EP1251997B1 - Polishing head for a polishing machine - Google Patents

Polishing head for a polishing machine Download PDF

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Publication number
EP1251997B1
EP1251997B1 EP01909601A EP01909601A EP1251997B1 EP 1251997 B1 EP1251997 B1 EP 1251997B1 EP 01909601 A EP01909601 A EP 01909601A EP 01909601 A EP01909601 A EP 01909601A EP 1251997 B1 EP1251997 B1 EP 1251997B1
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EP
European Patent Office
Prior art keywords
polishing
drive shaft
polishing head
head according
disc
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Expired - Lifetime
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EP01909601A
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German (de)
French (fr)
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EP1251997A1 (en
EP1251997B2 (en
Inventor
Christoph KÜBLER
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Carl Zeiss Vision International GmbH
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Carl Zeiss AG
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Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Priority to EP03025546A priority Critical patent/EP1386694B2/en
Publication of EP1251997A1 publication Critical patent/EP1251997A1/en
Publication of EP1251997B1 publication Critical patent/EP1251997B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention relates to a polishing head for a polishing machine, especially for polishing optical surfaces. The inventive polishing head comprises a polishing plate that is linked with a rotation-driven primary shaft. Said polishing plate (7) is hinged on the primary shaft (7) so as not to rotate. The hinged, rotationally fixed connection can be established by means of a hexagonal ball joint. Said hinged connection allows the polishing plate to rotate and simultaneously follow the surface (41) of the work piece (39) to be polished so that the polishing lining (5) always rests on the largest area possible of the surface (41).

Description

Die Erfindung betrifft einen Polierkopf für eine Poliermaschine gemäß dem Oberbegriff des Patentanspruchs 1. Solch ein Folierkopf ist aus der DE 1 239 211 B bekannt.The invention relates to a polishing head for a polishing machine according to the preamble of 1. Such a film head is known from DE 1 239 211 B. known.

Aus der EP 727 280 B1 ist eine Poliermaschine zum Polieren sphärischer Linsenoberflächen bekannt. Diese Poliermaschine weist einen oberen in einer x-Richtung verfahrbaren Schlitten auf. Mit diesem Schlitten ist eine Werkzeugspindel, die um eine vertikale Achse drehbar gelagert ist, verbunden. Die Werkzeugspindel dient dabei zur Aufnahme eines Abrichtwerkzeuges. Zur Aufnahme des Werkstückes bzw. der Linse ist eine mit einem weiteren Schlitten verbundene Werkstückspindel vorgesehen. Die Werkstückspindel und die Werkstückspindel mit dem Abrichtwerkzeug sind in einem festen Abstand zueinander angeordnet. Der diese beiden Spindeln tragende Schlitten ist in z-Richtung verfahrbar.EP 727 280 B1 describes a polishing machine for polishing spherical lens surfaces known. This polishing machine has an upper carriage which can be moved in an x direction on. This slide is a tool spindle that can be rotated around a vertical axis is connected. The tool spindle is used to hold a Dressing tool. To hold the workpiece or the lens is one with a Work piece spindle connected to another slide. The workpiece spindle and the Workpiece spindle with the dressing tool are at a fixed distance from each other arranged. The carriage carrying these two spindles can be moved in the z direction.

Aus der WO 97/00155 ist eine Poliermaschine und ein Verfahren zum Polieren von optischen Flächen bekannt. Die Poliermaschine weist eine Polierkopf auf, der mit einem elastische Membran versehen ist. Durch Druckbeaufschlagung der Membran wird die Kraftbeaufschlagung der zu polierenden Fläche geregelt. Nachteilig ist bei dieser Poliermaschine, dass die Größe der auf der zu polierenden Fläche aufliegende Fläche des Polierkopfes bzw. der Membran von der Druckbeaufschlagung abhängt. Der Polierkopf mit der elastischem Membran wird durch eine zugeordnete Feder in Richtung der zu polierenden Fläche vorgespannt. Für die Bereitstellung einer Kippbeweglichkeit der elastischen Membran, um eine auf der Drehachse im Bereich der flexiblen Membran liegenden Punkt, sind Hydraulikzylinder vorgesehen. Die Kraftbeaufschlagung der zu polierenden Fläche wird durch zugeordnete Sensoren, Drehstreifen und Solenoit, detektiert.WO 97/00155 describes a polishing machine and a method for polishing optical ones Known areas. The buffing machine has a buffing head with an elastic Membrane is provided. The membrane is pressurized Controlled application of force to the surface to be polished. The disadvantage of this Polishing machine that the size of the surface of the surface to be polished Depends on the pressurization. The polishing head with the elastic membrane is moved by an associated spring in the direction of the to be polished Prestressed surface. To provide tiltability of the elastic membrane, around a point on the axis of rotation in the area of the flexible membrane Hydraulic cylinder provided. The force applied to the surface to be polished is by assigned sensors, rotating strips and solenoite.

