JP6678468B2 - Nozzle adjustment jig - Google Patents

Description

  The present invention relates to a nozzle adjusting jig that can adjust positions of a cutting water nozzle and a cooling water nozzle provided in a cutting device.

  For example, a workpiece, such as a wafer, on which a plurality of devices such as ICs and LSIs are partitioned by lines to be divided and formed on the surface, is cut by a cutting device equipped with a rotatable cutting blade mounted on a spindle, and individual devices are cut. And are used for various electronic devices. In the cutting process, the temperature at and around the processing point where the rotating cutting blade comes into contact with the workpiece increases due to frictional heat. If the temperature of the processing point is too high, abnormal wear of the cutting blade, burning or chipping of the workpiece occurs, and the processing quality is significantly deteriorated. In order to prevent these problems, the cutting device is provided with a cooling water nozzle for supplying cooling water for cooling the processing point and its surroundings. In addition, since cutting chips and chips are also generated at the processing point by cutting, a cutting water nozzle that supplies cutting water for removing the cutting chips and the like from the upper surface of the workpiece by a water flow is also provided in the cutting device. (For example, see Patent Document 1).

  If the arrangement position of the cooling water nozzle in the cutting device is not at an appropriate position, the processing point is not sufficiently cooled, causing breakage of the cutting blade and deterioration of the quality of the workpiece. In addition, when the disposition position of the cutting water nozzle in the cutting device is not appropriate, the cutting chips and the like are not discharged from the upper surface of the work but adhere to the upper surface of the work.

JP 2009-255222 A

  Both the cooling water nozzle and the cutting water nozzle are disposed on a wheel cover mounted on a spindle housing that supports the spindle. For example, the cooling water nozzle is disposed on the wheel cover so as to sandwich the cutting blade so that the cooling water can be jetted in the thickness direction of the cutting blade of the cutting blade. That is, the cooling water nozzle is disposed on the wheel cover such that its longitudinal direction is along the front and back surfaces of the cutting blade, and a plurality of cooling water nozzle orifices are aligned in the surface direction of the cutting blade. Further, the cutting water nozzle is arranged on the wheel cover such that the injection port faces the outer periphery of the cutting blade, so that the cutting water can be jetted from the outer peripheral direction of the cutting blade toward the cutting blade. .

  However, the inside of the processing chamber of the cutting device is narrow and hard to see, and it is extremely difficult and time-consuming to precisely adjust the position of each nozzle.

  In addition, the machining result, that is, the size of the chipping in the workpiece, the amount of wear of the blade in the cutting blade, and the like are slightly different depending on the positions of the cooling water nozzle and the cutting water nozzle. When it is desired to perform the same cutting process on each workpiece by using the same, the cooling water nozzle and the cutting water nozzle are set at the same position in the device in each of the cutting devices while confirming the position of each cutting blade. It was difficult.

  Therefore, in the cutting device, the position of the cooling water nozzle or the cutting water nozzle is adjusted easily and accurately to a desired position, and the cooling water is cooled to the same position in the device in any of the plurality of cutting devices. There is a problem of setting a water nozzle and a cutting water nozzle.

The present invention for solving the above problems, a chuck table holding a workpiece, and at least cutting means for cutting the workpiece held by the chuck table with a cutting blade, the cutting means, comprising a spindle unit to which the spindle is mounted on a spindle is rotatably supported by a spindle housing via a mounting flange said cutting blade has a boss portion, an opening for attaching the cutting blade mounted on the spindle housing A wheel cover, and a pair of cooling water nozzles that are attached to the wheel cover so that the position can be adjusted and are arranged on the front side and the back side of the cutting blade so as to sandwich the cutting blade and supply cooling water to the cutting blade; , The cutting cover is attached to the wheel cover so as to be adjustable in position and angle. A nozzle adjustment jig that are used in the cutting apparatus and a cutting water nozzle for supplying a cutting water from the outer circumferential direction of the over-de towards the cutting blade, the nozzle adjustment jig of the cooling water nozzles At least a cooling water nozzle positioning portion for adjusting the height, and in a state where the nozzle adjusting jig is placed on the chuck table, the cooling water nozzle is brought into contact with the upper surface of the cooling water nozzle positioning portion. Thus, the position of the cooling water nozzle is adjusted , and the position of the cooling water nozzle positioning section can be adjusted in the nozzle adjusting jig.

According to another aspect of the present invention, there is provided a chuck table for holding a workpiece, and cutting means for cutting the workpiece held by the chuck table with a cutting blade. an opening for attaching the spindle unit to which the spindle is mounted on a spindle is rotatably supported by a spindle housing via a mounting flange, the cutting blade mounted on the spindle housing said cutting blade has a boss And a pair of cooling water that is attached to the wheel cover so as to be adjustable in position and is arranged on the front side and the back side of the cutting blade so as to sandwich the cutting blade and supplies cooling water to the cutting blade. The nozzle and the wheel cover are attached to the wheel cover so as to be adjustable in position and angle. Cutting and cutting water nozzle for supplying a cutting water towards the cutting blade from the outer circumference of the blade, a nozzle adjustment jig that are used in the cutting apparatus provided with, the nozzle adjustment jig of the cutting water nozzles At least a cutting water nozzle positioning part for adjusting the height and angle is provided, and in a state where the nozzle adjusting jig is placed on the chuck table, the cutting water nozzle is brought into contact with the upper surface of the cutting water nozzle positioning part. The nozzle adjusting jig is characterized in that the position of the cutting water nozzle is adjusted by being brought into contact with the cutting water nozzle, and the position of the cutting water nozzle positioning section can be adjusted in the nozzle adjusting jig.

