CN101579894A - Cutting device - Google Patents
Cutting device Download PDFInfo
- Publication number
- CN101579894A CN101579894A CNA2009101341318A CN200910134131A CN101579894A CN 101579894 A CN101579894 A CN 101579894A CN A2009101341318 A CNA2009101341318 A CN A2009101341318A CN 200910134131 A CN200910134131 A CN 200910134131A CN 101579894 A CN101579894 A CN 101579894A
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- mentioned
- cutting
- cutting tool
- round base
- tool
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- 230000037431 insertion Effects 0.000 claims abstract description 21
- 238000003780 insertion Methods 0.000 claims abstract description 21
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 125000003003 spiro group Chemical group 0.000 claims description 2
- 230000003321 amplification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 239000002173 cutting fluid Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Images
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a cutting device, which restrains eccentricity of rotation center of a cutting tool with rotation center of the insertion shaft at same time of ensuring gap between inner circle surface of an inserted hole at center part of the cutting tool and outer circle surface of the insertion shaft of mounting the cutting tool, so as to cut accurately. A chamfering part (323c) is arranged at an opening part formed on a side, contacting with a flange (301b), of the inserted-hole (322) of the circular base (320) of the cutting tool (32), and a tapered part (301d) is formed at a combination part of the insertion shaft (301a) and the flange, the tapered part contacts with the chamfering part such that the rotation center of the circular base is accordant to rotation center of the insertion shaft, even the main shaft with the insertion shaft rotate in high-speed, eccentricity may not hanppen by making the rotation center of the circular base accordant to rotation center of the insertion shaft, which restrains vibration of the cutting tool to cut accurately.
Description
Technical field
The present invention relates to have the topping machanism of the cutting tool that various machined objects are cut.
Background technology
About divide the semiconductor wafer form devices such as a plurality of integrated circuits by spacing track with coming, cut spacing track by utilizing topping machanism, be divided into device one by one, and be applied in the various electronic equipments etc.In addition, the various machined objects except that semiconductor wafer are also by utilizing the topping machanism cutting to answer cutting position to cut apart.
Topping machanism for example has cutting member 7 as shown in Figure 7.Cutting member 7 has the rotating shaft 71 that is supported by housing 70 in the mode that can rotate, mounting cutter seat 72 on rotating shaft 71, and fix by nut 73.
Like this, when being installed to cutting tool 74 on the base of tool 72, need making and insert axle 72a and run through and be inserted into being inserted among the 74c of hole of cutting tool 74.Therefore, the internal diameter that is inserted into hole 74c forms to such an extent that go out about 5～10 μ m (for example with reference to patent documentation 1) greatly than the external diameter that inserts axle 72a.
Patent documentation 1: TOHKEMY 2006-212748 communique
But, when the cutting machined object, because cutting tool 74 is being installed on rotation at a high speed under the state that inserts axle 72a, so, when having gap (play) between the outer peripheral face of inner peripheral surface that is inserted into hole 74c that is formed at cutting tool 74 and insertion axle 72a, follow cutting tool 74 to rotate at a high speed with for example such speed of 40000rpm, 60000rpm, because of the pivot of cutting tool 74 and insert the vibration that the off-centre between the pivot of axle 72a causes and become big, the problem that exists cutting precision to reduce.On the other hand, for cutting tool 74 is installed on the base of tool 72, need between the outer peripheral face of inner peripheral surface that is inserted into hole 74c and insertion axle 72a, leave play to a certain degree.
Summary of the invention
Therefore, the problem that the present invention will solve is: in the play between the outer peripheral face of the inner peripheral surface that is inserted into the hole of guaranteeing cutting tool and insertion axle, off-centre between the pivot of the pivot of inhibition cutting tool and insertion axle, thus can carry out accurate cutting.
