JP5947605B2 - Nozzle adjustment jig - Google Patents

Description

  The present invention relates to a nozzle adjustment jig for adjusting the position of a cooling water nozzle that supplies cooling water to a cutting blade, and more particularly to a nozzle adjustment jig for a cooling water nozzle assembled to a thin wheel cover.

  In a semiconductor device manufacturing process, division lines are formed in a lattice pattern on the surface of a workpiece such as a semiconductor wafer, and circuits such as ICs and LSIs are formed in areas partitioned by the division lines. Then, the workpiece is cut along the street by a cutting device and divided into individual semiconductor chips. The semiconductor chip thus divided is packaged and widely used in electric devices such as mobile phones and personal computers.

  2. Description of the Related Art Conventionally, as a cutting device that divides a workpiece, one that cools a cutting blade with cooling water and at the same time flushes cutting waste generated during cutting is known (for example, see Patent Document 1). This cutting device rotates a disc-shaped cutting blade made of diamond abrasive grains at high speed, and sprays cooling water from a plurality of cooling water nozzles onto a processing portion of the semiconductor wafer and the cutting blade. The dicing apparatus cuts the semiconductor wafer by cutting and feeding along the street in a state where the cutting blade is cut into the semiconductor wafer by a certain amount.

JP 2006-187849 A

  In the above-described cutting apparatus, the pair of cooling water nozzles directed to the front and back surfaces of the cutting blade is adjusted by the operator's visual observation. If the accuracy of the cooling water nozzle adjustment is low and the cooling water is not supplied to an appropriate position with respect to the cutting blade, the processing heat cannot be sufficiently removed. For this reason, abnormal wear or burning of the cutting blade occurs, and the processing quality is significantly deteriorated, and the cutting blade and the workpiece may be damaged.

  By the way, as a cutting device, a facing dicer is known in which a pair of cutting blades are opposed to each other in the indexing direction to simultaneously process two division lines on a workpiece. In the facing type dicer, for example, step cutting is performed in which the cutting depth is increased in two stages using two types of cutting blades having different thicknesses. In step cutting, a preceding blade for cutting the first stage and a subsequent cutting blade for cutting the second stage with respect to the first stage cutting by several lines behind the preceding cutting blade. The machining time is shortened by running in parallel. For this reason, it is desired to reduce the parallel running interval between the preceding cutting blade and the subsequent cutting blade.

  In order to reduce the parallel running interval between the pair of cutting blades, it is necessary to reduce the width dimension of the blade unit in which the cutting blade and the cooling water nozzle are incorporated. In this case, the distance between the cutting blade and the pair of cooling water nozzles is narrowed, and it has been particularly difficult to finely adjust the cooling water nozzle by the visual observation of the operator as described above.

  This invention is made | formed in view of this point, and it aims at providing the nozzle adjustment jig which can adjust a pair of cooling water nozzle to an optimal position easily with respect to a cutting blade.

  The nozzle adjusting jig according to the present invention includes a spindle having a fixed flange attached to the tip thereof, a spindle housing that rotatably supports the spindle, and a cutting blade mounting surface of the fixed flange that cuts a workpiece. Used in a cutting device having at least a cutting blade and a pair of cooling water nozzles for supplying cooling water to the cutting blade disposed on the front and back sides of the cutting blade with the cutting blade interposed therebetween, A nozzle adjustment jig that adjusts the nozzle position of the cooling water nozzle in a state where the nozzle is removed, a mounting portion that is detachably mounted on the cutting blade mounting surface of the fixed flange by a magnetic force, and the pair of cooling Among the water nozzles, the cooling water nozzle positioned on the surface side of the cutting blade mounted on the fixed flange A cooling water nozzle positioning portion that is positioned away from the surface of the cutting blade to a predetermined position, and the mounting portion is attached to the cutting blade mounting surface of the fixed flange by a magnetic force, and the pair of cooling water nozzles Of these, the cooling water nozzle on the surface side of the cutting blade is brought into contact with the surface of the cooling water nozzle positioning portion to adjust the front-rear position of the cooling water nozzle with respect to the cutting blade.

