JP6116850B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that performs a cutting process on a workpiece.

  A semiconductor wafer on which a plurality of devices such as IC and LSI are formed is divided into individual devices by a processing apparatus called a dicing apparatus, and each device is used in an electronic device such as a mobile phone or a personal computer. In this type of processing apparatus, when a semiconductor wafer is divided, a cutting blade that rotates at high speed is generally used, and cutting is performed while supplying a cutting fluid toward the vicinity of the processing point where the cutting blade and the semiconductor wafer are in contact with each other. (For example, see Patent Document 1). In this type of processing apparatus, the cutting blade is mounted on the front end of the rotary spindle, the rotary spindle is rotatably inserted in the spindle housing, the wheel cover is mounted on the front end of the spindle housing, and the cutting fluid is mounted on the wheel cover. The nozzle which injects is held. This nozzle is called a blade cooler nozzle that injects cutting fluid from the position closest to the object to be cut (semiconductor wafer, etc.). The blade cooler nozzle is a pipe-shaped nozzle formed with a plurality of injection slits. This is a so-called slit nozzle. The blade cooler nozzle has a block portion held by the wheel cover and a slit nozzle portion fixed to the block portion, and the block portion and the slit nozzle portion are configured separately. The slit nozzle part is usually formed by bending a hollow pipe into an L-shape, and is fixed by welding called brazing with one end of the slit nozzle part inserted into the block part ( For example, the slit nozzle part is fixed to the block part by a method of fixing with a screw or the like with one end of the slit nozzle part inserted into the block part (see, for example, Patent Document 2). Yes.

JP 2011-114220 A Japanese Patent Application No. 2011-168289

  Since the block portion and the slit nozzle portion are configured separately, the slit nozzle portion must be fixed to the block portion using a fixing means such as brazing or a screw, and the slit nozzle portion is attached to the block portion. In the case of fixing by brazing, unevenness in bonding strength is likely to occur due to the skill of the brazing operator, and there is a possibility that the brazing strength may change due to use over time. Moreover, since the block part and the slit nozzle part are comprised separately, there existed a possibility that a slit nozzle part might shift | deviate with respect to a block part. And in a facing dual type processing apparatus in which two cutting blades are arranged to face each other, the tip side of the slit nozzle part is fixed to the block part in a state of being slightly opened away from the cutting blade. When the slit nozzle part is misaligned, the slit nozzle parts may come into contact with each other when the cutting blades face each other and come closest to each other.

  This invention is made in view of the above, Comprising: It aims at providing the cutting device which can always make the positional relationship of a block part and a slit nozzle part constant.

In order to solve the above-described problems and achieve the object, a cutting apparatus of the present invention includes a chuck table for holding a workpiece and a cutting blade for cutting the workpiece held on the chuck table. A cutting apparatus comprising: a spindle for mounting the cutting blade on a front end; a spindle housing for rotatably supporting the spindle; and a front end of the spindle housing. A nozzle that is disposed on both sides of the cutting blade and that supplies cutting fluid to the cutting blade from both sides, the nozzle being mounted on the spindle housing; and The cutting blade extends to the periphery of the cutting edge, and has a plurality of injection slits on the side of the cutting blade side around the cutting edge. And the slit nozzle unit is configured to include a, a cutting liquid supply path for supplying the cutting fluid to the ejection slit of the slit nozzle portion from the block portion, the cutting blade from the block portion cutting fluid supply joint is connected It is integrally formed up to the tip of the slit nozzle part on both sides of the sheet.

  According to the cutting device of the present invention, since the block portion and the slit nozzle portion are integrally formed, the positional relationship between the block portion and the slit nozzle portion can always be constant, and the slit nozzle portion relative to the block portion can be kept constant. The effect that the malfunction resulting from position shift can be suppressed is produced.

Drawing 1 is a figure showing the example of composition of the cutting device concerning an embodiment. FIG. 2 is a diagram illustrating a configuration example of the cutting unit according to the embodiment. FIG. 3 is a diagram illustrating a configuration example of a nozzle according to the embodiment. 4 is a cross-sectional view of the nozzle shown in FIG.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
Drawing 1 is a figure showing the example of composition of the cutting device concerning an embodiment. FIG. 2 is a diagram illustrating a configuration example of the cutting unit according to the embodiment. FIG. 3 is a diagram illustrating a configuration example of a nozzle according to the embodiment. 4 is a cross-sectional view of the nozzle shown in FIG.

