DE60119998D1 - Tintenstrahlaufzeichnungskopf, Verfahren zur Herstellung und Tintenstrahlaufzeichnungsgerät - Google Patents

Tintenstrahlaufzeichnungskopf, Verfahren zur Herstellung und Tintenstrahlaufzeichnungsgerät

Info

Publication number
DE60119998D1
DE60119998D1 DE60119998T DE60119998T DE60119998D1 DE 60119998 D1 DE60119998 D1 DE 60119998D1 DE 60119998 T DE60119998 T DE 60119998T DE 60119998 T DE60119998 T DE 60119998T DE 60119998 D1 DE60119998 D1 DE 60119998D1
Authority
DE
Germany
Prior art keywords
pressure generating
jet recording
generating chamber
ink
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60119998T
Other languages
English (en)
Other versions
DE60119998T2 (de
Inventor
Akira Matsuzawa
Masato Shimada
Tetsushi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE60119998D1 publication Critical patent/DE60119998D1/de
Application granted granted Critical
Publication of DE60119998T2 publication Critical patent/DE60119998T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60119998T 2000-01-17 2001-01-12 Tintenstrahlaufzeichnungskopf, Verfahren zur Herstellung und Tintenstrahlaufzeichnungsgerät Expired - Lifetime DE60119998T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2000007651 2000-01-17
JP2000007651 2000-01-17
JP2000020245 2000-01-28
JP2000020245 2000-01-28
JP2000229343 2000-07-28
JP2000229343 2000-07-28
JP2000332557 2000-10-31
JP2000332557A JP2002103618A (ja) 2000-01-17 2000-10-31 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置

Publications (2)

Publication Number Publication Date
DE60119998D1 true DE60119998D1 (de) 2006-07-06
DE60119998T2 DE60119998T2 (de) 2006-09-21

Family

ID=27480928

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60119998T Expired - Lifetime DE60119998T2 (de) 2000-01-17 2001-01-12 Tintenstrahlaufzeichnungskopf, Verfahren zur Herstellung und Tintenstrahlaufzeichnungsgerät

Country Status (5)

Country Link
US (2) US6712456B2 (de)
EP (1) EP1116591B1 (de)
JP (1) JP2002103618A (de)
AT (1) ATE327893T1 (de)
DE (1) DE60119998T2 (de)

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JP3931823B2 (ja) * 2002-03-18 2007-06-20 セイコーエプソン株式会社 圧電アクチュエータ及びその製造方法、並びに、液体噴射ヘッド及びその製造方法
JP4277477B2 (ja) * 2002-04-01 2009-06-10 セイコーエプソン株式会社 液体噴射ヘッド
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP2004066496A (ja) * 2002-08-01 2004-03-04 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
WO2004059836A2 (en) * 2002-08-06 2004-07-15 Charles Stark Draper Laboratory Inc. Piezoelectric mems resonator
JP4059116B2 (ja) * 2003-03-20 2008-03-12 ブラザー工業株式会社 インクジェットヘッド及びその製造方法
JP4563726B2 (ja) * 2003-05-23 2010-10-13 京セラ株式会社 圧電インクジェットヘッド
JP3820589B2 (ja) * 2003-09-26 2006-09-13 富士写真フイルム株式会社 液体吐出ヘッドとその製造方法及びインクジェット記録装置
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
US7465038B2 (en) * 2004-12-16 2008-12-16 Brother Kogyo Kabushiki Kaisha Liquid transporting apparatus and method of manufacturing liquid transporting apparatus
JP5004806B2 (ja) 2004-12-30 2012-08-22 フジフィルム ディマティックス， インコーポレイテッド インクジェットプリント法
JP2007013509A (ja) * 2005-06-30 2007-01-18 Sanyo Electric Co Ltd 音響センサおよびダイアフラム
KR101153562B1 (ko) * 2006-01-26 2012-06-11 삼성전기주식회사 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
US20080061471A1 (en) * 2006-09-13 2008-03-13 Spin Master Ltd. Decorative moulding toy
US7651204B2 (en) * 2006-09-14 2010-01-26 Hewlett-Packard Development Company, L.P. Fluid ejection device
US8042913B2 (en) * 2006-09-14 2011-10-25 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
US7914125B2 (en) 2006-09-14 2011-03-29 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
JP4714889B2 (ja) * 2007-03-16 2011-06-29 国立大学法人 香川大学 シリコン角柱およびその製造法
US7854497B2 (en) * 2007-10-30 2010-12-21 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP5181914B2 (ja) * 2008-08-08 2013-04-10 ブラザー工業株式会社 位置決め方法
US9401471B2 (en) * 2010-09-15 2016-07-26 Ricoh Company, Ltd. Electromechanical transducing device and manufacturing method thereof, and liquid droplet discharging head and liquid droplet discharging apparatus
JP5974486B2 (ja) 2012-01-10 2016-08-23 株式会社リコー 電気−機械変換素子、液体吐出ヘッド、液滴吐出装置および画像形成装置
JP6127491B2 (ja) * 2012-12-12 2017-05-17 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置
JP2015150882A (ja) * 2014-02-19 2015-08-24 京セラ株式会社 流路部材、およびそれを用いた液体吐出ヘッド、ならびに記録装置
US9272514B2 (en) * 2014-04-24 2016-03-01 Ricoh Company, Ltd. Inkjet head that circulates ink
CN104742524B (zh) * 2015-04-21 2016-09-28 京东方科技集团股份有限公司 打印喷头和喷墨打印设备
US10551165B2 (en) * 2015-05-01 2020-02-04 Adarza Biosystems, Inc. Methods and devices for the high-volume production of silicon chips with uniform anti-reflective coatings
JP2018134835A (ja) * 2017-02-23 2018-08-30 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、及び、液体噴射ヘッドの製造方法
JP7087713B2 (ja) * 2018-06-21 2022-06-21 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
JP7434976B2 (ja) * 2020-02-10 2024-02-21 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置

