KR20230168142A - Fixing member, fluid injection nozzle mechanism - Google Patents

Abstract

The purpose of the present invention is to prevent a pipe nozzle that sprays fluid such as air from falling out.
A fixing member into which a pipe nozzle is inserted and which secures the pipe nozzle, comprising a cylindrical support portion and a truncated cone-shaped pressing holding portion installed on an upper surface of the support portion and having an inclined side, into which the pipe nozzle is inserted and the pipe nozzle is inserted. A nozzle can be accommodated, and it has a through hole penetrating the support portion and the pressure retaining portion, and when fluid is received on the inclined side of the pressure retaining portion, a force having a component radially inward of the pressure retaining portion is generated from the fluid. When applied to the pressure holding portion, the pressure holding portion deforms and presses and fixes the pipe nozzle inserted into the through hole inward in the radial direction.

Description

Fixing member, fluid injection nozzle mechanism {FIXING MEMBER, FLUID INJECTION NOZZLE MECHANISM}

The present invention relates to a processing device such as a cutting device, which includes a fixing member for fixing the nozzle of a fluid injection nozzle mechanism disposed accompanying a microscope for observing a workpiece such as a semiconductor wafer, and a fluid injection with the nozzle fixed to the fixing member. It is about the nozzle mechanism.

In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, a plurality of intersecting division lines (streets) are first set on the surface of a wafer containing a material such as a semiconductor. Then, devices such as IC (Integrated Circuit), LSI (Large-scale Integrated Circuit), etc. are formed in each area divided by the division line. Thereafter, the wafer is ground from the back side to be thinned, and the wafer is divided along the division line to form individual thin device chips.

To divide a workpiece, a cutting device is used that cuts the workpiece with an annular cutting blade along a line along which the workpiece is to be divided. The cutting device includes a chuck table that holds the workpiece to be cut, and a cutting unit provided with a cutting blade. Additionally, the cutting unit is provided with a cutting water supply nozzle that supplies cutting fluid, such as pure water, to the cutting blades, etc. in order to remove cutting debris and heat generated while the cutting blade is cutting the workpiece.

Additionally, the cutting device is provided with a microscope unit used for observation of the workpiece to evaluate the state of the machining groove formed in the workpiece by cutting. And, in the cutting device, a fluid injection nozzle mechanism for blowing away cutting water remaining on the workpiece when observing the workpiece with the microscope unit is fixed to the microscope unit. The fluid injection nozzle mechanism removes cutting water remaining in the machining groove of the workpiece by, for example, spraying air on the workpiece (see Patent Document 1).

The fluid injection nozzle mechanism moves up and down together with the microscope unit when the microscope unit moves up and down. At this time, the height of the pipe nozzle is adjusted in advance in the cutting device so that the pipe nozzle having the fluid ejection port of the fluid injection nozzle mechanism does not contact the workpiece held on the chuck table. Then, the pipe nozzle located at a predetermined height is fixed to the case of the fluid injection nozzle mechanism by a fixture such as a fixing screw.

[Patent Document 1] Japanese Patent Publication No. 2019-9175

In the fluid injection nozzle mechanism, the fixture that secures the pipe nozzle may become loose. Additionally, if a fluid such as air is sprayed onto a workpiece from a pipe nozzle while the fixture is loose, the pipe nozzle falls out with force and collides with the workpiece held on the chuck table, causing damage to the workpiece.

The present invention was made in view of these problems, and its purpose is to provide a fixing member for fixing the pipe nozzle while preventing the pipe nozzle that sprays a fluid such as air from falling out, and a pipe nozzle being fixed to the fixing member. To provide a fluid injection nozzle mechanism.

According to one aspect of the present invention, a fixing member into which a pipe nozzle is inserted and fixing the pipe nozzle includes a cylindrical support portion and a truncated cone-shaped pressing holding portion installed on the upper surface of the support portion and having an inclined side, The pipe nozzle is inserted to accommodate the pipe nozzle, and has a through hole penetrating the support portion and the pressure retaining portion, and when fluid is received to the inclined side of the pressure retaining portion, it flows radially inside the pressure retaining portion. A fixing member is provided, wherein a force having a component is applied from the fluid to the pressure holding portion, thereby deforming the pressure holding portion and pressing and fixing the pipe nozzle inserted into the through hole in the radial direction. do.