  According to this configuration, the mounting portion is mounted on the cutting blade mounting surface of the fixed flange by the magnetic force, and the cutting blade side cooling water nozzle of the pair of cooling water nozzles is brought into contact with the nozzle positioning portion, thereby cutting blade In contrast, the cooling water nozzle can be easily adjusted to an appropriate front-rear position. At this time, since the nozzle adjustment jig positions the cooling water nozzle on the cutting blade side away from the surface of the cutting blade at a predetermined position, there is no variation in nozzle adjustment by the operator. Therefore, the cooling water is supplied to an appropriate position with respect to the cutting blade, and the processing heat at the time of cutting is sufficiently removed, so that it is possible to prevent deterioration of processing quality and damage to the cutting blade and the workpiece.

  ADVANTAGE OF THE INVENTION According to this invention, a pair of cooling water nozzle can be easily adjusted to an optimal position with respect to a cutting blade, and deterioration of processing quality and damage to a cutting blade or a workpiece can be prevented.

It is a perspective view of the cutting device concerning this embodiment. It is a front view of the blade unit which concerns on this Embodiment. It is a perspective view of the blade unit which concerns on this Embodiment. It is a perspective view of the nozzle adjustment jig which concerns on this Embodiment. It is a figure which shows the positional relationship of the nozzle adjustment jig and cutting blade which are shown to this Embodiment. It is explanatory drawing of the nozzle adjustment operation | work using the nozzle adjustment jig which concerns on this Embodiment.

  Hereinafter, the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus according to the present embodiment. In the following, a cutting apparatus having a hub blade as a cutting blade will be described, but the present invention is not limited to this configuration. The present invention can also be applied to a cutting apparatus provided with a washer blade (hubless blade) as a cutting blade.

  As shown in FIG. 1, the cutting apparatus 1 is configured to cut a workpiece W by relatively moving a pair of blade units 3 having a cutting blade 34 and a chuck table 4 holding the workpiece W. Has been. The workpiece W is formed in a substantially disc shape, and is partitioned into a plurality of regions by scheduled division lines arranged in a lattice pattern on the surface. Devices such as IC and LSI are formed in the partitioned area. Further, the workpiece W is carried into the cutting apparatus 1 while being supported by the annular frame 96 via the adhesive tape 95.

In the present embodiment, a semiconductor wafer such as a silicon wafer or a gallium strain is described as an example of the workpiece W. However, the present invention is not limited to this configuration. Adhesive members such as DAF (Die Attach Film) provided on the backside of semiconductor wafers, semiconductor product packages, ceramics, glass, sapphire (Al ₂ O ₃ ) based inorganic material substrates, various electrical components and micron-order processing position accuracy Various processing materials that are required to be processed may be used as a workpiece.

  The cutting apparatus 1 has a base 2, and a chuck table moving mechanism 5 that processes and feeds the chuck table 4 in the X-axis direction is provided on the base 2. Further, a gate-shaped column portion 21 is provided on the base 2 so as to straddle the chuck table moving mechanism 5, and the pair of blade units 3 are placed on the column portion 21 above the chuck table 4. A blade unit moving mechanism 6 for indexing and feeding in the axial direction is provided.

  The chuck table moving mechanism 5 includes a pair of guide rails 51 arranged on the upper surface of the base 2 and parallel to the X-axis direction, and a motor-driven X-axis table 52 slidably installed on the pair of guide rails 51. Have. On the upper part of the X-axis table 52, the chuck table 4 is provided. A nut portion (not shown) is formed on the back side of the X-axis table 52, and a ball screw 53 is screwed to these nut portions. A drive motor 54 is connected to one end of the ball screw 53. The ball screw 53 is rotationally driven by the drive motor 54 and the chuck table 4 is moved along the guide rail 51 in the X-axis direction.

  The chuck table 4 includes a θ table 55 that is fixed to the upper surface of the X-axis table 52 and that can rotate about the Z-axis, and a holding unit 41 that is provided on the upper portion of the θ table 55 and holds the workpiece W by suction. doing. The holding portion 41 has a disk shape having a predetermined thickness, and an adsorption surface is formed of a porous ceramic material at a central portion of the upper surface. Around the holding portion 41, four clamp portions 42 are provided via a pair of support arms extending radially outward from the four sides of the θ table 55. The four clamp portions 42 are driven by an air actuator to sandwich and fix the annular frame 96 around the workpiece W.

  The blade unit moving mechanism 6 includes a pair of guide rails 61 parallel to the Y-axis direction with respect to the front surface of the column portion 21 and a pair of motor-driven Y-axis tables 62 slidably installed on the pair of guide rails 61. Have. The blade unit moving mechanism 6 includes a pair of guide rails 63 arranged in front of each Y-axis table 62 and parallel to the Z-axis direction, and a motor-driven Z-axis table slidably installed on each guide rail 63. 64. Each Z-axis table 64 is provided with a blade unit 3.

