JP7034548B2 - Blade cover - Google Patents

Description

The present invention relates to a blade cover that covers a cutting blade.

Cutting devices are widely used for cutting plate-shaped workpieces such as semiconductor wafers, resin substrates, ceramic substrates, and glass substrates. The cutting process is performed by rotating a cutting blade mounted on the tip of the spindle of the cutting device to cut into the workpiece.

The cutting blade is attached to the tip of the spindle so as to be covered with a blade cover provided in the cutting device. The blade cover is generally provided with a nozzle (blade cooler nozzle) for supplying a cutting fluid for cooling the cutting blade. When cutting, the cutting fluid is supplied from the blade cooler nozzle to the contact area between the cutting blade and the workpiece, thereby suppressing machining defects caused by frictional heat generated between the cutting blade and the workpiece. At the same time, the cutting chips adhering to the workpiece can be discharged.

The position of the blade cooler nozzle is adjusted according to the outer diameter of the cutting blade and the like so that the cutting fluid is efficiently supplied to the contact area between the cutting blade and the workpiece. To adjust the position of the blade cooler nozzle, for example, change the height of the blade cooler nozzle while monitoring the positional relationship between the cutting blade and the blade cooler nozzle with the cutting blade mounted so as to be covered by the blade cover. It is done by. Further, Patent Document 1 discloses a method of using a nozzle adjusting jig for adjusting the position of a blade cooler nozzle.

Japanese Unexamined Patent Publication No. 2010-42490

Since the blade cover is provided so as to cover the cutting blade, it is difficult to confirm the exact positional relationship between the cutting blade and the blade cooler nozzle, and the work of adjusting the position of the blade cooler nozzle may be complicated. In particular, in a cutting device called a dual dicer, which is mounted on two spindles so that the cutting blades face each other, it is necessary to confirm the positional relationship between the cutting blade and the blade cooler nozzle between the two cutting blades. It becomes more difficult to adjust the position of the blade cooler nozzle.

Further, in the method using the nozzle adjusting jig described above, it is necessary to first manufacture a jig for adjusting the position of the nozzle with predetermined dimensions, and then mount the jig on a mount flange that supports the cutting blade. Therefore, it takes time and cost to adjust the position of the blade cooler nozzle.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a blade cover in which the position of a blade cooler nozzle can be easily adjusted.

According to the present invention, there is a first blade cover that covers a cutting blade mounted on the tip of a spindle and is provided with a pair of blade cooler nozzles that supply cutting fluid on the front surface side and the back surface side of the cutting blade. It comprises a block and a second block mounted on a housing supporting the spindle and adjacent to the first block and covering the upper side of the cutting blade, the first block comprising the first block. A first engaging portion having a plurality of protrusions formed so as to go from the front side to the back side of the block and arranged at a predetermined pitch in the vertical direction is formed, and the second block has the second block . A second engaging portion formed so as to go from the front side to the back side of the block 2 and having a plurality of concave portions arranged vertically at the pitch corresponding to the shape of the plurality of convex portions is formed. By engaging the first engaging portion and the second engaging portion with each other, a blade cover capable of adjusting the vertical position of the first block by the pitch is provided. It should be noted that preferably, the first block is connected to the second block via an air cylinder.

The blade cover according to the present invention is formed in a first engaging portion formed in a nozzle block (first block) provided with a blade cooler nozzle and an upper block (second block) covering the upper side of the cutting blade. The position of the blade cooler nozzle with respect to the cutting blade is determined by selecting the position where the second engaging portion is engaged and fixing the nozzle block at a predetermined position with respect to the upper block. Therefore, it is not necessary to monitor the positional relationship between the cutting blade and the blade cooler nozzle, and the position of the blade cooler nozzle can be easily adjusted.

Further, the blade cover according to the present invention can adjust the position of the blade cooler nozzle without using an additional component such as a nozzle adjusting jig as in the conventional method. Therefore, the labor of manufacturing and installing the parts can be saved, and the position of the blade cooler nozzle can be easily adjusted.