The present invention is a kind of topping machanism, it comprises chuck table that keeps machined object and the cutting member that the machined object that remains on the chuck table is cut at least, it is characterized in that, cutting member has: cutting tool, and it has at central part and is formed with the round base that is inserted into the hole and is fastened on the back side of round base and the cutting edge that protrudes from the periphery of round base; Main shaft, the base of tool and nut are installed on it, wherein, the above-mentioned base of tool above-mentionedly is inserted into insertion axle in the hole, combines with the flange at the surface of supporting round base or the back side and form what be inserted into cutting tool, above-mentioned nut and the external thread spiro fastening that is formed at the front end that inserts axle, and the back side or the surface of pushing round base, thereby utilize this nut and flange clamping round base; And the main shaft housing, it becomes main shaft supporting can rotate, and this main shaft housing has drive source, and the inner peripheral surface that is inserted into the hole that is formed on the round base has: the cylinder inner peripheral surface; And chamfered section, it links to each other with the cylinder inner peripheral surface, and be formed at the peristome of face side or rear side, be formed with band tapering part inserting the place, joint portion of axle, thereby the pivot of the pivot that this band tapering part and chamfered section butt make round base and insertion spool is consistent with flange.
In the present invention, since the round base that is formed at cutting tool be inserted into the hole, be provided with chamfered section with the peristome of a side of flange butt, be formed with band tapering part at the place, joint portion that is inserted into the insertion axle that is inserted in the hole and flange, this band tapering part and chamfered section butt, thereby make the pivot of round base consistent with the pivot that inserts axle, so the axis of rotation of cutting tool is consistent with the axis of rotation of main shaft.Therefore, even main shaft rotates at a high speed with for example such speed of 40000rpm, 60000rpm, off-centre can not take place, so suppressed the vibration of cutting tool, can carry out accurate cutting yet.
Description of drawings
Fig. 1 is the stereogram of an example of expression topping machanism.
Fig. 2 is the exploded perspective view of an example of the expression main shaft that constitutes cutting member.
Fig. 3 is the exploded perspective view of an example of expression cutting member.
Fig. 4 is the local amplification view of an example of expression cutting tool.
Fig. 5 is the local amplification view that the expression cutting tool is installed in first state on the base of tool.
Fig. 6 is the local amplification view that the expression cutting tool is installed in second state on the base of tool.
Fig. 7 is the exploded perspective view of the existing cutting member of expression.
Label declaration
1: topping machanism; 2: chuck table; 3: cutting member; 30: main shaft; 30a: external screw thread; 30b: band tapering face; 301: the base of tool; 301a: insert axle; 301b: flange; 301c: joint portion; 301d: band tapering part; 301e: external screw thread; 302: nut; 31: the main shaft housing; 32: cutting tool; 320: round base; 320a: surface; 320b: the back side; 321: cutting edge; 322: be inserted into the hole; 323: inner peripheral surface; 323a: cylinder inner peripheral surface; 323b, 323c: chamfered section; 33: nut; 34: calibrated component; 340: image pickup part; 35: cutter hood; 350: nozzle of cutting fluid; 4:X axle feeding member; 40: ball-screw; 41: guide rail; 42: motor; 43: sliding part; 44: rotary driving part; 5:Y axle feeding member; 50: ball-screw; 51: guide rail; 52: pulse motor; 53: sliding part; 6:Z axle feeding member; 60: ball-screw; 61: guide rail; 62: pulse motor; 63: support.
The specific embodiment
Cutting member 3 has main shaft shown in Figure 2 30.Main shaft 30 is supported by main shaft housing 31 in the mode that can rotate, and this main shaft housing 31 has drive source 310 in rear portion side.The part of the exposed portions serve of main shaft 30 forms band tapering face 30b, is formed with external screw thread 30a in the part than the forward end of band tapering face 30b.At mounting cutter seat 301 on the main shaft 30 and the nut 302 that screws togather with external screw thread 30a on the leading section that is formed on main shaft 30.
As shown in Figure 3, cutting tool 32 is installed on the base of tool 301.Cutting tool 32 has: round base 320, and it is formed with at central part and is inserted into hole 322; With cutting edge 321, it is fastened on the rear side of round base 320, and protrudes to the outer circumferential side of round base 320.On the other hand, as shown in Figures 2 and 3, the base of tool 301 has: insert axle 301a, it is inserted into being inserted in the hole 322 of cutting tool 32; Flange 301b, it supports being inserted in the surface or the back side of inserting the cutting tool 32 on the axle 301a; With joint portion 301c, it will insert axle 301a and flange 301b combines.At joint portion 301c place, have from flange 301b side direction and insert the diminishing band tapering of axle 301a side diameter part 301d.In addition, be formed with external screw thread 301e at the leading section that inserts axle 301a, the nut 33 that is used for fastening cutting tool 32 is screwed on this external screw thread 301e.
