JP2017019043A - End face correction jig and end face correction method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an end face correction jig which can easily position a correction grindstone and an end face of a mount, and an end face correction method.SOLUTION: An end face correction jig 1 comprises: a base 10 placed on a support base 114 to which a chuck table of a cutting device is attached; a grindstone fixing part 20 to which a correction grindstone 21 for grinding an end face of a mount of cutting means is fixed, and which is supported to a Y-direction with respect to the base 10 at one face 11 side of the base 10 so as to be advanceable and retractable; a communication passage 30 which penetrates the base 10, and opens while facing a lower face of the grindstone fixing part 20; and a position regulation part 40 which positions the base 10 placed on the support base 114 at a prescribed position and in a prescribed orientation with respect to the support base 114. In the end face correction jig 1, the grindstone fixing part 20 which is positioned in an end face correction start position after the base 10 is placed on the support base 114 is fixed to the support base 114 via chuck-table holding suction passages 115a, 115b possessed by the support base 114, and the communication passage 30.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an end face correction jig and an end face correction method.

  If the mount for holding the cutting blade is not vertical and flat with respect to the holding surface, the blade is supported obliquely with respect to the holding surface, and damage to the cutting blade and cutting defects (chipping or oblique cutting) of the workpiece are induced. Therefore, when exchanging the mount, maintenance work called end face correction for correcting the end face holding the cutting blade of the mount is performed (see Patent Document 1).

Japanese Patent Application Laid-Open No. 08-339977

  In the end face correction work, the end face of the mount and the correction grindstone are positioned very close to each other, and then the correction grindstone is moved in the direction in which the correction grindstone is brought close to the end face of the rotating spindle mount (Y-axis direction). Reciprocate in the (X-axis direction). At this time, if the end face and the correction grindstone are separated from each other at the end face correction start position, there is a lot of idling and wasteful time is generated. On the other hand, when the correction grindstone is caused to collide with an end surface that is not rotating, the correction grindstone is broken or the end surface is damaged. Therefore, it is a careful work for positioning the correction grindstone, and the skill of the worker is necessary.

  An object of the present invention is to provide an end surface correcting jig and an end surface correcting method capable of solving the above-described problems and easily positioning a correction grindstone and an end surface of a mount.

  In order to solve the above-described problems and achieve the object, an end face correction jig according to the present invention includes a chuck table that holds a workpiece on a holding surface parallel to the X-axis direction and the Y-axis direction, and the chuck table. The cutting blade is supported by an end surface parallel to the X-axis direction of a mount attached to a support base for sucking and holding and a spindle having a rotation axis parallel to the Y-axis direction, and the workpiece is cut in the X-axis direction. The mount of a cutting apparatus comprising: cutting means; work feed means for machining and feeding the chuck table in the X-axis direction; and index feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction. An end face correction jig used for correcting the end face to a flat surface, wherein a base placed on the support base and a correction grindstone for polishing the end face are fixed, and the base face is fixed to one side of the base. Advancing and retracting in the Y-axis direction with respect to the base A grindstone fixing portion that is supported at present, a communication passage that opens through the base and faces the lower surface of the grindstone fixing portion, and the base that is placed on the support base. A chuck that the support base has the grindstone fixing portion positioned at the end face correction start position after the base is placed on the support base. It is fixed to the support base via a suction path for holding a table and the communication path.

  The end face correction method of the present invention is an end face correction method for correcting the end face of the mount of the cutting apparatus with the end face correction jig, wherein the end face correction jig is placed on the support base and the position is corrected. A jig positioning step in which the advancing and retreating direction of the grindstone fixing portion is made parallel to the Y-axis direction by the defining portion, and the correction grindstone faces the mount at an initial position approaching the end face of the mount; and the jig positioning step After performing the first fixing step of fixing the base to the support base via the first suction path of the support base, and after performing the first fixing step, the cutting means is moved in the Y-axis direction. By indexing and feeding and positioning the mount at the end face correction start position, the correction grindstone is pressed by the end face, and the grindstone fixing part is moved backward from the initial position, and is positioned at a position where the mount and the correction grindstone are in contact with each other. Whetstone fixing part with position And a second fixing step of fixing the grindstone fixing portion to the support base via the second suction path and the communication path of the support base after performing the step and the grindstone fixing portion positioning step, And an end face correcting step of polishing the end face with the correction grindstone while rotating the spindle after performing the second fixing step.

  Therefore, the present invention has an effect that the correction grindstone and the end face of the mount can be easily positioned.