In addition, according to another aspect of the present invention, there is provided a fluid injection nozzle mechanism, comprising: a pipe nozzle; a fluid supply path, one end of which is connected to a fluid supply source; the other end of which is connected to the pipe nozzle; It includes a fixing member for fixing the pipe nozzle, wherein the fixing member includes a cylindrical support part and a truncated cone-shaped pressing holding part installed on an upper surface of the support part and having an inclined side, wherein the pipe nozzle is inserted. It is capable of receiving the pipe nozzle and has a through hole penetrating the support portion and the pressure retaining portion, and receives the fluid supplied from the fluid supply source and traveling through the fluid supply path through the inclined side of the pressure retaining portion. A force having a component radially inward of the pressure holding portion is applied from the fluid to the pressing holding portion, thereby deforming the pressing holding portion and pressing and fixing the pipe nozzle inserted into the through hole in the radial direction. A fluid injection nozzle mechanism is provided, characterized in that.

In the fixing member and fluid injection nozzle mechanism according to one aspect of the present invention, a pipe nozzle is inserted into a through hole formed in the fixing member. And the fixing member has a truncated cone-shaped pressing holding portion on the upper surface of the cylindrical support portion. When the fluid passing through the pipe nozzle impacts the fixing member, the fixing member receives this fluid with the inclined side of the pressing holding portion. At this time, a force having a radially inward component is applied to the pressing holding portion from this inclined side, and the pressing holding portion deforms while pressing and fixing the pipe nozzle inserted into the through hole.

As the force of the fluid trying to pass through the pipe nozzle increases, the force pressing the pipe nozzle also increases, so the holding force exerted by the fixing member on the pipe nozzle also increases. Therefore, the pipe nozzle is fixed to the fixing member with the necessary fixing force regardless of the force of the fluid, and the pipe nozzle is prevented from falling out.

Therefore, according to one aspect of the present invention, a fixing member for fixing the pipe nozzle while preventing the pipe nozzle for spraying a fluid such as air from falling out, and a fluid spray nozzle mechanism in which the pipe nozzle is fixed to the fixing member are provided.

Figure 1 is a perspective view schematically showing a processing device in which a fluid injection nozzle mechanism is used.
Figure 2 is a perspective view schematically showing a workpiece being processed by a processing unit.
Figure 3 is a cross-sectional view schematically showing a fluid injection nozzle mechanism fixed to a microscope unit.
Figure 4 is a perspective view schematically showing a fixing member.
Figure 5 is a cross-sectional view schematically showing a fixing member incorporated in the fluid injection nozzle mechanism.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, the fixing member and fluid injection nozzle mechanism according to this embodiment are incorporated into and used in a processing device that processes a workpiece such as a semiconductor wafer. FIG. 1 is a perspective view schematically showing a processing device for processing a workpiece, and FIG. 2 is a perspective view schematically showing a workpiece being processed by a processing unit of the processing device. First, the workpiece 1 will be described.

The workpiece 1 is, for example, a wafer made of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or another semiconductor. Alternatively, it is a wafer formed of a double oxide such as LT (lithium tantalate) or LN (lithium niobate).

Alternatively, the workpiece 1 is a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz. The glass includes, for example, alkali glass, alkali-free glass, soda-lime glass, lead glass, borosilicate glass, and quartz glass. Alternatively, the workpiece 1 may be a package substrate formed by placing a plurality of device chips vertically and horizontally and sealing them with resin. Hereinafter, the case where the workpiece 1 is a semiconductor wafer will be described as an example, but the workpiece 1 is not limited to this.

The surface 1a of the workpiece 1 is defined by a plurality of dividing lines 3 that intersect each other. And, devices 5 such as IC and LSI are formed in each area defined by the division line 3 on the surface 1a of the workpiece 1. Additionally, there are no restrictions on the type, quantity, arrangement, etc. of the devices 5.

