JP7408244B2 - Chuck table, table base, and chuck table fixing mechanism - Google Patents

Description

The present invention relates to a chuck table used in a spinner cleaning device or the like built into a processing device that processes a workpiece, a table base that holds the chuck table, and a chuck table fixing device that fixes the chuck table to the table base. Regarding the mechanism.

Device chips used in electronic devices such as mobile phones and computers are manufactured from wafers made of materials such as silicon and silicon carbide. First, multiple dividing lines that intersect with each other are set on the wafer surface, and devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area defined by the dividing lines on the wafer surface. do. Next, the wafer is thinned by grinding from the back side, and the wafer is divided along the planned division lines to form individual device chips.

In processing equipment such as a grinding device that grinds a wafer or a cutting device that divides a wafer, processing debris generated during processing adheres to the wafer, so a spinner cleaning device that can clean the wafer after processing is incorporated into the processing device. (See Patent Document 1). The spinner cleaning device includes a chuck table that holds a wafer, a table base that rotatably holds the chuck table, and a cleaning nozzle that sprays cleaning water from above onto the wafer held by the chuck table.

Japanese Patent Application Publication No. 2011-176035

In the spinner cleaning device, the chuck table is fixed to the upper end of the table base with a plurality of fixing screws. And the chuck table is replaced regularly. When replacing the chuck table, each fixing screw is loosened with a tool, the old chuck table is removed from the table base, a new chuck table is placed on the table base, and the fixing screws are tightened.

As described above, when attaching and detaching the chuck table, it is necessary to loosen and tighten a plurality of fixing screws, which takes a lot of man-hours. In particular, when tightening a fixing screw, it is necessary to tighten the fixing screw to a specific torque. If the fixing screws are not tightened in accordance with the prescribed procedure, the chuck table may not be properly fixed to the table base, the chuck table may not be able to properly hold the wafer, and the chuck table may not rotate properly. .

The present invention has been made in view of such problems, and its objects are to provide a chuck table that can be fixed to a table base without using fixing screws, a table base that can fix the chuck table, and a table base that can fix the chuck table. It is an object of the present invention to provide a table fixing mechanism that is fixed to the table base.

According to one aspect of the present invention, there is provided a chuck table that has a mounting surface and is mounted and fixed on a table base that rotates around an axis along a direction perpendicular to the mounting surface, the upper surface of which A porous portion that serves as a holding surface, and a frame that surrounds the porous portion so as to be exposed upward, and the frame is provided on the outer periphery of the table base and has a claw portion at the top and can be opened and closed. The outer periphery has a plurality of engagement grooves each having a protrusion that can receive the claws of the plurality of engagement parts, and when the engagement part is in the closed state, the claws engage the protrusions of the engagement groove. The table base can be fixed on the mounting surface of the table base by being hooked onto the mounting surface of the table base, and the claw portion is no longer hooked onto the protrusion of the engagement groove when the engagement portion is in an open state. A chuck table is provided that is characterized in that fixation to the chuck table can be released.

Preferably, the engagement groove penetrates vertically and is set back inward from the outer circumferential surface of the frame, and the protrusion is directed toward the outside of the frame inside the engagement groove. The engagement groove can accommodate the engagement portion so that the engagement portion does not remain outside the outer peripheral surface of the frame when the engagement portion is in the closed state.

Furthermore, preferably, the lower surface of the frame facing the mounting surface is provided with a plurality of regulation holes inserted into each of the plurality of regulation protrusions provided on the mounting surface, and By inserting the regulating protrusions into the regulating holes, it is possible to prevent the frame from shifting and rotating relative to the table base.

Alternatively, preferably, the lower surface of the frame facing the mounting surface is provided with a plurality of regulation protrusions that can be inserted into each of the plurality of regulation holes provided in the mounting surface. By inserting the regulating protrusions into the regulating holes, it is possible to prevent the frame from shifting and rotating relative to the table base.

According to another aspect of the present invention, there is provided a table base to which a chuck table can be fixed, which includes a porous portion whose upper surface serves as a holding surface, and a frame surrounding the porous portion so as to be exposed upward. The chuck table has an upwardly exposed mounting surface on which the chuck table is mounted, and a plurality of engagement portions that can respectively engage with a plurality of engagement grooves provided on the outer periphery of the frame body are provided on the outer peripheral surface. , the plurality of engaging portions include a fixed shaft along the outer peripheral surface, a main body rotatably penetrated by the fixed shaft, and a claw portion provided on the main body above the fixed shaft; a closed state in which the chuck table is fixed by rotating the main body around the fixing shaft so that each of the claws is engaged with the protrusion of the plurality of engagement grooves each having a protrusion inside; and an open state in which the chuck table is released from being fixed by removing the claw from the protrusion of the engagement groove.

Preferably, the elastic member further includes an elastic member having one end fixed to the main body of the engaging portion below the fixed shaft, the other end of the elastic member being fixed to the outer peripheral surface, and the elastic member The closed state is maintained by urging outward a portion of the main body of the engaging portion that is below the fixed shaft.

Furthermore, preferably, the mounting surface facing the lower surface of the frame is provided with a plurality of restriction protrusions that can be inserted into each of the plurality of restriction holes provided in the lower surface of the frame, By inserting the regulating protrusions into the regulating holes, it is possible to prevent the frame from shifting and rotating relative to the mounting surface.