In dem aus dieser Schrift bekannten Verfahren wird das Polieren der optischen Oberfläche in Abhängigkeit von der Drehzahl des polierenden Kopfes und der auf die zu polierende Oberfläche wirkenden Anpresskraft durch Druckbeaufschlagung gesteuert.In the method known from this document, the polishing of the optical surface is carried out in Dependence on the speed of the polishing head and on the to be polished Surface contact pressure controlled by pressurization.

Aus der DE 1 239 211 B ist ein kardanisch gelagertes Optik- Schleif- oder Polierwerkzeug bekannt. Zur Ausrichtung des Poliertellers ist ein Ausrichtglied vorgesehen, das aus elastischem Werkstoff besteht. Dieses Ausrichtglied übt keine das Werkzeug von der Spindel abhebende Kraft aus. Es kann ohne weiteres so ausgebildet werden, dass sogar eine Kraft das Werkzeug an das allseitig bewegliche Gelenk, z. B. ein Kugelgelenk, heranzieht, wobei jedoch die Ausrichtkraft so schwach ist, dass die Einstellung des Werkzeuges auf das Werkstück unter der Wirkung des Arbeitsdruckes möglich ist. Die Verwendung eines solchen Werkzeuges gestattet das automatische Beschicken einer Optik- Schleifmaschine, da das Werkstück starr und axial unbeweglich auf der Spindel verbleibt und ohne seitliches Wegkippen eine genau definierte Lage relativ zu der Beschickungsvorrichtung, einnimmt. DE 1 239 211 B discloses a gimbal-mounted optical grinding or polishing tool known. An alignment member is provided to align the polishing plate elastic material. This alignment member does not practice the tool from the spindle lifting force. It can easily be designed so that even a force can Tool on the all-round movable joint, e.g. B. draws a ball joint, wherein however the alignment force is so weak that the setting of the tool on it Workpiece under the effect of the working pressure is possible. The use of such Tool allows the automatic loading of an optical grinding machine, because that Workpiece remains rigid and axially immobile on the spindle and without lateral Tilting away takes a precisely defined position relative to the loading device.

Es ist Aufgabe der Erfindung einen Polierkopf zum Polieren einer Freiformfläche bereitzustellen, durch den eine qualitativ hochwertige optische Oberfläche polierbar ist und durch dessen Einsatz ein konstanter Polierabtrag auf der gesamten zu polierenden optischen Oberfläche gewährleistet werden kann.The object of the invention is a polishing head for polishing a free-form surface to provide a high quality optical surface can be polished and by using a constant polishing abrasion on the entire optical to be polished Surface can be guaranteed.

Die Aufgabe der Erfindung wird durch die im Patentanspruch 1 gegebenen Merkmale gelöst.The object of the invention is achieved by the features given in claim 1.

Ferner wird eine Poliermaschine mit dem Polierkopf in Anspruch 15 sowie ein Verfahren mit einem derartigen Polierkopf in Anspruch 16 beausprucht.Furthermore, a polishing machine with the polishing head is claimed in claim 15 and a method with such a polishing head in claim 16.

Durch die Maßnahme den Polierteller drehfest gelenkig mit der Antriebswelle zu verbinden ist es möglich, daß der Polierteller der Oberflächenkontur folgend auf der zu bearbeitenden Oberfläche aufliegt. Durch die gelenkige Verbindung kann der Polierteller Kippbewegungen ausführen, so daß er mit einer maximalen Polierfläche auf der zu polierenden Oberfläche aufliegt.As a result of the measure, the polishing plate is connected in a rotationally fixed manner to the drive shaft it is possible that the polishing plate follows the surface contour on the one to be machined Surface rests. Due to the articulated connection, the polishing plate can tilt run so that it has a maximum polishing area on the surface to be polished rests.