When the workpiece 1 is processed along the division line 3 and machining marks 13 such as division grooves are formed to divide the workpiece 1, each device 5 is divided. of device chips can be formed. Before the workpiece 1 is divided, the workpiece 1 is ground from the back side 1b to become thin, and the back side 1b is also polished to become flat. Afterwards, by dividing the workpiece 1, a thin device chip can be manufactured. In this way, the workpiece 1 having a plurality of devices 5 on the surface 1a side is processed using various processing devices.

Hereinafter, the processing device 2 for cutting the workpiece 1 will be described as the processing device 2 in which the fluid injection nozzle mechanism and the like according to the present embodiment are incorporated and used. That is, the processing device 2 will be described below as an example of a case where the processing device 2 is a cutting device. However, the processing device 2 in which the fluid injection nozzle mechanism and the like according to the present embodiment are incorporated and used is not limited to a cutting device.

When loading the workpiece 1 into the processing device 2, the adhesive tape 9 previously attached to block the opening of the ring frame 7 formed of metal or the like is placed on the back side 1b of the workpiece 1. is glued to Then, the workpiece 1 is brought into the processing device 2 in the form of a frame unit 11 in which the workpiece 1, the adhesive tape 9, and the ring frame 7 are integrated, and is processed. Each device chip formed by dividing the workpiece 1 is supported by the adhesive tape 9, and is then picked up from the adhesive tape 9.

Next, the processing device 2 will be described. As shown in FIG. 1, the processing device 2 is provided with a base 4 supporting each component. An opening 8 is formed in the front corner 6 of the base 4, and a cassette support 10 that is raised and lowered by a lifting mechanism (not shown) is installed within this opening 8. A cassette 12 accommodating a plurality of objects 1 is mounted on the upper surface of the cassette support 10. In addition, in FIG. 1, for convenience of explanation, only the outline of the cassette 12 is shown with a two-dot chain line.

A rectangular opening 14 is formed on the side of the cassette support 10 so that the longitudinal direction follows the X-axis direction (front-back direction, processing transfer direction). In the opening 14, a ball screw type The X-axis movement mechanism is provided with an X-axis movement table (not shown) covered by a table cover 16, and moves this X-axis movement table in the X-axis direction.

A chuck table 20 that suction-holds the workpiece 1 is installed on the upper surface of the This chuck table 20 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). Additionally, the chuck table 20 moves in the X-axis direction together with the X-axis movement table by an X-axis movement mechanism. At this time, the dust-proof and drip-proof cover 18 expands and contracts following the movement of the chuck table 20.

The upper surface of the chuck table 20 is a holding surface 22 that suction-holds the workpiece 1. The holding surface 22 is formed to be substantially parallel to the is connected to). Around the chuck table 20, a plurality of clamps 24 are installed to grip the ring frame 7 supporting the workpiece 1 from all directions.

In addition, a transfer unit (not shown) that transfers the workpiece 1 to the chuck table 20 or the like is disposed in the area adjacent to the opening 14. The workpiece 1 accommodated in the cassette 12 is pulled out from the cassette 12 by a transfer unit and transferred to the chuck table 20.

Then, the ring frame 7 that supports the workpiece 1 through the adhesive tape 9 is held by the clamp 24. Additionally, a suction source connected to the chuck table 20 is activated to apply negative pressure to the workpiece 1 from the holding surface 22 through the adhesive tape 9. Then, the workpiece 1 is pulled and held by the chuck table 20.

On the upper surface of the base 4, a support structure 28 that supports a processing unit (cutting unit) 26 for cutting the workpiece 1 is disposed so as to protrude upward from the opening 14. On the front upper part of the support structure 28, there is an indexing transfer unit 30a that moves the processing unit 26 along the indexing transfer direction (Y-axis direction), and an indexing transfer unit 30a that moves the processing unit 26 along the Z-axis direction. A lifting unit 30b for lifting up and down is installed.

The indexing transfer unit 30a is disposed on the front surface of the support structure 28 and is provided with a pair of Y-axis guide rails 32 parallel to the Y-axis direction. A Y-axis moving plate 34 is slidably attached to the Y-axis guide rail 32. A nut portion (not shown) is formed on the back side (rear side) of the Y-axis moving plate 34, and this nut portion includes a Y-axis ball screw 36 parallel to the Y-axis guide rail 32. is screwed together.