  A cutting apparatus 1 according to the present embodiment shown in FIG. 1 performs a cutting process on a workpiece by relatively moving a chuck table 30 holding a workpiece (not shown) and two cutting means 50A and 50B. The chuck table 30 and one of the cutting means 50A, or the chuck table 30 and the other cutting means 50B, or the chuck table 30 and both of the cutting means 50A and 50B are moved relative to each other to cut the workpiece. It is to be processed. The cutting device 1 is a facing dual type processing device in which two cutting means 50A and 50B are arranged to face each other in the Y-axis direction. The cutting apparatus 1 includes a cassette elevator 10, a temporary placing means 20, a chuck table 30, an imaging means 40, two cutting means 50A and 50B provided with a nozzle 70 for supplying a cutting fluid, and cleaning and drying. And means 60.

Here, the workpiece is an object to be machined and is not particularly limited. For example, a disk-shaped semiconductor wafer, optical device wafer, or ceramic that uses silicon, gallium arsenide (GaAs), or the like as a base material. Glass, sapphire (Al ₂ O ₃ ) -based disk-shaped inorganic material substrate, plate-shaped ductile material such as metal and resin, and the like.

  The cassette elevator 10 has a plurality of storage portions (not shown) for storing workpieces one by one in the Z-axis direction, and stores a plurality of workpieces at a time. The cassette elevator 10 is configured to be movable up and down in a Z axis direction in a space (not shown) formed inside the apparatus main body 2.

  The temporary placing means 20 has a pair of rails 21 and 22 on which the workpiece before and after cutting is temporarily placed, and temporarily places the workpiece before and after cutting. In the present embodiment, the pair of rails 21 and 22 are disposed in parallel to the Y-axis direction.

  The chuck table 30 has a surface 31 (corresponding to a holding surface) formed in a disk shape from a porous ceramic or the like, and a workpiece placed on the surface 31 is sucked and held by a vacuum suction source (not shown). To do. The chuck table 30 includes an X-axis moving unit (corresponding to a processing feed unit) (not shown) that moves the chuck table 30 relative to the cutting units 50A and 50B in the X-axis direction. In the present embodiment, the X-axis direction is a direction orthogonal to both the direction of the rotation axis (Y-axis direction) and the vertical direction (Z-axis direction) of the cutting blade 51 described later.

  The image pickup means 40 is, for example, a camera using a CCD (Charge Coupled Device) image sensor, picks up an image of the workpiece held on the chuck table 30, and adjusts the alignment of the cutting means 50A and 50B with respect to the workpiece. Generate image data to do.

  The two cutting means 50A and 50B are arranged opposite to each other on a coaxial line in the Y-axis direction, and cut into the workpiece held on the chuck table 30 based on the image data of the workpiece imaged by the imaging means 40. An area to be processed is cut while supplying the liquid. The two cutting means 50A and 50B include a cutting blade 51, a spindle 52, a spindle housing 53, a blade cover 54, and a nozzle 70, respectively, and a Y-axis moving means 55 (corresponding to an index feeding means). And a Z-axis moving means 56 (corresponding to a cutting feed means), which are respectively supported by the column portion 3 on the apparatus main body 2 and configured to be relatively movable in the Y-axis direction and the Z-axis direction. The cutting blade 51 is a cutting grindstone formed in an extremely thin ring shape, and cuts the workpiece held on the chuck table 30 by rotating at a high speed. The cutting blade 51 is detachably attached to the front end of the spindle 52 in the Y-axis direction. The spindle housing 53 is formed in a cylindrical shape, and rotatably supports the inserted spindle 52. The blade cover 54 detachably holds the nozzle 70. As shown in FIG. 2, a long hole 58 is formed in the blade cover 54. The long hole 58 is configured to engage with the heads of the fixing screws 59a and 59b, and the fixing screws 59a and 59b are inserted in the state where the shaft portions of the fixing screws 59a and 59b are inserted into the long holes 58. It is configured to be movable up and down in the vertical direction. The fixing screws 59a and 59b fix the nozzle 70 to the blade cover 54 by being tightened in a state where the nozzle 70 is positioned in the vertical direction. The nozzle 70 is held at the front end portion of the spindle housing 53 via the blade cover 54. In the present embodiment, the Y-axis direction is the direction of the rotation axis of the cutting blade 51 perpendicular to the vertical direction. Further, the Z-axis direction is a vertical direction in the present embodiment.

