CN109909554A - Cutting apparatus - Google Patents
Cutting apparatus Download PDFInfo
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- CN109909554A CN109909554A CN201811502863.3A CN201811502863A CN109909554A CN 109909554 A CN109909554 A CN 109909554A CN 201811502863 A CN201811502863 A CN 201811502863A CN 109909554 A CN109909554 A CN 109909554A
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- Prior art keywords
- cutting tool
- cutting
- jig
- main shaft
- hole
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Confectionery (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Cutting apparatus is provided, the installation of cutting tool is easy and workability is excellent.Cutting apparatus has the Cutting tool installation manner jig (60,160,260) of the front end for the boss portion (36) for being mounted on the tool fitting (30,130) installed on main shaft (12), the entirety of Cutting tool installation manner jig is formed by resin, it includes installation guide portion (61), has the outer diameter same with the outer diameter of boss portion；And retaining lugs (65, 66, 68), its one end for being formed in installation guide portion, it is fitted into the hole (13 of the front end of main shaft, 16) it in or is fitted into the fixation member (46 for being fixed on main shaft, 70) set hole (49 in, 72) in, to which the retaining lugs is positioned according to the periphery of installation guide portion and the periphery of boss portion as conplane mode and it is fixed, in the state of the front end for the boss portion that Cutting tool installation manner jig is fixed on tool fitting by retaining lugs, the mounting hole of cutting tool is set to slide into boss portion along the periphery of installation guide portion to carry out installation of the cutting tool to fixed flange (32).
Description
Technical field
The present invention relates to cutting apparatus.
Background technique
In the cutting apparatus used in the machining of conductor package substrate etc., installed in the front end of the main shaft of rotation
There is tool fitting, cutting tool (for example, referring to patent document 1) is installed on tool fitting.When to tool fitting
When cutting tool is installed, the mounting hole of the inner peripheral portion of circular cutting tool will be formed in relative to tool fitting
After the front end of boss portion is aligned, the front end of boss portion is inserted into the mounting hole of cutting tool.Also, make cutting tool
Outer peripheral surface relative to boss portion slides and abuts a face of cutting tool with the fixed flange of tool fitting.As a result,
The front end portion of boss portion is prominent from cutting tool, and fixture nut is anchored on to the external screw thread for being formed in the front end portion.In this way,
Cutting tool is fixed on tool fitting in the state of sandwiching between fixed flange and fixture nut.
Such operation to tool fitting installation cutting tool is passed through by the operator operated to cutting apparatus
It carries out manually.On the periphery of tool fitting, there are the circumferential components such as emery wheel cover, between such circumferential component and cutting tool
Gap it is relatively narrow, the installation exercise of cutting tool becomes difficult.For example, the operator as industry lack of experience carries out cutting tool
When installation exercise, it is possible to cutting tool and circumferential component be made to collide and keep the cutting blade of cutting tool damaged.Therefore, develop as
Under Cutting tool installation manner jig: the technology regardless of operator can make cutting tool not damaged and be installed on Cutting tool installation manner
Seat (referring to patent document 2).
Patent document 1: Japanese Unexamined Patent Publication 11-33907 bulletin
Patent document 2: Japanese Unexamined Patent Publication 2015-150624 bulletin
But in previous cutting apparatus, need to remove Cutting tool installation manner jig after the installation of cutting tool, therefore
In the frequent situation of replacement of cutting tool, there is a problem of that operation is many and diverse.
Summary of the invention
The present invention is to complete in view of the above problems, its purpose is to provide a kind of installation of cutting tool be easy and
The excellent cutting apparatus of workability.
The present invention is cutting apparatus, installs cutting tool on the tool fitting for be screwed together in main shaft and carries out cutting and add
Work, the main shaft are formed with the hole for being screwed to the tool fitting in front end, and the tool fitting includes
Boss portion and the fixed flange being integrally formed with the boss portion, the cutting tool includes: hub-like base station, has in central part
The mounting hole of the oriented boss portion being the peripherally inserted；And cutting blade, it is formed in the periphery of the hub-like base station, the cutting apparatus
Be characterized in that, which has a Cutting tool installation manner jig, the Cutting tool installation manner jig be installed in the tool fitting this is convex
The entirety of the front end in platform portion, the Cutting tool installation manner jig is formed by resin, which includes: installation guide portion, quilt
It is mounted on the front end of the boss portion of the tool fitting, there is the outer diameter same with the outer diameter of the boss portion；And fixation is convex
Portion is formed in one end of the installation guide portion, is fitted into in the hole of the front end of the main shaft or being fitted into being fixed on the main shaft
On fixation member set by hole, thus the retaining lugs according to the installation guide portion periphery and the boss portion it is outer
The conplane mode of Zhou Chengwei is fixed in the state of being positioned to the installation guide portion, controls the Cutting tool installation manner
The retaining lugs of tool be fitted into in the hole of the front end of the main shaft or be fitted into in the hole of the fixation member to by the knife
In the state of the front end for the boss portion that tool assembling fixture is fixed on the tool fitting, make the mounting hole edge of the cutting tool
The periphery of the installation guide portion slide into the boss portion, thus allow for installation of the cutting tool to the fixed flange.
According to above cutting apparatus, there is Cutting tool installation manner jig, the entirety of Cutting tool installation manner jig is constituted and borrowed by resin
Retaining lugs is helped to be fixed relative to the fixation member fixed on the front end portion of main shaft or main shaft, therefore in cutting tool
Installation when can reliably guide, and do not spend effort that Cutting tool installation manner jig is removed and be effectively performed plus
Work.