  A nozzle adjustment jig, which adjusts the position of the cooling water nozzle, has a cutting water nozzle positioning portion for adjusting a height and an angle of the cutting water nozzle, and the nozzle is provided on the chuck table. It is preferable that the position of the cutting water nozzle can be adjusted by bringing the cutting water nozzle into contact with the upper surface of the cutting water nozzle positioning section with the adjustment jig placed.

In the nozzle adjusting jig provided with the cooling water nozzle positioning section, it is preferable that the cutting water nozzle positioning section can adjust a position in the nozzle adjusting jig .

The nozzle adjustment jig has a cooling water nozzle positioning portion for adjusting a height and an angle of the cooling water nozzle, and the cooling water nozzle is placed in a state where the nozzle adjustment jig is placed on the chuck table. It is preferable that the position of the cooling water nozzle can be adjusted by contacting the cooling water nozzle with the upper surface of the cooling water nozzle positioning portion .

The nozzle adjustment jig according to the present invention includes at least a chuck table that holds a workpiece, and a cutting unit that cuts the workpiece held by the chuck table with a cutting blade, wherein the cutting unit includes a cutting blade. A spindle unit mounted on the spindle via a mounting flange having a boss portion and the spindle rotatably supported by the spindle housing; a wheel cover mounted on the spindle housing and having an opening for mounting a cutting blade; and a wheel cover. A pair of cooling water nozzles that are mounted on the front and back sides of the cutting blade so as to sandwich the cutting blade and that supply cooling water to the cutting blade, and the position and angle of the wheel cover are adjustable. Cutting vibration from the outer circumference of the mounted cutting blade A cutting water nozzle for supplying cutting water toward the nozzle, and having at least a cooling water nozzle positioning portion for adjusting the height of the cooling water nozzle, thereby adjusting the nozzle on the chuck table. The position of the cooling water nozzle can be easily adjusted by bringing the cooling water nozzle into contact with the upper surface of the cooling water nozzle positioning portion with the jig placed. Further, the cooling water nozzle positioning unit can adjust the position in the nozzle adjusting jig, so that the nozzle adjusting jig can be adjusted according to the position (height) of the cooling water nozzle on the wheel cover of the cutting device when the machining result is good. Adjust the height position of the cooling water nozzle positioning part of the tool, and adjust the height position of the cooling water nozzle positioning part of the other cutting device of the same type using the nozzle adjustment jig with this height position adjusted By doing so, it becomes possible to easily set the cooling water nozzle at the same height position in the apparatus in any of a plurality of cutting apparatuses of the same type.

The nozzle adjustment jig according to the present invention includes at least a chuck table that holds a workpiece, and a cutting unit that cuts the workpiece held by the chuck table with a cutting blade, wherein the cutting unit includes a cutting blade. A spindle unit mounted on the spindle via a mounting flange having a boss portion and the spindle rotatably supported by the spindle housing; a wheel cover mounted on the spindle housing containing the spindle and having an opening for mounting a cutting blade; A pair of cooling water nozzles that are mounted on the wheel cover so as to be adjustable in position and are arranged on the front and back sides of the cutting blade so as to sandwich the cutting blade and supply cooling water to the cutting blade, and the position and angle of the wheel cover The adjustable mounting of the cutting blade A cutting water nozzle that supplies cutting water from the circumferential direction toward the cutting blade, and is used in a cutting device having at least a cutting water nozzle positioning unit for adjusting the height and angle of the cutting water nozzle, With the nozzle adjusting jig placed on the chuck table, the cutting water nozzle is brought into contact with the upper surface of the cutting water nozzle positioning portion, so that the position of the cutting water nozzle can be easily adjusted. Also, the cutting water nozzle positioning unit can adjust the position in the nozzle adjustment jig, so that the nozzle adjustment jig can be adjusted according to the height position and angle of the cutting water nozzle on the wheel cover of the cutting device when the machining result is good. The height position and angle of the cutting water nozzle positioning part of the tool are adjusted, and the height of the cutting water nozzle positioning part of the other same type of cutting device is adjusted using the nozzle adjustment jig whose height position and angle have been adjusted. By adjusting the height position and angle, it is possible to easily set the cutting water nozzle at the same height position and angle in any of a plurality of cutting devices of the same type.

  The nozzle adjustment jig, which adjusts the position of the cooling water nozzle, has a cutting water nozzle positioning portion for adjusting the height and angle of the cutting water nozzle, so that the nozzle adjustment jig is provided on the chuck table. The cutting water nozzle is brought into contact with the upper surface of the cutting water nozzle positioning portion in a state where the cutting water nozzle is placed, so that the position of the cutting water nozzle can be easily adjusted.