FIG. 1 is an external perspective view showing a configuration of a cutting apparatus in which an end face correction jig according to an embodiment is used. FIG. 2 is a perspective view showing the configuration of the end face correction jig according to the embodiment. FIG. 3 is a plan view of the end face correction jig according to the embodiment. FIG. 4 is an exploded perspective view showing the configuration of the end face correction jig according to the embodiment. FIG. 5 is a perspective view of the base of the end face correction jig according to the embodiment as viewed from below. 6 is a cross-sectional view taken along line VI-VI in FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. FIG. 8 is a sectional view taken along line VIII-VIII in FIG. FIG. 9 is a sectional view taken along line IX-IX in FIG. FIG. 10 is a cross-sectional view showing a jig positioning step and a first fixing step of the end face correction method according to the embodiment. FIG. 11 is a cross-sectional view illustrating a grindstone fixing portion positioning step of the end surface correction method according to the embodiment. 12 is a cross-sectional view showing a state where the mount shown in FIG. 11 is lowered. FIG. 13 is a cross-sectional view illustrating a second fixing step of the end face correction method according to the embodiment. FIG. 14 is a cross-sectional view showing an end face correcting step of the end face correcting method according to the embodiment. FIG. 15 is a flowchart of the end face correction method according to the embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
An end face correction jig according to an embodiment of the present invention will be described with reference to the drawings. 1 is an external perspective view showing a configuration of a cutting apparatus in which an end face correction jig according to the embodiment is used, and FIG. 2 is a perspective view showing a configuration of the end face correction jig according to the embodiment. FIG. 4 is a plan view of an end face correction jig according to the embodiment, FIG. 4 is an exploded perspective view showing a configuration of the end face correction jig according to the embodiment, and FIG. 5 is an end face correction according to the embodiment. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 4, and FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 2, and FIG. 9 is a cross-sectional view taken along line IX-IX in FIG.

  The end face correction jig 1 shown in FIG. 2 according to the embodiment is a jig used when the end face 125 of the mount 124 in FIG. 10 of the cutting apparatus 100 shown in FIG. A cutting apparatus 100 shown in FIG. 1 is an apparatus that cuts a workpiece W and divides the workpiece W into individual devices D. In the present embodiment, the workpiece W divided into the individual devices D by the cutting apparatus 100 is a disk-shaped semiconductor wafer or optical device wafer using silicon, sapphire, gallium, or the like as a base material. As shown in FIG. 1, the workpiece W is formed with devices D in each region partitioned by the division lines L formed in a lattice shape on the upper surface Wa. The workpiece W has a dicing tape T attached to the back surface Wb on the back side of the upper surface Wa, an annular frame F attached to the dicing tape T, and attached to the annular frame F via the dicing tape T. The workpiece W is cut along the division line L by the cutting apparatus 100 and divided into individual devices D.

  As shown in FIG. 1, the cutting apparatus 100 includes a chuck table 110 that holds a workpiece W on a holding surface 110a, a support base 114, and a workpiece W held on the chuck table 110 in a horizontal direction and an apparatus. Cutting means 120 for cutting in the X-axis direction parallel to the lateral direction of the main body 102, X-axis moving means 130 for processing and feeding the chuck table 110 in the X-axis direction, and the cutting means 120 parallel to the horizontal direction and the X-axis Y-axis moving means 140 for indexing and feeding in the Y-axis direction orthogonal to the direction, and Z-axis moving means for cutting and feeding the cutting means 120 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction 150 and the control means 200 are provided at least. As shown in FIG. 1, the cutting device 100 includes two cutting means 120, that is, a two-spindle dicer, a so-called facing dual type cutting device.

  The chuck table 110 is installed on the support base 114, the workpiece W before cutting is placed on the holding surface 110a, and the workpiece is attached to the opening of the annular frame F via the dicing tape T. The workpiece W is held. The chuck table 110 is provided with a holding surface 110a that holds the workpiece W and is made of porous ceramic or the like, and a ring-shaped frame that surrounds the holding portion 111 and is made of a conductive metal. It is a disk shape provided with a portion 112. The holding surface 110a is parallel to both the X-axis direction and the Y-axis direction. The chuck table 110 includes a plurality of clamp portions 113 provided around the frame portion 112 and driven by an air actuator to sandwich the annular frame F around the workpiece W.

  The support base 114 holds the chuck table 110 by suction. The support base 114 is formed in a disk shape, is supported by the X-axis moving means 130, and is moved in the X-axis direction with respect to the apparatus main body 102. The support base 114 is provided with a suction path 115 for holding the chuck table. The suction path 115 opens to the upper surface 114a of the support base 114 and is connected to the vacuum suction source 116 shown in FIGS. In the present embodiment, as the suction path 115, a first suction path 115a opened at the center of the upper surface 114a of the support base 114, and a plurality of second suction paths 115b provided on the outer periphery than the first suction path 115a are provided. It is done. The first suction path 115a and the second suction path 115b are connected to the vacuum suction source 116 via the on-off valves 117a and 117b shown in FIGS. 6 and 7, respectively.