  In addition, nut portions (not shown) are formed on the back side of each Y-axis table 62 and each Z-axis table 64, and ball screws 65 and 66 are screwed into these nut portions. Drive motors 67 and 68 are connected to one end of a ball screw 65 for the Y-axis table 62 and a ball screw 66 for the Z-axis table 64, respectively. The ball screws are rotationally driven by the drive motors 67 and 68, and the pair of blade units 3 are moved along the guide rails 61 and 63 in the Y-axis direction and the Z-axis direction. Each blade unit 3 rotates the cutting blade 34 at a high speed, and cuts the workpiece W while jetting cooling water to the cutting blade 34 or a cutting position. Details of the blade unit 3 will be described later.

  In this cutting apparatus 1, the cutting blade 34 is aligned with the planned division line of the workpiece W by the movement of the Y-axis table 62. Next, the cutting depth with respect to the workpiece W of the cutting blade 34 rotated by the movement of the Z-axis table 64 is adjusted. Then, by moving the X-axis table 52 relative to the cutting blade 34, the workpiece W held on the chuck table 4 is cut along the planned division line. By repeating the above operation, the workpiece W is divided along the grid-like division planned lines.

  Next, the blade unit will be described in detail with reference to FIGS. FIG. 2 is a front view of the blade unit according to the present embodiment. FIG. 3 is a perspective view of the blade unit according to the embodiment of the present invention. 3A is an exploded perspective view of the blade unit, and FIG. 3B is a perspective view of the blade unit after the cutting blade is assembled.

  As shown in FIGS. 2 and 3, the blade unit 3 includes a spindle 31 on which the cutting blade 34 is mounted, and a wheel cover 32 that covers the outer periphery of the cutting blade 34 except for the lower surface. The spindle 31 is an air spindle, for example, and supports the spindle shaft 312 in a floating state with respect to the spindle housing 311 by an air layer of compressed air. The tip of the spindle shaft 312 protrudes from the spindle housing 311 and is mounted with a mount flange 33 for fixing the cutting blade 34.

  The mount flange 33 is made of a magnetic material such as iron, and has a cylindrical boss portion 331 and a fixed flange 332 extending outward from the outer peripheral surface of the boss portion 331. The boss portion 331 is provided with a fitting hole (not shown) into which the tip end portion of the spindle shaft 312 is fitted. The tip end portion of the spindle shaft 312 protrudes from the boss portion 331 in a state of being fitted in the fitting hole, and a screw portion (not shown) is formed at the protruding portion. The mount flange 33 is mounted on the spindle shaft 312 by tightening a mounting nut 37 on a thread portion protruding from the boss portion 331.

  A support surface 333 (a cutting blade mounting surface) that supports the back surface of the cutting blade 34 is formed on the fixed flange 332. A nozzle adjustment jig 8 (see FIG. 4), which will be described later, is attached to the support surface 333 by a magnetic force with the cutting blade 34 removed. The front and rear positions of the cooling water nozzle 71 are adjusted by the nozzle adjustment jig 8 with the support surface 333 as a reference. As described above, the support surface 333 of the fixing flange 332 not only supports the cutting blade 34 from the back surface, but also functions as a reference surface when the position of the cooling water nozzle 71 is adjusted.

  The cutting blade 34 is a hub blade and has a grindstone portion 341 for cutting the workpiece W and a hub base 342 for holding the grindstone portion 341. The grindstone portion 341 is formed in a ring shape by bonding abrasive grains such as diamond with a bonding material, for example. A through hole 343 into which the boss 331 is inserted is formed in the center of the hub base 342. When the hub base 342 is inserted into the boss portion 331, substantially half of the boss portion 331 protrudes from the front side of the hub base 342. A screw portion 334 is formed on the outer peripheral surface of the substantially half portion of the boss portion 331. The cutting blade 34 is fixed to the mount flange 33 by tightening a ring-shaped fixing nut 35 to a screw portion 334 protruding from the hub base 342.