A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 36. When the Y-axis ball screw 36 is rotated by the Y-axis pulse motor, the Y-axis moving plate 34 moves in the Y-axis direction along the Y-axis guide rail 32.

A lifting unit 30b is installed on the surface (front) of the Y-axis moving plate 34. The lifting unit 30b is provided with a pair of Z-axis guide rails 38 parallel to the Z-axis direction fixed to the surface of the Y-axis moving plate 34. A Z-axis moving plate 40 is slidably attached to the Z-axis guide rail 38.

A nut portion (not shown) is formed on the back side (rear side) of the Z-axis moving plate 40, and this nut portion includes a Z-axis ball screw 42 parallel to the Z-axis guide rail 38. is screwed together. A Z-axis pulse motor 44 is connected to one end of the Z-axis ball screw 42. When the Z-axis ball screw 42 is rotated by the Z-axis pulse motor 44, the Z-axis moving plate 40 moves in the Z-axis direction along the Z-axis guide rail 38.

At the lower part of the Z-axis moving plate 40, there is a processing unit (cutting unit) 26 for cutting the workpiece 1 held by the chuck table 20, and the workpiece 1 held by the chuck table 20. ) is fixed. When the Y-axis movement plate 34 is moved in the Y-axis direction by the indexing transfer unit 30a, the processing unit 26 and the microscope unit 46 are indexed and transferred. Additionally, when the Z-axis moving plate 40 is moved in the Z-axis direction by the lifting unit 30b, the processing unit 26 and the microscope unit 46 are raised and lowered.

FIG. 2 includes a perspective view schematically showing a processing unit (cutting unit) 26. The machining unit 26 is provided with an annular cutting blade 48 and cuts the workpiece 1 with the cutting blade 48 . The processing unit 26 is provided with a spindle housing 50 that rotatably accommodates the proximal end side of a spindle (not shown) constituting a rotation axis parallel to the Y-axis direction.

Inside the spindle housing 50, a rotation drive source such as a motor that rotates the spindle is accommodated, and when this rotation drive source is activated, the spindle rotates. A circular cutting blade (tool) 48 is fixed to the tip of the spindle. Rotating the spindle can rotate the cutting blade 48. The cutting blade 48 is provided with a binder material formed in an annular shape made of a metal material or a resin material, and a grinding stone portion formed of diamond or the like and containing abrasive grains dispersed and fixed in the binder material.

The Z-axis moving plate 40 is moved to lower the cutting blade 48 to a predetermined height, and the machining transfer unit (X-axis moving mechanism) is operated to process and transfer the chuck table 20 to rotate the cutting blade 48. When the grindstone portion of ) is brought into contact with the workpiece 1, the workpiece 1 is cut. When the workpiece 1 is cut along the division line 3, a machining mark (split groove) 13 is formed on the workpiece 1. When machining marks 13 are formed along all the division lines 3 of the workpiece 1, the workpiece 1 is divided into individual device chips.

When the workpiece 1 is cut with the cutting blade 48, cutting debris and processing heat are generated from the grindstone portion and the workpiece 1. Therefore, while cutting the workpiece 1 with the cutting blade 48, processing water (cutting water) composed of pure water or the like is supplied to the cutting blade 48 and the workpiece 1. Cutting water removes cutting chips and processing heat.

As shown in FIG. 2, the machining unit 26 further includes a blade cover 52 that covers the cutting blade 48, and a machining water supply nozzle 54 connected to the blade cover 52. Additionally, a processing water injection nozzle (not shown) is installed inside the blade cover 52 to spray processing water onto the cutting blade 48. Processing water is supplied to the cutting blade from the processing water supply nozzle 54 or the like. The blade cover 52 has a built-in liquid delivery passage whose end leads to the processing water supply nozzle 54 or the like, and is provided with a connection portion 62 at the starting point of the liquid delivery passage. Processed water is supplied to the connection portion 62.

As shown in FIG. 1, a cleaning unit 56 for cleaning the workpiece 1 after processing is installed on the rear side of the opening 14 of the base 4. The workpiece 1 after processing is transported from the chuck table 20 to the cleaning unit 56 by a transport unit not shown.

