JP6008548B2 - Nozzle adjustment jig - Google Patents

Description

  The present invention relates to a nozzle adjustment jig for adjusting the position of a cooling water nozzle that supplies cooling water to a cutting blade, and more particularly to a nozzle adjustment jig for a cooling water nozzle assembled to a thin wheel cover.

  In a semiconductor device manufacturing process, division lines are formed in a lattice pattern on the surface of a workpiece such as a semiconductor wafer, and circuits such as ICs and LSIs are formed in areas partitioned by the division lines. Then, the workpiece is cut along the street by a cutting device and divided into individual semiconductor chips. The semiconductor chip thus divided is packaged and widely used in electric devices such as mobile phones and personal computers.

  2. Description of the Related Art Conventionally, as a cutting device that divides a workpiece, one that cools a cutting blade with cooling water and at the same time flushes cutting waste generated during cutting is known (for example, see Patent Document 1). This cutting device rotates a disc-shaped cutting blade made of diamond abrasive grains at high speed, and sprays cooling water from a plurality of cooling water nozzles onto a processing portion of the semiconductor wafer and the cutting blade. The dicing apparatus cuts the semiconductor wafer by cutting and feeding along the street in a state where the cutting blade is cut into the semiconductor wafer by a certain amount.

JP 2006-187849 A

  Moreover, in the above-mentioned cutting apparatus, since the pair of cooling water nozzles directed to the front surface and the back surface of the cutting blade is adjusted by the operator's visual observation, there is a problem in that the operator causes variations. If the accuracy of the cooling water nozzle adjustment is low and the cooling water is not supplied to an appropriate position with respect to the cutting blade, the processing heat cannot be sufficiently removed. For this reason, abnormal wear or burning of the cutting blade occurs, and the processing quality is significantly deteriorated, and the cutting blade and the workpiece may be damaged.

  By the way, when a hub blade is used as the cutting blade, it is desirable that the lower surface of the cooling water nozzle is adjusted to a position higher by about 1 mm to 3 mm than the lowest point of the hub blade. When a washer blade is used as the cutting blade, it is desirable that the lower surface of the cooling water nozzle is adjusted to a position that is about 1 mm higher than the lowest point of the washer blade (flange). As described above, it is necessary to finely adjust the vertical position of the cooling water nozzle in accordance with the type of the cutting blade and the like, which is a troublesome operation for the operator.

  This invention is made | formed in view of this point, and it aims at providing the nozzle adjustment jig which can adjust a pair of cooling water nozzle to an optimal position easily with respect to a cutting blade.

A nozzle adjusting jig according to the present invention includes a cutting blade for cutting a workpiece, a spindle for supporting the cutting blade via a fixed flange, a spindle housing for rotatably supporting the spindle, and the cutting blade interposed therebetween. And a pair of cooling water nozzles for supplying cooling water to the cutting blade disposed on the front and back sides of the cutting blade, and the cooling water in a state where the cutting blade is removed. A nozzle adjustment jig for adjusting a nozzle position of a nozzle, comprising: a mounting portion that is detachably mounted on the lower surface of the spindle housing by a magnetic force; and a lower surface of the spindle housing that positions the vertical position of the cooling water nozzle at a predetermined position. And a cooling water nozzle positioning part in which the distance is set to a predetermined distance, and the cooling The nozzle positioning unit is attached to the mounting portion and the spindle housing lower surface while being positioned below the cooling water nozzles, the cooling water nozzle lower end of the coolant nozzle is brought into contact with the cooling water nozzle positioning unit The vertical position is adjusted.

According to this configuration, the mounting portion is mounted on the lower surface of the spindle housing by magnetic force, and the lower end of the cooling water nozzle is brought into contact with the nozzle positioning portion, so that the cooling water nozzle is adjusted to an appropriate vertical position with respect to the cutting blade. it can. At this time, since the nozzle adjustment jig positions the cooling water nozzle at a predetermined distance from the lower surface of the spindle housing, there is no variation in nozzle adjustment by the operator. Accordingly, the cooling water is supplied to an appropriate position with respect to the cutting blade, and the processing heat at the time of cutting is sufficiently removed, so that the processing quality can be prevented from being deteriorated and the cutting blade and the workpiece can be prevented from being damaged. Further, by providing the nozzle positioning jig with the nozzle positioning portion according to the type of the cutting blade, it is possible to easily adjust the vertical position of different types of cutting blades.