  The cooling water nozzle positioning part can adjust the position in the nozzle adjustment jig, for example, nozzle adjustment according to the position (height) of the cooling water nozzle on the wheel cover of the cutting device when the machining result is good. Adjust the height position of the cooling water nozzle positioning part of the jig, and use the nozzle adjustment jig adjusted for this height position to adjust the height position of the cooling water nozzle positioning part of the other cutting device of the same type. By making the adjustment, it is possible to easily set the cooling water nozzle at the same height position in the plurality of cutting devices of the same type.

  The cutting water nozzle positioning part can adjust the position in the nozzle adjustment jig, for example, nozzle adjustment according to the height position and angle of the cutting water nozzle on the wheel cover of the cutting device when the machining result is good Adjust the height position and angle of the cutting water nozzle positioning part of the jig, and use the nozzle adjustment jig whose height position and angle have been adjusted. By adjusting the height position and angle, it is possible to easily set the cutting water nozzle at the same height position and angle in any of a plurality of cutting devices of the same type.

It is a perspective view showing an example of a cutting device. It is a perspective view showing the state where a cutting blade is attached to a spindle unit. It is a perspective view showing an example of a wheel cover. FIG. 4A is a perspective view illustrating an example of a nozzle adjustment jig. FIG. 4B is a front view illustrating an example of the nozzle adjustment jig. It is a front view showing the state where the position of a cooling water nozzle and the position of a cutting water nozzle are adjusted with a nozzle adjustment jig.

  The cutting apparatus 1 shown in FIG. 1 includes at least a chuck table 30 for holding a workpiece, and a cutting unit 6 for cutting the workpiece held on the chuck table 30 with a cutting blade 60. A spindle unit 61 in which the cutting blade 60 is mounted on the spindle 610 via a mounting flange 612 having a boss portion 612b and the spindle 610 is rotatably supported by the spindle housing 611; Cover 62 provided with an opening 62a for adjusting the position, and is disposed on the front surface 60a side and the back surface 60b side of the cutting blade 60 so as to sandwich the cutting blade 60 so as to sandwich the cutting blade 60 and cool the cutting blade 60. A pair of cooling water supply A nozzle 69, and a cutting water nozzle 68 for supplying cutting water from the outer periphery toward the cutting blade 60 of the mounted for adjusting the position and angle to the wheel cover 62 the cutting blade 60.

  The chuck table 30 has, for example, a circular outer shape, and includes a suction unit 300 made of a porous member or the like and sucking a workpiece, and a frame 301 supporting the suction unit 300. The suction unit 300 communicates with a suction source (not shown) and suction-holds the wafer W on a holding surface 300 a which is an exposed surface of the suction unit 300 and is flush with the upper surface of the frame 301. The holding surface 300a is a horizontal plane orthogonal to the Z axis. The chuck table 30 is rotatably supported by the rotating means 31, and can be moved in the X-axis direction by cutting feed means (not shown). Around the chuck table 30, a fixed clamp 32 that is movable in the radial direction of the chuck table 30 and fixes a ring frame or the like that supports a workpiece is provided. Note that the chuck table 30 is not limited to a circular porous chuck as shown, but may be a square jig-type chuck table or the like.

  The spindle unit 61 shown in FIGS. 1 and 2 is, for example, a column-shaped spindle housing 611 arranged horizontally with respect to the holding surface 300a of the chuck table 30, and is rotatably supported in the spindle housing 611 and has an axial direction X. The spindle 610 includes a spindle 610 extending in a direction perpendicular to the axial direction (Y-axis direction), and a mount flange 612 detachably attached to a distal end portion of the spindle 610 protruding from the spindle housing 611 in the −Y direction. The mount flange 612 includes a flange portion 612a and a boss portion 612b that protrudes from the flange portion 612a in the thickness direction (Y-axis direction) and has a thread provided on a side surface thereof.

  The cutting blade 60 is, for example, an electroformed hub blade, and includes an aluminum base 600 formed in a disk shape, and a cutting blade 601 fixed to an outer peripheral portion of the base 600. The cutting blade 60 is not limited to the electroformed hub blade, and may be a washer-type blade formed by fixing diamond abrasive grains or the like with an appropriate binder such as a resin and molding the ring in an annular shape.

  The cutting blade 60 is inserted into the boss portion 612b, and is sandwiched between the nut 613 and the flange portion 612a from both sides in the Y-axis direction by the nut 613 screwed with the screw of the boss portion 612b. Attached to the spindle 610 via 612. Then, as a motor (not shown) accommodated in the spindle housing 611 drives the spindle 610 to rotate, the cutting blade 60 also rotates at a high speed.

  The wheel cover 62 shown in FIGS. 1 and 3 is provided with an opening 62a for attaching the cutting blade 60 at a substantially central portion thereof, and is mounted on the spindle housing 611 to position the cutting blade 60 at the opening 62a. The cutting blade 60 can be covered from above. The opening 62a is attached to the spindle housing 611 such that the center of the opening 62a is positioned on the axis extending in the Y-axis direction of the spindle 610, that is, the opening 62a is positioned between the rotation center of the spindle 610 and the opening. It is formed in the wheel cover 62 so that the center of the part 62a coincides.

