CN110202479A - Cutter hood - Google Patents

Cutter hood Download PDF

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Publication number
CN110202479A
CN110202479A CN201910129403.9A CN201910129403A CN110202479A CN 110202479 A CN110202479 A CN 110202479A CN 201910129403 A CN201910129403 A CN 201910129403A CN 110202479 A CN110202479 A CN 110202479A
Authority
CN
China
Prior art keywords
cutter
cutting tool
holding section
nozzle
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910129403.9A
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Chinese (zh)
Inventor
田中英明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN110202479A publication Critical patent/CN110202479A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08Means for treating work or cutting member to facilitate cutting
    • B26D7/088Means for treating work or cutting member to facilitate cutting by cleaning or lubricating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member

Abstract

Cutter hood is provided, the position of cutter cooler nozzle can be simply adjusted.The cutter hood will be installed on the cutting tool covering of the front end of main shaft, wherein the cutter hood includes the 1st piece, is provided with and provides a pair of of cutter cooler nozzle of cutting fluid to the face side and back side of cutting tool;And the 2nd piece, it is installed on the shell supported to main shaft, 2nd piece with the 1st piece of upper side that is adjacent and covering cutting tool, the 1st holding section is formed on the 1st piece, 1st holding section has the multiple protrusions configured in vertical direction according to the spacing of regulation, the 2nd holding section is formed on the 2nd piece, 2nd holding section has the multiple recess portions accordingly configured in vertical direction according to the spacing with the shape of multiple protrusions, by being mutually clamped the 1st holding section and the 2nd holding section, to be adjusted according to position of the spacing to the 1st piece of vertical direction.