Alternatively, preferably, the mounting surface facing the lower surface of the frame is provided with a plurality of regulation holes that are inserted into each of the plurality of regulation protrusions provided on the lower surface of the frame, By inserting the regulating protrusions into the plurality of regulating holes, it is possible to prevent the frame from shifting and rotating with respect to the mounting surface.

According to still another aspect of the present invention, a chuck table includes a porous portion whose upper surface serves as a holding surface, and a frame body surrounding the porous portion so as to be exposed upward. A chuck table fixing mechanism for fixing a chuck table to a table base, the table base having a plurality of openable/closable engaging parts each having a claw part on its outer periphery; It has a plurality of engagement grooves on the outer periphery that are provided with protrusions that can receive the claws of the engagement part, and the plurality of engagement parts have a fixed shaft along the outer circumferential surface, and a plurality of engagement grooves that rotatably penetrate the fixed shaft. and a main body provided with the claw portion above the fixed shaft, and by rotating the main body of the engaging portion around the fixed shaft, the engaging groove can be opened. The chuck table is fixed to the table base by hooking the claw part of the engaging part onto the protrusion, and the chuck table is in a closed state when the claw part of the engaging part is removed from the protrusion of the engagement groove. A chuck table fixing mechanism is provided that is capable of switching between an open state in which the fixation of the chuck table to the table base is released.

Preferably, a plurality of regulation holes are provided in one of the lower surface of the frame of the chuck table and the mounting surface of the table base, and the lower surface of the frame of the chuck table and the mounting surface of the table base are preferably provided with a plurality of regulation holes. , the other of the mounting surface of the table base is provided with a plurality of regulation protrusions that can be inserted into each of the plurality of regulation holes, and each of the plurality of regulation protrusions is inserted into each of the plurality of regulation holes. By inserting either one of them, it is possible to prevent the frame from shifting in position and rotation with respect to the table base.

In the chuck table, table base, and chuck table fixing mechanism according to one aspect of the present invention, the claw portion of the engaging portion provided on the table base is connected to the protrusion of the engaging groove provided on the frame of the chuck table. It is fixed by hanging it. The engaging portion can be opened and closed, and by opening the engaging portion, the claw portion of the engaging portion no longer engages with the protrusion of the engaging groove, and the fixation is released. That is, the chuck table can be attached to and detached from the table base without using fixing screws.

Therefore, when replacing the chuck table, the work of loosening and tightening the fixing screws is not necessary, and the number of man-hours can be reduced. Furthermore, there is no room for problems caused by incorrect tightening procedures of the fixing screws.

Therefore, according to the present invention, there are provided a chuck table that can be fixed to a table base without using fixing screws, a table base that can fix the chuck table, and a table fixing mechanism that fixes the chuck table to the table base.

FIG. 1 is a perspective view schematically showing a cutting device including a cleaning device. FIG. 2 is a perspective view schematically showing a chuck table, a table base, and a chuck table fixing mechanism. FIG. 2 is an enlarged perspective view schematically showing the cut chuck table, table base, and chuck table fixing mechanism. FIG. 4(A) is a cross-sectional view schematically showing the chuck table placed above the table base, and FIG. 4(B) is a schematic cross-sectional view showing the chuck table pushed into the table base from above. FIG. FIG. 5(A) is a cross-sectional view schematically showing the chuck table fixed to the table base, and FIG. 5(B) is a chuck that is released from being fixed to the table base by opening the engaging part. It is a sectional view showing a table typically. FIG. 6(A) is a cross-sectional view schematically showing a chuck table having a porous portion with a relatively large diameter, and FIG. 6(B) is a sectional view schematically showing a chuck table having a porous portion with a relatively small diameter. FIG.

A chuck table, table base, and chuck table fixing mechanism according to this embodiment will be described with reference to the accompanying drawings. The chuck table, table base, and chuck table fixing mechanism according to this embodiment are used, for example, in a spinner cleaning device (cleaning unit) incorporated in a cutting device that cuts a workpiece. First, a cutting device including a cleaning unit will be described. However, the cleaning unit may be incorporated into a device other than the cutting device, or may be independent. FIG. 1 is a perspective view schematically showing the cutting device 2. As shown in FIG.

The workpiece (not shown) cut by the cutting device 2 is made of, for example, Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductor materials. A substantially disk-shaped wafer is formed. Alternatively, the workpiece is a plate-shaped substrate made of a material such as sapphire, quartz, glass, or ceramics. Examples of the glass include alkali glass, non-alkali glass, soda lime glass, lead glass, borosilicate glass, and quartz glass.

A plurality of planned dividing lines that intersect with each other are set on the surface of the workpiece, and devices such as ICs and LSIs are formed in each area defined by the planned dividing lines on the surface of the workpiece. By grinding the workpiece from the back side to make it thin, and cutting and dividing the workpiece along the planned division lines, individual device chips can be formed.

The workpiece is affixed, for example, to a tape affixed to the annular frame, and is handled integrally with the annular frame. When a workpiece is handled using an annular frame and a tape, the workpiece can be protected from shocks and the like that occur when the workpiece is transported. Furthermore, by expanding the tape, the distance between the chips formed by dividing the workpiece can be increased, making it easier to pick up the chips.