  ADVANTAGE OF THE INVENTION According to this invention, a pair of cooling water nozzle can be easily adjusted to an optimal position with respect to a cutting blade, and deterioration of processing quality and damage to a cutting blade or a workpiece can be prevented.

It is a perspective view of the cutting device concerning this embodiment. It is a front view of the blade unit which concerns on this Embodiment. It is a perspective view of the blade unit which concerns on this Embodiment. It is a perspective view of the nozzle adjustment jig which concerns on this Embodiment. It is a figure which shows the positional relationship of the nozzle adjustment jig and cutting blade which are shown to this Embodiment. It is explanatory drawing of the nozzle adjustment operation | work using the nozzle adjustment jig which concerns on this Embodiment.

  Hereinafter, the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus according to the present embodiment. In the following, a cutting apparatus mainly including a hub blade as a cutting blade will be described, but the present invention is not limited to this configuration. The present invention can also be applied to a cutting apparatus provided with a washer blade (hubless blade) as a cutting blade.

  As shown in FIG. 1, the cutting apparatus 1 is configured to cut a workpiece W by relatively moving a pair of blade units 3 having a cutting blade 34 and a chuck table 4 holding the workpiece W. Has been. The workpiece W is formed in a substantially disc shape, and is partitioned into a plurality of regions by scheduled division lines arranged in a lattice pattern on the surface. Devices such as IC and LSI are formed in the partitioned area. Further, the workpiece W is carried into the cutting apparatus 1 while being supported by the annular frame 96 via the adhesive tape 95.

In the present embodiment, a semiconductor wafer such as a silicon wafer or a gallium strain is described as an example of the workpiece W. However, the present invention is not limited to this configuration. Adhesive members such as DAF (Die Attach Film) provided on the backside of semiconductor wafers, semiconductor product packages, ceramics, glass, sapphire (Al ₂ O ₃ ) based inorganic material substrates, various electrical components and micron-order processing position accuracy Various processing materials that are required to be processed may be used as a workpiece.

  The cutting apparatus 1 has a base 2, and a chuck table moving mechanism 5 that processes and feeds the chuck table 4 in the X-axis direction is provided on the base 2. Further, a gate-shaped column portion 21 is provided on the base 2 so as to straddle the chuck table moving mechanism 5, and the pair of blade units 3 are placed on the column portion 21 above the chuck table 4. A blade unit moving mechanism 6 for indexing and feeding in the axial direction is provided.

  The chuck table moving mechanism 5 includes a pair of guide rails 51 arranged on the upper surface of the base 2 and parallel to the X-axis direction, and a motor-driven X-axis table 52 slidably installed on the pair of guide rails 51. Have. On the upper part of the X-axis table 52, the chuck table 4 is provided. A nut portion (not shown) is formed on the back side of the X-axis table 52, and a ball screw 53 is screwed to these nut portions. A drive motor 54 is connected to one end of the ball screw 53. The ball screw 53 is rotationally driven by the drive motor 54 and the chuck table 4 is moved along the guide rail 51 in the X-axis direction.

  The chuck table 4 includes a θ table 55 that is fixed to the upper surface of the X-axis table 52 and that can rotate about the Z-axis, and a holding unit 41 that is provided on the upper portion of the θ table 55 and holds the workpiece W by suction. doing. The holding portion 41 has a disk shape having a predetermined thickness, and an adsorption surface is formed of a porous ceramic material at a central portion of the upper surface. Around the holding portion 41, four clamp portions 42 are provided via a pair of support arms extending radially outward from the four sides of the θ table 55. The four clamp portions 42 are driven by an air actuator to sandwich and fix the annular frame 96 around the workpiece W.