As the fixation member installed to Cutting tool installation manner jig, the hole that the front end relative to main shaft can be used is carried out
The fixation member of fixed form.
As described above, cutting apparatus according to the present invention, the installation of cutting tool is easy, in frequent cutter changing
Effort can not be spent and coped with, can be realized the raising of workability.
Detailed description of the invention
Fig. 1 is the exploded perspective view for constituting the cutting unit of first embodiment of cutting apparatus.
Fig. 2 is to show the work that Cutting tool installation manner jig is installed on to tool fitting in the cutting unit of first embodiment
The cross-sectional view of sequence.
Fig. 3 is the cross-sectional view for showing the process that cutting tool is installed in the cutting unit of first embodiment.
Fig. 4 is the cross-sectional view for showing the state for the installation that cutting tool is completed in the cutting unit of first embodiment.
Fig. 5 is to show the work that Cutting tool installation manner jig is installed on to tool fitting in the cutting unit of second embodiment
The cross-sectional view of sequence.
Fig. 6 is to show the work that Cutting tool installation manner jig is installed on to tool fitting in the cutting unit of third embodiment
The cross-sectional view of sequence.
Fig. 7 is the perspective view of the Cutting tool installation manner jig of third embodiment.
Label declaration
10: cutting unit；11: main shaft housing；12: main shaft；13: threaded hole；16: embedded hole；17: external screw thread；20: cutting
Cutter；21: hub-like base station；22: cutting blade；23: mounting hole；30: tool fitting；31: cylindrical portion；32: fixed flange；33: embedding
Close hole；34: bearing surface；35: annular recessed portion；36: boss portion；37: outer peripheral surface；40: embedded hole；41: suction hole；42: attraction road；
43: endless groove；45: gasket；46: fixing bolt (fixation member)；49: hole；50: rotary joint；51: bearing cylinder；52: installation
Plate；55: cylindrical portion；56: access；57: attracting source；60: Cutting tool installation manner jig；61: installation guide portion；62: outer peripheral surface；63:
Corner portion；64: mounting surface；65: retaining lugs；66: retaining lugs；67: through hole；68: retaining lugs；70: fixture nut (Gu
Determine component)；71: outer peripheral surface；72: hole；80: cutter fixture nut；110: cutting unit；112: main shaft；130: tool fitting；
160: Cutting tool installation manner jig；210: cutting unit；212: main shaft；230: tool fitting；236: boss portion；237: outer peripheral surface；
238: external screw thread；260: Cutting tool installation manner jig；P: axis of rotation.
Specific embodiment
Hereinafter, being illustrated referring to cutting apparatus of the attached drawing to present embodiment.Fig. 1 to Fig. 4 shows composition cutting apparatus
Cutting unit first embodiment, Fig. 5 shows the second embodiment of cutting unit, and Fig. 6 and Fig. 7 show cutting unit
Third embodiment.
The cutting unit 10 of first embodiment shown in Fig. 1 to Fig. 4 constitutes cutting apparatus, which is used in half
In the machining of conductor package substrate etc..The illustration is omitted for the overall structure of cutting apparatus, and cutting unit 10 is supported to energy
Enough chuck tables relative to the workpiece (conductor package substrate etc.) that remain the object as cutting are in processing feeding side
It is relatively moved in (X-direction), index feed direction (Y direction), lifting direction (Z-direction).
As shown in Figure 1, cutting unit 10 is configured to installing tool fitting from the main shaft 12 outstanding of main shaft housing 11
30, cutting tool 20 is installed by tool fitting 30.Rotary joint 50 is installed in main shaft housing 11.
Main shaft 12 is supported to rotate freely centered on the axis of rotation P towards Y direction relative to main shaft housing 11,
Main shaft 12 is rotated by the rotary drive mechanism that the illustration is omitted.The cone that there is main shaft 12 diameter of front end portion slowly to become smaller
Shape is formed with threaded hole 13 on the front end face of main shaft 12.
When make in the state that cutting tool 20 are installed as shown in Figure 4 main shaft 12 rotation driving when, cutting tool 20 with
Rotation thus allows for the machining to workpiece centered on axis of rotation P.Main shaft is installed on to by cutting tool 20 below
12 construction is described in detail.
Cutting tool 20 is the wheel hub cutter with substantially disk-shaped hub-like base station 21 and cricoid cutting blade 22, the cutting blade
22 are installed on the periphery of a side 24 (referring to Fig. 3, Fig. 4) for hub-like base station 21.It is formed with greatly in the center of hub-like base station 21
Cause circular mounting hole 23.
Tool fitting 30 includes the cylindrical portion 31 extended along the y axis；And it is prominent from cylindrical portion 31 to radial outside
Fixed flange 32.As shown in Figures 2 to 4, the embedded hole extended along the y axis is formed in the central part of tool fitting 30
33.Embedded hole 33 has internal diameter with before from the end face of cylindrical portion 31 to 32 side of fixed flange and then the inner circumferential of cone-shaped that becomes smaller
Face.The inner peripheral surface shape of embedded hole 33 and the outer peripheral surface shape of main shaft 12 are corresponding, can be fitted into main shaft 12 to embedded hole 33.
In the fixed flange 32 of tool fitting 30, be located at cylindrical portion 31 the opposite side in that side outstanding
Face on be formed with bearing surface 34, annular recessed portion 35 and boss portion 36.Bearing surface 34 is located at the peripheral side of fixed flange 32, is phase
The circular face vertical for Y direction.Annular recessed portion 35 is located at the radially inner side of bearing surface 34, becomes relative to bearing surface
The shape of 34 recess.Boss portion 36 is set to the radial center of fixed flange 32, is to compare bearing surface relative to annular recessed portion 35
34 more to the protruding portion of Y direction cylindrical shape outstanding.