  An annular O-ring 118 disposed coaxially with the first suction path 115a is provided on the outer periphery of the first suction path 115a. The O-ring 118 is made of an elastic resin such as rubber and is attached in a circular recess 119 provided in the center of the support base 114, and protrudes from the upper surface 114a when attached in the circular recess 119. The O-ring 118 maintains an airtight space between the support base 114 and the chuck table 110. In addition, two second suction paths 115b are provided in the present embodiment.

  The support base 114 has the chuck table 110 mounted on the upper surface 114a, and is sucked and held by the vacuum suction source 116 through the suction paths 115a and 115b, whereby the chuck table 110 is sucked and held, and the holding surface 110a of the chuck table 110 is held. The workpiece W placed on is sucked and held through the holding portion 111. The support base 114 is provided so as to be rotatable around a central axis (parallel to the Z axis) by a rotational drive source (not shown).

  The cutting means 120 includes a cutting blade 121 for cutting the workpiece W held on the chuck table 110, and a spindle 122 (shown in FIG. 10) having a rotation axis parallel to the Y-axis direction. The cutting means 120 is provided so as to be movable in the Y-axis direction by the Y-axis moving means 140 with respect to the workpiece W held on the chuck table 110, and in the Z-axis direction by the Z-axis moving means 150. It is provided movably.

  As shown in FIG. 1, one cutting means 120 is provided on one column portion 103 a erected from the apparatus main body 102 via a Y-axis moving means 140, a Z-axis moving means 150, and the like. As shown in FIG. 1, the other cutting means 120 is provided on the other column portion 103 b erected from the apparatus main body 102 via the Y-axis moving means 140, the Z-axis moving means 150, and the like. Note that the upper ends of the column portions 103a and 103b are connected by a horizontal beam 103c.

  The cutting means 120 can position the cutting blade 121 at an arbitrary position on the holding surface 110 a of the chuck table 110 by the Y-axis moving means 140 and the Z-axis moving means 150. One cutting means 120 is fixed so that an image pickup means 128 for picking up an image of the upper surface Wa of the workpiece W moves integrally. The image pickup unit 128 includes a CCD camera that picks up an image of a region to be divided of the workpiece W before being divided and held by the chuck table 110. The CCD camera images the workpiece W held on the chuck table 110, obtains an image for performing alignment for positioning the workpiece W and the cutting blade 121, and controls the obtained image as control means. Output to 200.

  The cutting blade 121 is an extremely thin cutting grindstone having a substantially ring shape. The spindle 122 cuts the workpiece W by rotating the cutting blade 121. The spindle 122 is accommodated in the spindle housing 123, and the spindle housing 123 is supported by the Z-axis moving unit 150. The axes of the spindle 122 and the cutting blade 121 of the cutting means 120 are set parallel to the Y-axis direction.

  As shown in FIG. 10, the spindle 122 is mounted with a mount 124 for mounting the cutting blade 121 at the tip. The mount 124 is made of a conductive metal, and is formed in a disk shape having a boss portion 124a in which a hole (not shown) is formed in the center. The mount 124 is attached to the tip of the spindle 122 through a boss portion (not shown) provided at the tip of the spindle 122. The mount 124 is fixed to the tip of the spindle 122 by screwing a bolt into a screw hole of a boss provided at the tip of the spindle 122.

  The spindle 122 passes the boss part 124a of the mount 124 attached to the tip through a through-hole provided in the center of the cutting blade 121, and a nut (not shown) is screwed onto the outer periphery of the boss part 124a, whereby the cutting blade 121 is nuted. And fix it.

  The cutting means 120 is attached to the tip of the spindle 122 by bringing the cutting blade 121 into contact with an end face 125 parallel to both the X-axis direction and the Z-axis direction provided on the outer peripheral portion of the mount 124 attached to the spindle 122. . As described above, the cutting means 120 supports the cutting blade 121 on the end face 125 of the mount 124. For this reason, when the end surface 125 of the mount 124 is not flat or the angle between the end surface 125 and the axis of the spindle 122 is not a right angle, the cutting means 120 flutters the cutting blade 121 when the spindle 122 rotates, There is a problem that it cannot be cut precisely. The end surface 125 is corrected to a plane having a right angle with the axis of the spindle 122 using the end surface correcting jig 1 shown in FIGS.