  The wheel cover 32 is configured to inject cooling water from a plurality of locations, and is positioned in front of the cutting blade 34 in the cutting direction, with a pair of cooling water nozzles 71 disposed so as to sandwich the lower portion of the cutting blade 34. Shower nozzle 75. The pair of cooling water nozzles 71 are fixed to a cooling water nozzle block 72 disposed behind the cutting blade 34 in the cutting direction. In the cooling water nozzle block 72, a pair of cooling water nozzles 71 and a cooling water supply hose 74 are connected via a joint 73.

  The pair of cooling water nozzles 71 extends downward from the cooling water nozzle block 72 and then extends forward in the cutting direction so as to sandwich the lower portion of the cutting blade 34. A plurality of slits 711 for injecting cooling water are formed on the opposed surfaces of the pair of cooling water nozzles 71 facing each other with the cutting blade interposed therebetween. The pair of cooling water nozzles 71 inject (supply) the cooling water supplied from the supply hose 74 toward the cutting position of the workpiece W from the plurality of slits 711 to cool and clean the cutting position.

  The shower nozzle 75 is formed in a shower nozzle block 76 disposed in front of the cutting blade 34 in the cutting direction. A cooling water supply hose 78 is connected to the shower nozzle block 76 via a joint 77. Cooling water is supplied to the shower nozzle 75 from a supply hose 78 via the internal flow path of the shower nozzle block 76. The shower nozzle 75 injects cooling water toward the cutting blade 34 and entrains the cooling water in the cutting blade 34 to cool and clean the cutting portion.

  The cooling water nozzle block 72 is provided with a pair of splash covers 36 that guide the cooling water backward. The pair of splash covers 36 guides the cooling water and the cutting waste scattered by the cutting blade 34 to the rear, and discharges them to the outside of the wheel cover 32.

  The cooling water nozzle block 72 and the shower nozzle block 76 are each screwed to a fixed block (not shown) of the wheel cover 32. A long hole 722 extending in the vertical direction is formed in the side surface 721 of the cooling water nozzle block 72. A pair of adjustment screws 723 are inserted into the long holes 722. By moving the cooling water nozzle block 72 along the long holes 722 by loosening the adjustment screws 723, the vertical position of the cooling water nozzle 71 with respect to the cutting blade 34 is changed. Adjusted.

  A pair of elongated holes 725 extending in the front-rear direction are formed in the side surface 724 of the cooling water nozzle block 72. An adjustment screw 726 is inserted through each long hole 725, and the front and rear positions of the cooling water nozzle 71 with respect to the cutting blade 34 are adjusted by loosening the adjustment screw and moving the cooling water nozzle block 72 along the long hole 725. (See FIG. 6). In addition, a pair of long holes 762 extending in the front-rear direction are formed in the side surface 761 of the shower nozzle block 76. An adjustment screw 763 is inserted into each long hole 762, and the front and rear positions of the shower nozzle 75 with respect to the cutting blade 34 are adjusted by loosening the adjustment screw 763 and moving the shower nozzle block 76 along the long hole 762. .

  A blade breakage detector 79 is provided on the upper portion of the wheel cover 32. The blade breakage detector 79 has a light-emitting element and a light-receiving element that face each other so as to sandwich the upper part of the cutting blade 34. The light beam emitted from the light emitting element is partially shielded by the tip of the cutting blade 34 and received by the light receiving element. Therefore, the blade breakage detector 79 detects a breakage state such as total loss or chipping of the cutting blade 34 in accordance with an increase in the amount of light received (transmittance) in the light receiving element. The blade breakage detector 79 is adjusted at the vertical position with respect to the cutting blade 34 by the adjusting screw 791 and is fixed at the position adjusted by the fixing screw 792.

  With reference to FIG.4 and FIG.5, the nozzle adjustment jig | tool for adjusting the front-back position of the cooling water nozzle with respect to a cutting blade is demonstrated. FIG. 4 is a perspective view of the nozzle adjustment jig according to the present embodiment. FIG. 5 is a diagram showing a positional relationship between the nozzle adjustment jig and the cutting blade shown in the present embodiment. 5A shows the positional relationship between the nozzle adjustment jig and the hub blade, and FIG. 5B shows the positional relationship between the nozzle adjustment jig and the washer blade. Moreover, in FIG. 5, the cutting blade is shown with the virtual line for convenience of explanation.