In the state that tool fitting 30 is installed on main shaft 12, the outer peripheral surface 37 of boss portion 36 becomes with axis of rotation
Barrel surface centered on P.The size of the outer diameter of boss portion 36 is corresponding with the size of internal diameter of mounting hole 23 of cutting tool 20,
When boss portion 36 to be inserted into mounting hole 23, the inner peripheral surface of mounting hole 23 is by the bearing of outer peripheral surface 37 of boss portion 36 to really
Determine position of the cutting tool 20 on the direction vertical with Y direction (referring to Fig. 4).In addition, in the Y direction of boss portion 36
The thickness of the cutting tool 20 of length and Y direction is substantially uniform (referring to Fig. 4).As shown in Figures 2 to 4, in boss portion 36
Inside is formed with the through hole 38 being connected to embedded hole 33.In through hole 38, it is formed in the boundary part with embedded hole 33
Circular stepped part 39.
As shown in Figure 1, different according to position along direction of rotation (circumferential direction) in the annular recessed portion 35 of tool fitting 30
Mode is formed with multiple suction holes 41.As shown in Figures 2 to 4, it is formed in tool fitting 30 and is connected to each suction hole 41
Multiple attraction roads 42.The bottom surface upper opening of endless groove 43 of each attraction road 42 on the outer peripheral surface for being formed in cylindrical portion 31.Ring
Shape slot 43 is the circumferentially extending groove along cylindrical portion 31, is continuously formed along the complete cycle of cylindrical portion 31.
When tool fitting 30 is installed on main shaft 12, it is fitted into main shaft 12 to embedded hole 33.Also, gasket 45 is inserted
Enter to abutting it with stepped part 39 in through hole 38, fixing bolt 46 is screwed together in the spiral shell of 12 front end of main shaft by gasket 45
Pit 13 and fastened.In the limitation main shaft 12 (not shown) of the main shaft rotary locking mechanism by being disposed in main shaft housing 11
Bolt 46 is fixed in the state of rotation screws togather operation.
Fixing bolt 46 includes the external thread part 47 screwed togather with threaded hole 13；And diameter is greater than the head of external thread part 47
Portion 48, head 48 are abutted with gasket 45.The hexagon shape being located on coaxial with external thread part 47 is formed in the center on head 48
The hole 49 of shape is fitted into the tools such as hexagonal wrench to hole 49 so as to rotate fixing bolt 46.It is screwed into when by tool
When fixing bolt 46, applying makes the indentation of main shaft 12 to the power in the direction of embedded hole 33, and tool fitting 30 is fixed on main shaft 12.
That is, tool fitting 30 is screwed together in main shaft 12 by fixing bolt 46.
Rotary joint 50 is installed in the end of main shaft housing 11.Rotary joint 50 includes cylindric bearing cylinder 51；With
And from bearing cylinder 51 to radial outside mounting plate 52 outstanding.As shown in Figure 1, making insert to the multiple spiral shells for being formed in mounting plate 52
The threaded hole 14 of the mounting screw 54 and the end for being formed in main shaft housing 11 of following closely insertion hole 53 is screwed togather and is fastened, thus will
Rotary joint 50 is fixed on main shaft housing 11.It is provided on bearing cylinder 51 to radial outside cylindrical portion 55 outstanding, in cylinder
The inside in portion 55 is formed with access 56.One end of access 56 bearing cylinder 51 inner peripheral surface upper opening, access 56 it is another
Front opening of the one end in cylindrical portion 55.
Before tool fitting 30 is installed on main shaft 12, rotary joint 50 is installed on main shaft housing 11.When into one
When tool fitting 30 is installed on main shaft 12 by step, cylindrical portion 31 is inserted into a manner of it can rotate in bearing cylinder 51
Side.As shown in Figures 2 to 4, endless groove 43 is connected to access 56 in the state of being inserted into cylindrical portion 31 in bearing cylinder 51.
Endless groove 43 is formed along the complete cycle of cylindrical portion 31, therefore no matter tool fitting 30 relative to rotary joint 50 is in rotation side
Upward any position, endless groove 43 maintain the state being connected to access 56 always.
That is, being formed from suction hole 41 in the state that tool fitting 30 is installed on main shaft 12 via attraction road 42
With endless groove 43 continuously to the attraction road of access 56.As shown in Figures 2 to 4, from attract source 57 extend suction pipeline with
The access 56 of cylindrical portion 55 connects, can be by above-mentioned attraction road from suction hole 41 when driving to attraction source 57
Attract air.In addition, the position other than the position opposed with access 56 in endless groove 43 is by the inner circumferential of bearing cylinder 51
Face seals, and does not generate air leakage in the way of attraction road, will not damage attraction efficiency.
Cutting tool 20 is installed to the tool fitting 30 being mounted on main shaft 12 as described above.By by boss portion 36
It is inserted into mounting hole 23 and abuts the side 24 of hub-like base station 21 with the bearing surface 34 of fixed flange 32, so that it is determined that bite
Position of the tool 20 relative to tool fitting 30.