  The blade unit moving mechanism 6 includes a pair of guide rails 61 parallel to the Y-axis direction with respect to the front surface of the column portion 21 and a pair of motor-driven Y-axis tables 62 slidably installed on the pair of guide rails 61. Have. The blade unit moving mechanism 6 includes a pair of guide rails 63 arranged in front of each Y-axis table 62 and parallel to the Z-axis direction, and a motor-driven Z-axis table slidably installed on each guide rail 63. 64. Each Z-axis table 64 is provided with a blade unit 3.

  In addition, nut portions (not shown) are formed on the back side of each Y-axis table 62 and each Z-axis table 64, and ball screws 65 and 66 are screwed into these nut portions. Drive motors 67 and 68 are connected to one end of a ball screw 65 for the Y-axis table 62 and a ball screw 66 for the Z-axis table 64, respectively. The ball screws are rotationally driven by the drive motors 67 and 68, and the pair of blade units 3 are moved along the guide rails 61 and 63 in the Y-axis direction and the Z-axis direction. Each blade unit 3 rotates the cutting blade 34 at a high speed, and cuts the workpiece W while jetting cooling water to the cutting blade 34 or a cutting position. Details of the blade unit 3 will be described later.

  In this cutting apparatus 1, the cutting blade 34 is aligned with the planned division line of the workpiece W by the movement of the Y-axis table 62. Next, the cutting depth with respect to the workpiece W of the cutting blade 34 rotated by the movement of the Z-axis table 64 is adjusted. Then, by moving the X-axis table 52 relative to the cutting blade 34, the workpiece W held on the chuck table 4 is cut along the planned division line. By repeating the above operation, the workpiece W is divided along the grid-like division planned lines.

  Next, the blade unit will be described in detail with reference to FIGS. FIG. 2 is a front view of the blade unit according to the present embodiment. FIG. 3 is a perspective view of the blade unit according to the embodiment of the present invention. 3A is an exploded perspective view of the blade unit, and FIG. 3B is a perspective view of the blade unit after the cutting blade is assembled.

  As shown in FIGS. 2 and 3, the blade unit 3 includes a spindle 31 on which the cutting blade 34 is mounted, and a wheel cover 32 that covers the outer periphery of the cutting blade 34 except for the lower surface. The spindle 31 is an air spindle, for example, and supports the spindle shaft 312 in a floating state with respect to the spindle housing 311 by an air layer of compressed air. The tip of the spindle shaft 312 protrudes from the spindle housing 311 and is mounted with a mount flange 33 for fixing the cutting blade 34. The spindle housing 311 is made of magnetic stainless steel.

  The lower surface 313 of the spindle housing 311 is formed flat. The spindle housing 311 is adjusted so that the flat bottom surface 313 and the surface of the chuck table 4 are parallel to each other. A nozzle adjustment jig 8 (see FIG. 4), which will be described later, is attached to the lower surface 313 of the spindle housing 311 by a magnetic force with the cutting blade 34 removed. Then, the vertical position of the pair of cooling water nozzles 71 is adjusted by the nozzle adjustment jig 8 with the lower surface 313 of the spindle housing 311 as a reference. Thus, the lower surface 313 of the spindle housing 311 functions as a reference surface when the position of the cooling water nozzle 71 is adjusted.

  The mount flange 33 is made of stainless steel having magnetism, and includes a cylindrical boss portion 331 and a fixed flange 332 extending outward from the outer peripheral surface of the boss portion 331. The boss portion 331 is provided with a fitting hole (not shown) into which the tip end portion of the spindle shaft 312 is fitted. The tip end portion of the spindle shaft 312 protrudes from the boss portion 331 in a state of being fitted in the fitting hole, and a screw portion (not shown) is formed at the protruding portion. The mount flange 33 is mounted on the spindle shaft 312 by tightening a mounting nut 37 on a thread portion protruding from the boss portion 331.

