JP2023177773A - Fixing member, and fluid jet nozzle mechanism - Google Patents

Abstract

To prevent coming off of a pipe nozzle for jetting a fluid such as air.SOLUTION: A fixing member to which a pipe nozzle is inserted and that fixes the pipe nozzle includes a columnar support part, and a truncated cone-shaped pressing holding part which is provided on an upper surface of the support part and has an inclined side face, and includes a through hole to which the pipe nozzle is inserted and that can store the pipe nozzle and penetrates through the support part and the pressing holding part, wherein when a fluid is received by the inclined side face of the pressing holding part, force having a component in a radial inside of the pressing holding part is applied to the pressing holding part from the fluid, the pressing holding part is deformed, and the pipe nozzle inserted into the through hole is pressed and fixed to the radial inside.SELECTED DRAWING: Figure 5

Description

The present invention provides a fixing member for fixing a nozzle of a fluid jet nozzle mechanism installed in a processing device such as a cutting device in conjunction with a microscope for observing a workpiece such as a semiconductor wafer; A fixed fluid injection nozzle mechanism.

In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, first, a plurality of intersecting dividing lines (street) are set on the surface of a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large-scale Integrated Circuits) are formed in each area divided by the planned division lines. Thereafter, the wafer is thinned by grinding from the back side, and the wafer is divided along the planned division lines to form individual thin device chips.

To divide the workpiece, a cutting device is used that cuts the workpiece with an annular cutting blade along the planned dividing line. The cutting device includes a chuck table that holds a workpiece to be cut, and a cutting unit that includes a cutting blade. Further, the cutting unit includes a cutting water supply nozzle that supplies cutting fluid such as pure water to the cutting blade and the like in order to remove cutting debris and heat generated while the cutting blade cuts the workpiece.

The cutting device also includes a microscope unit used to observe the workpiece in order to evaluate the state of the machined groove formed in the workpiece by cutting. In the cutting device, a fluid jet nozzle mechanism is fixed to the microscope unit for blowing off cutting water remaining on the workpiece when observing the workpiece with the microscope unit. For example, the fluid injection nozzle mechanism removes cutting water accumulated in a machining groove of a workpiece by injecting air to the workpiece (see Patent Document 1).

The fluid ejection nozzle mechanism moves up and down together with the microscope unit when the microscope unit moves up and down. At this time, the height of the pipe nozzle is adjusted in advance in the cutting device so that the pipe nozzle provided with the fluid ejection port of the fluid ejection nozzle mechanism does not come into contact with the workpiece held on the chuck table. Then, the pipe nozzle positioned at a predetermined height is fixed to the housing of the fluid injection nozzle mechanism using a fixing device such as a fixing screw.

JP 2019-9175 Publication

In a fluid injection nozzle mechanism, the fixture that secures the pipe nozzle may come loose. If a fluid such as air is injected from the pipe nozzle onto the workpiece with the fixture loosened, the pipe nozzle will fall off and collide with the workpiece held on the chuck table, damaging the workpiece. The problem arises.

The present invention has been made in view of such problems, and its objects are to provide a fixing member for fixing a pipe nozzle that injects fluid such as air while preventing the pipe nozzle from falling off, and the fixing member. and a fluid injection nozzle mechanism in which a pipe nozzle is fixed.

According to one aspect of the present invention, there is provided a fixing member into which a pipe nozzle is inserted and which fixes the pipe nozzle, the fixing member having a cylindrical support part and a truncated conical part provided on the upper surface of the support part and having an inclined side surface. a pressure holding part, into which the pipe nozzle can be inserted and accommodated, a through hole penetrating the support part and the pressure holding part, and a through hole passing through the support part and the pressure holding part, to direct fluid to the inclined side surface of the pressure holding part. When the force is received by the fluid, a force having a component on the inside of the pressure holding part in the radial direction is applied from the fluid to the pressure holding part, and the pressure holding part deforms and pushes the pipe nozzle inserted into the through hole. A fixing member is provided that is fixed by pressing radially inward.