  The X-axis moving unit 130 is a processing feed unit that moves the chuck table 110 in the X-axis direction by moving the chuck table 110 in the X-axis direction. The X-axis moving unit 130 includes an X-axis ball screw (not shown) that is provided on the apparatus main body 102 so as to be rotatable about the axis, an X-axis pulse motor (not shown) that rotates the X-axis ball screw about the axis, The X-axis guide rail is not included. The X-axis ball screw has an axial center disposed in parallel with the X-axis direction, and is screwed with a nut (not shown) provided at the lower portion of the support base 114 that supports the chuck table 110. The pair of X-axis guide rails are arranged on the apparatus main body 102 in parallel with the X-axis ball screw, and support a rail receiving portion (not shown) provided below the support base 114 so as to be movable in the X-axis direction. It is. The X-axis moving means 130 moves the support base 114 in the X-axis direction while being guided by the X-axis guide rail by rotating the X-axis ball screw with the rotational force generated by the X-axis pulse motor. Thus, the support base 114 moves in the X-axis direction with respect to the apparatus main body 102 when the X-axis pulse motor rotates the X-axis ball screw around the axis.

  The Y-axis moving means 140 is an index feeding means for indexing and feeding the cutting means 120 by moving the cutting means 120 in the Y-axis direction. The Y-axis moving unit 140 moves the blade moving base 145 supporting the cutting unit 120 in the Y-axis direction with respect to the apparatus main body 102. As shown in FIG. 1, the Y-axis moving means 140 is provided on the horizontal beam 103c so as to be rotatable around the axis, and rotates the Y-axis ball screw 141 and the Y-axis ball screw 141 around the axis. A shaft pulse motor 142 and a pair of Y-axis guide rails 143 are included. Two Y-axis ball screws 141 are provided corresponding to the cutting means 120. The Y-axis ball screw 141 has an axial center arranged in parallel with the Y-axis direction, and is screwed with a nut (not shown) provided on the blade moving base 145. Two Y-axis pulse motors 142 are provided corresponding to the Y-axis ball screw 141, and rotate the corresponding Y-axis ball screw 141 around the axis. The pair of Y-axis guide rails 143 are disposed on the horizontal beam 103c in parallel with the Y-axis ball screw 141, and each support a rail receiving portion (not shown) provided on the blade moving base 145 so as to be movable in the Y-axis direction. To do. The Y-axis moving unit 140 rotates and drives the Y-axis ball screw 141 by the rotational force generated by the Y-axis pulse motor 142, thereby guiding the blade moving base 145 by the pair of Y-axis guide rails 143 in the Y-axis direction. Move to. In this way, the blade movement base 145 moves in the Y-axis direction with respect to the horizontal beam 103c when the Y-axis pulse motor 142 rotates the Y-axis ball screw 141 about the axis.

  The Z-axis moving means 150 realizes cutting feed to the workpiece W by moving the cutting means 120 in the Z-axis direction. The Z-axis moving unit 150 moves the cutting movement base 154 supporting the cutting unit 120 in the Z-axis direction with respect to the apparatus main body 102. The Z-axis moving means 150 includes a Z-axis ball screw 151 provided on the blade moving base 145 so as to be rotatable about the axis, a Z-axis pulse motor 152 for rotating the Z-axis ball screw 151 about the axis, A pair of Z-axis guide rails 153 is included. The Z-axis ball screw 151 has an axial center arranged in parallel with the Z-axis direction, and is screwed with a nut (not shown) provided on the cutting movement base 154. The pair of Z-axis guide rails 153 are arranged on the blade movement base 145 in parallel with the Z-axis ball screw 151, and a rail receiving portion (not shown) provided on the cutting movement base 154 is movable in the Z-axis direction. It is something to support. The Z-axis moving unit 150 rotates and drives the Z-axis ball screw 151 by the rotational force generated by the Z-axis pulse motor 152, thereby guiding the incision moving base 154 with the pair of Z-axis guide rails 153 in the Z-axis direction. Move to. Thus, the incision moving base 154 moves in the Z-axis direction with respect to the horizontal beam 103c when the Z-axis pulse motor 152 rotates the Z-axis ball screw 151 around the axis.

  Further, the cutting apparatus 100 includes a cassette elevator 170 on which a cassette 160 that accommodates the workpiece W before and after cutting is placed and moves the cassette 160 in the Z-axis direction, and a cleaning unit that cleans the workpiece W after cutting. 180, a transport unit (not shown) that transports the workpiece W between the cassette 160, the chuck table 110, and the cleaning unit 180.

  Note that the cutting apparatus 100 performs the machining operation on the workpiece W by controlling the above-described components by the control unit 200. The control means 200 includes a computer system. The control unit 200 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. And have. The arithmetic processing device of the control means 200 performs arithmetic processing according to the computer program stored in the storage device, and sends a control signal for controlling the cutting device 100 to the above-mentioned of the cutting device 100 via the input / output interface device. Output to the specified component. Further, the control means 200 is connected to a display means (not shown) constituted by a liquid crystal display device or the like for displaying a processing operation state or an image, or an input means 210 used when an operator registers processing content information. Yes. The input unit 210 includes at least one of a touch panel provided on the display unit, a keyboard, and the like.