  The cutting blade 34 is a hub blade and has a grindstone portion 341 for cutting the workpiece W and a hub base 342 for holding the grindstone portion 341. The grindstone portion 341 is formed in a ring shape by bonding abrasive grains such as diamond with a bonding material, for example. A through hole 343 into which the boss 331 is inserted is formed in the center of the hub base 342. When the hub base 342 is inserted into the boss portion 331, substantially half of the boss portion 331 protrudes from the front side of the hub base 342. A screw portion 334 is formed on the outer peripheral surface of the substantially half portion of the boss portion 331. The cutting blade 34 is fixed to the mount flange 33 by tightening a ring-shaped fixing nut 35 to a screw portion 334 protruding from the hub base 342.

  The wheel cover 32 is configured to inject cooling water from a plurality of locations, and is positioned in front of the cutting blade 34 in the cutting direction, with a pair of cooling water nozzles 71 disposed so as to sandwich the lower portion of the cutting blade 34. Shower nozzle 75. The pair of cooling water nozzles 71 are fixed to a cooling water nozzle block 72 disposed behind the cutting blade 34 in the cutting direction. In the cooling water nozzle block 72, a pair of cooling water nozzles 71 and a cooling water supply hose 74 are connected via a joint 73.

  The pair of cooling water nozzles 71 extends downward from the cooling water nozzle block 72 and then extends forward in the cutting direction so as to sandwich the lower portion of the cutting blade 34. A plurality of slits 711 for injecting cooling water are formed on the opposed surfaces of the pair of cooling water nozzles 71 facing each other with the cutting blade interposed therebetween. The pair of cooling water nozzles 71 inject (supply) the cooling water supplied from the supply hose 74 toward the cutting position of the workpiece W from the plurality of slits 711 to cool and clean the cutting position.

  The shower nozzle 75 is formed in a shower nozzle block 76 disposed in front of the cutting blade 34 in the cutting direction. A cooling water supply hose 78 is connected to the shower nozzle block 76 via a joint 77. Cooling water is supplied to the shower nozzle 75 from a supply hose 78 via the internal flow path of the shower nozzle block 76. The shower nozzle 75 injects cooling water toward the cutting blade 34 and entrains the cooling water in the cutting blade 34 to cool and clean the cutting portion.

  The cooling water nozzle block 72 is provided with a pair of splash covers 36 that guide the cooling water backward. The pair of splash covers 36 guides the cooling water and the cutting waste scattered by the cutting blade 34 to the rear, and discharges them to the outside of the wheel cover 32.

  The cooling water nozzle block 72 and the shower nozzle block 76 are each screwed to a fixed block (not shown) of the wheel cover 32. A long hole 722 extending in the vertical direction is formed in the side surface 721 of the cooling water nozzle block 72. A pair of adjustment screws 723 are inserted into the long holes 722. By moving the cooling water nozzle block 72 along the long holes 722 by loosening the adjustment screws 723, the vertical position of the cooling water nozzle 71 with respect to the cutting blade 34 is changed. It is adjusted (see FIG. 6).

  A pair of elongated holes (not shown) extending in the front-rear direction are formed on the side surface 724 of the cooling water nozzle block 72. An adjustment screw (not shown) is inserted into each long hole, and the front and rear positions of the cooling water nozzle 71 relative to the cutting blade 34 are adjusted by loosening the adjustment screw and moving the cooling water nozzle block 72 along the long hole. Is done. In addition, a pair of long holes 762 extending in the front-rear direction are formed in the side surface 761 of the shower nozzle block 76. An adjustment screw 763 is inserted into each long hole 762, and the front and rear positions of the shower nozzle 75 with respect to the cutting blade 34 are adjusted by loosening the adjustment screw 763 and moving the shower nozzle block 76 along the long hole 762. .

  A blade breakage detector 79 is provided on the upper portion of the wheel cover 32. The blade breakage detector 79 has a light-emitting element and a light-receiving element that face each other so as to sandwich the upper part of the cutting blade 34. The light beam emitted from the light emitting element is partially shielded by the tip of the cutting blade 34 and received by the light receiving element. Therefore, the blade breakage detector 79 detects a breakage state such as total loss or chipping of the cutting blade 34 in accordance with an increase in the amount of light received (transmittance) in the light receiving element. The blade breakage detector 79 is adjusted at the vertical position with respect to the cutting blade 34 by the adjusting screw 791 and is fixed at the position adjusted by the fixing screw 792.