  A blade breakage detector 620 is connected to the base 62b of the wheel cover 62 shown in FIGS. The blade breakage detector 620 has a light emitting unit 620a and a light receiving unit (not shown) that are arranged to face each other so as to sandwich the upper part of the cutting blade 60. That is, the tip of the light emitting unit 620a connected to the optical fiber 620c shown in FIGS. 1 and 3 and the tip of the light receiving unit (not shown) also connected to the optical fiber 620d face each other with the outer periphery of the upper part of the cutting blade 60 interposed therebetween. The inspection light emitted from the light emitting unit 620a is partially shielded by the cutting blade 601 of the cutting blade 60, and is received by the light receiving unit. Therefore, the blade damage detector 620 detects a damage state such as total loss or chipping of the cutting blade 60 in accordance with an increase in the amount of light received (transmittance) in the light receiving unit. The vertical position of the blade damage detector 620 with respect to the cutting blade 60 is adjusted by the adjusting screw 620e, and is fixed at the position adjusted by the fixing screw 620f.

  A cooling water block 621 is fastened to the rear side (−X direction side) of the base 62b by an adjusting screw 621c so as to be movable in the Z-axis direction. A pair of substantially L-shaped cooling water nozzles 69 are fixed to the cooling water block 621 when viewed from the −Y direction side. Cooling water is supplied to the pair of cooling water nozzles 69 from a supply hose 621 a through a cooling water block 621. After a pair of cooling water nozzles 69 extend downward from the cooling water block 621, they extend parallel to each other in the + X direction so that the lower portion of the cutting blade 60 is sandwiched between the front surface 60 a and the back surface 60 b of the cutting blade 60. As shown in FIG. 3, a plurality of slits 69 a for injecting cooling water are arranged in the X-axis direction at positions corresponding to the cutting blades 60 on the distal end sides of the pair of cooling water nozzles 69. Cooling water is injected from the side by the slit 69a to cool the processing point between the cutting blade 60 and the workpiece.

  At the lower end of the cooling water block 621, a pair of splash covers 621b for guiding the injected cooling water to the −X direction side are disposed so as to be located outside the pair of cooling water nozzles 69 in the Y axis direction. I have.

  On the + X direction side of the base 62b, a cutting water block 622 is fastened by an adjusting screw 622a so as to be slidable in the Y axis direction. The cutting water block 68 is provided with a cutting water nozzle 68 that supplies cutting water from the outer peripheral direction of the cutting blade 60 toward the cutting blade 60. For example, a connection block 622b is fastened to the cutting water block 622 by an adjusting screw 622c so as to be slidable in the Z-axis direction. The adjusting screw 622c is inserted into a long hole formed in the connecting block 622b. By loosening the adjusting screw 622c and moving the connecting block 622b along the long hole, the connecting block 622b can slide in the Z-axis direction. A cutting water nozzle support 622d that supports the cutting water nozzle 68 and that can adjust the angle in the direction of arrow A via an adjustment screw 622e is fastened to the lower portion of the connection block 622b.

  A supply hose 622f communicates with the cutting water nozzle 68 through a cutting water block 622 and a cutting water nozzle support 622d, and the tip (cutting water injection port) of the cutting water nozzle 68 faces the cutting blade 601 of the cutting blade 60. Open. The cutting water nozzle 68 loosens the adjustment screw 622e, adjusts the cutting water nozzle support 622d to reach a predetermined angle, and then tightens the adjustment screw 622e, so that the cutting water with respect to the cutting blade 60 from the outer circumferential direction. The injection angle can be determined. The cutting water is sprayed from the outer circumferential direction to the cutting blade 60 by the cutting water nozzle 68, whereby the cutting water is caught in the rotating cutting blade 60 and is pushed out in the −X direction along with cutting chips and the like generated at the processing point. The cleaning and cooling of the processing point are performed.

  The nozzle adjustment jig 7 shown in FIGS. 4A and 4B has a pair of the cooling water nozzle 69 and the cutting tool with the nozzle adjustment jig 7 placed on the chuck table 30 of the cutting device 1 shown in FIG. This is a jig used to adjust the position of the water nozzle 68. For example, the nozzle adjustment jig 7 includes a cooling water nozzle positioning unit 71 for adjusting the height of the cooling water nozzle 69, a cutting water nozzle positioning unit 72 for adjusting the height and angle of the cutting water nozzle 68, and It has. For example, the cooling water nozzle positioning unit 71 and the cutting water nozzle positioning unit 72 are each manufactured by molding a translucent engineering plastic resin or the like into a predetermined shape.

  For example, the nozzle adjusting jig 7 includes a substantially rectangular parallelepiped base 7a shown in FIGS. 4A and 4B. The cooling water nozzle positioning portion 71 for adjusting the height of the cooling water nozzle 69 has, for example, a substantially rectangular parallelepiped shape, and a pair of fittings extending parallel to each other in the X-axis direction on its upper surface 71a. A groove 710 is formed. The pair of fitting grooves 710 are such that when the pair of cooling water nozzles 69 are in contact with the upper surface 71a of the cooling water nozzle positioning portion 71, the respective cooling water nozzles 69 are fitted into the respective fitting grooves 710. The distance between them in the Y-axis direction is determined. The pair of fitting grooves 710 need not be formed on the upper surface 71a of the cooling water nozzle positioning portion 71.