  The end surface correction jig 1 is attached to the support base 114 from which the chuck table 110 has been removed, and corrects the end surface 125 of the mount 124 of the cutting apparatus 100 to a plane having a right angle with the axis of the spindle 122. It is used for. As shown in FIGS. 2, 3, and 4, the end surface correction jig 1 includes a base 10 placed on a support base 114, and a grindstone fixing portion 20 to which a correction grindstone 21 that polishes the end surface 125 is fixed. The communication path 30 penetrating the base 10, the position defining part 40 for positioning the base 10 on the support base 114, and the advance / retreat support part 50 for supporting the grindstone fixing part 20 so as to freely advance and retract.

  The base 10 is formed in a disk shape having the same diameter as the upper surface 114 a of the support base 114. The base 10 is formed such that one circular surface 11 and the other circular surface 12 are formed in parallel, and the thickness is constant throughout. The other surface 12 of the base 10 is placed on the upper surface 114 a of the support base 114. The base 10 is provided with a circular recess 13 into which the O-ring 118 enters the other surface 12. Further, when the base 10 is placed on the upper surface 114a of the support base 114, both the one surface 11 and the other surface 12 are parallel to both the X-axis direction and the Y-axis direction, and the Z-axis direction. Orthogonal to

  The grindstone fixing portion 20 is formed in a frame shape having a rectangular outer edge and is disposed on one surface 11 of the base 10. When the base 10 is positioned on the support base 114 by the position defining portion 40, the grindstone fixing portion 20 is supported by the advance / retreat support portion 50 so as to be able to advance and retract in the Y-axis direction. When the base 10 is positioned on the support base 114 by the position defining portion 40, the grindstone fixing portion 20 positions the correction grindstone 21 at one end in the Y-axis direction, and the longitudinal direction of the correction grindstone 21 is parallel to the Y-axis direction. At the same time, the end face correcting portion 22 which is a plane for correcting the end face 125 is made parallel to both the X-axis direction and the Z-axis direction. The correction grindstone 21 is configured by hardening abrasive grains such as white alundum (WA) and green carborundum (GC) with a mixture of a resin and a conductive material. When conductive resin is used, the abrasive grains may be dispersed in the conductive resin material and hardened. As an alternative, the modified grindstone 21 may be formed from a cemented carbide material. The correction grindstone 21 includes an end surface correction portion 22 that is a flat surface that comes into contact with the end surface 125 and corrects the angle between the end surface 125 and the spindle 122 at a right angle. The grindstone fixing part 20 and the base 10 are made of a conductive metal such as stainless steel.

  The communication path 30 faces the grindstone fixing part 20 and opens on one surface 11 of the base 10. The communication path 30 communicates with the second suction path 115 b when the base 10 is positioned on the support base 114 by the position defining portion 40. The communication path 30 is a hole that is parallel to the Z-axis direction and has a constant inner diameter in the Z-axis direction when the base 10 is positioned on the support base 114 by the position defining portion 40. Further, the communication path 30 is disposed at a position facing the lower surface 20 a of the grindstone fixing part 20 placed on the one surface 11 of the base 10.

  The position defining unit 40 positions the base 10 placed on the support base 114 at a predetermined position and orientation with respect to the support base 114. Specifically, the position defining unit 40 positions the base 10 with respect to the support base 114 at a position that is coaxial with the support base 114 and the center axis overlapping the Z-axis direction, and the longitudinal direction of the correction grindstone 21 is the Y-axis. The base 10 is positioned in a direction parallel to the direction and facing the end face 125 of the mount 124 so that the end face correcting portion 22 faces the end face 125.

  As shown in FIG. 5, the position defining portion 40 includes a circular recess 13 and a position defining protrusion 41. The position defining projection 41 is formed in a convex cylindrical shape from the other surface 12 of the base 10. When the other surface 12 of the base 10 is placed on the upper surface 114 a of the support base 114, the position definition protrusion 41 is provided in the position definition hole shown in FIGS. 6 and 8 provided on the upper surface 114 a of the support base 114. 42. The position defining hole 42 is formed in the same shape and size as the position defining protrusion 41. When the O-ring 118 enters the circular recess 13, the position defining unit 40 positions the base 10 with respect to the support base 114 at a position that is coaxial with the support base 114 and the central axis overlapping the Z-axis direction. The position defining portion 40 has a direction in which the longitudinal direction of the correction grindstone 21 is parallel to the Y-axis direction and the end surface correcting portion 22 faces the end surface 125 of the mount 124 when the position defining projection 41 enters the position defining hole 42. The base 10 is positioned on.

