DE69621520D1 - Verfahren zum Herstellen eines Tintenstrahlkopfes - Google Patents
Verfahren zum Herstellen eines TintenstrahlkopfesInfo
- Publication number
- DE69621520D1 DE69621520D1 DE69621520T DE69621520T DE69621520D1 DE 69621520 D1 DE69621520 D1 DE 69621520D1 DE 69621520 T DE69621520 T DE 69621520T DE 69621520 T DE69621520 T DE 69621520T DE 69621520 D1 DE69621520 D1 DE 69621520D1
- Authority
- DE
- Germany
- Prior art keywords
- ink
- substrate
- forming
- flow path
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000005530 etching Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16579995A JP3343875B2 (ja) | 1995-06-30 | 1995-06-30 | インクジェットヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69621520D1 true DE69621520D1 (de) | 2002-07-11 |
DE69621520T2 DE69621520T2 (de) | 2003-07-24 |
Family
ID=15819219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69621520T Expired - Lifetime DE69621520T2 (de) | 1995-06-30 | 1996-06-28 | Verfahren zum Herstellen eines Tintenstrahlkopfes |
Country Status (10)
Country | Link |
---|---|
US (1) | US6139761A (de) |
EP (2) | EP0750992B1 (de) |
JP (1) | JP3343875B2 (de) |
KR (1) | KR100230028B1 (de) |
CN (1) | CN1100674C (de) |
AT (1) | ATE218442T1 (de) |
AU (1) | AU5626996A (de) |
CA (1) | CA2179869C (de) |
DE (1) | DE69621520T2 (de) |
SG (1) | SG86983A1 (de) |
Families Citing this family (75)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9605547D0 (en) * | 1996-03-15 | 1996-05-15 | Xaar Ltd | Operation of droplet deposition apparatus |
DK0841167T3 (da) | 1996-11-11 | 2005-01-24 | Canon Kk | Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling..... |
JP3984689B2 (ja) * | 1996-11-11 | 2007-10-03 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
WO1998051506A1 (fr) * | 1997-05-14 | 1998-11-19 | Seiko Epson Corporation | Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre |
JP3416467B2 (ja) * | 1997-06-20 | 2003-06-16 | キヤノン株式会社 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットプリント装置 |
CN1080646C (zh) * | 1997-10-21 | 2002-03-13 | 研能科技股份有限公司 | 形成喷墨头电阻层的方法 |
CN1073938C (zh) * | 1997-10-21 | 2001-10-31 | 研能科技股份有限公司 | 快速粘合喷墨头的喷孔片的方法 |
JP3619036B2 (ja) * | 1997-12-05 | 2005-02-09 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US6264309B1 (en) * | 1997-12-18 | 2001-07-24 | Lexmark International, Inc. | Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same |
US6450621B1 (en) | 1998-09-17 | 2002-09-17 | Canon Kabushiki Kaisha | Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system |
KR100318675B1 (ko) * | 1998-09-29 | 2002-02-19 | 윤종용 | 미소구조의 유체분사장치 제작방법 및 그 유체분사장치 |
US6473966B1 (en) * | 1999-02-01 | 2002-11-05 | Casio Computer Co., Ltd. | Method of manufacturing ink-jet printer head |
JP3554782B2 (ja) * | 1999-02-01 | 2004-08-18 | カシオ計算機株式会社 | インクジェットプリンタヘッドの製造方法 |
JP4298066B2 (ja) | 1999-06-09 | 2009-07-15 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 |
IT1310099B1 (it) * | 1999-07-12 | 2002-02-11 | Olivetti Lexikon Spa | Testina di stampa monolitica e relativo processo di fabbricazione. |
JP4533522B2 (ja) * | 1999-10-29 | 2010-09-01 | ヒューレット・パッカード・カンパニー | インクジェットのダイ用の電気的相互接続 |
JP2001171119A (ja) | 1999-12-22 | 2001-06-26 | Canon Inc | 液体吐出記録ヘッド |
CN1111117C (zh) * | 2000-01-12 | 2003-06-11 | 威硕科技股份有限公司 | 用于打印装置的喷墨头的制造方法 |
IT1320599B1 (it) | 2000-08-23 | 2003-12-10 | Olivetti Lexikon Spa | Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione. |