Zur Übertragung der Drehbewegung der Antriebswelle auf den Polierteller hat es sich als vorteilhaft herausgestellt, den Polierteller mit der Antriebswelle mittels Formschluß zu verbinden, so daß die Drehbewegung der Antriebswelle aufgrund des Formschlusses auf den Polierteller übertragen wird.It has proven to be suitable for transmitting the rotary movement of the drive shaft to the polishing plate it is advantageous to close the polishing plate with the drive shaft by means of a positive lock connect so that the rotational movement of the drive shaft due to the positive connection to the Polishing pad is transferred.

Es hat sich als vorteilhaft herausgestellt für die drehfeste gelenkige Verbindung den Polierteller über ein Kugelimbusgelenk mit der Antriebswelle zu verbinden. Durch dieses Kugelimbusgelenk ist es möglich, den Drehpunkt, um den der Polierteller in beliebige Richtungen geschwenkt werden kann, möglichst nah an der zu polierenden Oberfläche des Poliertellers anzuordnen. Die nahe Anordnung der gelenkigen Verbindung zur polierenden Oberfläche des Poliertellers hat den Vorteil, daß der Polierteller den Oberflächenkonturen reaktionsschnell folgen kann.It has proven to be advantageous for the non-rotatable articulated connection Connect the polishing plate to the drive shaft using a spherical imbus joint. Because of this Ball imbus joint, it is possible to set the pivot point around which the polishing plate is in any Directions can be pivoted as close as possible to the surface to be polished Arrange polishing plates. The close arrangement of the articulated connection to the polishing Surface of the polishing plate has the advantage that the polishing plate has the surface contours can respond quickly.

Es hat sich als vorteilhaft herausgestellt der gelenkigen Verbindung ein oder mehrere Rastelement zur Sicherung der Verbindung von Antriebswelle und Polierkopf zuzuordnen. Ist als gelenkige Verbindung ein Kugelimbusgelenk vorgesehen, so wird mittels des Rastelementes sichergestellt, daß der Kugelimbuskopf aus der zugeordneten Ausnehmung nicht herausrutschen kann. Dadurch kann der Polierteller ohne Probleme von der zu polierenden Fläche entfernt werden. Durch die durch das Rastelement gewährleistete Lösbarkeit der Verbindung können außerdem verschiedene Polierteller leicht gegeneinander ausgetauscht werden.It has proven advantageous for the articulated connection one or more Assign locking element to secure the connection between the drive shaft and the polishing head. is provided as an articulated connection a ball imbus joint, so the Locking element ensures that the Kugelimbuskopf from the assigned recess can't slip out. This allows the polishing plate to move from the to without any problems polished surface to be removed. By the guaranteed by the locking element Detachability of the connection can also easily different polishing plates against each other be replaced.

Es hat sich als vorteilhaft herausgestellt dem Polierkopf eine Druckkammer zuzuordnen wobei aus einer Druckbeaufschlagung der Druckkammer eine translatorische Bewegung des Poliertellers entlang einer Mittenachse des Polierkopfes resultiert. Liegt der Polierteller auf einer zu polierenden Oberfläche auf, so resultiert aus einer Druckbeaufschlagung ein erhöhter Polierdruck.It has proven to be advantageous to assign a pressure chamber to the polishing head wherein from a pressurization of the pressure chamber a translational movement of the Polishing plates along a central axis of the polishing head result. The polishing plate lies on top on a surface to be polished, an increased pressure results from pressurization Polishing pressure.

Es hat sich als vorteilhaft herausgestellt, wenn ein der Druckkammer zugeordneter Kolben mit der Antriebswelle in Wirkverbindung steht, so daß eine Druckbeaufschlagung der Druckkammer über die Antriebswelle auf den Polierteller übertragen wird.It has proven to be advantageous if a piston assigned to the pressure chamber is operatively connected to the drive shaft so that pressurization of the Pressure chamber is transferred to the polishing plate via the drive shaft.