Description

Cutter hood
Technical field
The present invention relates to the cutter hoods of covering cutting tool.
Background technique
Cutting apparatus is widely used in the machined object of the plates such as semiconductor wafer, resin substrate, ceramic substrate, glass substrate Machining.It is cut into machined object and rotating the cutting tool of front end for the main shaft for being installed on cutting apparatus, To implement machining.
Cutting tool is installed on the front end of main shaft in such a way that the cutter hood for being arranged at cutting apparatus covers.At this The nozzle (cutter cooler nozzle) provided for carrying out cooling cutting fluid to cutting tool is provided in cutter hood.? When carrying out machining, cutting fluid is provided from contact area of the cutter cooler nozzle to cutting tool and machined object, it can Inhibit the processing caused by the frictional heat generated between cutting tool and machined object bad, and can will be attached to The cutting swarf of machined object is discharged.
In order to which cutting fluid to be efficiently provided to the contact area of cutting tool and machined object, cutter cooler nozzle Position is adjusted according to the outer diameter etc. of cutting tool.Such as cutting tool is being installed in the way of being covered by cutter hood Under state, the height of cutter cooler nozzle is changed while monitoring the positional relationship of cutting tool and cutter cooler nozzle Degree, to carry out the adjustment of the position of cutter cooler nozzle.In addition, Patent Document 1 discloses spray in cutter cooler The method of nozzle adjustment jig is used in the adjustment of the position of mouth.
Patent document 1: Japanese Unexamined Patent Publication 2010-42490 bulletin
Cutter hood is disposed over cutting tool, therefore is not easy to confirm cutting tool and cutter cooler nozzle sometimes The operation of accurate positional relationship thus the position for adjusting cutter cooler nozzle becomes many and diverse.In particular, on two main shafts It is equipped in the referred to as cutting apparatus of biaxial type of cutting tool, needs from two cutting tools according to opposed mode respectively Between confirm the positional relationship of cutting tool and cutter cooler nozzle, the adjustment of the position of cutter cooler nozzle is more difficult.
In addition, needing first to make according to the size of regulation for adjusting in the above-mentioned method using nozzle adjustment jig Then the jig is installed on the mounting flange supported to cutting tool by the jig of the position of nozzle.Therefore in cutter Effort and cost are spent in the adjustment of the position of cooler nozzle.
Summary of the invention
The present invention is completed in view of the problem, and project is to provide cutter hood, can simply adjust cutter The position of cooler nozzle.
According to the present invention, cutter hood is provided, the cutting tool covering of the front end of main shaft will be installed on, wherein the cutter Cover includes the 1st piece, is provided with and provides a pair of of cutter cooler spray of cutting fluid to the face side and back side of the cutting tool Mouth;And the 2nd piece, it is installed on the shell supported to the main shaft, the 2nd piece is adjacent with the 1st piece and cover the cutting The upper side of cutter, is formed with the 1st holding section on the 1st piece, and the 1st holding section has in vertical direction according to regulation Multiple protrusions of spacing configuration, are formed with the 2nd holding section on the 2nd piece, and the 2nd holding section has the shape with multiple protrusion Multiple recess portions that shape accordingly configures in vertical direction according to the spacing, by making the 1st holding section and the 2nd holding section phase Mutually engaging, can be adjusted according to position of the spacing to the 1st piece of vertical direction.
In cutter hood of the invention, selection is formed in the 1st engaging of the nozzle block (the 1st piece) with cutter cooler nozzle The position that portion and the 2nd holding section for being formed in the upper mass (the 2nd piece) of upper side for covering cutting tool are engaged, by nozzle Block is fixed on defined position relative to upper mass, so that it is determined that position of the cutter cooler nozzle relative to cutting tool.Cause This can simply adjust cutter cooler nozzle without monitoring the positional relationship of cutting tool Yu cutter cooler nozzle Position.
In addition, cutter hood of the invention can use the additional component of nozzle adjustment jig etc. unlike previous method and Adjust the position of cutter cooler nozzle.Therefore, the effort for saving production and the setting of component, can simply adjust cutter The position of cooler nozzle.
Detailed description of the invention
Fig. 1 is the perspective view for showing the structural example of cutting apparatus.
Fig. 2 is the perspective view for showing the structural example of cutting unit.
Fig. 3 is the perspective view for showing the structural example of cutter hood for the state for covering cutting tool.
Fig. 4 is the perspective view for showing the structural example of cutter hood.
Fig. 5 is the main view for showing the structural example of cutter hood.
(A) of Fig. 6 is the main view for showing a part of cutter hood, and (B) of Fig. 6 is the master for showing a part of nozzle block View, (C) of Fig. 6 are the main views for showing a part of upper mass.
Fig. 7 is the main view for showing a part of cutter hood.
Fig. 8 is the main view for showing a part of the cutter hood with arrow and scale.