The cutting device 2 includes a base 4 that supports each component. An opening is formed in the front corner of the base 4, and a cassette support 6 that is raised and lowered by a lifting mechanism (not shown) is provided within this opening. A cassette 8 that accommodates a plurality of workpieces is disposed on the upper surface of the cassette support base 6. Note that, in FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

A rectangular opening 4a is formed on the side of the cassette support base 6 so that its longitudinal direction is along the X-axis direction (processing feed direction). A ball screw type X-axis moving mechanism (not shown), a table cover 10 and a bellows-shaped dustproof and drip-proof cover 12 that cover the upper part of the X-axis moving mechanism are arranged in the opening 4a. The X-axis moving mechanism includes an X-axis moving table (not shown) covered by a table cover 10, and moves this X-axis moving table in the X-axis direction.

A chuck table 14 is disposed on the upper surface of the X-axis moving table so as to be exposed from the table cover 10. The chuck table 14 has a function of sucking and holding a workpiece placed on an upwardly exposed holding surface 14a. The chuck table 14 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis that is generally parallel to the Z-axis direction (vertical direction). Further, the chuck table 14 is moved in the X-axis direction together with the X-axis moving table and the table cover 10 by the X-axis moving mechanism.

The chuck table 14, which holds the workpiece by suction, has a porous portion on its upper surface having the same diameter as the workpiece. The upper surface of the porous portion becomes a holding surface 14a that sucks and holds the workpiece. A suction path is formed inside the chuck table 14 and has one end connected to a suction source such as an ejector provided outside the chuck table 14 . The other end of the suction path reaches the porous portion. Furthermore, clamps 14b are provided around the chuck table 14 for fixing the annular frame that supports the workpiece from all sides.

The cutting device 2 includes a transport unit (not shown) that transports the workpiece from the cassette 8 to the chuck table 14 or the like in a region adjacent to the opening 4a. A cutting unit 38 that cuts the wafer 1 with an annular cutting blade 44 is disposed above the chuck table 14 . A support structure 16 for supporting the cutting unit 38 is arranged on the upper surface of the base 4. The support structure 16 is provided with an arm portion 18 at an upper portion that extends above the opening 4a and across the opening 4a.

An index feed unit 20 is provided at the upper front surface of the support structure 16 to move the cutting unit 38 in the Y-axis direction (index feed direction). The indexing and feeding unit 20 includes a pair of Y-axis guide rails 22 extending along the Y-axis direction on the front surface of the support structure 16. A Y-axis moving plate 24 is slidably mounted on the pair of Y-axis guide rails 22 . A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 24, and a Y-axis ball screw 26 parallel to the Y-axis guide rail 22 is screwed into this nut portion.

A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 26 . By rotating the Y-axis ball screw 26 by the Y-axis pulse motor, the Y-axis moving plate 24 moves in the Y-axis direction along the Y-axis guide rail 22.

An elevating unit 28 that moves the cutting unit 38 up and down along the Z-axis direction (vertical direction) is provided on the surface (front surface) of the Y-axis moving plate 24. The lifting unit 28 includes a pair of Z-axis guide rails 30 along the Z-axis direction on the surface of the Y-axis moving plate 24. A Z-axis moving plate 32 is slidably attached to the pair of Z-axis guide rails 30.

A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 32, and a Z-axis ball screw provided along the direction parallel to the Z-axis guide rail 30 is attached to this nut portion. 34 are screwed together. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34, and by rotating the Z-axis ball screw 34 with the Z-axis pulse motor 36, the Z-axis moving plate 32 is moved along the Z-axis guide rail 30. to move in the Z-axis direction.

A cutting unit 38 is fixed to the lower part of the Z-axis moving plate 32. An imaging unit 40 is provided adjacent to the cutting unit 38 to take an image of the workpiece held by the chuck table 14 and to detect the position of the line to be divided. The indexing and feeding unit 20 controls the positions of the cutting unit 38 and the imaging unit 40 in the Y-axis direction, and the elevating unit 28 controls the positions of the cutting unit 38 and the imaging unit 40 in the Z-axis direction.

An annular cutting blade 44 is rotatably mounted on the cutting unit 38 . The cutting blade 44 includes countless abrasive grains such as diamond and a binding material that disperses and holds the abrasive grains. When the cutting blade 44 is rotated to cut into the workpiece, the abrasive grains exposed on the surface of the bonding material hit the workpiece, and the workpiece is cut.

When cutting the workpiece held on the chuck table 14, the chuck table 14 and the cutting unit 38 are moved relatively to align the cutting blade 44 with the planned dividing line of the workpiece. Next, the cutting unit 38 is lowered to a predetermined height while the cutting blade 44 is being rotated, and the chuck table 14 is processed and fed along the X-axis direction. When the cutting edge of the rotating cutting blade 44 comes into contact with the workpiece, the workpiece is cut and divided.

An opening 4b is formed at a position opposite to the cassette support base 6 with respect to the opening 4a. A cleaning unit (spinner cleaning device) 42 for cleaning the workpiece after cutting is arranged within the opening 4b. The cleaning unit 42 includes a chuck table 48 that rotates while holding a workpiece, and a spray nozzle 46 that sprays cleaning water onto the workpiece held by the chuck table 48 from above. The workpieces cleaned by the cleaning unit 42 are stored in the cassette 8 again.

The cleaning unit 42 includes a rotatable table base to which a chuck table 48 can be fixed. FIG. 2 is a perspective view schematically showing the chuck table 48 and the table base 60. The chuck table 48 and the table base 60 are made of, for example, stainless steel.