Es hat sich als vorteilhaft herausgestellt die Antriebswelle mittels eines koaxial angeordneten Hohlzylinders, in dem die Antriebswelle drehfest gelagert ist, über diesen Hohlzylinder anzutreiben. Für die Übertragung der Drehbewegung hat sich eine formschlüssige Verbindung als vorteilhaft erwiesen.It has been found to be advantageous for the drive shaft to be arranged coaxially Hollow cylinder in which the drive shaft is rotatably mounted, via this hollow cylinder drive. For the transmission of the rotary movement there is a form-fitting Connection proved to be advantageous.

Es hat sich als vorteilhaft herausgestellt, die Antriebswelle in dem Hohlzylinder mittels Lagerelementen z.B. einer Wälzlagerung oder einer Kugellagerung translatorisch leicht bewegbar zu lagern. Durch diese Lagerung wird gewährleistet, daß bei Druckbeaufschlagung der Druckkammer sich die Antriebswelle in dem Hohlzylinder leichtgängig translatorisch bewegen kann und somit die eingeleitete translatorische Bewegung bzw. Kraftbeaufschlagung nahezu vollständig auf den Polierteller übertragen wird.It has proven to be advantageous to use the drive shaft in the hollow cylinder Bearing elements e.g. a roller bearing or a ball bearing translationally light to store it movably. This storage ensures that when pressurized the pressure chamber, the drive shaft moves translationally in the hollow cylinder can move and thus the initiated translational movement or Force application is almost completely transferred to the polishing plate.

Weitere vorteilhafte Maßnahmen sind in weiteren abhängigen Ansprüchen beschrieben.Further advantageous measures are described in further dependent claims.

Anhand eines Ausführungsbeispieles wird die Erfindung im folgenden näher beschrieben.The invention is described in more detail below using an exemplary embodiment.

Es zeigt:

Figur 1
eine schematische Skizze des Polierkopfes in einem dessen Mittenachse enthaltenen Schnittes;
Figur 2
einen Schnitt entlang der Ebene II - II in Figur 1;
Figur 3
einen Schnitt entlang der Ebene III - III in Figur 1; und
Figur 4
Schnitt entlang der Ebene III - III bei einem alternativen Ausführungsbeispiel.
It shows:
Figure 1
a schematic sketch of the polishing head in a section containing its central axis;
Figure 2
a section along the plane II - II in Figure 1;
Figure 3
a section along the plane III - III in Figure 1; and
Figure 4
Section along the plane III - III in an alternative embodiment.

Der in Figur 1 dargestellte Polierkopf (1) weist einen Polierteller (3) mit einem Polierbelag (5) auf. Der Polierbelag (5) liegt auf einer zu polierenden Oberfläche (41) eines Werkstückes (39) auf.The polishing head (1) shown in FIG. 1 has a polishing plate (3) with a polishing pad (5) on. The polishing layer (5) lies on a surface (41) of a workpiece to be polished (39).

Der Polierteller 3 ist über die gelenkige Verbindung an einer Antriebswelle (7) aufgenommen. Im dargestellten Ausführungsbeispiel ist für diese drehfeste gelenkige Verbindung ein Kugelimbusgelenk vorgesehen. Die Antriebswelle (7) ist dazu auf der dem Polierteller zugewandten Seite endseitig mit einem Kugelimbuskopf (19) versehen, der in eine im Polierteller (3) ausgebildete Ausnehmung (13) eingreift.The polishing plate 3 is connected to a drive shaft (7) via the articulated connection. added. In the illustrated embodiment, this is non-rotatable articulated Connection provided a ball imbus joint. The drive shaft (7) is on the The end of the side facing the polishing plate is provided with a spherical imbus head (19) a recess (13) formed in the polishing plate (3) engages.

Zur Sicherung ist die Verbindung zwischen dem Kugelimbuskopf (19) und dem Polierteller (3) mittels eines Rastelementes (15) gesichert ist. Als Rastelement können beispielsweise ein Federelement bzw. Federstift am Polierteller, der in eine Ausnehmung am Kugelimbuskopf hinein ragt, vorgesehen sein.The connection between the ball imbus head (19) and the polishing plate is a safeguard (3) is secured by means of a locking element (15). As a locking element, for example a spring element or spring pin on the polishing plate, which in a recess on Ball imbus head protrudes into it.