Fig. 9 is the main view for showing a part of cutter hood.
Label declaration
2: cutting apparatus;4: static base station;6: guide rail;8: the 1 movable blocks;10: ball-screw;12: pulse motor; 14: feed mechanism;16: scale;18: read head;20: chuck table;22: bearing part;24: attracting holding portion;24a: it protects Hold face;26: fixture;28: guide rail;30: the 2 movable blocks;30a: basal part;30b: supporting part;32: ball-screw;34: pulse electricity Motivation;36: feed mechanism;38: guide rail;40: the 3 movable blocks;42: pulse motor;44: feed mechanism;46: cutting unit; 48: shell;50: cutter hood;52: cutting tool;54: shooting unit;56: main shaft;60: mounting flange;62: base station;64: wheel Hub;66: cutting blade;68: mounting hole;70: fixture nut;72: upper mass;74: nozzle block;76: hose;78: connecting tube;80a, 80b: cutter cooler nozzle;82: opening;84: plate;86: screw;88: spray spout block;90: hose;92: connecting tube;94: Spray spout;94a: front end;96: screw;100: locking unit;102: the 1 holding sections;104: protrusion;106: the 2 holding sections; 108: recess portion;110: arrow;112: scale.
Specific embodiment
Hereinafter, embodiments of the present invention are described in detail referring to attached drawing.Firstly, explanation to semiconductor wafer, The machined object of the plates such as resin substrate, ceramic substrate, glass substrate carries out the structural example of the cutting apparatus of machining.Fig. 1 It is the perspective view for showing the structural example of cutting apparatus.
Cutting apparatus 2 has static base station 4, and multiple constituent elements of 4 pairs of composition cutting apparatus 2 of static base station are propped up It holds.It is fixed with a pair of guide rails 6 extended along the x axis on static base station 4, the 1st movable block 8 is provided in a pair of guide rails 6. Cylindric bearing part 22 is provided with chuck table 20 on the 1st movable block 8.Chuck table 20 is by having The feed mechanism 14 of ball-screw 10 and pulse motor 12 moves in processing direction of feed (X-direction).
Chuck table 20 has the attracting holding portion 24 by formation such as porous ceramics on top, attracting holding portion 24 Upper surface becomes the retaining surface 24a kept to machined object.In addition, being provided with multiple fixtures on chuck table 20 26, they are fixed to the ring-shaped frame for being pasted with the peripheral part of dicing tape of machined object is set to.
In addition, feed mechanism 14 includes scale 16, it is set on static base station 4 along guide rail 6;And read head 18, The coordinate value (X-coordinate value) of scale 16 is read in its lower face side for being set to the 1st movable block 8.Read head 18 and cutting apparatus 2 Controller it is (not shown) connection.
In addition, being fixed with a pair of guide rails 28 extended along the y axis on static base station 4.It is arranged in a pair of guide rails 28 There is the 2nd movable block 30 being made of basal part 30a and supporting part 30b, basal part 30a is installed on a pair of guide rails 28, this is rectangular The supporting part 30b of body shape extends from a part of the upper surface of basal part 30a along vertical direction (Z-direction).
2nd movable block 30 is by the feed mechanism 36 with ball-screw 32 and pulse motor 34 in index direction (Y-axis Direction) on move.Feed mechanism 36 is connect with the controller (not shown) of cutting apparatus 2, by controller to pulse motor 34 control controls the position of the Y direction of the 2nd movable block 30.
It is provided on the side of the supporting part 30b of the 2nd movable block 30 and is led along a pair that vertical direction (Z-direction) extends Rail 38 is equipped with the 3rd movable block 40 on guide rail 38.3rd movable block 40 passes through with ball-screw (not shown) and pulse electricity The feed mechanism 44 of motivation 42 moves in vertical direction (Z-direction).The controller of feed mechanism 44 and cutting apparatus 2 is (not Diagram) it connects, the position of the Z-direction of the 3rd movable block 40 is controlled in the control by controller to pulse motor 42 System.
Cutting unit 46 is installed on the 3rd movable block 40.The shell 48 of cutting unit 46 is inserted into and is supported on movable block 40, main shaft (not shown) is internally provided in shell 48.Main shaft (is not schemed by being accommodated in the motor of the inside of shell 48 Show) carry out rotation driving.The front end of main shaft is exposed in the external of shell 48, is installed in a manner of assemble and unassemble in the front end There is circular cutting tool 52.In addition, being equipped with the cutter hood 50 of covering cutting tool 52 on shell 48.
In addition, being equipped with the shooting unit 54 adjacent with cutting tool 52 on shell 48.According to the bat of shooting unit 54 Acquired image is taken the photograph, the contraposition etc. of machined object and cutting tool 52 is carried out.
Fig. 2 is the perspective view for showing the structural example of cutting unit 46.Pacify in the front end for the main shaft 56 for being supported on shell 48 Equipped with mounting flange 60.In addition, cutting tool 52 has discoid base station 62, which has cylindric wheel hub 64, It is for example provided with cutting blade 66 in the peripheral part of base station 62, which is to disperse diamond abrasive grain in nickel base material and formed.
In the state that mounting flange 60 to be inserted into mounting hole 68 of cutting tool 52, fixture nut 70 is anchored on peace Flange 60 is filled, so that cutting tool 52 to be fixed on to the front end of main shaft 56.