  The advance / retreat support part 50 includes two support protrusions 51 as shown in FIGS. 6 and 8. The support protrusion 51 is formed in a convex cylindrical shape from one surface 11 of the base 10. The two support protrusions 51 are disposed at a position where the plan view of the inner side of the grindstone fixing portion 20 disposed on the one surface 11 of the base 10 can enter the rectangular hole 23. As shown in FIGS. 7 and 9, the outer diameter R of the support protrusion 51 is formed to be equal to the width H <b> 1 in the short direction of the hole 23 of the grindstone fixing portion 20. Further, the two support protrusions 51 are arranged at positions aligned in the Y-axis direction when the base 10 is positioned on the support base 114 by the position defining portion 40.

  When the base 10 is positioned on the support base 114 by the position defining portion 40, the distance K between the outer peripheral surfaces of the two support protrusions 51 on the side away from each other is formed smaller than the longitudinal width H2 of the hole 23. . The advancing / retreating support part 50 supports the grindstone fixing part 20 movably in the Y-axis direction with respect to the base 10 by the two support protrusions 51 entering the hole 23 inside the grindstone fixing part 20, and the grindstone fixing. The part 20 is supported so as to be movable back and forth in the Y-axis direction.

  Next, an end face correction method according to an embodiment of the present invention will be described with reference to the drawings. FIG. 10 is a cross-sectional view illustrating a jig positioning step and a first fixing step of the end surface correction method according to the embodiment, and FIG. 11 is a cross-sectional view illustrating a grindstone fixing portion positioning step of the end surface correction method according to the embodiment. 12 is a cross-sectional view showing a state where the mount shown in FIG. 11 is lowered, FIG. 13 is a cross-sectional view showing a second fixing step of the end surface correction method according to the embodiment, and FIG. It is sectional drawing which shows the end surface correction step of the end surface correction method which concerns on embodiment, and FIG. 15 is a flowchart of the end surface correction method which concerns on embodiment.

  The end surface correction method is a method of correcting the end surface 125 of the mount 124 of the cutting apparatus 100 with the end surface correction jig 1. As shown in FIG. 15, the end face correcting method includes a jig positioning step ST1, a first fixing step ST2, a grindstone fixing part positioning step ST3, a second fixing step ST4, and an end face correcting step ST5.

  First, in jig positioning step ST1, the operator fixes the mount 124 to the tip of the spindle 122 of one cutting means 120 of the cutting apparatus 100, and operates the cutting apparatus 100 from the input means 210 to stop the rotation of the spindle 122. The vacuum suction source 116 is stopped. The operator removes the chuck table 110 from the support base 114, and places the base 10 and the grindstone fixing portion 20 on the support base 114 in this order, as shown in FIG. 1 is placed. At this time, the O-ring 118 is accommodated in the circular recess 13 of the base 10, the position defining protrusion 41 of the base 10 is inserted into the position defining hole 42 of the support base 114, and The longitudinal direction and the advancing / retreating direction of the grindstone fixing portion 20 are made parallel to the Y-axis direction. Further, the two support protrusions 51 are inserted into the hole 23 inside the grindstone fixing portion 20, and the end surface correction portion 22 of the correction grindstone 21 is made to face the end surface 125 of the mount 124 of one cutting means 120 in the Y-axis direction. Of the two support protrusions 51, the support protrusion 51 on the side away from the correction grindstone 21 is brought into contact with the inner surface of the hole 23, and the end face 125 of the mount 124 of the one cutting means 120 that faces the grindstone fixing part 21. Keep it close to. The position of the grindstone fixing portion 20 that contacts the inner surface of the hole 23 with the support projection 51 on the side away from the correction grindstone 21 of the two support projections 51 is the initial position.

  The operator operates the input unit 210 to cause the cutting device 100 to perform the end face correction process. Then, in the end face correction process, the control means 200 moves the X-axis moving means 130 and the Y-axis to a predetermined position where the correction grindstone 21 faces the end face 125 of the mount 124 of the one cutting means 120 in the Y-axis direction. One cutting means 120 and support base 114 are positioned by means 140 and Z-axis moving means 150. Thus, the correction grindstone 21 is made to face the end surface 125 of the mount 124 at an initial position (indicated by a dotted line in FIG. 11) approaching the end surface 125 of the mount 124 of one cutting means 120. Then, the process proceeds to the first fixing step ST2.