Es ist auch möglich, den Kugelimbuskopf (19) an dem Polierteller auszubilden; in diesem Fall ist dann in der Antriebswelle (7) eine Ausnehmung zur drehsicheren gelenkigen Aufnahme des Kugelimbuskopfes vorzusehen. Allerdings ist in diesem Fall der Abstand zwischen der Gelenkstelle - also dem Punkt, um den eine Kippung des Poliertellers relativ zur starren Antriebswelle erfolgen kann - und der zu polierenden Fläche (41) größer. It is also possible to form the spherical imbus head (19) on the polishing plate; in this The case is then in the drive shaft (7) a recess for rotationally articulated Inclusion of the ball imbus head to be provided. However, in this case the distance between the hinge point - the point around which the polishing plate tilts relatively to the rigid drive shaft - and the surface to be polished (41) larger.

Die Antriebswelle (7) ist über Lagerelement (23) translatorisch verschiebbar und drehfest in einem Hohlzylinder (49) gelagert. Der Hohlzylinder (49) wird rotatorisch angetrieben über einen nicht dargestellten Antrieb der Poliermaschine, wobei die Drehbewegung aufgrund der drehfesten Verbindung durch das Lagerelement (23) vollständig auf die Antriebswelle (7) für den Polierkopf übertragen wird.The drive shaft (7) can be displaced translationally via the bearing element (23) and rotatably in a hollow cylinder (49). The hollow cylinder (49) is rotationally driven via a drive, not shown, of the polishing machine, the rotary movement due to the non-rotatable connection through the bearing element (23) completely on the drive shaft (7) for the polishing head is transferred.

Auf der vom Polierkopf abgewandten Seite der Antriebswelle (7) ist in dem Hohlzylinder (49) ein Hydraulik- oder Pneumatiksystem, das zur Beaufschlagung des Polierkopfes mit dem erforderlichen Polierdruck dient, vorgesehen. Dieses weist einen Druckkammerzylinder (31) mit einem darin translatorisch verschiebar aufgenommenen Kolben (33) auf. Zur Entkoppelung des Kolbens (33) von der Drehbewegung der Antriebswelle (7) und des Hohlzylinders können Drehlager zwischen dem Druckkammerzylinder (31) und dem Hohlzylinder (49) sowie zwischen dem vom Kolben (33) angetriebenen Pleul (32) und der Antriebswelle (7) vorgesehen sein. Zur Druckbeaufschlagung des Kolbens (33) ist der im Druckkammerzylinder (31) gebildeten Druckkammer (29) eine Druckversorgung (35) mit einem Druckregelventil (37) und einem Druckreservoir (36) zugeordnet. Durch Druckbeaufschlagung der Druckkammer (29) wird eine entlang einer Mittenachse (2) des Polierkopfes (1) gerichteten Kraft auf den Kolben (33) eingeleitet. Aus dieser Kraft resultiert eine translatorische Bewegung des Poliertellers bzw. eine Erhöhung der wirkenden Polierkraft, sofern der Polierbelag (5)auf einer zu polierenden optischen Fläche (41) eines Werkstückes (39) aufliegt.On the side of the drive shaft (7) facing away from the polishing head is in the hollow cylinder (49) a hydraulic or pneumatic system which is used to act upon the polishing head with the required polishing pressure is provided. This has a pressure chamber cylinder (31) with a piston (33) accommodated in a translationally displaceable manner. to Decoupling the piston (33) from the rotational movement of the drive shaft (7) and the Hollow cylinders can pivot between the pressure chamber cylinder (31) and the Hollow cylinder (49) and between the connecting rod (32) driven by the piston (33) and the Drive shaft (7) may be provided. For pressurizing the piston (33) is in Pressure chamber cylinder (31) formed pressure chamber (29) with a pressure supply (35) assigned to a pressure control valve (37) and a pressure reservoir (36). By Pressurization of the pressure chamber (29) is along a central axis (2) of the Polishing head (1) directed force is applied to the piston (33). From this force results a translatory movement of the polishing plate or an increase in the effective Polishing force, provided the polishing layer (5) is on an optical surface (41) to be polished Workpiece (39) rests.

