DE60045067D1 - Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen - Google Patents

Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen

Info

Publication number
DE60045067D1
DE60045067D1 DE60045067T DE60045067T DE60045067D1 DE 60045067 D1 DE60045067 D1 DE 60045067D1 DE 60045067 T DE60045067 T DE 60045067T DE 60045067 T DE60045067 T DE 60045067T DE 60045067 D1 DE60045067 D1 DE 60045067D1
Authority
DE
Germany
Prior art keywords
pressure generating
ink
generating chamber
head
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60045067T
Other languages
English (en)
Inventor
Masato Shimada
Akira Matsuzawa
Yoshinao Miyata
Tsutomu Nishiwaki
Hiroyuki Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP22206499A external-priority patent/JP3546944B2/ja
Priority claimed from JP35087399A external-priority patent/JP3630050B2/ja
Priority claimed from JP2000007152A external-priority patent/JP3478222B2/ja
Priority claimed from JP2000041495A external-priority patent/JP3419376B2/ja
Priority claimed from JP2000085005A external-priority patent/JP2001270114A/ja
Priority claimed from JP2000108264A external-priority patent/JP3379580B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE60045067D1 publication Critical patent/DE60045067D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Facsimile Heads (AREA)
DE60045067T 1999-08-04 2000-08-04 Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen Expired - Lifetime DE60045067D1 (de)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP22180199 1999-08-04
JP22206499A JP3546944B2 (ja) 1999-08-05 1999-08-05 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP32461699 1999-11-15
JP35087399A JP3630050B2 (ja) 1999-12-09 1999-12-09 インクジェット式記録ヘッド及びインクジェット式記録装置
JP2000007152A JP3478222B2 (ja) 2000-01-14 2000-01-14 記録ヘッドの製造方法
JP2000041495A JP3419376B2 (ja) 2000-02-18 2000-02-18 インクジェット式記録ヘッド
JP2000041164 2000-02-18
JP2000085005A JP2001270114A (ja) 2000-03-24 2000-03-24 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP2000108264A JP3379580B2 (ja) 2000-04-10 2000-04-10 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP2000110795 2000-04-12
PCT/JP2000/005251 WO2001010646A1 (fr) 1999-08-04 2000-08-04 Tete d'enregistrement a jet d'encre, procede de fabrication associe et enregistreur a jet d'encre

Publications (1)

Publication Number Publication Date
DE60045067D1 true DE60045067D1 (de) 2010-11-18

Family

ID=27580418

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60045067T Expired - Lifetime DE60045067D1 (de) 1999-08-04 2000-08-04 Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen

Country Status (5)

Country Link
US (1) US6502930B1 (de)
EP (1) EP1116588B1 (de)
AT (1) ATE483586T1 (de)
DE (1) DE60045067D1 (de)
WO (1) WO2001010646A1 (de)