It is a perspective view which shows the structural example of a cutting apparatus. It is a perspective view which shows the structural example of a cutting unit. It is a perspective view which shows the structural example of the blade cover in the state which covered the cutting blade. It is a perspective view which shows the structural example of a blade cover. It is a front view which shows the structural example of a blade cover. 6 (A) is a front view showing a part of the blade cover, FIG. 6 (B) is a front view showing a part of the nozzle block, and FIG. 6 (C) is a front view showing a part of the upper block. It is a figure. It is a front view which shows a part of the blade cover. It is a front view which shows the part of the blade cover with an arrow and a scale. It is a front view which shows a part of the blade cover.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, a configuration example of a cutting device for cutting a plate-shaped workpiece such as a semiconductor wafer, a resin substrate, a ceramic substrate, and a glass substrate will be described. FIG. 1 is a perspective view showing a configuration example of a cutting device.

The cutting device 2 includes a stationary base 4 that supports a plurality of components constituting the cutting device 2. A pair of guide rails 6 extending in the X-axis direction are fixed on the stationary base 4, and a first moving block 8 is provided on the pair of guide rails 6. A chuck table 20 is provided on the first moving block 8 via a cylindrical support member 22. The chuck table 20 is moved in the machining feed direction (X-axis direction) by the feed mechanism 14 including the ball screw 10 and the pulse motor 12.

The chuck table 20 has a suction holding portion 24 formed of porous ceramics or the like at the upper portion, and the upper surface of the suction holding portion 24 serves as a holding surface 24a for holding the workpiece. Further, the chuck table 20 is provided with a plurality of clamps 26 for fixing the annular frame provided on the outer peripheral portion of the dicing tape to which the workpiece is attached.

Further, the feed mechanism 14 is provided on the lower surface side of the scale 16 provided on the stationary base 4 along the guide rail 6 and the first moving block 8, and the coordinate values (X coordinate values) of the scale 16 are set. A reading head 18 for reading is provided. The reading head 18 is connected to a controller (not shown) of the cutting device 2.

Further, a pair of guide rails 28 extending in the Y-axis direction are fixed on the stationary base 4. On the pair of guide rails 28, a base portion 30a mounted on the pair of guide rails 28 and a rectangular parallelepiped support portion 30b extending in the vertical direction (Z-axis direction) from a part of the upper surface of the base portion 30a. A second moving block 30 configured by the above is provided.

The second moving block 30 is moved in the indexing direction (Y-axis direction) by the feed mechanism 36 including the ball screw 32 and the pulse motor 34. The feed mechanism 36 is connected to a controller (not shown) of the cutting device 2, and the position of the second moving block 30 in the Y-axis direction is controlled by the control of the pulse motor 34 by the controller.

A pair of guide rails 38 extending in the vertical direction (Z-axis direction) are provided on the side surface of the support portion 30b of the second moving block 30, and the third moving block 40 is mounted on the guide rail 38. ing. The third moving block 40 is moved in the vertical direction (Z-axis direction) by a feed mechanism 44 including a ball screw (not shown) and a pulse motor 42. The feed mechanism 44 is connected to a controller (not shown) of the cutting device 2, and the position of the third moving block 40 in the Z-axis direction is controlled by the control of the pulse motor 42 by the controller.

A cutting unit 46 is mounted on the third moving block 40. The housing 48 of the cutting unit 46 is inserted into and supported by the moving block 40, and a spindle (not shown) is provided inside the housing 48. The spindle is rotationally driven by a motor (not shown) housed inside the housing 48. The tip of the spindle is exposed to the outside of the housing 48, and an annular cutting blade 52 is detachably attached to the tip. Further, the housing 48 is equipped with a blade cover 50 that covers the cutting blade 52.

Further, the housing 48 is equipped with an image pickup unit 54 adjacent to the cutting blade 52. Based on the image acquired by the image pickup by the image pickup unit 54, the position of the workpiece and the cutting blade 52 is aligned.

FIG. 2 is a perspective view showing a configuration example of the cutting unit 46. A mount flange 60 is attached to the tip of the spindle 56 supported by the housing 48. Further, the cutting blade 52 includes a disk-shaped base 62 having a cylindrical hub 64, and a cutting blade 66 formed on the outer peripheral portion of the base 62 by dispersing diamond abrasive grains in, for example, a nickel base material. Is provided.

The cutting blade 52 is fixed to the tip of the spindle 56 by tightening the fixing nut 70 to the mount flange 60 with the mount flange 60 inserted in the mounting hole 68 of the cutting blade 52.