Die drehfeste translatorisch bewegbare Kopplung zwischen dem Hohlzylinder (49) und der Antriebswelle (7) erfolgt über ein Wälzlager (23). Die Antriebswelle (7) weist dazu ein nicht rotationssymmetrisches Außenprofil (43), vorzugsweise ein Mehrkantprofil auf. Der Formschluß zwischen dem Außenprofil (43) der Antriebswelle (7) und der Innenwand des Hohlzylinders wird über Rollen oder Walzen (25) erreicht, die in dem Lagerelement (23) symmetrisch zum Außenprofil der Antriebswelle (7) aufgenommen sind und an dem Außenprofil (43) der Antriebswelle abrollen. Die Drehachsen der Rollen oder Walzen sind dabei senkrecht zur Rotationachse der Antriebswelle (7) ausgerichtet. The rotationally fixed translationally movable coupling between the hollow cylinder (49) and the Drive shaft (7) takes place via a roller bearing (23). The drive shaft (7) does not have one rotationally symmetrical outer profile (43), preferably a polygonal profile. The Form fit between the outer profile (43) of the drive shaft (7) and the inner wall of the Hollow cylinder is reached via rollers or rollers (25) in the bearing element (23) are added symmetrically to the outer profile of the drive shaft (7) and on the Roll off the outer profile (43) of the drive shaft. The axes of rotation of the rolls or rollers are aligned perpendicular to the axis of rotation of the drive shaft (7).

Anstelle der Wälzlagerung der Antriebswelle (7) in dem Hohlzylinder (49) kann auch eine Kugellagerung, wie in Figur 4 dargestellt, vorgesehen sein. Zur drehfesten translatorisch verschiebbaren Verbindung sind die Kugeln (53) in Längsnuten (51) des Hohlzylinders (49) und weiteren Längsnuten (55) der Antriebswelle (7) gelagert, wobei sich die Längsnuten parallel zur Rotationsachse der Antriebswelle (7) erstrecken. Auch in diesem Fall weist die Antriebsachse wenigstens in einem der Lagerung entsprechenden Bereich ein nichtrotationssysmmetrisches Außenprofil, insbesondere ein Mehrkantprofil aufInstead of the roller bearing of the drive shaft (7) in the hollow cylinder (49), a Ball bearing, as shown in Figure 4, may be provided. For non-rotatable translational Slidable connection are the balls (53) in the longitudinal grooves (51) of the hollow cylinder (49) and further longitudinal grooves (55) of the drive shaft (7) are mounted, the longitudinal grooves extend parallel to the axis of rotation of the drive shaft (7). In this case, too Drive axis a non-rotationally symmetrical at least in a region corresponding to the bearing Outer profile, especially a polygonal profile

Im folgenden wird das Polierverfahren näher beschrieben. Zum Polieren wird der Polierkopf, dessen Durchmesser kleiner ist als der Durchmesser der zu polierenden Fläche, in einer Schwenkbewegung in radialer Richtung über die zu polierende optische Fläche (41) bewegt. Sowohl das Werkstück (39) als auch der Polierteller werden dabei mit nahezu gleicher Drehzahl in identischer Richtung angetrieben. Bei Bewegung des Poliertellers über die zu polierende optische Fläche (41) kann vorgesehen sein, daß die Drehzahlen des Poliertellers oder die Drehzahl des Werkstückes, insbesondere in Abhängigkeit von der radialen Position des Poliertellers, zu verändern. Diese Drehzahländerung hat einen positiven Einfluß auf einen konstanten Polierabtrag.The polishing process is described in more detail below. For polishing, the polishing head, whose diameter is smaller than the diameter of the surface to be polished, in one Swiveling movement in the radial direction moves over the optical surface (41) to be polished. Both the workpiece (39) and the polishing plate are almost the same Speed driven in the same direction. When moving the polishing plate over the Polishing optical surface (41) can be provided that the speed of the polishing plate or the speed of the workpiece, in particular depending on the radial position of the polishing plate. This speed change has a positive impact on you constant polishing removal.

Durch die Wahl eines sehr großen Speichervolumens (36) im Verhältnis zum sich verändernden Volumen des Kolbens (31), werden die Druckschwankungen sehr klein gehalten, so daß der Polierteller mit konstanter Kraft auf der zu polierenden optischen Fläche aufliegt. Das Druckregelventil trägt auch noch zum Ausgleich von Druckschwankungen bei.By choosing a very large storage volume (36) in relation to itself changing volume of the piston (31), the pressure fluctuations are very small held so that the polishing plate with constant force on the optical surface to be polished rests. The pressure control valve also helps to compensate for pressure fluctuations.