As shown in Figure 4, the hole 322 that is inserted into that is formed on the cutting tool 32 is run through back side 320b from the surperficial 320a of round base 320 along the axis of rotation direction, and the inner peripheral surface 323 that is inserted into hole 322 has: the cylinder inner peripheral surface 323a of the axis parallel during with rotation; With chamfered section 323b, 323c, it is formed at the peristome of surperficial 320a side or back side 320b side, and combines with this cylinder inner peripheral surface 323a with the state that links to each other with cylinder inner peripheral surface 323a.In illustrated example, all be formed with chamfered section 323b, 323c in surperficial 320a side and these both sides of 320b side, the back side, get final product but be formed with chamfered section in side's side at least with Fig. 2 and flange 301b butt shown in Figure 3.
As shown in Figure 5, the hole 322 that is inserted into that is formed on the cutting tool 32 is inserted on the insertion axle 301a of the base of tool 301, and make the back side 320b and the flange 301b butt of round base 320, on external screw thread 301e, screw togather then fastening nut 33 push the surperficial 320a of round base carry out fastening, this moment cutting tool 32 by flange 301b and nut clamping.Then, under this state, about being formed on the chamfered section 323c of the backrest face 320b side that is inserted into hole 322 on the round base 320, this chamfered section 323c closely contacts with band tapering part 301d on being formed on the base of tool 301, become (axis direction) last immobile state in the horizontal direction, and above-mentioned chamfered section 323c becomes diametrically can not movable state, insert axle 301a pivot, be that the pivot of main shaft 30 is consistent with the pivot of round base 320.And then, even rotating at a high speed, cutting tool 32 also can keep this state, so can not produce off-centre, can carry out high-precision cutting, and main shaft 30 and cutting tool 32 then can not vibrate.In addition, because it is also very little to be formed on the contact area of band tapering part 301d on the base of tool 301 and chamfered section 323c, so after this cutting tool 32 easily can be unloaded from the base of tool 301.
In addition, between the cylinder inner peripheral surface 323a that is inserted into hole 322 of the insertion axle 301a of the base of tool 301 and cutting tool 32, there is the play C about for example a few μ m.Therefore, can be inserted into swimmingly on the insertion axle 301a being inserted into hole 322, and can not produce so-called blocking.
In addition, the topping machanism that has following structure: have a plurality of cutting members, on 2 main shafts, be separately installed with cutting tool, 2 main shafts set on Y direction point-blank, though not shown, in such topping machanism, sometimes in order to shorten 2 intervals between the cutting edge, as shown in Figure 6, insert on the axle 301a being inserted into after the surface of round base 320 and the back side upset.In this case, the chamfered section 323b that is formed on the abutment surface 320a side of round base 320 closely contact with band tapering part 301d on being formed on the base of tool 301 and prevents off-centre, and can insert swimmingly with respect to inserting a 301a.
As shown in Figure 1, on the main shaft housing 31 that constitutes cutting member 3, be fixed with calibrated component 34, this calibrated component 34 is used for the cutting position of answering of wafer is detected, and to carry out the position alignment with cutting tool 32, calibrated component 34 constitutes the structure with cutting member 3 interlocks.In calibrated component 34, have image pickup part 340,, can detect and answer cutting position by the obtained image of image pickup part 340 and the coupling of the wafer images of storage in advance.Image pickup part 340 is positioned on the extended line of X-direction of cutting edge 321 of cutting tool 32.In addition, cutting tool 32 is covered from the top by cutter hood 35.In addition, in the bottom of cutter hood 35, be equipped with nozzle of cutting fluid 350 in the mode that clips cutting tool 32 from face side and rear side.
Y-axis feeding member 5 constitutes to have: ball-screw 50, and it has the axle center of Y direction; Pair of guide rails 51, they and ball-screw 50 set abreast; Pulse motor 52, it is connected with an end of ball-screw 50; And sliding part 53, the nut of the inside that it is not shown and ball-screw 50 screw togather, and, the bottom of this sliding part 53 and guide rail 51 sliding-contacts, in this Y-axis feeding member 5, be accompanied by ball-screw 50 and driven and rotate by pulse motor 52, sliding part 53 slides in guide rail 51 upper edge Y directions, and cutting member 3 also moves along Y direction thereupon.