Note that FIG. 2 shows a hub-type cutting blade 52 provided with a cutting blade 66 on the outer peripheral portion of the base 62, but the cutting blade 52 is not limited to this. For example, a washer-type cutting blade having an annular cutting edge as a whole can be used.

Further, a blade cover 50 that covers the cutting blade 52 is attached to the housing 48. FIG. 3 is a perspective view showing a configuration example of the blade cover 50 in a state where the cutting blade 52 is covered. The blade cover 50 includes an upper block 72 that is mounted on the housing 48 (see FIGS. 1 and 2) and covers the upper side of the cutting blade 52.

The upper block 72 is composed of a rectangular upper surface and a front surface, a back surface, and two side surfaces connected to each side of the upper surface, and the lower portions of the front surface and the back surface are formed in an arc shape corresponding to the cutting blade 52. A notched notch is provided.

Further, the blade cover 50 is adjacent to one side surface of the upper block 72, and includes a rectangular parallelepiped nozzle block 74 that supplies cutting fluid to the cutting blade 52. The nozzle block 74 has a connection pipe 78 connected to a hose 76 to which cutting fluid such as pure water is supplied, and a pair of blade cooler nozzles 80a and 80b that branch from the connection pipe 78 and supply cutting fluid to the cutting blade 52. And. The blade cooler nozzles 80a and 80b are arranged so as to sandwich the cutting blade 52 from the front surface 52a side and the back surface 52b side.

FIG. 4 is a perspective view of the blade cover 50 in a state of being removed from the housing 48. The blade cooler nozzles 80a and 80b are each provided with a plurality of openings 82 for supplying cutting fluid to the cutting blade 52 at positions facing the region where the cutting blade 52 is arranged. The cutting fluid supplied to the hose 76 flows into the blade cooler nozzles 80a and 80b via the connecting pipe 78, and is injected from the opening 82 to the front surface 52a side and the back surface 52b side of the cutting blade 52.

The blade cooler nozzles 80a and 80b are arranged near the lower end of the cutting blade 52 in contact with the workpiece so that the cutting fluid is efficiently supplied to the contact region between the cutting blade 52 and the workpiece. However, as will be described later, the exact positions of the blade cooler nozzles 80a and 80b are determined in consideration of various conditions such as the outer diameter of the cutting blade 52 and the cutting depth of the cutting blade 52 into the workpiece.

When cutting, the cutting blade 52 and the workpiece are cooled by supplying the cutting fluid from the blade cooler nozzles 80a and 80b to the contact area between the cutting blade 52 and the workpiece, and the cutting blade 52 and the workpiece are cooled. Processing defects caused by frictional heat generated between objects and objects are suppressed. In addition, the cutting fluid adhering to the workpiece is discharged by the cutting fluid.

On the outside of the blade cooler nozzles 80a and 80b, a plate 84 covering a part of the outside of the blade cooler nozzles 80a and 80b is provided. The plate 84 is installed on the rear side in the traveling direction of the cutting process (the area side after the cutting process) with respect to the contact area between the cutting blade 52 and the workpiece. By providing the plate 84, it is possible to prevent the scattering of cutting water containing cutting chips generated during cutting.

The nozzle block 74 is fixed in contact with the upper block 72 by, for example, a screw 86 inserted into the nozzle block 74. Specifically, an air cylinder (not shown) provided with a piston rod is mounted on the back surface side of the upper block 72, and a mounting plate (not shown) is mounted on the tip of the piston rod.

By fastening the mounting plate and the nozzle block 74 with a screw 86 inserted from the front side to the back side of the nozzle block 74, the nozzle block 74 is connected to the upper block 72 via an air cylinder. Further, the upper block 72 and the nozzle block 74 can be separated by moving the piston rod in the direction of being discharged from the air cylinder.

Further, the blade cover 50 includes a rectangular parallelepiped shower nozzle block 88 that is adjacent to the other side surface of the upper block 72 and supplies cutting fluid to the cutting blade 52. The shower nozzle block 88 includes a connecting pipe 92 connected to a hose 90 to which a cutting fluid such as pure water is supplied.

FIG. 5 is a front view of the blade cover 50. As shown in FIG. 5, the shower nozzle block 88 includes a shower nozzle 94 connected to the connecting pipe 92 inside the shower nozzle block 88. The tip 94a of the shower nozzle 94 opens toward the outer peripheral portion of the cutting blade 52.