According to another aspect of the present invention, there is provided a fluid ejection nozzle mechanism including a pipe nozzle, a fluid supply passage whose one end is connected to a fluid supply source, and whose other end is connected to the pipe nozzle. A fixing member disposed within the fluid supply path and fixing the pipe nozzle, the fixing member having a cylindrical support part and a truncated conical shape provided on the upper surface of the support part and having an inclined side surface. a pressure holding part, into which the pipe nozzle is inserted and capable of accommodating the pipe nozzle, and a through hole penetrating the support part and the pressure holding part, the fluid supply being supplied from the fluid supply source. When the fluid traveling along the path is received by the inclined side surface of the pressure holding part, a force having a component on the inside of the pressure holding part in the radial direction is applied from the fluid to the pressure holding part, and the pressure holding part A fluid injection nozzle mechanism is provided, characterized in that the pipe nozzle, which has been deformed and inserted into the through hole, is fixed by pressing radially inward.

In the fixing member and fluid injection nozzle mechanism according to one aspect of the present invention, the pipe nozzle is inserted into the through hole formed in the fixing member. The fixing member has a truncated cone-shaped pressing holding part on the upper surface of the cylindrical support part. When the fluid passed through the pipe nozzle impinges on the fixing member, the fixing member receives this fluid on the inclined side surface of the pressure holding part. At this time, a force having a component on the inside in the radial direction is applied to the pressure holding part from this inclined side surface, and the pressure holding part deforms while pressing and fixing the pipe nozzle that has been inserted into the through hole.

As the force of the fluid trying to pass through the pipe nozzle increases, the force with which the pipe nozzle is pressed also increases, so the fixing force exerted by the fixing member on the pipe nozzle also increases. Therefore, the pipe nozzle is fixed to the fixing member with the necessary fixing force regardless of the force of the fluid, and the pipe nozzle is prevented from falling off.

According to one aspect of the present invention, there is provided a fixing member that fixes a pipe nozzle that injects a fluid such as air while preventing the pipe nozzle from falling off, and a fluid injection nozzle mechanism in which the pipe nozzle is fixed with the fixing member. , is provided.

1 is a perspective view schematically showing a processing device in which a fluid injection nozzle mechanism is used. FIG. 2 is a perspective view schematically showing a workpiece to be processed by the processing unit. FIG. 2 is a cross-sectional view schematically showing a fluid ejection nozzle mechanism fixed to a microscope unit. FIG. 3 is a perspective view schematically showing a fixing member. FIG. 3 is a cross-sectional view schematically showing a fixing member incorporated in the fluid injection nozzle mechanism.

Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. First, the fixing member and fluid injection nozzle mechanism according to the present embodiment are used by being incorporated into a processing apparatus that processes a workpiece such as a semiconductor wafer. FIG. 1 is a perspective view schematically showing a processing device that processes a workpiece, and FIG. 2 is a perspective view schematically showing a workpiece being processed by a processing unit of the processing device. First, the workpiece 1 will be explained.

The workpiece 1 is a wafer made of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductors. Alternatively, it is a wafer formed from a double oxide such as LT (lithium tantalate) or LN (lithium niobate).

Alternatively, the workpiece 1 is a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz. Examples of the glass include alkali glass, non-alkali glass, soda lime glass, lead glass, borosilicate glass, and quartz glass. Alternatively, the workpiece 1 may be a package substrate formed by arranging a plurality of device chips in a matrix and sealing them with resin. Hereinafter, the case where the workpiece 1 is a semiconductor wafer will be described as an example, but the workpiece 1 is not limited to this.

The surface 1a of the workpiece 1 is divided by a plurality of dividing lines 3 that intersect with each other. Devices 5 such as ICs and LSIs are formed in each region of the surface 1a of the workpiece 1 divided by the dividing line 3. Note that there are no restrictions on the type, quantity, arrangement, etc. of the devices 5.

When the workpiece 1 is processed along the planned dividing line 3 and the workpiece 1 is divided by forming processing marks 13 such as dividing grooves, individual device chips including the devices 5 can be formed. Before the workpiece 1 is divided, the workpiece 1 is ground from the back surface 1b side to be thinned, and the back surface 1b side is further polished and flattened. After that, by dividing the workpiece 1, thin device chips can be manufactured. In this way, the workpiece 1 having a plurality of devices 5 on the surface 1a side is processed by various processing apparatuses.