In addition, there is the emery wheel cover in the outside of covering cutting tool 20 on the periphery of cutting unit 10 in cutting apparatus
Circumferential components such as (illustration omitted), cutting tool 20 need skilled relative to the installation of tool fitting 30.For example, when in Y-axis
On direction emery wheel cover than the boss portion 36 of tool fitting 30 more to nearby side (left of the Fig. 2 into Fig. 4) it is prominent when, exist as
Under restriction: the mounting hole 23 of cutting tool 20 and boss portion 36 must be made to align and carry out slotting while avoiding emery wheel cover
Enter.Especially when the gap between the cutting blade 22 of cutting tool 20 and emery wheel cover is relatively narrow, cutting blade 22 is possible to touch with emery wheel cover
It hits.Therefore, in cutting unit 10, before cutting tool 20 is installed on tool fitting 30, by Cutting tool installation manner jig 60
It is installed on the front end of boss portion 36 and extends boss portion 36 substantially, to improve installation exercise.
The entirety of Cutting tool installation manner jig 60 is formed by the light weights resin such as nylon, and Cutting tool installation manner jig 60 has cylindrical shape
Guide portion 61 is installed, which has the outer diameter same with boss portion 36.By the installation guide portion of the formation such as nylon
61 outer peripheral surface 62 becomes (resistance to sliding is small) face of excellent in sliding property.From an end face to outer peripheral surface in installation guide portion 61
62 form the corner portion 63 for keeping corner round and smooth.In addition, being set on the mounting surface 64 of another end face as installation guide portion 61
Be equipped with retaining lugs 65, the retaining lugs 65 be used for will installation guide portion 61 relative to boss portion 36 position in the state of into
Row is fixed.Mounting surface 64 is the face vertical relative to Y direction.
Retaining lugs 65 is that have corresponding with the hole 49 of fixing bolt 46 from the center of mounting surface 64 protrusion outstanding
The shape of hexa-prism.When Cutting tool installation manner jig 60 is installed on boss portion 36, retaining lugs 65 is inserted into hole 49.Insertion
The section size of preceding retaining lugs 65 is slightly larger than the section size in hole 49, and with 46 phase of fixing bolt with hole 49
Than, with retaining lugs 65 Cutting tool installation manner jig 60 be made of soft material (for example, fixing bolt 46 be metal manufacture,
Cutting tool installation manner jig 60 is the resins such as nylon).Therefore, retaining lugs 65 is fitted into (indentation) to hole while compressive deformation occurs
49.When the mounting surface 64 for installing guide portion 61 is abutted with the front end face of boss portion 36, the further insertion of retaining lugs 65
It is restricted.
Become conplane mode according to the outer peripheral surface 62 of installation guide portion 61 and the outer peripheral surface 37 of boss portion 36 as a result,
It is positioned, so that Cutting tool installation manner jig 60 is fixed on boss portion 36.In addition, before by making mounting surface 64 and boss portion 36
End face abuts, and the inclination for being able to suppress installation guide portion 61 relative to boss portion 36 (ensures boss portion 36 and installation guide portion 61
Alignment), can highly ensure the opposite position precision of outer peripheral surface 37 Yu outer peripheral surface 62.
In this way, the identical Cutting tool installation manner jig 60 of diameter is fixed on boss portion 36,36 essence of boss portion according to positioning states
On according to installation guide portion 61 length amount extend.Retaining lugs 65 is pressed into the hole of fixing bolt 46 49 and is consolidated
Fixed, which be used to for tool fitting 30 to be installed on main shaft 12, therefore can not change existing Cutting tool installation manner
Seat 30 composition and be easily installed Cutting tool installation manner jig 60.
Referring to Figure 2 to Figure 4, the installation steps of cutting tool 20 are illustrated.Firstly, becoming following state in advance:
Rotary joint 50 is installed on main shaft housing 11, and then tool fitting 30 is installed on main shaft 12 (referring to Fig. 2).In the state
Under, as shown in Figure 2 to Figure 3, the retaining lugs 65 of Cutting tool installation manner jig 60 is fitted into (indentation) to the hole of fixing bolt 46 49,
Abut mounting surface 64 and the front end face of boss portion 36.Cutting tool installation manner jig 60 is fixed on tool fitting 30 as a result, and
The outer peripheral surface 37 of the outer peripheral surface 62 and boss portion 36 of installing guide portion 61 becomes same plane.
Then, as shown in figure 3, installation guide portion by the mounting hole 23 of cutting tool 20 relative to Cutting tool installation manner jig 60
61 are aligned, and installation guide portion 61 is made to be inserted into mounting hole 23.At this point, being equipped with Cutting tool installation manner jig in boss portion 36
60, it is thus possible to carry out pair of the cutting tool 20 relative to tool fitting 30 in the nearby side of the installation direction of cutting tool 20
Position.Therefore, the collision and interference of the other component (such as emery wheel cover) on cutting blade 22 and 30 periphery of tool fitting can be not concerned with
And carry out the installation of cutting tool 20.
In addition, being formed with corner portion 63 in the corner of the one end of installation guide portion 61, therefore cutting tool 20 can be made
The inner peripheral surface of mounting hole 23 successfully guide to the outer peripheral surface 62 of Cutting tool installation manner jig 60.For example, being cut on the basis of by Y-axis
Cutting knife tool 20 be slightly slanted relative to boss portion 36 in the state of, in X-direction or Z-direction cutting tool 20 relative to convex
In the state that platform portion 36 is slightly eccentric, corner portion 63 inner peripheral surface of mounting hole 23 can be guided and by cutting tool 20
Guidance is to being suitably inserting position as Fig. 3.
