ATE249341T1 - Tintenstrahldruckkopf und tintenstrahlaufzeichnungsvorrichtung - Google Patents

Tintenstrahldruckkopf und tintenstrahlaufzeichnungsvorrichtung

Info

Publication number
ATE249341T1
ATE249341T1 AT00124833T AT00124833T ATE249341T1 AT E249341 T1 ATE249341 T1 AT E249341T1 AT 00124833 T AT00124833 T AT 00124833T AT 00124833 T AT00124833 T AT 00124833T AT E249341 T1 ATE249341 T1 AT E249341T1
Authority
AT
Austria
Prior art keywords
jet recording
ink jet
pressure generating
ink
recording apparatus
Prior art date
Application number
AT00124833T
Other languages
English (en)
Inventor
Masato Shimada
Akira Matsuzawa
Yoshinao Miyata
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP35087399A external-priority patent/JP3630050B2/ja
Priority claimed from JP2000275791A external-priority patent/JP3494219B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE249341T1 publication Critical patent/ATE249341T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
AT00124833T 1999-11-15 2000-11-14 Tintenstrahldruckkopf und tintenstrahlaufzeichnungsvorrichtung ATE249341T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP32461699 1999-11-15
JP35087399A JP3630050B2 (ja) 1999-12-09 1999-12-09 インクジェット式記録ヘッド及びインクジェット式記録装置
JP2000275791A JP3494219B2 (ja) 1999-11-15 2000-09-12 インクジェット式記録ヘッド

Publications (1)

Publication Number Publication Date
ATE249341T1 true ATE249341T1 (de) 2003-09-15

Family

ID=27340065

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00124833T ATE249341T1 (de) 1999-11-15 2000-11-14 Tintenstrahldruckkopf und tintenstrahlaufzeichnungsvorrichtung

Country Status (4)

Country Link
US (1) US6378996B1 (de)
EP (1) EP1101615B1 (de)
AT (1) ATE249341T1 (de)
DE (1) DE60005111T2 (de)

Families Citing this family (54)