Hereinafter, a processing apparatus 2 for cutting a workpiece 1 will be described as a processing apparatus 2 in which a fluid ejecting nozzle mechanism and the like according to the present embodiment are incorporated and used. That is, the processing device 2 will be described below using an example in which the processing device 2 is a cutting device. However, the processing device 2 in which the fluid injection nozzle mechanism and the like according to the present embodiment are incorporated and used is not limited to a cutting device.

When carrying the workpiece 1 into the processing device 2, an adhesive tape 9 is applied in advance to the back side 1b of the workpiece 1 so as to close the opening of the ring frame 7 formed of metal or the like. be done. Then, the workpiece 1 is carried into the processing apparatus 2 in the state of a frame unit 11 in which the workpiece 1, the adhesive tape 9, and the ring frame 7 are integrated, and is processed. Individual device chips formed by dividing the workpiece 1 are supported by the adhesive tape 9 and then picked up from the adhesive tape 9.

Next, the processing device 2 will be explained. As shown in FIG. 1, the processing device 2 includes a base 4 that supports each component. An opening 8 is formed in the front corner 6 of the base 4, and a cassette support 10 that is raised and lowered by a lifting mechanism (not shown) is provided within the opening 8. A cassette 12 that accommodates a plurality of workpieces 1 is mounted on the upper surface of the cassette support base 10 . In addition, in FIG. 1, only the outline of the cassette 12 is shown by a two-dot chain line for convenience of explanation.

A rectangular opening 14 is formed on the side of the cassette support base 10 so that the longitudinal direction thereof is along the X-axis direction (back-and-forth direction, processing feed direction). Inside the opening 14, there is a ball screw type X-axis moving mechanism (not shown), a table cover 16 and a dust-proof/splash-proof cover 18 that cover the upper part of the X-axis moving mechanism.
and are placed. The X-axis moving mechanism includes an X-axis moving table (not shown) covered by a table cover 16, and moves this X-axis moving table in the X-axis direction.

A chuck table 20 for sucking and holding the workpiece 1 is provided on the upper surface of the X-axis moving table so as to be exposed from the table cover 16. This chuck table 20 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis that is generally parallel to the Z-axis direction (vertical direction). Further, the chuck table 20 is moved in the X-axis direction together with the X-axis moving table by the X-axis moving mechanism. At this time, the dust-proof and drip-proof cover 18 expands and contracts in accordance with the movement of the chuck table 20.

The upper surface of the chuck table 20 serves as a holding surface 22 that holds the workpiece 1 under suction. The holding surface 22 is formed approximately parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) such as an ejector through a suction path (not shown) provided inside the chuck table 20. )It is connected to the. A plurality of clamps 24 are provided around the chuck table 20 to grip the ring frame 7 that supports the workpiece 1 from all sides.

Further, in a region adjacent to the opening 14, a transport unit (not shown) that transports the workpiece 1 to the chuck table 20 or the like is arranged. The workpiece 1 accommodated in the cassette 12 is pulled out from the cassette 12 by the transport unit and transported to the chuck table 20.

Then, the ring frame 7 that supports the workpiece 1 via the adhesive tape 9 is gripped by the clamp 24. Further, a suction source connected to the chuck table 20 is activated to apply negative pressure to the workpiece 1 from the holding surface 22 via the adhesive tape 9. Then, the workpiece 1 is sucked and held by the chuck table 20.

A support structure 28 that supports a processing unit (cutting unit) 26 that cuts the workpiece 1 is arranged on the upper surface of the base 4 so as to project above the opening 14. At the upper front surface of the support structure 28, there are an indexing feed unit 30a that moves the processing unit 26 along the indexing and feeding direction (Y-axis direction), and an elevating unit 30b that moves the processing unit 26 up and down along the Z-axis direction. It is provided.

The indexing and feeding unit 30a includes a pair of Y-axis guide rails 32 arranged on the front surface of the support structure 28 and parallel to the Y-axis direction. A Y-axis moving plate 34 is slidably attached to the Y-axis guide rail 32. A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 34, and a Y-axis ball screw 36 parallel to the Y-axis guide rail 32 is screwed into this nut portion. ing.