The cleaning unit 56 is provided with a spinner table 58 that suctions and holds the workpiece 1 within a cylindrical cleaning space. Additionally, above the spinner table 58, a spray nozzle 60 is disposed for spraying a cleaning fluid (typically a two-fluid mixture of water and air) toward the workpiece 1. The workpiece 1 can be cleaned by rotating the spinner table 58 holding the workpiece 1 and spraying the cleaning fluid from the spray nozzle 60. The workpiece 1 cleaned by the cleaning unit 56 is accommodated in the cassette 12 by, for example, a transfer unit (not shown).

Figure 3 includes a side view schematically showing the lower end of the microscope unit 46. The microscope unit 46 has an objective lens unit 64 facing the upper surface of the workpiece 1 held by the chuck table 20. The objective lens unit 64 includes an objective lens (not shown) that receives light reflected from the workpiece 1, and a plurality of light sources (not shown) such as LEDs arranged to surround the objective lens. When the light source is activated to illuminate the workpiece 1, the light diffusely reflected from the workpiece 1 reaches the objective lens and travels through the optical system 66 of the microscope unit 46.

At one end of the optical system 66, an imaging device (not shown) such as a CCD sensor or CMOS sensor is disposed, and light traveling through the optical system 66 is received by this imaging device. The microscope unit 46 transmits a captured image formed based on light received by the imaging device to the control unit of the processing device 2.

The captured image obtained by the microscope unit 46 is used, for example, when positioning the processing unit 26 to process a predetermined location. That is, when the surface 1a of the workpiece 1 before processing is imaged with the microscope unit 46, the division line 3 set on the surface 1a of the workpiece 1 can be detected from the obtained captured image. there is.

In addition, the captured image obtained by the microscope unit 46 is used, for example, when evaluating the quality of the processing mark 13 formed on the workpiece 1 through processing. That is, when the surface 1a of the workpiece 1 after processing is imaged with the microscope unit 46, the state of the processing mark 13 and the quality of processing can be evaluated from the captured image showing the processing mark 13. You can. If it is determined that the processing is not performed to the desired quality, the device chip formed near the processing mark 13 in question is recognized as a defective product, and necessary adjustments are made to each component of the processing device 2.

Here, cutting water supplied to the machining tool (cutting blade) 48, etc. during cutting of the workpiece 1 remains in the machining mark 13 of the workpiece 1. Therefore, even if the workpiece 1 is imaged with the microscope unit 46 as is, the quality of the formed processing mark 13 cannot be precisely evaluated. Therefore, immediately before imaging the workpiece 1 with the microscope unit 46, high-pressure fluid (gas, air) is sprayed onto the surface of the workpiece 1 to remove cutting water from the machining marks 13.

Figure 3 includes a cross-sectional view schematically showing the fluid injection nozzle mechanism 68 according to this embodiment, which sprays high-pressure fluid (gas, air) onto the workpiece 1 to remove cutting water. . The fluid injection nozzle mechanism 68 has a case 72 fixed to the microscope unit 46. Inside the case 72, a fluid supply path 74 is formed as a path for the fluid to travel.

The fluid injection nozzle mechanism 68 is provided with a connection part 70 to which a pipe 71 is connected at the upper end of the case 72, and this connection part 70 includes a tube, etc. connected to a fluid supply source (not shown). The pipe 71 is connected. The fluid supply source is, for example, a facility such as a factory where the processing device 2 is installed or a gas bomb, and has the function of supplying high-pressure fluid such as dry air or dry nitrogen to the fluid injection nozzle mechanism 68 through the pipe 71. has In other words, a fluid supply source is connected to one end of the fluid supply path 74 through a pipe 71.

However, the fluid that the fluid supply source supplies to the fluid injection nozzle mechanism 68 is not limited to gas. That is, the fluid supply source may supply liquid such as tap water, pure water, or organic solvent to the fluid injection nozzle mechanism 68. In this case, the fluid supply source is equipment or a tank in a factory or the like. Additionally, the fluid supply source may supply a mixed fluid of gas and liquid to the fluid injection nozzle mechanism 68. In this case, gas and liquid are mixed in the process leading to the fluid injection nozzle mechanism 68. Hereinafter, the case where the fluid supplied by the fluid supply source is gas will be described as an example, but the fluid is not limited to this.