In addition, in fig. 2 it is shown that the peripheral part in base station 62 is provided with the hub type cutting tool 52 of cutting blade 66, but Cutting tool 52 is without being limited thereto.For example, it is also possible to the grommet-type cutting tool being made of using entirety circular cutting blade.
In addition, being equipped with the cutter hood 50 of covering cutting tool 52 on shell 48.Fig. 3 is to show to cover cutting tool The perspective view of the structural example of the cutter hood 50 of 52 state.Cutter hood 50 has upper mass 72, which is installed on shell 48 (referring to Fig.1, Fig. 2) cover the upper side of cutting tool 52.
Upper mass 72 is by rectangular-shaped upper surface, the front connecting with each side of the upper surface, the back side and two side structures At being correspondingly provided with the notch cut off in arc-shaped in lower part and the cutting tool 52 of front and back.
In addition, cutter hood 50 has the nozzle block 74 of rectangular-shape, and it is adjacent with a side of upper mass 72, to cutting Cutter 52 provides cutting fluid.Nozzle block 74 includes connecting tube 78, connect with the hose 76 for providing the cutting fluids such as pure water;And A pair of of cutter cooler nozzle 80a, 80b, they provide cutting fluid from 78 branch of connecting tube, to cutting tool 52.Cutter is cooling Device nozzle 80a, 80b are configured to clip cutting tool 52 from the positive side 52a and the back side side 52b.
Fig. 4 is the perspective view of the cutter hood 50 for the state removed from shell 48.On cutter cooler nozzle 80a, 80b, It is provided with respectively in the position opposed with the configuration region of cutting tool 52 for providing the multiple of cutting fluid to cutting tool 52 Opening 82.The cutting fluid for being provided to hose 76 flows into cutter cooler nozzle 80a, 80b via connecting tube 78, from opening 82 It sprays to the positive side 52a and the back side side 52b of cutting tool 52.
In order to which cutting fluid to be effectively provided to the contact area of cutting tool 52 Yu machined object, cutter cooler nozzle 80a, 80b are configured near the lower end of the cutting tool 52 contacted with machined object.But as described later, cutter cooler The accurate position of nozzle 80a, 80b will consider the outer diameter of cutting tool 52, cutting tool 52 to the penetraction depth of machined object It is determined etc. various conditions.
When carrying out machining, cutting tool 52 is contacted with machined object from cutter cooler nozzle 80a, 80b Region provides cutting fluid, thus cutting tool 52 and machined object is cooling, it can inhibit because in cutting tool 52 and machined object Between processing caused by the frictional heat that generates it is bad.In addition, the cutting swarf for being attached to machined object is discharged by cutting fluid.
It is provided with plate 84 on the outside of cutter cooler nozzle 80a, 80b, the plate 84 covering cutter cooler nozzle 80a, The a part in the outside of 80b.In addition, plate 84 is set to than the contact area of cutting tool 52 and machined object by machining Direction of travel rear side (area side that machining finishes).By the way that the plate 84 is arranged, can be realized is prevented comprising machining When generated cutting swarf cutting water disperse.
Nozzle block 74 is for example carried out in the state that screw 86 for being inserted into nozzle block 74 are connect with upper mass 72 It is fixed.Specifically, the back side in upper mass 72 is equipped with the cylinder (not shown) with piston rod, in the front end of piston rod Mounting plate (not shown) is installed.
The mounting plate and nozzle block 74 is tight by screw 86 being inserted into from the face side of nozzle block 74 towards back side Gu so that and nozzle block 74 links by cylinder and upper mass 72.In addition, by making piston rod from the discharged direction of cylinder Upper movement can be such that upper mass 72 separates with nozzle block 74.
In addition, cutter hood 50 has the spray spout block 88 of rectangular-shape, the spray spout block 88 is another with upper mass 72 One side is adjacent, provides cutting fluid to cutting tool 52.Spray spout block 88 has and provides the hose of the cutting fluids such as pure water The connecting tube 92 of 90 connections.
Fig. 5 is the main view of cutter hood 50.Connect as shown in figure 5, spray spout block 88 has inside it with connecting tube 92 The spray spout 94 of knot.The peripheral part of the front end 94a of spray spout 94 towards cutting tool 52 is open.
The cutting fluid for being provided to hose 90 flows into spray spout 94, from the front end 94a of spray spout 94 towards bite 52 injection of tool.Also, cutting fluid is provided to the contact zone of cutting tool 52 Yu machined object by the rotation of cutting tool 52 Domain.
Spray spout block 88 is for example in the shape being connect by screw 96 for being inserted into spray spout block 88 with upper mass 72 It is fixed under state.Specifically, by from be located at the side opposite with the upper mass 72 of spray spout block 88 side direction The screw 96 that upper mass 72 is inserted into, upper mass 72 and spray spout block 88 are fastened, thus spray spout block 88 and upper mass 72 Connection.
As described above, by linking nozzle block 74 and spray spout block 88 and upper mass 72, to be configured to cutting The cutter hood 50 of the offer cutting fluid of cutting knife tool 52.
Here, be set to cutter cooler nozzle 80a, 80b of nozzle block 74 relative to cutting tool 52 position according to Outer diameter, the cutting tool 52 of cutting tool 52 are adjusted the various conditions such as the penetraction depth of machined object.