Z axle feeding member 6 constitutes to have: ball-screw 60, and it has the axle center of Z-direction; Pair of guide rails 61, they and ball-screw 60 set abreast; Pulse motor 62, it is connected with an end of ball-screw 60; And support 63, it supports cutting member 11, the nut and the ball-screw 60 of the not shown inside of this support 63 screw togather, and, the sidepiece of this support 63 and guide rail 61 sliding-contacts in this Z axle feeding member 6, are accompanied by ball-screw 60 and are driven and rotate by pulse motor 62, support 63 is being guided along the Z-direction lifting by guide rail 61, and cutting member 3 is also thereupon along the Z-direction lifting.
As Fig. 5 or shown in Figure 6, cutting tool 32 is installed on the base of tool 301, in the topping machanism 1 that constitutes cutting member shown in Figure 13, under the situation that machined object, for example wafer W are cut, as shown in Figure 1, wafer W is remained on the chuck table 2 under the state that is supported on ring-shaped frame F through band T.Then, by moving of chuck table 2 and calibrated component 34, form wafer W be positioned at image pickup part 340 under state.Then, surperficial W1 to wafer W when the position of chuck table 2 and image pickup part 340 is adjusted makes a video recording, and be stored in the image of the wafer in the calibrated component 34 and the pattern match between the actual image of obtaining in advance, in the moment of image unanimity calibrated component 34 is stopped.Adjust in advance, so that the cutting edge 321 (with reference to Fig. 4) of cutting tool 32 is positioned on the extended line of X-direction of image pickup part 340, owing to comprise the calibrated component 34 and cutting member 3 interlocks of image pickup part 340, so, just finished the cutting edge 321 that should cut spacing track and cutting tool 32 position alignment in Y direction in the moment that calibrated component 34 stops.
Then, chuck table 2 is driven by X-axis feeding member 4 and moves to+directions X, and, when cutting tool 32 rotates at a high speed, cutting member 3 is driven and the decline scheduled volume by Z axle feeding member 6, thus, cuts in the detected spacing track of cutting edge 321 incisions of cutting tool 32.At this moment, also be cut into the degree in the band that keeps wafer W a little by the cutting edge 321 that is controlled to cutting tool 32, spacing track can be cut off fully.
In addition, cutting member 3 is driven by Y-axis feeding member 5 and is moving according to the interval between the adjacent spaces road on the Y direction, and chuck table 2 moves and carries out same cutting in X-direction simultaneously, thereby all spacing tracks of a direction are cut.Then, carry out cutting same as described above after turning 90 degrees in that chuck table 2 is revolved, at this moment, all spacing tracks are cut in length and breadth, thereby are divided into chip one by one.
As Fig. 5 or shown in Figure 6, because cutting tool 32 off-centre can not take place,, can critically carry out the cutting of wafer W so reduced vibration, be difficult for collapsing broken in the generation of the both sides of cutting slot.In addition, can make cutting depth constant.Therefore, can not make the surperficial injured of chuck table 2 greatly because of the cutting-in quantitative change.
In addition, not to cut off the spacing track of wafer W fully but form under the situation of groove of desired depth, because the off-centre of cutting tool 32 eliminates, the degree of depth of control flume critically.