  With reference to FIG.4 and FIG.5, the nozzle adjustment jig | tool for adjusting the up-and-down position of the cooling water nozzle with respect to a cutting blade is demonstrated. FIG. 4 is a perspective view of the nozzle adjustment jig according to the present embodiment. FIG. 5 is a diagram showing a positional relationship between the nozzle adjustment jig and the cutting blade shown in the present embodiment. 5A shows the positional relationship between the nozzle adjustment jig and the hub blade, and FIG. 5B shows the positional relationship between the nozzle adjustment jig and the washer blade. Moreover, in FIG. 5, the cutting blade is shown with the virtual line for convenience of explanation.

  As shown in FIG. 4, the nozzle adjustment jig 8 has a rectangular plate shape in a top view, and a flat plate-like magnet 82 is embedded at one end. The nozzle adjustment jig 8 is attached to the lower surface 313 of the spindle housing 311 by the magnetic force of the magnet 82 provided at one end, and is supported by the spindle housing 311 in a cantilever manner. Thus, one end of the nozzle adjustment jig 8 is a mounting portion 83 that is detachably mounted on the lower surface 313 of the spindle housing 311 by magnetic force. A cooling water nozzle positioning portion 84 for positioning the pair of cooling water nozzles 71 is provided at the other end of the nozzle adjustment jig 8.

  The cooling water nozzle positioning portion 84 has stepped contact surfaces 841a to 841c having different heights (three steps in the present embodiment), and the pair of cooling water nozzles 71 are placed at several levels of height. It is formed to be adjustable. The contact surfaces 841a to 841c are formed so that the pair of cooling water nozzles 71 can be appropriately adjusted according to the type of the cutting blade 34 and the like. For example, the contact surface 841a on the other end side is a height position corresponding to the hub blade, the contact surface 841b on the center side is a height position corresponding to the washer blade, and the contact surface 841c on the most end side is another washer. The pair of cooling water nozzles 71 are adjusted to a height position corresponding to the blade.

  As shown in FIG. 5A, when the cutting blade 34 is a hub blade, the distance from the cutting edge (the lowest point) to the lower surfaces of the pair of cooling water nozzles 71 is important. For this reason, the nozzle adjustment jig 8 is mounted on the lower surface 313 of the spindle housing 311, and the contact surface 841a is positioned higher than the cutting edge of the cutting blade 34 by a distance L1 (for example, 1.0 to 3.0 mm). Is designed to be positioned. By bringing the pair of cooling water nozzles 71 into contact with the contact surface 841a of the nozzle adjusting jig 8, the vertical positions of the pair of cooling water nozzles 71 are appropriately adjusted.

  As shown in FIG. 5B, the washer blade 9 is composed of a ring-shaped grindstone, and is used while being sandwiched between a pair of flanges 91 and 92. In the case of the washer blade 9, the distance from the outer diameter (lowermost point) of the flange 92 to the pair of cooling water nozzles 71 is important. Therefore, the contact surface 841b is positioned at a position higher than the outer diameter of the flange 92 by a distance L2 (for example, about 1.0 mm) when the nozzle adjustment jig 8 is mounted on the lower surface 313 of the spindle housing 311. Designed to be By bringing the pair of cooling water nozzles 71 into contact with the contact surface 841b of the nozzle adjustment jig 8, the vertical positions of the pair of cooling water nozzles 71 are appropriately adjusted.

  Similarly, when another washer blade is used, the contact surface 841c is designed in accordance with the outer diameter of the flange. As described above, the contact surfaces 841a to 841c are set such that the distance from the lower surface 313 of the spindle housing 311 is a predetermined distance according to the type of the cutting blade. Further, the horizontal alignment between the contact surfaces 841a to 841c and the pair of cooling water nozzles 71 is performed by matching the end portions of the spindle housing 311 with the marks 314a to 314c of the nozzle adjustment jig 8. In this case, the mark 314a corresponds to the contact surface 841a for the hub blade, the mark 314b corresponds to the contact surface 841b for the washer blade, and the mark 314c corresponds to the contact surface 841c for the other washer blade.