A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 36. When the Y-axis ball screw 36 is rotated by the Y-axis pulse motor, the Y-axis moving plate 34 moves in the Y-axis direction along the Y-axis guide rail 32.

A lifting unit 30b is provided on the surface (front surface) of the Y-axis moving plate 34. The elevating unit 30b includes a pair of Z-axis guide rails 38 fixed to the surface of the Y-axis moving plate 34 and parallel to the Z-axis direction. A Z-axis moving plate 40 is slidably attached to the Z-axis guide rail 38.

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 40, and a Z-axis ball screw 42 parallel to the Z-axis guide rail 38 is screwed into this nut portion. ing. A Z-axis pulse motor 44 is connected to one end of the Z-axis ball screw 42 . When the Z-axis ball screw 42 is rotated by the Z-axis pulse motor 44, the Z-axis moving plate 40 moves in the Z-axis direction along the Z-axis guide rail 38.

A processing unit (cutting unit) 26 that cuts the workpiece 1 held by the chuck table 20 and a microscope that images the upper surface of the workpiece 1 held by the chuck table 20 are provided at the bottom of the Z-axis moving plate 40. The unit 46 is fixed. When the Y-axis moving plate 34 is moved in the Y-axis direction by the indexing and feeding unit 30a, the processing unit 26 and the microscope unit 46 are indexed and fed. Further, when the Z-axis moving plate 40 is moved in the Z-axis direction by the lifting unit 30b, the processing unit 26 and the microscope unit 46 are moved up and down.

FIG. 2 includes a perspective view schematically showing the processing unit (cutting unit) 26. As shown in FIG. The processing unit 26 includes an annular cutting blade 48, and cuts the workpiece 1 with the cutting blade 48. The processing unit 26 includes a spindle housing 50 that rotatably accommodates the base end side of a spindle (not shown) that constitutes a rotation axis parallel to the Y-axis direction.

A rotation drive source such as a motor that rotates the spindle is housed inside the spindle housing 50, and when this rotation drive source is operated, the spindle rotates. An annular cutting blade (processing tool) 48 is fixed to the tip of the spindle. Rotating the spindle allows the cutting blade 48 to rotate. The cutting blade 48 includes a grindstone portion including a bonding material formed in an annular shape of a metal material, a resin material, or the like, and abrasive grains made of diamond or the like and dispersed and fixed in the bonding material.

The Z-axis moving plate 40 is moved to lower the cutting blade 48 to a predetermined height, and the machining feed unit (X-axis moving mechanism) is activated to process and feed the chuck table 20 so that the grinding wheel portion of the rotating cutting blade 48 is covered. When brought into contact with the workpiece 1, the workpiece 1 is cut. When the workpiece 1 is cut along the planned dividing line 3, machining marks (dividing grooves) 13 are formed on the workpiece 1. When machining marks 13 are formed along all division lines 3 of the workpiece 1, the workpiece 1 is divided into individual device chips.

When the workpiece 1 is cut with the cutting blade 48, cutting waste and machining heat are generated from the grindstone portion and the workpiece 1. Therefore, while the cutting blade 48 is cutting the workpiece 1, machining water (cutting water) made of pure water or the like is supplied to the cutting blade 48 and the workpiece 1. The cutting water removes cutting debris and machining heat.

As shown in FIG. 2, the processing unit 26 further includes a blade cover 52 that covers the cutting blade 48, and a processing water supply nozzle 54 connected to the blade cover 52. Furthermore, a machining water spray nozzle (not shown) for spraying machining water onto the cutting blade 48 is provided inside the blade cover 52 . Processing water is supplied to the cutting blade from a processing water supply nozzle 54 or the like. The blade cover 52 has a built-in liquid feeding path whose end communicates with the processing water supply nozzle 54 and the like, and is provided with a connecting portion 62 at the starting point of the liquid feeding path. Processing water is supplied to the connection portion 62 .

As shown in FIG. 1, a cleaning unit 56 for cleaning the workpiece 1 after processing is provided on the rear side of the opening 14 of the base 4. The processed workpiece 1 is transported from the chuck table 20 to the cleaning unit 56 by a transport unit (not shown).