The chuck table 48 includes a porous portion 50 whose upper surface serves as a holding surface 50a for a workpiece, and a frame 52 surrounding the porous portion 50 so as to be exposed upward. The upper surface of the table base 60 serves as a mounting surface 60b (see FIG. 3, etc.) on which the chuck table 48 is mounted. The table base 60 is rotatable around an axis along a direction perpendicular to the mounting surface 60b. A motor (not shown) serving as a rotational drive source for rotating the table base 60 is connected to the bottom of the table base 60 .

A first suction path (not shown) is provided inside the frame 52 of the chuck table 48, with one end reaching the porous portion 50 and the other end reaching the lower surface of the frame 52. A second suction path (not shown) is provided inside the table base 60 to be connected to the first suction path of the frame 52 when the chuck table 48 is fixed to the table base 60. . That is, one end of the second suction path reaches the mounting surface 60b of the table base 60. A suction source (not shown) is connected to the other end of the second suction path.

When the chuck table 48 is fixed to the table base 60, a workpiece is placed on the holding surface 50a of the chuck table 48, and the suction source is activated, the workpiece is moved through the second suction path, the first suction path, and the porous portion. Negative pressure is applied to the workpiece, and the workpiece is held under suction. In this state, the chuck table 48 is rotated by rotating the table base 60, and the cleaning liquid is sprayed onto the workpiece from the injection nozzle 46, thereby cleaning the workpiece.

When the cleaning unit 42 cleans the workpiece supported by the annular frame through the tape, a frame is provided on the outer periphery of the frame 52 of the chuck table 48 to hold down the annular frame that supports the workpiece through the tape. It is preferable that a holding portion 88 is provided. The frame holding part 88 includes a support part 90 whose one end is fixed by a fixing part 92 of the frame body 52, and a frame presser 94 rotatably provided at the other end of the support part 90.

The frame presser 94 includes a claw portion 96 provided at an upper portion and a weight portion 98 provided at a lower portion. When an annular frame is placed on the support part 90 and the workpiece is sucked and held by the chuck table 48 via the tape, and the table base 60 is rotated at high speed, the weight part 98 moves outward due to centrifugal force and the claw part 96 falls inward. Then, the claw portion 96 presses the annular frame from above.

Here, since the chuck table 48 is rotated at high speed when cleaning the workpiece, it is necessary to firmly fix the chuck table 48 to the table base 60. Conventionally, when fixing the chuck table 48 to the table base 60, a plurality of fixing screws have been used. That is, the frame 52 of the chuck table 48 was provided with a plurality of through holes, and the mounting surface 60b of the table base 60 was provided with a plurality of screw holes at positions corresponding to the through holes.

The chuck table 48 needs to be replaced periodically. When replacing the chuck table 48, a plurality of fixing screws are loosened using a tool, the old chuck table 48 is removed from the table base 60, and a new chuck table 48 is placed on the mounting surface 60b of the table base 60. Then, a plurality of fixing screws are passed through the through holes provided in the frame body 52, and the fixing screws are tightened into respective screw holes provided in the table base 60 using a tool. As described above, attaching and detaching the chuck table 48 requires work using a tool and takes a lot of man-hours.

In particular, when fixing the chuck table 48 to the table base 60, it is necessary to tighten the fixing screws with a predetermined torque. If the procedure for tightening the fixing screws is incorrect, the chuck table 48 will not be properly fixed to the table base 60, and for example, the suction passages provided in the frame 52 and the table base 60 will not be able to communicate properly, and the workpiece There is a possibility that it will not be possible to suction and hold objects. Furthermore, there is a possibility that the chuck table 48 may be tilted and cannot be rotated appropriately.

Therefore, in the chuck table, table base, and chuck table fixing mechanism according to this embodiment, the chuck table is fixed without using fixing screws. The chuck table, table base, and chuck table fixing mechanism according to this embodiment will be described below. The chuck table fixing mechanism is a mechanism that can fix the chuck table to the table base without using fixing screws, and is provided on the table base to which the chuck table can be fixed, and the chuck table fixed to the table base.

FIG. 3 is a perspective view schematically showing a state in which the chuck table 48 fixed to the table base 60 is cut along a plane perpendicular to the holding surface 50a. In FIG. 3, the cut surface exposed to the outside is hatched. The chuck table 48 is fixed to the table base 60 by an openable and closable engaging portion 62 provided on the outer periphery of the table base 60.

The engaging part 62 includes a claw part 66 provided on the upper part of the main body 64, and the engaging part 62 can be chucked by hooking the claw part 66 onto a protrusion 56 provided in an engaging groove 54 formed on the outer periphery of the chuck table 48. The table 48 is fixed to the table base 60. The engaging portion 62 of the table base 60 and the engaging groove 54 of the frame 52 of the chuck table 48 are provided at positions corresponding to each other.

That is, the frame 52 of the chuck table 48 has a plurality of engagement grooves 54 on its outer periphery, each of which has a protrusion 56 that is provided on the outer periphery of the table base 60 and can receive the claws 66 of the plurality of engagement parts 62. Here, the engagement groove 54 penetrates vertically and is retreated inward from the outer circumferential surface 48a of the frame body 52. The protrusion 56 projects toward the outside of the frame 52 inside the engagement groove 54 .