  The cooling water nozzle positioning portion 71 is fastened to an attachment plate 73 disposed on the front surface (−Y direction side) of the base 7 a by an adjustment screw 712 so as to be movable in the Z-axis direction. The adjusting screw 712 is inserted into a long hole formed through the side surface of the cooling water nozzle positioning portion 71 in the Y-axis direction, and the adjusting screw 712 is loosened to move the cooling water nozzle positioning portion 71 along the long hole. By sliding in the Z-axis direction, the height position of the cooling water nozzle positioning portion 71 with respect to the base 7a can be changed. The location of the adjusting screw 712 is not limited to the illustrated example. For example, another long hole is formed in the cooling water nozzle positioning portion 71 in the Y-axis direction, and the adjusting screw 712 is inserted. The cooling water nozzle positioning portion 71 may be moved more accurately in the Z-axis direction along the long hole.

  The cutting water nozzle positioning portion 72 for adjusting the height and the angle of the cutting water nozzle 68 has, for example, a substantially L-shape as a whole, and has, for example, a step formed on its upper surface 72a. I have. In the present embodiment, there is one step, but there may be two or more steps. As described above, the height position of the cutting water nozzle 68 is selected by providing a difference in the height position of the upper surface 72a and bringing the bottom surface of the cutting water nozzle support tool 622d supporting the cutting water nozzle 68 into contact with the upper surface 72a. I can do it. From the upper surface 72a of the cutting water nozzle positioning portion 72, a regulating portion 720 for regulating the angle of the cutting water nozzle support 622d together with the upper surface 72a is provided upright.

  The cutting water nozzle positioning portion 72 is fastened to an attachment plate 74 arranged on the front surface (−Y direction side) of the base 7 a by an adjusting screw 721 so that the angle can be adjusted in the arrow B direction. The adjusting screw 721 is inserted into a curved long hole formed on the side surface of the cutting water nozzle positioning portion 72. The cutting is performed by loosening the adjusting screw 721 and moving the cutting water nozzle positioning portion 72 along the curved long hole. The position and angle of the water nozzle positioning portion 72 with respect to the base 7a can be changed. Also, the mounting plate 74 to which the cutting water nozzle positioning portion 72 is fastened is movably fastened to the base 7a by the adjusting screw 741 in the Z-axis direction. By moving, the height position of the cooling water nozzle positioning portion 71 with respect to the base 7a in the Z-axis direction can be adjusted.

  Hereinafter, an adjustment method and a nozzle in the case where the height position of the cooling water nozzle 69 and the height position and the angle of the cutting water nozzle 68 are adjusted by the nozzle adjustment jig 7 with reference to FIGS. The operation of each component of the adjustment jig 7 will be described.

  First, the case where the height position of the pair of cooling water nozzles 69 is adjusted will be described below. In adjusting the height position of the cooling water nozzle 69, an experiment is performed in advance to determine the height position of the cooling water nozzle 69 in the wheel cover 62 shown in FIG. . For example, an experiment is performed in advance to obtain conditions when the size of chipping of the workpiece becomes small or the amount of wear of the cutting blade 60 does not become extremely large. Then, an appropriate height position of the cooling water nozzle 69 on the wheel cover 62 is determined. The appropriate height position of the cooling water nozzle 69 on the wheel cover 62 is determined, for example, in the Z-axis direction from the holding surface 300a of the chuck table 30 to the cooling water nozzle 69 when a good processing result is obtained in the above experiment. Is determined by the distance at Note that the experiment is performed, for example, by cutting the dummy wafer using the cutting device 1.

  Next, the nozzle adjustment jig 7 shown in FIGS. 4A and 4B is adjusted using the cutting device 1 in which the appropriate height position of the cooling water nozzle 69 on the wheel cover 62 is determined. That is, the nozzle adjusting jig 7 is placed on the chuck table 30 of the cutting device 1 such that the upper surface 71a of the cooling water nozzle positioning portion 71 faces upward, and the upper surface 71a of the cooling water nozzle positioning portion 71 is obtained by the above experiment. The adjustment screw 712 is loosened and the cooling water nozzle positioning portion 71 is slid along the long hole in the Z-axis direction so as to reach the appropriate height position of the cooling water nozzle 69 when the obtained good processing result is obtained. By moving, the nozzle adjustment jig 7 is adjusted.

  Next, the height position of the cooling water nozzle 69 of another cutting device 1 of the same type as the cutting device 1 used in the above-described experiment is adjusted. First, the chuck table 30 shown in FIG. 1 is moved in the X-axis direction and positioned below the cutting means 6. Further, in the present embodiment, as shown in FIG. 5, the cutting blade 60 is detached from the spindle 610 to make the position adjustment easier, and the opening 62a of the wheel cover 62 is left empty. In FIG. 5, the illustration of the spindle unit 61 including the spindle housing 611 to which the wheel cover 62 is attached is omitted. When there is no possibility that the cutting blade 60 and the nozzle adjustment jig 7 come into contact with each other when the height position of the cooling water nozzle 69 is adjusted, the cutting blade 60 does not need to be removed from the spindle 610.