The cleaning unit 56 includes a spinner table 58 that suctions and holds the workpiece 1 within a cylindrical cleaning space. Further, above the spinner table 58, a spray nozzle 60 is arranged that sprays a cleaning fluid (typically, two fluids that are a mixture of water and air) toward the workpiece 1. The workpiece 1 can be cleaned by rotating the spinner table 58 holding the workpiece 1 and spraying cleaning fluid from the injection nozzle 60. The workpiece 1 cleaned by the cleaning unit 56 is stored in the cassette 12 by a transport unit (not shown), for example.

FIG. 3 includes a side view schematically showing the lower end of the microscope unit 46. As shown in FIG. The microscope unit 46 includes an objective lens unit 64 facing the upper surface of the workpiece 1 held by the chuck table 20. The objective lens unit 64 includes an objective lens (not shown) that receives light reflected by the workpiece 1, and a plurality of light sources (not shown) such as LEDs arranged so as to surround the objective lens. When the light source is activated to illuminate the workpiece 1, the light diffusely reflected by the workpiece 1 reaches the objective lens and travels through the optical system 66 of the microscope unit 46.

An image sensor (not shown) such as a CCD sensor or a CMOS sensor is disposed at one end of the optical system 66, and the light traveling through the optical system 66 is received by this image sensor. The microscope unit 46 transmits a captured image formed based on the light received by the image sensor to the control unit of the processing device 2.

The captured image obtained by the microscope unit 46 is used, for example, when positioning the processing unit 26 and the like to process a predetermined location. That is, when the surface 1a of the workpiece 1 before processing is imaged with the microscope unit 46, the planned dividing line 3 set on the surface 1a of the workpiece 1 can be detected from the obtained captured image.

Further, the captured image obtained by the microscope unit 46 is used, for example, when evaluating the quality of the processing marks 13 formed on the workpiece 1 by processing. That is, when the surface 1a of the workpiece 1 after processing is imaged with the microscope unit 46, the state of the processing marks 13 and the quality of processing can be evaluated from the captured image in which the processing marks 13 are captured. If it is found that the processing is not performed with the specified quality, the device chip formed near the problematic processing marks 13 will be recognized as a defective product, and the necessary adjustments will be made to each component of the processing equipment 2. will be implemented.

Here, cutting water supplied to the processing tool (cutting blade) 48 and the like during cutting of the workpiece 1 remains in the machining mark 13 of the workpiece 1 . Therefore, even if the workpiece 1 is imaged with the microscope unit 46 as it is, the quality of the formed machining marks 13 cannot be accurately evaluated. Therefore, immediately before the microscope unit 46 images the workpiece 1, high-pressure fluid (gas, air) is injected onto the surface of the workpiece 1 to remove cutting water from the machining marks 13.

FIG. 3 includes a cross-sectional view schematically showing a fluid injection nozzle mechanism 68 according to this embodiment that injects high-pressure fluid (gas, air) to the workpiece 1 to remove cutting water. . The fluid ejection nozzle mechanism 68 has a housing 72 fixed to the microscope unit 46. A fluid supply path 74 is formed inside the casing 72 and serves as a passage for fluid.

The fluid injection nozzle mechanism 68 includes a connection part 70 to which a pipe 71 is connected at the upper end of a housing 72, and a pipe 71 such as a tube connected to a fluid supply source (not shown) is connected to the connection part 70. be done. The fluid supply source is, for example, equipment such as a factory where the processing device 2 is installed, or a gas cylinder, and has a function of supplying high-pressure fluid such as dry air or dry nitrogen to the fluid injection nozzle mechanism 68 through the pipe 71. In other words, a fluid supply source is connected to one end of the fluid supply path 74 through the pipe 71.

However, the fluid that the fluid supply source supplies to the fluid injection nozzle mechanism 68 is not limited to gas. That is, the fluid supply source may supply a liquid such as city water, pure water, or an organic solvent to the fluid injection nozzle mechanism 68. In this case, the fluid supply source is equipment such as a factory or a tank. Further, the fluid supply source may supply a mixed fluid of gas and liquid to the fluid injection nozzle mechanism 68 . In this case, gas and liquid are mixed in the process leading to the fluid injection nozzle mechanism 68. Hereinafter, a case where the fluid supplied by the fluid supply source is gas will be described as an example, but the fluid is not limited to this.