  The cleaning / drying means 60 includes a spinner table 61 that holds a workpiece after cutting, and the workpiece after cutting from a cleaning liquid ejecting device (not shown) while rotating the spinner table 61 by a driving source (not shown). The workpiece is cleaned by spraying a cleaning liquid onto the workpiece, and the workpiece is dried by jetting gas from a gas jetting device (not shown) to the workpiece after cleaning.

  Here, the nozzle 70 according to the embodiment will be described. The nozzle 70 sprays and supplies cutting fluid to the processing point of the cutting blade 51, and is called a blade cooler nozzle. As shown in FIGS. 2 and 3, the nozzle 70 includes a block portion 71 and two slit nozzle portions 72 and 73 that are integrally formed. The positional relationship is always constant.

  As shown in FIGS. 2 to 4, the block portion 71 includes a sliding projection 71a, two cutting fluid supply holes 71b and 71c, two inclined portions 71d and 71e, and two cutting fluid supply paths 74, 75 in an integrated manner. The sliding protrusion 71a is formed so as to be slidable in the vertical direction with respect to a sliding recess (not shown) of the blade cover 54. The sliding protrusion 71a is formed with screw holes 71f and 71g that are screwed with the fixing screws 59a and 59b. The two cutting fluid supply holes 71b and 71c are formed downward from the upper surface of the block portion 71, and can be fitted with cutting fluid supply joints 81a and 81b for connecting a cutting fluid supply pipe (not shown). It is formed with a diameter and a depth. The two inclined portions 71 d and 71 e are formed so as to protrude downward from the block portion 71, and an inclined surface is formed on the opposite side of the two slit nozzle portions 72 and 73. The two cutting fluid supply paths 74 and 75 are cut along the inclined surfaces of the cutting fluid supply paths 74a and 75a formed downward from the cutting fluid supply holes 71b and 71c and the inclined portions 71d and 71e. The liquid supply paths 74b and 75b are integrally formed.

  As shown in FIGS. 2 and 3, the two slit nozzle portions 72 and 73 extend from the inclined portions 71 d and 71 e to the periphery of the cutting edge 51 a in parallel to the surface of the cutting blade 51 and sandwich the cutting blade 51. It is arranged like this. The two slit nozzle portions 72 and 73 are formed in a circular arc shape on the side of the cutting blade 51 around the cutting edge 51a. As shown in FIGS. 3 and 4, the two slit nozzle portions 72 and 73 are jet slits 72 a, 72 b and 72 c and jet slits 73 a, 73 b and 73 c (hereinafter simply referred to as “jet slits 72 a to 73 c”). The cutting fluid supply passages 76 and 77 are provided. The injection slits 72a to 73c are formed on the side surface on the cutting blade 51 side around the cutting edge 51a, and are arranged to face each other. The cutting fluid supply paths 76 and 77 are formed over substantially the entire length of the slit nozzle portions 72 and 73. The cutting fluid supply passages 76 and 77 communicate with the cutting fluid supply holes 71b and 71c through the cutting fluid supply passages 74 and 75, and communicate with the injection slits 72a to 73c. The cutting fluid supply paths 76 and 77 are sealed and sealed at one end by sealing portions 78a and 78b, and the cutting fluid supplied from a cutting fluid supply source (not shown) is ejected from the ejection slits 72a to 73c. Let