  The cooling water nozzle positioning portion 71 previously adjusted is placed on the holding surface 300a of the chuck table 30 so that the upper surface 71a faces upward, and a pair of fitting grooves 710 on the upper surface 71a The cooling water nozzle positioning unit 71 is positioned so as to be directly below the nozzle 69. In this state, the height position of the upper surface 71a of the cooling water nozzle positioning portion 71 is an appropriate height position for adjusting the height of the pair of cooling water nozzles 69.

  Here, it is assumed that the height position of the pair of cooling water nozzles 69 of the cutting device 1 is, for example, at a position higher than the upper surface 71 a of the cooling water nozzle positioning portion 71. In this case, the adjustment screw 621c shown in FIG. 5 is loosened and the cooling water block 621 is moved downward along the long hole, and the pair of cooling water nozzles 69 fixed to the cooling water block 621 is cooled. It is brought into contact with the upper surface 71a of the water nozzle positioning portion 71. In the present embodiment, each of the cooling water nozzles 69 is fitted into a pair of fitting grooves 710 on the upper surface 71a.

  As described above, the nozzle adjustment jig 7 has at least the cooling water nozzle positioning portion 71 for adjusting the height of the cooling water nozzle 69, so that the nozzle adjustment jig 7 is placed on the chuck table 30. Then, by bringing the cooling water nozzle 69 into contact with the upper surface 71a of the cooling water nozzle positioning portion 71, the position of the cooling water nozzle 69 can be easily adjusted.

  In addition, since the position of the cooling water nozzle positioning portion 71 in the nozzle adjusting jig 7 can be adjusted, the position of the cooling water nozzle 69 on the wheel cover 62 of the cutting device 1 when the machining result is good can be adjusted. The height position of the cooling water nozzle positioning portion 71 of the nozzle adjusting jig 7 is adjusted by using the nozzle adjusting jig 7 whose height position has been adjusted, and the other cutting device 1 of the same type is cooled using the nozzle adjusting jig 7. By adjusting the height position of the water nozzle 69, the cooling water nozzle 69 can be easily set at the same height position in the plurality of cutting devices 1 of the same type.

  Next, the case of adjusting the height position and angle of the cutting water nozzle 68 will be described below. When adjusting the height position and angle of the cutting water nozzle 68, when the cutting water nozzle 68 is at any height position and angle in the wheel cover 62 shown in FIG. By performing an experiment in advance to obtain data on whether or not a good machining result is obtained such as a state of being sufficiently removed, the appropriate height position and angle of the cutting water nozzle 68 in the wheel cover 62 are determined. Determine it. The appropriate height position of the cutting water nozzle 68 on the wheel cover 62 is determined, for example, in the Z-axis direction from the holding surface 300a of the chuck table 30 to the cutting water nozzle 68 when a good processing result is obtained in the above experiment. That is, in the present embodiment, the distance is determined in the Z-axis direction from the holding surface 300a of the chuck table 30 to the bottom surface of the cutting water nozzle support 622d that supports the cutting water nozzle 68. Also, the appropriate angle of the cutting water nozzle 68 in the wheel cover 62 is, for example, the inclination angle of the cutting water nozzle 68 with respect to the holding surface 300a of the chuck table 30 when a good processing result is obtained in the above experiment, that is, In the present embodiment, it is determined by the inclination angle of the cutting water nozzle supporter 622d that supports the cutting water nozzle 68 with respect to the holding surface 300a of the chuck table 30. Note that the experiment is performed, for example, by cutting the dummy wafer using the cutting device 1.

  Next, the nozzle adjusting jig 7 is adjusted using the cutting device 1 in which the appropriate height position and angle of the cutting water nozzle 68 on the wheel cover 62 are determined. That is, for example, the nozzle adjustment jig 7 is placed on the chuck table 30 of the cutting device 1 such that the upper surface 72a of the cutting water nozzle positioning portion 72 faces upward, and the upper surface 72a of the cutting water nozzle positioning portion 72 is The adjusting screw 741 is loosened and the mounting plate 74 is moved along the long hole in the Z-axis direction so as to reach the appropriate height position of the cutting water nozzle 68 when the good processing result obtained in the previous experiment is obtained. Slide to. Further, for example, by loosening the adjustment screw 721 shown in FIGS. 4A and 4B and moving the cutting water nozzle positioning section 72 along the curved elongated hole, the chuck table 30 of the cutting water nozzle positioning section 72 can be moved. The angle with respect to the holding surface 300a is changed. In the present embodiment, while the bottom surface of the cutting water nozzle support 622d is in contact with the upper surface 72a of the cutting water nozzle positioning part 72, the regulating part of the cutting water nozzle positioning part 72 is attached to the back surface 622g of the cutting water nozzle support 622d. The front surface 720a of the 720 is brought into contact. By performing such an adjustment, the height position and angle of the cutting water nozzle positioning portion 72 with respect to the holding surface 30a of the chuck table 30 are in an appropriate state.