  As described above, the lower surface 313 of the spindle housing 311 on which the nozzle adjustment jig 8 is mounted is formed in parallel to the chuck table 4. The vertical position of the pair of cooling water nozzles 71 is adjusted with reference to the lower surface 313 of the spindle housing 311 parallel to the chuck table 4, so that the parallel state with respect to the chuck table 4 is maintained. Therefore, the position of the pair of cooling water nozzles 71 is accurately adjusted in the vertical direction without being inclined with respect to the horizontal plane. Further, since the nozzle adjustment jig 8 is attached to the spindle housing 311 by the magnetic force of the magnet 82, the nozzle adjustment can be performed at low cost without changing the existing configuration.

  The nozzle adjustment using the nozzle adjustment jig will be described in detail with reference to FIG. FIG. 6 is an explanatory diagram of the nozzle adjustment work using the nozzle adjustment jig according to the present embodiment. In FIG. 6, the height adjustment of the pair of cooling water nozzles with respect to the hub blade will be described. Further, in FIG. 6C, the blade unit is shown with a part thereof omitted for convenience of explanation.

  As shown in FIG. 6A, the nozzle adjustment jig 8 is mounted on the lower surface 313 of the spindle housing 311 with the cutting blade 34 removed from the wheel cover 32. The nozzle adjusting jig 8 is attracted and fixed to a spindle housing 311 formed of a magnetic material by the magnetic force of a magnet 82 provided at one end. At this time, the pair of cooling water nozzles 71 are spaced apart from the contact surface 841a of the cooling water nozzle positioning portion 84 with a slight gap.

  Next, as shown in FIG. 6B, the pair of adjustment screws 723 inserted through the long holes 722 are loosened, and the cooling water is kept until the pair of cooling water nozzles 71 come into contact with the contact surface 841 a of the nozzle adjustment jig 8. The nozzle block 72 is slid. In this case, the sliding direction of the cooling water nozzle block 72 is regulated in the vertical direction by the long hole 722 and the pair of adjusting screws 723. Therefore, the positional deviation in the rotation direction and the front-rear direction of the cooling water nozzle block 72 during nozzle adjustment is prevented.

  At this time, as shown in FIG. 6C, the contact surface 841 a of the nozzle adjustment jig 8 is parallel to the lower surface 313 of the spindle housing 311 that is parallel to the chuck table 4. Therefore, the position of the pair of cooling water nozzles 71 is adjusted in the vertical direction while maintaining a horizontal state parallel to the chuck table 4. In this embodiment, the contact surface 841a is brought into contact with both of the pair of cooling water nozzles 71 to adjust the position. However, the contact surface 841a is provided on one of the pair of cooling water nozzles 71. The position may be adjusted by contact.

  When the pair of cooling water nozzles 71 are aligned by the nozzle adjustment jig 8, the cooling water nozzle 71 is fixed at a predetermined position by tightening the adjustment screw 723. Next, as shown in FIG. 6D, the nozzle adjustment jig 8 is removed from the lower surface 313 of the spindle housing 311, and the cutting blade 34 is attached to the fixed flange 332. Since the contact surface 841a of the nozzle adjustment jig 8 is designed to secure a predetermined distance L1 between the pair of cooling water nozzles and the cutting edge of the cutting blade 34, the nozzle adjustment jig 8 has been changed from the nozzle adjustment jig 8. The pair of cooling water nozzles 71 are positioned at appropriate vertical positions with respect to the cutting blade 34.