The cutting fluid supplied to the hose 90 flows into the shower nozzle 94 and is ejected from the tip 94a of the shower nozzle 94 toward the cutting blade 52. Then, the cutting fluid is supplied to the contact region between the cutting blade 52 and the workpiece by the rotation of the cutting blade 52.

The shower nozzle block 88 is fixed in contact with the upper block 72 by, for example, a screw 96 inserted into the shower nozzle block 88. Specifically, the upper block 72 and the shower nozzle block 88 are fastened by a screw 96 inserted toward the upper block 72 from the side surface of the shower nozzle block 88 opposite to the upper block 72. The shower nozzle block 88 is connected to the upper block 72.

As described above, by connecting the nozzle block 74 and the shower nozzle block 88 to the upper block 72, the blade cover 50 capable of supplying the cutting fluid to the cutting blade 52 is configured.

Here, the positions of the blade cooler nozzles 80a and 80b provided in the nozzle block 74 with respect to the cutting blade 52 depend on various conditions such as the outer diameter of the cutting blade 52 and the cutting depth of the cutting blade 52 into the workpiece. It will be adjusted.

For example, when the cutting blade 52 is replaced with one having a different outer diameter, the blade cooler nozzles 80a and 80b are adjusted by adjusting the position of the nozzle block 74 in the vertical direction (direction of arrow A in FIG. 5) with respect to the upper block 72. It is arranged near the lower end of the cutting blade 52 after replacement.

Further, the distance between the lower end of the cutting blade 52 and the lower end of the blade cooler nozzles 80a, 80b (distance L1 in FIG. 5) is the cover of the cutting blade 52 so that the blade cooler nozzles 80a and 80b do not interfere with the cutting process. It is set to be larger than the depth of cut into the work piece.

In this way, the positions of the blade cooler nozzles 80a and 80b are adjusted each time the cutting blade 52 is replaced or the machining conditions are changed. Therefore, in order to smoothly perform the cutting process, the blade cooler nozzles 80a and 80b are used. It is preferable to adjust the position by a simple method.

The blade cover 50 according to the present embodiment is composed of a part of the upper block 72 and a part of the nozzle block 74, and includes a locking means 100 for fixing the upper block 72 and the nozzle block 74 at a predetermined position. By adjusting the position of the nozzle block 74 with respect to the upper block 72 by using the locking means 100, the position of the blade cooler nozzles 80a and 80b with respect to the cutting blade 52 can be adjusted. Hereinafter, the details of the locking means 100 will be described.

FIG. 6A is a front view showing a part of the blade cover 50. As shown in FIG. 6A, the blade cover 50 includes locking means 100 including a portion of the upper block 72 configured to engage (mesh) with each other and a portion of the nozzle block 74.

FIG. 6B is a front view showing a part of the nozzle block 74. A first engaging portion 102 is formed on the side surface of the nozzle block 74 adjacent to the upper block 72. The first engaging portion 102 is arranged in the vertical direction at a predetermined pitch, and has a plurality of convex portions 104 protruding toward the upper block 72 side.

In FIG. 6B, a plurality of triangular columnar convex portions 104 are arranged so that the height direction thereof is from the front side to the back side of the nozzle block 74, and the contour is triangular wavy in the front view. A first engaging portion 102 is shown. However, the shape of the plurality of convex portions 104 is not limited to this.

FIG. 6C is a front view showing a part of the upper block 72. The upper block 72 is formed with a second engaging portion 106 on a side surface adjacent to the nozzle block 74. The second engaging portion 106 is vertically arranged at the same pitch as the plurality of convex portions 104, and has a plurality of concave portions 108 corresponding to the shapes of the plurality of convex portions 104.

In FIG. 6C, a plurality of triangular columnar recesses 108 are arranged so that the height direction thereof is from the front side to the back side of the upper block 72, and the contour is formed by the first engaging portion 102. The second engaging portion 106, which has a triangular wavy shape when viewed from the front, is shown in the same manner as above. The concave portion 108 is formed so that the shape of the contour thereof substantially matches the contour of the convex portion 104, and the convex portion 104 can be inserted into the concave portion 108.

When the first engaging portion 102 of the nozzle block 74 and the second engaging portion 106 of the upper block 72 are brought into contact with each other, the convex portion 104 included in the first engaging portion 102 becomes the second engaging portion 106. The first engaging portion 102 and the second engaging portion 106 are engaged (engaged) with each other as shown in FIG. 6A. As a result, the nozzle block 74 is fixed in a predetermined position with respect to the upper block 72.