Claims (1)
1. topping machanism, it comprises chuck table that keeps machined object and the cutting member that the machined object that remains on this chuck table is cut at least, it is characterized in that,
Above-mentioned cutting member has:
Cutting tool, it has at central part and is formed with the round base that is inserted into the hole and is fastened on the back side of this round base and the cutting edge that protrudes from the periphery of this round base;
Main shaft, the base of tool and nut are installed on it, wherein, the above-mentioned base of tool above-mentionedly is inserted into insertion axle in the hole, combines with the flange at the surface of the above-mentioned round base of supporting or the above-mentioned back side and form what be inserted into above-mentioned cutting tool, above-mentioned nut and the external thread spiro fastening that is formed at the front end of above-mentioned insertion axle, and the above-mentioned back side or the above-mentioned surface of pushing above-mentioned round base, thereby utilize this nut and the above-mentioned round base of above-mentioned flange clamping; And
The main shaft housing, it becomes can rotate with above-mentioned main shaft supporting, and this main shaft housing has drive source,
The above-mentioned inner peripheral surface that is inserted into the hole that is formed on the above-mentioned round base has: the cylinder inner peripheral surface; And chamfered section, it links to each other with above-mentioned cylinder inner peripheral surface, and is formed at the peristome of above-mentioned face side or above-mentioned rear side,
Be formed with band tapering part at place, the joint portion of above-mentioned insertion axle and above-mentioned flange, thereby this band tapering partly makes the pivot of the pivot of above-mentioned round base and above-mentioned insertion axle consistent with above-mentioned chamfered section butt.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008128124A JP2009274177A (en) | 2008-05-15 | 2008-05-15 | Cutting device |
| JP2008128124 | 2008-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101579894A true CN101579894A (en) | 2009-11-18 |
Family
ID=41362271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009101341318A Pending CN101579894A (en) | 2008-05-15 | 2009-04-24 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2009274177A (en) |
| CN (1) | CN101579894A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102079110A (en) * | 2009-11-27 | 2011-06-01 | 株式会社迪思科 | Cutting device |
| CN103659115A (en) * | 2013-11-29 | 2014-03-26 | 东莞市俊知自动机械有限公司 | Saw blade bearing and clamping device with automatic centering function |
| CN102107397B (en) * | 2009-12-25 | 2015-02-04 | 3M新设资产公司 | Grinding wheel and method for manufacturing grinding wheel |
| CN104589520A (en) * | 2013-10-31 | 2015-05-06 | 株式会社迪思科 | Flange mechanism |
| CN109397086A (en) * | 2017-08-17 | 2019-03-01 | 株式会社迪思科 | Mounting base |
| CN109909554A (en) * | 2017-12-13 | 2019-06-21 | 株式会社迪思科 | Cutting apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11262863A (en) * | 1998-03-19 | 1999-09-28 | Nissan Motor Co Ltd | Mounting structure for grinding wheel |
| JP2001293657A (en) * | 2000-04-17 | 2001-10-23 | Tsune Seiki Co Ltd | Mounting device of disk-shaped rotating tool |
| JP2006212748A (en) * | 2005-02-04 | 2006-08-17 | Disco Abrasive Syst Ltd | Cutting tool mounting mechanism and cutting device |
-
2008
- 2008-05-15 JP JP2008128124A patent/JP2009274177A/en active Pending
-
2009
- 2009-04-24 CN CNA2009101341318A patent/CN101579894A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11262863A (en) * | 1998-03-19 | 1999-09-28 | Nissan Motor Co Ltd | Mounting structure for grinding wheel |
| JP2001293657A (en) * | 2000-04-17 | 2001-10-23 | Tsune Seiki Co Ltd | Mounting device of disk-shaped rotating tool |
| JP2006212748A (en) * | 2005-02-04 | 2006-08-17 | Disco Abrasive Syst Ltd | Cutting tool mounting mechanism and cutting device |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102079110A (en) * | 2009-11-27 | 2011-06-01 | 株式会社迪思科 | Cutting device |
| CN102079110B (en) * | 2009-11-27 | 2015-07-01 | 株式会社迪思科 | Cutting device |
| CN102107397B (en) * | 2009-12-25 | 2015-02-04 | 3M新设资产公司 | Grinding wheel and method for manufacturing grinding wheel |
| CN104589520A (en) * | 2013-10-31 | 2015-05-06 | 株式会社迪思科 | Flange mechanism |
| CN103659115A (en) * | 2013-11-29 | 2014-03-26 | 东莞市俊知自动机械有限公司 | Saw blade bearing and clamping device with automatic centering function |
| CN103659115B (en) * | 2013-11-29 | 2015-09-30 | 东莞市俊知自动机械有限公司 | There is the saw blade carrying clamping device of automatic centering |
| CN109397086A (en) * | 2017-08-17 | 2019-03-01 | 株式会社迪思科 | Mounting base |
| CN109909554A (en) * | 2017-12-13 | 2019-06-21 | 株式会社迪思科 | Cutting apparatus |
| CN109909554B (en) * | 2017-12-13 | 2023-07-18 | 株式会社迪思科 | Cutting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009274177A (en) | 2009-11-26 |
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Application publication date: 20091118 |