After on the outer peripheral surface 62 that the mounting hole 23 of cutting tool 20 is inserted into installation guide portion 61 as shown in Figure 3,
Cutting tool 20 is set to slide into boss portion 36 in the Y-axis direction along outer peripheral surface 62.Guide portion 61 is installed by excellent in sliding property
Material is formed, therefore the inner peripheral surface of mounting hole 23 can be made successfully to move on the outer peripheral surface 62 of installation guide portion 61.In addition,
The outer peripheral surface 37 of the outer peripheral surface 62 and boss portion 36 of installing guide portion 61 is same plane, therefore in the sliding of cutting tool 20
Hook will not be generated on the boundary of installation guide portion 61 and boss portion 36.
As shown in figure 4, cutting tool 20 is inserted into the side 24 of hub-like base station 21 and supporting for fixed flange 32 along the y axis
Until the position that junction 34 abuts against.The length of boss portion 36 and the thickness of cutting tool 20 are roughly equal in the Y-axis direction, at
The state on the outer peripheral surface 37 of boss portion 36 is supported in for the inner peripheral surface of mounting hole 23.
In the state that cutting tool 20 to be installed on to the position of Fig. 4, the side 24 of hub-like base station 21 and tool fitting
30 annular recessed portion 35 is opposed.When being driven in this state to attraction source 57, by access 56, endless groove 43, inhale
42, suction hole 41 of leading the way and to 35 negative pressure of annular recessed portion.Then, the hub-like base station 21 of cutting tool 20 is attracted and
The absorption of cutting tool 20 is held on the bearing surface 34 of fixed flange 32.
Cutting unit 10 carries out the cutting to workpiece in the state of being equipped with Cutting tool installation manner jig 60 as shown in Figure 4.When
When making the rotation driving of main shaft 12 while maintaining the absorption of cutting tool 20 to keep, master is installed on by tool fitting 30
The cutting tool 20 of axis 12 is pivoted about with axis of rotation P.Cutting tool installation manner jig 60 and cutting tool 20 and cutter are pacified
Dress seat 30 rotates together.The retaining lugs 65 of Cutting tool installation manner jig 60 is pressed into along the axis direction (Y direction) of main shaft 12, with
The high speed rotation of main shaft 12, the resin for forming Cutting tool installation manner jig 60 bent because of centrifugal force, therefore Cutting tool installation manner jig 60
It will not relax or fall off from tool fitting 30.In addition, Cutting tool installation manner jig 60 is made of light weight resin, and it is affixed to revolve
Non-rotational symmetric shape on shaft heart P, therefore the weight balancing of the rotating part of cutting unit 10 will not be destroyed or lead to main shaft
12 dither axis.That is, Cutting tool installation manner jig 60, which will not drive the rotation of cutting tool 20, causes adverse effect.
In the case where removing the cutting tool 20 for being installed on tool fitting 30, stop the driving in attraction source 57.
Releasing as a result, attracts cutting tool 20 in the attraction of fixed flange 32, can by cutting tool 20 from boss portion 36 along Y-axis
It extracts in direction.By be installed on the Cutting tool installation manner jig 60 of boss portion 36 installation guide portion 61 outer peripheral surface 62 to cutting tool
20 movement in the Y-axis direction guides, therefore can not collide with the circumferential component (emery wheel cover etc.) of tool fitting 30
And easily cutting tool 20 is extracted.
As described above, making drawing for Y direction in installation Cutting tool installation manner jig 60 in the cutting apparatus of present embodiment
It leads and is installed or removed in the state of extension to cutting tool 20, therefore be not readily susceptible to the periphery of tool fitting 30
The influence of component can obtain excellent handling operation.Cutting tool installation manner jig 60 make retaining lugs 65 be fitted into main shaft 12
The hole 49 of fixing bolt 46 that screws togather of threaded hole 13 and be fixed.The installation of Cutting tool installation manner jig 60 only pass through will fix it is convex
Portion 65 is inserted into hole 49 along the y axis, therefore does not need special tool and can simply carry out.In addition, cutting
After the installation of cutter 20, machining can be carried out in the state that Cutting tool installation manner jig 60 is installed, therefore will not be every
The effort for removing Cutting tool installation manner jig 60 is spent when secondary installation cutting tool 20, to mitigate many and diverse of operation.Also, it keeps
The constant Cutting tool installation manner jig 60 of installation condition is also used for guidance when removing of cutting tool 20.Therefore, even if not being ripe
Experienced operator also can easily be done the installation exercise of cutting tool 20.In addition, can simply and rapidly be cut
The handling of cutter 20, therefore it is particularly suitable for the case where continually carrying out the replacement of cutting tool 20.For example, making cutting tool 20
Cutting blade 22 be cut into dressing tool dressing finishing in, singly replace cutting tool 20 and continuously made
Industry, therefore the validity of the cutting unit 10 with Cutting tool installation manner jig 60 is high.
Fig. 5 is the cutting unit 110 for showing the second embodiment for constituting cutting apparatus.In cutting unit 110, to
The substantially general constituent element of the cutting unit 10 of the first embodiment illustrated before is indicated and is omitted with identical label
Explanation.Main shaft 112, tool fitting 130, Cutting tool installation manner jig 160 are pacified with main shaft 12, the cutter in cutting unit 10 respectively
It is corresponding to fill seat 30, Cutting tool installation manner jig 60.Cutting tool installation manner jig 160 is whole by nylon in the same manner as Cutting tool installation manner jig 60
Etc. light weights resin formed.