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JP2002103618A (ja) * 2000-01-17 2002-04-09 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
US6796640B2 (en) * 2001-12-20 2004-09-28 Seiko Epson Corporation Liquid-jet head and liquid-jet apparatus
JP2004001338A (ja) * 2001-12-27 2004-01-08 Seiko Epson Corp 液体噴射ヘッド、及び、その製造方法
JP4272381B2 (ja) * 2002-02-22 2009-06-03 パナソニック株式会社 インクジェットヘッド及び記録装置
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
US7111928B2 (en) * 2003-05-23 2006-09-26 Kyocera Corporation Piezoelectric ink jet head
EP1510342B1 (de) * 2003-09-01 2007-03-28 FUJIFILM Corporation Tintenstrahlkopf und Tintenstrahlaufzeichnungsgerät
JP3952048B2 (ja) * 2003-09-29 2007-08-01 ブラザー工業株式会社 液体移送装置及び液体移送装置の製造方法
US20060009038A1 (en) 2004-07-12 2006-01-12 International Business Machines Corporation Processing for overcoming extreme topography
US7354522B2 (en) * 2004-08-04 2008-04-08 Eastman Kodak Company Substrate etching method for forming connected features
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
US7634855B2 (en) * 2004-08-06 2009-12-22 Canon Kabushiki Kaisha Method for producing ink jet recording head
JP2006069152A (ja) * 2004-09-06 2006-03-16 Canon Inc インクジェットヘッド及びその製造方法
US7767103B2 (en) * 2004-09-14 2010-08-03 Lexmark International, Inc. Micro-fluid ejection assemblies
TWI343323B (en) * 2004-12-17 2011-06-11 Fujifilm Dimatix Inc Printhead module
JP2006310235A (ja) * 2005-05-02 2006-11-09 Okutekku:Kk パターン形成装置およびパターン形成装置の製造方法
JP4636378B2 (ja) * 2005-09-16 2011-02-23 富士フイルム株式会社 液体吐出ヘッドおよびその製造方法
US8430466B2 (en) * 2006-01-17 2013-04-30 Seiko Epson Corporation Head drive device of inkjet printer and ink jet printer
US8240798B2 (en) * 2006-01-20 2012-08-14 Seiko Epson Corporation Head drive apparatus of inkjet printer and inkjet printer
KR101153562B1 (ko) * 2006-01-26 2012-06-11 삼성전기주식회사 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
JP4258668B2 (ja) * 2006-05-08 2009-04-30 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5141117B2 (ja) * 2006-07-24 2013-02-13 セイコーエプソン株式会社 液体噴射装置および印刷装置
US8042913B2 (en) * 2006-09-14 2011-10-25 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
US7914125B2 (en) * 2006-09-14 2011-03-29 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
JP4986216B2 (ja) * 2006-09-22 2012-07-25 富士フイルム株式会社 液体吐出ヘッドの製造方法及び画像形成装置
US7731317B2 (en) * 2007-01-12 2010-06-08 Seiko Epson Corporation Liquid jetting device
US7768178B2 (en) * 2007-07-27 2010-08-03 Fujifilm Corporation Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films
JP5046819B2 (ja) 2007-09-13 2012-10-10 キヤノン株式会社 スルーホールの形成方法およびインクジェットヘッド
JP4645668B2 (ja) * 2008-03-24 2011-03-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP4572351B2 (ja) * 2008-03-24 2010-11-04 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
US8579412B2 (en) 2008-05-22 2013-11-12 Fujifilm Corporation Actuatable device with die and integrated circuit element
EP3075540B1 (de) * 2013-11-29 2020-12-30 Hitachi Industrial Equipment Systems Co., Ltd. Auffüllbehälter und tintenstrahlaufzeichnungsvorrichtung damit
TW201625425A (zh) * 2014-09-17 2016-07-16 滿捷特科技公司 具有連接至橫向驅動電路之頂式致動器的噴墨噴嘴裝置
JP7087413B2 (ja) * 2018-01-31 2022-06-21 セイコーエプソン株式会社 圧電デバイス、液体噴射ヘッド、および、液体噴射装置
IT201900007196A1 (it) 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
JP7321785B2 (ja) * 2019-06-17 2023-08-07 キヤノン株式会社 基板および液体吐出ヘッドとそれらの製造方法

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JPS58102774A (ja) 1981-12-14 1983-06-18 Nec Corp インクジエツト記録装置
JPH03295655A (ja) * 1990-04-13 1991-12-26 Seiko Epson Corp 液体噴射ヘッド
JPH04185348A (ja) * 1990-11-17 1992-07-02 Seiko Epson Corp 液体噴射ヘッド及びその製造方法
US5265315A (en) 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JPH0548235A (ja) 1991-08-15 1993-02-26 Omron Corp 回路基板
JP3239274B2 (ja) 1992-02-26 2001-12-17 富士通株式会社 インクジェットヘッドの製造方法
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JPH06143566A (ja) 1992-11-05 1994-05-24 Ricoh Co Ltd インクジェット記録ヘッドおよびその製造方法
JP3230017B2 (ja) 1993-01-11 2001-11-19 富士通株式会社 インクジェットヘッドの製造方法
JPH0848038A (ja) * 1994-08-08 1996-02-20 Canon Inc 液体噴射記録ヘッド用基体及びその製造方法及び液体噴射記録装置
DE69624282T2 (de) * 1995-04-19 2003-07-03 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
JP3407514B2 (ja) 1995-12-08 2003-05-19 セイコーエプソン株式会社 液体吐出装置
JP3525612B2 (ja) 1996-03-12 2004-05-10 セイコーエプソン株式会社 シリコンウェハーの加工方法及びそのシリコンウェハーを用いた電子機器
WO1997034769A1 (fr) * 1996-03-18 1997-09-25 Seiko Epson Corporation Tete a jet d'encre et son procede de fabrication
JP3713921B2 (ja) * 1996-10-24 2005-11-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP3365224B2 (ja) * 1996-10-24 2003-01-08 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP4144043B2 (ja) * 1997-04-16 2008-09-03 セイコーエプソン株式会社 圧電体薄膜素子の製造方法
EP1033037B1 (de) 1997-06-30 2006-12-13 Daewoo Electronics Corporation Dünnschichtgesteuerter spiegel einschliesslich bildungselement und verschiebungselement aus materialien mit gleicher kristallstruktur und wachstumsrichtung
JPH11207954A (ja) 1998-01-23 1999-08-03 Seiko Epson Corp インクジェット式記録ヘッド

Also Published As

Publication number Publication date
EP1116588A4 (de) 2007-07-11
ATE483586T1 (de) 2010-10-15
EP1116588B1 (de) 2010-10-06
WO2001010646A1 (fr) 2001-02-15
EP1116588A1 (de) 2001-07-18
US6502930B1 (en) 2003-01-07

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