The proximal end side of the pipe nozzle 76, which sprays fluid onto the workpiece 1 held on the chuck table 20, is fixed to the case 72 of the fluid injection nozzle mechanism 68. That is, the proximal end side of the pipe nozzle 76 is connected to the other end side of the fluid supply path 74. A jet port 76a is formed at the end of the pipe nozzle 76, and the fluid 76b that travels through the fluid supply path 74 and the pipe nozzle 76 and reaches the jet port 76a flows from the jet port 76a. It is sprayed externally. Additionally, metal such as stainless steel (SUS) or aluminum is used for the case 72 and the pipe nozzle.

The case 72 has an insertion through hole 72a through which the pipe nozzle 76 is inserted from the fluid supply passage 74 to the bottom of the case 72, and an insertion through hole 72a from the side of the case 72. A screw hole 78 through is formed. A fastener 80, such as a set screw, is fastened to the screw hole 78. When fixing the pipe nozzle 76 to the case 72, insert the base end of the pipe nozzle 76 into the insertion hole 72a of the case 72, and tighten the fixture 80 to the screw hole 78. , the pipe nozzle 76 is pressed from the side with the fixture 80. Thereby, the pipe nozzle 76 is fixed to the case 72.

Additionally, if the height of the pipe nozzle 76 is too high, the fluid 76b cannot be effectively supplied to the workpiece 1. When the height of the pipe nozzle 76 is too low, when the microscope unit 46 is positioned at a height position suitable for imaging the surface 1a side of the workpiece 1, the pipe nozzle 76 is positioned on the workpiece 1. crashes into So, when the pipe nozzle 76 is fixed to the case 72, the pipe nozzle 76 is adjusted to an appropriate height.

However, while repeating the operation of the processing device 2, the fixture 80 that secures the pipe nozzle 76 in the fluid injection nozzle mechanism 68 may become loose. And, when an attempt is made to inject fluid 76b, such as air, from the pipe nozzle 76 onto the workpiece 1 while the fixture 80 is loose, the pipe nozzle 76 falls out forcefully and is held on the chuck table 20. A problem arises in that it collides with the processed workpiece 1 and damages the workpiece 1.

Therefore, in the fluid injection nozzle mechanism 68 according to the present embodiment, a fixing member 82 for fixing the pipe nozzle 76 is disposed within the fluid supply path 74. Next, the structure and function of the fixing member 82 will be described.

3 schematically shows a side view of the fixing member 82 incorporated in the fluid jet nozzle mechanism 68. Figure 4 is a perspective view schematically showing the fixing member 82. In Figure 4, some invisible elements are shown with broken lines. FIG. 5 includes a cross-sectional view schematically showing the fixing member 82 disposed in the fluid supply path 74. The fixing member 82 has a function of fixing the upper end of the pipe nozzle 76 that has passed through the insertion hole 72a of the case 72 of the fluid injection nozzle mechanism 68 and reached the fluid supply path 74. have

For the fixing member 82, a resin material that can be elastically deformed relatively easily, such as natural rubber, butyl rubber, urethane rubber, silicone rubber, ethylene propylene rubber, styrene butadiene rubber, isoprene rubber, and nitrile rubber, is suitably used. For the fixing member 82, a material that is softer and more easily deformed than at least the case 72 and the pipe nozzle 76 is used. The fixing member 82 is formed into a shape described below by a method such as injection molding or cutting.

The fixing member 82 includes a cylindrical support portion 84 and a truncated cone-shaped pressing holding portion 86 provided on the upper surface of the support portion 84 and having an inclined side surface 88. In the fixing member 82, the support portion 84 and the pressing portion 86 are integrated, and the two may be directly connected without any other elements being disposed between them. In this case, the boundary between the support portion 84 and the pressure holding portion 86 is not necessarily clear. Alternatively, other elements may be disposed between the support portion 84 and the pressure holding portion 86.