Further, the plurality of engaging portions 62 provided on the outer peripheral surface 60a of the table base 60 are connected to a fixed shaft 68 along the outer peripheral surface 60a, a main body 64 rotatably penetrated by the fixed shaft 68, and a main body 64 rotatably penetrated by the fixed shaft 68. and a claw portion 66 provided on the main body 64 above the main body 64. The engaging portion 62 further includes an elastic member 70 having one end fixed to the main body 64 below the fixed shaft 68. The elastic member 70 is, for example, a coil spring, rubber, or the like. The other end of the elastic member 70 is fixed to the outer peripheral surface 60a of the table base 60.

The main body 64 of the engaging portion 62 is rotatable around a fixed shaft 68. By rotating the main body 64, the claws 66 are hooked onto the protrusions 56 of the engagement groove 54 of the frame body 52 to fix the chuck table 48, and the claws 66 are moved away from the protrusions 56 of the engagement groove 54. It can be switched between an open state in which it is removed and the chuck table 48 is released from being fixed.

To close the engaging portion 62, the main body 64 is rotated so that the claw portion 66 approaches the center of the table base 60. Further, in order to open the engaging portion 62, the main body 64 is rotated so that the claw portion 66 is separated from the center of the table base 60. The elastic member 70 maintains the closed state by urging the engaging portion 62 outwardly below the fixed shaft 68 of the main body 64.

When the operator presses the head 72, which is the topmost part of the main body 64 of the engaging portion 62, with his or her finger so as to move the head 72 toward the outside of the table base 60, the engaging portion 62 becomes open. The main body 64 can be rotated around the fixed axis 68 in this manner. Then, when the operator removes his/her finger from the head 72, the elastic member 70 causes the main body 64 to rotate in the opposite direction, and the engaging portion 62 returns to the closed state.

Further, the main body 64 of the engaging portion 62 is provided with a protruding stopper portion 74 above the fixed shaft 68 and below the claw portion 66. Furthermore, a stopper receiving part 76 is formed on the outer circumferential surface 60a of the table base 60 at a position facing the stopper part 74, and the stopper part 74 comes into contact with the stopper receiving part 76.

If the main body 64 of the engaging part 62 is tilted more than necessary in the closed state, when the main body 64 hits the chuck table 48 when the chuck table 48 is fixed to the table base 60, the engaging part 62 will be tilted more than necessary. It may not be in the open state. When the stopper part 74 and the stopper receiving part 76 are provided, when the main body 64 rotates to be in the closed state, the stopper part 74 hits the stopper receiving part 76, thereby preventing the main body 64 from tilting beyond a predetermined level. .

Next, the operation of the engaging portion 62 when fixing the chuck table 48 to the table base 60 will be explained. When fixing the chuck table 48 to the table base 60, the chuck table 48 is positioned above the table base 60, as shown in FIG. 4(A). At this time, the direction of the chuck table 48 is adjusted so that the lower surface 48b of the chuck table 48 faces the mounting surface 60b of the table base 60, and each engagement groove 54 and each engagement portion 62 overlap.

Thereafter, the chuck table 48 is lowered toward the table base 60. FIG. 4(B) is a cross-sectional view schematically showing the chuck table 48 and the table base 60 in a state in which the protrusion 56 of the engagement groove 54 is in contact with the claw portion 66 of the engagement portion 62. When the protrusion 56 of the engagement groove 54 hits the claw part 66 of the engagement part 62, the main body 64 of the engagement part 62 is pushed by the frame 52 of the chuck table 48, so that the engagement part 62 is opened. The main body 64 rotates.

At this time, it is preferable that the tip of the claw portion 66 and the tip of the protrusion 56 have a tapered shape or a curved surface so that the force is smoothly transmitted from the frame 52 to the main body 64 of the engaging portion 62. That is, it is preferable that a contact surface 66a is formed at the tip of the claw portion 66 in a shape that gradually recedes outward from the table base 60 from the lower end to the upper end of the tip. Further, it is preferable that the tip of the protrusion 56 is provided with a contact surface 56a having a shape that gradually retreats toward the center of the frame 52 from the upper end to the lower end of the tip.

In this case, when the chuck table 48 is lowered toward the table base 60, part of the force for lowering the chuck table 48 is generated by the contact surface 56a at the tip of the protrusion 56 and the contact surface 66a at the tip of the claw portion 66. is converted into a force that opens the engaging portion 62. Then, as shown in FIG. 4(B), the main body 64 gradually rotates against the elastic member 70.

When the tip of the claw portion 66 reaches the tip of the protrusion 56 and the chuck table 48 is further pushed down and the contact surfaces 56a, 66a are separated, the force that opens the engagement portion 62 is applied to the engagement. It no longer touches the joining part 62. Then, the main body 64 is rotated in the opposite direction by the elastic member 70, and the engaging portion 62 is closed again. Then, as shown in FIGS. 3 and 5A, the lower surface of the claw portion 66 comes into contact with the upper surface of the protrusion 56, and the protrusion 56 is pressed down from above by the claw portion 66. At this time, the chuck table 48 is fixed to the table base 60 by the engaging portion 62.

Note that the engagement groove 54 is located above the protrusion 56 so that the claw portion 66 of the engagement portion 62 is accommodated in the engagement groove 54 of the frame 52 when the chuck table 48 is fixed to the table base 60. It is preferable that a recessed portion of a size capable of accommodating the claw portion 66 is formed in the recessed portion. In addition, the body 64 of the engaging portion 62 has a size that can accommodate the protrusion 56 under the claw portion 66 so that the protrusion 56 provided in the engaging groove 54 is accommodated in the body 64 of the engaging portion 62. It is preferable that a recess is formed.