Such as when cutting tool 52 is replaced with the different cutting tool 52 of outer diameter, by adjusting nozzle block 74 relative to The position of the vertical direction (direction arrow A of Fig. 5) of upper mass 72, so that cutter cooler nozzle 80a, 80b are configured at more The lower end of cutting tool 52 after changing.
In addition, in order to make cutter cooler nozzle 80a, 80b not interfere machining, the lower end of cutting tool 52 and cutter The distance between the lower end of cooler nozzle 80a, 80b (the distance L1 of Fig. 5) is configured to than cutting tool 52 to machined object Penetraction depth it is big.
In this way, adjusting cutter cooler nozzle whenever the replacement or the change of processing conditions etc. for carrying out cutting tool 52 The position of 80a, 80b, therefore in order to successfully carry out machining, cutter cooler nozzle is carried out preferably by easy method The adjustment of the position of 80a, 80b.
The cutter hood 50 of present embodiment is made of a part of a part of upper mass 72 and nozzle block 74, and having will be upper The locking unit 100 that portion's block 72 and nozzle block 74 are fixed in defined position.Nozzle is adjusted by using locking unit 100 Position of the block 74 relative to upper mass 72 can adjust position of cutter cooler nozzle 80a, the 80b relative to cutting tool 52. Hereinafter, being illustrated to the details of locking unit 100.
(A) of Fig. 6 is the main view for showing a part of cutter hood 50.As shown in (A) of Fig. 6, cutter hood 50 has card Order member 100, the locking unit 100 include a part and spray of the upper mass 72 constituted in the way of being mutually clamped (engagement) A part of mouth block 74.
(B) of Fig. 6 is the main view for showing a part of nozzle block 74.In the side adjacent with upper mass 72 of nozzle block 74 The 1st holding section 102 is formed on face.1st holding section 102 has multiple protrusions 104, they are along vertical direction according between regulation It is prominent to 72 side of upper mass away from configuration.
The 1st holding section 102 is shown in (B) of Fig. 6, be by by the protrusion 104 of multiple triangular prism shapes according to height Mode assortment of the direction from the face side of nozzle block 74 towards back side and formed, profile is that overlook triangle wavy.But it is more The shape of a protrusion 104 is without being limited thereto.
(C) of Fig. 6 is the main view for showing a part of upper mass 72.In upper mass 72, adjacent with nozzle block 74 Side on be formed with the 2nd holding section 106.2nd holding section 106 have multiple recess portions 108, they according to multiple protrusions 104 Identical spacing is configured along vertical direction, corresponding with the shape of multiple protrusions 104.
The 2nd holding section 106 is shown in (C) of Fig. 6, be by by the recess portion 108 of multiple triangular prism shapes according to height Mode assortment of the direction from the face side of upper mass 72 towards back side and formed, profile is in the same manner as the 1st holding section 102 It is wavy to overlook triangle.In addition, recess portion 108 is formed as the shape of its profile and the profile of protrusion 104 is substantially uniform, 104 energy of protrusion Enough it is inserted into recess portion 108.
When the 2nd holding section 106 of the 1st holding section 102 and upper mass 72 that make nozzle block 74 contacts, the 1st holding section 102 Contained protrusion 104 is inserted into recess portion 108 contained by the 2nd holding section 106,102 He of the 1st holding section as shown in (A) of Fig. 6 2nd holding section 106 engages (engagement).Nozzle block 74 is fixed on defined position relative to upper mass 72 as a result,.
In addition, as an example, showing the protrusion 104a in vertical direction positioned at top side in (A) of Fig. 6 and being inserted into Extremely the case where being located at the recess portion 108a of top side in vertical direction, but protrusion 104 can be inserted into arbitrary recess portion respectively 108.The state that the protrusion 104b adjacent in downside with protrusion 104a is inserted into recess portion 108a is shown in FIG. 7.In this case, Nozzle block 74 is configured at relative to upper mass 72 according to the amount of multiple protrusions 104 and the spacing of multiple recess portions 108 more upper than Fig. 6 Position, therefore cutter cooler nozzle 80a, 80b also relative to cutting tool 52 according to multiple protrusions 104 and multiple recess portions The amount of 108 spacing is configured at upside.
As described above, by the way that the recess portion 108 for the insertion of defined protrusion 104, (or recess portion 108 as defined in being inserted into is convex Portion 104) it changes, so that nozzle block 74 can be according to multiple protrusions 104 relative to the position of the vertical direction of upper mass 72 It is changed with the spacing of multiple recess portions 108.Thereby, it is possible to by cutter cooler nozzle 80a, 80b relative to cutting tool 52 The position of vertical direction be adjusted according to the spacing of multiple protrusions 104 and multiple recess portions 108.
Also, each position according to nozzle block 74 relative to upper mass 72 in advance records protrusion 104 and recess portion respectively The information (information which protrusion 104 is inserted into which recess portion 108) and cutter cooler nozzle 80a of 108 positional relationship, The information of position of the 80b in vertical direction.Thereby, it is possible to what is engaged according to the 1st holding section 102 and the 2nd holding section 106 Position and determine the position of cutter cooler nozzle 80a, 80b in vertical direction.