  As shown in FIG. 4, the nozzle adjustment jig 8 has a rectangular plate shape having a predetermined thickness, and an arcuate cutout 81 is formed on one side. A plurality of magnets 82 are arranged in a circular arc shape along the notch 81 in the nozzle adjustment jig 8. Since the arc-shaped cutout portion 81 corresponds to the outer peripheral surface of the boss portion 331 of the mount flange 33, the plurality of magnets 82 of the nozzle adjustment jig 8 are supported by the fixed flange 332 provided around the boss portion 331. Located on surface 333. As described above, in the nozzle adjustment jig 8, the peripheral portion of the notch 81 is a mounting portion 83 that is detachably mounted on the support surface 333 of the fixing flange 332 by magnetic force.

  As shown in FIG. 5A, the nozzle adjustment jig 8 is formed so that the cooling water nozzle 71 on the surface 344 side of the cutting blade 34 of the pair of cooling water nozzles 71 can be positioned away from the cutting blade 34 at a predetermined position. Has been. Specifically, the nozzle adjusting jig 8 is mounted between the cooling water nozzle 71 on the surface 344 side of the cutting blade 34 and the taper surface 345 of the hub base 342 while being mounted on the support surface 333 of the fixing flange 332. The thickness is designed to ensure a predetermined distance L. For this reason, the front-rear position of the pair of cooling water nozzles 71 with respect to the cutting blade 34 is adjusted by bringing the cooling water nozzle 71 on the surface 344 side of the cutting blade 34 into contact with the surface 841 of the nozzle adjustment jig 8. As described above, in the nozzle adjustment jig 8, a contact portion with the cooling water nozzle 71 is a cooling nozzle positioning portion 84 that positions the pair of cooling water nozzles 71.

  Further, the cooling nozzle positioning portion 84 is detached from the support surface 333 of the fixed flange 332 and is not supported by the support surface 333 on the back side. Accordingly, when an excessive pressing force acts on the cooling nozzle positioning portion 84, a force acts on the mounting portion 83 in the direction away from the support surface 333 of the fixed flange 332 against the magnetic force of the magnet 82. When the mounting portion 83 is detached from the fixed flange 332, the nozzle adjustment jig 8 is dropped, so that the operator can recognize that the nozzle adjustment jig 8 is pushed too much (see FIG. 6C).

  The nozzle adjusting jig 8 according to the present embodiment adjusts the front and rear positions of the cooling water nozzle 71 with respect to the washer blade 9 as shown in FIG. 5B in addition to adjusting the front and rear positions of the cooling water nozzle 71 with respect to the hub blade. It can also be applied when adjusting. The washer blade 9 is composed of a ring-shaped grindstone, and is used by being sandwiched between a pair of flanges 91 and 92. For this reason, the distance L between the flange 92 and the cooling water nozzle 71 changes according to the thickness of the washer blade 9. As described above, when the adjustment interval differs depending on the thickness of the blade, it can be dealt with by preparing in advance the nozzle adjustment jig 8 having a thickness corresponding to the thickness of each blade.

  The nozzle adjustment using the nozzle adjustment jig will be described in detail with reference to FIG. FIG. 6 is an explanatory diagram of the nozzle adjustment work using the nozzle adjustment jig according to the present embodiment.

  As shown in FIG. 6A, the nozzle adjustment jig 8 is mounted on the support surface 333 of the fixed flange 332 inside the pair of cooling water nozzles 71 with the cutting blade 34 removed from the wheel cover 32. The nozzle adjustment jig 8 is attracted and fixed to a fixed flange 332 made of a magnetic material by the magnetic force of a plurality of magnets 82 provided along the notch 81. At this time, the cooling water nozzle 71 on the front side in the figure (the surface 344 side of the cutting blade 34) is separated from the surface 841 of the nozzle adjustment jig 8 with a slight gap.

  Next, as shown in FIG. 6B, the adjustment screw 726 inserted through the pair of elongated holes 725 is loosened, and the cooling water nozzle block 72 is moved until the cooling water nozzle 71 on the right side of the drawing contacts the nozzle adjustment jig 8. Slide. In this case, the sliding direction of the cooling water nozzle block 72 is regulated in the front-rear direction by the pair of long holes 725 and the adjusting screw 726. Therefore, the positional deviation of the cooling water nozzle block 72 in the rotation direction and the vertical direction during nozzle adjustment is prevented.