As described above, in the chuck table, table base, and chuck table fixing mechanism according to this embodiment, the chuck table can be fixed to the table base without tightening the fixing screws with a tool. The operator can very easily fix the chuck table 48 to the table base 60 by simply pushing the chuck table 48 down toward the table base 60.

That is, there is no need for complicated work such as tightening fixing screws to a predetermined torque, and the number of man-hours for fixing the chuck table 48 to the table base 60 can be significantly reduced. Further, no special procedure is required for achieving fixation, and fixation does not fail.

After the chuck table 48 is fixed to the table base 60, the cleaning unit 42 cleans the workpiece. At this time, the table base 60 and chuck table 48 are rotated at high speed. Here, if the engaging part 62 that fixes the chuck table 48 to the table base 60 protrudes outside the chuck table 48 and the table base 60, air resistance is applied to the engaging part 62, which prevents the table base 60 from rotating. It ends up.

Therefore, as shown in FIG. 3 etc., the engagement groove 54 of the frame 52 of the chuck table 48 is designed so that the engagement groove 54 does not remain outside the outer peripheral surface 48a of the frame 52 when the engagement portion 62 is in the closed state. It is preferable that the shape is such that the joint portion 62 can be accommodated therein. In particular, when the engaging portion 62 is placed in the engaging groove 54 with the engaging portion 62 in the closed state, the outer circumferential surface 48a of the frame 52 and the outer circumferential surface of the main body 64 of the engaging portion 62 are continuous. is preferred.

Further, when the table base 60 is rotated, a mechanism is provided in the chuck table 48 and the table base 60 to prevent the frame 52 of the chuck table 48 from shifting or rotating relative to the table base 60. Good too.

For example, a plurality of regulation holes 58 may be provided in the lower surface 48b of the frame 52 facing the mounting surface 60b of the table base 60, and a plurality of regulation protrusions 78 may be provided in the mounting surface 60b of the table base 60. may be provided. The regulation protrusions 78 and the regulation holes 58 are arranged so that the plurality of regulation protrusions 78 are inserted into each of the plurality of regulation holes 58 when the chuck table 48 is fixed to the table base 60 in an appropriate direction. placed in the corresponding position.

In this case, as shown in FIG. 5(A), when the chuck table 48 is fixed to the table base 60 by the engaging portion 62, the plurality of restriction protrusions 78 are inserted into each of the plurality of restriction holes 58. This can prevent the chuck table 48 (frame body 52) from shifting in the direction parallel to the mounting surface 60b and from rotating the chuck table 48 (frame body 52) in a plane parallel to the mounting surface 60b.

Note that the regulation protrusion 78 may be provided on the lower surface 48b of the frame 52 of the chuck table 48, and the regulation hole 58 may be provided on the mounting surface 60b of the table base 60. That is, a plurality of regulation holes 58 are provided in one of the lower surface 48b of the frame 52 of the chuck table 48 and the mounting surface 60b of the table base 60, and each of the plurality of regulation holes 58 is provided in the other. A plurality of insertable restriction protrusions 78 are provided.

Next, the release of fixation of the chuck table 48 by the engaging portion 62 will be explained. The fixation of the chuck table 48 is released by opening the engaging portion 62. That is, the operator inserts his finger into the engagement groove 54 from above between the head 72 of the main body 64 of the engagement portion 62 and the frame 52. The operator then pushes the head 72 away from the center of the table base 60 (outward) and rotates the main body 64 around the fixed shaft 68.

FIG. 5(B) is a cross-sectional view schematically showing the chuck table 48 and the table base 60 in a state where the head 72 of the main body 64 of the engaging portion 62 is pushed outward by the operator. When the engaging portion 62 is in the open state, the claw portion 66 of the engaging portion 62 no longer engages the protrusion 56 of the engaging groove 54, and the fixation of the chuck table 48 to the table base 60 is released.

At this time, the upper surface of the stopper part 74 of the engaging part 62 hits the lower surface 48b of the frame 52 of the chuck table 48, and pushes up the frame 52 from below. Here, the upper surface of the stopper portion 74 is preferably formed into a convex shape so that the frame 52 can be easily pushed up.

When the operator releases his finger from the head 72 of the main body 64 when the protrusion 56 of the engagement groove 54 is at a higher position than the claw 66 of the engagement part 62, the elastic member 70 64 is turned to bring the engaging portion 62 into the closed state. Then, the protrusion 56 rests on the claw portion 66, and the chuck table 48 floats off the mounting surface 60b of the table base 60. This makes it easier for the operator to lift the chuck table 48.

In this manner, the chuck table, table base, and chuck table fixing mechanism according to the present embodiment do not require the work of loosening the fixing screw with a tool when releasing the fixation of the chuck table and removing it from the table base. That is, the fixation of the chuck table 48 can be released by simply pushing the head 72 of the main body 64 of the engaging part 62 with a finger to open the engaging part 62. Therefore, the number of man-hours required to release the fixation can be significantly reduced.