  In the first fixing step ST2, after performing the jig positioning step ST1, the control means 200 drives the vacuum suction source 116, opens the on-off valve 117a, and closes the on-off valve 117b. Gas in the first suction path 115a is sucked by the vacuum suction source 116, the base 10 is sucked and held on the support base 114 via the first suction path 115a of the support base 114, and the base 10 is supported. It fixes to 114. After the first fixing step ST2, the on-off valve 117b is closed, so that the grindstone fixing part 20 is supported by the advance / retreat support part 50 so as to be able to advance and retract in the Y-axis direction. Proceed to grinding stone fixing part positioning step ST3.

  In the grindstone fixing portion positioning step ST3, after the first fixing step ST2 is performed, the control means 200 moves the one cutting means 120 that the correction grindstone 21 faces from the initial position indicated by the dotted line in FIG. The end face correction jig 1 is moved close to a predetermined movement amount I, and one cutting means 120 is indexed and fed in the Y-axis direction. Then, the end face correcting portion 22 of the correcting grindstone 21 contacts the end face 125 of the mount 124 of one cutting means 120. Thereafter, the correction grindstone 21 is pressed from the end face 125 of the mount 124, and the grindstone fixing portion 20 moves backward from the initial position indicated by the dotted line in FIG. 11 in a direction away from one of the cutting means 120. When the control unit 200 moves one cutting unit 120 in a predetermined movement amount I (shown in FIG. 11) in the Y-axis direction, the control unit 200 stops the Y-axis moving unit 140 and moves the cutting unit 120 in the Y-axis direction. Stop moving. Note that the amount of movement I at this time is L, where L is the distance between the end surface 125 of the mount 124 positioned in the jig positioning step ST1 and the end surface correcting portion 22 of the normal correcting grindstone 21. If the distance between the portion 22 and the end face correction portion 22 of the maximum-worn correction grindstone 21 is ΔL, then I> L + ΔL. Further, even if the grindstone fixing part 20 is retracted, the support protrusion 51 does not contact the inner surface of the hole 23. Therefore, since the maximum retraction amount of the grindstone fixing part 20 is IL, IL <H2-K. I <H2-K + L. Therefore, the movement amount I satisfies L + ΔL <I <H2−K + L.

  In this way, the correction grindstone 21 is pressed from the end surface 125 of the mount 124 and the grindstone fixing portion 20 moves backward from the initial position, so that the mount 124 is positioned at the end surface correction start position indicated by the solid line in FIG. It is positioned at a position where the correction grindstone 21 comes into contact. Then, the control means 200 lowers one of the cutting means 120 by the Z-axis moving means 150 so that the predetermined mount 124 does not come into contact with the base 10 and corrects the end face of the correction grindstone 21 as shown in FIG. One cutting means 120 is positioned at a position where the portion 22 faces the mount 124 in the inner peripheral portion of the end surface 125 of the mount 124. Then, the process proceeds to the second fixing step ST4.

  In the second fixing step ST4, after performing the grinding stone fixing portion positioning step ST3, the control means 200 opens the on-off valve 117b and causes the vacuum suction source 116 to suck the gas in the second suction path 115b and the communication path 30. Then, the grindstone fixing part 20 is sucked and held on the base 10 via the second suction path 115 b and the communication path 30, and the grindstone fixing part 20 is fixed to the support base 114. Thus, in the end surface correction jig 1, after the base 10 is placed on the support base 114, the grindstone fixing portion 20 positioned at the end surface correction start position is used to hold the chuck table 110 included in the support base 114. It is fixed to the support base 114 via the path 115 b and the communication path 30. Then, the process proceeds to the end face correction step ST5.

  In the end face correction step ST5, after the second fixing step ST4 is performed, the control means 200 rotates the spindle 122 and the X axis moving means 130 moves the support base 114, that is, the correction grindstone 21 in the X axis direction over the entire end face 125. One cutting means 120 is brought close to the correction grindstone 21 at a predetermined speed while reciprocating within a predetermined range in which the end of the mount 124 is polished with the correction grindstone 21. Thus, in the end surface correction step ST5, the end surface 125 of the mount 124 is brought into contact with the correction grindstone 21, and the angle formed between the end surface 125 and the axis of the spindle 122 is corrected to a right angle. When the end face correction step ST5 is performed for a predetermined time or a predetermined number of times, the control means 200 ends the end face correction process, that is, the end face correction method.

  In the end face correcting jig 1 and the end face correcting method of the embodiment, when the end face 125 of the mount 124 of the other cutting means 120 is corrected, the grindstone placed on the support base 114 in the jig positioning step ST1. The direction of the fixing portion 20 is reversed, and the correction grindstone 21 is made to face the end surface 125 of the mount 124 of the other cutting means 120.