Durch die beschriebene Anordnung in Verbindung mit einer Poliermaschine nach dem Stand der Technik sind insbesondere nicht rotationssymmetrische optische Oberflächen (41) polierbar, wobei der Polierabtrag über die gesamte optische Fläche konstant ist. Für den gleichmäßigen Polierabtrag ist es erforderlich, daß der Polierbelag des Poliertellers (3) möglichst großflächig auf der zu polierenden optischen Fläche (41) aufliegt. Dies wird insbesondere dadurch gewährleistet, daß durch die drehfeste gelenkige Verbindung zwischen dem Polierteller und der Antriebswelle (7) der Polierteller um einen auf der Mittenachse (2) des Polierkopfes liegenden Punkt in beliebige Richtungen gekippt werden kann und die Ausrichtung des Poliertellers dadurch der Oberflächenkontur der zu polierenden Fläche (41) folgen kann. The arrangement described in connection with a polishing machine according to the prior art technology are in particular non-rotationally symmetrical optical surfaces (41) polishable, whereby the polishing removal is constant over the entire optical surface. For the uniform polishing removal, it is necessary that the polishing surface of the polishing plate (3) rests as far as possible on the optical surface (41) to be polished. this will ensured in particular by the fact that the non-rotatable articulated connection between the polishing plate and the drive shaft (7) the polishing plate around one on the central axis (2) of the polishing head can be tilted in any direction and the Alignment of the polishing plate as a result of the surface contour of the surface to be polished (41) can follow.

Bezugszeichenliste:LIST OF REFERENCE NUMBERS

11
Polierkopfpolishing head
22
Mittenachsemid-axis
33
Poliertellerpolishing plate
55
Polierbelag (∼ Belag)Polishing surface (∼ surface)
77
Antriebswelledrive shaft
99
gelenkige Verbindungarticulated connection
1313
Ausnehmung im PoliertellerRecess in the polishing plate
1515
Rastelementlocking element
1919
Kugelimbuskopfball head
2020
Ausnehmungrecess
2323
Lagerelementebearing elements
2525
Walzen oder RollenRolls or rolls
2929
Druckkammerpressure chamber
3131
DruckkammerzylinderPressure chamber cylinder
3232
Pleuelpleuel
3333
Kolbenpiston
3535
Druckversorgungpressure supply
3636
Reservoirreservoir
3737
DruckregelventilPressure control valve
3939
Werkstückworkpiece
4141
Optische FlächeOptical surface
4343
Außenprofilouter profile
4949
Hohlzylinderhollow cylinder
5151
Längsnutenlongitudinal grooves
5353
Kugelnroll
5555
Längsnut in AntriebswelleLongitudinal groove in the drive shaft

Claims (20)