Here, a manufacturing method of the nozzle 70 according to the embodiment will be described.
(Machining process)
First, for example, an ingot such as stainless steel is cut out by a milling machine or the like to form the outer shape of the nozzle 70.
(Drilling process)
Next, with a milling machine or the like, holes are drilled downward from the upper surface of the block portion 71 to form cutting fluid supply holes 71b and 71c, and holes are drilled downward from the cutting fluid supply holes 71b and 71c to perform cutting. The liquid supply paths 74a and 75a are formed, and holes are formed from the outside of the block portion 71 toward the two slit nozzle sections 72 and 73 to form the cutting liquid supply paths 74b and 75b. The cutting fluid supply passages 76 and 77 are formed by making holes toward the inclined portions 71d and 71e, and the cutting fluid supply passages 74 and 75 of the block portion 71 and the cutting fluid supply passages 76 and 77 of the slit nozzle portions 72 and 73 are formed. To communicate with.
(Screw hole forming process)
Next, a hole is made in the sliding protrusion 71a of the block 71 by a milling machine or the like, and a female screw is cut inside the hole by a tap to form screw holes 71f and 71g.
(Slit forming process)
Next, by using a slit grinder, a water jet cutting machine, or the like, the slits 72a to 73c are formed by cutting in the vertical direction on the side surface on the cutting blade 51 side around the cutting edge 51a in the two slit nozzle portions 72 and 73, The injection slits 72a to 73c and the cutting fluid supply paths 76 and 77 are communicated with each other.
(Cavity filling process)
Next, when forming the cutting fluid supply passages 74b and 75b, a hole filling process is performed on the hole formed in the vicinity of the intermediate portion of the block portion 71, and the hole is sealed in a liquid-tight manner. Next, sealing portions 78a and 78b are attached to the tip portions of the slit nozzle portions 72 and 73, and the tip portions of the cutting fluid supply paths 76 and 77 are sealed in a liquid-tight manner. The nozzle 70 according to the present embodiment is manufactured by the above-described cutting process, drilling process, screw hole forming process, slit forming process, and hole filling process.

  Here, operation | movement of the facing dual type cutting device 1 provided with two cutting means 50A, 50B by which the nozzle 70 which concerns on embodiment is arrange | positioned is demonstrated. When the cutting apparatus 1 cuts the workpiece by both cutting means 50A and 50B, the cutting means 50A and 50B are closest to each other with the cutting blades 51 facing each other by the Y-axis moving means 55 and 55. There are things to do. In the cutting device 1, when the cutting means 50A and 50B are brought closest to each other, the interval between the slit nozzle portions 72 and 73 of the nozzle 70 of each cutting means 50A and 50B is small, but the block portion 71 and the slit Since the positional relationship with the nozzle parts 72 and 73 is always constant, the contact between the slit nozzle parts 72 and 73 of the nozzles 70 of the cutting means 50A and 50B can be suppressed.

  As described above, according to the cutting device 1 according to the embodiment, since the block portion 71 and the slit nozzle portions 72 and 73 are integrally formed, the positional relationship between the block portion 71 and the slit nozzle portions 72 and 73 is determined. It is possible to always keep constant, and there is an effect that it is possible to suppress inconvenience caused by the positional deviation of the slit nozzle portions 72 and 73 with respect to the block portion 71.

  Moreover, according to the cutting apparatus 1 which concerns on embodiment, since the malfunction resulting from the position shift of the slit nozzle parts 72 and 73 with respect to the block part 71 can be suppressed, the cutting blades 51 of two cutting means 50A and 50B are mutually It is possible to prevent the nozzles 70 from coming into contact with each other when facing each other.

  Further, according to the cutting device 1 according to the embodiment, since the positional relationship between the block portion 71 and the slit nozzle portions 72 and 73 can be always constant, it is possible to suppress mistakes in the adjustment of the nozzle 70, It can suppress that the nozzle 70 becomes insufficiently adjusted, and can suppress that the injection result of the cutting fluid of the nozzle 70 changes over time.

  Further, according to the cutting device 1 according to the embodiment, the positional relationship between the block portion 71 and the slit nozzle portions 72 and 73 can be always constant, so that only the nozzle 70 is attached to the front end portion of the spindle housing 53. The attachment work can be completed, the adjustment work for adjusting the position of the nozzle 70 can be omitted, and the attachment work of the nozzle 70 can be easily performed.