  As described above, the end face correction jig 1 according to the embodiment makes the base 10 placed on the support base 114 parallel to the Y axis direction of the grindstone fixing portion 20 placed on the base 10. The position defining portion 40 is provided to make the longitudinal direction of the correction grindstone 21 parallel to the Y-axis direction. Further, the end surface correction jig 1 includes an advance / retreat support portion 50 that supports the grindstone fixing portion 20 on the base 10 so as to be movable back and forth in the Y axis direction. For this purpose, the end face correcting jig 1 and the end face correcting method include mounting the end face correcting jig 1 on the support base 114 and mounting the mount 124 and the correcting grindstone 21 at a position suitable for starting the correction of the end face 125. Can be easily positioned. Therefore, the end face correcting jig 1 and the end face correcting method can suppress the time required for positioning the cutting means 120 and the correcting grindstone 21 without damaging the correcting grindstone 21, and the end faces of the correcting grindstone 21 and the mount 124. 125 can be easily positioned.

  Further, the end face correction jig 1 according to the embodiment automatically places the end face correction jig 1 on the support base 114 and causes the control means 200 to perform an end face correction process, thereby automatically cutting the cutting apparatus 100. Since the end surface 125 of the mount 124 is corrected, anyone can easily correct the end surface 125 of the mount 124.

  The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the scope of the present invention. For example, in the embodiment, after the end surface correction jig 1 is placed on the support base 114, the operator operates the input unit 210 to cause the control unit 200 to perform the end surface correction process. After placing the end face correction jig 1 on the support base 114, the operator operates the input means 210, and the X-axis moving means 130, the Y-axis moving means 140, the Z-axis moving means 150, and the cutting means 120 are moved. The end face correction method may be implemented using the end face correction jig 1 by operating.

DESCRIPTION OF SYMBOLS 1 End surface correction jig | tool 10 Base 11 One surface 20 Grinding stone fixing | fixed part 20a Lower surface 21 Correction grindstone 30 Communication path 40 Position-defining part 100 Cutting device 110 Chuck table 114 Support base 115 Suction path 115a 1st suction path 115b 2nd suction path DESCRIPTION OF SYMBOLS 120 Cutting means 121 Cutting blade 122 Spindle 124 Mount 125 End surface 130 X-axis moving means (work feed means)
140 Y-axis moving means (index feed means)
W Workpiece ST1 Jig positioning step ST2 First fixing step ST3 Grinding wheel fixing part positioning step ST4 Second fixing step ST5 End face correction step

Claims (2)

Mounted on a chuck table that holds a workpiece on a holding surface parallel to the X-axis direction and the Y-axis direction, a support base that sucks and holds the chuck table, and a spindle that rotates parallel to the Y-axis direction. A cutting means for supporting a cutting blade on an end surface parallel to the X-axis direction of the mount and cutting the workpiece in the X-axis direction, a processing feed means for processing and feeding the chuck table in the X-axis direction, and the cutting means An end face correction jig for use in correcting the end face of the mount of a cutting apparatus to a flat surface, and an index feeding means for indexing and feeding in the Y axis direction perpendicular to the X axis direction,
A base placed on the support base;
A correction grindstone for polishing the end face is fixed, and a grindstone fixing portion that is supported on one surface side of the base so as to be movable forward and backward in the Y axis direction with respect to the base
A communication path that passes through the base and opens to face the lower surface of the grindstone fixing portion;
A position defining portion for positioning the base placed on the support base at a predetermined position and orientation with respect to the support base;
The grindstone fixing portion positioned at the end face correction start position after the base is placed on the support base is supported by the chuck table holding suction path of the support base and the communication path. An end face correction jig fixed to the base. An end face correcting method for correcting the end face of the mount of the cutting apparatus with the end face correcting jig according to claim 1,
The end face correction jig is placed on the support base, and the position defining part makes the advancement / retraction direction of the grindstone fixing part parallel to the Y-axis direction, and the correction grindstone is moved to an initial position approaching the end face of the mount. A jig positioning step to face the mount;
A first fixing step of fixing the base to the support base via a first suction path of the support base after performing the jig positioning step;
After carrying out the first fixing step, the cutting means is indexed and fed in the Y-axis direction, and the mount is positioned at the end face correction start position, whereby the correction grindstone is pressed by the end face, and the grindstone fixing portion is moved to the initial position. A grindstone fixing part positioning step that is retracted from a position and positioned at a position where the mount and the correction grindstone contact each other;
A second fixing step of fixing the grindstone fixing part to the support base via the second suction path of the support base and the communication path after performing the grinding stone fixing part positioning step;
An end face correction method comprising: an end face correction step of polishing the end face with the correction grindstone while rotating the spindle after performing the second fixing step.

Images