About cutting unit 110, difference is for tool fitting 130 to be screwed together in the construction of main shaft 112.In main shaft
Embedded hole 16 is formed on 112 front end face, being formed near the front end of main shaft 112 on the outer peripheral surface of embedded hole 16
External screw thread 17.Embedded hole 16 is that the section shape in the direction vertical with Y direction is the square hole of polygon (such as hexagon).
For main shaft 112 be fitted into tool fitting 130 embedded hole 40 the inside of boss portion 36 pass through and in Y direction
Upper perforation tool fitting 130 (through hole 38 and stepped part 39 of not formed first embodiment in the inside of boss portion 36).
Embedded hole 40 has internal diameter with to before the front end side of boss portion 36 and then the inner peripheral surface of cone-shaped that becomes smaller, main shaft 112 it is outer
Circumferential surface has cone-shaped corresponding with the inner peripheral surface of embedded hole 40.When main shaft 112 is inserted into the chimeric of tool fitting 130
When hole 40, the front end portion of main shaft 112 is prominent from embedded hole 40.The external screw thread 17 of the protrusion of the main shaft 112 is screwed togather solid
Determine nut 70.
Fixture nut 70 is that have the circle shape part of internal screw thread screwed togather with external screw thread 17 on inner peripheral surface, have with
External screw thread 17 becomes the outer peripheral surface 71 of conplane cylindrical shape with the outer peripheral surface 37 of boss portion 36 in the state of screwing togather.In addition,
On the front end face (positioned at the end face of the opposite side of that side opposed with the front end face of boss portion 36) of fixture nut 70, along week
Multiple (such as four) holes 72 are formed with to according to the different mode in position.
When tool fitting 130 is fixed on main shaft 112, main shaft 112 is inserted into embedded hole 40, by fixture nut 70
It is screwed togather relative to from the external screw thread 17 outstanding of embedded hole 40, uses the defined tool pair chimeric with embedded hole 16 and hole 72
Fixture nut 70 is fastened.The tool limits the rotation of main shaft 112 and being fitted into embedded hole 16 of non-circular profiles, and
And engages with hole 72 and rotate fixture nut 70.In this way by being screwed into fixture nut 70, fixture nut 70 is to boss portion 36
Front end face is pressed and tool fitting 130 is fitted and fixed in main shaft 112.
Cutting tool installation manner jig 160 has retaining lugs 66, which is inserted into the front end face for being formed in main shaft 112
Embedded hole 16.Retaining lugs 66 is the prism-shaped of polygonal cross-section (such as hexagonal cross-section) corresponding with embedded hole 16
Protrusion.The section size of retaining lugs 66 is slightly larger than the section size of embedded hole 16, and compression occurs on one side and becomes for retaining lugs 66
Shape is fitted into (indentation) to embedded hole 16 on one side.Cutting tool installation manner jig 160 is pushed into the mounting surface 64 of installation guide portion 61 and consolidates
Until the front end face abutting for determining nut 70.In this state, the outer peripheral surface 62 of guide portion 61, the outer peripheral surface of fixture nut 70 are installed
71 and boss portion 36 outer peripheral surface 37 become same plane, become boss portion 36 (and fixture nut 70) essentially by cutter
Assembling fixture 160 and extended state.
In the same manner as the cutting unit 10 of first embodiment, in the cutting unit 110 of second embodiment, pass through knife
Have the positioning that assembling fixture 160 carries out cutting tool 20 from the nearby side of Y direction, therefore the installation exercise of cutting tool 20
It improves.Cutting tool installation manner jig 160 also maintains the state for being installed on tool fitting 130 after the installation of cutting tool 20, because
This also can obtain excellent workability by the guidance of Cutting tool installation manner jig 160 when removing cutting tool 20.In addition,
Being made of and being fitted into the Cutting tool installation manner jig 160 of the embedded hole 16 of main shaft 112 light weight resin will not drive in the rotation of main shaft 112
It falls off when dynamic or generates rotation shake, so that adverse effect will not be caused to the movement of cutting tool 20.
Threaded hole 13 in the cutting unit 10 of first embodiment and embedding in the cutting unit 110 of second embodiment
Closing hole 16 is the hole for tool fitting 30,130 to be screwed on to main shaft 12,112.More specifically, threaded hole 13
It is the hole directly screwed togather for the fixing bolt 46 being screwed.In contrast, embedded hole 16 is to make the use that is screwed
Fixture nut 70 and the hole that is played a role when screwing togather as rotation stopping of external screw thread 17.
In the cutting unit 10 of first embodiment, by the fixation member being fixed on main shaft 12 i.e. fixing bolt 46
Hole 49 and the retaining lugs of Cutting tool installation manner jig 60 65 is fixed on to the threaded hole 13 of main shaft 12 indirectly.In the second embodiment party
In the cutting unit 110 of formula, directly the retaining lugs 66 of Cutting tool installation manner jig 160 is fitted and fixed in the embedded hole of main shaft 112
16。
Therefore, the cutting unit 10 of first embodiment and the cutting unit 110 of second embodiment make retaining lugs 65,
66 are cither indirectly or directly fitted into the threaded hole 13 for the front end for being formed in main shaft 12,112 and embedded hole 16 to install cutter
Assembling fixture 60,160 is identical in this regard.