  1. Polishing head, in particular for polishing optical surfaces, having a polishing disc which is connected to a drive shaft which can be rotationally driven, and the polishing disc (3) is connected to the drive shaft (7) in an articulated and rotationally locked manner, characterized in that a pressure chamber (29) is provided, a translatory movement of the polishing disc (3) along a centre axis (2) of the polishing head resulting from pressurizing of the pressure chamber (29).
  2. Polishing head according to Claim 1, characterized in that a rotary movement of the drive shaft (7) is transmitted to the polishing disc (3) by means of positive locking.
  3. Polishing head according to Claim 1 or 2, characterized in that the polishing disc (3) is mounted on the drive shaft (7) in such a way as to be tiltable about a point lying on the centre axis (2).
  4. Polishing head according to one of the preceding claims, characterized in that the positive locking for transmitting the rotary movement of the drive shaft (7) to the polishing disc (3) is produced in the articulated connection.
  5. Polishing head according to Claim 4, characterized in that a ball socket joint is provided as articulated connection.
  6. Polishing head according to at least one of the preceding claims, characterized in that a catch element (15) is provided for securing the articulated connection of polishing disc (3) and drive shaft (7).
  7. Polishing head according to at least one of the preceding claims, characterized in that the pressure chamber (29) comprises a pressure-chamber cylinder (31), in which a piston (33) is arranged such as to be movable in a translatory manner.
  8. Polishing head according to Claim 7, characterized in that the piston (33) is in operative connection with the drive shaft (7).
  9. Polishing head according to at least one of the preceding claims, characterized in that the drive shaft (7) is mounted in a driven hollow cylinder (49) in such a way as to be rotationally locked and displaceable in a translatory manner along the centre axis (2) of the polishing head.
  10. Polishing head according to at least one of the preceding claims, characterized in that the drive shaft (7) is mounted in such a way as to be rotationally locked and displaceable in a translatory manner along a centre axis (2) of the polishing head and is connected to a rotationally driven piston in a rotationally locked manner.
  11. Polishing head according to at least one of the preceding claims, characterized in that the drive shaft (7) has an outer profile (43) which is non-rotationally symmetrical at least in one section.
  12. Polishing head according to at least one of the preceding claims, characterized in that the outer profile (43) is designed in the form of a polygonal profile.
  13. Polishing head according to at least one of the preceding claims, characterized in that the outer profile (43) is connected to the hollow cylinder in a rotationally locked manner via a rolling-contact bearing arrangement (23, 25).
  14. Polishing head according to at least one of the preceding claims, characterized in that the outer profile (43) has longitudinal grooves (55), in which balls (53) are arranged, via which balls (53) the drive shaft (7) is connected to the hollow cylinder (49), which is provided on the inside with longitudinal grooves (51) formed in the opposite direction.
  15. Polishing machine having a polishing head according to at least one of the preceding claims.
  16. Method of polishing a non-centrosymmetric freeform surface with a polishing machine according to Claim 15, the polishing disc (3) being rotationally driven in the same direction of rotation as the optical surface to be polished.
  17. Method according to Claim 16, characterized in that the body (39) to be treated is driven at approximately the same rotational frequency as the polishing disc (3).
  18. Method according to Claim 16, characterized in that the rotary disc (3) performs a radial movement relative to the body (39) to be treated.
  19. Method according to Claim 18, characterized in that the rotational frequency of the rotary disc (3) or of the surface (41) to be polished is varied as a function of the radial position of the rotary disc (3).
  20. Method according to at least one of Claims 16 to 19, characterized in that the pressure in the chamber (29) is controlled as a function of the surface contour of the optical surface (41), so that the rotary disc resting on the optical surface (41) exerts a predetermined constant polishing pressure on the latter.
EP01909601A 2000-02-03 2001-01-11 Polishing head for a polishing machine Expired - Lifetime EP1251997B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP03025546A EP1386694B2 (en) 2000-02-03 2001-01-11 Method of polishing and polishing machine

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DE10004455 2000-02-03
DE10004455 2000-02-03
PCT/EP2001/000253 WO2001056740A1 (en) 2000-02-03 2001-01-11 Polishing head for a polishing machine

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EP03025546.7 Division-Into 2003-11-08

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EP1251997A1 EP1251997A1 (en) 2002-10-30
EP1251997B1 true EP1251997B1 (en) 2004-04-14
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EP (2) EP1251997B2 (en)
JP (1) JP4945771B2 (en)
AU (1) AU2001237285A1 (en)
DE (3) DE50101982D1 (en)
TW (1) TW558477B (en)
WO (1) WO2001056740A1 (en)

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US20030045211A1 (en) 2003-03-06
EP1251997A1 (en) 2002-10-30
US7588480B2 (en) 2009-09-15
DE10100860A1 (en) 2001-08-23
US8011996B2 (en) 2011-09-06
US20050037695A1 (en) 2005-02-17
DE50101982D1 (en) 2004-05-19
TW558477B (en) 2003-10-21
JP2003525756A (en) 2003-09-02
EP1251997B2 (en) 2011-06-08
WO2001056740A1 (en) 2001-08-09
JP4945771B2 (en) 2012-06-06
AU2001237285A1 (en) 2001-08-14
EP1386694A1 (en) 2004-02-04
US20080020691A1 (en) 2008-01-24
EP1386694B1 (en) 2009-05-20
DE50114907D1 (en) 2009-07-02
EP1386694B2 (en) 2013-01-09

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