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JP2806386B2 (ja) * 1988-02-16 1998-09-30 富士電機株式会社 インクジェット記録ヘッド
JPH03293141A (ja) 1990-04-11 1991-12-24 Seiko Epson Corp 液体噴射ヘッド
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JP3409918B2 (ja) 1994-05-26 2003-05-26 日産自動車株式会社 赤外線検知素子の製造方法
JP3407514B2 (ja) 1995-12-08 2003-05-19 セイコーエプソン株式会社 液体吐出装置
JPH08298318A (ja) 1995-04-26 1996-11-12 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法
JP3316853B2 (ja) 1995-07-14 2002-08-19 セイコーエプソン株式会社 積層型インクジェット記録ヘッド及びその製造方法並びにこの記録ヘッドを備えたプリンタ
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JP3763175B2 (ja) * 1997-02-28 2006-04-05 ソニー株式会社 プリンタ装置の製造方法
JPH10337875A (ja) 1997-06-06 1998-12-22 Ricoh Co Ltd ノズル形成部材及びその製造方法並びにインクジェットヘッド
JP3019845B1 (ja) 1997-11-25 2000-03-13 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
JP3684815B2 (ja) 1998-02-13 2005-08-17 セイコーエプソン株式会社 インクジェット式記録ヘッドおよびそれらの製造方法
JPH11291495A (ja) 1998-04-10 1999-10-26 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法
ATE303250T1 (de) 1998-06-08 2005-09-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung
US6254223B1 (en) * 1998-10-21 2001-07-03 Samsung Electro-Mechanics Co., Ltd Ink jet printer head actuator and manufacturing method thereof
US6560833B2 (en) * 1998-12-04 2003-05-13 Konica Corporation Method of manufacturing ink jet head
KR100370638B1 (ko) * 1999-07-13 2003-02-05 삼성전기주식회사 무진동판 압전/전왜 마이크로 액츄에이터 및 그 제조방법
ATE483586T1 (de) * 1999-08-04 2010-10-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen

Also Published As

Publication number Publication date
US20040141032A1 (en) 2004-07-22
US7135121B2 (en) 2006-11-14
JP2002103618A (ja) 2002-04-09
DE60119998T2 (de) 2006-09-21
US6712456B2 (en) 2004-03-30
ATE327893T1 (de) 2006-06-15
EP1116591A1 (de) 2001-07-18
EP1116591B1 (de) 2006-05-31
US20010030674A1 (en) 2001-10-18

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