US6481832B2 (en) * | 2001-01-29 | 2002-11-19 | Hewlett-Packard Company | Fluid-jet ejection device |
AUPR292301A0 (en) * | 2001-02-06 | 2001-03-01 | Silverbrook Research Pty. Ltd. | A method and apparatus (ART99) |
JP2002337347A (ja) | 2001-05-15 | 2002-11-27 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
DE60222969T2 (de) | 2001-08-10 | 2008-07-24 | Canon K.K. | Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, Substrat für einen Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren |
US6818464B2 (en) * | 2001-10-17 | 2004-11-16 | Hymite A/S | Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes |
JP3734246B2 (ja) * | 2001-10-30 | 2006-01-11 | キヤノン株式会社 | 液体吐出ヘッド及び構造体の製造方法、液体吐出ヘッド並びに液体吐出装置 |
JP2003300323A (ja) | 2002-04-11 | 2003-10-21 | Canon Inc | インクジェットヘッド及びその製造方法 |
JP3950730B2 (ja) | 2002-04-23 | 2007-08-01 | キヤノン株式会社 | インクジェット記録ヘッドおよびインク吐出方法 |
JP2004001488A (ja) | 2002-04-23 | 2004-01-08 | Canon Inc | インクジェットヘッド |
JP2004001490A (ja) | 2002-04-23 | 2004-01-08 | Canon Inc | インクジェットヘッド |
US6554403B1 (en) * | 2002-04-30 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Substrate for fluid ejection device |
US6981759B2 (en) * | 2002-04-30 | 2006-01-03 | Hewlett-Packard Development Company, Lp. | Substrate and method forming substrate for fluid ejection device |
KR100425331B1 (ko) * | 2002-06-26 | 2004-03-30 | 삼성전자주식회사 | 잉크 젯 프린트 헤드의 제조 방법 |
JP4217434B2 (ja) | 2002-07-04 | 2009-02-04 | キヤノン株式会社 | スルーホールの形成方法及びこれを用いたインクジェットヘッド |
US6821450B2 (en) | 2003-01-21 | 2004-11-23 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
US6883903B2 (en) * | 2003-01-21 | 2005-04-26 | Martha A. Truninger | Flextensional transducer and method of forming flextensional transducer |
US7323115B2 (en) * | 2003-02-13 | 2008-01-29 | Canon Kabushiki Kaisha | Substrate processing method and ink jet recording head substrate manufacturing method |
US6709805B1 (en) | 2003-04-24 | 2004-03-23 | Lexmark International, Inc. | Inkjet printhead nozzle plate |
US6910758B2 (en) * | 2003-07-15 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
CN1741905B (zh) * | 2003-07-22 | 2012-11-28 | 佳能株式会社 | 喷墨头及其制造方法 |
ATE465008T1 (de) * | 2003-07-22 | 2010-05-15 | Canon Kk | Tintenstrahlkopf und herstellungsverfahren dafür |
EP1517166B1 (de) | 2003-09-15 | 2015-10-21 | Nuvotronics, LLC | Vorrichtungsgehäuse und Verfahren zu derer Prüfung und Herstellung |
JP4587157B2 (ja) | 2003-10-23 | 2010-11-24 | キヤノン株式会社 | インクジェット記録ヘッドおよびインクジェット記録装置 |
JP4455282B2 (ja) * | 2003-11-28 | 2010-04-21 | キヤノン株式会社 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ |
JP2005205721A (ja) | 2004-01-22 | 2005-08-04 | Sony Corp | 液体吐出ヘッド及び液体吐出装置 |
US7681306B2 (en) * | 2004-04-28 | 2010-03-23 | Hymite A/S | Method of forming an assembly to house one or more micro components |
US7429335B2 (en) * | 2004-04-29 | 2008-09-30 | Shen Buswell | Substrate passage formation |
US7322104B2 (en) * | 2004-06-25 | 2008-01-29 | Canon Kabushiki Kaisha | Method for producing an ink jet head |
US7377625B2 (en) * | 2004-06-25 | 2008-05-27 | Canon Kabushiki Kaisha | Method for producing ink-jet recording head having filter, ink-jet recording head, substrate for recording head, and ink-jet cartridge |
JP4274554B2 (ja) | 2004-07-16 | 2009-06-10 | キヤノン株式会社 | 素子基板および液体吐出素子の形成方法 |
JP2006130868A (ja) | 2004-11-09 | 2006-05-25 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
JP4667028B2 (ja) * | 2004-12-09 | 2011-04-06 | キヤノン株式会社 | 構造体の形成方法及びインクジェット記録ヘッドの製造方法 |