  Moreover, according to the cutting device 1 which concerns on embodiment, since the block part 71 and the slit nozzle parts 72 and 73 are integrally formed, the rigidity of the nozzle 70 can be improved and operators, such as an operator, can slit. Even if the nozzle portions 72 and 73 are inadvertently touched, the deformation and displacement of the slit nozzle portions 72 and 73 can be suppressed.

  Moreover, according to the cutting device 1 which concerns on embodiment, since the block part 71 and the slit nozzle parts 72 and 73 are integrally formed, the positional relationship of the block part 71 and the slit nozzle parts 72 and 73 is highly accurate. Can be controlled and manufactured. Therefore, the dispersion | variation for every manufactured nozzle 70 can be suppressed.

  Moreover, according to the cutting device 1 which concerns on embodiment, since the inclined surface is formed in inclined part 71d, 71e, interference with the other apparatus etc. which are not shown on the apparatus main body 2 can be suppressed. Further, since the inclination angle of the cutting fluid supply paths 74b and 75b with respect to both the cutting fluid supply paths 74a and 75a and the cutting fluid supply paths 76 and 77 is an obtuse angle, the slit nozzle is cut from the cutting fluid supply paths 74 and 75 of the block portion 71. The cutting fluid can flow smoothly into the cutting fluid supply paths 76 and 77 of the portions 72 and 73.

  In the above embodiment, the cutting device 1 is a facing dual type in which two cutting means 50A and 50B are arranged opposite to each other on a coaxial line, but a parallel dual type cutting in which two cutting means are arranged in parallel. It may be a device or a cutting device having one cutting means. In the case of a parallel dual type cutting device or a cutting device having one cutting means, the nozzle 70 can suppress the positional deviation and the change in the injection result, can easily perform the mounting work, and has a rigidity. Can be improved.

  Moreover, in the said embodiment, since the block part 71 and the slit nozzle parts 72 and 73 are integrally formed, the number of slits 72a-73c, slit width, the space | interval of slit nozzle parts 72 and 73, etc. A plurality of nozzles 70 having different values may be prepared in advance, and when the processing conditions are changed, the nozzles 70 suitable for the processing conditions may be replaced.

  In the above embodiment, the two cutting fluid supply holes 71 b and 71 c are formed on the upper surface of the block portion 71, but one cutting fluid supply hole is formed on the upper surface of the block portion 71, and the block portion 71. May be branched into two cutting fluid supply paths 74 and 75.

  Moreover, in the said embodiment, although the sealing parts 78a and 78b are attached to the front-end | tip part of the slit nozzle parts 72 and 73, the end of the cutting fluid supply paths 76 and 77 of the slit nozzle parts 72 and 73 is made fluid-tight. As long as the sealing can be performed, the sealing may be performed in a liquid-tight manner by a so-called plug or the like that is screwed into or pressed into the cutting fluid supply passages 76 and 77 at the tip portions of the slit nozzle portions 72 and 73.

DESCRIPTION OF SYMBOLS 1 Cutting device 30 Chuck table 50A, 50B Cutting means 51 Cutting blade 51a Cutting edge 52 Spindle 53 Spindle housing 70 Nozzle 71 Block part 71b, 71c Cutting fluid supply hole 72, 73 Slit nozzle part 72a-72c, 73a-73c Injection slit 74- 77 Cutting fluid supply path

Claims (1)

A chuck table for holding the workpiece;
A cutting means comprising a cutting blade for cutting the workpiece held on the chuck table;
A cutting device comprising:
The cutting means is
A spindle for mounting the cutting blade on the front end;
A spindle housing that rotatably supports the spindle;
A nozzle fixed to the front end of the spindle housing, disposed on both sides of the cutting blade, and supplying a cutting fluid to the cutting blade from both sides; and
The nozzle is
A block portion mounted on the spindle housing;
A slit nozzle part extending from the block part to the periphery of the cutting edge of the cutting blade, and having a plurality of injection slits on the side surface of the cutting blade side around the cutting edge;
A cutting fluid supply path for supplying a cutting fluid from the block portion to the spray slit of the slit nozzle portion,
A cutting device integrally formed from the block portion to which a cutting fluid supply joint is connected to the tip of the slit nozzle portion on both sides sandwiching the cutting blade .

Images