A base end side of a pipe nozzle 76 that injects fluid onto the workpiece 1 held on the chuck table 20 is fixed to the housing 72 of the fluid injection nozzle mechanism 68 . That is, the other end of the fluid supply path 74 is connected to the base end of the pipe nozzle 76 . A spout 76a is formed at the end of the pipe nozzle 76, and the fluid 76b that has traveled through the fluid supply path 74 and the pipe nozzle 76 and reached the spout 76a is jetted to the outside from the spout 76a. Note that the housing 72 and the pipe nozzle are made of metal such as stainless steel (SUS) or aluminum.

The housing 72 is formed with an insertion hole 72a that extends from the fluid supply path 74 to the lower end of the housing 72 and into which the pipe nozzle 76 is inserted, and a screw hole 78 that communicates with the insertion hole 72a from the side surface of the housing 72. ing. A fixture 80 such as a fixing screw is screwed into the screw hole 78 . When fixing the pipe nozzle 76 to the housing 72, insert the base end of the pipe nozzle 76 into the insertion hole 72a of the housing 72, tighten the fixture 80 into the screw hole 78, and fix the pipe nozzle with the fixture 80. Press 76 from the side. Thereby, the pipe nozzle 76 is fixed to the housing 72.

Note that if the height of the pipe nozzle 76 is too high, the fluid 76b cannot be effectively supplied to the workpiece 1. If the height of the pipe nozzle 76 is too low, the pipe nozzle 76 will collide with the workpiece 1 when the microscope unit 46 is positioned at a height position suitable for imaging the surface 1a side of the workpiece 1. . Therefore, when the pipe nozzle 76 is fixed to the housing 72, the pipe nozzle 76 is adjusted to an appropriate height.

However, as the processing device 2 is repeatedly operated, the fixture 80 that secures the pipe nozzle 76 in the fluid injection nozzle mechanism 68 may loosen. Then, when an attempt is made to inject the fluid 76b such as air from the pipe nozzle 76 to the workpiece 1 with the fixture 80 loosened, the pipe nozzle 76 falls off forcefully and hits the workpiece 1 held on the chuck table 20. A problem arises when a collision occurs and the workpiece 1 is damaged.

Therefore, in the fluid injection nozzle mechanism 68 according to the present embodiment, a fixing member 82 for fixing the pipe nozzle 76 is provided within the fluid supply path 74. Next, the structure and function of the fixing member 82 will be explained.

FIG. 3 schematically shows a side view of the fixing member 82 incorporated into the fluid injection nozzle mechanism 68. FIG. 4 is a perspective view schematically showing the fixing member 82. As shown in FIG. In FIG. 4, some invisible elements are indicated by broken lines. FIG. 5 includes a cross-sectional view schematically showing the fixing member 82 disposed in the fluid supply path 74. As shown in FIG. The fixing member 82 has a function of fixing the upper end of the pipe nozzle 76 that is passed through the insertion hole 72 a of the housing 72 of the fluid injection nozzle mechanism 68 and reaches the fluid supply path 74 .

The fixing member 82 is preferably made of a resin material that can be elastically deformed relatively easily, such as natural rubber, butyl rubber, urethane rubber, silicone rubber, ethylene propylene rubber, styrene butadiene rubber, isoprene rubber, or nitrile rubber. For the fixing member 82, a material that is softer and more easily deformed than at least the housing 72 and the pipe nozzle 76 is used. The fixing member 82 is shaped into the shape described below by injection molding, cutting, or the like.

The fixing member 82 includes a cylindrical support portion 84 and a truncated conical press holding portion 86 provided on the upper surface of the support portion 84 and having an inclined side surface 88. In the fixing member 82, the support part 84 and the press holding part 86 are integrated, and the two may be directly connected without any other element disposed between them. In this case, the boundary between the support part 84 and the press holding part 86 is not necessarily clear. Alternatively, other elements may be disposed between the support section 84 and the press holding section 86.