The cutting unit 210 of third embodiment shown in fig. 6 is following type: not by being drawn into capable holding, and
It is that cutting tool 20 is fixed on tool fitting 230 using cutter fixture nut 80.Therefore, in tool fitting 230 not
Form attraction road.Specifically, not formed annular recessed portion 35 and suction hole 41 on the bearing surface 34 of fixed flange 32, in cylinder
Not formed endless groove 43 on the outer peripheral surface in portion 31.In addition, cutting unit 210 does not have rotary joint 50.In tool fitting 230
Boss portion 236 front end near, external screw thread 238 is formed on outer peripheral surface 237.Fixture nut 70 and second embodiment phase
Together, tool fitting 230 is screwed together in main shaft 212 using fixture nut 70.In this state, the outer peripheral surface 71 of fixture nut 70
Become same plane with the outer peripheral surface 237 of boss portion 236.
In the cutting unit 210 of third embodiment, the Cutting tool installation manner jig that can be installed on fixture nut 70 is used
260.Cutting tool installation manner jig 260 has the through hole 67 penetrated through along the y axis at the center of installation guide portion 61, in central part
Protrusion without the retaining lugs 65,66 for being equivalent to Cutting tool installation manner jig 60,160.It replaces, Cutting tool installation manner jig 260
Make multiple retaining lugs 68 prominent from mounting surface 64 around through hole 67.Multiple retaining lugs 68, which become, can be fitted into solid
Determine the configuration and size in multiple holes 72 of nut 70.Specifically, as shown in fig. 7, on Cutting tool installation manner jig 260 circumferentially etc.
Retaining lugs 68 there are four being positioned apart from.Each retaining lugs 68 is columned protrusion, and front end is formed as dome shape.Cutter
Assembling fixture 260 is formed comprising the entirety including each retaining lugs 68 by the light weights resin such as nylon.
The installation of cutting tool 20 in cutting unit 210 carries out as follows.Using fixture nut 70 by tool fitting
230 are fixed in the state of main shaft 212, install the Cutting tool installation manner jig 260.When installing the Cutting tool installation manner jig 260, make each
Retaining lugs 68 is fitted into (indentation) to each hole 72.Cutting tool installation manner jig 260 is fixed on fixture nut 70 as a result,.Also, cutter
The outer peripheral surface of the outer peripheral surface 62 of the installation guide portion 61 of assembling fixture 260, the outer peripheral surface 71 of fixture nut 70 and boss portion 236
237 become same plane.
In addition, compared with the retaining lugs 65,66 of the Cutting tool installation manner jig 60,160 of the first and second embodiments, cutter
Each retaining lugs 68 of assembling fixture 260 is small-sized, therefore sufficient fixed force in order to obtain, as Cutting tool installation manner jig
260 fixed cell can be assisted using bonding agent etc..Specifically, bonding agent to be coated on to the peace of Cutting tool installation manner jig 260
It fills the mounting surface 64 of guide portion 61 and the mounting surface 64 can be made to be adhered to the front end face of fixture nut 70 and the front end of main shaft 212
Face.
Then, the mounting hole 23 of cutting tool 20 and the installation guide portion 61 of Cutting tool installation manner jig 260 are aligned, one
Side carries out sliding guidance by the outer peripheral surface 62 of installation guide portion 61 and mounting hole 23 is inserted into boss portion 236 on one side.At this point, logical
Cutting tool installation manner jig 260 is crossed, can be obtained and Cutting tool installation manner jig 60 above-mentioned, 160 same effects.
It is convex when the side 24 that cutting tool 20 is inserted into hub-like base station 21 is abutted with the bearing surface 34 of fixed flange 32
The front end in platform portion 236 is prominent (left into Fig. 6 is prominent) from the mounting hole 23 of cutting tool 20 nearby.Make cutter fixture nut
80 screw togather with the external screw thread 238 for being formed in the protrusion.It is formed on the inner peripheral surface of cutter fixture nut 80 and external screw thread
238 internal screw threads screwed togather.
In the state of being equipped with Cutting tool installation manner jig 260, through hole 67 is located at prolonging for the embedded hole 16 of 212 front end of main shaft
On length direction.That is, embedded hole 16 will not be sealed being mounted with Cutting tool installation manner jig 260.Therefore, perforation can be passed through on one side
Hole 67 and make tool be fitted into embedded hole 16 carry out main shaft 212 rotation limitation on one side carry out cutter fixture nut 80 it is tight
Gu.When the fastening of cutter fixture nut 80 is completed, hub-like base station 21 is clamped by cutter fixture nut 80 and fixed flange 32,
Cutting tool 20 is fixed on tool fitting 230.
In cutting unit 210, cut in the state that Cutting tool installation manner jig 260 is installed using cutting tool 20
Processing.Also, it is guided when removing also by Cutting tool installation manner jig 260 in cutting tool 20, to can be obtained excellent
Workability.
In conclusion above each embodiment is by Cutting tool installation manner jig (60,160,260) directly or by fixed part
Part and be fixed on main shaft (12,112,212) indirectly, cutting tool can be carried out in the state that Cutting tool installation manner jig is installed
(20) it relative to the installation of tool fitting (30,130,230) and removes, is identical in this regard.
The cutting unit 10 of first embodiment is to be fitted into the retaining lugs 65 of Cutting tool installation manner jig 60 to fixation member
Structure in (fixing bolt 46) in set hole (hole 49), wherein the fixation member (fixing bolt 46) is fixed (screwing togather)
In the hole (threaded hole 13) for being formed in 12 front end of main shaft.
The cutting unit 110 of second embodiment is to be fitted into the retaining lugs 66 of Cutting tool installation manner jig 160 directly to shape
At in the structure in the hole of 112 front end of main shaft (embedded hole 16).
The cutting unit 210 of third embodiment is to be fitted into the retaining lugs 68 of Cutting tool installation manner jig 260 to fixed part
Structure in part (fixture nut 70) in set hole (hole 72), wherein the fixation member (fixture nut 70) is fixed on master
The periphery of axis 212 (with screwing togather for external screw thread 17).