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US6631980B2 (en) * 2000-01-19 2003-10-14 Seiko Epson Corporation Liquid jetting head
JP4165005B2 (ja) * 2000-11-22 2008-10-15 ブラザー工業株式会社 インクジェット記録装置の製造方法
JP4340048B2 (ja) * 2001-08-28 2009-10-07 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2003145761A (ja) * 2001-08-28 2003-05-21 Seiko Epson Corp 液体噴射ヘッド及びその製造方法並びに液体噴射装置
WO2003049951A1 (en) * 2001-12-11 2003-06-19 Ricoh Company, Ltd. Drop discharge head and method of producing the same
KR100438836B1 (ko) 2001-12-18 2004-07-05 삼성전자주식회사 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법
US6955420B2 (en) * 2002-05-28 2005-10-18 Brother Kogyo Kabushiki Kaisha Thin plate stacked structure and ink-jet recording head provided with the same
US7052117B2 (en) * 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US6767474B2 (en) * 2002-07-19 2004-07-27 Hewlett-Packard Development Company, L.P. Fluid ejector head having a planar passivation layer
JP3997865B2 (ja) * 2002-08-29 2007-10-24 ブラザー工業株式会社 インクジェットプリンタヘッド
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
JP3928594B2 (ja) * 2003-06-30 2007-06-13 ブラザー工業株式会社 インクジェットヘッド
JP3952048B2 (ja) * 2003-09-29 2007-08-01 ブラザー工業株式会社 液体移送装置及び液体移送装置の製造方法
US7562451B2 (en) * 2003-12-09 2009-07-21 Seiko Epson Corporation Method of manufacturing actuator device for ink jet head
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
US7438395B2 (en) 2004-09-24 2008-10-21 Brother Kogyo Kabushiki Kaisha Liquid-jetting apparatus and method for producing the same
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US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
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JP4774742B2 (ja) * 2005-01-11 2011-09-14 富士ゼロックス株式会社 インクジェット記録ヘッド、及びインクジェット記録装置
JP4645831B2 (ja) * 2005-06-27 2011-03-09 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
US7723232B2 (en) * 2005-06-30 2010-05-25 Texas Instruments Incorporated Full backside etching for pressure sensing silicon
JP4506717B2 (ja) * 2005-07-20 2010-07-21 セイコーエプソン株式会社 液滴吐出ヘッド及び液滴吐出装置
TWI258392B (en) * 2005-11-30 2006-07-21 Benq Corp Droplet generators
CN101370662B (zh) 2006-01-17 2010-08-25 精工爱普生株式会社 喷墨打印机的喷头驱动装置及喷墨打印机
US8240798B2 (en) * 2006-01-20 2012-08-14 Seiko Epson Corporation Head drive apparatus of inkjet printer and inkjet printer
KR101153690B1 (ko) * 2006-02-20 2012-06-18 삼성전기주식회사 잉크젯 헤드의 압전 액츄에이터 및 그 형성 방법
JP2007331137A (ja) * 2006-06-12 2007-12-27 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP5141117B2 (ja) * 2006-07-24 2013-02-13 セイコーエプソン株式会社 液体噴射装置および印刷装置
JP4946685B2 (ja) * 2006-07-24 2012-06-06 セイコーエプソン株式会社 液体噴射装置および印刷装置
US7651204B2 (en) * 2006-09-14 2010-01-26 Hewlett-Packard Development Company, L.P. Fluid ejection device
US7914125B2 (en) 2006-09-14 2011-03-29 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
US8042913B2 (en) * 2006-09-14 2011-10-25 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
JP2008110595A (ja) * 2006-10-03 2008-05-15 Canon Inc インクジェットヘッドの製造方法及びオリフィスプレートの製造方法
JP4333724B2 (ja) * 2006-10-05 2009-09-16 セイコーエプソン株式会社 液滴吐出ヘッド、液滴吐出装置、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法
JP2008132765A (ja) * 2006-10-25 2008-06-12 Seiko Epson Corp 液体噴射装置および印刷装置
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US7731317B2 (en) * 2007-01-12 2010-06-08 Seiko Epson Corporation Liquid jetting device
US7858514B2 (en) * 2007-06-29 2010-12-28 Qimonda Ag Integrated circuit, intermediate structure and a method of fabricating a semiconductor structure
JP5046819B2 (ja) * 2007-09-13 2012-10-10 キヤノン株式会社 スルーホールの形成方法およびインクジェットヘッド
JP4572351B2 (ja) * 2008-03-24 2010-11-04 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP4645668B2 (ja) * 2008-03-24 2011-03-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JP2011520670A (ja) * 2008-05-22 2011-07-21 富士フイルム株式会社 ダイと集積回路素子とを備える駆動可能デバイス
JP5851677B2 (ja) * 2009-08-12 2016-02-03 ローム株式会社 インクジェットプリンタヘッド
JP6061088B2 (ja) * 2013-03-28 2017-01-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6183442B2 (ja) * 2015-12-08 2017-08-23 株式会社リコー 液滴吐出ヘッド及び液滴吐出装置
GB2547951A (en) * 2016-03-04 2017-09-06 Xaar Technology Ltd Droplet deposition head and manifold component therefor
IT201700019431A1 (it) 2017-02-21 2018-08-21 St Microelectronics Srl Dispositivo microfluidico mems di stampa ad attuazione piezoelettrica
US10654269B2 (en) 2017-06-28 2020-05-19 Canon Kabushiki Kaisha Liquid ejection head

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EP2000307B1 (de) * 1997-07-18 2013-09-11 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf, Herstellungsverfahren dafür und Tintenstrahlaufzeichnungsvorrichtung
JP3697850B2 (ja) * 1997-09-04 2005-09-21 セイコーエプソン株式会社 液体噴射記録ヘッド及びその製造方法
JP4296361B2 (ja) * 1999-04-06 2009-07-15 富士フイルム株式会社 インクジェットヘッド、インクジェットプリンタ、及び、インクジェットヘッドの製造方法

Also Published As

Publication number Publication date
EP1101615A1 (de) 2001-05-23
DE60005111T2 (de) 2004-03-25
DE60005111D1 (de) 2003-10-16
EP1101615B1 (de) 2003-09-10
US6378996B1 (en) 2002-04-30

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