A through hole 90 passing through the support portion 84 and the press holding portion 86 is formed in the center of the fixing member 82 . As shown in FIG. 5, the through hole 90 is formed to have a diameter that roughly matches the diameter (outer diameter) of the pipe nozzle 76, and can accommodate the pipe nozzle 76 into which the pipe nozzle 76 is inserted. When the fluid supply source connected to the pipe 71 is operated while the pipe nozzle 76 is passed through the through hole 90 of the fixing member 82, the fluid 76b reaches the fluid supply path 74, and the proximal end side of the pipe nozzle 76 is activated. From there, it advances to the pipe nozzle 76.

Here, a part of the fluid 76b that reaches the fluid supply path 74 from the fluid supply source and advances collides with the inclined side surface 88 of the press holding portion 86 of the fixing member 82. In the fixed member 82, a force 92 having a component on the radially inner side of the pressure holding part 86 when received by the inclined side surface 88 of the pressure holding part 86 is applied from the fluid 76b to the pressure holding part 86.

When this force 92 acts, the pressing holding portion 86 of the fixing member 82 deforms, and the fixing member 82 presses the pipe nozzle 76 inserted into the through hole 90 radially inward. The outer peripheral surface of the pipe nozzle 76 is pressed from the periphery by this pressing force 94 and is fixed to the fixing member 82 . Therefore, even if the fixture 80 loosens with respect to the screw hole 78, the force of the fluid 76b supplied from the fluid supply source to the fluid supply path 74 is converted into a pressing force 94 for fixing the pipe nozzle 76. , the pipe nozzle 76 will not come off from the housing 72.

When the force of the fluid 76b that is about to be passed through the pipe nozzle 76 increases, the pressing force 94 that the fixing member 82 acts on the pipe nozzle 76 also increases. Therefore, regardless of the force of the fluid 76b trying to pass through the pipe nozzle 76 to be fixed, the pipe nozzle 76 is strongly fixed to the fixing member 82, and the pipe nozzle 76 is prevented from falling off.

Note that the cylindrical support portion 84 has a function of supporting the pressing holding portion 86 and providing strength to the fixing member 82 . If the pressure holding part 86 is not connected to the support part 84, the bottom of the pressure holding part 86 tends to deform so as to expand outward in the radial direction when the force 92 is applied to the pressure holding part 86. The pressing force 94 applied to the nozzle 76 may decrease. The support portion 84 has a function of suppressing radially outward deformation of the pressure holding portion 86 and preventing a reduction in the pressing force 94.

Note that the magnitude of the pressing force 94 that the pressing holding part 86 of the fixing member 82 acts on the pipe nozzle 76 depends on the slope of the inclined side surface 88 of the pressing holding part 86. The smaller the slope is, that is, the closer the inclined side surface 88 of the pressure holding part 86 is to parallel to the plane perpendicular to the through hole 90, the smaller the pressing force 94 becomes.

Here, the angle formed by the plane perpendicular to the extending direction of the through hole 90 in the cross section that appears when the fixing member 82 is cut along the plane including the extending direction of the through hole 90 and the inclined side surface 88 of the press holding part 86 The preferred range of is explained below. This angle is preferably 40° or more, more preferably 45° or more. If this angle is less than 40 degrees, the pressing force 94 generated due to the force 92 that the inclined side surface 88 of the pressing holding part 86 receives from the fluid 76b will not become sufficiently large.

On the other hand, this angle is preferably 75° or less, more preferably 60° or less. If this angle becomes too large, the height of the pressure holding portion 86 required to exert a sufficient pressing force 94 becomes too large, and the shape of the fluid supply path 74 in which the fixing member 82 is accommodated becomes too large. There will be restrictions on Further, the volume of the pressure holding portion 86 also increases, and the restoring force of the pressure holding portion 86 that resists the force 92 that the inclined side surface 88 receives from the fluid 76b increases, so that a large pressing force 94 becomes less likely to occur.

A case in which the fluid 76b is dry air, the supply pressure of the fluid 76b is about 0.3 MPa, and the weight of the pipe nozzle 76 is about 0.47 g will be specifically explained using an example. In this case, if the angle between the plane perpendicular to the extending direction of the through hole 90 and the inclined side surface 88 of the press holding part 86 is 45 degrees, even when the fixing member 80 loosens, the action of the fixing member 82 This prevents the pipe nozzle 76 from falling off.

