transfer in the

Next, while rotating the spindle 22, the mount flange 24 is sent to the calculation transfer unit 40 by a predetermined grinding distance in the Y axis direction. Then, the machining flange unit 24 mounts the holding table 30, that is, the grinding grindstone 101 into the grinding grindstone 101 while reciprocating within a predetermined range capable of contacting the end face 24C in the X axis direction. The end surface 24C of ()) is ground. In this way, the end surface 24C of the mount flange 24 is flat, and the angle which makes | forms with the axis center of the spindle 22 can be corrected at right angle.

As mentioned above, the cutting device 1 which concerns on this embodiment is the holding table 30 holding the to-be-processed object 11 in which the several street 19 which intersects is set, and the to-be held by the holding table 30 is shown. The cutting blade 21 which cuts the workpiece | work 11, the spindle 22 which rotates the cutting blade 21, and the cutting blade 21 are clamped by the cross section 24C at the front-end | tip of the spindle 22, and are fixed. The mounting flange 24 is provided, and the holding table 30 includes a holding jig 34 having a holding surface 34a for holding the workpiece 11 and a workpiece 11 held on the holding surface 34a. Negative pressure is transmitted to the plurality of relief grooves 34c formed at positions corresponding to the streets 19 of the plurality), the plurality of pores 34d formed in the respective regions partitioned by the relief grooves 34c, and the pores 34d. The end face 24 of the mount flange 24 is attached to the holding jig 34 while having a suction source 38 to be provided. The cross-section correction jig 100 including the grinding grindstone 101 for grinding C) and the grindstone support member 102 holding the grinding grindstone 101 is formed.

According to this structure, the cross-section correction which includes the grinding grindstone 101 which grinds the end surface 24C of the mount flange 24 to the holding jig 34, and the grindstone support member 102 which holds the grinding grindstone 101 is carried out. Since the jig 100 is formed, correction of the end surface 24C of the mount flange 24 can be performed easily, without replacing and holding the holding table 30 which has the holding jig 34. Moreover, since it is not necessary to separately prepare the sub chuck table holding a cross-section correction jig like a conventional structure, for example, expansion of the footprint of the cutting device 1 can be prevented.

Moreover, according to this embodiment, the grindstone support member 102 is formed below the height of the holding surface 34a of the holding jig 34, and is hold | maintained by the holding jig | tool so that it may oppose the end surface 24C of the mount flange 24. As shown in FIG. Since it is fixed to the side surface of 34, the grindstone support member 102 (cross section correcting jig 100) inhibits a series of operations for cutting the workpiece 11 held on the holding surface 34a. Can be prevented. For this reason, cutting of the to-be-processed object 11 can be performed, with the grindstone support member 102 (cross-section correcting jig 100) attached to the holding jig 34.

Next, another embodiment is described. 8 is a side view illustrating a state in which cross-sectional correction of a mount flange is performed by a cross-sectional correction jig according to another embodiment. In the above-described embodiment, the cross-sectional correction jig 100 has a configuration formed in the holding jig 34 of the holding table 30, but in this other embodiment, the cross-sectional correction jig 100A includes the holding table 30. ) Is formed on the jig base 32. Since the structural member of the cross-sectional correction jig 100A is the same as that of the said structure, the same code | symbol is attached | subjected and description is abbreviate | omitted.

In this other embodiment, the cross-sectional correction jig 100A is formed in one corner 32f of the jig base 32. This corner portion 32f corresponds to the position of the corner portion 34f of the holding jig 34. As shown in FIG. 8, the edge part 32g lower than the upper surface 32a of the jig base 32 is formed in the corner part 32f of the jig base 32, and this end 32g and a grindstone support member are provided. The grinding grindstone 101 is pinched by 102. As shown in FIG. This grindstone support member 102 is fixed to the side surface of the jig base 32 (holding table 30) so as to face the end face 24C of the mount flange 24. In addition, in this embodiment, when the grindstone support member 102 is fixed to the edge part 32g, the upper surface 102a of the grindstone support member 102 becomes planar with the upper surface 32a of the jig base 32. As shown in FIG. For this reason, it can prevent that the grindstone support member 102 (cross-section correcting jig 100A) inhibits attachment of the holding jig 34 to the upper surface 32a of the jig base 32. As shown in FIG. In addition, the fixing screw 103 is fixed to the end portion 32g through a through hole (not shown) formed in the grindstone support member 102. Since the head part of the fixing screw 103 is accommodated in the through-hole, it can prevent that this head part inhibits attachment of the holding jig 34 to the upper surface 32a of the jig base 32. As shown in FIG.

In addition, this invention is not limited to the said embodiment. That is, it can be carried out in a variety of modifications within the scope not to deviate from the bone of the present invention.

1: cutting device
11: Workpiece
19: Street (line to be split)
20: cutting unit
21: cutting blade
22: spindle
23: housing
24: Mount Flange (Flange)
24C: cross section
30: Retention Table
32: jig base
32a: top surface
32f: corner
32g: end
34: retaining jig
34a: holding surface
34c: relief groove (relief groove for cutting blade)
34d: Handwork (suction ball)
34f: corner
34g: end
38: suction source (negative pressure transmission unit)
40: output transfer unit
50: infeed unit
100, 100A: Cross Section Fixing Jig
101: grinding stone
102: grindstone support member
102a: upper surface
103: fixing screw

Claims (2)

A holding table for holding the workpieces in which a plurality of divided scheduled lines to intersect are set;
Cutting blades for cutting the workpieces held on the holding table;
A spindle for rotating the cutting blade,
A cutting device having a flange for clamping and cutting the cutting blade in cross section at the tip of the spindle,
Its retention table,
A holding surface for holding the workpiece,
A plurality of relief grooves for cutting blades formed at positions corresponding to the division scheduled lines of the workpiece held on the holding surface;
A plurality of suction holes formed in each area partitioned by the cutting blade relief groove;
A negative pressure transmission unit for transmitting a negative pressure to the suction hole,
The grinding apparatus which comprises the grinding grindstone which grinds the cross section of the flange, and the grindstone support member which hold | maintains the grinding grindstone. The method of claim 1,
The grindstone support member,
Is formed to be less than the height of the holding surface,
And a cutting device fixed to the side of the holding table so as to face a cross section of the flange.

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