The fixing member 82 is formed at the center with a through hole 90 that penetrates the support portion 84 and the pressing portion 86. As shown in FIG. 5, the through hole 90 is formed to have a diameter that approximately matches the diameter (outer diameter) of the pipe nozzle 76, and can accommodate the pipe nozzle 76 by inserting the pipe nozzle 76. do. When the fluid supply source connected to the pipe 71 is activated while the pipe nozzle 76 is passing through the through hole 90 of the fixing member 82, the fluid 76b reaches the fluid supply path 74. and proceeds from the proximal end side of the pipe nozzle 76 to the pipe nozzle 76.

Here, a portion of the fluid 76b traveling from the fluid source to the fluid supply path 74 collides with the inclined side 88 of the pressing holding portion 86 of the fixing member 82. And, in the fixing member 82, when applied to the inclined side 88 of the pressing holding part 86, a force 92 having a component radially inward of the pressing holding part 86 is pressed from the fluid 76b. It is applied to the holding unit 86.

When this force 92 acts, the pressing holding portion 86 of the fixing member 82 is deformed, and the fixing member 82 presses the pipe nozzle 76 inserted into the through hole 90 radially inward. do. The pipe nozzle 76 is fixed to the fixing member 82 by pressing its outer peripheral surface from the surroundings due to the pressing force 94. Therefore, even in the case where the fixture 80 becomes loose with respect to the screw hole 78, the force of the fluid 76b supplied from the fluid source to the fluid supply path 74 is the pressing force for fixing the pipe nozzle 76. 94), the pipe nozzle 76 does not fall out of the case 72.

And, as the momentum of the fluid 76b trying to pass through the pipe nozzle 76 increases, the pressing force 94 that the fixing member 82 exerts on the pipe nozzle 76 also increases. Therefore, regardless of the force of the fluid 76b that is about to pass through the pipe nozzle 76 to be fixed, the pipe nozzle 76 is strongly fixed to the fixing member 82, preventing the pipe nozzle 76 from coming off. is prevented.

Additionally, the cylindrical support portion 84 has a function of supporting the pressing holding portion 86 and providing strength to the fixing member 82. When the pressure holding portion 86 is not connected to the support portion 84, when the force 92 acts on the pressing holding portion 86, the bottom of the pressing holding portion 86 is deformed to widen outward in the radial direction. Because of this, the pressing force 94 applied to the pipe nozzle 76 may decrease. The support portion 84 has a function of suppressing deformation of the pressing holding portion 86 outward in the radial direction and preventing a decrease in the pressing force 94.

In addition, the magnitude of the pressing force 94 that the press holding portion 86 of the fixing member 82 acts on the pipe nozzle 76 depends on the gradient of the inclined side 88 of the pressing holding portion 86. It depends. The smaller the gradient, that is, the closer the inclined side 88 of the compression holding portion 86 is to being parallel to the plane perpendicular to the through hole 90, the smaller the pressing force 94 becomes.

Here, a surface perpendicular to the direction of expansion of the through hole 90 in the cross section that appears when the fixing member 82 is cut with a surface including the direction of expansion of the through hole 90, and the diameter of the pressing holding portion 86 The preferred range of angles formed by the photo side 88 is explained. This angle is preferably 40° or more, and more preferably 45° or more. If this angle is less than 40°, the pressing force 94 generated due to the force 92 received by the inclined side 88 of the pressing holding portion 86 from the fluid 76b is not sufficiently large.

On the other hand, this angle is preferably 75° or less, and more preferably 60° or less. If this angle becomes too large, the height of the pressing holding portion 86, which is required to express a sufficient amount of pressing force 94, becomes too large, and the shape of the fluid supply passage 74 in which the fixing member 82 is accommodated is restricted. It happens. In addition, the volume of the pressure holding portion 86 increases, and the restoring force of the pressing holding portion 86 against the force 92 received by the inclined side 88 from the fluid 76b increases, so that a large pressing force 94 ) becomes difficult to occur.

This will be described in more detail by taking an example where the fluid 76b is dry air, the supply pressure of the fluid 76b is about 0.3 MPa, and the weight of the pipe nozzle 76 is about 0.47 g. In this case, if the angle formed between the surface perpendicular to the direction of elongation of the through hole 90 and the inclined side 88 of the pressing holding portion 86 is 45°, even if the fixture 80 becomes loose, the fixing member The action of (82) prevents the pipe nozzle (76) from falling off.