Note that FIG. 6A shows, as an example, a state in which the convex portion 104a located on the uppermost side in the vertical direction is inserted into the concave portion 108a located on the uppermost side in the vertical direction. It can be inserted into any recess 108. FIG. 7 shows a state in which the convex portion 104b adjacent to the lower side of the convex portion 104a is inserted into the concave portion 108a. In this case, since the nozzle block 74 is arranged above the upper block 72 by the pitch of the plurality of convex portions 104 and the plurality of concave portions 108, the blade cooler nozzles 80a and 80b are also arranged with respect to the cutting blade 52. It is arranged above the pitch of the plurality of protrusions 104 and the plurality of recesses 108.

As described above, by changing the concave portion 108 into which the predetermined convex portion 104 is inserted (or the convex portion 104 inserted into the predetermined concave portion 108), the position of the nozzle block 74 in the vertical direction with respect to the upper block 72 can be changed. The pitch of the plurality of convex portions 104 and the plurality of concave portions 108 is changed. Thereby, the positions of the blade cooler nozzles 80a and 80b in the vertical direction with respect to the cutting blade 52 can be adjusted by the pitches of the plurality of convex portions 104 and the plurality of concave portions 108.

Then, for each position of the nozzle block 74 with respect to the upper block 72, information on the positional relationship between the convex portion 104 and the concave portion 108 (information on which convex portion 104 is inserted in which concave portion 108) and the blade cooler nozzle 80a,. Information on the position of 80b in the vertical direction is recorded. This makes it possible to determine the position of the blade cooler nozzles 80a and 80b in the vertical direction by the position where the first engaging portion 102 and the second engaging portion 106 are engaged.

When adjusting the positions of the blade cooler nozzles 80a and 80b due to replacement of the cutting blade 52 or change of machining conditions, first, the outer diameter of the cutting blade 52, the depth of cut of the cutting blade 52 into the workpiece, etc. The positions of the desired blade cooler nozzles 80a and 80b in the vertical direction are determined based on the above.

Next, the position where the first engaging portion 102 and the second engaging portion 104 are engaged is set according to the positions of the desired blade cooler nozzles 80a and 80b in the vertical direction. Specifically, the first engagement is made so that the blade cooler nozzles 80a, 80b are arranged at a desired position with reference to the information on the positions of the blade cooler nozzles 80a, 80b recorded in advance in the vertical direction. One convex portion 104 included in the portion 102 and one concave portion 108 into which the one convex portion 104 is inserted are selected.

Next, the position of the nozzle block 74 is changed so that the one convex portion 104 can be inserted into the one concave portion 108. The position of the nozzle block 74 is changed by loosening the screw 86 inserted in the nozzle block 74 to make the nozzle block 74 movable, and moving the nozzle block 74 to a desired position.

Then, the upper block 72 and the nozzle block 74 are brought into contact with each other so that the one convex portion 104 is inserted into the one concave portion 108, and the first engaging portion 102 and the second engaging portion are engaged. match. After that, the blade cooler nozzles 80a and 80b are arranged at desired positions by tightening the screws 86 and fixing the nozzle block 74 in contact with the upper block 72.

The pitches of the plurality of convex portions 104 and the plurality of concave portions 108 can be appropriately set according to the accuracy required for the alignment of the blade cooler nozzles 80a and 80b. For example, the pitch of the plurality of convex portions 104 and the pitch of the plurality of concave portions 108 can be set to 0.1 mm or more and 1 mm or less.

As described above, in the blade cover 50 according to the present embodiment, the first engaging portion 102 formed on the nozzle block 74 and the second engaging portion 104 formed on the upper block 72 are engaged with each other. By selecting a position and fixing the nozzle block 74 to the upper block 72 at a predetermined position, the positions of the blade cooler nozzles 80a and 80b with respect to the cutting blade 52 are determined. Therefore, it is not necessary to monitor the positional relationship between the cutting blade 52 and the blade cooler nozzles 80a and 80b, and the positions of the blade cooler nozzles 80a and 80b can be easily adjusted.

Further, the blade cover 50 according to the present invention can adjust the positions of the blade cooler nozzles 80a and 80b without using additional parts such as a nozzle adjusting jig as in the conventional method. Therefore, the labor of manufacturing and installing the parts can be saved, and the positions of the raid cooler nozzles 80a and 80b can be easily adjusted.