  Next, the height position and angle of the cutting water nozzle 68 of another cutting device 1 of the same type as the cutting device 1 used in the above-described experiment are adjusted. First, the chuck table 30 shown in FIG. 1 is moved in the X-axis direction and positioned below the cutting means 6. Next, in the present embodiment, as shown in FIG. 5, the cutting blade 60 is detached from the spindle 610 to make the adjustment easier, and the opening 62a of the wheel cover 62 is left empty. When there is no possibility that the cutting blade 60 and the nozzle adjustment jig 7 come into contact with each other when adjusting the height position of the cooling water nozzle 69, the cutting blade 60 does not need to be removed from the spindle 610.

  Further, on the holding surface 300a of the chuck table 30, the previously adjusted cutting water nozzle positioning portion 72 is placed so that the upper surface 72a faces upward, and the higher upper surface 72a is directly below the cutting water nozzle 68, that is, In the present embodiment, the cutting water nozzle positioning portion 72 is positioned so as to be directly below the bottom surface of the cutting water nozzle support tool 622d that supports the cutting water nozzle 68. In this state, the height position of the upper surface 72a of the cutting water nozzle positioning portion 72 is an appropriate height position for adjusting the height of the cutting water nozzle 68.

  Here, it is assumed that the height position of the cutting water nozzle 68 of the cutting device 1 is higher than, for example, the upper surface 72 a of the cutting water nozzle positioning portion 72. In this case, the adjusting screw 622c shown in FIG. 5 is loosened and the connection block 622b is moved downward along the long hole, and the bottom surface of the cutting water nozzle support 622d is moved to the higher side of the cutting water nozzle positioning portion 72. Is brought into contact with the upper surface 72a. In this state, the back surface 622g (the surface facing the + X direction side in FIG. 5) of the cutting water nozzle support tool 622d is connected to the front surface 720a of the regulating portion 720 of the cutting water nozzle positioning portion 72 (− in FIG. 5). When the cutting water nozzle support 622d is not in contact with the cutting water nozzle support 622d, the adjusting screw 721 is loosened and the cutting water nozzle support 622d is moved along the curved elongated hole. 622 g is brought into contact with the front surface 720 a of the regulating portion 720 of the cutting water nozzle positioning portion 72.

  As described above, the nozzle adjustment jig 7 has the nozzle adjustment jig 7 on the chuck table 30 by having the cutting water nozzle positioning portion 72 for adjusting the height and the angle of the cutting water nozzle 68. In this state, the cutting water nozzle 68 is brought into contact with the upper surface 72a of the cutting water nozzle positioning portion 72, so that the height position and angle of the cutting water nozzle 68 can be easily adjusted.

  In addition, by making the position of the cutting water nozzle positioning portion 72 in the nozzle adjustment jig 7 adjustable, the height position and angle of the cutting water nozzle 68 on the wheel cover 62 of the cutting device 1 when the machining result is good. The height position and angle of the cutting water nozzle positioning portion 72 of the nozzle adjusting jig 7 are adjusted accordingly, and the cutting water of another cutting device 1 of the same type is used by using the nozzle adjusting jig 7 thus adjusted. By adjusting the height position and angle of the nozzle 68, the cutting water nozzle 68 can be easily set at the same height position and angle in the plurality of cutting devices 1 of the same type.

  In addition, the nozzle adjustment jig 7 according to the present invention is not limited to the above-described embodiment, and the arrangement position and size of each component of the nozzle adjustment jig 7 shown in the accompanying drawings are also not limited. However, the present invention is not limited to this, and can be appropriately changed within a range in which the effects of the present invention can be exhibited.

  For example, when the workpiece is a package substrate and the package substrate is cut and completely cut, the back surface of the package substrate is directly attached to the holding surface of the chuck table without attaching a dicing tape to the back surface of the package substrate. In many cases, suction holding is performed in a state where the package substrate is brought into contact with the substrate, and the package substrate held by suction is cut. In this case, as in the present embodiment, in the experiment for determining the position (height) of the cooling water nozzle 69 on the wheel cover 62 of the cutting device 1 when the machining result is good, the holding surface 300a of the chuck table 30 is used. The distance in the Z-axis direction from the nozzle to the cooling water nozzle 69 is used as a reference.

  However, when the workpiece is a semiconductor wafer or the like, by attaching the outer peripheral portion of the adhesive surface of the adhesive tape adhered to the wafer to the ring frame, the wafer is attached to the ring frame via the adhesive tape. In many cases, the wafer is processed in a state where the wafer is supported by the frame unit (a state where the frame unit is formed). Therefore, in this case, in the experiment for determining the position (height) of the cooling water nozzle 69 on the wheel cover 62 of the cutting device 1 when the machining result is good, the state where the cooling water nozzle 69 is placed on the holding surface 300a of the chuck table 30 is considered. The distance in the Z-axis direction from the upper surface of the adhesive tape to the cooling water nozzle 69 is used as a reference. Therefore, in this case, adjustment of the cooling water nozzle 69 and the like by the nozzle adjustment jig 7 is performed with the nozzle adjustment jig 7 placed over the adhesive tape on the chuck table 30.