As described above, the fixing member 82 according to the present embodiment and the fluid injection nozzle mechanism 68 in which the pipe nozzle 76 is fixed to the fixing member 82 spray fluid 76b such as air. The pipe nozzle 76 is prevented from falling out.

In addition, the present invention is not limited to the description of the above embodiment and can be implemented with various modifications. For example, in the above embodiment, the case where the fixing member 82 is comprised of one support part 84 and one pressing holding part 86 has been explained as an example. However, the fixing member 82 is not limited to this and may have a plurality of pressing holding portions 86. For example, the fixing member 82 may be provided with a plurality of pressing holding portions 86 arranged continuously along the direction in which the through hole 90 extends. That is, the number of pressure holding portions 86 included in the fixing member 82 is not limited to one.

In addition, in the above embodiment, a fluid jet nozzle mechanism 68 is used by being incorporated near the microscope unit 46 of the processing device (cutting device) 2, and the fixing member 82 is attached to the fluid jet nozzle mechanism 68. Although the case where is used has been described, one aspect of the present invention is not limited to this. The fluid injection nozzle mechanism 68 may be used in a processing device other than a cutting device, or may be used in a location other than a processing device. There is no limitation to the use of the fluid injection nozzle mechanism 68.

In addition, the structure, method, etc. according to the above embodiments can be implemented with appropriate changes as long as they do not deviate from the scope of the purpose of the present invention.

1: Workpiece 1a: Surface
1b: Back side 3: Line to be divided
5: Device 7: Ring frame
9: Adhesive tape 11: Frame unit
13: processing mark 2: processing device
4: Base 6: Corner
8: opening 10: cassette support
12: Cassette 14: Opening
16: Table cover 18: Dust-proof and drip-proof cover
20: Chuck table 22: Holding surface
24: clamp 26: processing unit
28: Support structure 30a: Indexing transfer unit
30b: lifting unit 32, 38: guide rail
34, 40: Moving plate 36, 42: Ball screw
44: pulse motor 46: microscope unit
48: cutting blade 50: spindle housing
52: Blade cover 54: Processing water supply nozzle
56: cleaning unit 58: spinner table
60: spray nozzle 62: connection part
64: Objective lens unit 66: Optical system
68: Fluid injection nozzle mechanism 70: Connection part
71: Piping 72: Case
72a: Insertion through hole 74: Fluid supply path
76: pipe nozzle 76a: outlet
76b: fluid 78: screw hole
80: fixture 82: fixing member
84: support portion 86: pressure holding portion
88: side 90: through hole
92: Force 94: Pressure Force

Claims (2)

A fixing member into which a pipe nozzle is inserted to secure the pipe nozzle,
It is provided with a cylindrical support part and a cone-shaped pressure holding part installed on the upper surface of the support part and having an inclined side,
The pipe nozzle is inserted to accommodate the pipe nozzle, and has a through hole penetrating the support portion and the pressure holding portion,
When fluid is received on the inclined side of the pressure holder, a force having a component radially inside the pressure holder is applied from the fluid to the pressure holder, thereby deforming the pressure holder and inserting it into the through hole. A fixing member characterized in that the pipe nozzle is fixed by pressing it inward in the radial direction. As a fluid injection nozzle mechanism,
pipe nozzle,
a fluid supply path with one end connected to a fluid supply source and the other end connected to the pipe nozzle;
It is disposed within the fluid supply passage and includes a fixing member for fixing the pipe nozzle,
The fixing member is,
It is provided with a cylindrical support part and a cone-shaped pressure holding part installed on the upper surface of the support part and having an inclined side,
The pipe nozzle is inserted to accommodate the pipe nozzle, and has a through hole penetrating the support portion and the pressure holding portion,
When the fluid supplied from the fluid supply source and flowing through the fluid supply passage is received on the inclined side of the pressure holding portion, a force having a component radially inward of the pressing holding portion is applied from the fluid to the pressing holding portion, A fluid injection nozzle mechanism, wherein the pressure holding portion is deformed to press and fix the pipe nozzle inserted into the through hole in the radial direction.