Cutter cooler nozzle 80a, 80b are adjusted in change of replacement or processing conditions with cutting tool 52 etc. When position, penetraction depth of machined object etc. is determined according to the outer diameter of cutting tool 52 and cutting tool 52 first desired The position of cutter cooler nozzle 80a, 80b in vertical direction.
Then, the position according to desired cutter cooler nozzle 80a, 80b in vertical direction sets the 1st holding section The position that 102 and the 2nd holding section 104 is engaged.Specifically, referring to pre-recorded above-mentioned cutter cooler nozzle 80a, The information of position of the 80b in vertical direction selects a protrusion 104 contained by the 1st holding section 102 and supplies a protrusion One recess portion 108 of 104 insertions, so that cutter cooler nozzle 80a, 80b are configured at desired position.
Then, in the way of it said one protrusion 104 can be inserted into a recess portion 108, to the position of nozzle block 74 It sets and changes.The change of the position of nozzle block 74 carries out as follows: the screw 86 for being inserted into nozzle block 74 being unscrewed and makes nozzle Block 74 becomes the state that can be moved, and nozzle block 74 is moved to desired position.
Also, in such a way that said one protrusion 104 is inserted into a recess portion 108, make upper mass 72 and nozzle block 74 contact and engage the 1st holding section 102 and the 2nd holding section.Then, screw 86 is tightened and makes nozzle block 74 and upper mass It is fixed in the state of 72 connections, so that cutter cooler nozzle 80a, 80b are configured at desired position.
In addition, the spacing of multiple protrusions 104 and multiple recess portions 108 can be according to pair of cutter cooler nozzle 80a, 80b Precision required by position is suitably set.Such as the spacing of multiple protrusions 104 and the spacing of multiple recess portions 108 can be set as 0.1mm or more and 1mm or less.
As described above, the cutter hood 50 of present embodiment selects the 1st holding section 102 for being formed in nozzle block 74 and is formed in Nozzle block 74 is fixed on defined position relative to upper mass 72 by the position that the 2nd holding section 104 of upper mass 72 is engaged It sets, so that it is determined that position of cutter cooler nozzle 80a, the 80b relative to cutting tool 52.It is therefore not necessary to monitor cutting tool The positional relationship of 52 and cutter cooler nozzle 80a, 80b, can simply adjust the position of cutter cooler nozzle 80a, 80b It sets.
In addition, cutter hood 50 of the invention can use the additional components such as nozzle adjustment jig unlike previous method And adjust the position of cutter cooler nozzle 80a, 80b.Therefore, the effort for saving production and the setting of component, can be simple The position of ground adjustment cutter cooler nozzle 80a, 80b.
In addition, in order to be easy to hold the position of cutter cooler nozzle 80a, 80b, it can be in upper mass 72 and nozzle block 74 One of or both upper reference mark or mark etc..A part of the cutter hood 50 of Fig. 8 arrow that has been flag activation and scale Main view.Such as shown in figure 8, the arrow 110 for indicating specific recess portion 108 can be marked in upper mass 72, in nozzle Scale 112 corresponding with the position of multiple protrusions 104 is marked on block 74.
The protrusion 104 is inserted by the numerical value expression of the scale 112 accordingly marked with the position of protrusion 104 is marked arrow The position of cutter cooler nozzle 80a, 80b when first 110 recess portion 108.In fig. 8, according to will be arranged in vertical direction Protrusion 104a in top side is inserted into the cutter cooler nozzle in the recess portion 108a for being set to top side in vertical direction The position of 80a, 80b are set as the numerical value of zero mode reference mark 112.But the benchmark of the numerical value of scale 112 can freely be set It is fixed.
Reference mark or mark in this way can make while confirming the position of cutter cooler nozzle 80a, 80b 1st holding section 102 and the engaging of the 2nd holding section 106.
Alternatively, it is also possible to the mark other than the reference mark in nozzle block 74.Such as also can replace scale and mark with The mark of the corresponding color in position of cutter cooler nozzle 80a, 80b.
In addition, mainly protrusion 104 and recess portion 108 are illustrated for the case where triangular prism shape, but protrusion among the above 104 and the shape of recess portion 108 if the 1st holding section 102 and the 2nd holding section 104 can be made to engage, be not particularly limited.Fig. 9 It is the main view for showing a part of the cutter hood 50 with the locking unit 100 different from Fig. 6 (A).
Such as can also with as shown in figure 9, by by the protrusion 104 of multiple rectangular-shapes according to its short transverse from nozzle block 74 face side towards back side mode assortment and form the 1st holding section 102, by by the recess portion 108 of multiple rectangular-shapes The assortment in such a way that its short transverse is from the face side of upper mass 72 towards back side and form the 2nd holding section 106.
In addition to this, it as long as the construction of above embodiment, method etc. are in the range of the purpose of the present invention, can fit When changing and implement.