JP4241605B2 (ja) * | 2004-12-21 | 2009-03-18 | ソニー株式会社 | 液体吐出ヘッドの製造方法 |
US7254890B2 (en) * | 2004-12-30 | 2007-08-14 | Lexmark International, Inc. | Method of making a microfluid ejection head structure |
JP4641440B2 (ja) * | 2005-03-23 | 2011-03-02 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法 |
US7214324B2 (en) * | 2005-04-15 | 2007-05-08 | Delphi Technologies, Inc. | Technique for manufacturing micro-electro mechanical structures |
JP4881081B2 (ja) * | 2005-07-25 | 2012-02-22 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2007203623A (ja) * | 2006-02-02 | 2007-08-16 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
JP5188049B2 (ja) | 2006-09-13 | 2013-04-24 | キヤノン株式会社 | 記録ヘッド |
JP2008179039A (ja) | 2007-01-24 | 2008-08-07 | Canon Inc | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
JP4981491B2 (ja) * | 2007-03-15 | 2012-07-18 | キヤノン株式会社 | インクジェットヘッド製造方法及び貫通電極の製造方法 |
JP2009051128A (ja) * | 2007-08-28 | 2009-03-12 | Canon Inc | 液体吐出ヘッド及び記録装置 |
US8197705B2 (en) * | 2007-09-06 | 2012-06-12 | Canon Kabushiki Kaisha | Method of processing silicon substrate and method of manufacturing liquid discharge head |
JP5213423B2 (ja) * | 2007-12-06 | 2013-06-19 | キヤノン株式会社 | 液体吐出ヘッド及びその製造寸法管理方法 |
JP5355223B2 (ja) | 2008-06-17 | 2013-11-27 | キヤノン株式会社 | 液体吐出ヘッド |
JP5279686B2 (ja) * | 2009-11-11 | 2013-09-04 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP5393423B2 (ja) * | 2009-12-10 | 2014-01-22 | キヤノン株式会社 | インク吐出ヘッド及びその製造方法 |
JP5693068B2 (ja) | 2010-07-14 | 2015-04-01 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
BR112014007224B1 (pt) | 2011-09-28 | 2020-06-16 | Hewlett-Packard Development Company, L.P. | Dispositivo de ejeção de fluido e método de circulação de fluido |
JP6025589B2 (ja) | 2013-02-07 | 2016-11-16 | キヤノン株式会社 | インクジェット記録装置およびインクジェット記録方法 |
CN107303758B (zh) * | 2016-04-18 | 2019-03-01 | 佳能株式会社 | 液体喷出头的制造方法 |
CN107399166B (zh) * | 2016-05-18 | 2019-05-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种mems剪切式压电喷墨打印头及其制备方法 |
US10031415B1 (en) * | 2017-08-21 | 2018-07-24 | Funai Electric Co., Ltd. | Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film |
TW201924950A (zh) * | 2017-11-27 | 2019-07-01 | 愛爾蘭商滿捷特科技公司 | 形成噴墨噴嘴腔室的方法 |
US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
JP7066418B2 (ja) | 2018-01-17 | 2022-05-13 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0244643A3 (de) * | 1986-05-08 | 1988-09-28 | Hewlett-Packard Company | Verfahren zur Herstellung von thermischen Tintenstrahldruckköpfen |
US4789425A (en) * | 1987-08-06 | 1988-12-06 | Xerox Corporation | Thermal ink jet printhead fabricating process |
US4863560A (en) * | 1988-08-22 | 1989-09-05 | Xerox Corp | Fabrication of silicon structures by single side, multiple step etching process |
US4961821A (en) * | 1989-11-22 | 1990-10-09 | Xerox Corporation | Ode through holes and butt edges without edge dicing |
US4985710A (en) * | 1989-11-29 | 1991-01-15 | Xerox Corporation | Buttable subunits for pagewidth "Roofshooter" printheads |
JPH0410942A (ja) * | 1990-04-27 | 1992-01-16 | Canon Inc | 液体噴射方法および該方法を用いた記録装置 |
JPH0410941A (ja) * | 1990-04-27 | 1992-01-16 | Canon Inc | 液滴噴射方法及び該方法を用いた記録装置 |
JPH05131628A (ja) * | 1991-04-16 | 1993-05-28 | Hewlett Packard Co <Hp> | プリントヘツド |
US5277755A (en) * | 1991-12-09 | 1994-01-11 | Xerox Corporation | Fabrication of three dimensional silicon devices by single side, two-step etching process |
US5308442A (en) * | 1993-01-25 | 1994-05-03 | Hewlett-Packard Company | Anisotropically etched ink fill slots in silicon |
JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US5383635A (en) * | 1993-09-07 | 1995-01-24 | Barone; Dana | No-sew fabric wrap tables |
-
1995
- 1995-06-30 JP JP16579995A patent/JP3343875B2/ja not_active Expired - Lifetime
-
1996
- 1996-06-25 CA CA002179869A patent/CA2179869C/en not_active Expired - Fee Related
- 1996-06-26 US US08/670,581 patent/US6139761A/en not_active Expired - Lifetime
- 1996-06-28 DE DE69621520T patent/DE69621520T2/de not_active Expired - Lifetime
- 1996-06-28 EP EP96110504A patent/EP0750992B1/de not_active Expired - Lifetime
- 1996-06-28 CN CN96110212A patent/CN1100674C/zh not_active Expired - Fee Related
- 1996-06-28 AT AT96110504T patent/ATE218442T1/de not_active IP Right Cessation
- 1996-06-28 SG SG9610177A patent/SG86983A1/en unknown
- 1996-06-28 EP EP01128741A patent/EP1184179A3/de not_active Withdrawn
- 1996-06-29 KR KR1019960026059A patent/KR100230028B1/ko not_active IP Right Cessation
- 1996-07-01 AU AU56269/96A patent/AU5626996A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN1145305A (zh) | 1997-03-19 |
EP1184179A2 (de) | 2002-03-06 |
ATE218442T1 (de) | 2002-06-15 |
EP0750992A2 (de) | 1997-01-02 |
CN1100674C (zh) | 2003-02-05 |
EP1184179A3 (de) | 2002-07-03 |
CA2179869A1 (en) | 1996-12-31 |
JPH0911479A (ja) | 1997-01-14 |
EP0750992A3 (de) | 1997-08-13 |
US6139761A (en) | 2000-10-31 |
AU5626996A (en) | 1997-01-09 |
KR100230028B1 (ko) | 1999-11-15 |
SG86983A1 (en) | 2002-03-19 |
JP3343875B2 (ja) | 2002-11-11 |
DE69621520T2 (de) | 2003-07-24 |
EP0750992B1 (de) | 2002-06-05 |
KR970000570A (ko) | 1997-01-21 |
CA2179869C (en) | 2001-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69621520D1 (de) | Verfahren zum Herstellen eines Tintenstrahlkopfes | |
DE69034014D1 (de) | Verfahren zum Bilden eines mehrkanaligen linienförmigen Druckkopfkörpers für einen Tintenstrahldruckkopf mit gesteuerter Tropfenerzeugung | |
JP3833989B2 (ja) | インクジェットプリントヘッドの製造方法 | |
DE69231773D1 (de) | Verfahren zum Herstellen eines Tintenstrahlaufzeichnungskopfes | |
ATE196199T1 (de) | Verfahren zur herstellung eines tintenstrahlaufzeichnungskopfes | |
JP2004517755A (ja) | 改良インクジェット・プリントヘッド及びその製造方法 | |
EP0985534A4 (de) | Verfahren zur bildung einer spritzdüse und verfahren zur herstellung eines tintenstrahlkopfes | |
DE69527246D1 (de) | Verfahren zur Herstellung eines Tintenstrahlkopfes, mit diesem Verfahren hergestellter Tintenstrahldruckkopf und Tintenstrahlvorrichtung mit diesem Druckkopf | |
ATE147014T1 (de) | Herstellungsverfahren eines tintenstrahldruckkopfes | |
JP2003127399A5 (de) | ||
DE60045067D1 (de) | Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen | |
KR101107810B1 (ko) | 레이저 가공 장치 및 방법 | |
JP3768648B2 (ja) | 液体吐出方法、液体吐出ヘッド、並びに該液体吐出ヘッドを用いたヘッドカートリッジ及び液体吐出装置 | |
EP0839654A3 (de) | Tintenstrahldruckkopf und Verfahren zu seiner Herstellung | |
JP2003063014A (ja) | インクジェットプリンタ用ノズルプレートの製造方法 | |
JP5112868B2 (ja) | 補助媒体として液体を使用するレーザ微細加工方法及びシステム | |
JP2000255072A5 (de) | ||
CN1408552A (zh) | 热泡式喷墨打印头及其喷嘴板的反向显影法 | |
JP2006130766A (ja) | 液体吐出ヘッド用基板及びその製造方法 | |
JP2008149663A (ja) | 液体吐出ヘッドおよび該ヘッドの製造方法 | |
WO2005045898A3 (en) | Improved ink printhead and method therefor | |
JPS5638270A (en) | Multiple head for ink jet recording | |
US20040135841A1 (en) | Imageable support matrix for pinthead nozzle plates and method of manufacture | |
KR0139987Y1 (ko) | 잉크분사 장치 | |
JP2002096472A (ja) | インクジェットヘッド用ノズル基板の製造方法 |