Cutting tool installation manner used is controlled when the installation of tool fitting used in the holding about cutting tool and cutting tool
Tool, can also use different from the tool fitting 30,130,230 and Cutting tool installation manner jig 60,160,260 of above embodiment
Structure.
For example, in the above-described embodiment, in each cutting unit, the length for illustrating only Y direction is a kind of knife
Has assembling fixture 60,160,260, but multiple Cutting tool installation manner jigs that the length that can also prepare Y direction in advance is different, operation
Person arbitrarily selects the Cutting tool installation manner jig of defined length to install.In such a case it is possible to correspondingly make knife with length
Have the color difference of assembling fixture and improves identity.
The retaining lugs 65,66 of the Cutting tool installation manner jig 60,160 of above embodiment has cuing open for polygon (hexagon)
Face shape, Cutting tool installation manner jig 260 have multiple retaining lugs 68 of cylindrical shape, but as long as can be consolidated by chimeric
Fixed, then the shape of retaining lugs can be the shape other than these.
The workpiece of the object cut by the cutting tool of application present invention installation can be in addition to semiconductor package
Fill the workpiece other than substrate.
It, can also be in addition, the embodiments of the present invention are illustrated, but as other embodiments of the invention
Above embodiment and variation are globally or locally combined.
In addition, embodiments of the present invention are not limited to above-mentioned embodiment and variation, this can also not departed from
It makes various changes, replace, deform in the range of the purport of the technical idea of invention.In turn, if improving or spread out because of technology
The other technologies that bear and technical idea of the invention is realized using other methods, then this method also can be used and implemented.
Therefore, cover can be comprising all embodiments within the scope of the technical idea of the present invention for claims.
As discussed above, cutting apparatus according to the present invention, by by the chimeric and opposite of retaining lugs
It is improved in the installation exercise of the Cutting tool installation manner jig that the front end portion of main shaft is fixed, cutting tool, in cutting tool
It loads and unloads particularly useful in high cutting apparatus of frequency etc..
Claims (2)
1. a kind of cutting apparatus installs cutting tool on the tool fitting for be screwed together in main shaft and carries out machining, institute
It states main shaft and is formed with the hole for being screwed to the tool fitting in front end, the tool fitting includes boss portion
With the fixed flange being integrally formed with the boss portion, the cutting tool includes: hub-like base station, has in central part to this
The mounting hole of boss portion being the peripherally inserted；And cutting blade, it is formed in the periphery of the hub-like base station,
The cutting apparatus is characterized in that,
The cutting apparatus has Cutting tool installation manner jig, which is installed in the boss portion of the tool fitting
Front end,
The entirety of the Cutting tool installation manner jig is formed by resin,
The Cutting tool installation manner jig includes:
Guide portion is installed, the front end of the boss portion of the tool fitting is installed in, is had same with the outer diameter of the boss portion
Deng outer diameter；And
Retaining lugs is formed in one end of the installation guide portion, is fitted into in the hole of the front end of the main shaft or being fitted into solid
It is scheduled in hole set by the fixation member on the main shaft, so that the retaining lugs is in the periphery according to the installation guide portion and is somebody's turn to do
The periphery of boss portion, which becomes in the state that conplane mode positions the installation guide portion, to be fixed,
It is fitted into the hole to the front end of the main shaft or is fitted into the fixed part in the retaining lugs for making the Cutting tool installation manner jig
In the state of the front end of the boss portion in the hole of part to which the Cutting tool installation manner jig is fixed on the tool fitting, make this
The mounting hole of cutting tool slides into the boss portion along the periphery of the installation guide portion, thus allows for the cutting tool
Installation to the fixed flange.
2. cutting apparatus according to claim 1, wherein
The fixation member is fixed relative to the hole of the front end of the main shaft.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-238535 | 2017-12-13 | ||
| JP2017238535A JP7045178B2 (en) | 2017-12-13 | 2017-12-13 | Cutting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109909554A true CN109909554A (en) | 2019-06-21 |
| CN109909554B CN109909554B (en) | 2023-07-18 |
Family
ID=66959797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811502863.3A Active CN109909554B (en) | 2017-12-13 | 2018-12-10 | Cutting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7045178B2 (en) |
| KR (1) | KR102630500B1 (en) |
| CN (1) | CN109909554B (en) |
| TW (1) | TWI782153B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110170910A (en) * | 2019-06-25 | 2019-08-27 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead |
| US11103969B2 (en) * | 2017-12-08 | 2021-08-31 | Disco Corporation | Cutting apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7373936B2 (en) * | 2019-07-22 | 2023-11-06 | 株式会社ディスコ | Flange mechanism and cutting device |
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| JP2000190155A (en) * | 1998-10-14 | 2000-07-11 | Disco Abrasive Syst Ltd | Hub blade |
| JP2002154054A (en) * | 2000-11-17 | 2002-05-28 | Disco Abrasive Syst Ltd | Attaching mechanism for cutting blade |
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| CN110170910A (en) * | 2019-06-25 | 2019-08-27 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201927459A (en) | 2019-07-16 |
| TWI782153B (en) | 2022-11-01 |
| KR20190070856A (en) | 2019-06-21 |
| JP2019104086A (en) | 2019-06-27 |
| KR102630500B1 (en) | 2024-01-26 |
| CN109909554B (en) | 2023-07-18 |
| JP7045178B2 (en) | 2022-03-31 |
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