Claims (1)

1. a kind of cutter hood will be installed on the cutting tool covering of the front end of main shaft, which is characterized in that
The cutter hood includes
It 1st piece, is provided with and provides a pair of of cutter cooler nozzle of cutting fluid to the face side and back side of the cutting tool; And
2nd piece, it is installed on the shell supported to the main shaft, the 2nd piece adjacent with the 1st piece and cover the cutting tool Upper side,
The 1st holding section is formed on the 1st piece, the 1st holding section, which has, to be configured in vertical direction according to the spacing of regulation Multiple protrusions,
The 2nd holding section is formed on the 2nd piece, the 2nd holding section has with the shape of multiple protrusion accordingly in vertical The multiple recess portions configured on direction according to the spacing,
It, can be according to the spacing to the 1st piece of vertical direction by making the 1st holding section and the 2nd holding section is mutually clamped Position be adjusted.
CN201910129403.9A 2018-02-28 2019-02-21 Cutter hood Pending CN110202479A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018035443A JP7034548B2 (en) 2018-02-28 2018-02-28 Blade cover
JP2018-035443 2018-02-28

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Publication Number Publication Date
CN110202479A true CN110202479A (en) 2019-09-06

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Application Number Title Priority Date Filing Date
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Country Status (4)

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JP (1) JP7034548B2 (en)
KR (1) KR20190103943A (en)
CN (1) CN110202479A (en)
TW (1) TWI783124B (en)