As explained above, in the fixing member 82 according to the present embodiment and the fluid injection nozzle mechanism 68 in which the pipe nozzle 76 is fixed by the fixing member 82, the pipe nozzle 76 that injects the fluid 76b such as air may fall off. is prevented.

Note that the present invention is not limited to the description of the above embodiments, and can be implemented with various modifications. For example, in the above embodiment, the case where the fixing member 82 is composed of one support part 84 and one press holding part 86 has been described as an example. However, the fixing member 82 is not limited to this, and may have a plurality of press holding parts 86. For example, the fixing member 82 may include a plurality of pressing holding parts 86 arranged in series along the extending direction of the through hole 90. That is, the number of press holding portions 86 included in the fixing member 82 is not limited to one.

Furthermore, in the above embodiment, a case has been described in which the fluid jet nozzle mechanism 68 is used by being incorporated in the vicinity of the microscope unit 46 of the processing device (cutting device) 2, and the fixing member 82 is used in the fluid jet nozzle mechanism 68. However, one embodiment of the present invention is not limited thereto. The fluid injection nozzle mechanism 68 may be used in a processing device other than a cutting device, and may be used at a location other than the processing device. There is no limitation to the use of the fluid injection nozzle mechanism 68.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

1 Workpiece 1a Front side 1b Back side 3 Planned dividing line 5 Device 7 Ring frame 9 Adhesive tape 11 Frame unit 13 Processing marks 2 Processing device 4 Base 6 Corner 8 Opening 10 Cassette support 12 Cassette 14 Opening 16 Table cover 18 Dustproof Drip-proof cover 20 Chuck table 22 Holding surface 24 Clamp 26 Processing unit 28 Support structure 30a Index feed unit 30b Lifting unit 32, 38 Guide rail 34, 40 Moving plate 36, 42 Ball screw 44 Pulse motor 46 Microscope unit 48 Cutting blade 50 Spindle Housing 52 Blade cover 54 Processing water supply nozzle 56 Cleaning unit 58 Spinner table 60 Injection nozzle 62 Connection part 64 Objective lens unit 66 Optical system 68 Fluid injection nozzle mechanism 70 Connection part 71 Piping 72 Housing 72a Insertion hole 74 Fluid supply path 76 Pipe Nozzle 76a Spout 76b Fluid 78 Screw hole 80 Fixture 82 Fixing member 84 Support part 86 Pressure holding part 88 Side surface 90 Through hole 92 Force 94 Pressure force

Claims (2)

A fixing member into which a pipe nozzle is inserted and which fixes the pipe nozzle,
comprising a cylindrical support part and a truncated conical pressing holding part provided on the upper surface of the support part and having an inclined side surface,
A through hole into which the pipe nozzle can be inserted and accommodated, and which passes through the support part and the press holding part;
When the fluid is received by the inclined side surface of the pressure holding part, a force having a component on the inside of the pressure holding part in the radial direction is applied from the fluid to the pressure holding part, and the pressure holding part is deformed and the pressure holding part is deformed to prevent the penetration. A fixing member characterized in that the pipe nozzle inserted into the hole is fixed by pressing the pipe nozzle inward in the radial direction. A fluid injection nozzle mechanism,
pipe nozzle,
a fluid supply path connected to a fluid supply source at one end and connected to the pipe nozzle at the other end;
a fixing member disposed within the fluid supply path and fixing the pipe nozzle;
The fixing member is
comprising a cylindrical support part and a truncated conical pressing holding part provided on the upper surface of the support part and having an inclined side surface,
A through hole into which the pipe nozzle can be inserted and accommodated, and which passes through the support part and the press holding part;
When the inclined side surface of the pressure holding part receives the fluid supplied from the fluid supply source and traveling through the fluid supply path, a force having a component on the radially inner side of the pressure holding part is applied from the fluid to the pressure holding part. A fluid ejecting nozzle mechanism characterized in that the pressure holding portion deforms and presses the pipe nozzle inserted into the through hole radially inward and fixes the pipe nozzle.

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