Note that the cutting device 2 can cut workpieces of various sizes. When changing the size of the workpiece to be cut and cleaned, it is necessary to replace the chuck table 48 of the cleaning unit 42 so that the new workpiece can be sucked and held. FIG. 6(A) is a cross-sectional view schematically showing a chuck table 48 that can suction-hold a workpiece with a relatively large diameter, and FIG. 6(B) is a cross-sectional view schematically showing a chuck table 48 that can suction-hold a workpiece with a relatively small diameter. FIG. 8 is a cross-sectional view schematically showing a chuck table 80 that can be manufactured.

The chuck table 80 shown in FIG. 6(B) has a frame 84 having the same diameter as the frame 52 of the chuck table 48 shown in FIG. 6(A). An engagement groove 86 configured similarly to the engagement groove 54 is formed in the frame body 84 . Further, the chuck table 80 has a porous portion 82 having a diameter different from that of the porous portion 50 of the chuck table 48 . The diameter of the holding surface 82a on the upper surface of the porous portion 82 is different from the diameter of the holding surface 50a of the porous portion 50.

By configuring the chuck table 80 in this manner, the chuck table 80 can be fixed to the table base 60 in the same manner as the chuck table 48. That is, by changing the diameters of the porous portions 50, 82 without changing the diameters of the frames 52, 84 of the chuck tables 48, 80, workpieces of various diameters can be handled.

However, the diameters of the frames 52 and 84 do not have to be constant and may be changed depending on the size of the workpiece. In this case, it is sufficient that the diameters of the frames 52, 84 are maintained at least in the portions where the engagement grooves 54, 86 are provided so that the chuck tables 48, 80 can be fixed by the engagement portions 62. That is, the diameters of the frames 52, 84 of the chuck tables 48, 80 may be changed in portions other than the portions where the engagement grooves 54, 86 are provided.

When the diameter of the workpiece is changed, the diameter of the annular frame that supports the workpiece via the tape is often also changed. When the diameter of the annular frame is changed, it is also necessary to change the position of the frame holding portion 88 (see FIG. 2) that holds the annular frame. For example, while maintaining the diameter of the frames 52, 84 at the portion where the engaging portion 62 is provided, the diameter of the frames 52, 84 may be changed to match the diameter of the annular frame at the portion where the frame holding portion 88 is fixed. good.

In this case, it is preferable that a frame holding groove 100 is formed in the table base 60 so that the position of the frame holding part 88 can be changed. If the frame retainer housing groove 100 is formed in the table base 60, even when the position of the frame retainer 88 is changed to approach the center of the chuck table 48, the frame retainer 94 of the frame retainer 88 will be attached to the table base. It never hits 60.

As described above, the chuck table, table base, and chuck table fixing mechanism according to the present embodiment do not require fixing screws because the chuck table can be fixed to the table base using the engaging portion. That is, when the engaging portion 62 is in the closed state, the chuck table 48 can be fixed on the mounting surface 60b of the table base 60 by the claw portion 66 engaging the protrusion 56 of the engaging groove 54. Then, when the engaging portion 62 is in the open state, the claw portion 66 no longer engages with the protrusion 56 of the engaging groove 54, so that the fixation to the table base 60 can be released.

Note that in the above embodiment, a case has been described in which the engaging portion 62 is provided on the table base 60 and the engaging groove 54 is formed on the frame 52 of the chuck table 48, but one aspect of the present invention is limited to this. Not done. That is, the engagement groove 54 may be formed in the table base 60, and the engagement portion 62 may be formed in the frame 52 of the chuck table 48.

Further, in the above embodiment, the case has been mainly described in which the three engaging portions 62 are provided on the table base 60 and the three engaging grooves 54 are formed on the frame 52 of the chuck table 48, but the present invention One embodiment is not limited to this. That is, the number of engaging portions 62 and engaging grooves 54 is not limited to this.

In order to smoothly rotate the chuck table 48 and the table base 60, the plurality of engagement parts 62 and the plurality of engagement grooves 54 are arranged point-symmetrically with respect to the center of the mounting surface 60b of the table base 60. Good. That is, the number and position of the engaging portions 62 and the engaging grooves 54 can be changed arbitrarily as long as the centers of gravity of the chuck table 48 and the table base 60 are not moved.

Further, in the embodiment described above, when the table base 60 including the engagement portion 62 is provided in the cleaning unit 42 of the cutting device 2, and the chuck table 48 in which the engagement groove 54 is formed is fixed to the table base 60. explained. However, one embodiment of the present invention is not limited thereto. That is, a table base 60 having an engaging portion 62 may be provided below the cutting unit 38, and the chuck table 48 in which the engaging groove 54 is formed may be fixed to the table base 60.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

2 Cutting device 4 Base 4a, 4b Opening 6 Cassette support 8 Cassette 10 Table cover 12 Dust-proof and drip-proof cover 14 Chuck table 14a Holding surface 14b Clamp 16 Support structure 18 Arm 20 Indexing feed unit 22, 30 Guide rail 24, 32 Moving plate 26, 34 Ball screw 28 Lifting unit 36 Pulse motor 38 Cutting unit 40 Imaging unit 42 Cleaning unit 44 Cutting blade 46 Spray nozzle 48, 80 Chuck table 48a, 60a Outer surface 48b Bottom surface 50, 82 Porous part 50a, 82a Holding surface 52 , 84 Frame 54, 86 Engagement groove 56 Protrusion 56a, 66a Contact surface 58 Regulating hole 60 Table base 60b Placement surface 62 Engagement portion 64 Main body 66 Claw portion 68 Fixed shaft 70 Elastic member 72 Head 74 Stopper portion 76 Stopper Receiving part 78 Regulating protrusion 88 Frame holding part 90 Supporting part 92 Fixing part 94 Frame presser 96 Claw part 98 Weight part 100 Frame presser accommodation groove