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003059864A (en) * 2001-08-20 2003-02-28 Disco Abrasive Syst Ltd Dicing device
JP2007000967A (en) * 2005-06-23 2007-01-11 Disco Abrasive Syst Ltd Cutting device
JP2007216377A (en) * 2006-01-20 2007-08-30 Tokyo Seimitsu Co Ltd Dicing device and dicing method
CN101653971A (en) * 2008-08-19 2010-02-24 株式会社迪思科 A cutting apparatus
CN102079110A (en) * 2009-11-27 2011-06-01 株式会社迪思科 Cutting device
CN203113577U (en) * 2013-03-04 2013-08-07 北京港源建筑装饰工程有限公司 Three-dimensional adjustable metal curtain wall connecting claw piece
CN203532490U (en) * 2013-10-24 2014-04-09 重庆海德世拉索系统(集团)有限公司 Adjustable sleeve cap composite structure of inhaul cable
JP2014075558A (en) * 2012-10-05 2014-04-24 Disco Abrasive Syst Ltd Cutting device
CN203569804U (en) * 2013-09-27 2014-04-30 上海宝冶集团有限公司 Adjusting fixture for roof
CN103921357A (en) * 2013-01-15 2014-07-16 株式会社迪思科 Cutting device
CN104816390A (en) * 2014-02-04 2015-08-05 株式会社迪思科 Blade cover apparatus
CN106931282A (en) * 2017-04-17 2017-07-07 苏州佳世达光电有限公司 Adjustment foot device
CN206633128U (en) * 2017-04-17 2017-11-14 长江师范学院 The flexible saw of one kind

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941000Y2 (en) * 1980-01-24 1984-11-24 豊田工機株式会社 Grinding wheel protection device
US4656995A (en) * 1985-05-24 1987-04-14 University Of Florida Surgical apparatus for contouring implants
JPH056059Y2 (en) * 1990-01-18 1993-02-17
JPH11241413A (en) * 1998-02-25 1999-09-07 Nichiei Shoji:Kk Spacer
TW530718U (en) * 2002-08-19 2003-05-01 Falcon Machine Tools Co Ltd Coupled type ascending and descending water spraying mechanism featuring with automatic correction function
DE102008002468A1 (en) * 2008-06-17 2009-12-24 Robert Bosch Gmbh Machine tool, in particular hand tool
JP5220513B2 (en) 2008-08-15 2013-06-26 株式会社ディスコ Nozzle adjustment jig
JP6744088B2 (en) 2015-12-02 2020-08-19 株式会社エクソル Photovoltaic power generation system and supporting member

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003059864A (en) * 2001-08-20 2003-02-28 Disco Abrasive Syst Ltd Dicing device
JP2007000967A (en) * 2005-06-23 2007-01-11 Disco Abrasive Syst Ltd Cutting device
JP2007216377A (en) * 2006-01-20 2007-08-30 Tokyo Seimitsu Co Ltd Dicing device and dicing method
CN101653971A (en) * 2008-08-19 2010-02-24 株式会社迪思科 A cutting apparatus
CN102079110A (en) * 2009-11-27 2011-06-01 株式会社迪思科 Cutting device
JP2014075558A (en) * 2012-10-05 2014-04-24 Disco Abrasive Syst Ltd Cutting device
CN103921357A (en) * 2013-01-15 2014-07-16 株式会社迪思科 Cutting device
CN203113577U (en) * 2013-03-04 2013-08-07 北京港源建筑装饰工程有限公司 Three-dimensional adjustable metal curtain wall connecting claw piece
CN203569804U (en) * 2013-09-27 2014-04-30 上海宝冶集团有限公司 Adjusting fixture for roof
CN203532490U (en) * 2013-10-24 2014-04-09 重庆海德世拉索系统(集团)有限公司 Adjustable sleeve cap composite structure of inhaul cable
CN104816390A (en) * 2014-02-04 2015-08-05 株式会社迪思科 Blade cover apparatus
CN106931282A (en) * 2017-04-17 2017-07-07 苏州佳世达光电有限公司 Adjustment foot device
CN206633128U (en) * 2017-04-17 2017-11-14 长江师范学院 The flexible saw of one kind

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Application publication date: 20190906