  Further, in order to prevent the holding surface 300a of the chuck table 30 from being damaged by the mounting of the nozzle adjusting jig 7, in the cutting device 1, the holding surface 300a of the chuck table 30 and the Z-axis direction are located near the chuck table 30. By providing an adjustment table provided with a holding surface having the same height position, adjustment of the cooling water nozzle 69 and the like by the nozzle adjustment jig 7 may be performed using this adjustment table. .

1: Cutting device 30: Chuck table 300: Suction unit 300a: Holding surface 301: Frame 31: Rotating means 32: Fixed clamp 6: Cutting means 60: Cutting blade 60a: Surface of cutting blade 60b: Back surface of cutting blade
600: base 601: cutting blade
61: spindle unit 610: spindle 611: spindle housing
612: Mount flange 612a: Flange section 612b: Boss section 613: Nut 62: Wheel cover 62a: Opening section 62b: Base section 620: Blade breakage detector 620a: Light emitting section 620c, 620d: Optical fiber 620e: Adjusting screw 620f: Fixing screw 621 : Cooling water block 621a: supply hose 621b: pair of splash covers
621c: adjusting screw 69: pair of cooling water nozzles 69a: slit 622: cutting water block 622a, 622c, 622e: adjusting screw
622b: Connecting block 622d: Cutting water nozzle support
622g: Back side of cutting water nozzle support 622f: Supply hose 68: Cutting water nozzle
7: Nozzle adjusting jig 7a: Base
71: Cooling water nozzle positioning unit 71a: Upper surface of cooling water nozzle positioning unit
710: A pair of fitting grooves 712: Adjusting screw 73: Mounting plate 72: Cutting water nozzle positioning part 72a: Upper surface of cutting water nozzle positioning part
720: regulating part 720a: front of regulating part 721: adjusting screw
74: Mounting plate 741: Adjustment screw

Claims (5)

A chuck table for holding the workpiece,
Cutting means for cutting the workpiece held by the chuck table with a cutting blade, at least,
The cutting means includes a spindle unit to which the spindle is mounted on a spindle is rotatably supported by a spindle housing via a mounting flange said cutting blade has a boss portion, is mounted on the spindle housing for mounting said cutting blade A wheel cover having an opening portion, and a pair of cooling wheels which are attached to the wheel cover so as to be adjustable in position and are arranged on the front side and the back side of the cutting blade so as to sandwich the cutting blade and supply cooling water to the cutting blade. a cooling water nozzle of Ru is used in a cutting machine and a cutting water nozzle for supplying a cutting water towards the cutting blade from the outer circumference of the position and angle adjustable mounted the cutting blade on the wheel cover A nozzle adjustment jig,
The nozzle adjustment jig is
Having at least a cooling water nozzle positioning portion for adjusting the height of the cooling water nozzle,
With the nozzle adjusting jig placed on the chuck table, the cooling water nozzle is brought into contact with the upper surface of the cooling water nozzle positioning portion to adjust the position of the cooling water nozzle ,
The nozzle adjusting jig, wherein the cooling water nozzle positioning portion can adjust a position in the nozzle adjusting jig. A chuck table for holding the workpiece,
Cutting means for cutting the workpiece held by the chuck table with a cutting blade, at least,
The cutting means includes a spindle unit to which the spindle is mounted on a spindle is rotatably supported by a spindle housing via a mounting flange said cutting blade has a boss portion, is mounted on the spindle housing for mounting said cutting blade A wheel cover having an opening portion, and a pair of cooling wheels which are attached to the wheel cover so as to be adjustable in position and are arranged on the front side and the back side of the cutting blade so as to sandwich the cutting blade and supply cooling water to the cutting blade. a cooling water nozzle of Ru is used in a cutting machine and a cutting water nozzle for supplying a cutting water towards the cutting blade from the outer circumference of the position and angle adjustable mounted the cutting blade on the wheel cover A nozzle adjustment jig,
The nozzle adjustment jig is
At least a cutting water nozzle positioning portion for adjusting the height and angle of the cutting water nozzle,
With the nozzle adjusting jig placed on the chuck table, the cutting water nozzle is brought into contact with the upper surface of the cutting water nozzle positioning portion to adjust the position of the cutting water nozzle ,
The nozzle adjusting jig, wherein the position of the cutting water nozzle positioning portion can be adjusted within the nozzle adjusting jig. The nozzle adjustment jig includes:
Having a cutting water nozzle positioning portion for adjusting the height and angle of the cutting water nozzle,
2. The position of the cutting water nozzle is adjusted by bringing the cutting water nozzle into contact with an upper surface of the cutting water nozzle positioning section in a state where the nozzle adjustment jig is placed on the chuck table. 3. The described nozzle adjustment jig. The nozzle adjustment jig according to claim 3, wherein the cutting water nozzle positioning section is capable of adjusting a position in the nozzle adjustment jig. The nozzle adjustment jig includes:
Having a cooling water nozzle positioning portion for adjusting the height and angle of the cooling water nozzle,
The position of the cooling water nozzle is adjusted by bringing the cooling water nozzle into contact with an upper surface of the cooling water nozzle positioning portion while the nozzle adjusting jig is placed on the chuck table. The described nozzle adjustment jig.

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