Claims (10)

A chuck table that has a mounting surface and is mounted and fixed on a table base that rotates around an axis along a direction perpendicular to the mounting surface,
comprising a porous portion whose upper surface serves as a holding surface, and a frame surrounding the porous portion so as to be exposed upward;
The frame body has a plurality of engagement grooves on the outer periphery each having a protrusion that can receive the claws of a plurality of openable and closable engagement parts provided on the outer periphery of the table base and having claws on the upper part,
When the engaging part is in the closed state, the claw part engages with the protrusion of the engaging groove, so that it can be fixed on the mounting surface of the table base, and when the engaging part is in the open state, the claw part can be fixed on the mounting surface of the table base. A chuck table characterized in that the fixation to the table base can be released by the claw part not engaging the protrusion of the engagement groove at a certain time. The engagement groove penetrates vertically and is retracted inward from the outer peripheral surface of the frame,
The protrusion protrudes toward the outside of the frame inside the engagement groove,
The chuck according to claim 1, wherein the engaging groove is capable of accommodating the engaging portion so that the engaging portion does not remain outside the outer peripheral surface of the frame when the engaging portion is in the closed state. table. A plurality of regulation holes are provided on the lower surface of the frame facing the mounting surface, each of which is inserted into each of the plurality of regulation protrusions provided on the mounting surface,
3. The chuck table according to claim 1, wherein the regulating protrusions are inserted into the plurality of regulating holes, respectively, thereby preventing displacement and rotational displacement of the frame relative to the table base. A plurality of regulation protrusions that can be inserted into each of a plurality of regulation holes provided in the mounting surface are provided on the lower surface of the frame facing the mounting surface,
3. The chuck table according to claim 1, wherein the plurality of regulating protrusions are inserted into the regulating holes, respectively, thereby preventing displacement and rotational displacement of the frame relative to the table base. A table base to which a chuck table can be fixed, comprising a porous part whose upper surface serves as a holding surface, and a frame surrounding the porous part so as to be exposed upward,
having an upwardly exposed mounting surface on which the chuck table is mounted;
The outer circumferential surface is provided with a plurality of engagement portions that can be respectively engaged with the plurality of engagement grooves provided on the outer periphery of the frame,
The plurality of engaging portions are
a fixed axis along the outer peripheral surface;
a main body rotatably penetrated by the fixed shaft;
and a claw portion provided on the main body above the fixed shaft,
By rotating the main body around the fixed axis, the chuck table is fixed in a closed state by hooking each of the claws onto the protrusions of the plurality of engagement grooves each having a protrusion inside; A table base that can be switched between an open state and an open state in which the chuck table is released from the protrusion of the engagement groove. further comprising an elastic member having one end fixed to the main body of the engaging portion below the fixed shaft,
The other end of the elastic member is fixed to the outer peripheral surface,
6. The table according to claim 5, wherein the elastic member maintains the closed state by outwardly urging a portion of the main body of the engaging portion below the fixed shaft. base. The mounting surface facing the lower surface of the frame is provided with a plurality of restriction protrusions that can be inserted into each of the plurality of restriction holes provided in the lower surface of the frame,
7. The table base according to claim 5, wherein the plurality of regulating protrusions are inserted into the regulating holes, respectively, thereby preventing displacement and rotational displacement of the frame relative to the mounting surface. The mounting surface facing the lower surface of the frame is provided with a plurality of regulation holes that are inserted into each of the plurality of regulation protrusions provided on the lower surface of the frame,
7. The table base according to claim 5, wherein the regulating protrusions are inserted into the plurality of regulating holes, respectively, thereby preventing displacement and rotational displacement of the frame relative to the mounting surface. A chuck table fixing mechanism for fixing a chuck table comprising a porous part whose upper surface serves as a holding surface and a frame surrounding the porous part so as to be exposed upward to a table base having a mounting surface on the upper surface. hand,
The table base has a plurality of openable and closable engaging parts each having a claw part on the outer periphery,
The frame body of the chuck table has a plurality of engagement grooves on the outer periphery each having a projection that can receive the claw part of the engagement part,
Each of the plurality of engaging parts includes a fixed shaft extending along the outer peripheral surface and a main body rotatably penetrated by the fixed shaft, and the claw part is provided on the main body above the fixed shaft. is,
A closed state in which the chuck table is fixed to the table base by rotating the main body of the engaging part around the fixed axis, and the claw part of the engaging part is engaged with the protrusion of the engaging groove. and an open state in which the claw portion of the engaging portion is removed from the protrusion of the engaging groove to release the chuck table from the table base. . A plurality of regulation holes are provided in one of the lower surface of the frame of the chuck table and the mounting surface of the table base,
A plurality of regulation protrusions that can be inserted into each of the plurality of regulation holes are provided on the other of the lower surface of the frame of the chuck table and the mounting surface of the table base,
The chuck table according to claim 9, wherein any one of the plurality of regulating protrusions is inserted into each of the plurality of regulating holes, whereby positional displacement and rotational displacement of the frame body with respect to the table base can be prevented. Fixed mechanism.

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