  As described above, according to the nozzle adjustment jig 8 according to the present embodiment, it is attached to the lower surface 313 of the spindle housing 311 by the magnetic force and the cooling water nozzle 71 is brought into contact with the cutting blade 34. The cooling water nozzle 71 is adjusted to an appropriate vertical position. At this time, since the nozzle adjustment jig 8 positions the cooling water nozzle 71 at a predetermined distance from the lower surface 313 of the spindle housing 311, there is no variation in nozzle adjustment by the operator. Therefore, the cooling water is supplied to an appropriate position with respect to the cutting blade 34, and the processing heat at the time of cutting is sufficiently removed, so that the processing quality is deteriorated and the cutting blade 34 and the workpiece W can be prevented from being damaged.

  Further, by providing the nozzle positioning portion 84 of the nozzle adjustment jig 8 with the contact surface 841 corresponding to the type of cutting blade, the vertical position of different types of cutting blades can be easily adjusted. Furthermore, since the nozzle adjustment jig 8 is mounted on the spindle housing 311 by the magnet 82, it can be used without changing the existing configuration, and the nozzle can be adjusted at low cost.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the present embodiment, the flat lower surface 313 is formed at the lower end of the spindle housing 311, but the present invention is not limited to this configuration. The outer periphery of the spindle housing 311 may be formed in a circle or an ellipse over the entire circumference. In this case, the mounting portion 83 of the nozzle adjusting jig 8 is formed in an arc shape along the lower surface of the spindle housing 311, and the circumferential direction is indicated by a mark or the like so that the center of the mounting portion 83 is positioned at the lower end of the spindle housing 311. Aligned.

  Moreover, in this Embodiment, although the cooling nozzle positioning part 84 was formed in step shape so as to correspond to three types of cutting blades, it is not limited to this structure. The cooling nozzle positioning portion 84 may not be formed in a step shape so as to correspond to only one type of cutting blade. In addition, the cooling nozzle positioning portion 84 may be formed with a large number of stages so as to be able to cope with more types of cutting blades. It is also possible to prepare a plurality of nozzle adjustment jigs 8 according to the type of cutting blade.

  In the present embodiment, the nozzle adjustment jig 8 has a configuration in which the plate-like magnet 82 is embedded, but is not limited to this configuration. The nozzle adjustment jig 8 may be attached to the lower end of the spindle housing 311 by magnetic force, and the shape of the magnet 82 is not particularly limited.

  As described above, the present invention has an effect that a pair of cooling water nozzles can be easily adjusted to an optimum position with respect to a cutting blade, and particularly for a cooling water nozzle assembled on a thin wheel cover. Useful for nozzle adjustment jigs.

DESCRIPTION OF SYMBOLS 1 Cutting device 3 Blade unit 31 Spindle 311 Spindle housing 312 Spindle shaft 313 Bottom surface 314a-314c Mark 32 Wheel cover 33 Mount flange 332 Fixed flange 34 Cutting blade 71 Cooling water nozzle 72 Cooling water nozzle block 75 Shower nozzle 76 Shower nozzle block 8 Nozzle Adjustment jig 82 Magnet 83 Mounting portion 84 Cooling water nozzle positioning portion 841a-841c Contact surface W Workpiece

Claims (1)

A cutting blade that cuts the workpiece, a spindle that supports the cutting blade via a fixed flange, a spindle housing that rotatably supports the spindle, and on the front and back sides of the cutting blade across the cutting blade Nozzle adjustment that is used in a cutting device having at least a pair of cooling water nozzles that supply cooling water to the disposed cutting blades, and adjusts the nozzle position of the cooling water nozzle in a state where the cutting blades are removed A jig,
A mounting portion that is detachably mounted on the lower surface of the spindle housing by a magnetic force; and a cooling water nozzle positioning portion that sets a vertical position of the cooling water nozzle to a predetermined position and a distance from the lower surface of the spindle housing is set to a predetermined distance. Consists of
The mounting portion is mounted on the lower surface of the spindle housing with the cooling water nozzle positioning portion positioned below the cooling water nozzle, and the cooling water nozzle positioning portion is brought into contact with the cooling water nozzle positioning portion to perform the cooling. A nozzle adjustment jig that adjusts the vertical position of a water nozzle.

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