  As shown in FIG. 6C, when the cooling water nozzle 71 is pushed too much into the nozzle adjustment jig 8, the magnet 82 of the nozzle adjustment jig 8 is detached from the fixed flange 332, and the nozzle adjustment jig 8 falls. . For this reason, even if it is a case where an operator aligns the cooling water nozzle 71 from the front direction shown to FIG. 6A, the shift | offset | difference to the back which cannot be confirmed visually can be prevented. Thus, the operator aligns the cooling water nozzle 71 according to the contact condition of the cooling water nozzle 71 with respect to the nozzle adjustment jig 8.

  When the cooling water nozzle 71 is aligned by the nozzle adjustment jig 8, the cooling water nozzle 71 is fixed at a predetermined position by tightening the adjustment screw 726. Next, as shown in FIG. 6D, the nozzle adjustment jig 8 is removed from the fixed flange 332, and the cutting blade 34 is attached instead. Since the nozzle adjustment jig 8 is designed to have a thickness that secures a predetermined distance L between the cooling water nozzle 71 on the right side of the drawing and the tapered surface 345 of the hub base 342, the nozzle adjustment jig 8 has been changed from the nozzle adjustment jig 8. The pair of cooling water nozzles 71 are positioned at appropriate front and rear positions with respect to the cutting blade 34.

  As described above, according to the nozzle adjusting jig 8 according to the present embodiment, the cooling water nozzle on the cutting blade 34 side is brought into contact with the cutting blade 34 by being attached to the fixed flange 332 by magnetic force. Thus, the cooling water nozzle 71 is easily adjusted to an appropriate front-rear position. At this time, since the nozzle adjustment jig 8 positions the cooling water nozzle 71 on the cutting blade 34 side away from the cutting blade 34 at a predetermined position, there is no variation in nozzle adjustment by the operator. Therefore, the cooling water is supplied to an appropriate position with respect to the cutting blade 34, and the processing heat at the time of cutting is sufficiently removed, so that the processing quality can be prevented from being deteriorated and the cutting blade 34 and the workpiece W can be prevented from being damaged.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the present embodiment, the nozzle adjustment jig 8 can position the cooling water nozzle, which is positioned on the surface side of the cutting blade, of the pair of cooling water nozzles by moving it away from the surface of the cutting blade to a predetermined position. Any shape, thickness, and size may be used.

  For example, in the present embodiment, the nozzle adjustment jig 8 has a configuration in which the plurality of magnets 82 are arranged along the notch 81, but is not limited to this configuration. The nozzle adjustment jig 8 only needs to be attachable to the fixed flange 332 by magnetic force, and may have an arc-shaped magnet along the notch 81.

  As described above, the present invention has an effect that a pair of cooling water nozzles can be easily adjusted to an optimum position with respect to a cutting blade, and particularly for a cooling water nozzle assembled on a thin wheel cover. Useful for nozzle adjustment jigs.

DESCRIPTION OF SYMBOLS 1 Cutting device 8 Nozzle adjustment jig 31 Spindle 32 Wheel cover 33 Mount flange 311 Spindle housing 312 Spindle shaft 332 Fixed flange 333 Support surface (cutting blade mounting surface)
34 Cutting Blade 71 Cooling Water Nozzle 72 Cooling Water Nozzle Block 75 Shower Nozzle 76 Shower Nozzle Block 79 Blade Breakage Detector 81 Notch 82 Magnet 83 Mounting Portion 84 Positioning Portion W Workpiece

Claims (1)

A spindle with a fixed flange mounted at the tip, a spindle housing that rotatably supports the spindle, a cutting blade mounted on a cutting blade mounting surface of the fixed flange to cut a workpiece, and sandwiching the cutting blade And a pair of cooling water nozzles for supplying cooling water to the cutting blade disposed on the front and back sides of the cutting blade, and the cooling water in a state where the cutting blade is removed. A nozzle adjustment jig for adjusting the nozzle position of the nozzle,
A mounting portion that is detachably mounted on the cutting blade mounting surface of the fixed flange by a magnetic force, and the cooling water that is positioned on a surface side of the cutting blade that is mounted on the fixed flange of the pair of cooling water nozzles. A cooling water nozzle positioning part for positioning the nozzle away from the surface of the cutting blade at a predetermined position, and
The mounting portion is attached to the cutting blade mounting surface of the fixed flange by a magnetic force, and the cooling water nozzle on the cutting blade surface side of the pair of cooling water nozzles is brought into contact with the surface of the cooling water nozzle positioning portion. A nozzle adjusting jig for adjusting a front-rear position of the cooling water nozzle with respect to the cutting blade.

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