In order to easily grasp the positions of the blade cooler nozzles 80a and 80b, a scale or a mark may be provided on one or both of the upper block 72 and the nozzle block 74. FIG. 8 is a front view showing a part of the blade cover 50 with arrows and scales. For example, as shown in FIG. 8, the upper block 72 may be provided with an arrow 110 pointing to a specific recess 108, and the nozzle block 74 may be provided with a scale 112 corresponding to the position of the plurality of protrusions 104.

The numerical value of the scale 112 attached corresponding to the position of the convex portion 104 indicates the position of the blade cooler nozzles 80a and 80b when the convex portion 104 is inserted into the concave portion 108 provided with the arrow 110. In FIG. 8, the scale 112 has a scale 112 with the positions of the blade cooler nozzles 80a and 80b when the convex portion 104a provided on the uppermost side in the vertical direction is inserted into the concave portion 108a provided on the uppermost side in the vertical direction as zero. Numerical values are attached. However, the standard of the numerical value of the scale 112 can be freely set.

By adding the scales and marks in this way, the first engaging portion 102 and the second engaging portion 106 can be engaged while checking the positions of the blade cooler nozzles 80a and 80b.

The nozzle block 74 may be marked with a mark other than the scale. For example, instead of the scale, a color mark corresponding to the position of the blade cooler nozzles 80a and 80b may be added.

Further, although the case where the convex portion 104 and the concave portion 108 are mainly triangular columns has been described above, the shape of the convex portion 104 and the concave portion 108 is such that the first engaging portion 102 and the second engaging portion 104 are formed. It is not particularly limited as long as it can be meshed. FIG. 9 is a front view showing a part of the blade cover 50 having the locking means 100 different from that of FIG. 6A.

For example, as shown in FIG. 9, a first engaging portion 102 is formed by arranging a plurality of rectangular parallelepiped convex portions 104 so that their height directions are directed from the front side to the back side of the nozzle block 74. The second engaging portion 106 may be formed by arranging the plurality of rectangular parallelepiped recesses 108 so that the height direction thereof is from the front side to the back side of the upper block 72.

In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

2 Cutting device 4 Stationary base 6 Guide rail 8 First moving block 10 Ball screw 12 Pulse motor 14 Feed mechanism 16 Scale 18 Read head 20 Chuck table 22 Support member 24 Suction holding part 24a Holding surface 26 Clamp 28 Guide rail 30 No. 2 Moving block 30a Base 30b Support 32 Ball screw 34 Pulse motor 36 Feeding mechanism 38 Guide rail 40 Third moving block 42 Pulse motor 44 Feeding mechanism 46 Cutting unit 48 Housing 50 Blade cover 52 Cutting blade 54 Imaging unit 56 Spindle 60 Mount Flange 62 Base 64 Hub 66 Cutting Blade 68 Mounting Hole 70 Fixing Nut 72 Top Block 74 Nozzle Block 76 Hose 78 Connection Pipe 80a, 80b Blade Cooler Nozzle 82 Opening 84 Plate 86 Screw 88 Shower Nozzle Block 90 Hose 92 Connection Pipe 94 Shower nozzle 94a Tip 96 Screw 100 Locking means 102 First engagement part 104 Convex part 106 Second engagement part 108 Concave part 110 Arrow 112 Scale

Claims (2)

A blade cover that covers the cutting blade attached to the tip of the spindle.
A first block provided with a pair of blade cooler nozzles for supplying cutting fluid on the front surface side and the back surface side of the cutting blade, and
A second block mounted on a housing supporting the spindle and adjacent to the first block and covering the upper side of the cutting blade is provided.
The first block is formed with a first engaging portion having a plurality of protrusions formed so as to face from the front side to the back side of the first block and arranged at a predetermined pitch in the vertical direction. ,
The second block has a plurality of recesses formed so as to face from the front side to the back side of the second block and arranged vertically at the pitch corresponding to the shape of the plurality of protrusions. A second engaging portion is formed and
A blade cover characterized in that the vertical position of the first block can be adjusted by the pitch by engaging the first engaging portion and the second engaging portion with each other. The blade cover according to claim 1, wherein the first block is connected to the second block via an air cylinder.

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